JPH10221256A - Plant inspection device and method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To miniaturize a device by mounting an amplification type MOS (CMOS) composite camera on a monorail type inspection robot following a magnet piston moved in a three-dimensionally installed hollow pipe. SOLUTION: The monorail type inspection robot 1 of a plant inspection device is constituted of a travel vehicle 4 traveled on a guide rail 3 fitted with a hollow pipe 2 and a CMOS composite camera 5 fixed to its bottom face. The travel vehicle 4 is provided with an electromagnetic attracting structure 9 corresponding to a magnet piston 17 driven by compressed air in the pipe 2, and it is moved to follow the piston 17. The composite camera 5 is provided with five radial CMOS cameras 10, for example, a control device 11 synthesizing and transmitting the obtained signal, and an antenna 12. The image pickup element section 14 of each camera 10 is arranged with a CMOS sensor constituted of a light receiving element section, a vertical operation circuit section, a horizontal readout circuit section, and a noise suppression section on one chip, for example.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection apparatus and an inspection method for inspecting various plants such as a nuclear power plant while automatically driving an inspection vehicle by remote control, and particularly to an inspection for a narrow place. The present invention relates to a plant inspection apparatus and a method for downsizing the plant.

[0002]

2. Description of the Related Art In general, in a nuclear power plant, automation of various inspection works is promoted in order to reduce radiation exposure of workers and improve plant operation rate. A monorail type inspection device has been adopted as a means of this kind of automation.

A traveling vehicle type inspection robot used in the monorail type inspection device travels along a complicated and narrow inspection route in a nuclear power plant.
Since the inspection is performed, it is necessary to have a traveling cross-sectional area as small as possible (a cross-sectional area in a plane perpendicular to the traveling route). Therefore, based on a rail with a U-shaped cross section, one leg of the rail is extended and protruded in the opposite direction to serve as a trolley wire support, and a trolley wire is attached to the lower surface, and the rail with a U-shaped cross section is a monorail The monorail-type inspection robot is configured to be able to travel three-dimensionally by frictional force between the rails by pinching between the wheels of the type inspection robot, and power and signals are obtained from the trolley wire by contact current collection. Is configured.

[0004] In general industry, as a transfer device used for connection between respective processes, removal and supply of parts from a processing machine, and three-dimensional transfer of parts on an assembly line, a transferred product is gripped by a chuck and a magnet is attached. There is an air-driven three-dimensional transfer device that stores a piston in a cylinder tube, moves the piston by air pressure, and moves a transfer device provided outside the cylinder tube by the magnetic force of a magnet of the piston.

[0005]

However, the monorail inspection robot used in the conventional nuclear power plant has a small CCD when the inspection place is changed.
The structure becomes large to change the direction of the camera mechanically,
The required power is also increasing. Therefore, there is a limit to the size and weight reduction of the monorail inspection robot,
The miniaturization of the rail structure also has a limit in strength, and there is a problem that the work of installing the rail is troublesome and time-consuming.

[0006] The transfer distance of a transfer device used in the general industry is limited, so that when used in a nuclear power plant, the transfer distance must be increased. In addition, since it is for transfer between two points, it is necessary to provide a control system for performing inspection at an arbitrary position in the middle, and there is a problem that the apparatus becomes large.

The present invention has been made in view of the above circumstances, and uses a small, low power consumption camera in place of a small CCD camera, eliminating the drive mechanism of the monorail type inspection robot from the inspection robot. It is an object of the present invention to provide a plant inspection device and a method for reducing the size of a monorail structure and the size of a monorail structure.

[0008]

According to a first aspect of the present invention, there is provided a plant inspection apparatus comprising: a hollow pipe installed three-dimensionally in a plant; A monorail inspection robot that is magnetically attracted in a non-contact manner with the magnet piston and that can move three-dimensionally following the movement of the magnet piston, and a CMOS camera attached to the monorail inspection robot. A plant inspection apparatus comprising: a CMOS compound camera capable of taking a picture in a hemispherical direction by combining a plurality of cameras; and a control device attached to the monorail inspection robot and wirelessly transmitting measurement and video signals obtained from the CMOS camera. Wherein the imaging device section of the CMOS camera includes a photo die on a semiconductor substrate. Imaging area in which unit cells including the memory cells are arranged in a two-dimensional matrix, vertical selection means for selecting a readout row of the imaging area, and a column for reading out a detection signal of a photodiode corresponding to the selected row. A plurality of vertical signal lines arranged in the direction, and a horizontal transistor that sequentially reads detection signals from these vertical signal lines to horizontal signal lines arranged in the row direction, the vertical signal line and the horizontal selection transistor, And a noise removing circuit for converting a voltage appearing in the vertical signal line into electric charges and subtracting the electric charges in the electric charge region to suppress noise.

According to a second aspect of the present invention, a magnet piston is inserted into a hollow pipe installed in a plant, and compressed air is introduced into the hollow pipe to move the magnet piston. A monorail type inspection robot that is magnetically attracted in a non-contact manner and moves three-dimensionally following the movement of the magnet piston, and a CMOS in which a plurality of CMOS cameras are combined.
While taking a picture in a hemispherical direction with a compound camera and transmitting the measurement and video signals obtained from the CMOS camera to a fixed station by radio, the fixed station obtains the video signal and outputs and projects it on a display device for inspection work. Is performed.

According to a third aspect of the present invention, in the plant inspection apparatus according to the first aspect, the CMOS compound camera has one C
A MOS central camera is arranged, and a plurality of CMOS peripheral cameras are equally arranged on the hemisphere around the MOS central camera.

According to a fourth aspect of the present invention, in the plant inspection device according to the first or third aspect, a stereoscopic CMO is provided by mounting two CMOS compound cameras each including a plurality of CMOS cameras.
It is characterized in that it is configured as an S camera.

According to a fifth aspect of the present invention, in the plant inspection device according to the first or third aspect, the CMOS camera opposed to the CMOS peripheral camera is disposed so as to coincide with the front-rear direction of the monorail inspection robot. I do.

According to a sixth aspect of the present invention, in the plant inspection apparatus according to the first aspect, an image photographed by the CMOS compound camera is converted into hemispherical digital image data, and a field of view and a field of view are arbitrarily extracted electronically. The projection is projected on the display device of the fixed station in a plan view or a stereoscopic view.

According to a seventh aspect of the present invention, in the plant inspection apparatus according to the first aspect, a plurality of ball valves driven by an ultrasonic motor are incorporated in the hollow pipe, and the state of the compressed air in the hollow pipe is controlled by driving the ball valves. It is characterized by being variable.

According to an eighth aspect of the present invention, in the plant inspection apparatus according to the first aspect, the monorail inspection robot has fixed wheels supported at three or more points with respect to the hollow pipe, and a rotation speed attached to these wheels. Detecting means;
Means for controlling the flow velocity of the air flow inside the hollow pipe based on a signal from the rotation speed detecting means.

According to a ninth aspect of the present invention, in the plant inspection apparatus according to the first aspect, an electromagnet is disposed at an arbitrary position outside the hollow pipe, and means for controlling whether or not the electromagnet is excited is provided. The robot is stopped at an arbitrary position.

According to a tenth aspect of the present invention, in the plant inspection apparatus according to the first aspect, the CMOS camera has a half mirror disposed behind the condenser lens, and an infrared filter and an infrared CMOS image pickup on one optical axis through the half mirror. An element unit is provided, and a CMOS imaging element unit is provided on the other optical axis.

An eleventh aspect of the present invention is the plant inspection device according to the first aspect, wherein a projection is provided on an outer peripheral portion of the hollow pipe, and a wheel engaged and supported by the projection is attached to a monorail inspection robot. I do.

According to a twelfth aspect of the present invention, in the plant inspection apparatus according to the first aspect, four CMOs are provided on a spherical portion of the quarter-sphere.
A CMOS compound camera to which the S camera is attached is attached before and after the monorail inspection robot.

According to a thirteenth aspect, in the plant inspection apparatus according to the first aspect, means for selecting only the CMOS camera facing the direction of the inspection target when performing the inspection work with the CMOS compound camera is provided. .

According to a fourteenth aspect, in the plant inspection device according to the first aspect, the control unit attaches an azimuth angle and an elevation angle to each pixel of each CMOS camera when synthesizing an image of each CMOS camera, and overlaps each other. Is performed.

According to a fifteenth aspect, a guide rail three-dimensionally installed in a plant and made of a C-shaped structural member, an ultrasonic vibrator provided inside the guide rail, and movably supported by the guide rail. A monorail-type inspection robot, and a movable body provided on the monorail-type inspection robot and pressed against the ultrasonic vibrator, and the monorail-type inspection robot is pressed with the movable body pressed against the ultrasonic vibrator. The monorail type inspection robot is configured to transfer along the guide rail,
A plant inspection apparatus comprising: a CMOS compound camera capable of taking a picture in a hemispherical direction by combining a plurality of cameras; and a control device for wirelessly transmitting measurement and video signals obtained from the CMOS camera, wherein the CMOS An imaging element section of the camera includes: an imaging region in which unit cells including photodiodes are arranged in a matrix on a semiconductor substrate in a two-dimensional matrix; vertical selection means for selecting a readout row of the imaging region; And a plurality of vertical signal lines arranged in a column direction for reading out a detection signal of a photodiode corresponding to the above, and a horizontal transistor for sequentially reading out a detection signal from these vertical signal lines to a horizontal signal line arranged in a row direction. Between the vertical signal line and the horizontal selection transistor, converts a voltage appearing on the vertical signal line into a charge, and performs subtraction in a charge region. Characterized by comprising providing a noise reduction circuit for suppressing noise by.

According to a sixteenth aspect of the present invention, in the plant inspection apparatus according to the fifteenth aspect, the CMOS compound camera is mounted on the side, bottom, and front and rear surfaces of the monorail inspection robot so as to surround the guide rail. And

According to a seventeenth aspect, in place of the ultrasonic vibrator provided inside the guide rail according to the fifteenth aspect and the movable body pressed against the ultrasonic vibrator, the ultrasonic vibrator is attached to the outside of the guide rail. A high-frequency current cable, and an induction power supply device attached to the monorail type inspection robot and supplied with power from the high-frequency current cable in a non-contact manner.

The eighteenth aspect of the present invention provides a transparent hollow pipe installed three-dimensionally in a plant, a pipe-running inspection robot that moves inside the transparent hollow pipe by compressed air, and a circumference of the pipe-running inspection robot. C provided in multiple directions
A plant inspection device comprising: a MOS camera; and a control device attached to the traveling inspection robot in a pipe and wirelessly transmitting measurement and video signals obtained from the CMOS camera, wherein an image sensor unit of the CMOS camera is provided. Is an imaging area in which unit cells including photodiodes are arranged in a two-dimensional matrix on a semiconductor substrate, vertical selecting means for selecting a readout row of the imaging area, and a photodiode corresponding to the selected row. A plurality of vertical signal lines arranged in the column direction for reading out the detection signal, and horizontal transistors sequentially reading out the detection signals from these vertical signal lines to horizontal signal lines arranged in the row direction, Between the horizontal selection transistor and the horizontal selection transistor, by converting the voltage appearing on the vertical signal line into electric charge and subtracting the electric charge in the electric charge region. Characterized by comprising providing a noise reduction circuit which suppresses.

A nineteenth aspect of the present invention is the plant inspection apparatus according to the eighteenth aspect, wherein the transparent hollow pipe is a transparent pipe only at a place where inspection is desired, and a metal pipe is used at other portions.

According to a twentieth aspect of the present invention, a string is connected to the in-pipe traveling inspection robot in place of the compressed air for moving the in-pipe traveling inspection robot according to the eighteenth aspect, and the string is connected to both ends of the transparent hollow pipe. The traveling inspection robot is transported along the inner surface of the transparent hollow pipe by winding or unwinding by a driving device installed in the pipe.

According to a twenty-first aspect of the present invention, an ultrasonic vibrator is attached to the inner side of the transparent hollow pipe on the side where the transparent hollow pipe is attached to the structure, instead of the compressed air for moving the inspection robot in the pipe. On the other hand, a movable body pressed against the ultrasonic vibrator is provided in the pipe traveling type inspection robot, and the pipe traveling type inspection robot is placed on the inner surface of the transparent hollow pipe while the movable body is pressed against the ultrasonic vibrator. It is configured to be transported along.

According to a twenty-second aspect of the present invention, in the plant inspection apparatus according to the twentieth aspect, a transparent hollow pipe having a driving device for winding and unwinding a string connected to a pipe traveling type inspection robot attached to both end surfaces thereof can be used. It is characterized by a portable construction.

In a twenty-third aspect of the present invention, a rail having a U-shaped cross-section extending in the opposite direction and extending in the opposite direction to form a trolley wire support portion, and a trolley wire supported on the lower surface thereof, and a leg piece below the rail. A towing vehicle that includes a current collector supported by wheels and cooperates with the trolley wire, and that generates a traction force by power transmitted to a horizontal wheel that clamps the rail; and a connecting portion having freedom in all directions with the towing vehicle. The vehicle includes a vertical wheel similar to that described above, a horizontal wheel that guides traveling by sandwiching a center piece of the rail, and a traveling vehicle including an accompanying vehicle equipped with various circuits, and a driving vehicle for the towing vehicle. A CMOS camera for inspection supported by a motor and a camera platform is mounted.

A twenty-fourth aspect is a CMOS camera, a CMOS
An anomaly detection device body including an infrared camera and a distance meter mounted on a camera platform so that images can be obtained from the same viewpoint, an image processing circuit for processing an image of the CMOS camera, the CMOS infrared camera, and the distance A signal that is sent to and received from the meter, and whether the abnormality detection device main body is directly facing the detection target, whether there is a temperature distribution abnormality in the detection target, and a process of specifying a temperature distribution abnormality location. A detection processing control circuit.

A twenty-fifth aspect of the present invention provides a pneumatic pipe made of a non-magnetic material having at least a portion corresponding to a check point made of a transparent material, a means for applying air pressure to the pipe from an arbitrarily selected end, and A CMOS having a fixed portion that is positioned and closely engaged with the pipe, and a rotating portion whose both ends are rotatably supported by the fixed portion, and in which the optical axis matches the diameter of the rotating portion. A camera, a camera control unit for scanning the camera, an inspection car equipped with a signal transmitter for wirelessly transmitting an image taken by the camera and a battery serving as a power supply for the camera, and a rotating body having the same polarity on the outer peripheral surface. A pair of permanent magnets arranged in contact with the magnetic poles and spaced apart in the axial direction of the rotating part, and permanent magnets arranged in such a manner that the two fixed parts are in contact with magnetic poles of opposite polarity on the inner peripheral surface of the fixed part. When, A plurality of sensors disposed along the pipe near the inspection point and detecting the position of the inspection vehicle in response to the magnetism of the permanent magnet of the inspection vehicle; and a permanent magnet provided near the inspection point and in the fixed portion. An electromagnet for stopping the inspection car in cooperation with the electromagnet provided in the vicinity of the inspection point and for rotating the rotation section in cooperation with the permanent magnet in the rotation section, and for moving, stopping, and rotating the inspection car. And a control panel for controlling rotation and the like.

[0033]

Embodiments of the present invention will be described below with reference to the drawings.

[First Embodiment] FIG. 1 is a sectional view showing a first embodiment of a plant inspection device according to the present invention.

(Configuration of First Embodiment) As shown in FIG. 1, a monorail inspection robot 1 is installed three-dimensionally in various plants such as a nuclear power plant, and a hollow pipe 2 is integrally formed. Traveling vehicle 4 attached to the guide rail 3
And a CMOS (amplified MOS) composite camera 5 fixed to the bottom surface of the traveling vehicle 4.

