JPH10203624A - Piezoelectric drive type carrying device - Google Patents

Piezoelectric drive type carrying device

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Publication number
JPH10203624A
JPH10203624A JP9039627A JP3962797A JPH10203624A JP H10203624 A JPH10203624 A JP H10203624A JP 9039627 A JP9039627 A JP 9039627A JP 3962797 A JP3962797 A JP 3962797A JP H10203624 A JPH10203624 A JP H10203624A
Authority
JP
Japan
Prior art keywords
transfer
carrier
vibration
work
carrier support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9039627A
Other languages
Japanese (ja)
Other versions
JP2903085B2 (en
Inventor
Kazuo Matsunaga
和男 松永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ceratec Co Ltd
Original Assignee
Ceratec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ceratec Co Ltd filed Critical Ceratec Co Ltd
Priority to JP9039627A priority Critical patent/JP2903085B2/en
Publication of JPH10203624A publication Critical patent/JPH10203624A/en
Application granted granted Critical
Publication of JP2903085B2 publication Critical patent/JP2903085B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To smoothly quickly carry a work, even if vibration energy given by a vibration body is not enough large, by slantwise arranging a carrying body and by carrying downward the work. SOLUTION: When an alternating voltage is applied to piezoelectric elements 1 constituting a vibration body 9, one piezoelectric element is expanded and the other piezoelectric element is contracted to produce an expansion-contraction motion, which produces a bending strain in an elastic plate 2 and a bending vibration. The bending vibration of the elastic plate 2 is produced around a fulcrum where the elastic plate 2 is fixed to the bottom surface of a carrying body support base 10 and vibration energy is transmitted to the carrying body 5 including the carrying body support base 10 and a work 16 to carry downward the work 16 placed on the carrying body 5.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は電子部品或いは機械部品
等の各種部品を振動により搬送せしめる搬送体の振動源
として圧電素子を用いた圧電駆動型搬送装置に係るもの
である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric drive type transfer apparatus using a piezoelectric element as a vibration source of a transfer body for transferring various parts such as electronic parts or mechanical parts by vibration.

【0002】[0002]

【従来の技術】従来技術の一例として図3及び図4に示
す構成のものがあり,以下これを図面を用いて説明す
る。図3に示す従来技術に係る圧電駆動型搬送装置は弾
性板2に圧電素子1を貼着してなる加振体9により搬送
体5を振動させる圧電駆動型搬送装置であって加振体9
は重量を異にする質量体7を弾性板2の一端に固定した
ものでなる構成と加振体9を構成する弾性板2の他端を
搬送体5の下面に直接固定する構成と質量体7の重量大
なる加振体9の外方に長さの長い搬送体支持体8,質量
体7の重量小なる加振体9の外方に長さの短い搬送体支
持体81を配設する構成と長さの異なる搬送体支持体
8,81を搬送体5の長手方向に直交させて搬送体5と
基台3に固定する構成からなるものである。
2. Description of the Related Art As an example of the prior art, there is a configuration shown in FIGS. 3 and 4, which will be described below with reference to the drawings. FIG. 3 shows a piezoelectric-driven transport device according to the prior art, which is a piezoelectric-driven transport device that vibrates a transport body 5 by a vibrating body 9 in which a piezoelectric element 1 is attached to an elastic plate 2.
And a structure in which a mass body 7 having a different weight is fixed to one end of the elastic plate 2, a structure in which the other end of the elastic plate 2 forming the vibrating body 9 is directly fixed to the lower surface of the carrier 5, and a mass body 7, a long carrier support 8 is provided outside the vibrating body 9 having a large weight, and a short carrier support 81 is provided outside the vibrating body 9 having a small weight. In this configuration, the carrier supports 8 and 81 having different lengths are fixed to the carrier 5 and the base 3 perpendicular to the longitudinal direction of the carrier 5.

