JPH10206189A - Sine wave encoder - Google Patents

Sine wave encoder

Info

Publication number
JPH10206189A
JPH10206189A JP768197A JP768197A JPH10206189A JP H10206189 A JPH10206189 A JP H10206189A JP 768197 A JP768197 A JP 768197A JP 768197 A JP768197 A JP 768197A JP H10206189 A JPH10206189 A JP H10206189A
Authority
JP
Japan
Prior art keywords
light
fixed
sine wave
analyzers
rotating polarizer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP768197A
Other languages
Japanese (ja)
Inventor
Koji Nakajima
耕二 中嶋
Iwao Sasaki
巌 佐々木
Yasushi Yoshida
吉田  康
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP768197A priority Critical patent/JPH10206189A/en
Publication of JPH10206189A publication Critical patent/JPH10206189A/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an encoder to which heat and vibrations are not directly transmitted from a motor and which nearly eliminates an adjustment in assembling even if it is formed compact. SOLUTION: The light from a light source 3 irradiates a rotary polarizer 2, so that the light conforming to a plane of polarization is passed. The passed light is reflected at a reflecting mirror 1, passes through the rotary polarizer 2 and hits fixed analyzers 4a-4d. The amount of each light passing through the fixed analyzer 4a-4d and detected at a photodetector 5a-5d corresponds to an angular shift of planes of polarization of the rotary polarizer 2 and the fixed analyzer 4a-4d. That is, the amount changes in the form of a sine wave in accordance with the rotation of the rotary polarizer 2, whereby sine wave signals Sa-Sd of two cycles are obtained per one rotation of the rotary polarizer 2. Output signals of A, B two phases of a 90 deg. phase difference which are stable without influences by a temperature change or noises of optical parts, etc., are obtained by obtaining a difference of the sine wave signals Sa and Sc, and Sb and Sd.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、回転角または位置
検出のためのエンコーダに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an encoder for detecting a rotation angle or a position.

【0002】[0002]

【従来の技術】回転角または位置を測定するエンコーダ
には磁気式エンコーダ、レゾルバーなどの他に図4に示
すような光学式エンコーダが数多く使われている。この
光学式エンコーダは、被測定用シャフト17に取り付け
られ、等間隔に明暗のスリット部11を持つ回転ディス
ク12と、スリット部11の対向した位置に設けられた
光源13と、スリット部11を介して反対側にスリット
部11と等間隔のスリットピッチを持ち、位相の異なる
複数個の固定スリット14を有する固定ディスク15
と、この固定スリット14に1対1に対応して設けられ
た複数個の受光素子16で構成されている。
2. Description of the Related Art In addition to magnetic encoders and resolvers, many optical encoders as shown in FIG. 4 are used as encoders for measuring a rotation angle or a position. The optical encoder is mounted on a shaft 17 to be measured and has a rotating disk 12 having bright and dark slits 11 at equal intervals, a light source 13 provided at a position opposed to the slits 11, and a slit 11. A fixed disk 15 having a plurality of fixed slits 14 having a same pitch with the slit portion 11 on the opposite side and having different phases from each other.
And a plurality of light receiving elements 16 provided in the fixed slit 14 in one-to-one correspondence.

【0003】光源13から出た光はスリット部11、固
定スリット14を透過し、受光素子16に到達する。受
光素子16では被測定物の角度の変化に応じて正弦波の
電気信号を得ることができる。この正弦波信号の位相を
計測したり、周期をカウント/計測することによって角
度または位置を計測することができる。
Light emitted from a light source 13 passes through a slit portion 11 and a fixed slit 14 and reaches a light receiving element 16. The light receiving element 16 can obtain a sinusoidal electric signal according to a change in the angle of the object to be measured. The angle or position can be measured by measuring the phase of the sine wave signal or counting / measuring the period.

