JPH10253308A - Contact type displacement measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a contact type displacement measuring device which can be set at specified measuring pressure in response to size of works. SOLUTION: This displacement measuring device is provided with a base 10, a first displacement member 33, a plurality of parallel first plate springs 32a and 32b which support removably the first displacement member 33 while keeping its attitude against a base, a second displacement member 35 having a measuring element 36 which is brought into contact with one surface of the dimensional part of an object to be measured, a plurality of parallel second plate springs 34a and 34b which support removably the second displacement member 35 while keeping its attitude against the first displacement member 33, fixing means 41, 51, 52, 53, and 54 to fix the first displacement member 33 to the base at desired displacement position, and releasing means 42, 61, 62a, 62b, and 63 to change over the second displacement member 35 while it is fixed to the first displacement member 33 or it is kept removable.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method in which two probes come into contact with surfaces on both sides of a dimension portion of a workpiece (workpiece) to be measured, and the displacement of the two probes varies according to the size. The present invention relates to a contact-type dimension measuring device using an electric micrometer or the like that measures the surface position of a work by detecting, and in particular, a displacement member having a probe is displaced by a plurality of leaf springs parallel to a casing (base) of the measuring device. The present invention relates to a contact-type dimension measuring instrument in which an elastic fulcrum that can be held is formed.

[0002]

2. Description of the Related Art An apparatus such as an electric micrometer is widely used as an apparatus for measuring the surface position of a work. The size of a work can be measured by combining two such electric micrometers. By using such a device for measuring the dimensions of a work, the dimensions of the work being processed are measured, and the processing operation is controlled in accordance with the detected value, thereby performing high-precision processing. Therefore, a dimension measuring device used for such a purpose is called an automatic sizing device.

When measuring the position or size of a surface with an electric micrometer or the like, it is necessary to bring the probe into contact with the surface of the work at a predetermined pressure. This contact pressure is called a measurement pressure. Generally, when performing very precise measurement, measurement is performed by reducing the measurement pressure and moving the work at a low speed, but the automatic sizing device for measuring the dimensions of the work being processed as described above. In such a case, the work is rotating at a high speed for processing and a cutting oil is supplied, so that a certain measurement pressure is required.

In a contact-type displacement measuring device such as an electric micrometer, a displacement member provided with a probe that comes into contact with the surface of a work is displaced in accordance with a contact position.
The position of the displacement member is detected. For example, in an electric micrometer, an arm provided with a probe at one end and an iron core at the other end is rotatably supported around a fulcrum, and the arm rotates according to the position of the probe to position the iron core. Changes, and the position change is detected by the differential transformer. In such a mechanism in which the arm can rotate around the fulcrum, there is a problem that the fulcrum part is worn as it is used.
In order to prevent such a problem, a mechanism for forming an elastic fulcrum by a leaf spring is used.

FIG. 1 is a diagram showing a basic configuration of a contact-type displacement measuring device in which an elastic fulcrum is formed by a leaf spring. As shown in FIG. 1, two leaf springs 12a and 12b are attached in parallel to a fixed base 11 fixed to a base. Leaf spring 1
The other ends of 2a and 12b are attached to the displacement member 13. With such a mechanism, the displacement member 13 can be displaced while maintaining the posture with respect to the fixed base 11. The displacement member 13 is provided with a probe 14 and an iron core 15 that come into contact with the surface of the work 100, and the probe 13 is displaced according to the surface position of the work 100, and the displacement member 13 and the iron core 15 are displaced accordingly. I do. A bobbin 21 of a differential transformer is provided around the iron core 15 so that the displacement of the iron core 15 can be detected. Since the differential transformer is widely known, the description of the differential transformer is omitted here. In the above sizing device, such a mechanism is 2
A pair is provided so that two probes come into contact with a portion corresponding to the diameter of the work.

FIG. 2 is a view showing a state when the probe 14 is displaced by the mechanism shown in FIG.
Is small and the probe 14 is at one end of the displacement range (lower limit).
(2) shows a case where the diameter of the work 102 is large and the tracing stylus 14 is largely displaced upward. Reference numeral 10 indicates a base to which the fixing base 11 is attached. In this mechanism, since the leaf springs 12a and 12b form an elastic fulcrum, in the case of FIG.
The force of the spring acts in the downward direction, and the measured pressure increases as shown in (1) of FIG.
Is larger than in the case of The larger the displacement of the tracing stylus 14, the greater the bending of the leaf springs 12a and 12b, and the greater the change in the measured pressure.