【0003】また図4に示す従来技術に係る圧電駆動型
搬送装置は搬送体5を支持用板ばね18によって基台3
上に支持すると共に前記搬送体5に弾性板2の表裏面に
圧電素子1を貼着し,表裏の圧電素子1の伸長及び収縮
タイミングが逆となる電圧印加手段が付加され,かつ弾
性板2の下端に質量体7が固定された加振体9を傾斜状
に垂設させた構成からなるものである。
[0004] Further, in a conventional piezoelectric drive type transfer apparatus shown in FIG. 4, a transfer body 5 is supported on a base 3 by a supporting leaf spring 18.
The piezoelectric element 1 is adhered to the carrier 5 on the front and back surfaces of the elastic plate 2, and voltage applying means for reversing the expansion and contraction timing of the front and back piezoelectric elements 1 is added. A vibrating body 9 having a mass body 7 fixed to the lower end thereof is vertically inclined.

【0004】[0004]

【従来技術の問題点】ところで前記従来の圧電駆動型搬
送装置において配設される加振体9が複数個の場合,加
振体9から搬送体5への振動周波数及び振動振幅が単一
の振動周波数及び振動振幅に相当するものであれば搬送
物であるワーク16への搬送力(駆動力)及び搬送速度
は十分に高いものが得られる。しかし現実には個々の加
振体9が搬送体5に与える振動周波数及び振動振幅は一
定一様ではなく,そのため搬送体上のワーク16は同一
方向に,しかも搬送体上のいずれの部所においても一定
一様なる搬送速度で移送させることはきわめて困難であ
る。その理由は同一特性を有する加振体9を複数個形成
することは困難であること及び加振体9の搬送体5への
取付部所によって加振体9が搬送体5に与える振動周波
数及び振動振幅が同一ではないからである。従って一の
加振体5でもって実用に供し得るに十分な搬送力(駆動
力)及び搬送速度が得られるのであれば加振体9は一で
あることが望ましい。
2. Description of the Related Art When a plurality of vibrators 9 are provided in the above-described conventional piezoelectric drive type transfer apparatus, the vibration frequency and the vibration amplitude from the vibrator 9 to the transfer body 5 are single. As long as the vibration frequency and the vibration amplitude are equivalent, a sufficiently high transfer force (driving force) and transfer speed to the work 16 as the transfer object can be obtained. However, in practice, the vibration frequency and the vibration amplitude applied to the carrier 5 by the individual vibrators 9 are not constant and uniform, so that the work 16 on the carrier is in the same direction and at any part on the carrier. However, it is very difficult to transfer the same at a constant and uniform transport speed. The reason is that it is difficult to form a plurality of vibrating bodies 9 having the same characteristics, and the vibration frequency and the vibration applied by the vibrating body 9 to the transporting body 5 due to the attachment portion of the vibrating body 9 to the transporting body 5 This is because the vibration amplitudes are not the same. Therefore, it is desirable that the number of the vibrating members 9 be one, as long as a sufficient conveying force (driving force) and a sufficient conveying speed for practical use can be obtained with one vibrating member 5.

【0005】一方,圧電駆動型搬送装置に配設される加
振体9が一の場合,加振体9が搬送体5に与える振動周
波数と振動振幅は単一のものであるため前記加振体9が
複数個の場合の問題点は生じない。即ち求められる搬送
条件の制約が大きく緩和されることに加えて構成上も簡
易なものとなる。しかし圧電駆動型搬送装置に配設され
る加振体9が一の場合,従来技術の下では加振体9の振
動エネルギー不十分のため実用に供し得るに十分な搬送
力及び搬送速度は得がたく,わずかにきわめて限られた
条件下にのみ実用に供し得るのみであった。
On the other hand, when the number of the vibrating body 9 provided in the piezoelectric driving type transfer apparatus is one, the vibration frequency and the vibration amplitude given to the conveying body 5 by the vibrating body 9 are the same, so There is no problem when there are a plurality of bodies 9. In other words, the constraints on the required transport conditions are greatly eased, and the configuration is simple. However, when the vibrating body 9 provided in the piezoelectric drive type transport device is one, the vibration force of the vibrating body 9 is insufficient under the conventional technique, and thus a sufficient transport force and a sufficient transport speed for practical use are obtained. It could only be put to practical use under slightly very limited conditions.