【0004】[0004]

【発明が解決しようとする課題】このような構成の従来
のエンコーダでは、回転スリットと固定スリットの間が
一般的に狭く、またモータなどの被測定物のシャフト
と、回転スリットの取り付けられたシャフトが直結され
るためモータ側からの振動や熱が直接シャフトを通して
伝わってくる。このための温度上昇や振動により、光源
や受光素子、回転ディスク、固定ディスクなどの光学部
品や信号処理回路の電子部品などの損傷や劣化が生じ、
センサとしての信頼性に欠けるなどの問題があった。ま
た、小型になればなるほどシャフト17と回転ディスク
12の偏心など機械的精度が要求され、高精度の組立、
調整が必要になるなどの問題があった。
In a conventional encoder having such a structure, the space between the rotating slit and the fixed slit is generally narrow, and the shaft of the object to be measured such as a motor and the shaft having the rotating slit are mounted. Is directly connected, so that vibration and heat from the motor side are directly transmitted through the shaft. Due to this temperature rise and vibration, optical components such as light sources and light receiving elements, rotating disks and fixed disks, and electronic components of signal processing circuits, etc. are damaged or deteriorated.
There were problems such as lack of reliability as a sensor. In addition, as the size becomes smaller, mechanical accuracy such as the eccentricity of the shaft 17 and the rotating disk 12 is required, and high-precision assembly,
There were problems such as the need for adjustment.

【0005】なお、特開平8−170965は、一定方
向に揃った多数の微細溝を有する回転面にレーザ光を照
射して、回転面と同じ周期で回転する干渉縞を得、この
干渉縞を光電変換素子で受光して回転面の回転を計測す
ることにより、発光側と受光側の固定位置の自由度の拡
大を図っているが、レーザ光を用いるため、装置が高価
で、寿命が短いという欠点がある。
Japanese Patent Application Laid-Open No. Hei 8-170965 discloses a method of irradiating a rotating surface having a large number of fine grooves aligned in a certain direction with a laser beam to obtain an interference fringe rotating at the same cycle as the rotating surface. The degree of freedom of the fixed position between the light-emitting side and the light-receiving side is expanded by measuring the rotation of the rotating surface by receiving light with the photoelectric conversion element, but the device is expensive and the life is short because laser light is used. There is a disadvantage that.

【0006】本発明の目的は、熱や振動が直接伝わって
くることがなく、小型に作っても組立時の調整などがほ
とんど必要なく、構造が簡単で、信頼性、耐久性に優れ
た安価なエンコーダを提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is that heat and vibration are not directly transmitted, and even if made small, there is almost no need for adjustment at the time of assembly, the structure is simple, the reliability and durability are excellent, and the cost is low. To provide a simple encoder.

【0007】[0007]

【課題を解決するための手段】本発明のエンコーダは、
被測定物の回転軸の端面に取り付けられた反射鏡と、該
反射鏡の上に設けられた回転偏光子と、拡散光を前記回
転偏光子に向かって照射する光源と、前記回転偏光子に
対向して設けられ、前記回転偏光子を透過し、前記反射
鏡で反射され、前記回転偏光子を透過した前記拡散光が
当たる、偏光面の角度が互いに45°異なる第1、第2
の固定検光子と、前記第1、第2の固定検光子を通過し
た光をそれぞれ受光する第1、第2の受光素子を有す
る。
The encoder according to the present invention comprises:
A reflecting mirror attached to the end face of the rotation axis of the device under test, a rotating polarizer provided on the reflecting mirror, a light source for irradiating diffused light toward the rotating polarizer, and a rotating polarizer. First and second polarizers, which are provided to face each other, are transmitted by the rotating polarizer, are reflected by the reflecting mirror, and are illuminated by the diffused light transmitted by the rotating polarizer.
, And first and second light receiving elements for receiving light passing through the first and second fixed analyzers, respectively.

