JPH10249295A - Dust collector and dust collection system - Google Patents
Dust collector and dust collection systemInfo
- Publication number
- JPH10249295A JPH10249295A JP5788697A JP5788697A JPH10249295A JP H10249295 A JPH10249295 A JP H10249295A JP 5788697 A JP5788697 A JP 5788697A JP 5788697 A JP5788697 A JP 5788697A JP H10249295 A JPH10249295 A JP H10249295A
- Authority
- JP
- Japan
- Prior art keywords
- dust
- charging plate
- static electricity
- charging
- charging board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Abstract
Description
【0001】[0001]
【発明の属する利用分野】本発明は、例えば厚膜印刷工
程等を有する作業室、特にクリーンルームにおける塵埃
を除去するための集塵装置および集塵システムに関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dust collecting apparatus and a dust collecting system for removing dust in a work room, for example, a clean room, having a thick film printing process or the like.
【0002】[0002]
【従来の技術】厚膜集積回路を形成する厚膜印刷、集積
回路等のベアチップ実装等の電子部品や精密機器等を製
造するには、これらの部品や機器が汚損されないよう室
内で発生する塵埃が除去されているクリーンルーム内で
作業する必要がある。一般的なクリーンルームでは、風
力により排気ダクト等を介してルーム内の塵埃を排出す
る方法や、ウレタン系粘着ゴム等を表面に塗布したロー
ラ式粘着クリーナ等により作業台あるいはベルトコンベ
ヤ等を人手により清掃する等の方法により塵埃の除去が
行われている。2. Description of the Related Art In order to manufacture electronic parts such as thick-film printing for forming a thick-film integrated circuit and bare-chip mounting of an integrated circuit, etc., precision equipment, and the like, dust generated indoors so that these parts and equipment are not contaminated. Need to work in a clean room where the has been removed. In a typical clean room, the workbench or belt conveyor is manually cleaned by a method of discharging dust in the room through an exhaust duct or the like by wind power, or by using a roller-type adhesive cleaner coated on the surface with urethane-based adhesive rubber. For example, dust is removed by such a method.
【0003】[0003]
【発明が解決しようとする課題】しかしながら、風力に
より塵埃を除去する方法ではルーム内の気圧が低下する
ため空調能力を増強する必要があり、また設備等の障害
物があると風の流れが妨害され集塵効果が低下する。ま
た、粘着クリーナを使用する方法では人手によるため煩
わしい作業となるという問題がある。However, in the method of removing dust by wind, the air pressure in the room must be increased due to a decrease in air pressure, and the flow of the wind is obstructed by obstacles such as equipment. And the dust collecting effect is reduced. Further, the method using an adhesive cleaner has a problem that it is troublesome work because it is manually performed.
【0004】本発明は、このような問題を解決するため
低コスト且つ手間の掛からない集塵装置の提供を目的と
する。An object of the present invention is to provide a low-cost and trouble-free dust collector for solving such a problem.
【0005】[0005]
【課題を解決するための手段】上記目的を達成するため
に本発明における集塵装置は、帯電板と、前記帯電板上
を摺動する摺動部と、前記摺動部を駆動させる駆動部と
からなり、前記駆動部により前記摺動部が前記帯電板上
で摺動して該帯電板に静電気を発生させ該帯電板が塵埃
を吸着してなることを特徴とする。To achieve the above object, a dust collector according to the present invention comprises a charging plate, a sliding portion sliding on the charging plate, and a driving portion for driving the sliding portion. The driving unit slides the sliding portion on the charging plate to generate static electricity on the charging plate, and the charging plate absorbs dust.
【0006】また本発明における集塵装置の前記帯電板
はプラスチック材からなり、前記摺動部はプラスチック
材からなるブラシを有する棒状部材であって、前記駆動
部は前記ブラシを円弧方向または水平方向に駆動させる
ものであることを特徴とするものである。また本発明に
おける集塵装置は、前記帯電板には複数の透孔が設けら
れてなることを特徴とするものである。In the dust collector according to the present invention, the charging plate is made of a plastic material, the sliding portion is a rod-shaped member having a brush made of a plastic material, and the driving portion is configured to move the brush in an arc direction or a horizontal direction. Which is characterized by being driven in In the dust collector according to the present invention, the charging plate has a plurality of through holes.
