JPH10209502A - Apparatus and method for adjusting optical axis - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical axis adjusting apparatus and an optical axis adjusting method for adjusting an optical axis between an optical component and a light emitting source with high accuracy. SOLUTION: An infrared camera 27 picks up the image of a laser beams emitted from an infrared laser chip 11. An image processor 40 binarizes the picked up image. A personal computer 31 obtains gravity center position coordinates from the binary data, and adjusts the positions of the infrared layer chip 11, a prism 14, a condensor lens 15 and an optical fiber 16 so as to match the gravity center position coordinates with reference position coordinates.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for adjusting an optical axis of an optical semiconductor device module incorporating a light emitting semiconductor device such as a semiconductor laser or a light emitting diode.

[0002]

2. Description of the Related Art An example of a conventional optical axis adjusting method will be described with reference to a case where the optical axes of a semiconductor laser and an optical component are made to coincide with each other. FIG. 7 is a diagram showing an optical system for realizing the conventional optical axis adjustment method. In FIG. 7, reference numeral 3 denotes a semiconductor laser, reference numeral 2 denotes a laser beam, and reference numeral 4 denotes a lens mounted on a stage capable of parallel movement (X, Y) and rotation adjustment (θx, θy) in two directions (object of optical axis adjustment). Optical parts), 5
Is a target for confirming the irradiation position of the laser light 2.

In optical axis adjustment using this optical system,
First, the semiconductor laser 3 is driven so that the laser beam 2 passes through a desired optical system in advance. At this time, the lens 4 whose optical axis is to be matched is not inserted, and the laser light 2 is left far enough. Furthermore, the target 5 prepared far away
Thus, the irradiation position of the laser beam 2 before the insertion of the lens 4 is marked.

Next, the lens 4 is inserted so that the laser irradiation position does not deviate from the mark on the target 5. When such a lens 4 is inserted, the position at which the laser beam 2 is incident on the lens 4 and the inclination of the lens 4 are adjusted by moving and rotating the lens 4 itself by an adjustment mechanism of the stage.

[0005]

However, in the above-described conventional optical axis adjustment method, the conditions under which the optical axis adjustment can be performed are extremely limited, and there are cases where the optical axis adjustment cannot be performed. . For example, if a sufficiently long distance cannot be provided behind the insertion position of the lens 4 due to the optical system, or if a lens having a very short focal length must be inserted, the position of the lens 4 far away from the rear position. Laser light 2
Therefore, the target 5 for marking the irradiation position cannot be arranged, so that the optical axis cannot be adjusted by the above method.

In the above method, the target 5 in a distant place is used.
The optical axis of the lens 4 is adjusted by the change of the irradiation position of the laser light 2 in the above. However, the laser beam in the state where the lens is not inserted has a considerably wide beam diameter, so that the optical axis can be obtained with high accuracy. Have difficulty. Furthermore, the beam diameter of the laser light 2 is considerably widened both after passing through the lens and at a long distance, and the change in the irradiation position on the target 5 due to the difference in the incident position and the incident angle of the laser light 2 on the lens 4. It is hard to tell. For this reason, it has been difficult to finely adjust the optical axis of the laser light.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems of the prior art, and it is possible to make the optical axis of a lens or other optical component coincide with the optical axis of light emitted from a light emitting element. It is an object to provide an optical axis adjusting device and an optical axis adjusting method.

[0008]

According to a first aspect of the present invention, there is provided an optical axis adjusting device for adjusting an optical axis between an optical component and a light source for supplying a light beam to the optical component. An imager arranged in an optical path of the light beam, for imaging the light beam, image processing means for processing an image taken by the imager, and detecting coordinates of an incident position of the light beam on the imager; Adjusting means for adjusting the positional relationship between the optical component and the light emitting source so that the position coordinates match the reference coordinates.

According to a second aspect of the present invention, in the optical axis adjusting apparatus according to the first aspect, the image processing means obtains binary data from an image captured by the imaging means, and It has a binarizing means for detecting the coordinates of the incident position by measuring the position of the center of gravity of the digitized data.

