JPH10215151A - High voltage pulse power supply unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a high voltage pulse power supply unit capable of uniformly outputting the high voltage pulses of steep rise to the discharging part of a large-sized waste gas processor. SOLUTION: This unit is provided with a high voltage DC power supply 1, a pulse discharging circuit part 2 for discharging electric charges charged by the high voltage DC power supply 1 through a switch 22 for discharging and outputting the high voltage pulses and a power supply current limiting means 3 for interrupting or limiting conducting between the high voltage DC power supply 1 and the pulse discharging circuit part 2. In this case, the pulse discharging circuit part 2 is provided with a pair of input terminals 20 and the dispersedly arranged plural pairs of output terminals 21, the switch 22 for discharging is connected between the input terminals 20, capacitors 23 for discharging are respectively arranged near the respective output terminals 21 and connected among the respective output terminals 21 and one end of the respective output terminals 21 is connected with each other. Further, the capacitor 24 for charging and an inductor 25 are serially connected between the connection point 21c and one end of the input terminal 20 and a switch means 4 for charging is connected between at least a pair of the output terminals 21.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-voltage pulse power supply device which can be used in an exhaust gas treatment for removing dust, harmful gas and the like in a gas by generating plasma by high-voltage pulse charging. It is intended for large-capacity exhaust gas treatment equipment.

[0002]

2. Description of the Related Art As one of high voltage pulse power supply devices, there is a discharge excitation circuit for an excimer laser. As a pulse discharge circuit used in the discharge excitation circuit for this excimer laser,
For example, a capacitance transfer type circuit shown in FIG. 3, an LC inversion type circuit shown in FIG. 4, and the like are conventionally known.

[0003] circuit operation of capacitive transitional circuit of FIG. 3, first, the one end of the charging capacitor C ₁ is grounded via the charging inductor L _c, the charging capacitor C ₁ is at a high voltage V ₀ It is charged, when closing the discharge switch S discharges the charging capacitor C _1, the charge charged in the charging capacitor C ₁ is transferred to the discharging capacitor C _2. The voltage of the discharging capacitor C ₂ becomes sufficiently high, the load R when _L reaches the breakdown voltage of the discharging capacitor C _2, the load R _L and the inductor L ₂ LCR
Pulse discharge occurs in the main discharge circuit. In general, the inductor L ₂ can be a small value due to the stray inductance component of the load _RL , and the charging inductor L 2
The inductance of _c by a sufficiently large value than the inductance of the other inductor, the LCR main discharge circuit operates as LCR circuit capable steep rise of the pulse generation without being affected by the charging inductor L _c I do.

The circuit operation of the LC inversion type circuit shown in FIG.
No, charging capacitor C_TwoIs one end of the charging inductor
L_cAnd the capacitor C for discharging₁And said
Charging capacitor C_TwoIs the inductor L₁Via high voltage
V₀Is charged. The charging inductor L_cInda
Sufficient inductance compared to other inductors
By setting the value to a large value, the discharge switch S is closed.
The discharge capacitor C₁Only before starting to discharge
Discharge capacitor C₁Is the inductor L ₁When
The discharging capacitor C₁Resonates with LC circuit formed by
Then V₀To -V₀Up to 2V₀Change. On the other hand,
Electric capacitor C_TwoBecomes sufficiently high, and the load R_Lof
Until the discharge breakdown voltage is reached, the discharging capacitor C
₁, The charging capacitor C_Two, The load R_LAnd indah
Kuta L_TwoNo current flows through the LCR main discharge circuit of
Electric capacitor C_TwoIs the initial value V₀Maintain
Therefore, the load R_LIs applied from 0 to -2V₀
And at this time, the load R_LDischarge breakdown voltage of
Then, a pulse discharge occurs in the LCR main discharge circuit.
You. The inductor L_TwoIs the load R_LStray Induct
Can be reduced to a small value by the
Inductor L_cIs significantly larger than other inductors
The LCR main discharge circuit
The operation of the charging inductor L_cBe affected by
And a steep rising pulse can be generated.