【0006】[0006]

【発明が解決しようとする課題】本発明は圧電駆動型搬
送装置に配設される加振体が一の場合のすぐれた特長は
そのまま保有させながら前記問題点を解消せしめて十分
に実用に供し得る圧電駆動型搬送装置を提供せんとする
ことにある。
SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems while retaining the excellent features in the case where only one vibrating body is provided in the piezoelectric drive type transfer apparatus, and provides a sufficiently practical use. It is another object of the present invention to provide a piezoelectric-driven transfer device.

【0007】[0007]

【課題を解決するための手段】以下,図1及び図2を用
いてその手段等を説明する。本発明に係る圧電駆動型搬
送装置は弾性板2の片面又は両面に圧電素子1を貼着
し,前記弾性板2の一端に質量体7を固定し,他端を搬
送体支持台10の下面に固定してなる加振体9を用いる
構成と搬送体支持台10と基台3との間に傾斜立設させ
て連結部材4を介在させる構成とその一端を搬送体支持
台10に接触させ,搬送体支持台10の上面に傾斜させ
て搬送体5を配設する構成からなるものである。
The means and the like will be described below with reference to FIGS. 1 and 2. In the piezoelectric drive type transfer apparatus according to the present invention, the piezoelectric element 1 is attached to one or both sides of the elastic plate 2, the mass body 7 is fixed to one end of the elastic plate 2, and the other end is the lower surface of the transfer body support 10. And a configuration in which the connecting member 4 is interposed by being erected between the carrier support 10 and the base 3 and one end thereof is brought into contact with the carrier support 10. The carrier 5 is arranged to be inclined on the upper surface of the carrier support 10.

【0008】[0008]

【発明の実施の態様】本発明に係る圧電駆動型搬送装置
に用いられる加振体9は不銹鋼,ばね鋼,工具鋼等の弾
性板2の片面又は両面にチタン酸ジルコン酸鉛,ニオブ
酸リチウム等の圧電素子1を貼着したいわゆるユニモル
フ構造又はバイモルフ構造を採るものであって前記弾性
板2の一端には金属片等でなる質量体7が固定される。
ここで質量体7は搬送物であるワーク16を含む搬送体
5との重量バランスをとってワーク16を一方向のみに
円滑に高速搬送させるために取付けられるものである。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A vibrating body 9 used in a piezoelectric drive type transfer apparatus according to the present invention is provided on one or both sides of an elastic plate 2 made of stainless steel, spring steel, tool steel or the like, with lead zirconate titanate and lithium niobate. And a so-called unimorph structure or a bimorph structure to which the piezoelectric element 1 is adhered. A mass body 7 made of a metal piece or the like is fixed to one end of the elastic plate 2.
Here, the mass body 7 is attached in order to balance the weight of the transport body 5 including the workpiece 16 as a transported object and smoothly transport the workpiece 16 in only one direction at a high speed.

【0009】本発明に係る圧電駆動型搬送装置に用いら
れる加振体9は一とし,加振体9が一であることによる
前記した問題点は搬送体5を搬送体支持台10の上面に
傾斜して配設することによって解消させるものである。
従来の圧電駆動型搬送装置におけるワーク搬送は下方か
ら上方に向けての搬送又は水平方向への搬送が主であ
り,上方から下方に向けての搬送形態を採るものはきわ
めて少ない。搬送条件の制御が容易でないことによるも
のと推測される。しかるに同じワーク搬送であっても搬
送に要する振動エネルギーの大きさからすると下方から
上方に向けて搬送よりも上方から下方に向けての搬送の
方が振動エネルギーは少なくてよいことは明らかであ
り,本発明はこの点に着目し,加振体9が一であること
による振動エネルギー不足を搬送体5を傾斜させて配設
しワーク16を上方から下方へ向けて搬送させるという
形態を採ることで補わんとしたものである。勿論搬送体
5及び搬送体支持台10に単一の振動周波数及び振動振
幅に相当するものを付加させ得るという振動条件が満た
されるのであれば加振体9は一に限定されることはな
く,二以上であってもよい。
The one vibrating body 9 used in the piezoelectric drive type conveying apparatus according to the present invention is one, and the above-mentioned problem caused by the single vibrating body 9 is that the conveying body 5 is placed on the upper surface of the conveying body support 10. The problem is solved by disposing it at an angle.
Work transfer in a conventional piezoelectric drive type transfer apparatus is mainly performed from below to above or horizontally, and very few transfer forms from above to below. It is presumed that it is not easy to control the transfer conditions. However, from the viewpoint of the magnitude of the vibration energy required for the transfer of the same work, it is clear that the transfer energy from the upper side to the lower side may be smaller than the transfer from the lower side to the upper side. The present invention pays attention to this point, and adopts a mode in which the shortage of the vibration energy due to the single vibrator 9 is arranged by tilting the transfer body 5 to transfer the work 16 from above to below. It was supplemented. Of course, the vibration body 9 is not limited to one if the vibration condition that a vibration frequency and a vibration amplitude equivalent to a single vibration frequency can be added to the carrier 5 and the carrier support 10 is satisfied. It may be two or more.