According to a third aspect of the present invention, there is provided an optical axis adjusting device according to the first or second aspect, further comprising a reference coordinate generating means for generating the reference coordinates. Generating means for obtaining at least two pieces of binarized data from at least two thresholds from an image taken by the imaging means of an optical component or a light-emitting source as a reference; Reference adjustment means for adjusting the position of the reference optical component or light emitting source so that the positions of the centers of gravity of the two binarized data coincide with each other;
Storage means for storing the coordinates of the position of the center of gravity when the positions of the centers of gravity of the at least two binarized data coincide with each other as reference coordinates.

According to a fourth aspect of the present invention, there is provided the optical axis adjusting device according to any one of the first to third aspects, wherein the optical component or the light emitting source is imaged by imaging the outer shape of the optical component or the light emitting source. The apparatus further comprises a coarse adjusting means for adjusting a position between the optical component and the light emitting source based on the result.

According to a fifth aspect of the present invention, in the optical axis adjusting device according to any one of the first to fourth aspects, the imaging means is formed so as to be movable in a focus direction. By driving the imaging means in the focus direction,
An image pickup driving means is provided which is arranged at a position set in advance based on characteristics of the optical component or the light emitting source.

According to a sixth aspect of the present invention, in the optical axis adjusting device according to any one of the first to fifth aspects, the intensity of a light beam emitted from the optical component or the light source is measured. And a light intensity adjusting means for adjusting the position of the optical component or the light emitting source so that the intensity is maximized.

According to a seventh aspect of the present invention, there is provided an optical axis adjusting apparatus for adjusting an optical axis between an optical component and a light source for supplying a light beam to the optical component. Imaging the light beam by the imaging means,
Image processing the image captured by the imaging means, detecting the incident position coordinates of the light beam on the imaging means, and the optical component and the light emitting source, so that the incident position coordinates match the reference coordinates And adjusting the positional relationship of.

The operation of the present invention will be described below.

In the optical axis adjusting device according to the first aspect, since the optical axis is adjusted by using the imaging means, the optical axis can be observed at a position where the diameter of the light beam is appropriate.
Therefore, the optical axis can be precisely adjusted.

In the optical axis adjusting device according to the second aspect, the incident position coordinates are obtained from the position of the center of gravity of the binarized data, and the optical axis is adjusted so that the incident position coordinates coincide with the reference coordinates.
Therefore, it is possible to accurately detect and adjust the inclination of the optical component or the light emitting source.

In the optical axis adjusting device according to the third aspect, the binarized data is created using at least two threshold values, and the coordinates of the barycentric position when the barycentric positions match each other are used as the reference coordinates. The position of another component can be adjusted with reference to an optical component or a light-emitting source whose tilt or the like has been precisely adjusted. Therefore, the optical axis can be adjusted precisely.

In the optical axis adjusting device according to the fourth aspect, the coarse adjustment is performed based on the imaging result of the outer shape of the optical component or the light emitting source. For this reason, the adjustment amount by fine adjustment can be reduced, and the adjustment time can be shortened.

In the optical axis adjusting device according to the fifth aspect, the image pickup means is formed so as to be movable in the focus direction, and the image pickup means is moved in the focus direction according to an object (optical component or light source) to be adjusted. , And arranged at a position suitable for imaging the target object (a position obtained by calculation in advance). Therefore, it is possible to take an image so that the shape of the light beam is always optimal, and it is not necessary to measure the inclination of the optical axis at a position where the diameter of the light beam is widened as in the related art, and the accuracy of position adjustment is improved. Can be improved.

In the optical axis adjusting device according to the sixth aspect, the position adjustment (optical axis adjustment) is performed so that the intensity of the light beam is maximized. This enables more precise position adjustment.

In the optical axis adjusting method according to the present invention, the light beam is picked up by the image pickup means, and the position between the optical component and the light emitting source is adjusted based on the incident position of the light beam on the image pickup means. For this reason, precise optical axis adjustment becomes possible.

[0023]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an optical axis adjusting method and an optical axis adjusting apparatus according to the present invention will be described with reference to an example in which the optical axis of an optical module having an infrared laser chip is adjusted.

FIG. 1 is a diagram for explaining the optical axis adjusting method and the optical axis adjusting apparatus according to the present embodiment. Hereinafter, the optical axis adjusting method and the optical axis adjusting apparatus will be described with reference to FIG.
Will be described.