【0008】光源から出た光は被測定物軸端に取り付け
られた回転偏光子に照射され、偏光子偏光面にあった光
のみが透過する。透過した光は反射鏡で反射され、回転
偏光子を通り、光源の周辺に配置され、偏光面が互いに
45°異なる固定検光子にあたる。各固定検光子を通過
し、受光素子で検出された光は電気信号に変換され、回
転偏光子の1回転につき2周期の正弦波信号を得ること
ができる(偏光面は180°の回転により回転前と同じ
状態になるため)。この正弦波信号の位相計測をした
り、また周期をカウントすることによって回転角を検出
することができる。
The light emitted from the light source is applied to a rotating polarizer attached to the axis end of the object to be measured, and only the light existing on the polarization plane of the polarizer is transmitted. The transmitted light is reflected by a reflecting mirror, passes through a rotating polarizer, and is disposed around the light source, and strikes a fixed analyzer having a polarization plane different from each other by 45 °. The light passing through each fixed analyzer and detected by the light receiving element is converted into an electric signal, and a sine wave signal of two periods can be obtained for one rotation of the rotating polarizer (the polarization plane is rotated by 180 ° rotation). Because it will be in the same state as before). The rotation angle can be detected by measuring the phase of the sine wave signal or by counting the period.

【0009】本発明では、回転偏光子と固定検光子の間
隔は十分広くとれると共に、従来例のようにセンサシャ
フトが無く、このためモータなどの被測定物からの熱や
振動が直接伝わることがなく、光学部品や電子回路部品
などの損傷や劣化が起こりにくい。また、検出信号の大
きさは回転偏光子と固定検光子の偏光面の角度のみで決
まるため、照射される光も極端に言えば回転偏光子に当
たれば良いという程度で、小型に製作しても従来例に見
られるような回転スリットと固定スリットのアライメン
ト調整などの必要がなく取り扱いが容易である。さら
に、回転偏光子、固定検光子を用いるためレーザ光を用
いる場合と比較して安価である。
In the present invention, the distance between the rotating polarizer and the fixed analyzer can be made sufficiently large, and there is no sensor shaft as in the conventional example, so that heat or vibration from an object to be measured such as a motor can be directly transmitted. In addition, damage and deterioration of optical components and electronic circuit components are unlikely to occur. In addition, since the magnitude of the detection signal is determined only by the angle between the polarization plane of the rotating polarizer and the fixed analyzer, the size of the light to be irradiated should be extremely small if it hits the rotating polarizer. Also, there is no need to adjust the alignment of the rotating slit and the fixed slit as in the conventional example, and the handling is easy. Furthermore, since a rotating polarizer and a fixed analyzer are used, the cost is lower than when laser light is used.

【0010】本発明の実施態様によれば、第1、第2の
固定検光子と同一平面に設けられ、偏光面の角度が互い
に45°異なり、かつ第1、第2の固定検光子と90°
異なる第3、第4の固定検光子と、第3、第4の固定検
光子を通過した光をそれぞれ受光する第3、第4の受光
素子をさらに有する。第1と第2の受光素子の検出信
号、第3と第4の受光素子の検出信号の差動をとること
により、検出信号にノイズが含まれていても、差動をと
った信号にはノイズは含まれなくなり、ノイズの影響が
ない安定した、90°位相差のA,B2相の信号が得ら
れる。
According to the embodiment of the present invention, the first and second fixed analyzers are provided on the same plane, the angles of the polarization planes are different from each other by 45 °, and the first and second fixed analyzers are 90 ° apart from each other. °
It further has different third and fourth fixed analyzers, and third and fourth light receiving elements that respectively receive light passing through the third and fourth fixed analyzers. By taking the difference between the detection signal of the first and second light receiving elements and the detection signal of the third and fourth light receiving elements, even if the detection signal contains noise, the signal obtained by taking the difference becomes Noise is not included, and a stable A and B two-phase signal having a phase difference of 90 ° without the influence of noise is obtained.

【0011】[0011]

【発明の実施の形態】次に、本発明の実施の形態につい
て図面を参照して説明する。図1は本発明の一実施形態
の正弦波エンコーダの構成図、図2は図1中の固定検光
子4a〜4dの構成図、図3は受光素子5a〜5dに得
られる信号の波形図である。
Next, embodiments of the present invention will be described with reference to the drawings. 1 is a configuration diagram of a sine wave encoder according to an embodiment of the present invention, FIG. 2 is a configuration diagram of fixed analyzers 4a to 4d in FIG. 1, and FIG. 3 is a waveform diagram of signals obtained by light receiving elements 5a to 5d. is there.