【0010】本発明の基本的発想はワーク16を下方か
ら上方,上方から下方のいずれの方向に向けての搬送で
あってもワーク16を所定距離移送させるという点にお
いては何ら異なるところはないという点にある。従って
搬送物であるワーク16を載置する搬送体5をその一端
を搬送体支持台10に接触させて傾斜配設することは本
発明の不可欠の構成要素である。
The basic idea of the present invention is that there is no difference in that the work 16 is transported by a predetermined distance regardless of whether the work 16 is conveyed from below to above or from above to below. On the point. Therefore, it is an indispensable component of the present invention that the transport body 5 on which the workpiece 16 to be transported is mounted is inclined with one end thereof in contact with the transport body support base 10.

【0011】加振体9を構成する弾性板2の他端は搬送
体支持台10の下面にねじ止め,スポット溶接等の適宜
の手段によって固定される。しかるに当該固定によって
加振体9から発生する振動エネルギーは搬送体支持台1
0を介して搬送体5及び搬送体上に載置されるワーク1
6に伝達される。
The other end of the elastic plate 2 constituting the vibrating body 9 is fixed to the lower surface of the carrier support base 10 by an appropriate means such as screwing and spot welding. However, the vibration energy generated from the vibrating body 9 by the fixing is transferred to the carrier support 1.
0 and the work 1 placed on the transfer body 5
6 is transmitted.

【0012】搬送体支持台10は搬送体支持台10と基
台3との間に連結部材4を介在させることによって基台
3上に固定される。ここで前記連結部材4は基台3に対
し傾斜立設して介在させており,しかもその傾斜方向は
傾斜角は異なっても搬送体5と同方向となるように傾斜
配設させている。少ない振動エネルギーによっても円滑
なる高速搬送を実現させるためである。
The carrier support 10 is fixed on the base 3 by interposing a connecting member 4 between the carrier support 10 and the base 3. Here, the connecting member 4 is disposed so as to be inclined upright with respect to the base 3, and the inclined direction is inclined so as to be the same as the carrier 5 even if the inclination angle is different. This is for realizing smooth high-speed conveyance even with a small vibration energy.