Furthermore, the basic LCR circuit obtained by removing the discharging capacitor C ₂ from the capacity transition type circuits shown in FIG. 3, so that it can initiate a uniform discharge to the load of a large capacity, divide the load also known pulse discharge circuit of a parallel configuration in which the respective said charging capacitor C ₁ with a partitioned load. For example, a circuit configuration shown in FIG. 5 is disclosed in Japanese Patent Application Laid-Open No. 3-114533.

[0006]

The capacity transfer type circuit and the LC inversion type circuit shown in FIGS. 3 and 4 are used as a pulse discharge circuit of a discharge excitation circuit for an excimer laser.
In order to generate a uniform glow discharge in the discharge part of the excimer laser, the circuit constant of each part is set so that the discharge time is several nanoseconds. However, even when applied directly to the pulse discharge circuit of the high-voltage pulse power supply of the exhaust gas treatment device, a stray rising high-voltage pulse was not obtained due to the large stray capacitance of the load, and discharge could not be generated in a short time. .

Specifically, in the case of the capacitance transfer type circuit shown in FIG.
The charging capacitor C₁The load is exhaust gas treatment
Arrange sufficiently close to the discharge part consisting of the discharge electrode and ground electrode of the device.
And the charging capacitor C₁And wiring between the load and
And the inductor being stray inductance of the load.
L_TwoNeed to reduce the inductance of
If the processing equipment is large, the discharge
First, the charging capacitor C₁Can be placed near
Becomes difficult, and in fact, the load and the inductor L _TwoIs a minute
A cloth constant circuit is formed, and the inductor
L_TwoThe inductance of the pulse increases,
This causes a problem that uniform discharge cannot be performed.
In the case of the LC inversion type circuit of FIG.
As in the case, the discharging capacitor C₁And the charge
Electric capacitor C_TwoThe load is the exhaust gas treatment equipment discharge
Part close enough to the charging capacitor C_TwoWhen
The wiring between the loads and the stray inductance of the load
A certain inductor L_TwoThe inductance of
However, if the exhaust gas treatment device is large,
The discharging capacitor C uniformly over the entire part.₁And before
Charging capacitor C_TwoDifficult to place close and
In fact, the load and the inductor L_TwoIs the distribution constant
Forming a circuit, and for some loads, the inductor L_Twoof
Inductance increases, pulse rises slowly
This causes a problem that uniform discharge cannot be performed.

In the case of the pulse discharge circuit shown in FIG.
Although the load is divided, the stray capacitance C _{L for} each divided load does not become a very large value. However, since the discharge switch S cannot be arranged close to the discharge part of the exhaust gas treatment device as the load, the charge Capacitor C ₁
And the discharge becomes large stray inductance L ₁ of the wiring between the switch S, the constant is increased when the LCR circuit formed for each load, there is a problem that can not steep rise of the pulse generator.

An object of the present invention is to solve the above-mentioned problems,
A high-voltage pulse power supply device capable of uniformly outputting a high-speed pulse with a steep rise to a discharge portion of the exhaust gas treatment device even for a large-capacity load such as a large exhaust gas treatment device. It is in.

[0010]

A first characteristic configuration of the high-voltage pulse power supply according to the present invention for achieving this object is a high-voltage DC power supply as described in claim 1 of the claims. A power supply, a pulse discharge circuit unit that outputs a high-voltage pulse by discharging a charge charged by the high-voltage DC power supply through a discharge switch, and conduction between the high-voltage DC power supply and the pulse discharge circuit unit The pulse discharge circuit unit includes a plurality of pairs of output terminals arranged in a distributed manner with a pair of input terminals, and the discharge switch is provided between the input terminals. Connected, a discharging capacitor is arranged in the vicinity of each of the output terminals and connected between the output terminals, one end of each of the output terminals is connected to each other, and the connection point and one end of the input terminal are connected to each other. In between Connect the use capacitors and inductors in series, in point constituted by connecting at least charging switch means between a pair of terminals of said output terminals.