【0012】本実施形態の正弦波エンコーダは、反射鏡
1と回転偏光子2と光源3と固定検光子板4と受光器5
で構成されている。反射鏡1は被測定物の回転軸6の軸
端面に取り付けられ、回転偏光子2は反射鏡1の上に取
り付けられている。光源3は拡散光を回転偏光子2に向
かって照射する。固定検光子板4は回転偏光子2に対向
して設けられ、回転偏光子2を透過し、反射鏡1で反射
され、回転偏光子2を通過した拡散光が当たる4個の固
定検光子4a〜4dが取り付けられている。図2の固定
検光子4a〜4d内の直線は、偏光面を示し、固定検光
子4aと4bは偏光面の角度が互いに45°ずれ、固定
検光子4cと4dは偏光面の角度が互いに45°ずれ、
固定検光子4aと4cは偏光面の角度が互いに90°ず
れ、固定検光子4bと4dは偏光面の角度が互いに90
°ずれている。受光器5は、それぞれ固定検光子4a〜
4dを通過した光を受光し、電気信号に変換する受光素
子5a〜5dで構成されている。
The sine wave encoder according to the present embodiment comprises a reflecting mirror 1, a rotating polarizer 2, a light source 3, a fixed analyzer plate 4, and a light receiver 5.
It is composed of The reflecting mirror 1 is mounted on the end face of the rotating shaft 6 of the device under test, and the rotating polarizer 2 is mounted on the reflecting mirror 1. The light source 3 irradiates the diffused light toward the rotating polarizer 2. The fixed analyzer plate 4 is provided so as to face the rotating polarizer 2, and passes through the rotating polarizer 2, is reflected by the reflecting mirror 1, and is irradiated with diffused light passing through the rotating polarizer 2. To 4d are attached. The straight lines in the fixed analyzers 4a to 4d in FIG. 2 indicate the polarization planes, and the fixed analyzers 4a and 4b have the polarization plane angles shifted by 45 ° from each other, and the fixed analyzers 4c and 4d have the polarization plane angles of 45 ° deviation,
The fixed analyzers 4a and 4c have a polarization plane angle of 90 ° with respect to each other, and the fixed analyzers 4b and 4d have a polarization plane angle of 90 ° with each other.
° is off. The light receivers 5 are respectively fixed analyzers 4a to 4a.
It comprises light receiving elements 5a to 5d that receive light passing through 4d and convert the light into electric signals.

【0013】光源3から出た光は回転偏光子2に照射さ
れ、偏光面にあった光のみが透過される。透過された光
は反射鏡1で反射され、回転偏光子2を通り、固定検光
子4a〜4dにあたる。固定検光子4a〜4dを通過
し、受光素子5a〜5dで検出される各光量は回転偏光
子2と固定検光子4a〜4dの偏光面角度のずれに応じ
た光量で、すなわち回転偏光子2の回転に応じて正弦波
的に変化し、図3に示すような回転偏光子2の1回転に
つき2周期の正弦波信号Sa〜Sdが得られる。そして
正弦波信号SaとSc、SbとSdの差動をとることに
より、光学部品などの温度変動の影響やノイズなどの影
響がない安定した、90°位相の異なるA,B2相の出
力信号を得ることができる。
The light emitted from the light source 3 is applied to the rotating polarizer 2, and only the light existing on the polarization plane is transmitted. The transmitted light is reflected by the reflecting mirror 1, passes through the rotating polarizer 2, and strikes the fixed analyzers 4a to 4d. The amounts of light that pass through the fixed analyzers 4a to 4d and are detected by the light receiving elements 5a to 5d are the amounts of light corresponding to the deviations of the polarization plane angles of the rotating polarizer 2 and the fixed analyzers 4a to 4d, that is, the rotating polarizer 2 The sinusoidal signals Sa to Sd of two periods are obtained for one rotation of the rotating polarizer 2 as shown in FIG. By taking the differential between the sine wave signals Sa and Sc, and Sb and Sd, it is possible to obtain stable A and B two-phase output signals having a 90 ° phase difference without the influence of temperature fluctuations of optical components and the like and noise. Obtainable.

