JPH10188351A - Information recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To produce a recording medium having an optical translucent film simple in structure, easy in production and low in light absorption loss by forming the optical translucent film from a silicon compd. and incorporating a specified amount of oxygen and carbon. SOLUTION: The optical semipermeable film 5 is formed on the first recording layer 4 as the silicon compd. film by executing sputtering, etc., under a mixed gas atmosphere containing gaseous oxygen and hydrocarbon based gas such as gaseous methane. The total amount of the oxygen and the carbon incorporated in the optical translucent film 5 is at least within a range of 10-40 atomic % preferably in order to obtain the most suitable light transmitivity and reflectivity. The information recording medium 1 is obtained by forming a space layer 6 on the optical translucent film 5 and sticking a plate in which an aluminum reflective film is formed on a transparent substrate 2 on which the recording layer is formed so that the first and second recording layers 4 and 8 are placed opposite to each other.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an information recording medium having a multi-layered recording layer and a light semi-transmissive film to read recording signals of each recording layer from the same surface. The present invention relates to an information recording medium capable of controlling the transmittance and the reflectance of light incident on a transmission film.

[0002]

2. Description of the Related Art Conventionally, a read-only optical disc shown in FIG. 5 and a rewritable optical disc shown in FIG. 6 have been known as information media for recording and / or reproducing audio, video and other various information.

FIG. 5 is a schematic view showing a sectional structure of a read-only optical disk. In FIG. 5, the light irradiation side surface 11a of the read-only optical disk 11 is formed by a transparent substrate 12 made of polycarbonate or the like.
On the recording layer 1 having the concave and convex pits 13 of the recording data
4 are formed. A reflective film 15 such as an aluminum vapor-deposited film is formed on the recording layer 14.
Is covered and protected by a protective film 16 such as an ultraviolet curable resin.

FIG. 6 is a schematic diagram showing a sectional structure of a rewritable optical disk. In FIG. 6, the light irradiation side surface 21a of the rewritable optical disk 21 is formed of a transparent substrate 22 of polycarbonate or the like. On this transparent substrate 22, an enhanced layer 23 of a high refractive index dielectric and a recording layer 24 are sequentially formed. ing. On the recording layer 24, a reflective film 26 such as an aluminum vapor-deposited film is formed via a protective layer 25 made of a high-refractive index dielectric, and the reflective film 26 is covered with a protective film 27 such as an ultraviolet curable resin. We are protected.

As described above, these optical discs 11 and 12
In the sectional structure of No. 1, the recording layers 14 and 24 were each a single layer.

However, as the amount of information used increases,
It is necessary to increase the recording density per unit area of the optical disc, and for next-generation optical discs such as digital video discs, use of a high-density optical disc having a multi-layered recording layer has been considered.

FIG. 7 is a schematic view showing a sectional structure of a high-density optical disk. Referring to FIG.
Is composed of a first substrate 32 located on the light irradiation side and a second substrate 33 located on the non-irradiation side. The first substrate 32 is formed on a transparent substrate 34 such as polycarbonate.
First recording layer 36 having concave / convex pits 35 of recording data
And a light semi-transmissive film 37 of SiN or the like is formed on the first recording layer 36. On the other hand, the second substrate 3
3 is on a second transparent substrate 38 such as polycarbonate,
Second recording layer 40 having concave / convex pits 39 of recording data
And a reflective film 41 such as an aluminum vapor-deposited film is formed on the second recording layer 40. Then, the first substrate 32 and the second substrate 33 form a light semi-transmissive film 37.
And a reflection film 41 are opposed to each other via a space layer 42 such as an ultraviolet curable resin.

In order to realize such a high-density optical disk 31, the light translucent film 37 is an extremely important element. That is, the light semi-transmissive film 37 needs a reflectance and a transmittance of 20% to 40%, and when the read focus is set on the first recording layer 36, a recording signal is transmitted from the first recording layer 36. Is read. At this time, the read signal is not focused on the second recording layer 40, so that the recording signals are not mixed at the time of reading. On the other hand, the focus of reading
In this case, only the recording signal of the second recording layer 40 is read out.