The second characteristic configuration is that, as described in claim 2 of the claims, a high-voltage DC power supply and a charge charged by the high-voltage DC power supply are discharged through a discharge switch. A pulse discharge circuit unit that outputs a high-voltage pulse, and a power supply current limiting unit that interrupts or limits conduction between the high-voltage DC power supply and the pulse discharge circuit unit. A plurality of pairs of input terminals and a plurality of pairs of output terminals arranged separately are provided, the discharge switch is connected between the input terminals, and a discharge capacitor and a charge capacitor are connected in series near the respective output terminals. Arrange things and connect between each output terminal,
The intermediate points of the discharging capacitors and the charging capacitors connected in series are connected to each other, an inductor is connected between the connection point and one end of the input terminal, and each terminal is connected between the terminals of the output terminal pair. It is configured by connecting charging switch means.

The operation and effect will be described below. According to the first characteristic configuration, between the output terminals and the input terminals, the capacitance transition type circuits illustrated and illustrated in FIG. 3 in the related art described above are respectively formed. When the discharging switch is opened, the charging capacitor is connected to the charging switch means provided between at least one of the output terminals and the inductor connected in series with the charging capacitor. Charged from high voltage DC power supply. Here, the power supply current limiting means is controlled so as to conduct the charging current during the charging, or an element which conducts is used. When the discharging switch is closed after the charging capacitor is charged, the respective capacitance transition circuits formed for each of the output terminals operate as a capacitance transition circuit in synchronization with each other, and The charge charged in the capacitor is transferred to the discharging capacitor,
At the same time, the LC circuits operate with substantially the same time constant between the respective capacitance transition type circuits, and generate a high voltage twice the charging level at the respective output terminals at the same timing.

When the high voltage is generated at each output terminal, the high voltage is formed by a load connected to each output terminal, a capacitor between the output terminals, a load, and a stray inductance between the load and the output terminal. The timing at which each of the LCR main discharge circuits starts the operation of the LCR circuit is also substantially synchronized.

Further, in the LCR main discharge circuit, since the respective output terminals are dispersedly arranged, the respective output terminals and the load can be arranged close to each other, and the stray inductance in the LCR main discharge circuit can be reduced to a small value. In addition, since a large-capacity load can be divided and connected to each of the output terminals, the load capacity can be reduced, and as a result, the time constant of the LCR main discharge circuit is suppressed to be small. Can,
The steep rise of the pulse voltage applied to the load can be realized.

According to the first characteristic configuration, the wiring length between the connection point connecting the output terminals and one end of the input terminal becomes long, and there is a possibility that the stray inductance therebetween becomes large. However, it should be noted that this stray inductance does not directly affect the steep rise of the pulse voltage applied to the load because it is not a factor that determines the time constant of the LCR main discharge circuit.

According to the second characteristic configuration, the LC inversion type circuit illustrated and illustrated in FIG. 4 in the above conventional technique is formed between each of the output terminals and the input terminal. When the discharging switch is opened, the charging capacitor provided between the output terminals is connected via the inductor, and the discharging capacitor provided between the output terminals is connected to the terminal of each output terminal pair. The battery is charged from the high-voltage DC power supply via the charging switch means and the inductor connected in series with the charging capacitor. When the discharging switch is closed after the charging capacitors and the discharging capacitors are charged, the LC inversion circuits formed for the respective output terminals are synchronized with each other to form an LC inversion circuit. Since the circuit operates and the time constant of the LC circuit operation is substantially the same between the respective capacitance transition type circuits, the voltage at the intermediate point between the series-connected discharging and charging capacitors changes at the same timing to the same voltage value of opposite polarity. Further, since each of the discharging capacitors follows the change of the voltage at the intermediate point while maintaining the voltage between both ends, a high voltage twice the charging level is generated at each output terminal at the same timing.