【0013】搬送体支持台10の上面に配設される搬送
体5はその一端を搬送体支持台10に接触させ,その中
間の二部所を搬送体支持台10に設けられた搬送体支持
部材11,12に加圧接触させることによって傾斜配設
される。ここで前記搬送体5の傾斜配設はその傾斜角を
固定とする構成,変更可能とする構成のいずれであって
もよい。傾斜角変更可能とする構成にあっては搬送体支
持部材11に上下方向又は斜め方向の溝を設け,当該溝
にねじを挿通し,当該ねじと搬送体上面とを加圧接触せ
しめた状態で当該ねじを前記溝に沿って移動し固定させ
ることで搬送体5の傾斜角を変えることを可能とするも
のである。また搬送体支持台10と搬送体支持部材12
との接触部を搬送体支持部材12との接触部を挿通して
なるねじを支点13として搬送体支持台10に設けられ
た回動可能な搬送体支持部材12の一端を搬送体5の下
面と加圧接触させ,前記搬送体支持部材12を適宜に回
動させることによって搬送体5の傾斜角を変えることも
可能である。このように搬送体支持部材11,12によ
る搬送体5と搬送体支持部材11,12との加圧接触状
態の適宜の調整によって搬送体5の傾斜配設を自由自在
に変えることができ,また前記加圧接触の解除によって
別異の搬送体への交換も容易に行うことができるのであ
る。
One end of the carrier 5 disposed on the upper surface of the carrier support 10 is brought into contact with the carrier support 10, and two intermediate portions thereof are provided on the carrier support 10 provided on the carrier support 10. The members 11 and 12 are inclined by being brought into contact with each other under pressure. Here, the inclined arrangement of the carrier 5 may be either a configuration in which the inclination angle is fixed or a configuration in which the inclination angle can be changed. In the configuration in which the inclination angle can be changed, a vertical or oblique groove is provided in the carrier support member 11, a screw is inserted into the groove, and the screw and the upper surface of the carrier are brought into pressure contact with each other. The inclination angle of the carrier 5 can be changed by moving and fixing the screw along the groove. The carrier support 10 and the carrier support 12
One end of the rotatable carrier support member 12 provided on the carrier support base 10 with the screw formed by inserting the contact portion with the carrier support member 12 through the contact portion with the carrier support member 12 is the lower surface of the carrier 5. It is also possible to change the inclination angle of the carrier 5 by bringing the carrier support member 12 into appropriate rotation by bringing the carrier into contact with the pressure. In this manner, the inclined arrangement of the carrier 5 can be freely changed by appropriately adjusting the pressurized contact state between the carrier 5 and the carrier support members 11 and 12 by the carrier support members 11 and 12. With the release of the pressurized contact, it is possible to easily exchange a different transport body.

【0014】搬送体5の傾斜配設は直線状の傾斜配設の
みでなく,搬送体5が可撓性を具有するものであれば湾
曲状の傾斜配設をさせることも可能である。かかる搬送
体5の自由自在な傾斜角の設定はワーク16の種類,形
状及び大きさによって最適なる搬送条件を容易に設定可
能とする。
The carrier 5 can be arranged not only linearly but also in a curved manner as long as the carrier 5 has flexibility. Such setting of the inclination angle of the transfer body 5 allows the optimum transfer conditions to be easily set according to the type, shape and size of the work 16.

【0015】搬送体5のワーク16排出の先端部はワー
クを真空チャック等で取り出す場合はいわゆる行き止り
となる構成とし,次工程に連続して移送させる場合は行
き止りの構成とはしない。
The leading end of the work 16 discharged from the carrier 5 has a so-called dead end when the work is taken out by a vacuum chuck or the like, and does not have a dead end when the work is continuously transferred to the next step.

【0016】[0016]

【作用】加振体9を構成する圧電素子1に交番電圧が印
加されると一方の圧電素子は伸長,他方の圧電素子は収
縮をして伸縮運動を惹起し,当該伸縮運動が弾性板2に
屈曲歪をもたらして屈曲振動を生ぜしめる。前記弾性板
2の屈曲振動は加振体9を構成する弾性板2と搬送体支
持台10の下面との固定部所を支点として加振体9の振
動エネルギーは搬送体支持台10及びワーク16を含む
搬送体5に伝達され,搬送体5に載置されるワーク16
を上方から下方に搬送させるに至る。従来の圧電駆動型
搬送装置におけるワーク搬送は加振体9から受けた振動
エネルギーによってワークを斜め上方に瞬間的に空中に
浮上させ,その瞬間内に微小変位した搬送体をもとの位
置に復帰せしめて行うのである。しかし本発明に係る圧
電駆動型搬送装置は必ずしもかかる搬送原理によらずと
も単にワーク16に振動エネルギーを付与させるだけで
もワーク搬送ができるのである。ここで前記ワーク搬送
は搬送体支持台10の形状と搬送体支持台10への加振
体9の配設を適宜なものとすることによって直進搬送は
もとより,回動搬送をも行わしめることができる。
When an alternating voltage is applied to the piezoelectric element 1 constituting the vibrating body 9, one of the piezoelectric elements expands and the other piezoelectric element contracts to cause expansion and contraction. This causes bending distortion and causes bending vibration. The bending vibration of the elastic plate 2 is performed by using the fixed portion between the elastic plate 2 constituting the vibrating body 9 and the lower surface of the carrier support 10 as a fulcrum, and the vibration energy of the vibrator 9 is transferred to the carrier support 10 and the work 16. The work 16 transmitted to the carrier 5 including the
From above to below. In the conventional piezo-driven transfer device, the workpiece is instantaneously levitated in the air obliquely upward by the vibration energy received from the vibrating body 9 and returned to its original position in the moment. You do it at least. However, the piezoelectric drive type transfer apparatus according to the present invention can transfer a work simply by applying vibration energy to the work 16 without necessarily using the transfer principle. Here, in the work transfer, the shape of the carrier support 10 and the arrangement of the vibrator 9 on the carrier support 10 are made appropriate so that not only the straight transport but also the rotary transport can be performed. it can.