The traveling vehicle 4 has a case 6.
Can be divided into two and are integrally configured via a connection structure 7,
Inside the case 6, each is rotatably fixed to the side surface and the bottom surface of the T-shaped portion 3 a of the guide rail 3.
A pair of wheels 8 and an electromagnetic attraction structure 9 attached so as to surround the pipe 2 of the guide rail 3 are provided.

The CMOS composite camera 5 includes five CMOS cameras 10 arranged in the respective radial directions,
A control device (including a storage battery unit) 11 for synthesizing an image signal of the MOS camera 10 into an image in a radiation (hemispherical) direction and transmitting the image signal as a digital signal, and an image signal of the CMOS camera 10 via the control device 11 Antenna 1 for transmitting signals
2 is provided. The CMOS camera 10 has a condenser lens 13 disposed on the front side, and an imaging element unit 14 disposed behind the condenser lens 13.

The image pickup device 14 includes a CMOS sensor, a timing generator, a signal converter for converting an analog signal to a digital signal, and a CMOS sensor comprising a light receiving element, a vertical operation circuit, a horizontal readout circuit, and a noise suppressor. A signal processing LSI and the like are arranged on one chip.

Further, the control device 11 performs connection between the images captured by the five CMOS cameras 10 and deletion of the overlapped portion, and performs processing to generate a radiating (hemispherical) digital image signal. The video signal is converted into a radio wave (or laser light) signal and transmitted. Note that the control device 11 has five CMOS cameras 10
May be individually transmitted and the receiving side may perform processing of synthesizing the video, or may be individually projected on the monitor television without synthesizing the video.

Guide rail 3 in which pipe 2 is integrally formed
Is fixed to a structure 16 via a mounting bracket 15. A cylindrical magnet piston 17 is accommodated in the pipe 2 of the guide rail 3 in correspondence with the electromagnetic attraction structure 9 of the traveling vehicle 4. At both ends of the pipe 2, an air flow control system (not shown) including a compressor (not shown) for generating compressed air, a solenoid valve for injecting or discharging compressed air to and from the pipe 2, and the like. ) Is attached.

FIG. 2 is a sectional view taken along line AA of FIG. FIG.
As shown in the figure, a permanent magnet 18 formed in a ring shape is attached near both ends in the axial direction of a magnet piston 17, while the electromagnetic attraction structure 9 attached to the traveling vehicle 4 has a longitudinal center. And permanent magnets 20 arranged in the vicinity of both ends in the longitudinal direction. The ring-shaped permanent magnet 18 of the magnet piston 17 has a polarity on the outer surface, while the permanent magnets 19 and 20 of the electromagnetic attraction structure 9 are provided.
Has a polarity on the inner surface, the polarities of the outer surface of the permanent magnet 18 and the inner surface of the permanent magnet 19 are opposite, and the polarities of the outer surface of the permanent magnet 18 and the inner surface of the permanent magnet 20 are the same.

FIG. 3 is a bottom view of the CMOS composite camera 5 of FIG. As shown in FIG.
In the figure, a CMOS central camera 21 is arranged at the center, and four CMOS peripheral cameras 22 are arranged on the hemisphere around the central camera 20 so as to be able to take a picture in a hemispherical direction.

Here, the horizontal and vertical viewing angles of the CMOS central camera 21 are the same, and the horizontal position of the four CMOS peripheral cameras 22 is C
The contour lines in the circumferential direction having the MOS central camera 21 as the vertex are aligned and installed. That is, the opposing CMOS peripheral cameras 22 are arranged so as to match in the front-rear direction of the monorail inspection robot 1. Also, four C
Two of the MOS peripheral cameras 22 are directed in the front-rear direction of the monorail inspection robot 1, and the other two are fixed to the traveling vehicle 4 in the left-right direction.

The rows and columns of the two-dimensional matrix of unit cells including the photodiodes on the semiconductor substrate of the image sensor of the CMOS central camera 21 are four CMOs.
The S peripheral camera 22 is arranged in rows and columns of a unit cell including a photodiode on the semiconductor substrate of the imaging element unit of the S peripheral camera 22.

The CMOS composite camera 5 is a CMO
The S central camera 21 and one set of the peripheral cameras 22 opposing create two sets of panoramic digital video data, and
360 ° panoramic digital video data is created by the CMOS peripheral cameras 22, and digital video data having an arbitrary azimuth and viewing angle is extracted from these panoramic digital video data, and is viewed on a monitor television or a monitor screen in a plan view. And stereoscopic projection.

As described above, in this embodiment, while the magnet piston 17 is transferred by compressed air in the pipe 2 of the guide rail 3, the monorail type inspection robot 1 magnetically attracted in a non-contact manner with the magnet piston 17 is connected to the pipe 2. The camera is moved along 2 and a plurality of CMOS cameras 10 are combined to take a picture in the radial direction by a CMOS composite camera 5, and this video signal is wirelessly transmitted by a control device 11 as a control signal and a measurement / image signal. .

Next, referring to FIG.
The configuration of the imaging element unit 14 will be described.

As shown in FIG.
The amplification transistor 32 (32-1-1) amplifies the detection signal of (31-1-1, 31-1-2,..., 31-3-3).
, 32-1-2,..., 32-3-3), vertical selection transistors 33 (33-1-1, 33-1-2, 33-1-2, 33-3) as vertical selection means for selecting a row (line) from which a signal is read.
, 33-3-3), reset transistors 34 (34-1-1, 34-1-2,...) For resetting signal charges.
34-3-3) are arranged on a semiconductor substrate in a two-dimensional matrix. In FIG. 4, 3 × 3 cells are arranged, but actually more unit cells are arranged.

The horizontal address lines 36 (36-1, 36-) wired in the horizontal direction from the vertical shift register 35 are provided.
2, 36-3) are connected to the gate of the vertical selection transistor 33 and determine a line from which a signal is read. Similarly, a reset line 37 (37-1, 37-2, 37-3) wired in the horizontal direction from the vertical shift register 35.
Are connected to the gate of the reset transistor 34. The source of the amplifying transistor 32 is connected to a vertical signal line 38 (38-1, 38-2, 38-3) arranged in the column direction.
1, 39-2, 39-3).

The vertical signal lines 38 (38-1, 38-
2, 38-3) is a slice transistor 48 (48-
1, 48-2, 48-3). A slice capacitor 49 (49-1, 49-2, 49-3) is connected to the source of the slice transistor 48, and the other end thereof is connected to a slice pulse supply terminal 50. In order to reset the source voltage of the slice transistor 48, a slice reset transistor 52 (52-1, 52-1, 5-1, 5-1) is connected between the source of the slice transistor 48 and the slice power supply terminal 51.
2-3) is provided, and a slice reset terminal 53 is connected to the gate of the transistor 52.

The drain of the slice transistor 48 has a slice charge transfer capacitor 54 (54-1, 54-2,
54-3) are connected. In order to reset the drain charge of the slice transistor 48, a drain reset transistor 56 (56) is connected between the drain of the slice transistor 48 and the storage drain power supply terminal 55.
-1, 56-2, 56-3), and a drain reset terminal 57 is connected to the gate of the transistor 56. Further, the drain of the slice transistor 48 is connected to a horizontal selection transistor 60 (60-) driven by a selection pulse supplied from the horizontal shift register 44.
1, 60-2, 60-3) to the horizontal signal line 45.

In the image pickup device section 14 configured as described above, the voltage appearing on the vertical signal line 38 is converted into electric charge, and the noise is suppressed by subtracting the electric charge in the electric charge region, thereby having a function as a noise canceller.

FIG. 5 is a timing chart showing the operation of the image pickup device section 14. As shown in FIG. 5, when an address pulse 61 for setting the horizontal address line 36-1 to a high level is applied, only the vertical selection transistor 33 of this line is turned ON, and the source follower circuit is formed by the amplification transistor 32 and the load transistor 39 of this line. Be composed. Then, a gate voltage of the amplification transistor 32, that is, a voltage substantially equal to the voltage of the photodiode 31 appears at the gate of the vertical signal line 38 and the gate of the slice transistor 48.

Next, a slice reset pulse 62 is applied to the slice reset terminal 53 to turn on the slice reset transistor 52 and initialize the charge of the slice capacitor 49. Further, the slice reset transistor 52
Is turned off, and the first slice pulse 63 is applied to the slice pulse supply terminal 50. As a result, the first slice charge is transferred to the drain over the channel potential Vsch under the gate of the slice transistor 48 to which the signal voltage is applied. At this time, the drain reset terminal 57
, A drain reset pulse 64 is applied, and the drain reset transistor 56 is ON, so that the drain potential is fixed to the voltage Vsdd of the storage drain power supply terminal 55. Therefore, the first slice charge is discharged through the drain reset transistor 56.

Further, the drain reset transistor 5
After turning off the line 6, a reset pulse 65 for setting the reset line 37-1 to a high level is applied, and the reset transistor 34 on this line is turned on to reset the signal charge.
Then, the vertical signal line 38 and the slice transistor 4
The voltage when there is no signal charge at the gate of No. 8 appears. Next, a second slice pulse 66 is applied to the slice pulse supply terminal 50. As a result, the second slice charge is transferred to the drain beyond the channel potential Voch below the gate of the thrust transistor 48 to which the voltage when there is no signal charge is applied. At this time, since the drain reset transistor 56 is OFF, the second slice charge is transferred to the slice charge transfer capacitor 54 connected to the drain.

Next, a horizontal selection pulse 67 (67-1, 67-2, 67-3) is supplied from the horizontal shift register 44 to the horizontal selection transistor 60 (60-1, 60-2, 60-).
3) are sequentially applied, and signals for one line are sequentially taken out from the horizontal signal line 45. By continuing this operation sequentially with the next line and the next line, all the two-dimensional signals can be read.

In this device, assuming that the value of the slice capacitance 49 is Csl, the charge (second slice charge) finally read out to the horizontal signal line 45 is:

## EQU1 ## Since Csl × (Vsch−Voch), and a charge appears in proportion to the difference between the presence of a signal and the absence of a reset signal, noise due to variations in the threshold value of the amplification transistor 32 is suppressed. You.
FIG. 6 shows a potential diagram of the slice transistor 48.

As described above, the imaging element unit 14 of the CMOS camera 10 selects an imaging area in which unit cells including the photodiodes 31 are arranged in a matrix two-dimensionally on a semiconductor substrate, and a reading row of this imaging area. A vertical selection transistor 33 as a vertical selection means, a plurality of vertical signal lines 38 arranged in a column direction for reading out a detection signal of the photodiode 31 corresponding to the selected row, and a row direction from these vertical signal lines 38. And a horizontal selection transistor 60 for sequentially reading out detection signals on a horizontal signal line 45 disposed between the vertical signal line 38 and the horizontal selection transistor 60. This is an imaging element unit provided with a noise removal circuit that suppresses noise by subtracting in a region.

As described above, in the present embodiment, a plurality of CMOs
The signal captured by the S-camera 10 is converted into a digital signal and synthesized as a video signal in a hemispherical direction. The regular inspection work is performed by using the type inspection robot 1.

(Operation of First Embodiment) Next, the operation of the present embodiment will be described.

In order to assemble the guide rail 3 with the monorail inspection robot 1, a part of the guide rail 3 is removed, the removed guide rail 3 and the monorail inspection robot 1 are combined, and a part of the guide rail 3 is removed. Is assembled into the guide rail 3 again. Alternatively, with the guide rail 3 fixed to the structure 16, the case 6 is divided into two parts, and the wheels 8 and the case 6 fixed to the case 6 are divided.
The magnetic attracting structure 9 provided in the inside is attached to the T-shaped portion 3a of the guide rail 3 and the pipe 2, respectively, and the two divided cases 6 are joined together by the connecting structure 7, whereby the traveling vehicle 4 is integrated. And a state in which the vehicle can run on the guide rail 3. Continuing, it is CMOS in traveling car 4
Monorail inspection robot 1 with compound camera 5 attached
Is to be inspected along the guide rail 3.

In order to move the monorail inspection robot 1 along the guide rails 3, the magnet piston 17 is inserted into the pipe 2 and the pipe on the opposite side to the direction in which the monorail inspection robot 1 is to travel is set. 2. Inject compressed air generated by a compressor (not shown) from the end of 2 through an air flow control system (not shown) composed of a solenoid valve or the like, and at the same time, run the monorail inspection robot 1 When compressed air is discharged from the end of the pipe 2 in the direction through an air flow control system (not shown) including an electromagnetic valve and the like and the magnet piston 17 is moved, the magnet piston 17 is moved in a non-contact manner. The sucked monorail type inspection robot 11 follows and moves three-dimensionally.

The traveling speed of the monorail inspection robot 1 is adjusted by controlling the degree of opening and closing of the solenoid valve and the like of the air flow control system, while the traveling position of the monorail inspection robot 1 is controlled by the CMOS composite camera 5. Recognize based on the video obtained in.

Further, the speed of the monorail inspection robot 1 is obtained by performing image processing on a change in an image after a certain time interval in the traveling direction obtained by the CMOS compound camera 5, and the speed is integrated to obtain a reference position. Find the mileage of This reference position is recognized from an image captured by the CMOS composite camera 5.

The image in the hemisphere direction taken by the CMOS compound camera 5 of the monorail inspection robot 1 is transmitted to the control device 1.
1, the radio wave information is transmitted from an antenna 143, and the radio wave information is received by an antenna (not shown) of a fixed station provided in the structure 16, and the monorail inspection robot 1
Is remotely transmitted to the control room, which is packed with operators performing inspection work.

In this control room, the speed of the monorail inspection robot 1 is calculated by processing the images taken by the CMOS composite camera 5 of the monorail inspection robot 1, and the result is integrated to integrate the result. And a display device, which determines the current position of the vehicle and superimposes it on the route diagram of the guide rail 3 created using the CAD data of the inspection location, and a display device. Watch monorail type inspection robot 1
Recognize the current location of.

When the operator in the control room looks at a place to be inspected, the data of the viewing angle at the desired azimuth angle is obtained from the image data of the hemisphere photographed and synthesized by the CMOS compound camera 5. The output is projected on the display device in the control room. Then, when it is desired to zoom in on the place to be inspected, data extraction for narrowing the viewing angle is performed, and the result is output to the display device.

Further, by installing a large screen in the control room, the whole image is extracted based on the hemispherical image data photographed and synthesized by the CMOS compound camera 5, and the zoomed-up image of the point of interest is obtained. When the operator views the superimposed projected image, the operator checks the required place while zooming in on a required place while watching the projected image according to the progress of the monorail type inspection robot 1 while riding on the monorail type inspection robot 1. Work can be done.

(Effects of the First Embodiment) As described above, according to the present embodiment, the monorail type inspection robot 1 is attracted to the magnet piston 17 which transfers the inside of the pipe 2 of the guide rail 3 by compressed air, and the monorail type inspection robot 1 is attached. By moving the inspection robot 1 following the magnet piston 17, it is not necessary to mount a driving means on the main body of the monorail inspection robot 1, so that the structure of the monorail inspection robot 1 is simplified and reduced in size and easily. Can be manufactured.

Further, CM is installed in the monorail type inspection robot 1.
Since the OS composite camera 5 is mounted, a mechanical structure, a driving device, and a power for changing a view direction and a view angle are not required, so that a structure of equipment required for inspection is small and lightweight. In addition, it can be easily manufactured.