When a high voltage is generated at each of the output terminals, a load connected to each of the output terminals, the charging capacitor and the discharging capacitor between the output terminals, the load, and the load and the output terminal The timing at which each of the LCR main discharge circuits formed by the stray inductance between them starts the operation of the LCR circuit is also substantially synchronized.

Furthermore, in the LCR main discharge circuit, as in the first characteristic configuration, the output terminals are dispersedly arranged, so that the stray inductance in the LCR main discharge circuit can be reduced. In addition, since a large-capacity load can be divided and connected to each of the output terminals, the load capacity can be reduced to a small value. As a result, the time constant of the LCR main discharge circuit can be suppressed small, and the load can be reduced. The steep rise of the applied pulse voltage can be realized.

According to the second characteristic configuration, the wiring length between the connection point connecting the intermediate points and one end of the input terminal becomes longer, and there is a possibility that the stray inductance therebetween becomes larger. However, it should be noted that this stray inductance does not directly affect the steep rise of the pulse voltage applied to the load because it is not a factor that determines the time constant of the LCR main discharge circuit.

[0020]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an equivalent circuit diagram of a circuit configuration showing a first embodiment of a high-voltage pulse power supply device (hereinafter, referred to as a device of the present invention) according to the present invention. As shown in FIG. 1, the apparatus of the present invention includes a high-voltage DC power supply 1, a pulse discharge circuit unit 2, and a power supply current limiting unit for interrupting or restricting conduction between the high-voltage DC power supply 1 and the pulse discharge circuit unit 2. 3 Here, the function of the power supply current limiting means 3 is to supply a charging current from the high-voltage DC power supply 1 to the pulse discharge circuit section 2 and to convert a high-frequency current generated in the pulse discharge circuit section 2 into the high-voltage DC It suffices to function as a low-pass filter that can prevent backflow to the power supply 1. As the power supply current limiting means 3, a high-inductance inductor 3 a can be used.

As shown in FIG. 1, the pulse discharge circuit section 2 has a pair of input terminals 20 and a plurality of pairs of output terminals 21 arranged in a distributed manner. One of the input terminals 20 is grounded, and the other 20a is connected to the high-voltage DC power supply 1 via the inductor 3a. Further, a discharge switch 22 is connected between the input terminals 20. As the discharge switch 22, a thyratron or a rotary gap switch, which is a high voltage switch element, is used. On the other hand, the discharging capacitor 2 is connected between the output terminals 21.
3 are connected to each other. In an actual circuit layout, the output terminals 21 and the discharge capacitors 23 connected to the output terminals 21 are arranged close to each other in order to reduce stray inductance of the output terminals 21. One of the output terminals 21 is grounded and the other 21
a are mutually connected by a wiring 21b, and the connection point 2
1c and the input terminal 20a.
4 and the inductor 25 are connected in series. FIG.
In the middle, the capacitor 26 indicates the stray capacitance of the wiring 21b, and is not a positively provided capacitor. In addition, the inductor 25 includes the wiring 21b.
The stray inductance component is included.

Further, a charging switch means 4 is connected between at least one pair of the output terminals 21.
Since the required function of the charging switch means 4 is the same as that of the power supply current limiting means 3, the inductor 4a can be used.

As shown in FIG. 1, in the apparatus of the present invention, a discharge section 7 composed of a discharge electrode 5 and a ground electrode 6 of an exhaust gas treatment apparatus is divided into a plurality of discharge terminals 21 at each output terminal 21 of the pulse discharge circuit section 2. Are connected as respective loads. FIG.
The capacitor 8 indicates the sum of the capacitance between the divided discharge electrode 5 and the ground electrode 6 and the stray capacitance of the wiring 5a between each discharge electrode 5 and each output terminal 21a. , The inductor 9 indicates the stray inductance of each of the wires 5a, and neither is a positively provided circuit element. In addition, each of the output terminals 21
Can be arranged in close proximity to each of the divided discharge units 7, so that the inductance value of the inductor 9 can be suppressed to an extremely low value.