The performance required of such a light semi-transmissive film 37 is that absorption loss is small in order to make effective use of incident light, and that the first recording layer 36 and the second recording layer 40 The reflectance and transmittance can be adjusted to equalize the amount of return light, the adhesion to the space layer 42 is good, and the environment resistance is excellent.

Conventionally, there are two types of light transmissive films using a metal thin film and a film using a dielectric multilayer film, and the following structures and manufacturing methods are employed. .

First, a light translucent film using a metal thin film will be described. The composition of the metal thin film generally used includes gold, chromium, and the like, but is not limited thereto, and any type of metal can be used as long as the metal can be thinned. The method for producing a metal semi-transmissive film is such that a heating boat loaded with a metal material is housed in a chamber constructed of stainless steel or aluminum, and the inside of the chamber is evacuated to a high vacuum with a rotary pump and an oil diffusion pump. The metal material on the heating boat is evaporated by heating. The heated and evaporated metal reaches a target substrate made of plastic, glass, ceramic, or the like, and solidifies on the target substrate to form a metal thin film. This type of semi-transmissive film controls the transmittance and reflectance of incident light by adjusting the thickness of the metal thin film.

Next, a light semi-transmissive film using a dielectric multilayer film will be described. As shown in FIG. 8, the dielectric multilayer film 52
Is provided between the transparent substrate 51 and the space layer 55, and is formed by alternately stacking the low-refractive-index films 53 and the high-refractive-index films 54. That is, the dielectric multilayer film 50 is a film in which transparent dielectric films 53 and 54 having different refractive indices are laminated in multiple layers to control light reflectance and transmittance by utilizing interference at the film interface. It is.

[0013]

By the way, the light semi-transmissive film using the metal thin film has a problem as shown in FIG. 9A is an explanatory diagram showing the film thickness dependence of the reflectance and transmittance of chromium, and FIG. 9B is an explanatory diagram showing the film thickness dependence of the reflectance and transmittance of gold. is there.

As shown in the figure, since the metal thin film has a large light absorption coefficient, there is a problem that the total amount of reflected light and transmitted light is reduced. Further, since the transmittance and the reflectance change sharply with the film thickness, there is a problem that the film thickness needs to be controlled very strictly. this is,
It is a major factor in determining product yield.

On the other hand, in a light semi-transmissive film using a dielectric multilayer film, since a transparent dielectric film is used, light absorption loss is extremely small, and light having arbitrary transmittance and reflectance is obtained. A semi-permeable membrane can be obtained. However, since the interference at the multilayer film interface is used, it is necessary to precisely control each film thickness, and it is extremely difficult to uniformly form a film over a large area such as an information recording medium. was there. Further, in order to use the film as a light semi-transmissive film, it is necessary to form a multilayer, so that it takes a long time to manufacture, and two kinds of films having different compositions are required, so that a film forming apparatus becomes complicated. there were.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has as its object to provide an information recording medium having a light semi-transmissive film which has a simple structure, is easy to manufacture, and has a small light absorption loss. It is assumed that.

[0017]

SUMMARY OF THE INVENTION According to the present invention, there is provided an information processing apparatus comprising a multi-layered recording layer and a light semi-transmissive film for reading a recording signal of each recording layer from the same surface. In the recording medium, the light semi-transmissive film is formed of a silicon compound, and the total amount of oxygen and carbon contained in the silicon compound is at least 10 to 40 atomic%. Is done.

[0018]

Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. The embodiment described below is a preferred embodiment of the present invention, and therefore, various technically preferable limitations are added. However, the scope of the present invention particularly limits the present invention in the following description. Are not limited to these embodiments unless otherwise described.