Further, the use of the CMOS camera 10 requires only a small and lightweight storage battery, which eliminates the need for a power supply device. Can be manufactured. In addition, the structure of the equipment required for inspection is small and lightweight, so that the structure of the traveling vehicle 4 of the monorail inspection robot 1 is simpler and smaller, and can be easily manufactured.

[First Modification] FIG. 7 is a side view showing a first modification of the first embodiment of the plant inspection apparatus according to the present invention. The same or corresponding parts as those in the first embodiment will be described with the same reference numerals. The same applies to the following embodiments and modified examples.

(Configuration of the First Modification) The first modification is the same as that of FIG.
As shown in FIG. 5, the length of the traveling vehicle 4 along the guide rail 3 is formed longer than the traveling vehicle 4 of the first embodiment, and two CMOS composite cameras 5 are fixed in the longitudinal direction of the traveling vehicle 4.
It is configured as a stereoscopic CMOS camera.

(Operation of First Modification) In the first modification, 2
The result of extracting video data at the same point of view at the same viewing angle from the hemispherical images captured by the CMOS composite cameras 5 is alternately projected on a monitor television or the like, and the operator opens and closes the liquid crystal in synchronization with the switching projection. By wearing shutter glasses and watching a monitor television or the like through the shutter glasses, the inspection by the monorail inspection robot 1 is performed in a stereoscopic state.

(Effects of First Modification) As described above, according to the first modification, hemispherical images shot by the two CMOS composite cameras 5 are alternately projected on a monitor television or the like, and synchronized with the switching projection. By watching the monitor television through the LCD opening and closing shutter glasses that open and close, the inspection target can be observed in a stereoscopic state, so that it is possible to remotely recognize a more realistic site situation, More correct decisions can be made quickly.

Since the monorail inspection robot 1 is used to remotely monitor the status of assembly and the like, a sense of perspective of the object can be obtained, so that monitoring for more accurate judgment can be remotely performed. Therefore, the first modified example is most suitable for performing work remotely using a robot.

[Second Modification] FIG. 8 is a side sectional view showing a second modification of the first embodiment of the plant inspection apparatus according to the present invention.

(Configuration of Second Modification) In a second modification, as shown in FIG. 8, a ball driven by an ultrasonic motor 70 (70-1, 70-2) is provided on a part of a pipe 2 of a guide rail 3. The valve 71 (71-1, 71-2) is incorporated, and the ball valve 71 (71-1, 71-2) is driven to individually change the state of the compressed air in the pipe 2 of the guide rail 3,
This is one in which three regions are formed.

Two guide rails 3-2 are attached to one end of the guide rail 3-1 in a normal system length, and an extension guide rail 3-3 is provided at one end of the guide rail 3-2. Installed. A ball valve 7 is provided on each of the pipes 2 of the two guide rails 3-2.
1-1 and 71-2 are mounted, and ultrasonic motors 70-1 and 70-2 are mounted for opening and closing these. Then, the ball valves 71-1 and 71-
A seal member 72 is fitted between the ball 2 and the pipe 2.

The guide rails 3-1, 3-2, 3-
3 are small tubes 73 (73-1, 73-2, 73-3, 7) for injecting and exhausting compressed air to the pipe 2, respectively.
3-4) and a connection flange 74 for connecting the guide rails 3-1, 3-2, and 3-3 to each other are attached. The thin tube 73 is connected to a compressor via an air flow control system (not shown) including an electromagnetic valve and the like. And the guide rails 3-1, 3-2
The pipes 3-3 are sealed via a seal member 75 and connected by a connection ring 76.

(Operation of Second Modification) Next, the operation of the second modification will be described.

When the monorail inspection robot 1 is traveling on the guide rail 3-1, the ball valve 71-2 of the guide rail 3-2 operates the ultrasonic motor 70-2 to close the pipe 2. While the ball valve 7
1-1 is opened, and the solenoid valve between the air and the air is opened so as to exhaust air from the thin tube 73-3 on the travel destination side of the monorail inspection robot 1. The thin tubes 73-1 and 73- The solenoid valve connected to 2 is closed. On the other hand, the solenoid valve between the compressor and the compressor is open so that compressed air can be injected from the small tube 73 on the pushing side.

When the monorail inspection robot 1 moves between the ball valve 71-1 and the ball valve 71-2, the solenoid valve connected to the thin tube 73-3 is closed,
By driving the ultrasonic motor 70-1, the ball valve 71-
Close 1 Subsequently, the solenoid valve connected to the thin tube 73-4 is closed, and the ultrasonic motor 70-2 is operated to open the ball valve 71-2. In addition, thin tube 7
The solenoid valve connected to 3-2 is opened so that compressed air can be injected from the compressor.

Then, the solenoid valve of the thin tube 73 at the other end of the guide rail 3-3 on the extension side is opened to set the state in which the air in the pipe 2 is exhausted to the atmosphere and the monorail inspection robot 1
Is moved from the area of the guide rail 3-2 so as to perform the inspection and inspection of the area of the guide rail 3-3.

By repeating the above operation, the inspection between the divided guide rails 3 is performed.
Inspection over long distances becomes possible. The guide rail 3-
In order to determine whether the monorail inspection robot 1 has moved to the range of 2 or not, it may be performed using a hemispherical image captured by the CMOS composite camera 5 mounted on the monorail inspection robot 1 or separately. A method of detecting the operation of the installed limit switch may be used.

(Effect of Second Modification) As described above, according to the second modification, the ball valve 71 driven by the ultrasonic motor 70 is incorporated into a part of the pipe 2 of the guide rail 3, and the pipe of the guide rail 3 Since a plurality of regions are formed so that the state of the compressed air can be individually changed, the guide rail 3 can be formed over a long distance, and a wide range of inspection work can be performed.

[Third Modification] FIG. 9 is a side sectional view showing a third and fourth modification of the first embodiment of the plant inspection apparatus according to the present invention, and FIG. 10 is a sectional view taken along line BB of FIG. It is.

(Configuration of Third Modification) In the third modification, as shown in FIGS. 9 and 10, the monorail type inspection robot 80 is fixed to the pipe 82 of the guide rail 81 at three or more points. It has wheels 83, 84 and 85, a rotational speed detecting means (not shown) attached to the wheels 83, 84 or 85, and a flow rate of air inside the pipe 82 based on a signal from the rotational speed detecting means. And flow rate control means (not shown) for controlling the pressure.

(Operation of Third Modification) Next, the operation of the third modification will be described.

The running position of the monorail inspection robot 80 is controlled by obtaining the current position of the monorail inspection robot 80 from the value obtained by integrating the result of the rotation speed detecting means attached to the fixed wheel 83, 84 or 85. The pipe 82 is operated based on the signal from the rotation speed detecting means.
The flow rate of the internal air is controlled by the flow rate control means.

(Effect of Third Modification) As described above, according to the third modification, the flow velocity of the air inside the pipe 82 is controlled by the flow velocity control means based on the signal from the rotation speed detection means. In addition, the required power is small, and the power supply is small, and the monorail inspection robot 80 can be reduced in size and weight.

[Fourth Modification] A fourth modification will be described with reference to FIGS. 9 and 10 used in the description of the third modification and FIG. 11 newly added. FIG. 11 is a schematic configuration diagram illustrating a fourth modification of the first embodiment of the plant inspection device according to the present invention.

(Structure of Fourth Modification) The fourth modification is similar to that of FIG.
As shown in FIG. 1, an electromagnet 86 is provided on the outer peripheral side of a pipe 82 of a guide rail 81 in order to stop and inspect a monorail type inspection robot 80 at a predetermined position.

The monorail inspection robot 80 is a CMO
An inspection car 88 equipped with an S compound camera 87, a round pipe 82 made of a non-magnetic material for driving the inspection car 88, and a permanent magnet 89 inserted in the pipe 82 are configured as main elements.

The control panel 90 has a function of controlling the electromagnet 86 attached to an arbitrary position of the pipe 82 and the electromagnetic valves 91-1 to 91-4 for adjusting the air pressure in the pipe 82.

The inspection car 88 mainly includes a CMOS composite camera 87, two permanent magnets 92-1 and 92-2, an electromagnet 93, and a camera control unit (CCU) 94.
, A signal transmission device 96 for transmitting information between the control panel 90 on the ground and the inspection car 88, an antenna 97-1 and a battery 98. On the other hand, although not shown, an encoder for measuring the position of the inspection vehicle 88, a speed detector for measuring the speed of the inspection vehicle 88, and the like are also installed, and a control device (microcomputer) for controlling the inspection vehicle 88 based on these components. 99 is mounted.

The control panel 90 mainly includes electromagnetic valves 91-1 and 91-2 for controlling air release from both ends of the pipe 82 and electromagnetic valves 91-1 and 91-2 for controlling outlet air pressures of the compressors 100-1 and 100-2. 3, 91-4 drive and pipe 82
Driver 10 for exciting the electromagnet 93 attached above
1, a signal transmission device 102 for wirelessly transmitting information between the inspection car 88 and the control panel 90, and an antenna 97-2;
An operation panel 103 for inputting a command from an operator, outputting a sensor to the operator, and providing guidance on a traveling state.
And a control device (microcomputer) 104 for controlling them.

To move or stop the inspection car 88,
Attraction force between the permanent magnet 89 in the pipe 82, the permanent magnets 92-1 and 92-2 mounted on the inspection wheel 88, the electromagnet 93, and the electromagnet 86 attached to an arbitrary position of the pipe 82,
Perform using repulsion.

Further, a permanent magnet 89 inserted in the pipe 82
As shown in FIGS. 9 and 10, is formed in a hollow cylindrical shape in consideration of weight reduction, the outer peripheral surface is an N pole (or may be an S pole), and the inner surface is an S pole (an N pole when the outer periphery is an S pole). ). Further, the two permanent magnets 92-1 and 92-2 and the electromagnet 93 mounted on the inspection car 88 are shown in FIG.
Is formed in a U-shape as shown in FIG.
8, the two permanent magnets 92-1 and 92-2 are arranged at the front and rear of the upper part.

The positional relationship between the permanent magnet 89 in the pipe 82 and the permanent magnets 92-1 and 92-2 mounted on the inspection wheel 88 and the electromagnet 93 is shown in FIG.
The position of the second permanent magnet 89 and the position of the electromagnet 93 of the inspection wheel 88 are made to overlap.

(Operation of Fourth Modification) Next, the operation of the fourth modification will be described.

In order to move the inspection car 88 forward, (1) the solenoid valve 91-2 is opened and the air pressure from the compressor 100-1 is applied to the pipe 82. (2) Solenoid valve 91
-3 is "open" and the pipe 8 on the side where the inspection car 88 advances.
The air in 2 is released to the outside. (3) The permanent magnet 89 in the pipe 82 receives air pressure later and moves forward. (4)
The electromagnet 93 of the inspection wheel 88 is kept in a non-excited state. In this state, the inspection wheel 88 repels when the permanent magnet 89 in the pipe 82 approaches the permanent magnet 92-1 in front of the inspection wheel 88. Move forward with strength.

On the other hand, when the inspection car 88 is moved backward,
(1) The solenoid valve 91-3 is closed and the solenoid valve 91-4 is opened to introduce the air pressure from the compressor 100-2 into the pipe 82. (2) The electromagnetic valve 91-2 is closed and the electromagnetic valve 91-2 is opened to check the vehicle 88
Releases the retreating air to the outside. (3) The permanent magnet 89 in the pipe 82 receives air pressure from the front and retreats. (4) The inspection wheel 88 is retracted by the repulsive force caused by approaching the permanent magnet 92-2 behind the inspection wheel 88 when the permanent magnet 89 in the pipe 82 is retracted.

When the inspection car 88 is stopped,
An electromagnet 86 attached to an arbitrary position on the pipe 82, that is, a predetermined fixed station position is excited by a command from the control panel 90, and when the permanent magnet 89 in the pipe 82 comes to that position, it moves by an attractive force. Permanent magnet 89 inside
And a method of exciting the electromagnet 93 of the inspection wheel 88 by a wireless command from the control panel 90 to stop the moving permanent magnet 89 by the attraction force.

When stopping the inspection wheel 88, the electromagnetic valve 93 is excited and at the same time the electromagnetic valve 91-1 or 91-2 for discharging is closed to ensure the stop.

The traveling speed of the inspection vehicle 88 is determined by connecting a wheel 85-1 attached to the inspection vehicle 88 to a speed detector (not shown), for example, a speedometer generator. It controls the opening of the solenoid valve 91-1 or 91-3 which measures, sends it to the control panel 90 wirelessly via the signal transmission device 96, and discharges air based on the speed data input via the signal transmission device 102. To an arbitrary speed.

The current position of the inspection vehicle 88 is the inspection vehicle 8
8, a rotary encoder (not shown) is connected to the wheel 85-2, the travel distance of the inspection vehicle 88 is counted, and the time is sent to the control panel 90 wirelessly via the signal transmission device 96, and the signal transmission device 102 The current position of the inspection car 88 is calculated from the count value input through the control panel 103 and displayed on the operation panel 103.

(Effects of Fourth Modification) According to the fourth modification, the monorail inspection robot 80 is excited by exciting the electromagnet 86 installed at a predetermined position outside the pipe 82 of the guide rail 81. Can be stopped at a predetermined position, and the inspection and inspection can be performed. Therefore, the monorail inspection robot 80 can be transferred to that position at a high speed, and the inspection work time can be reduced.

[Fifth Modification] FIG. 12 is a sectional view showing a main part of a fifth modification of the first embodiment of the plant inspection apparatus according to the present invention.

(Structure of Fifth Modification) The fifth modification is the same as that of FIG.
As shown in FIG. 2, the half mirror 1 is provided behind the condenser lens 13.
In addition, a CMOS camera 108 in which an infrared filter 106 and an infrared CMOS image sensor 107 are disposed on one optical axis through the half mirror 105 and an image sensor 14 is disposed on the other optical axis. A CMOS composite camera 109 is obtained by combining a plurality of them.

A CMOS composite camera 109 combines a control device 110 (including a storage battery unit) for synthesizing the image signals of the five CMOS cameras 108 into a hemispherical image and transmitting the digital signal as a digital signal. Not with an antenna.

The image pickup device section 14 includes a CMOS sensor, a timing generator, a signal converter for converting an analog signal to a digital signal, and a signal, which include a light receiving element section, a vertical operation circuit section, a horizontal readout circuit section, and a noise suppression section. A processing LSI and the like are arranged on one chip.

The control device 110 performs connection between infrared and visible light images captured by the five CMOS cameras 108 and deletion of the overlapped portion, and also performs processing for converting the image into a hemispherical digital image signal. Processing for converting the video signal into a radio wave (or laser light) signal and transmitting the signal is performed.

(Operation of the Fifth Modification) The entire image is extracted from the hemispherical digital image signal of the visible light image and the infrared image obtained by the CMOS compound camera 109, and the visible light image in which the point of interest is zoomed up. The operator sees a projection of the image and the infrared image superimposed, and the operator zooms in on a necessary place from an image viewed as the monorail type inspection robot 1 progresses as if riding on the monorail type inspection robot 1. Thus, detailed inspection work for abnormal temperature and abnormal shape can be appropriately performed.

(Effect of Fifth Modification) As described above, according to the fifth modification, the half mirror 10 is provided behind the condenser lens 13.
5 and an infrared filter 106 and an infrared ray C on one optical axis through the half mirror 105.
Since the MOS image sensor unit 107 is provided and the image sensor unit 14 is provided on the other optical axis, the infrared image can be inspected by superimposing the infrared image on the visible light image. It is possible to easily and accurately determine the situation.

[Sixth Modification] FIG. 13 is a sectional view showing a sixth modification of the first embodiment of the plant inspection apparatus according to the present invention.