Here, the high-voltage DC power supply 1, the inductor 3a, the discharging switch 22, the discharging capacitor 23, the charging capacitor 24, the inductor 25, the capacitor 26, the inductor 4a, and the capacitor 8 In addition, with the circuit configuration including the inductor 9, a pulse transfer circuit system of a capacity transition type is formed for each of the output terminals 21.

FIG. 2 is an equivalent circuit diagram of a circuit configuration of the second embodiment of the present invention. Note that, in FIG. 2, the same reference numerals are given to components common to the first embodiment. Next, a second embodiment will be described in comparison with the first embodiment.

As shown in FIG. 2, the apparatus of the present invention comprises a high-voltage DC power supply 1, a pulse discharge circuit section 2, and an inductor 3a serving as power supply current limiting means 3. It is the same as the first embodiment in that a plurality of divided discharge units 7 each composed of the discharge electrode 5 and the ground electrode 6 of the exhaust gas treatment device are connected to the terminal 21 as respective loads. The same applies to the capacitor 8 and the inductor 9 in FIG.

The pulse discharge circuit unit 2 includes a plurality of pairs of output terminals 2 arranged in a distributed manner with a pair of input terminals 20.
1, one of the input terminals 20 is grounded and the other
a is the high-voltage DC power supply 1 via the inductor 3a.
A discharge switch 22 is connected between the input terminals 20, and one of the output terminals 21 is grounded, and the other 21a is connected to the discharge electrodes 5 by a wire 5a; and As in the first embodiment, a thyratron or a rotary gap switch, which is a high-voltage switch element, is used as the discharge switch 22.

The difference from the first embodiment is that the charging switch means 4 is connected between the internal circuit configuration of the pulse discharge circuit section 2 and each of the output terminals 21. However, since the required function of the charging switch means 4 is the same as that of the power supply current limiting means 3,
The point that the inductor 4a can be used is the same as in the first embodiment.

The internal circuit configuration of the pulse discharge circuit section 2 will be described. As shown in FIG.
A discharging capacitor 27 and a charging capacitor 28 are connected in series between the two. In order to reduce the stray inductance of each of the output terminals 21, each of the output terminals 21, each of the discharging capacitors 27 and each of the charging capacitors 2 are connected.
8 are arranged close to each other. An intermediate point 29 between each of the discharging capacitors 27 and each of the charging capacitors 28
Are connected to each other by a wiring 29a,
An inductor 30 is connected between the input terminal 20a and the input terminal 20a. In FIG. 2, the capacitor 31 is connected to the wiring 29.
a shows stray capacitance and is not a positively provided capacitor. Further, the inductor 30 includes a stray inductance component of the wiring 29a.

Here, the high-voltage DC power supply 1, the inductor 3a, the discharging switch 22, the discharging capacitor 27, the charging capacitor 28, the inductor 30, the capacitor 31, the inductor 4a, and the capacitor 8. In addition, with the circuit configuration including the inductor 9, an LC inversion type pulse discharge circuit system is formed for each of the output terminals 21.

As described above, in the circuit configuration of the first and second embodiments of the device of the present invention, a capacitance transfer type or LC inversion type pulse discharge circuit system is formed for each output terminal. You. The circuit operation is the same as the above-described circuit operation of the capacitance transfer type circuit or the LC inversion type circuit, and thus the detailed description is omitted. However, according to the present invention, although the initial rise of the output voltage at each output terminal 21 until the discharge starts at each of the discharge units 7 is slightly longer, after the discharge once starts at each of the discharge units 7, Since the stray inductance of the inductor 9 can be suppressed low and the capacitance of the capacitor 8 is also reduced by division, the discharge time constant of the LCR main discharge circuit formed between each output terminal 21 and each discharge unit 7 is reduced. It should be noted that the discharge can be completed in a short and very short time.

Hereinafter, another embodiment will be described. The pulse discharge circuit 2 is the same as the circuit configuration shown in FIG. 1 or FIG. 2 as an equivalent circuit, and the same operation and effect can be expected if the arrangement conditions of the capacitors interposed between the output terminals 21 are the same. For this reason, the configuration of each circuit element is not necessarily limited to the circuit configuration shown in FIG. 1 or FIG.