FIGS. 2A and 2B are configuration diagrams of the optical module 50, FIG. 2A is a schematic configuration diagram, and FIG. 2B is an exploded perspective view. In this figure, 11 is an infrared laser chip, 12 is a photodiode for receiving light emitted from an optical fiber, 13 is a laser pen packaged with the above components, and 15 is a laser beam output from the laser pen at an arbitrary position. A condenser lens for emitting light, 16 is an optical fiber for receiving the laser light 17 condensed by the condenser lens, and 14 is a light emitted from the optical fiber into the laser pen 13 via the condenser lens 15. Is a prism for causing the photodiode 12 to receive laser light. The prism 14 is a prism knife edge 14
a, the condenser lens 15 is a reference surface 15 and a reference cylinder 15b.
The optical fiber 16 has a reference surface 16a and a reference cylinder 16b. The optical module 10 is capable of two-way communication with the above configuration.

Next, an optical mechanism for adjusting the optical axis of the optical module 10 will be described with reference to FIG.
In FIG. 1, reference numeral 20 denotes a microscope for imaging the optical module 10. Reference numeral 40 denotes an image processing device that processes data captured by the optical module 10, and the processed data is processed by the control device (PC) 31. A laser lighting circuit 41 drives the infrared laser chip 11. Reference numeral 30 denotes a power meter 30 for measuring the light intensity after the laser light from the infrared laser chip 11 has passed through the optical fiber 16. Reference numeral 42 denotes an infrared light source for inputting infrared light into the optical fiber 16, and reference numeral 43 denotes a lighting circuit for driving the infrared light source. In FIG. 1, a microscope 20 is mounted on a one-axis stage movable in the Z direction, and can be moved to an arbitrary position. Further, a condenser lens 15, an optical fiber 16, a laser pen 1
3, the prism 14 is also driven by X, Y,
It can be moved to any position in the Z, θx, and θy directions.

Next, the microscope 20 in the optical axis adjusting device is used.
Will be described in detail. FIG. 3 is an enlarged view showing the configuration of the microscope 20. In FIG. 3, reference numeral 27 denotes an infrared camera, which is used when imaging the state of infrared light emitted from the laser pen. 26 is a CCD camera,
A bright-field image is captured for coarse adjustment of each optical component.
The infrared camera 27 and the CCD camera 26 are configured so that an image enlarged by the objective lens 21 via the half mirror 23 can be observed coaxially. Also, the CCD camera 26
An illumination 25 is provided as coaxial illumination at the time of observation at the, and light emitted from the illumination 25 is applied to the work through the objective lens 21 via the half mirror 22, and reflected light from the work is applied to the half mirrors 22 and 23. 9 through mirror 24
The image is turned by 0 degrees and imaged by the CCD camera 26.

Next, a method of adjusting the optical axis of the optical component in the optical module 10 will be described with reference to the explanatory views shown in FIGS.

In the present invention, first, the optical axis of the light emitting source (infrared laser chip 11) and the optical axis of the observation means (microscope 20) are made coincident using image processing, and the coordinates (reference coordinates) of the optical axis are stored. I do. Then, using the reference coordinates, the optical components (prism 14, condensing lens 15, optical fiber 1) are used.
6) The position adjustment (coarse adjustment) based on the outer shape inspection and the optical axis adjustment (fine adjustment) based on the introduction of light into the optical component are performed.

Specifically, in the present embodiment, the position adjustment (coarse adjustment) between the laser pen 13 (infrared laser chip 11) and the microscope 20 and the position adjustment between the laser pen 13 (infrared laser chip 11) and the microscope 20 are performed. Optical axis adjustment (fine adjustment), position adjustment between prism 14 and microscope 20 (coarse adjustment), position adjustment between condenser lens 15 and microscope 20 (coarse adjustment), condenser lens 15 and microscope 20 Optical axis adjustment (fine adjustment) between optical fiber 16 and microscope 2
0 (coarse adjustment), optical axis adjustment (fine adjustment) between optical fiber 16 and microscope 20, prism 14
The optical axis adjustment (fine adjustment) between the microscope and the microscope 20 is performed in this order. This will be described in detail below.