(Structure of Sixth Modification) The monorail inspection robot 111 of the sixth modification has a concave structural member 114 in which a guide rail 112 is fixed to a fixing bracket 113 as shown in FIG. A pipe 116 is fixed to the structural material 114 by welding and has a plurality of projections 115 projecting horizontally outward in the radial direction. The pipe 116 is manufactured by a drawing method. Instead of the concave structural member 114, a metal fitting that can be connected to the fixing metal 113 at a fixed interval may be attached to the pipe 116. Then, a pair of wheels 118 attached to the case 117 of the monorail inspection robot 111
5 is rotatably fitted.

(Operation of the Sixth Modification) The wheels 118 of the monorail inspection robot 111 have protrusions 115 of the pipe 116.
The monorail-type inspection robot 111 moves three-dimensionally along the guide rail 112 following the movement of the magnet piston 17 in the state of being fitted.

(Effect of Sixth Modification) As described above, according to the sixth modification, the pipe 11 on which the plurality of projections 115 are formed is formed.
6 is manufactured by a drawing method, and the pipe 116 is connected to the structure 16 through the fixing bracket 113 and the concave structure material 114.
To form the guide rail 112, the structure of the traveling part of the monorail type inspection robot 111 can be reduced in size.
2 can also be easily manufactured.

[Seventh Modification] FIG. 14 shows a CM in a seventh modification of the first embodiment of the plant inspection apparatus according to the present invention.
FIG. 15 is a plan view showing an OS compound camera, and FIG.
It is sectional drawing which shows S compound camera.

(Structure of Seventh Modification) The seventh modification is the same as that of FIG.
As shown in FIG. 4 and FIG. 15, instead of the CMOS compound camera 5 of the first embodiment, four C
It is provided with two divided CMOS composite cameras 121 to which MOS cameras 120 are attached. 2 split CMOS
The composite camera 121 includes a mounting member 122 and a connecting member 1.
23, they are integrally formed in a hemispherical shape.

(Operation and Effect of Seventh Modification) In the seventh modification, two divided CMOS composite cameras 121 each having four CMOS cameras 120 mounted on a spherical portion of a quarter divided sphere are used.
By providing the CMOS cameras 120, stereoscopic viewing in a direction perpendicular to the traveling direction of the monorail inspection robot within the range of the viewing angle of the CMOS camera 120 can be performed using a small number of CMOS cameras.

[Eighth Modification] (Configuration of Eighth Modification) The eighth modification is not shown in FIG.
In the embodiment and the first modification, when performing the inspection work with the CMOS compound camera 5, a means for selecting only the CMOS camera 10 facing the inspection direction is provided, and the operator remotely transmits a radio signal to make a selection. The selected video is transmitted wirelessly, projected on a monitor device or the like where the operator is located, and inspected by remote control.

(Operation of the Eighth Modification) The operator selects the CMOS camera 10 facing the azimuth to be inspected, issues an instruction wirelessly, and transmits the image of the selected CMOS camera 10 wirelessly. Projected on a monitor device where the operator is. The operator performs inspection work while watching the projected video. In the eighth modification, an operation of reconstructing an image having a hemispherical visual field using an image captured by the CMOS compound camera 5 is not performed.

(Effect of Eighth Modification) As described above, according to the eighth modification, since the means for selecting only the CMOS camera 10 facing the inspection direction is provided, the image photographed by the CMOS composite camera 5 is provided. Since there is no processing operation for reconstructing an image of a hemispherical field of view using, the imaging system can be simplified.

[Ninth Modification] (Configuration of Ninth Modification) The ninth modification is not shown in FIG.
In the embodiment and the first modification, when synthesizing an image of each CMOS camera 10 with the CMOS composite camera 5, each CM
A process of assigning a reference address of an azimuth angle and an elevation angle to each pixel of the OS camera 10 and selecting one of the pixels in the overlapping portion is performed to obtain a hemispherical image.

(Operation of Ninth Modification) According to the information of the reference address of the azimuth angle and the elevation angle attached to each pixel of each CMOS camera 10 of the CMOS compound camera 5, one of the information of the overlapped portion is included in the information. A process for selecting is performed, and a process for obtaining a hemispherical image is performed.

(Effect of Ninth Modification) As described above, according to the ninth modification, the azimuth given to each pixel of each CMOS camera 10 of the CMOS composite camera 5 with reference to the center of the hemisphere of the CMOS composite camera 5 is referred to. Using the address information of the angle and elevation angle,
By assigning priorities in the processing of the overlapping address information, the processing of obtaining a hemispherical image can be easily performed.

[Second Embodiment] FIG. 16 is a sectional view showing a second embodiment of the plant inspection device according to the present invention.

(Configuration of Second Embodiment) As shown in FIG. 16, a monorail inspection robot 125 is
Guide rail 12 which is installed in a three-dimensional manner and is made of a C-shaped structural material
6, and the guide rail 126 is fixed to the structure 16 by the fixture 127. Guide rail 1
Ultrasonic vibrators 128 are adhered to the inner surfaces of both sides of 26, and a piezoelectric vibrator (not shown) is brought into contact with the ultrasonic vibrator 128 at one end of the guide rail 126, and is attached to the ultrasonic vibrator 128 at the other end. It is configured to contact another piezoelectric vibrator (not shown).

A traveling part 129 is provided on the upper part of the monorail type inspection robot 125 and is incorporated in a guide rail 126 made of a C-shaped structural material. A wheel 130 that rotates in contact with the inner surface and a wheel 131 that rotates in contact with the inner surface of the bottom are attached.

At the center in the vertical direction of the traveling portion 129, the shaft 13
2 are inserted, and springs 13
The movable body 134 is attached via the third member 3. Therefore, since the movable body 134 is attached to the shaft 132 via the spring 133, the movable body 134 is pressed against the ultrasonic vibration body 128. The monorail inspection robot 125 has C
The MOS composite camera 5 is attached.

As described above, in the second embodiment, instead of moving the monorail type inspection robot 1 by moving the magnet piston 17 with the compressed air in the pipe 2 of the guide rail 3 of the first embodiment, the guide rail 126 is used. An ultrasonic vibrator 128 is adhered to the inside of the guide rail 126 using a C-shaped structural material, and the movable body 134 of the monorail inspection robot 125 is pressed against the ultrasonic vibrator 128 along the guide rail 126. It is designed to be transported.

(Operation of Second Embodiment) Ultrasonic Vibration Body 12
The other piezoelectric vibrator which drives a piezoelectric vibrator (not shown) brought into contact with 8 and transmits it from one end of the guide rail 126 to the ultrasonic vibrator 128 and makes contact with the ultrasonic vibrator 128 at the other end (Not shown) is driven to receive a wave from the ultrasonic vibrator 128, and the ultrasonic vibrator 128 excites a transverse traveling wave. The movable body 134 moves in a direction opposite to the traveling direction of the transverse wave.

When the movable body 134 moves, the monorail inspection robot 125 moves in the same direction. Then, when the transmission and reception of the wave to the ultrasonic vibrator 128 are switched, the traveling direction of the transverse wave becomes the reverse direction, and the movable body 134 is moved in the reverse direction.

(Effect of Second Embodiment) According to the second embodiment, the C-shaped structural member is used for the guide rail 126, and the ultrasonic vibrator 12 is provided inside the guide rail 126.
8 is attached, and the movable body 134 of the monorail type inspection robot 125 is transported along the guide rail 126 in a state where the movable body 134 is pressed against the ultrasonic vibrating body 128, so that there is no need to provide an air generating source. , Can simplify the system.

[First Modification] FIG. 17 is a sectional view showing a first modification of the second embodiment of the plant inspection apparatus according to the present invention.

(Configuration of First Modification) The monorail inspection robot 135 of the first modification has a second inspection robot as shown in FIG.
CMOS of monorail type inspection robot 125 of embodiment
Instead of the composite camera 5, a CMOS camera is arranged so as to surround a guide rail 126 made of a C-shaped structural material.

That is, the monorail inspection robot 13
5 is attached to a guide rail 126 made of a C-shaped structural material as in the second embodiment.
Is fixed to the structure 16 by the fixture 127. Ultrasonic vibrators 128 are adhered to inner surfaces of both sides of the guide rail 126, and a piezoelectric vibrator (not shown) is brought into contact with the ultrasonic vibrator 128 at one end of the guide rail 126, and an ultrasonic vibrator at the other end. It is configured such that another piezoelectric vibrator (not shown) is brought into contact with 128.

On the upper part of the monorail type inspection robot 135, there is provided a traveling portion 129 which is incorporated in a guide rail 126 made of a C-shaped structural material as in the second embodiment.
The upper and lower portions of the traveling portion 129 are provided with wheels 13 which rotate in contact with the upper inner surface of the guide rail 126, respectively.
0, and a wheel 131 that rotates in contact with the bottom inner surface is attached.

At the center of the running portion 129 in the vertical direction, the shaft 13
2 are inserted, and springs 13
The movable body 134 is attached via the third member 3. Therefore, since the movable body 134 is attached to the shaft 132 via the spring 133, the movable body 134 is pressed against the ultrasonic vibration body 128.

The traveling section 129 is provided with a guide rail 126.
The case 6 is configured to surround a guide rail 126 made of a C-shaped structural material. A side CMOS camera 136 is provided on a side surface of the guide rail 126, and a bottom CMOS camera 137 is provided on a bottom surface thereof. A front CMOS camera and a rear C are provided on the front and rear surfaces of the CMOS camera 137.
MOS cameras (not shown) are respectively attached. The imaging device unit 14 of each CMOS camera includes the control device 11
The control device 11 and the antenna 12 are electrically connected to each other.
Are connected.

(Operation and Effect of First Modification) In the first modification, in addition to the effects of the second embodiment, the guide rail 12
By arranging the CMOS cameras 136 and 137 so as to surround the monorail 6, the width of the monorail inspection robot 135 projecting from the guide rail 126 can be reduced, and the monorail can be installed even in a narrow passage cross-sectional area. The inspection range at the installation location of a complicated structure can be expanded.

[Second Modification] FIG. 18 is a sectional view showing a second modification of the second embodiment of the plant inspection apparatus according to the present invention, and FIG. 19 is a sectional view taken along line CC of FIG.

(Configuration of Second Modification) A monorail inspection robot 140 according to a second modification is configured such that the ultrasonic vibrating body 128 and the monorail inspection robot 125 attached to the inside of the guide rail 126 of the second embodiment are movable. Instead of moving the monorail inspection robot 125 with the body 134, FIG.
As shown in FIG. 8, a guide rail 126 made of a C-shaped structural material
A high-frequency current cable 141 is attached to the outer surface of the vehicle, and the high-frequency current cable 141 and the induction power supply 142 provided in the traveling section 129 supply electric power in a non-contact manner.

As shown in FIG. 18, the monorail type inspection robot 140 has a guide rail 126 made of a C-shaped structural material.
The guide rail 126 is attached to the fixing bracket 1.
At 27, it is fixed to the structure 16. A high-frequency current cable 141 is attached to the upper part of the outer surface of the guide rail 126, while the traveling unit 12 of the monorail type inspection robot 140 is mounted.
9, an induction power supply 142 is attached. The power is supplied in a non-contact manner by a high-frequency current cable 141 and a coil built in the induction power supply 142. At the end of the guide rail 126, equipment for flowing a high-frequency current through the high-frequency current cable 141 is provided.

A drive device 143 is mounted in the case 6 as shown in FIG. 19, and a drive shaft 144 of the drive device 143 is connected to a drive wheel 145.
Is mounted so that the inner surface of the guide rail 126 made of a C-shaped structural member is brought into rotational contact. Induction power supply 14
2 and the drive unit 143 and the control unit 11 are electrically connected by a power line, and the control unit 11 and the drive unit 143, the antenna 12 and the imaging element unit 14 are connected by signal lines, respectively.

(Operation of Second Modification) Guide Rail 126
When a high-frequency current flows through the high-frequency current cable 141 at the end of the induction power supply device 142, an induction current is generated in a coil incorporated in the induction power supply 142. The induced current is guided to the driving device 143, and the driving device 143 is driven to rotate the driving wheel 145. Then, the drive wheel 145 rotates in contact with the inner surface of the guide rail 126 and causes the traveling unit 129 to travel, so that the monorail inspection robot 140 moves along the guide rail 126.

By changing the direction of rotation of the drive wheel 145, the direction in which the traveling section 129 travels (the direction in which the monorail inspection robot 140 moves) can be changed. The switching of the traveling direction of the traveling section 129 is performed by receiving a control signal transmitted wirelessly by the antenna 12 and using the control device 11.
Is performed by controlling the driving device 143.

(Effect of Second Modification) As described above, according to the second modification, the high-frequency current cable 141 is attached to the outer surface of the guide rail 126,
1 and the induction power supply 142 provided in the traveling section 129 to supply electric power in a non-contact manner to the monorail inspection robot 140 with a high-frequency current by a non-contact power supply. In addition to the configuration, a power supply system that does not require maintenance can be constructed, and as a result, operation becomes easy.

[Third Embodiment] FIG. 20 is a sectional view showing a third embodiment of the plant inspection apparatus according to the present invention, and FIG. 21 is a sectional view taken along line DD of FIG.

(Structure of the Third Embodiment)
An in-pipe traveling inspection robot 150 is transferred by compressed air through a transparent hollow pipe 151 installed three-dimensionally in a plant.
In 0, four CMOS cameras 10 are arranged in the circumferential direction, and a control device 152 for wirelessly transmitting control signals and measurement / image signals is attached.

As shown in FIG. 20, an inspection robot 150 for traveling in a pipe has a case 15 having a substantially elliptical cross section.
3 and four CMs arranged in the circumferential direction of the case 153.
An OS camera 10, a control device 152 for wirelessly transmitting control signals and measurement / image signals, and the control device 15
2 is provided with a storage battery 154 for applying a voltage to the antenna 2 and the antenna 12.

The control device 152 has four CMOS cameras 1
The respective image signals of 0 are combined into a 360 ° panoramic image and transmitted as a digital signal from the antenna 12. The CMOS camera 10 includes a condenser lens 13 and an image sensor unit 14.

The image pickup device section 14 includes a CMOS sensor, a timing generator, a signal converter for converting an analog signal to a digital signal, and a signal, comprising a light receiving element section, a vertical scanning circuit section, a horizontal readout circuit section, and a noise suppression section. A processing LSI and the like are arranged on one chip.

The control device 152 performs connection between images captured by the four CMOS cameras 10 and deletion of the overlapped portion, and also performs processing for converting the image into a 360 ° panoramic image digital signal. Transparent hollow pipe 151
Is composed of a compressor (not shown) that generates compressed air at both ends of a transparent hollow pipe 151 and a solenoid valve that injects or discharges compressed air. An air flow control system (not shown) is provided.

(Operation of the Third Embodiment) The control method for transferring the inspection robot 150 after the in-pipe traveling inspection robot 150 is mounted in the transparent hollow pipe 151 is the same as that in the first embodiment.

The images taken by the four CMOS cameras 10 of the inspection robot 150 traveling inside the pipe are transmitted to the control device 15.
After being converted into a radio signal at 2, the signal is transmitted from the antenna 12, and the radio signal is received by an antenna (not shown) provided at the end of the transparent hollow pipe 151, and the inspection robot 150 traveling in the pipe is remotely controlled. The data is transmitted to a control room (not shown) packed by an operator who operates and performs inspection work.

When the operator in the control room looks at a place to be inspected, a signal of the desired azimuth is taken from a digital signal of a 360 ° panoramic image photographed by four CMOS cameras 10 and a signal of the desired direction is obtained. Output to a display device. When the user wants to zoom up, the signal extraction processing for narrowing the viewing angle is performed, and the processing result is projected on a display device.