In the first or second embodiment, the power supply current limiting means 3 and the charging switch means 4 use the same high voltage switch element as the discharge switch 22 instead of the inductors 3a and 4a, respectively. It does not matter. In this case, the ON / OFF timing of the power supply current limiting means 3 and the charging switch means 4 is opposite to the ON / OFF timing of the discharging switch 22.

In the first or second embodiment, the charging switch means 4 may be provided inside the pulse discharge circuit 2, externally provided between the output terminals 21, or On the load side, it may be configured to be separately mounted between the discharge electrode 5 and the ground electrode 6.

In the first or second embodiment, the case where the number of the output terminals 21 of the pulse discharge circuit 2 is three is exemplified. However, the number of the output terminals 21 is two or less depending on the scale of the load to be driven. Four or more pairs may be used.

The apparatus of the present invention has been described on the premise that the apparatus is applied to an exhaust gas processing apparatus. The apparatus of the present invention may be applied.

[0037]

As described above, according to the present invention,
It is possible to provide a high-voltage pulse power supply device capable of uniformly outputting a high-speed high-voltage pulse with a sharp rise to a discharge section of the exhaust gas treatment device even for a large-capacity load such as a large exhaust gas treatment device. Became. As a result, even in a large exhaust gas treatment apparatus, it is possible to perform a short-time discharge treatment by a steep rising pulse while having a high voltage, and to provide an exhaust gas treatment apparatus excellent in nitrogen oxide or dioxin removal characteristics. became.

[Brief description of the drawings]

FIG. 1 is a circuit configuration diagram of a first embodiment of a high-voltage pulse power supply device according to the present invention.

FIG. 2 is a circuit configuration diagram of a second embodiment of the high-voltage pulse power supply device according to the present invention.

FIG. 3 is a circuit diagram of a conventional capacity transfer type pulse discharge circuit.

FIG. 4 is a circuit diagram of a conventional LC inversion type pulse discharge circuit.

FIG. 5 is a circuit diagram of a conventional pulse discharge circuit.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 High-voltage DC power supply 2 Pulse discharge circuit part 3 Power supply current limiting means 4 Charge switch means 20 Input terminal 21 Output terminal 21c, 29b Connection point 22 Discharge switch 23, 27 Discharge capacitor 24, 28 Charging capacitor 25, 30 Inductor

Claims (2)

[Claims] A high-voltage DC power supply; a pulse discharge circuit unit that outputs a high-voltage pulse by discharging a charge charged by the high-voltage DC power supply through a discharge switch; Power supply current limiting means for interrupting or limiting conduction between the pulse discharge circuit units, wherein the pulse discharge circuit unit includes a plurality of pairs of output terminals arranged in a distributed manner with a pair of input terminals; The discharge switch is connected between the terminals, a discharge capacitor is arranged near each of the output terminals and connected between the output terminals, one end of each of the output terminals is connected to each other, and the connection point is provided. A high-voltage pulse formed by connecting a charging capacitor and an inductor in series between the output terminal and one end of the input terminal, and connecting charging switch means between at least one pair of the output terminals. Source apparatus. 2. A high-voltage DC power supply, a pulse discharge circuit unit that outputs a high-voltage pulse by discharging a charge charged by the high-voltage DC power through a discharge switch, and the high-voltage DC power supply. Power supply current limiting means for interrupting or limiting conduction between the pulse discharge circuit units, wherein the pulse discharge circuit unit includes a plurality of pairs of output terminals arranged in a distributed manner with a pair of input terminals; The discharge switch is connected between the terminals, and a discharge capacitor and a charge capacitor connected in series are arranged near each of the output terminals, and connected between the output terminals. An intermediate point between the capacitor and the charging capacitor is connected to each other, an inductor is connected between the connection point and one end of the input terminal, and a charging switch is connected between the output terminal pairs. Constructed high-voltage pulse power supply by connecting the switch means.