Rough adjustment of laser pen 13 First, the Z-axis stage of the microscope is driven by the CCD camera 26 mounted on the microscope 20 so that the surface of the infrared laser chip 11 mounted inside the laser pen 13 is focused (FIG. 4). (A)). Thereafter, the outer shape of the infrared laser chip 11 is recognized, and the infrared laser chip 1 is recognized.
The stage (X, Y axis) on which the laser chip 11 is mounted is driven to adjust the position of the image taken by the CCD camera 26 so that the center of the outer shape of the device 1 is at the center.

Fine adjustment of laser pen 13 Next, the infrared laser chip 11 is turned on by the LD lighting circuit 41, and a laser beam is imaged by the infrared camera 27 attached to the microscope 20. At this time, the focus position (Z-axis position) of the microscope is set to a position where the focus position of the objective lens 21 is slightly away from the surface of the infrared laser chip 11 (specifically, a 20 × objective lens). At the time of use, the position is preferably 300 μm away from the surface of the infrared laser chip 11). This is because, in this adjustment, the optical axis is adjusted based on the shape of the laser beam, as will be described later.
This is because the shape of the laser beam is extremely small on one surface, and the optical axis cannot be adjusted.

The image taken by the infrared camera 27 is binarized by the image processing device 40. That is, the image is separated into a portion where the light intensity is higher and a portion where the light intensity is lower than the binarization level. At this time, processing is performed using at least two binarization levels to generate at least two types of binarized data.

Hereinafter, the binarization process will be specifically described. FIG. 6 is a diagram showing a state where an image of the semiconductor laser chip 11 taken by the infrared camera 27 of the microscope 20 is binarized. G ₀ is a processed image when the binarization level is low, and G ₁ is 5 shows a processed image when the binarization level is high. Here, FIGS. 6 (a), (b),
(C) shows the case where the semiconductor laser beam 17 is tilted leftward with respect to the optical axis detecting microscope 20, the case where the semiconductor laser beam 17 is directly opposed, and the case where it is tilted rightward. FIG.
The rightmost row in (a), (b), and (c) shows the positional relationship between the infrared laser chip 11 and the infrared camera 27.

As can be seen from these figures, when the binarization level is low, a processed image G ₀ having a large area can be obtained regardless of the state of the semiconductor laser beam 17 (the binarization level is low). If low, since the high portion amount is lower portions are processed as the same state), when the binarization level is high, less processed image G ₁ in area only high light intensity portion is emphasized is obtained Therefore, the position of the center of gravity of the processed image changes depending on the degree of inclination of the semiconductor laser beam 17. In the present embodiment, the optical axis is adjusted using the characteristics of the binarized image.

[0036] First, using the binarization level low level, to calculate the barycentric coordinates of G _0. Next, the high level 2
Using binarization level, we calculate the gravity center position coordinate of G _1.
If the coordinates of the center of gravity of G ₀ and G ₁ do not match, the semiconductor laser chip 11 is displaced in the θx or θy direction (actually, the laser pen 13 is adjusted to θx and θy), and the coordinates of the center of gravity of G ₀ are obtained. barycentric coordinates of G ₁ is adjusted to match the. Thereby, the optical axis of the infrared laser chip 11 coincides with the optical axis of the microscope 20.

After the above processing is completed, the light emitting point position (light emitting point coordinates) of the infrared laser chip 11 is measured and used as reference coordinates at the time of position adjustment of other optical components described later. The measurement of the light emitting point position is performed as follows.

First, the Z-axis stage of the microscope 20 is driven and the infrared laser beam 1
7 is image-processed by the image processing device 40 to search for a position in the Z-axis direction at which the laser beam diameter is minimized, and the coordinates of the area center of gravity of the infrared laser beam on the infrared camera 27 at that time and the Z-axis stage for the microscope 20 Is stored.

Rough Adjustment of Prism 14 In this embodiment, the shape of the prism 14 is such that light from an optical fiber irradiates the photodiode 12 in the laser pen 13 by aligning the prism knife edge 14 a with the optical axis of the infrared laser. It is assumed that the positional relationship is determined in advance. At this time, the prism 14 needs to be adjusted so that the prism knife edge 14a coincides with the optical axis of the infrared laser.