【0007】また本発明における集塵システムは、作業
室と、前記作業室内に設置され所定の工程がなされる精
密部品と、前記精密部品に近接して設けられ摩擦により
静電気を発生させる帯電手段とを備え、前記帯電手段に
よる静電気の発生により前記精密部品に対する塵埃を該
帯電手段が吸着してなることを特徴とする。また本発明
における集塵システムの前記帯電手段は、帯電板と、前
記帯電板上を摺動する摺動部と、前記摺動部を駆動させ
る駆動部とからなり、前記駆動部により前記摺動部が前
記帯電板上で摺動して該帯電板に静電気を発生させてな
るものであることを特徴とする。Further, the dust collecting system according to the present invention comprises a working chamber, a precision part which is installed in the working chamber and performs predetermined steps, and a charging means which is provided close to the precision part and generates static electricity by friction. Wherein the charging means adsorbs dust on the precision component due to generation of static electricity by the charging means. The charging unit of the dust collection system according to the present invention includes a charging plate, a sliding unit that slides on the charging plate, and a driving unit that drives the sliding unit. The portion slides on the charging plate to generate static electricity on the charging plate.
【0008】また本発明における集塵システムの前記帯
電板はプラスチック材からなり、前記摺動部はプラスチ
ック材からなるブラシを有する棒状部材であって、前記
駆動部は前記ブラシを円弧方向または水平方向に駆動さ
せるものであることを特徴とするものである。また本発
明における集塵システムは、前記帯電板には複数の透孔
が設けられてなることを特徴とするものである。In the dust collecting system according to the present invention, the charging plate is made of a plastic material, and the sliding portion is a rod-shaped member having a brush made of a plastic material, and the driving portion drives the brush in an arc direction or a horizontal direction. Which is characterized by being driven in In the dust collection system according to the present invention, the charging plate is provided with a plurality of through holes.
【0009】[0009]
【実施例】以下図面を用いて本発明の一実施例を説明す
る。図1は、本実施例に係る集塵装置を設置したクリー
ンルームの模式的斜視図であり、図2は、本発明の一実
施例に係る集塵装置の前面を示す斜視図、図3は、本実
施例に係る集塵装置の裏面を示す斜視図である。An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic perspective view of a clean room in which a dust collecting device according to the present embodiment is installed, FIG. 2 is a perspective view showing a front surface of the dust collecting device according to one embodiment of the present invention, and FIG. It is a perspective view showing the back of the dust collector concerning this example.
【0010】1は、厚膜印刷工程、ベアチップ実装工程
等を有し、加工される厚膜集積回路2等の電子部品に塵
埃が付着しないように、集塵装置3が設置されたクリー
ンルーム(作業台)である。クリーンルーム1内では所
定の空調がなされ、更に厚膜印刷やベアチップ実装が行
われる厚膜集積回路2の近くに集塵装置3が数箇所にわ
たって設置されている。そして、図2に示すように集塵
装置3は、帯電板4、帯電板の支持棒5、摺動部6およ
び摺動部駆動装置7等により構成されている。1 includes a thick film printing process, a bare chip mounting process, and the like, and a clean room (work) in which a dust collecting device 3 is installed so that dust does not adhere to electronic components such as a thick film integrated circuit 2 to be processed. Table). In the clean room 1, predetermined air conditioning is performed, and dust collecting devices 3 are installed at several places near a thick film integrated circuit 2 on which thick film printing and bare chip mounting are performed. As shown in FIG. 2, the dust collecting device 3 includes a charging plate 4, a support bar 5 for the charging plate, a sliding portion 6, a sliding portion driving device 7, and the like.