FIG. 1 is a schematic view showing an embodiment of a cross-sectional structure of an information recording medium according to the present invention. In FIG.
The information recording medium 1 is configured as, for example, a disk-shaped optical disk, and a light-irradiation side is provided with a transparent substrate 2 made of, for example, polycarbonate or polymethyl methacrylate. The transparent substrate 2 is formed in a disk shape by, for example, injection molding polycarbonate, polymethyl methacrylate, or the like in a mold, and has a first recording layer 4 having concave and convex pits 3 of recording data by a stamper on an upper surface thereof. Are formed.

On the first recording layer 4, a film forming method such as sputtering is performed in a mixed gas atmosphere containing a hydrocarbon-based gas such as an oxygen gas and a methane gas, so that a light-translucent silicon compound film is formed. The film 5 is formed. Therefore, the light translucent film 5 contains predetermined amounts of oxygen and carbon. In order to obtain the optimal light transmittance and reflectance as the light translucent film 5, the total amount of oxygen and carbon contained in the light translucent film 5 should be at least 10 to 40 atomic%. Is preferred.

On the light translucent film 5, a transparent space layer 6 made of an ultraviolet curable resin, a light curable resin or the like is formed. In this way, the first recording layer 4 and the first recording layer 4 are bonded by bonding the single plate having the aluminum reflection film formed on the transparent substrate on which the recording layer is formed so that the two recording layers 4 and 8 face each other. The information recording medium 1 having the second recording layer 8 was produced.

As described above, the information recording medium 1 of the present embodiment
Has a first recording layer 4 and a second recording layer 8, and includes a light semi-transmissive film 5 on the first recording layer 4, so that the recording layers 4, 8 The recording signal is read out. The light translucent film 5 is made of a silicon compound containing at least 10 to 40 atomic% of oxygen and carbon in a total amount, and has a predetermined refractive index and a predetermined thickness by a film forming method such as sputtering. The film is formed.

In the present embodiment, the information recording medium 1 having two recording layers has been described. However, the present invention is not limited to this, and may be configured as an information recording medium having three or more recording layers. Good.

FIG. 2 is a schematic diagram for explaining the function when a silicon compound containing oxygen and carbon is used as the light translucent film. In FIG. 2, a light translucent film 5 is interposed between a transparent substrate 2 formed of polycarbonate or the like and a space layer 6 formed of an ultraviolet curable resin or the like.
For example, light entering from the transparent substrate 2 side is
Cause multiple reflections in the light and interfere. Therefore, as shown in FIG. 3, the amount of light passing through and the amount of light reflected by the light semi-transmissive film 5 vary depending on the thickness and the refractive index of the light semi-transmissive film 5. That is, the reflectance and the transmittance can be arbitrarily selected by changing the refractive index and the film thickness.

FIG. 4 shows that the amount of oxygen is constant (3%), the refractive index of the light semi-transmissive film is changed when the amount of carbon is changed, and the amount of oxygen is constant (6%). FIG. 4 is an explanatory diagram showing a change in the refractive index of the light semi-transmissive film when the film is changed. FIG. 4 shows that the refractive index decreases as the total amount of oxygen and carbon increases.

The optimum values of the refractive index and the film thickness at this time are determined as follows. The refractive index is set so that the amount of return light from the first recording layer 4 and the second recording layer 8 is equal when viewed from the transparent substrate 2 side. Further, the film thickness is set to a value that minimizes the change in reflectance and transmittance with respect to the change in film thickness in order to obtain a uniform return light amount in the plane. further,
The ratio between oxygen and carbon is determined in consideration of the optimum adhesion with the space layer 6.

That is, since the light semi-transmissive film 5 needs a reflectance and a transmittance of 20% to 40%, the light transmissive film 5 has a reflectance and a refractive index of 20% to 40% as shown in FIG. 40%
The film thickness and the refractive index with respect to the reflectance are selected to the optimum values, and the relationship between the oxygen and carbon contents and the refractive index shown in FIG. 4 is applied to make the total amount of oxygen and carbon 10 atomic% to 40 atomic%.
It is specified in.

In particular, when doping carbon into the light semi-transmissive film 5, a hydrocarbon-based gas is used.
Hydrogen is taken in, and the dangling bonds of silicon are terminated by the hydrogen, so that there is an advantage that the change with time is reduced.