(Effects of Third Embodiment) As described above, according to the present embodiment, the CMOS camera 10 can be easily reduced in size by semiconductor manufacturing technology and consumes less power. It can be performed. Thus, by miniaturizing the inspection robot and traveling in the pipe, a small inspection system including the guide rail can be configured, and the system can be easily laid on the structure 16.

[First Modification] (Configuration of First Modification) In a first modification, the transparent hollow pipe 151 in the third embodiment is limited to a place where inspection is desired, and the other parts are metal pipes. Things.

(Operation and Effect of First Modification) When the in-pipe traveling inspection robot 150 is positioned at the transparent hollow pipe 151, the traveling thereof is stopped and the inspection work is performed.

As described above, according to the first modified example, the structural strength of the guide rail system can be increased by making only the pipe at the place where the inspection work is performed transparent and configuring the other parts with metal.

[Second Modification] FIG. 22 is a sectional view showing a second modification of the third embodiment of the plant inspection apparatus according to the present invention.

(Structure of the Second Modification) The second modification is similar to the third modification.
In the embodiment, a string (or a chain, a chain, a band, or the like) 155 is connected to the in-pipe traveling inspection robot 150, and a driving device 156 installed on both end surfaces of the transparent hollow pipe 151.
The rope 155 is taken up or unwound to transfer the in-pipe traveling inspection robot 150 along the inner surface of the transparent hollow pipe 151.

That is, as shown in FIG. 22, a string (or a chain, a chain,
A driving device 156 that winds and unwinds the belt 155 is installed, and the driving device 156 and the inspection robot 150 that travels in a pipe are connected by a cord 155.
Then, by winding or unwinding the string 155 by the driving device 156, the in-pipe traveling inspection robot 150 travels in the transparent hollow pipe 151. In addition,
The transparent hollow pipe 151 is connected to the floor 1 by the stand 157.
58.

[0167] One end of the transparent hollow pipe 151 in which the driving device 156 is installed is provided with a relay device 159 for relaying power transmission and reception of a radio signal with the inspection robot 150 traveling inside the pipe.
Is attached. Power is transmitted and received by radio signals from the relay device 159 to the monitor device at the place where the operator is packed by the antenna 12.

[0168] The in-pipe traveling inspection robot 150 includes a case 153, a CMOS camera 10, a control device 152, a storage battery 154, an antenna 12, and the like. The control device 152 combines the image signals of the four CMOS cameras 10 into a 360 ° panoramic image, and wirelessly transmits the digital signals from the antenna 12 as digital signals. That is, the control device 152 performs connection between images captured by the four CMOS cameras 10 and deletion of the overlapped portion,
A process for converting a 360 ° panoramic image into a digital signal is performed.

The CMOS camera 10 comprises a condensing lens 13 and an image sensor 14 as in the above embodiments. The image sensor 14 comprises a light receiving element, a vertical scanning circuit, a horizontal readout circuit, and CMOS sensor composed of noise suppression unit, timing generator, signal converter for converting analog signal to digital signal, and signal processing L
SI and the like are arranged on one chip.

(Operation of the Second Modification) In the second modification, the traveling inspection robot 1 in a transparent hollow pipe 151
50 is driven by driving the driving device 156 to wind up the string 155 on one side and unwinding on the other side.

(Effects of Second Modification) As described above, according to the second modification, a string (or a chain, a chain, a band, or the like) 155 is connected to the in-pipe traveling inspection robot 150, and
By moving the inspection robot 150 in the pipe along the inner surface of the transparent hollow pipe 151 by winding or unwinding the 55 with the driving device 156, the compressed air supply system becomes unnecessary, and the inspection is performed. The system configuration of the robot traveling system can be simplified.

[Third Modification] FIG. 23 is a sectional view showing a third modification of the third embodiment of the plant inspection apparatus according to the present invention.

(Structure of Third Modification) The third modification is similar to that of FIG.
As shown in FIG. 3, the ultrasonic vibrator 160 is attached to the inner surface of the transparent hollow pipe 151 on the side attached to the structure 16, while the movable member 161 is attached to the upper surface of the in-pipe traveling inspection robot 150. The in-pipe traveling inspection robot 150 is transferred along the inner surface of the transparent hollow pipe 151 while being pressed against the ultrasonic vibrator 160.

That is, as shown in FIG. 23, the ultrasonic vibrator 160 is attached to the inner surface of the transparent hollow pipe 151 on the side attached to the structure 16, while the ultrasonic vibrator 160 is And a guide spring 162 that sandwiches the ultrasonic vibrator 160 from both sides.

A sphere 163 is disposed on the peripheral surface of the pipe-running inspection robot 150, and the sphere 163 has a spring 1
The spring 164 presses the sphere 163 against the inner surface of the transparent hollow pipe 151 and urges the movable body 161 to press the ultrasonic vibrator 160 by the reaction force. Note that the configurations of the control device 152 and the four CMOS cameras 10 (not shown) are the same as those of the third embodiment, and a description thereof will be omitted.

(Operation of Third Modification) Transparent Hollow Pipe 15
A piezoelectric vibrator (not shown) brought into contact with the ultrasonic vibrating body 160 at one end is transmitted to the ultrasonic vibrating body 160,
Another piezoelectric vibrator (not shown) in contact with the ultrasonic vibrating body 160 at the other end is driven to receive a wave from the ultrasonic vibrating body 160 and excite a transverse traveling wave to the ultrasonic vibrating body 160. .

Then, the movable body 161 pressed against the ultrasonic vibrating body 160 is moved by the transverse wave of the ultrasonic vibrating body 160 in the direction opposite to the traveling direction of the transverse wave. Inspection robot 150 traveling in a pipe according to the movement of movable body 161
Also move in the same direction. When the transmission and reception of the wave to the ultrasonic vibrator 160 are switched, the traveling direction of the transverse wave is reversed, the movable body 161 is moved in the opposite direction, and the traveling inspection robot 150 in the pipe also moves in the opposite direction. Will be.

(Effect of Third Modification) As described above, according to the third modification, the ultrasonic vibrator 160 is attached to the inner surface of the transparent hollow pipe 151 on the side to be attached to the structure 16 while the traveling inside pipe is used. The movable body 161 is attached to the inspection robot 150, and the movable body 161 is attached to the ultrasonic vibrator 1
Inspection robot 15 traveling in the pipe while being pressed against 60
By transferring 0 along the inner surface of the transparent hollow pipe 151, an air source is not required and the system can be simplified. Further, in principle, the driving device is not provided in the inspection robot 150 that can travel in a pipe, so that the structure of the inspection robot can be easily reduced in size.

In the third modification, a permanent magnet is attached between the movable body 161 and the case 153 of the inspection robot 150, and the guide spring 162, the ultrasonic vibrator 160, the movable body 161, the permanent magnet, and the inspection robot 150 are mounted. Case 15
3, a contact wear between the ultrasonic vibrating body 160 and the movable body 161 can be reduced.

[Fourth Modification] A fourth modification of the third embodiment of the plant inspection apparatus according to the present invention will be described with reference to FIGS.

(Structure of Fourth Modification) The fourth modification is similar to that of FIG.
2 and 23, a string (or chain, chain,
Band) A linear and arc-shaped portable transparent hollow pipe 151 with a driving device 156 attached to both ends for winding and unwinding 155 or the like, or a linear or arc-shaped with an ultrasonic vibrator 160 attached. , A portable transparent hollow pipe 151, a traveling inspection robot 150 in a pipe,
A portable control unit and a portable monitor TV (wall-mounted TV monitor) are set and transported to a place where disassembly and assembly work is performed.

Then, in a state where the in-pipe traveling inspection robot 150 is installed in the portable transparent hollow pipe 151, it is installed on the side opposite to the equipment which cannot be seen from the worker's working direction.
The operator performs remote control of the traveling inspection robot 150 in the pipe and performs disassembly / assembly of the equipment while watching the video taken from the desired direction on the portable monitor TV. It is.

(Operation of the Fourth Modification) The in-pipe traveling inspection robot 150 is incorporated in a portable transparent hollow pipe 151, and driving devices 156 are provided at both ends of the transparent hollow pipe 151.
Is transported to a place where a device for disassembling and assembling is installed, and is installed on a floor 158 using a stand 157 or the like.

Power is supplied to the drive unit 156 from a distribution board installed near the site. In the case of a transparent pipe unit in which the traveling inspection robot 150 is incorporated, if the place that the operator wants to see changes with the progress of the work, the installation position of the stand 157 or the height of the stand 157 is changed. The range that can be seen by the inside traveling type inspection robot 150 is changed. The method of controlling the traveling of the inspection robot 150 in a pipe and capturing an image is the same as that of the second modification or the third modification of the third embodiment.

(Effects of Fourth Modification) As described above, according to the fourth modification, the apparatus for disassembling and assembling the unit in which the in-pipe traveling inspection robot 150 is incorporated in the portable transparent hollow pipe 151 is used. After transporting to the surrounding area, perform the installation work so that the image of the opposite side of the worker can be obtained, and by working while watching this image, the work efficiency can be improved more than when there is an assistant .

Further, in the fourth modified example, if the remote operation of the inspection robot 150 traveling in a pipe is performed by using the voice recognition technology, the workability is further improved. Furthermore, when a stereoscopic image is projected on a monitor television and the worker wears glasses with a liquid crystal shutter and works while watching the stereoscopic image, the work efficiency can be further improved.

[Fourth Embodiment] FIG. 24 is a perspective view showing an appearance of a fourth embodiment of a plant inspection apparatus according to the present invention, and FIGS. 25 (A) and (B) are sectional views and perspective views showing rails thereof. FIG. 26 is a perspective view showing a running portion of a traveling vehicle according to the fourth embodiment, FIG. 27 is a plan view showing the running portion, and FIG. 28 is a side view showing the running portion.

(Configuration of Fourth Embodiment) FIG.
As shown in (B), the rail 170 is composed of a traveling vehicle support 171 having a U-shaped cross section in which both legs are horizontal, and a trolley wire support 17 projecting from the upper leg to the opposite side.
2 and a central piece 115. Trolley wire support 17
2, a plurality (three in the figure) of trolley wires 175 are laid via an insulator 174.

Further, as shown in FIG.
Is composed of a towing vehicle 181 corresponding to a locomotive of a general railway, and an accompanying vehicle 182 towed by the towing vehicle. The towing vehicle 181 includes a drive motor 183, a camera platform 184, and a CMOS camera 185 for inspection supported by the camera platform 184.

A control circuit of the towing vehicle 181, various signal transmission circuits, a drive circuit (not shown), and the like are mounted on the accompanying vehicle 182, and are mechanically operated by a towing vehicle 131 and a connecting rod 187 having both ends of a universal joint 186. Concatenated,
They are electrically connected by a cable (not shown).

Further, FIG. 26 shows a towing vehicle 181 and an accompanying vehicle 182, and other parts of the vehicle body are omitted, and the top plate 18 is not shown.
8, 189 are shown and the top plate 188 of the towing vehicle 181 is shown.
On the upper surface, two horizontal wheels 190 and 19 respectively arranged on one side of the central piece 173 of the U-shaped cross section of the rail 170 are provided.
1. One horizontal wheel 218 disposed on the other side is provided, and two pairs of horizontal wheels for guiding traveling are provided on the upper surface of the top plate 189 of the accompanying vehicle 182 with a U-shaped central piece 173 interposed therebetween. 1
93 are provided.

The horizontal wheel 192 has two horizontal wheels 190,
The horizontal wheel is provided with a pressing force toward the central piece 173 by a spring 195 via a lever 194. The top plates 188 and 189 are enclosed in the U-shaped cross section of the rail 170,
70, the towing vehicle 181 and the trailing vehicle 1
A plurality of vertical wheels 196 and 197 supporting 82 vehicle bodies are provided. The pressing mechanism 198 includes a spring adjusting screw 199, a lever 194, and a spring 200, as shown in FIG.

The driving force is transmitted from the driving motor 183 to the horizontal wheels 190 and 191 via the transmission and reduction system 201 shown in FIG. 28, and the horizontal wheels 190 and 191 are driven and rotated in the same direction, so that the towing vehicle 181 travels. Is made. And
The current collector 202 shown in FIG. 26 cooperates with a trolley wire 175 provided on a towing vehicle 181.

Therefore, in the fourth embodiment, the trolley wire support portion 1 is formed by projecting the one leg of the U-shaped cross section in the opposite direction.
72, a rail 170 having a trolley wire 175 supported on the lower surface thereof, and a current collector 202 supported by vertical wheels 196 and 197 and cooperating with the trolley wire 175 on legs below the rail 170. A towing vehicle 181 that generates a traction force by the power transmitted to the horizontal wheels 190 to 193 to be pinched, and a universal joint 186 as a connecting portion having a degree of freedom in all directions with the towing vehicle 181, and the same vertical as described above. Wheel 1
A traveling vehicle 180 including horizontal wheels 190 to 193 for guiding traveling while sandwiching the central piece 173 of the rails 170, 96, 197 and an accompanying vehicle 182 equipped with various circuits.
The drive motor 183 and the pan head 18
4. A CMOS camera 185 for inspection supported by this is mounted.

(Operation of the Fourth Embodiment) In this embodiment, a traveling vehicle 180 composed of a towing vehicle 181 and an accompanying vehicle 182 travels along the rail 170 by the towing of the towing vehicle 181. A trolley 181 and a fixed station (not shown) having a signal transmission device, a power supply device, an image processing device, an operation panel, and the like installed on the ground and a towing vehicle 181 use a power source via a trolley wire 175 and a current collector 202. Power and various signals are received, and transmitted to the accompanying vehicle 182 via a cable (not shown) connecting the towing vehicle 181 and the accompanying vehicle 182, where necessary signals are transmitted by various circuits mounted thereon. Processing and control are performed, and the signal to be transmitted to the fixed station is transmitted via the reverse path.

(Effects of Fourth Embodiment) As described above, according to the fourth embodiment, a CMO for inspection is used instead of a CCD camera.
Since the S camera 185 is mounted, only one type of power supply for the camera and the control circuit is required, and various circuits mounted on the accompanying vehicle 182 can be reduced in size and simplicity. As a result, the drive motor 183 of the towing vehicle 181 can be downsized, and the traveling vehicle 180 and the rail 170 can be downsized.
The weight can be reduced.

In addition, since the inspection CMOS camera 185 has a high-density number of pixels, it performs image processing to obtain a zoomed-in screen from a wide screen without a mechanical mechanism. The camera can simultaneously obtain two types of images having different zoom-up amounts, thereby facilitating inspection work by remote control.

[First Modification] FIG. 29 is a block diagram showing a first modification of the fourth embodiment of the plant inspection apparatus according to the present invention.

(Configuration of the First Modification) As shown in FIG. 29, the abnormality detection device main body 205 is mounted on a platform 184, and the abnormality detection device main body 205 has a casing 226 mounted thereon.
Two half mirrors 209 and 210 are arranged in series with the reflection surface inclined at 45 ° to a straight line passing through the center of the window hole 208, and a lens is provided on the optical axis of light passing straight through the half mirrors 209 and 210. 211 and CMOS camera 2
12 are provided. An optical distance meter filter 213 and an optical distance meter 214 are provided on the optical axis of the reflected light from the half mirror 209 on the window hole 208 side, and are provided on the optical axis of the reflected light from the half mirror 210 on the lens 211 side. Infrared filter 215 and CMOS infrared camera 21
6 are provided.