Therefore, first, the prism knife edge 1
4a is imaged by the CCD camera 26 attached to the microscope 20. At this time, the microscope 20 is driven in the Z direction so that the prism knife edge 14a is in the just focus (see FIG. 5B). Then, the image processing device 4
With 0, the position of the prism knife edge 14a is measured. Then, the prism 14 is adjusted in the X, Y, and θz directions by a drive source (not shown) under the control of the personal computer 31 so that the coordinates of the light emitting point of the infrared laser chip 11 and the measured coordinates match.

Coarse Adjustment of Condensing Lens 15 Since the values of the front focus, the back focus, etc. of the condensing lens 15 to be used can be checked in advance, the values are collected based on the coordinates of the light emitting point position of the infrared laser beam 17. The coordinate position where the optical lens 15 should be located can be calculated.

Therefore, first, the reference surface 1 of the condenser lens 15
The Z-axis of the microscope 20 is driven so that the CCD camera 26 is focused on the position where 5a must be optically arranged (that is, the coordinate position calculated in advance). In the present embodiment, since the microscope 20 is driven so that the microscope 20 is focused on an appropriate position, precise adjustment is possible.

Next, the condensing lens 15 is moved into the optical axis of the infrared laser by a driving source (not shown), and is arranged as shown in FIG. , The θx and θy axes of the condenser lens are driven and adjusted so that the image of the reference surface 15a is in just focus over the entire area. By this operation, the adjustment of the inclination of the condenser lens 15 with respect to the optical axis of the microscope 20 is completed.

Next, the reference cylinder 15b of the condenser lens 15 is imaged by the CCD camera 26 of the microscope 20, and
The X and Y axes are driven and adjusted so that the center of b coincides with the reference coordinate value obtained when the laser pen optical axis adjustment is completed.

Fine adjustment of the condenser lens 15 First, the microscope 2 is adjusted so that the focal position of the objective lens 21 of the microscope 20 is located at the focal position of the condenser lens 15 theoretically determined.
The Z axis of 0 is driven (see FIG. 5D).

Subsequently, the infrared laser 11 in the laser pen 13 is turned on by the laser lighting circuit 41, and the laser light is imaged by the infrared camera 27 of the microscope 20. Then, the captured image is subjected to image processing (binarization processing) by the image processing device 40, and the position of the center of gravity of the image is measured. The X, Y, θx, and θy stages of the condenser lens 15 are driven and adjusted by the control of the personal computer 31 so that the measured position of the center of gravity matches the reference coordinate value detected during the adjustment of the laser optical axis.

Rough adjustment of the optical fiber 16 First, the position where the reference surface 16a of the optical fiber 16 must be optically arranged (the position previously calculated).
Then, the microscope 20 is driven in the Z-axis direction so that the CCD camera 26 attached to the microscope 20 is focused.

Next, the optical fiber 16 is moved into the infrared laser optical axis by a driving source (not shown), and is arranged at the position shown in FIG. Then, the reference surface 16 of the optical fiber 16 is
a is imaged by the CCD camera 26 of the microscope 20 and the reference plane 1
The [theta] x and [theta] y axes of the optical fiber 16 are driven and adjusted so that the 6a image is in just focus in the entire region. Next, the reference cylinder 16b of the optical fiber 16 is
The image is taken by the CD camera 26, and the X and Y axes are driven to the position where the center of the reference cylinder 16b coincides with the reference coordinate value obtained when the laser pen optical axis adjustment is completed.

Fine adjustment of the optical fiber 16 Subsequently, the semiconductor laser 11 in the laser pen 13 is turned on by the laser lighting circuit 41, and the output of the optical power meter 30 installed on the light receiving side of the optical fiber 16 is taken into the personal computer 31. The position where the amount of received light becomes maximum is adjusted by driving the optical fiber X, Y, Z, θx, and θy stages (see FIG. 5F).

Fine adjustment of prism Next, the infrared light source 42 arranged at one end of the optical fiber is turned on by the lighting circuit 43, and the amount of light received by the photodiode 12 arranged in the laser pen 13 is measured by the ammeter 32. The data is taken into the personal computer 31, and the position at which the amount of light received by the photodiode 12 is maximized is adjusted by driving the X, Y, and θz stages for the prism (FIG. 5).
(G)).

As described above, the optical axis adjustment of the optical module 10 is completed.