【0017】[0017]

【発明の効果】本発明の第一の効果は加振体9からもた
らされる振動エネルギーが十分に大ではなくてもワーク
16を円滑に高速搬送させることができることである。
搬送体5を傾斜配設させ,ワーク16を上方から下方に
搬送させるという構成を採っていることによるものであ
る。
The first effect of the present invention is that the work 16 can be smoothly transported at a high speed even if the vibration energy generated from the vibrator 9 is not sufficiently large.
This is due to the configuration in which the transporting body 5 is inclined and the work 16 is transported downward from above.

【0018】本発明の第二の効果は搬送体支持台10の
下面に固定される加振体9が一の構成のものにあっては
加振体支持台10及びワーク16を含む搬送体5に与え
られる振動周波数及び振動振幅は単一のものとなるため
ワーク16を同一方向に円滑にして高速搬送させる搬送
条件の設定が容易なことである。加振体9が二以上の場
合,複合振動であることに起因する搬送条件設定の困難
性から大きく開放される効果は無視できないものがあ
る。
The second effect of the present invention is that when the vibrator 9 fixed to the lower surface of the carrier support 10 has a single structure, the carrier 5 including the vibrator support 10 and the work 16 is used. Since the vibration frequency and the vibration amplitude given to the workpiece 16 are single, it is easy to set the transport conditions for smoothing the workpiece 16 in the same direction and transporting the workpiece 16 at a high speed. When the number of the vibrating bodies 9 is two or more, there is a case where the effect of being greatly released due to the difficulty in setting the transfer conditions due to the combined vibration cannot be ignored.

【0019】本発明の第三の効果は搬送体5の傾斜角を
変更し得る構成のものにあっては搬送体5の傾斜配設を
自由自在なものとなし得るため,ワークの種類,形状及
び大きさがそれぞれ異なるものであっても搬送体5の交
換容易なこととも合わせて幅広いワーク16の搬送を可
能とすることである。
The third effect of the present invention is that, in the configuration in which the inclination angle of the carrier 5 can be changed, the inclination of the carrier 5 can be freely set, so that the type and shape of the workpiece can be changed. In addition, it is possible to transfer a wide range of works 16 in addition to the fact that the transfer body 5 can be easily exchanged even if the sizes thereof are different from each other.

【0020】本発明の第四の効果は振動振幅の小さい微
弱な振動エネルギーによってしてもワーク搬送が可能な
ためICチップ等の微小なる電子部品,ワーク搬送の
際,隣り合うワーク同士の衝突により損傷を生じ易い部
品のワーク搬送が可能となり,また従来,時として散見
されたワーク16ののり上げ,ワーク16の搬送体5か
らの脱落といった不都合は完全に消失するに至ったこと
である。
The fourth effect of the present invention is that a workpiece can be transferred even by a weak vibration energy having a small vibration amplitude. This makes it possible to transport a workpiece that is apt to be damaged, and the inconveniences such as the lifting of the workpiece 16 and the falling off of the workpiece 16 from the transporting body 5 that have been sometimes seen before have been completely eliminated.

【図面の簡単な説明】[Brief description of the drawings]

【図1】は本発明に係る圧電駆動型搬送装置の正面図で
ある。
FIG. 1 is a front view of a piezoelectric drive type transfer apparatus according to the present invention.

【図2】は本発明に係る圧電駆動型搬送装置の平面図で
ある。
FIG. 2 is a plan view of a piezoelectric drive type transfer device according to the present invention.