【0011】帯電板4は静電気を発生し易いプラスチッ
ク製の板材で形成されており、多数の透孔41(例え
ば、マトリックス的に)が設けられている。帯電板4の
支持棒42は、帯電板4に帯電した静電気が漏洩しない
ように絶縁材で形成され、帯電板4を両側面より支えて
いる。摺動部5は、棒状の形態を有し、帯電板4の裏面
上を擦るように摺動するブラシの毛51とブラシの柄5
2より構成されている。ブラシの毛51はプラスチック
材により形成されており、ブラシの柄52は静電気が漏
洩しないように絶縁材で形成されている。そして、摺動
部5のブラシの毛51、ブラシの柄52を駆動させる駆
動装置6は、図3に示すようにモータ等で構成され、ブ
ラシの柄52の一端(図示下端)に取り付けられてい
る。The charging plate 4 is formed of a plastic plate material that easily generates static electricity, and has a large number of through holes 41 (for example, in a matrix). The support bar 42 of the charging plate 4 is formed of an insulating material so that static electricity charged on the charging plate 4 does not leak, and supports the charging plate 4 from both sides. The sliding portion 5 has a rod-like shape, and the bristle 51 of the brush and the handle 5 of the brush that slide on the back surface of the charging plate 4.
2 is comprised. The bristles 51 of the brush are formed of a plastic material, and the handle 52 of the brush is formed of an insulating material so that static electricity does not leak. The driving device 6 for driving the brush bristles 51 and the brush handle 52 of the sliding portion 5 is composed of a motor or the like as shown in FIG. 3, and is attached to one end (the lower end in the figure) of the brush handle 52. I have.
【0012】次に、上記構成による集塵装置の操作につ
いて説明する。集塵装置3は、摺動部5の下端にモータ
6を取り付け、摺動部5のブラシの毛51が帯電板4の
裏面を摺動するように取り付ける。そして、印刷工程等
が行われる時には、図示せぬスイッチを操作すれば、モ
ータ6の回動する駆動力により摺動部5が帯電板4上を
擦りながら左右に摺動する(矢印A)。これは、自動車
のワイパーがフロントガラスを摺動するように、摺動部
5の下端を中心として円弧を描くように摺動部5が左右
に回動するものである。なお、この駆動は帯電板4の帯
電能力にあわせて連続的に、あるいは間欠的に行われ
る。Next, the operation of the dust collecting apparatus having the above configuration will be described. In the dust collector 3, the motor 6 is attached to the lower end of the sliding part 5, and the brush bristles 51 of the sliding part 5 are attached so as to slide on the back surface of the charging plate 4. Then, when a printing process or the like is performed, if a switch (not shown) is operated, the sliding portion 5 slides left and right while rubbing on the charging plate 4 by the rotating driving force of the motor 6 (arrow A). This is such that the sliding part 5 rotates right and left so as to draw an arc around the lower end of the sliding part 5 so that the wiper of the automobile slides on the windshield. This driving is performed continuously or intermittently in accordance with the charging ability of the charging plate 4.
【0013】厚膜印刷工程の作業台あるいはベルトコン
ベヤ等の作業場周辺において、帯電板4の表面が加工さ
れる厚膜集積回路2に近傍で対向するように設置されて
いる。そして、プラスチックの帯電板4と摺動部5のブ
ラシの毛51が摩擦されると帯電板4上に静電気が発生
するので、厚膜集積回路2に付着しようとする塵埃は帯
電板4に吸い寄せられ、該表面に付着する。従って、厚
膜集積回路2への塵埃の付着は防止されることになる。Around a work table such as a work table or a belt conveyor in a thick film printing process, the charging plate 4 is installed so as to face the thick film integrated circuit 2 to be processed in the vicinity. When the plastic charging plate 4 and the bristle 51 of the brush of the sliding portion 5 are rubbed, static electricity is generated on the charging plate 4, so that dust adhering to the thick film integrated circuit 2 is attracted to the charging plate 4. And adhere to the surface. Therefore, adhesion of dust to the thick film integrated circuit 2 is prevented.
【0014】なお、帯電板4には多数の透孔41が設け
られているため摩擦面積が拡大され、また帯電板4の表
面側がより強力に帯電される。これにより、吸着能力は
向上する。また、帯電板4に付着した塵埃は、定期的に
掃除機等により除去するものとする。上述したような本
実施例によれば、帯電し易いプラスチック材を摩擦する
ことにより静電気を発生させ、浮遊する塵埃を吸着させ
ることができる。Since the charging plate 4 is provided with a large number of through holes 41, the friction area is enlarged, and the surface of the charging plate 4 is more strongly charged. Thereby, the adsorption capacity is improved. Further, dust adhering to the charging plate 4 is periodically removed by a vacuum cleaner or the like. According to the present embodiment as described above, static electricity can be generated by rubbing an easily charged plastic material, and floating dust can be adsorbed.