[0007]

As described above, in a contact-type displacement measuring device having a mechanism for forming an elastic fulcrum by a leaf spring, the measurement pressure changes according to the displacement. In some cases, the hardness of the workpiece is sufficiently high and the change in the measurement pressure is not a problem.However, if the workpiece is a soft material, problems such as deformation and scratches occur when the measurement pressure is increased, and accurate measurement cannot be performed. . In general, in order to perform highly accurate measurement, it is desirable that the measurement pressure is always constant. To reduce the change in the measurement pressure, the displacement range of the probe may be reduced, but to reduce the displacement range of the probe, it is necessary to change the position of the measuring instrument itself. However, it is complicated to make such adjustments each time the workpiece to be measured is different, and in the case of a sizing device used in a production process, it is necessary to temporarily stop the production process in order to make such settings. There is
There has been a problem of increasing costs. Therefore, there has been a demand for a contact displacement measuring device that can be easily set to a predetermined measurement pressure according to a workpiece, and in particular, can be automatically switched to a predetermined measurement pressure.

The present invention has been made to fulfill such a demand, and has as its object to realize a contact-type displacement measuring instrument which can be set to a predetermined measurement pressure according to the size of a work.

[0009]

In order to achieve the above object, a contact-type displacement measuring device according to the present invention comprises a
The first displacement member has an elastic fulcrum formed by the second leaf spring and the second displacement member is attached to the first displacement member having the elastic fulcrum formed by the second leaf spring. The second displacement member can be fixed to the base at an arbitrary displacement position, and can be switched between a fixed state and a movable state with respect to the first displacement member.

That is, the contact-type displacement measuring device of the present invention comprises:
A base, a first displacement member, fixed to the base and the first displacement member, movably supporting the first displacement member while maintaining a posture with respect to the base, and a moving direction of the first displacement member A plurality of parallel first leaf springs whose planes are substantially perpendicular to the plane, a second displacement member having a probe contacting one surface of a dimension portion of the object to be measured, and a first displacement The second displacement member is fixed to the member and the second displacement member, movably supports the second displacement member while maintaining the posture with respect to the first displacement member, and a plane substantially perpendicular to the moving direction of the second displacement member is formed. A plurality of parallel second leaf springs serving as plate surfaces, fixing means for fixing the first displacement member to the base at an arbitrary displacement position, and a second displacement member for the first displacement member Release means for switching between a fixed state and a movable state.

In the contact type displacement measuring device of the present invention, when measuring works of different sizes, the second displacement member is connected to the first displacement member.
Is fixed at a predetermined position in the displacement range with respect to the displacement member, and then the probe is brought into contact with a target work (master) to move the first displacement member to a displacement position corresponding to the size of the work. In this state, if the first displacement member is fixed and the second displacement member is set to be movable with respect to the first displacement member, a state in which measurement can be performed. At this time, the second displacement member is at a predetermined position in the displacement range, and the measurement pressure is always constant.

When the hardness of the workpiece is high and the change in the measured pressure is not a problem, the second displacement member is fixed to the first displacement member, and the first displacement member is made movable. What is necessary is just to measure. This state is the same as the mechanism for forming the elastic fulcrum by the conventional leaf spring.

[0013]

3 and 4 are views showing a mechanism of a detection head of a contact type displacement measuring device according to an embodiment of the present invention. FIG. 3 shows a state before a fixed position is determined. FIG.
Indicates a state where the fixed position is determined. As shown, in this embodiment, two parallel leaf springs 32a and 32b are used.
Is attached to the housing (base) 10. The other ends of the leaf springs 32a and 32b are attached to a first displacement member 33, and as shown in (2) of FIG.
It can be displaced while maintaining the posture with respect to 1. A rod 51 that expands and contracts by a first actuator 41 provided on the base 10 extends through a hole 39 of the first displacement member 33, and a first clamp member 52 is provided at the tip of the rod 51. . From the other side of the base 10, the rod 53 has a hole 39.
, And a second clamp member 54 is provided at the tip of the rod 53. When the rod 51 is extended, the first clamp member 52 hits the second clamp member 54 and pushes it apart, thereby fixing the first displacement member 33 to the base.