【0014】なお、固定検光子は4aと4bまたは4c
と4dの2個だけでもよい。ただし、この場合信号に含
まれるノイズは除去されない。
The fixed analyzers 4a and 4b or 4c
And 4d alone. However, in this case, noise included in the signal is not removed.

【0015】[0015]

【発明の効果】以上説明したように本発明によれば、モ
ータなどの被測定物からの熱や振動などの伝達がなく、
このため光学部品や信号処理回路などに用いられる電子
部品などの損傷や劣化が少なく信頼性に優れ、また小型
に構成しても光学部品などの調整もほとんど必要なく容
易に組立、調整ができ、小型で構造の簡単な安価な正弦
波エンコーダが実現できる効果がある。
As described above, according to the present invention, there is no transmission of heat or vibration from the object to be measured such as a motor.
For this reason, there is little damage and deterioration of electronic components used for optical components and signal processing circuits, etc., and the reliability is excellent, and even if it is made compact, it can be easily assembled and adjusted with almost no adjustment of optical components etc. There is an effect that an inexpensive sine wave encoder having a small size and a simple structure can be realized.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施形態の正弦波エンコーダの構成
図である。
FIG. 1 is a configuration diagram of a sine wave encoder according to an embodiment of the present invention.

【図2】固定検光子板4の構成図である。FIG. 2 is a configuration diagram of a fixed analyzer plate 4.

【図3】受光素子5a〜5dに得られる検光信号の波形
図である。
FIG. 3 is a waveform diagram of a detection signal obtained by light receiving elements 5a to 5d.

【図4】エンコーダの従来例の構成図である。FIG. 4 is a configuration diagram of a conventional example of an encoder.

【符号の説明】[Explanation of symbols]

1 反射鏡 2 回転偏光子 3 光源 4 固定検光子板 4a〜4d 固定検光子 5 受光器 5a〜5d 受光素子 6 回転軸 11 スリット部 12 回転ディスク 13 光源 14 固定スリット 15 固定ディスク 16 受光素子 17 シャフト DESCRIPTION OF SYMBOLS 1 Reflecting mirror 2 Rotating polarizer 3 Light source 4 Fixed analyzer plate 4a-4d Fixed analyzer 5 Light receiver 5a-5d Light receiving element 6 Rotation axis 11 Slit part 12 Rotating disk 13 Light source 14 Fixed slit 15 Fixed disk 16 Light receiving element 17 Shaft

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 被測定物の回転軸の端面に取り付けられ
た反射鏡と、 該反射鏡の上に設けられた回転偏光子と、 拡散光を前記回転偏光子に向かって照射する光源と、 前記回転偏光子に対向して設けられ、前記回転偏光子を
透過し、前記反射鏡で反射され、前記回転偏光子を透過
した前記拡散光が当たる、偏光面の角度が互いに45°
異なる第1、第2の固定検光子と、 前記第1、第2の固定偏光子を通過した光をそれぞれ受
光する第1、第2の受光素子を有する正弦波エンコー
ダ。
1. A reflecting mirror attached to an end face of a rotation axis of an object to be measured, a rotating polarizer provided on the reflecting mirror, and a light source for irradiating diffused light toward the rotating polarizer. Provided opposite to the rotating polarizer, transmitted through the rotating polarizer, reflected by the reflecting mirror, and hit by the diffused light transmitted through the rotating polarizer, the angles of the polarization planes are 45 ° to each other
A sine wave encoder having first and second fixed analyzers different from each other, and first and second light receiving elements that respectively receive light passing through the first and second fixed polarizers.
【請求項2】 前記第1、第2の固定検光子と同一平面
に設けられ、偏光面の角度が互いに45°異なり、かつ
前記第1、第2の固定検光子と90°異なる第3、第4
の固定検光子と、前記第3、第4の固定検光子を通過し
た光をそれぞれ受光する第3、第4の受光素子をさらに
有する請求項1記載の正弦波エンコーダ。
2. The third, third and fourth fixed analyzers are provided on the same plane as the first and second fixed analyzers, and have angles of polarization different from each other by 45 ° and different from the first and second fixed analyzers by 90 °. 4th
2. The sine wave encoder according to claim 1, further comprising: a fixed analyzer, and third and fourth light receiving elements that respectively receive light passing through the third and fourth fixed analyzers.
JP768197A 1997-01-20 1997-01-20 Sine wave encoder Pending JPH10206189A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP768197A JPH10206189A (en) 1997-01-20 1997-01-20 Sine wave encoder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP768197A JPH10206189A (en) 1997-01-20 1997-01-20 Sine wave encoder