【0015】なお、本実施例では帯電板4を摺動する摺
動部5に直接モータ6を取り付け摺動部5を円弧を描く
ように摺動させたが、駆動装置31を図4に示すように
ロッドレス型エアシリンダ61等を使用し摺動部にスラ
イドガイド7を設け、摺動部8を左右に(矢印B)摺動
させ帯電させることも可能である。また、帯電板4の裏
面を粗めにして、ブラシの毛51と裏面との摩擦係数を
大きくし、帯電能力を向上させるようにしても良い。In this embodiment, the motor 6 is directly attached to the sliding portion 5 for sliding the charging plate 4, and the sliding portion 5 is slid so as to draw an arc. The driving device 31 is shown in FIG. As described above, the slide guide 7 may be provided on the sliding portion using the rodless air cylinder 61 or the like, and the sliding portion 8 may be slid left and right (arrow B) to charge. Also, the back surface of the charging plate 4 may be roughened to increase the friction coefficient between the bristles 51 of the brush and the back surface, thereby improving the charging ability.
【0016】[0016]
【発明の効果】以上説明したように本発明による集塵装
置およびシステムによれば、作業室、特にクリーンルー
ム内の吸排気バランスを考慮することなく室内の空調が
可能となり、また人手を煩わすことも少なくして、静電
気の発生し易いプラスチックの摩擦により容易に室内の
塵埃を除去することができる。As described above, according to the dust collecting apparatus and the system according to the present invention, it is possible to air-condition a room without considering the intake / exhaust balance in a work room, especially in a clean room, and it is not necessary to perform labor. At least, dust in the room can be easily removed by friction of plastic, which easily generates static electricity.
【図1】本実施例に係る集塵装置を設置したクリーンル
ームの模式的斜視図である。FIG. 1 is a schematic perspective view of a clean room in which a dust collector according to the present embodiment is installed.
【図2】本実施例に係る集塵装置の前面を示す斜視図で
ある。FIG. 2 is a perspective view showing a front surface of the dust collecting apparatus according to the embodiment.
【図3】本実施例に係る集塵装置の裏面を示す斜視図で
ある。FIG. 3 is a perspective view showing a back surface of the dust collecting apparatus according to the embodiment.
【図4】他の実施例に係る集塵装置の裏面を示す斜視図
である。FIG. 4 is a perspective view showing a back surface of a dust collector according to another embodiment.
1・・・・クリーンルーム 2・・・・厚膜集積回路 3・・・・集塵装置 1 ··· Clean room 2 ··· Thick film integrated circuit 3 ··· Dust collector
Claims (7)
部と、前記摺動部を駆動させる駆動部とからなり、前記
駆動部により前記摺動部が前記帯電板上で摺動して該帯
電板に静電気を発生させ該帯電板が塵埃を吸着してなる
ことを特徴とする集塵装置。1. A charging plate, comprising: a sliding portion that slides on the charging plate; and a driving portion that drives the sliding portion, wherein the driving portion slides the sliding portion on the charging plate. A dust collector, wherein the dust is attracted by moving the charged plate to generate static electricity.
前記摺動部はプラスチック材からなるブラシを有する棒
状部材であって、前記駆動部は前記ブラシを円弧方向ま
たは水平方向に駆動させるものであることを特徴とする
請求項1記載の集塵装置。2. The charging plate is made of a plastic material,
The dust collector according to claim 1, wherein the sliding portion is a rod-shaped member having a brush made of a plastic material, and the driving portion drives the brush in an arc direction or a horizontal direction.
なることを特徴とする請求項1記載の集塵装置。3. The dust collector according to claim 1, wherein a plurality of through holes are provided in the charging plate.
の工程がなされる精密部品と、前記精密部品に近接して
設けられ摩擦により静電気を発生させる帯電手段とを備
え、前記帯電手段による静電気の発生により前記精密部
品に対する塵埃を該帯電手段が吸着してなることを特徴
とする集塵システム。4. A work chamber, a precision part installed in the work chamber and subjected to a predetermined process, and a charging means provided in close proximity to the precision part and generating static electricity by friction, wherein the charging means A dust collection system, wherein the charging means adsorbs dust on the precision component due to generation of static electricity.