The outputs of the lightwave distance meter 214 and the CMOS infrared camera 216 are output to the CMO via the image processing circuit 217.
The video signal of the S camera 212 is input to the abnormality detection processing control circuit 218 together with the video signal. The output of the abnormality detection processing control circuit 218 is transmitted to the moving mechanism controller 2 of the towing vehicle 181.
The moving mechanism controller 219 controls the moving mechanism driver 220 to drive the camera platform 184.

Therefore, the first modification is a CMO for inspection.
Instead of the S camera, a CMOS camera 212, a CMOS infrared camera 216, and a lightwave distance meter 214 are provided, and an abnormality detection device main body 205 that enables them to obtain an image from the same viewpoint is mounted on a camera platform 184.
Signals are transmitted and received between the image processing circuit 217 for processing the second image, the CMOS infrared camera 216, and the lightwave distance meter 214, and whether or not the abnormality detection device main body 215 faces the detection target 221 is determined. It has an abnormality detection processing control circuit 218 that performs processing such as presence / absence of a temperature distribution abnormality in the object 221 and identification of a temperature distribution abnormality location.

(Operation of the First Modification) First, the towing vehicle 181
The detection device main body 205 is moved to the position of the detection target 221 by this. In order to check whether the detection device main body 205 is correctly positioned in front of the detection target 221, an abnormality detection processing control circuit 218 is provided at the time when the movement is completed.
Issues a command to the image processing circuit 217 for shape recognition processing of the image captured by the CMOS camera 212. The image processing circuit 217, which has received the command of the shape recognition process, inputs the image captured by the CMOS camera 212, performs image processing on the image according to a predetermined procedure, extracts features related to the shape and color, and determines the result as abnormal. The answer is sent to the detection processing control circuit 218.

The abnormality detection processing control circuit 218 determines whether or not the feature extraction result stored by itself and the above-mentioned answer are equivalent. If they are equal, it means that the CMOS camera 212 is directly facing the detection target 221, and the process proceeds to the next step of abnormality detection. If they are not equal, the camera platform 184 is driven and the CMOS camera 212 captures an image from another viewpoint. The imaging with changing the viewpoint is repeated until the feature extraction result from the video and the feature extraction result stored in the abnormality detection processing control circuit 218 become equal. If the two are not equal even if the imaging is repeated while changing the viewpoint, it is left to the judgment of the operator. The operator determines whether to move the detection device main body 205 using the towing vehicle 181.

When it is confirmed that the detection device main body 205 is located in front of the detection object 221 as described above, the abnormality detection processing control circuit 218 sends a signal to the CMOS infrared camera 2.
16 is instructed to detect the temperature distribution on the infrared image from the same viewpoint as the CMOS camera 212. The CMOS infrared camera 216 receives the command,
The temperature distribution is detected, and the result is returned to the abnormality detection processing control circuit 218. This abnormality detection processing control circuit 218
Determines (by statistical processing) whether or not the answer is equivalent to a previously stored temperature distribution in a normal state. As a result, if it is determined that the operation is normal, the process proceeds to another part of the abnormality detection processing.

If the two do not match and it is determined that there is an abnormality, the abnormality detection processing control circuit 218 determines the portion of the screen where the abnormality is, sends a shape recognition processing command to the image processing circuit 217, and Ask for the shape of the temperature location.
Based on the answer from the image processing circuit 217 and the configuration database of the detection target 221 stored in advance, a comparison process is performed to determine which image element is abnormal temperature and which part. At this time, the detection processing control circuit 218 is
14 to accurately measure the distance between the abnormal part and the detection device main body 205.

(Effects of First Modification) As described above, according to the first modification, the CMOS camera 212, the CMOS infrared camera 216, and the lightwave distance meter 214 can process image data from the same viewpoint, respectively. Therefore, it is not necessary to perform a process of associating parts on an image as in the case where they are processing image data from different viewpoints, and high-speed and reliable abnormality detection can be performed. It can be carried out.

Further, by using the CMOS camera 212 and the CMOS infrared camera 216, data at random pixel positions can be extracted, so that image processing can be performed at high speed.

[Second Modification] FIG. 30 is a sectional view showing a second modification of the fourth embodiment of the plant inspection apparatus according to the present invention, FIG. 31 is a perspective view showing the inspection vehicle in FIG. 30, and FIG.
2 is a sectional view showing the inspection car in FIG. 30, and FIG. 33 is FIG.
FIG. 34 is a front sectional view showing the stop state of the inspection vehicle at 0.
FIG. 31 is a cross-sectional view showing a rotation mode of a rotation unit of the inspection car in FIG. 30.

(Structure of Second Modification) As shown in FIG. 30, an inspection wheel 231 is accommodated in a pipe 230 made of a transparent non-magnetic material suspended from the structure 16 and supported. An electromagnet 232 for stopping the inspection wheel 231 at the inspection point is installed on the outer circumference of the pipe 230, and a part of the inspection wheel 231 stopped at the inspection point close to them is rotated in the circumferential direction of the pipe 230. Electromagnets 233 and 234 are provided.

Further, a sensor 23 for magnetically detecting the position of the inspection wheel 231 at a plurality of arbitrary locations along the entire length of the pipe 230
5 are installed. The sensor 235 includes the control panel 23
6 is provided with a signal transmitter (not shown) for transmitting a sensor signal. Solenoid valves 237 to 24 at both ends of the pipe 230
0 is set. One of the solenoid valves 237 and 238 allows the inside of the pipe 230 to communicate with the atmosphere when opened, and the other solenoid valve 239 and 240 allows the inside of the pipe 230 to communicate with the discharge ports of the compressors 241 and 242 when opened.

The control panel 236 comprises electromagnets 232, 233,
A driver 243 that excites the 234 and drives the electromagnetic valves 237 to 240, a signal transmitter 244 that receives a wireless signal of an image from the inspection vehicle 231 and a signal from the sensor 235, and receives an instruction from an operator The operation panel 245 for providing guidance on the traveling state, the output of the signal transmitter 244, and the set value of the operation panel 245 are input.
The control device 2 that controls the driver 1243 with them
46. The signal of the signal transmitter 244 is the antenna 2
Sent from 47. The driver 243 and each electromagnet, solenoid valve, and the like are connected by an electric wire 248.

The inspection wheels 231 are located at both ends of the traveling vehicle as shown in FIG. 31 and have a cylindrical fixed portion 249 fitted to the inner peripheral surface of the pipe 230, and a checkable portion 249 provided on the opposite surface of the fixed portion 249. And a rotating unit 250 supported by rotation. The rotating part 250 is supported by a bearing 251. A CMOS camera 252 is attached to one point on the outer periphery of the rotating unit 250.

An elastic cover 253 that is in close contact with the inner peripheral surface of the pipe 230 is attached to the lens portion of the CMOS camera 252. On the opposite side of the position where the CMOS camera 252 is mounted, two permanent magnets 254 symmetrical with respect to a plane including the diameter are provided at positions symmetrical with respect to the diameter of the rotating unit 250 passing the position where the CMOS camera 252 is mounted.
Is attached.

As shown in FIGS. 30 and 33, a permanent magnet 255 is also mounted above the inside of the fixed portion 249. The permanent magnet 254 has the same pole in contact with the outer peripheral surface of the rotating unit 250, and the permanent magnet 255 has a different pole in contact with the outer peripheral surface.

[0215] Inside the inspection vehicle 231, a CMOS camera 252 mounted on the inspection vehicle 231 and a camera control unit (CCU) 25 for operating the CMOS camera 252 are provided.
6. A battery 117 serving as a power source such as a signal transmitter 257 for wirelessly transmitting a video signal of the CMOS camera 252 is mounted, and a signal transmission antenna 259 is provided.
Is attached.

The electromagnet 232 for stopping the inspection wheel 231 at the inspection point is installed on the upper surface of the pipe 230 at a distance between the two permanent magnets 255 in the fixing portion 249 of the inspection wheel 231 with the inspection point therebetween. ing. FIG.
As shown in FIG. 4, the electromagnets 233 and 234 for rotating the rotating unit 250 of the inspection wheel 231 are installed at a distance of two permanent magnets 254 in the rotating unit 250 of the inspection wheel 231. And a plurality of electromagnets 233, 234
Are arranged equally in the circumferential direction.

As described above, in the second modification, at least a portion corresponding to the inspection point is made of a transparent nonmagnetic material made of a non-magnetic material, and air pressure is applied to the pipe 230 from an arbitrarily selected end. And a fixing portion 249 located at both ends and fitted to the pipe 230, and a rotating portion 250 having both ends rotatably supported by the fixing portion 249.

Also, a CMOS camera 252 whose optical axis is matched with the diameter of the rotation unit 250 is provided in the rotation unit 250, and a camera control unit 25 for operating the camera 252.
6. A signal transmitter 257 for wirelessly transmitting an image taken by the camera 252 and a battery 2 serving as a power supply for driving the signal transmitter 257
58 are mounted.

Further, the inspection wheel 231 is composed of a pair of permanent magnets 254 arranged in the axial direction of the rotating part 250 by contacting magnetic poles of the same polarity on the outer peripheral surface of the rotating part 250 and two fixed parts. Each of the permanent magnets 250 has a permanent magnet 255 disposed on the inner peripheral surface of the fixed portion 250 such that a magnetic pole of the opposite polarity is in contact with the inner peripheral surface.

[0220] In the second modified example, the inspection wheel 231 is disposed near the inspection point along the pipe 230.
Sensors 235 for detecting the position of the inspection wheel 231 in response to the magnetism of the permanent magnet 254, and an electromagnet provided near the inspection point and stopping the inspection wheel 231 in cooperation with the permanent magnet 255 in the fixed portion 249. 232 and a permanent magnet 254 in the rotating unit 250 also provided near the inspection point.
233, 2 for rotating rotating section 250 in cooperation with
34, and a control panel 236 that controls the movement and stop of the inspection car 231 and the rotation of the rotating unit 250.

(Operation of Second Modification) Next, the operation of the second modification will be described.

First, the inspection car 231 is moved to a predetermined point. Now, let us consider a case of moving from right to left in FIG. In this case, (1) the solenoid valves 238, 2
39, the solenoid valves 237 and 240 are closed,
1, the air pressure of the compressor 241 is applied. The inspection wheel 231 is pushed by the air pressure in the pipe 230 and starts moving from the right side to the left side in the drawing.

The approximate position of the inspection car 231 is
The sensors 235 provided at a plurality of locations along the zero
1 generates a passing signal sensitive to the magnetism of the permanent magnets 254 and 255 mounted on the
4, which sensor position has passed is input to the control device 246.

In order to stop the inspection vehicle 231 at a predetermined inspection point, a stop position is set on the operation panel 245 of the control panel 236. Then, the sensor immediately before the inspection vehicle 23
1 passes, the electromagnet 232 of the inspection point
To the permanent magnets 255 in the fixing portions 249 corresponding to them.
The solenoid valves 239 and 238 are closed with a slight time lag, and the solenoid valves 23 and 238 are closed.
Open 7. This is done by the controller 246.
As a result, an attractive force is generated by the electromagnet 232 and the permanent magnet 255 with respect to the inspection wheel 231, and the air pressure that provides the propulsion is lost, so that the inspection wheel 231 can be stopped at the specified inspection point.

When the inspection wheel 231 is stopped at a predetermined inspection point in this way, it is necessary to inspect the portion of the pipe 230 that can be seen from the entire circumference. To do that,
It is necessary to rotate the CMOS camera 252 about the axis of the pipe 230 while keeping its optical axis coincident with the radius of the pipe 230. To perform this rotation, electromagnets 233 and 234 are used.

That is, one of the electromagnets 233 and 234 to which the permanent magnet 254 is actually facing is
The camera 252 and therefore the inspection car 231 equipped with it
The electromagnet adjacent in the direction in which the rotating unit 250 is to be rotated is excited with the opposite polarity to the permanent magnet 254, and the other electromagnets are excited with the same polarity. Then, the rotating unit 250 is rotated in the above-described direction by the attraction between the permanent magnet 254 and the electromagnet excited to the opposite polarity. If this is repeated one after another, the rotating unit 2
50, and thus the CMOS camera 252 can be rotated to a predetermined position and the position can be checked.

Note that the CMOS camera 252 has elasticity, and the cover 253 which is always in contact with the inner surface of the pipe 230.
The inspection video is good because is installed. The video taken in this way is wirelessly sent to the control panel 236 by the signal transmitter 257 and displayed on a display device (not shown). The operator performs an inspection while watching the display result.

When a detailed inspection is performed, the CMO
By changing the method of processing the pixel data captured by the S camera 252, the zoomed-up image is displayed and inspected. The display screen displays the zoomed-up image and the image captured at the wide angle at the same time, thereby facilitating the judgment of the operator.

(Effects of the Second Modification) As described above, according to the second modification, since the inspection car 231 itself is driven by a pneumatic system without providing a traveling device, it is easily available as a rail. Inexpensive pipe 230 can be used, and no driving mechanism is mounted, and since the CMOS camera 252 is mounted, the power portion and control system portion of the camera are reduced in size. As a result, the inspection vehicle 231 can be made small,
Since electric wires for driving electric power are not required, the necessity of maintenance is reduced, and cost performance is improved.

[0230]

As described above, according to the first aspect of the present invention,
According to the plant inspection device of the above, a hollow pipe installed three-dimensionally in the plant, a magnet piston that moves in the hollow pipe by compressed air, and a magnetic piston that is magnetically attracted in a non-contact manner with the magnet piston to move the magnet piston A monorail-type inspection robot that can follow and move three-dimensionally, a CMOS compound camera that is mounted on the monorail-type inspection robot, and that enables shooting in a hemispherical direction by combining a plurality of CMOS cameras, and an attachment to the monorail-type inspection robot And a control device for wirelessly transmitting measurement and video signals obtained from the CMOS camera, eliminating the need for mounting a driving means on the main body of the monorail inspection robot, thereby simplifying the structure of the monorail inspection robot. It is possible to reduce the size and size, and to easily manufacture it.

[0231] In addition, the CMO was added to the monorail inspection robot.
Equipped with an S-complex camera eliminates the need for a mechanical structure, drive unit, and power to change the field of view and change the field of view, making the equipment necessary for inspection smaller and lighter. , Can be easily manufactured.

Further, by using a CMOS camera, a small and lightweight storage battery can be used, so that a power supply device is not required. Can be manufactured. in addition,
Since the structure of the equipment required for inspection is small and lightweight, the structure of the monorail inspection robot is simpler and smaller, and can be easily manufactured.

According to the plant inspection method of the second aspect, a magnet piston is inserted into a hollow pipe installed in a plant, and compressed air is introduced into the hollow pipe to move the magnet piston. The monorail inspection robot, which is magnetically attracted in a non-contact manner, is moved three-dimensionally following the movement of the magnet piston, and the hemispherical direction is photographed by a CMOS compound camera combining a plurality of CMOS cameras, and the image is obtained from the CMOS camera. By transmitting the measured signal and the video signal to the fixed station by radio, the fixed station obtains the video signal, outputs the video signal to a display device, and performs an inspection operation.

According to the third aspect, in the plant inspection device according to the first aspect, the CMOS compound camera is located at the center.
Since a plurality of CMOS central cameras are arranged, and a plurality of CMOS peripheral cameras are arranged on the hemisphere around the CMOS central cameras, images can be taken in a wide angle range.

According to a fourth aspect of the present invention, in the plant inspection device according to the first or third aspect, a liquid crystal opening / closing shutter is provided by mounting two CMOS compound cameras each having a combination of a plurality of CMOS cameras as a stereoscopic CMOS camera. By wearing a pair of glasses and watching a monitor TV, you can observe the inspection target in a stereoscopic manner, so that you can remotely recognize a more realistic site situation and make more accurate decisions quickly. It can be carried out.