[0029]

【Example】

Embodiment 1 The information recording medium of Embodiment 1 has a cross-sectional structure similar to that of the information recording medium shown in FIG. 1, and therefore, the same reference numerals indicate the same members. Polycarbonate is used as the material of the transparent substrate 2. First, polycarbonate was injection-molded in a mold, and a transparent substrate 2 on which a first recording layer 4 having uneven pits 3 was formed by a stamper was produced.

Next, the transparent substrate 2 was introduced into a chamber of a sputtering apparatus and set on an anode, and a silicon target was set on a cathode. This silicon target is doped with boron to increase its conductivity.

After sufficiently exhausting the chamber, a mixed gas of 15 sccm argon gas mixed with 3 sccm oxygen gas and 2 sccm methane gas was introduced from the gas inlet of the chamber, and RF superposed DC reactive sputtering was performed. Then, a light semi-transmissive film 5 was formed on the first recording layer 4 of the transparent substrate 2. The light semi-transmissive film 5 was formed at a film forming speed of 7 nm / sec for 8 seconds. As a result, a silicon compound film containing 19 atomic% of oxygen and 4 atomic% of carbon was formed with a thickness of 56 nm as the light semi-transmissive film 5.

Light semi-transmissive film 5 made of this silicon compound film
Had a refractive index n = 2.95. On this light semi-transmissive film 5, a space layer 6 made of an ultraviolet curing resin is formed with a thickness of 47 microns. The first recording layer 4 and the second recording layer 4 and 8 are bonded together such that the two recording layers 4 and 8 are opposed to each other on a single plate having an aluminum reflective film formed on the transparent substrate on which the recording layer is formed. The optical disc 1 having the recording layer 8 was manufactured.

When the reflectance of the optical disk 1 manufactured as described above was measured, the reflectance of the first recording layer 4 was 2
9%, and the reflectance of the second recording layer 8 was 32%. When the optical disc 1 was focused on the first recording layer 4 or the second recording layer 8 by the optical pickup, the data recorded on each of the optical discs 1 could be read satisfactorily.

Embodiment 2 The information recording medium of Embodiment 2 has a cross-sectional structure similar to that of the information recording medium shown in FIG. 1, and the same reference numerals denote the same members. The material of the transparent substrate 2 is polycarbonate. First, polycarbonate was injection-molded in a mold to produce a transparent substrate 2 on which a first recording layer 4 having uneven pits 3 was formed by a stamper.

Next, the transparent substrate 2 was introduced into a chamber of a sputtering apparatus and set on an anode, and a silicon target was set on a cathode. This silicon target is doped with boron to increase its conductivity.

After sufficiently exhausting the inside of the chamber, a mixed gas obtained by mixing 4 sccm oxygen gas and 3 sccm methane gas into 20 sccm argon gas is introduced from the gas inlet of the chamber, and RF superposed DC reactive sputtering is performed. Then, a light semi-transmissive film 5 was formed on the first recording layer 4 of the transparent substrate 2. The light semi-transmissive film 5 was formed at a film forming speed of 9 nm / sec for 6 seconds. As a result, a silicon compound film containing 21 atomic% of oxygen and 5 atomic% of carbon was formed as the light semi-transmissive film 5 to a thickness of 54 nm.

The light semi-transmissive film 5 made of this silicon compound film
Had a refractive index n = 2.90. On this light semi-transmissive film 5, a space layer 6 made of an ultraviolet curable resin was formed with a thickness of 47 microns. The first recording layer 4 and the second recording layer 4 and 8 are bonded together such that the two recording layers 4 and 8 are opposed to each other on a single plate having an aluminum reflective film formed on the transparent substrate on which the recording layer is formed. The optical disc 1 having the recording layer 8 was manufactured.