上を摺動する摺動部と、前記摺動部を駆動させる駆動部
とからなり、前記駆動部により前記摺動部が前記帯電板
上で摺動して該帯電板に静電気を発生させてなるもので
あることを特徴とする請求項4記載の集塵システム。5. The charging means comprises: a charging plate; a sliding portion that slides on the charging plate; and a driving portion that drives the sliding portion, wherein the driving portion drives the sliding portion. 5. The dust collection system according to claim 4, wherein the dust collection system slides on the charging plate to generate static electricity on the charging plate.
前記摺動部はプラスチック材からなるブラシを有する棒
状部材であって、前記駆動部は前記ブラシを円弧方向ま
たは水平方向に駆動させるものであることを特徴とする
請求項5記載の集塵システム。6. The charging plate is made of a plastic material,
The dust collecting system according to claim 5, wherein the sliding portion is a rod-shaped member having a brush made of a plastic material, and the driving portion drives the brush in an arc direction or a horizontal direction.
なることを特徴とする請求項5記載の集塵システム。7. The dust collection system according to claim 5, wherein the charging plate has a plurality of through holes.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5788697A JPH10249295A (en) | 1997-03-12 | 1997-03-12 | Dust collector and dust collection system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5788697A JPH10249295A (en) | 1997-03-12 | 1997-03-12 | Dust collector and dust collection system |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH10249295A true JPH10249295A (en) | 1998-09-22 |
Family
ID=13068482
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5788697A Withdrawn JPH10249295A (en) | 1997-03-12 | 1997-03-12 | Dust collector and dust collection system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH10249295A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010224340A (en) * | 2009-03-25 | 2010-10-07 | Seiko Epson Corp | Wiping device of functional liquid droplet discharge head and droplet discharge device provided with the same |
US9267899B2 (en) | 2013-07-25 | 2016-02-23 | Samsung Display Co.,Ltd | Contaminant measurement substrate, apparatus and method for fabricating substrate using the same |
JP6301033B1 (en) * | 2017-06-29 | 2018-03-28 | 三菱電機株式会社 | Dust collector and air conditioner |
CN108032369A (en) * | 2018-02-07 | 2018-05-15 | 靖江市亚通胶粘制品有限公司 | A kind of OCA optical cements die cutting method |
CN113900330A (en) * | 2021-09-29 | 2022-01-07 | 王小翠 | Projector based on holographic projection technology |
CN115161821A (en) * | 2022-08-16 | 2022-10-11 | 含山县光乾纺织有限公司 | A handle case for weaving equipment weaving dirt |
-
1997
- 1997-03-12 JP JP5788697A patent/JPH10249295A/en not_active Withdrawn
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010224340A (en) * | 2009-03-25 | 2010-10-07 | Seiko Epson Corp | Wiping device of functional liquid droplet discharge head and droplet discharge device provided with the same |
US9267899B2 (en) | 2013-07-25 | 2016-02-23 | Samsung Display Co.,Ltd | Contaminant measurement substrate, apparatus and method for fabricating substrate using the same |
TWI631593B (en) * | 2013-07-25 | 2018-08-01 | 三星顯示器有限公司 | Contaminant measurement substrate, and apparatus and method for fabricating substrate using the same |
JP6301033B1 (en) * | 2017-06-29 | 2018-03-28 | 三菱電機株式会社 | Dust collector and air conditioner |
CN108032369A (en) * | 2018-02-07 | 2018-05-15 | 靖江市亚通胶粘制品有限公司 | A kind of OCA optical cements die cutting method |
CN113900330A (en) * | 2021-09-29 | 2022-01-07 | 王小翠 | Projector based on holographic projection technology |
CN115161821A (en) * | 2022-08-16 | 2022-10-11 | 含山县光乾纺织有限公司 | A handle case for weaving equipment weaving dirt |
CN115161821B (en) * | 2022-08-16 | 2023-08-04 | 含山县光乾纺织有限公司 | A handle case for weaving equipment weaving dirt |
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Date | Code | Title | Description |
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A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20040601 |