Further, since the monorail-type inspection robot is used to remotely monitor the status of assembly and the like, the perspective of the object can be obtained, so that it is possible to remotely perform monitoring for more accurate judgment.

According to the fifth aspect, in the plant inspection device according to the first or third aspect, the CMOS camera opposed to the CMOS peripheral camera is disposed so as to coincide with the front-rear direction of the monorail inspection robot. ,
A wide angle range can be photographed accurately.

According to a sixth aspect of the present invention, in the plant inspection apparatus according to the first aspect, an image photographed by the CMOS compound camera is converted into hemispherical digital image data, and the field of view and the size of the field of view can be electronically arbitrarily determined. By extracting and projecting the image on the display device of the fixed station in a plan view or a stereoscopic view, it is possible to remotely recognize a more realistic site situation, and it is possible to make a correct decision quickly.

According to claim 7, in the plant inspection device according to claim 1, a plurality of ball valves driven by an ultrasonic motor are incorporated in the hollow pipe, and the state of the compressed air in the hollow pipe is controlled by driving the ball valves. By making each variable, the hollow pipe can be made a long distance, so that a wide range of inspection work can be performed.

According to claim 8, in the plant inspection apparatus according to claim 1, the monorail-type inspection robot has fixed wheels supported at three or more points on the hollow pipe and is attached to these wheels. The provision of the rotation speed detecting means and the means for controlling the flow rate of the air flow inside the hollow pipe based on the signal from the rotation speed detecting means makes it easy to lay the hollow pipe, and the configuration of the monorail inspection robot Is simplified, and the reliability can be improved.

Further, since the speed can be adjusted to any speed from a low speed to a high speed, the inspection range is expanded, and quick and efficient inspection work can be performed.

According to the ninth aspect, in the plant inspection system according to the first aspect, an electromagnet is disposed at an arbitrary position outside the hollow pipe, and means for controlling whether or not the electromagnet is excited is provided. By stopping the inspection robot at any position, the monorail inspection robot can be transferred to the inspection position at high speed.
Inspection time can be reduced.

According to the tenth aspect, in the plant inspection device according to the first aspect, the CMOS camera has a half mirror disposed behind the condenser lens, and an infrared filter and an infrared ray are arranged on one optical axis through the half mirror. CM
By providing the OS image sensor unit and the CMOS image sensor unit on the other optical axis, the infrared image can be inspected by superimposing the infrared image on the visible light image, so that the spatial situation of the temperature abnormality can be observed, Situation determination can be performed easily and accurately.

According to the eleventh aspect, in the plant inspection device according to the first aspect, a projection is provided on an outer peripheral portion of the hollow pipe, and a wheel engaged and supported by the projection is attached to the monorail inspection robot. Therefore, the structure of the traveling portion of the monorail inspection robot can be reduced in size, and the hollow pipe can be easily manufactured.

According to the twelfth aspect, in the plant inspection apparatus according to the first aspect, a CMOS compound camera in which four CMOS cameras are mounted on a spherical portion of a quarter-divided sphere is mounted before and after a monorail type inspection robot. As a result, it is possible to use a CMOS camera with less stereoscopic vision in a direction perpendicular to the traveling direction of the monorail inspection robot within the range of the viewing angle of the CMOS camera.

According to the thirteenth aspect, in the plant inspection apparatus according to the first aspect, means for selecting only the CMOS camera facing the azimuth of the inspection target when performing the inspection work with the CMOS compound camera is provided. Since there is no processing for reconstructing an image having a hemispherical visual field using an image captured by the CMOS compound camera, the imaging system can be simplified.

According to a fourteenth aspect, in the plant inspection device according to the first aspect, the control device attaches an azimuth angle and an elevation angle to each pixel of each CMOS camera when synthesizing an image of each CMOS camera. By performing the processing of the image of the overlapping portion, the processing of obtaining a hemispherical image can be easily performed.

According to the fifteenth aspect, a guide rail three-dimensionally installed in a plant and made of a C-shaped structural member, an ultrasonic vibrator provided inside the guide rail, and movably supported by the guide rail. A monorail-type inspection robot, and a movable body provided in the monorail-type inspection robot and pressed against the ultrasonic vibrator, and the monorail-type inspection robot is guided by the guide rail while the movable body is pressed against the ultrasonic vibrator. And a monorail inspection robot that combines a plurality of CMOS cameras to enable imaging in a hemispherical direction, and wirelessly transmits measurement and video signals obtained from the CMOS cameras. By providing the control device, it is not necessary to provide an air generation source, so that the system can be simplified.

According to the sixteenth aspect, in the plant inspection apparatus according to the fifteenth aspect, in the CMOS compound camera, each CMOS camera is attached to the side surface, the bottom surface, and the front and rear surfaces of the monorail inspection robot so as to surround the guide rail. As a result, the width of the monorail inspection robot protruding from the guide rail can be reduced, and the guide rail can be installed even in a narrow passage cross-sectional area, and the inspection range at the installation place of complex structures can be expanded. it can.

According to the seventeenth aspect, the ultrasonic vibrator provided inside the guide rail according to the fifteenth aspect and the movable body pressed against the ultrasonic vibrator are mounted outside the guide rail. High-frequency current cable,
By providing an induction power supply that is attached to the monorail inspection robot and supplies power from the high-frequency current cable wirelessly, a long-distance rail system can be configured, and a power supply method that requires no maintenance is constructed. Operation becomes easy as a result.

According to the eighteenth aspect, the transparent hollow pipe installed three-dimensionally in the plant, the pipe-running inspection robot that moves in the transparent hollow pipe by compressed air, and the pipe-running inspection robot CMOS camera provided with a plurality of CMOS cameras provided in the circumferential direction, and a control device mounted on the pipe traveling type inspection robot and wirelessly transmitting measurement and video signals obtained from the CMOS camera, the CMOS camera has a semiconductor Since the manufacturing technology enables easy miniaturization and low power consumption, photographing and signal transmission can be performed with a small dry battery. Thus, by miniaturizing the inspection robot and running in the pipe, a small inspection system including the guide rail can be configured, and the system can be easily laid on the structure.

According to the nineteenth aspect, in the plant inspection apparatus according to the eighteenth aspect, the transparent hollow pipe is configured such that a transparent pipe is used only at a place to be inspected, and a metal pipe is used for other parts, so that a guide is provided. The structural strength of the rail system can be increased.

According to the twentieth aspect, a string is connected to the in-pipe traveling inspection robot in place of the compressed air for moving the in-pipe traveling inspection robot according to the eighteenth aspect, and this string is connected to both ends of the transparent hollow pipe. With a configuration in which the traveling inspection robot inside the pipe is transported along the inner surface of the transparent hollow pipe by winding or unwinding by the drive device installed on the surface, the compressed air supply system becomes unnecessary, and the inspection robot becomes unnecessary. The system configuration of the traveling system can be simplified.

According to the twenty-first aspect, in place of the compressed air for moving the in-pipe traveling inspection robot according to the eighteenth aspect, an ultrasonic vibrator is provided on the inner surface of the transparent hollow pipe on the side where the transparent hollow pipe is attached to the structure. While attaching
The movable body pressed against the ultrasonic vibrator is provided in the traveling inspection robot in the pipe, and the traveling inspection robot in the pipe is transferred along the inner surface of the transparent hollow pipe while the movable body is pressed against the ultrasonic vibrator. With this configuration, an air source is not required, and the system can be simplified. In addition, since the driving device is not provided in the inspection robot that is traveling in a pipe in principle, the structure of the inspection robot can be easily reduced in size.

According to the twenty-second aspect, in the plant inspection apparatus according to the twentieth aspect, a transparent hollow pipe having a driving device for winding and unwinding a string connected to the in-pipe traveling inspection robot attached to both end faces. , The inspection work efficiency can be improved.

According to the twenty-third aspect, a rail having a U-shaped section extending in the opposite direction and extending in the opposite direction to form a trolley wire support portion and a trolley wire supported on the lower surface thereof, and a leg piece below the rail. A tow truck that is provided with a current collector supported by vertical wheels and cooperates with a trolley wire, and that generates a tractive force by power transmitted to a horizontal wheel that clamps the rail, and a coupling unit having freedom in all directions with the tow vehicle Concatenated by
Equipped with the same vertical wheels as above and horizontal wheels that guide the running while holding the center piece of the rail, and a traveling vehicle consisting of an accompanying vehicle equipped with various circuits, and a towing vehicle supported by a drive motor and a pan head By installing a checked CMOS camera for inspection, only one power supply for the camera and the control circuit is required.
Various circuits mounted on the accompanying vehicle can be reduced in size and simplicity, and the accompanying vehicle can be reduced in size and weight. As a result, the drive motor of the towing vehicle can be reduced in size. In addition, the size and weight of the rail can be reduced.

According to claim 24, a CMOS camera, C
An anomaly detection device body including a MOS infrared camera and a distance meter and mounted on a camera platform so that images can be obtained from the same viewpoint, an image processing circuit for processing an image of a CMOS camera, a CMOS infrared camera, and a distance meter. Anomaly detection process control that sends and receives signals between the sensors and performs processing such as whether the main body of the abnormality detection device is directly facing the object to be detected, whether or not there is a temperature distribution abnormality in the object to be detected, and the location of the abnormal temperature distribution. CMOS camera, CMOS
Infrared cameras and rangefinders can process image data from the same viewpoint, respectively, so that they can be processed on image data as if they were processing image data from different viewpoints. The process of associating parts with each other is unnecessary, and high-speed and reliable abnormality detection can be performed.

Further, by using a CMOS camera or a CMOS infrared camera, data at random pixel positions can be extracted, so that image processing can be performed at high speed.

According to the twenty-fifth aspect, a pneumatic pipe made of a non-magnetic material having at least a portion corresponding to a check point made of a transparent material, and a means for applying air pressure to the pipe from an arbitrarily selected end portion, A CMOS camera having a fixed portion located at both ends and closely engaged with the pipe, and a rotating portion having both ends rotatably supported by the fixed portion, wherein the optical axis is matched with the diameter of the rotating portion in the rotating portion. A camera control unit for scanning the camera, a signal transmitter for wirelessly transmitting an image taken by the camera, and an inspection car equipped with a battery serving as a driving power source for the camera and a magnetic pole of the same polarity on the outer peripheral surface of the rotating part. A pair of permanent magnets which are in contact with each other and are spaced apart in the axial direction of the rotating part, a permanent magnet in which magnetic poles of opposite polarities are arranged on the inner peripheral surface of the fixed part in contact with each of the two fixed parts, and a pipe. along A plurality of sensors that are located near the inspection point and detect the position of the inspection vehicle in response to the magnetism of the permanent magnet of the inspection vehicle, and the inspection vehicle that is provided near the inspection point and cooperates with the permanent magnet in the fixed part An electromagnet for stopping the inspection, an electromagnet also provided near the inspection point and rotating the rotating part in cooperation with a permanent magnet in the rotating part, and a control panel for controlling movement, stop, rotation of the rotating part, etc. of the inspection car. By having the rail, an easily available and inexpensive pipe can be used as the rail, and since a driving mechanism is not mounted and a CMOS camera is mounted, the power portion and the control system portion of the camera are reduced in size. As a result, the inspection car can be made compact and no electric wires for driving power supply are required, so that the need for maintenance is reduced and the cost performance is improved.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a first embodiment of a plant inspection device according to the present invention.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is a bottom view showing the CMOS compound camera of FIG. 1;

FIG. 4 is a circuit configuration diagram showing an imaging element unit of a CMOS camera.

FIG. 5 is a timing chart showing the operation of the imaging element unit.

FIG. 6 is a potential diagram of a slice transistor.

FIG. 7 is a side view showing a first modification of the first embodiment of the plant inspection device according to the present invention.

FIG. 8 is a side sectional view showing a second modification of the first embodiment of the plant inspection device according to the present invention.

FIG. 9 is a side sectional view showing third and fourth modifications of the first embodiment of the plant inspection device according to the present invention.

FIG. 10 is a sectional view taken along line BB of FIG. 9;

FIG. 11 is a schematic configuration diagram showing a fourth modification of the first embodiment of the plant inspection device according to the present invention.

FIG. 12 is an essential part cross-sectional view showing a fifth modification of the first embodiment of the plant inspection device according to the present invention.

FIG. 13 is a sectional view showing a sixth modification of the first embodiment of the plant inspection device according to the present invention.

FIG. 14 is a plan view showing a CMOS compound camera in a seventh modification of the first embodiment of the plant inspection device according to the present invention.

FIG. 15 is a sectional view showing the CMOS compound camera of FIG. 14;

FIG. 16 is a sectional view showing a second embodiment of the plant inspection device according to the present invention.

FIG. 17 is a sectional view showing a first modification of the second embodiment of the plant inspection device according to the present invention.

FIG. 18 is a sectional view showing a second modification of the second embodiment of the plant inspection device according to the present invention.

FIG. 19 is a sectional view taken along line CC of FIG. 18;

FIG. 20 is a sectional view showing a third embodiment of the plant inspection device according to the present invention.

FIG. 21 is a sectional view taken along line DD of FIG. 20;

FIG. 22 is a sectional view showing a second modification of the third embodiment of the plant inspection device according to the present invention.

FIG. 23 is a sectional view showing a third modification of the third embodiment of the plant inspection device according to the present invention.

FIG. 24 is a perspective view showing the appearance of a fourth embodiment of the plant inspection device according to the present invention.

FIGS. 25A and 25B are a sectional view and a perspective view showing a rail according to a fourth embodiment.

FIG. 26 is a perspective view showing a running section of a traveling vehicle according to a fourth embodiment.

FIG. 27 is a plan view showing a running unit according to a fourth embodiment.

FIG. 28 is a side view showing a running unit according to the fourth embodiment.

FIG. 29 is a block diagram showing a first modification of the fourth embodiment of the plant inspection device according to the present invention.

FIG. 30 is a sectional view showing a second modification of the fourth embodiment of the plant inspection device according to the present invention.

FIG. 31 is a perspective view showing the inspection vehicle in FIG. 30.