Although the optical axis adjustment of the optical module 10 shown in FIG. 2 has been described here, the optical axis adjustment method and apparatus of the present invention are not limited to this, and any light source and optical component may be used. It can also be applied to the adjustment of the optical axis between them.

The present invention is also applicable to the case where the direction of the light beam emitted from the light emitting source is different from the direction of the light beam emitted from the optical module. In this case, first, the position of the imaging unit is determined based on the optical component that changes the direction of the light beam, and then the positions of the light emitting source and other optical components are determined.

[0054]

As described above, according to the present invention, the optical axis adjustment of an optical system composed of an infrared laser (light source) and a condenser lens, an optical fiber, a prism and the like (optical parts) can be performed by using an infrared ray and a CCD. It is possible to perform the operation fully automatically and precisely on the basis of a camera (imaging means). For example, it is possible to perform high-precision adjustment of an optical communication optical system and evaluate the functions and performance of optical components.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a configuration of an optical axis adjusting device according to an embodiment of the present invention.

FIG. 2 is a configuration diagram illustrating an example of an optical module whose optical axis is to be adjusted.

FIG. 3 is an enlarged configuration diagram of the microscope in FIG. 1;

FIG. 4 is a process diagram illustrating an optical axis adjusting method in the optical axis adjusting device of FIG. 1;

FIG. 5 is a process drawing explaining a process following the process diagram of FIG. 4;

FIG. 6 is a diagram illustrating a principle of adjusting an optical axis using image processing.

FIG. 7 is a diagram illustrating a conventional optical axis adjustment method.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Infrared laser chip 12 Photodiode 13 Laser pen 14 Prism 15 Condensing lens 16 Optical fiber 26 CCD camera 27 Infrared camera

Claims (7)

[Claims] 1. An optical axis adjusting device for adjusting an optical axis between an optical component and a light emitting source that supplies a light beam to the optical component, wherein: an imaging unit arranged in an optical path of the light beam and imaging the light beam; An image processing unit that performs image processing on an image captured by the imaging unit, and detects an incident position coordinate of the light beam on the imaging unit; and the optical component and the optical component so that the incident position coordinate matches reference coordinates. Adjusting means for adjusting the positional relationship with the light emitting source;
An optical axis adjusting device comprising: 2. The optical axis adjusting device according to claim 1, wherein the image processing unit obtains binarized data from an image captured by the imaging unit, and measures a center of gravity of the binarized data. An optical axis adjusting device comprising a binarizing means for detecting the incident position coordinates. 3. The optical axis adjusting device according to claim 1, further comprising a reference coordinate generating unit configured to generate the reference coordinates, wherein the reference coordinate generating unit includes an optical component as a reference. From at least two thresholds from a captured image of the light emitting source captured by the imaging unit,
Reference binarization means for obtaining at least two binarized data, and reference adjustment means for adjusting the position of the optical component or the light source as a reference such that the barycentric positions of the at least two binarized data coincide with each other. An optical axis adjusting device, comprising: a storage unit that stores, as reference coordinates, coordinates of the barycentric position when the barycentric positions of the at least two binarized data coincide with each other. 4. The optical axis adjusting device according to claim 1, wherein an image of an outer shape of the optical component or the light emitting source is imaged, and the optical component and the light emitting source are based on the imaged result. An optical axis adjusting device comprising a coarse adjusting means for adjusting the position between the optical axis adjusting device and the optical axis adjusting device. 5. The optical axis adjusting device according to claim 1, wherein the imaging unit is formed to be movable in a focus direction, and the imaging unit is driven in the focus direction, An optical axis adjusting device, comprising: an image pickup driving unit arranged at a position set in advance based on characteristics of the optical component or the light emitting source. 6. The optical axis adjusting device according to claim 1, wherein an intensity of a light beam emitted from the optical component or the light source is measured so that the intensity becomes maximum. And an optical axis adjusting device for adjusting the position of the optical component or the light emitting source. 7. An optical axis adjusting method for adjusting an optical axis between an optical component and a light emitting source for supplying a light beam to the optical component, wherein the light beam is imaged by an imaging unit disposed in an optical path of the light beam. Performing the image processing of the image captured by the imaging unit, and detecting the incident position coordinates of the light beam on the imaging unit, so that the incident position coordinates match the reference coordinates, the optical component and Adjusting the positional relationship with the light emitting source.