When the reflectance of the optical disk 1 manufactured as described above was measured, the reflectance of the first recording layer 4 was 2
6%, and the reflectance of the second recording layer 8 was 35%. When the optical disc 1 was focused on the first recording layer 4 or the second recording layer 8 by the optical pickup, the data recorded on each of the optical discs 1 could be read satisfactorily.

As described above, according to the embodiments and examples of the present invention, the light semi-transmissive film 5 is made of a silicon compound containing a predetermined amount of oxygen and carbon, and its refractive index and film thickness are optimized. By selecting a value, a light semi-transmissive film 5 having a predetermined reflectance and transmittance can be obtained, and a multilayer recording layer required for the large-capacity optical disc 1 can be realized.

The optical disc 1 has a simple structure, is easy to manufacture, and has excellent performance in that it has little change over time and little light absorption loss due to its excellent adhesion to the space layer 6.

[0041]

As described above, according to the present invention, it is possible to provide an information recording medium having a light semi-transmissive film which has a simple structure, is easy to manufacture, and has a small light absorption loss.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a cross-sectional structure of an embodiment of an information recording medium according to the present invention.

FIG. 2 is a conceptual diagram for explaining a function when a silicon compound containing oxygen and carbon is used as a light semi-transmissive film in the present embodiment.

FIG. 3 is an explanatory diagram showing a relationship among a film thickness, a reflectance, and a refractive index in the present embodiment.

FIG. 4 is an explanatory diagram showing a relationship between oxygen and carbon contents and a refractive index in the present embodiment.

FIG. 5 is a schematic diagram showing a cross-sectional structure of a conventional read-only optical disc.

FIG. 6 is a schematic diagram showing a cross-sectional structure of a conventional rewritable optical disk.

FIG. 7 is a schematic view showing a cross-sectional structure of a conventional high-density optical disk.

FIG. 8 is a schematic view showing a conventional light semi-transmissive film using a dielectric multilayer film.

FIG. 9 shows a conventional light translucent film using a metal thin film.
(A) is an explanatory diagram showing the film thickness dependence of the reflectance and transmittance of chromium, and (b) is an explanatory diagram showing the film thickness dependence of the reflectance and transmittance of gold.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Information recording medium, 2 ... Transparent substrate, 3 ... Uneven pits, 4 ... First recording layer, 5 ... Optical translucent film, 6 ... Space layer, 7 ..Uneven pits, 8.
・ Second recording layer, 9: total reflection film, 10: protective film

Claims (8)

[Claims] 1. An information recording medium having a multi-layer recording layer and a light semi-transmissive film to read a recording signal of each recording layer from the same surface, wherein the light semi-transmissive film is formed of a silicon compound. And the total amount of oxygen and carbon contained in the silicon compound is at least 10
An information recording medium characterized by being at least 40 atomic%. 2. Doping of carbon, which is a main component of the light translucent film, with silicon is performed in an atmosphere containing a hydrocarbon gas, and dangling bonds of silicon are terminated by hydrogen taken into the film. The information recording medium according to claim 1, wherein 3. The information recording medium according to claim 1, wherein the refractive index of the light semi-transmissive film is set such that the amount of light returning from each recording layer to the light irradiation side is substantially equal. 4. The information recording medium according to claim 2, wherein the refractive index of the light semi-transmissive film is set such that the amount of light returning from each recording layer to the light irradiation side is substantially equal. 5. The information recording medium according to claim 1, wherein the thickness of the light semi-transmissive film is set to a value at which a change in reflectance and a change in transmittance with respect to a change in the film thickness are smallest. 6. The information recording medium according to claim 2, wherein the thickness of the light semi-transmissive film is set to a value at which a change in reflectance and a change in transmittance with respect to a change in film thickness are smallest. 7. The information recording medium according to claim 3, wherein the thickness of the light semi-transmissive film is set to a value at which a change in reflectance and a change in transmittance with respect to a change in the film thickness are smallest. 8. The information recording medium according to claim 4, wherein the thickness of the light semi-transmissive film is set to a value in which a change in reflectance and a change in transmittance with respect to a change in the film thickness are smallest.