The first displacement member 33 is provided with two parallel leaf springs 34a and 34b.
The other end of “b” is attached to the second displacement member 35, and similarly, the second displacement member 35 can be displaced while maintaining the attitude with respect to the first displacement member 33. A probe 36 is provided at a lower end of the second displacement member 35, and an iron core 37 is further provided. Around the iron core 37, a differential transformer 38 fixed to the base is provided. A fixed shaft 63 for fixing is provided above the second displacement member 35. Further, the first displacement member 33 is fixed to the fixed shaft 6.
It extends to the top of 3, and on the inner wall of the hole provided there,
First and second fixing members 62a and 6 for fixing the fixed shaft 63
2b is provided. Each of the first and second fixing members 62a and 62b is provided with a spring (not shown), and is urged to fix the fixed shaft 63 in the state of FIG. Therefore, in the state of FIG. 3, the second displacement member 35 is fixed to the first displacement member 33,
Is located approximately in the middle of the predetermined displacement range. A second actuator 42 is provided on the base 10 above the first and second fixing members 62a and 62b, from which extendable rods 62 extend. When the rod 62 extends and hits the first and second fixing members 62a and 62b, the first and second fixing members 62a and 62b
It comes out of the.

When the fixed position is determined, as shown in FIG. 3, the rod 51 is contracted to move the first displacement member 33 to the base 1.
0 and the rod 61 is retracted
Is fixed to the first displacement member 33. In this state, a work to be measured, usually a master work, is set so that the probe 36 comes into contact with the work. Thereby, the first displacement member 33 is displaced according to the work. Next, the rod 51 is extended by operating the first actuator 41, and the first displacement member 33 is fixed to the base 10. After that, the rod 61 is extended by operating the second actuator 42, and the first and second rods are extended. The second fixing members 62a and 62
b is detached from the fixed shaft 63. Therefore, the second displacement member 35 is in a movable state, and the second displacement member 35 is located at a substantially middle position of the predetermined displacement range.
A desired measurement pressure is obtained. This state is the state shown in FIG.

If the above operation is performed every time the size of the workpiece changes, measurement can always be performed at a desired measurement pressure. In addition, a series of operations can be performed only by setting the master work and then applying a signal for driving the first and second actuators from the outside, and there is no need to adjust the position of the measuring instrument. Further, in the case of a work having a large hardness and a measurement pressure does not matter, the measurement can be performed in the state of FIG. In this case, although the measurement pressure changes, a work having a large difference in size can be measured as it is.

[0017]

As described above, according to the present invention,
Since a predetermined measurement pressure can be easily set according to the size of the work, accurate measurement can be performed without causing problems such as deformation and scratches even when the work is made of a soft material. . Further, even if the shape of the work changes, complicated work such as adjusting the position of the measuring device is not required, and the work can be easily set to an optimum measuring pressure, so that the efficiency of the production process can be improved. .

[Brief description of the drawings]

FIG. 1 is a diagram showing a basic configuration of a conventional contact displacement measuring device in which an elastic fulcrum is formed by a leaf spring.

FIG. 2 is a view showing a state when a probe is displaced by the mechanism shown in FIG. 1;

FIG. 3 is a diagram illustrating a mechanism of a detection head of the contact displacement measuring device according to the embodiment of the present invention, showing a state before a fixed position is determined.

FIG. 4 is a diagram showing a mechanism of a detection head of the contact displacement measuring device according to the embodiment of the present invention, and shows a state where a fixed position is determined.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Base 31 ... Fixed base 32a, 32b ... 1st leaf spring 33 ... 1st displacement member 34a, 34b ... 2nd leaf spring 35 ... 2nd displacement member 36 ... Probe 37 ... Iron core 41 ... 1st Actuator 42 ... second actuator 52 ... first clamp member 54 ... second clamp member 62a ... first fixed member 62b ... second fixed member 63 ... fixed shaft

 ────────────────────────────────────────────────── ─── Continuing from the front page (72) Inventor Koichi Onizaki 9-7-1 Shimorenjaku, Mitaka-shi, Tokyo Tokyo Seimitsu Co., Ltd.

Claims (1)

[Claims] 1. A base (10), a first displacement member (33), and fixed to the base (10) and the first displacement member (33), and the first displacement member (33) is fixed to the base (10). The base (1
0) while supporting a movable state while maintaining a posture, and a plurality of parallel first leaf springs (32a) having a plate surface whose plane is substantially perpendicular to the moving direction of the first displacement member (33). , 32
b), a second displacement member (35) having a tracing stylus (36) in contact with one surface of the dimensional portion of the object to be measured (100), the first displacement member (33) and the second displacement member. Displacement member (3
5), the second displacement member (35) is movably supported while maintaining a posture with respect to the first displacement member (33), and the second displacement member (35) is moved. A plurality of parallel second leaf springs (34a, 34b) having a plane surface substantially perpendicular to the direction and the first displacement member (33) can be fixed to the base at an arbitrary displacement position. Fixing means (41, 51, 52, 5
, 54), and the second displacement member (35) is connected to the first displacement member (3).
Release means (42, 61, 62a, 62b, 63) for switching between a fixed state and a movable state with respect to 3).
And a contact-type dimension measuring device.