FIG. 32 is a sectional view showing the inspection vehicle in FIG. 30;

FIG. 33 is a front sectional view showing a stop state of the inspection vehicle in FIG. 30;

FIG. 34 is a transverse sectional view showing a rotation mode of a rotating unit of the inspection vehicle in FIG. 30;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Monorail inspection robot 2 Pipe (hollow pipe) 3 Guide rail 3a T-shaped part 4 Traveling vehicle 5 CMOS composite camera 6 Case 7 Connection structure 8 Wheel 9 Electromagnetic adsorption structure 10 CMOS camera 11 Control device 12 Antenna 13 Condenser lens Reference Signs List 14 Image sensor unit 15 Mounting bracket 16 Structure 17 Magnet piston 18 Permanent magnet 19 Permanent magnet 20 Permanent magnet 21 CMOS central camera 22 CMOS peripheral camera 31 Photodiode 32 Amplification transistor 33 Vertical selection transistor (vertical selection means) 34 Reset transistor 35 Vertical Shift register 36 horizontal address line 37 reset line 38 vertical signal line 39 load transistor 44 horizontal shift register 45 horizontal signal line 48 slice transistor 49 slice capacity 50 slice Pulse supply terminal 51 Slice power supply terminal 52 Slice reset transistor 53 Slice reset terminal 54 Slice charge transfer capacitance 55 Storage drain power supply terminal 56 Drain reset transistor 57 Drain reset terminal 60 Horizontal selection transistor 61 Address pulse 62 Slice reset pulse 63 First slice pulse 64 Drain reset pulse 65 Reset pulse 66 Second slice pulse 67 Horizontal selection pulse 70 Ultrasonic motor 71 Ball valve 72 Seal member 73 Narrow tube 74 Connection flange 75 Seal member 76 Connection ring 80 Monorail inspection robot 81 Guide rail 82 Pipe 83 Fixed Wheel 84 Fixed wheel 85 Fixed wheel 86 Electromagnet 87 CMOS compound camera 88 Inspection car 89 Permanent magnet 90 Control Reference Signs List 91 solenoid valve 92 permanent magnet 93 electromagnet 94 camera control unit 95 driver 96 signal transmission device 97 antenna 98 battery 99 control device 100 compressor 101 driver 102 signal transmission device 103 operation panel 104 control device 105 half mirror 106 infrared filter 107 infrared CMOS image sensor Unit 108 CMOS camera 109 CMOS compound camera 110 Control device 111 Monorail inspection robot 112 Guide rail 113 Fixture 114 Concave structure material 115 Projection 116 Pipe 117 Case 118 Wheel 120 CMOS camera 121 Split CMOS compound camera 122 Mounting member 123 Connection member 125 Monorail type inspection robot 126 Guide rail 127 Fixing bracket 128 Ultrasonic vibration 129 Running part 130 Wheel 131 Wheel 132 Axis 133 Spring 134 Moving body 135 Monorail inspection robot 136 Side CMOS camera 137 Bottom CMOS camera 140 Monorail inspection robot 141 High-frequency current cable 142 Induction power supply 143 Driving device 144 Driving shaft 145 Driving wheel 150 In-pipe traveling type inspection robot 151 Transparent hollow pipe 152 Controller 153 Case 154 Storage battery 155 String 156 Driving device 157 Stand 158 Floor 159 Relay device 160 Ultrasonic vibrator 161 Movable body 162 Guide spring 163 Sphere 164 Spring 170 Rail Car 171 Support part 172 Trolley wire support part 173 Central piece 174 Insulator 175 Trolley wire 180 Traveling vehicle 181 Traction vehicle 182 Trailing vehicle 183 Driving motor 1 84 Head 185 Inspection CMOS camera 186 Universal joint 187 Connecting rod 188 Top plate 189 Top plate 190 Horizontal wheel 191 Horizontal wheel 192 Horizontal wheel 193 Horizontal wheel 194 Lever 195 Spring 196 Vertical wheel 197 Vertical wheel 198 Pressing mechanism 199 Spring adjusting screw Spring 201 Conduction / deceleration system 202 Current collector 205 Abnormality detection device main body 206 Casing 209 Half mirror 210 Half mirror 211 Lens 212 CMOS camera 213 Light wave distance meter filter 214 Light wave distance meter 215 Infrared filter 216 CMOS infrared camera 217 Image processing circuit 218 Error detection Processing control circuit 219 Moving mechanism controller 220 Moving mechanism driver 221 Object to be detected 230 Pipe 231 Inspection car 232 Electromagnet 2 3 Electromagnet 234 Electromagnet 235 Sensor 236 Control panel 237 Solenoid valve 238 Solenoid valve 239 Solenoid valve 240 Solenoid valve 241 Compressor 242 Compressor 243 Driver 244 Signal transmitter 245 Operation panel 246 Control unit 247 Antenna 248 Electric wire 249 Fixed part 250 Rotating part 251 Bearing 252 CMOS camera 253 Cover 254 Permanent magnet 255 Permanent magnet 256 Camera control unit (CCU) 257 Signal transmitter 258 Battery 259 Antenna

Continued on the front page (72) Inventor Satoshi Okada 8 Shinsugita-cho, Isogo-ku, Yokohama-shi, Kanagawa Prefecture Inside the Toshiba Yokohama Office (72) Inventor Yuji Takiguchi 2--4 Suehirocho, Tsurumi-ku, Yokohama-shi, Kanagawa Toshiba Inside Keihin Office (72) Inventor Yutaka Yamashita 2-4-4 Suehirocho, Tsurumi-ku, Yokohama-shi, Kanagawa Prefecture Inside Keihin Office Toshiba Corporation (72) Kunihiko Yokoyama 1-1-1, Shibaura, Minato-ku, Tokyo Toshiba Corporation In the office

Claims (25)

[Claims] 1. A hollow pipe installed three-dimensionally in a plant, a magnet piston moving in the hollow pipe by compressed air, and magnetically attracted without contact with the magnet piston to follow the movement of the magnet piston. A three-dimensionally movable monorail-type inspection robot,
CMOS attached to this monorail type inspection robot
A plant comprising: a CMOS composite camera capable of capturing images in a hemispherical direction by combining a plurality of cameras; and a control device attached to the monorail inspection robot and wirelessly transmitting measurement and video signals obtained from the CMOS camera. In the inspection device, the imaging device unit of the CMOS camera includes an imaging region in which unit cells including photodiodes are arranged in a matrix two-dimensionally on a semiconductor substrate, and a vertical selection unit that selects a readout row of the imaging region. Means, a plurality of vertical signal lines arranged in a column direction for reading out a detection signal of a photodiode corresponding to the selected row, and a detection signal from these vertical signal lines to a horizontal signal line arranged in a row direction. A horizontal transistor for sequentially reading, and a voltage appearing on the vertical signal line between the vertical signal line and the horizontal selection transistor. Converts the charge, and plant inspection apparatus characterized by comprising providing a noise reduction circuit for suppressing noise by subtraction in the charge area. 2. A magnet piston is inserted into a hollow pipe installed in a plant, compressed air is introduced into the hollow pipe to move the magnet piston, and the magnet piston is magnetically attracted in a non-contact manner with the magnet piston. The monorail-type inspection robot is moved three-dimensionally following the movement of the magnet piston, and is photographed in the hemisphere direction by a CMOS compound camera in which a plurality of CMOS cameras are combined, and measurement and images obtained from the CMOS camera are performed. A method for inspecting a plant, wherein a signal is transmitted to a fixed station by radio, while the fixed station obtains the video signal and outputs the image signal to a display device for inspection. 3. The CMOS inspection camera according to claim 1, wherein the CMOS compound camera has one CMOS central camera arranged at the center and a plurality of CMs around the CMOS central camera.
A plant inspection device, wherein OS peripheral cameras are evenly arranged on a hemisphere. 4. The plant inspection apparatus according to claim 1, wherein a CMOS camera is combined with a plurality of CMOS cameras.
A plant inspection apparatus comprising two S-complex cameras attached to each other to constitute a stereoscopic CMOS camera. 5. The plant inspection apparatus according to claim 1, wherein the CMOS camera facing the CMOS peripheral camera is arranged so as to coincide with the front-rear direction of the monorail inspection robot. apparatus. 6. The plant inspection apparatus according to claim 1, wherein the image taken by the CMOS compound camera is converted into hemispherical digital image data, and the direction of the field of view and the size of the field of view are arbitrarily electronically extracted and fixed. A plant inspection device characterized in that the display is projected on the display device in a plan view or a stereoscopic view. 7. The plant inspection device according to claim 1, wherein a plurality of ball valves driven by an ultrasonic motor are incorporated in the hollow pipe, and the state of the compressed air in the hollow pipe is made variable by driving the ball valve. A plant inspection device characterized by the above-mentioned. 8. The plant inspection apparatus according to claim 1, wherein the monorail inspection robot has fixed wheels supported at three or more points on the hollow pipe, and rotational speed detection means attached to these wheels. Means for controlling the flow velocity of the air flow inside the hollow pipe based on a signal from the rotation speed detecting means. 9. The plant inspection apparatus according to claim 1, wherein an electromagnet is arranged at an arbitrary position outside the hollow pipe, and means for controlling whether or not the electromagnet is excited is provided. A plant inspection device characterized by stopping at a position. 10. The plant inspection device according to claim 1, wherein the CMOS camera has a half mirror disposed behind the condenser lens, and an infrared filter and an infrared CMOS imaging device on one optical axis through the half mirror. A plant inspection device, wherein a CMOS image sensor is provided on the other optical axis. 11. The plant inspection apparatus according to claim 1, wherein a projection is provided on an outer peripheral portion of the hollow pipe, and a wheel engaged with and supported by the projection is attached to a monorail inspection robot. apparatus. 12. The inspection apparatus according to claim 1, wherein a CMOS compound camera having four CMOS cameras mounted on a spherical portion of a quarter-divided sphere is mounted before and after a monorail inspection robot. Plant inspection equipment. 13. The plant inspection device according to claim 1, further comprising means for selecting only a CMOS camera facing the direction of the inspection target when performing inspection work with the CMOS compound camera. . 14. The plant inspection device according to claim 1, wherein the control device, when synthesizing the image of each CMOS camera, assigns an azimuth angle and an elevation angle to each pixel of each CMOS camera to obtain an image of an overlapping portion. A plant inspection device that performs processing. 15. A guide rail three-dimensionally installed in a plant and made of a C-shaped structural material, an ultrasonic vibrator provided inside the guide rail, and a monorail type movably supported by the guide rail. An inspection robot, and a movable body provided on the monorail type inspection robot and pressed against the ultrasonic vibrator, and the monorail type inspection robot is connected to the guide rail while the movable body is pressed against the ultrasonic vibrator. The monorail type inspection robot is configured to combine a plurality of CMOS cameras so as to be able to capture images in a hemispherical direction.
A plant inspection device including a compound camera and a control device for wirelessly transmitting measurement and video signals obtained from the CMOS camera, wherein the imaging element unit of the CMOS camera includes a photodiode on a semiconductor substrate An imaging area in which unit cells are arranged in a two-dimensional matrix, vertical selection means for selecting a readout row of this imaging area, and a column direction for reading out a detection signal of a photodiode corresponding to the selected row. A plurality of vertical signal lines, and a horizontal transistor that sequentially reads detection signals from these vertical signal lines to horizontal signal lines arranged in the row direction, between the vertical signal line and the horizontal selection transistor. It is characterized in that a noise removal circuit is provided which converts the voltage appearing on the vertical signal line into electric charges and subtracts it in the electric charge region to suppress noise. Plant inspection apparatus according to. 16. The plant inspection apparatus according to claim 15, wherein the CMOS composite camera is mounted on the side, bottom, and front and rear surfaces of the monorail inspection robot so as to surround the guide rail. Inspection device. 17. A high-frequency current cable attached to the outside of the guide rail, instead of an ultrasonic vibrator provided inside the guide rail, and a movable body pressed against the ultrasonic vibrator, a monorail type. The plant inspection apparatus according to claim 15, further comprising: an induction power supply device attached to the inspection robot and supplied with power from the high-frequency current cable in a contactless manner. 18. A transparent hollow pipe three-dimensionally installed in a plant, a traveling inspection robot in a pipe moving in the transparent hollow pipe by compressed air, and a plurality of inspection robots in the circumferential direction of the inspection robot traveling in a pipe. A plant inspection device comprising: a CMOS camera provided; and a control device attached to the traveling inspection robot in a pipe and wirelessly transmitting measurement and video signals obtained from the CMOS camera. The imaging element unit includes an imaging region in which unit cells including photodiodes are arranged in a two-dimensional matrix on a semiconductor substrate, a vertical selection unit for selecting a readout row of the imaging region, and a pixel corresponding to the selected row. A plurality of vertical signal lines arranged in a column direction for reading out a detection signal of a photodiode to be read, and arranged in a row direction from these vertical signal lines. A horizontal signal line has a horizontal transistor for sequentially reading out a detection signal, and a voltage appearing on the vertical signal line is converted into a charge between the vertical signal line and the horizontal selection transistor, and subtraction is performed in a charge region. A plant inspection apparatus characterized by comprising a noise elimination circuit for suppressing noise. 19. The plant inspection device according to claim 18, wherein the transparent hollow pipe is a transparent pipe only at a place where inspection is desired, and the other portion is a metal pipe. 20. A string is connected to the pipe-running inspection robot in place of the compressed air for moving the pipe-running inspection robot, and the string is wound by a driving device installed on both end portions of the transparent hollow pipe. 2. The inspection robot according to claim 1, wherein the inspection robot is transported along the inner surface of the transparent hollow pipe by unwinding or unwinding.
8. The plant inspection device according to 8. 21. An ultrasonic vibrator is attached to the inner side of the transparent hollow pipe on the side where the transparent hollow pipe is attached to the structure, instead of the compressed air that moves the traveling inspection robot in the pipe. A movable body to be pressed is provided on the traveling inspection robot in the pipe, and the inspection robot traveling in the pipe is transferred along the inner surface of the transparent hollow pipe in a state where the movable body is pressed against the ultrasonic vibrator. 19. The plant inspection device according to claim 18, wherein: 22. The plant inspection device according to claim 20, wherein a transparent hollow pipe having a driving device for winding and unwinding a string connected to an in-pipe traveling inspection robot attached to both end portions is portable. A plant inspection device characterized by the following. 23. A rail having a U-shaped cross section extending in the opposite direction and extending in the opposite direction to form a trolley wire support, and a trolley wire is supported on the lower surface of the rail, and a leg below the rail is supported by a vertical wheel. The trolley wire is provided with a current collector that cooperates with the trolley wire, and is connected to a towing vehicle that generates a traction force by power transmitted to a horizontal wheel that clamps the rail, and a connecting portion having freedom in all directions with the towing vehicle. A traveling vehicle including a vertical wheel similar to that described above and a horizontal wheel that guides traveling by sandwiching a central piece of the rail, and a trailing vehicle equipped with various circuits; and a driving motor and a cloud mounted on the towing vehicle. A plant inspection apparatus comprising a CMOS camera for inspection supported on a table. 24. An anomaly detection device main body including a CMOS camera, a CMOS infrared camera, and a range finder mounted on a camera platform so as to obtain an image from the same viewpoint,
An image processing circuit for processing an image of a MOS camera;
Signals are transmitted and received between the OS infrared camera and the distance meter, and whether or not the abnormality detection device body is directly facing the detection target, whether or not there is a temperature distribution abnormality in the detection target, and identification of a temperature distribution abnormality location A plant inspection device, comprising: an abnormality detection processing control circuit that performs processing such as the above. 25. A pneumatic pipe made of a non-magnetic material having at least a portion corresponding to a check point made transparent,
A means for applying air pressure to the pipe from an arbitrarily selected end, a fixed part located at both ends and closely engaged with the pipe, and a rotating part rotatably supported at both ends by the fixed part. A CMOS camera having an optical axis coincident with the diameter of the rotating part in the rotating part, a camera control unit for scanning the camera, a signal transmitter for wirelessly transmitting an image taken by the camera, and a driving power source for them. Inspection vehicle equipped with a battery, a pair of permanent magnets arranged in the axial direction of the rotating part by abutting magnetic poles of the same polarity on the outer peripheral surface of the rotating part, and each of the two fixed parts A permanent magnet arranged in contact with a magnetic pole of the opposite polarity on the inner peripheral surface of the fixed portion, and a permanent magnet arranged in the vicinity of the inspection point along the pipe and located in the vicinity of the inspection point, in response to the magnetism of the permanent magnet of the inspection vehicle. Detect position Number sensor, an electromagnet provided near the inspection point and cooperating with a permanent magnet in the fixed portion to stop the inspection vehicle, and a rotating portion also provided near the inspection point and cooperating with a permanent magnet in the rotating portion. A plant inspection device comprising: an electromagnet for rotating the inspection vehicle; and a control panel for controlling movement, stop, rotation of a rotating unit, and the like of the inspection vehicle.