【図3】は従来の圧電駆動型搬送装置の正面図である。FIG. 3 is a front view of a conventional piezoelectric drive type transfer device.

【図4】は従来の圧電駆動型搬送装置の正面図である。FIG. 4 is a front view of a conventional piezoelectric drive type transfer device.

【符号の説明】[Explanation of symbols]

1.圧電素子 2.弾性板 3.基台 4.連結部材 5.搬送体 7.質量体 8.搬送体支持体 9.加振体 10.搬送体支持台 11.搬送体支持部材 12.搬送体支持部材 13.支点 16.ワーク 18.支持用板ばね 81.搬送体支持体 1. 1. Piezoelectric element Elastic plate 3. Base 4. Connecting member 5. Carrier 7. Mass 8. Carrier support 9. Exciter 10 Carrier support 11. Carrier support member 12. Carrier support member 13. Fulcrum 16. Work 18. Support leaf spring 81. Carrier support

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】弾性板の片面又は両面に圧電素子を貼着
し,前記弾性板の一端に質量体を固定し,他端を搬送体
支持台の下面に固定してなる加振体を用いる構成と搬送
体支持台と基台との間に傾斜立設させて連結部材を介在
させる構成とその一端を搬送体支持台に接触させ,搬送
体支持台の上面に傾斜させて搬送体を配設する構成から
なる圧電駆動型搬送装置。
A vibrator having a piezoelectric element attached to one or both sides of an elastic plate, a mass body fixed to one end of the elastic plate, and the other end fixed to the lower surface of a carrier support base. Configuration: A configuration in which a connecting member is interposed by being erected between the carrier support base and the base, and one end of the connection member is brought into contact with the carrier support base, and the carrier is tilted on the upper surface of the carrier support base. A piezoelectrically driven transfer device having a configuration to be installed.
【請求項2】搬送体支持部材による搬送体と搬送体支持
部材との加圧接触状態の調整により搬送体の傾斜配設を
変えることのできる請求項1の圧電駆動型搬送装置。
2. The piezoelectric driven transfer device according to claim 1, wherein the inclined arrangement of the transfer member can be changed by adjusting the pressure contact state between the transfer member and the transfer member by the transfer member supporting member.
【請求項3】搬送体支持台の下面に固定する加振体を一
とする請求項1の圧電駆動型搬送装置。
3. The piezoelectric drive type transfer apparatus according to claim 1, wherein one vibrator is fixed to a lower surface of the transfer body support.
【請求項4】連結部材を傾斜立設させる傾斜方向と搬送
体を傾斜配設させる傾斜方向とは同方向とする請求項1
の圧電駆動型搬送装置。
4. The inclination direction in which the connecting member is erected and the inclination direction in which the conveying member is arranged in an inclined manner are the same.
Piezo-driven transfer device.
【請求項5】搬送体と搬送体支持部材との加圧接触の解
除によって搬送体の交換を行うことのできる請求項1の
圧電駆動型搬送装置。
5. The piezoelectric driven transfer device according to claim 1, wherein the transfer member can be replaced by releasing the pressurized contact between the transfer member and the transfer member supporting member.
【請求項6】搬送体を可撓性を具有する部材でならしめ
る請求項1の圧電駆動型搬送装置。
6. The piezoelectric driven transfer device according to claim 1, wherein the transfer member is made of a member having flexibility.
JP9039627A 1997-01-20 1997-01-20 Piezoelectric drive type transfer device Expired - Fee Related JP2903085B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9039627A JP2903085B2 (en) 1997-01-20 1997-01-20 Piezoelectric drive type transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9039627A JP2903085B2 (en) 1997-01-20 1997-01-20 Piezoelectric drive type transfer device

Publications (2)

Publication Number Publication Date
JPH10203624A true JPH10203624A (en) 1998-08-04
JP2903085B2 JP2903085B2 (en) 1999-06-07

Family

ID=12558352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9039627A Expired - Fee Related JP2903085B2 (en) 1997-01-20 1997-01-20 Piezoelectric drive type transfer device

Country Status (1)

Country Link
JP (1) JP2903085B2 (en)

Also Published As

Publication number Publication date
JP2903085B2 (en) 1999-06-07

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