Publications (1)

Publication Number Publication Date
JPH10206189A true JPH10206189A (en) 1998-08-07

Family

ID=11672543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP768197A Pending JPH10206189A (en) 1997-01-20 1997-01-20 Sine wave encoder

Country Status (1)

Country Link
JP (1) JPH10206189A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
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CN104567744A (en) * 2015-01-08 2015-04-29 佛山轻子精密测控技术有限公司 Learning-type high-precision angular encoder and measurement method thereof
DE102014218712A1 (en) * 2014-09-17 2016-03-17 Continental Teves Ag & Co. Ohg Rotation angle detection device based on polarization effect
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WO2007108398A1 (en) * 2006-03-20 2007-09-27 Kabushiki Kaisha Yaskawa Denki Optical encoder
JPWO2007108398A1 (en) * 2006-03-20 2009-08-06 株式会社安川電機 Optical encoder
JP4678553B2 (en) * 2006-03-20 2011-04-27 株式会社安川電機 Optical encoder
US8148674B2 (en) 2006-03-20 2012-04-03 Kabushiki Kaisha Yaskawa Denki Optical encoder for detecting relative rotation angle for two members
CN104024804A (en) * 2011-10-31 2014-09-03 日本精工株式会社 Optical scale, method for producing optical scales, and optical encoder
WO2013065737A1 (en) * 2011-10-31 2013-05-10 日本精工株式会社 Optical scale, method for producing optical scales, and optical encoder
JPWO2013065737A1 (en) * 2011-10-31 2015-04-02 日本精工株式会社 Optical scale, optical scale manufacturing method, and optical encoder
US9410858B2 (en) 2011-10-31 2016-08-09 Nsk Ltd. Optical scale having wires, method for manufacturing optical scale having wires,and optical encode
JP2013231661A (en) * 2012-04-27 2013-11-14 Nsk Ltd Optical encoder
JP2013242304A (en) * 2012-04-27 2013-12-05 Nsk Ltd Optical encoder
DE102012021971A1 (en) * 2012-11-08 2014-05-08 Valeo Schalter Und Sensoren Gmbh Optical measurement apparatus for determining angles of rotation of e.g. steering shaft of vehicle, has optical receiver that includes filter with polarizers for polarizing the polarized beams for detecting angle of rotating component
CN103822651A (en) * 2014-03-03 2014-05-28 安徽理工大学 Plane mirror reflection based micro-cantilever deflection detecting system of micro-cantilever array sensor and detecting method
JP2016053562A (en) * 2014-09-03 2016-04-14 日本精工株式会社 Optical encoder unit, method for manufacturing composite polarizing layer, and device for manufacturing composite polarizing layer
DE102014218712A1 (en) * 2014-09-17 2016-03-17 Continental Teves Ag & Co. Ohg Rotation angle detection device based on polarization effect
CN104567744A (en) * 2015-01-08 2015-04-29 佛山轻子精密测控技术有限公司 Learning-type high-precision angular encoder and measurement method thereof

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