JPH10177929A - Manufacture of coil part - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method of the coil part, of which productivity is especially excellent, in the method for manufacturing the coil part. SOLUTION: In a hollow-body shaped outer insulator, a conical or pyramid- shaped hollow part is provided, the inner surface of the hollow part comprises a plurality of turns, the diameter of the respective turning parts are slightly different from one end to the other end, and at least each returning part is the stepwise slope located at the different plane. This outer insulator 1 is formed. At the inner surface comprising the stepwise slope of the outer insulator 1, a conductor 3 is formed by the thermal spraying method so that a plurality of turns form the conductor, the diameter of each turning part is different from one end to the other end slightly and at least each turning part is located at the different plane. Then, the hollow part of the outer insulator 1 is filled with an inner insulator 2. Edge layer 8 and 9 are formed at least at any of the upper and lower edges of the outer insulator 1 or the insulator 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a coil component used for various electronic devices and communication devices.

[0002]

2. Description of the Related Art Coil components are widely used as coils and transformers for various electronic devices and communication devices. In recent years, small or thin coil components have been increasingly required. As a result, coil components as noise suppression components are becoming more and more important.

As a conventional coil component satisfying these demands, a laminated coil component obtained by alternately laminating a ferrite magnetic layer and a coil conductor layer (for example, Japanese Patent Publication No.
39521).

[0004] This method of manufacturing a laminated coil component uses a ferrite green sheet 2 as shown in FIGS.
A ferrite layer 21 is formed by printing on the upper half of the ferrite layer 21, and an L-shaped conductor pattern 22 is formed by printing on a part without the ferrite layer 21 and on a part of the ferrite layer 21. A U-shaped conductor pattern 24 is printed on the ferrite layer 21 and a part of the ferrite layer 23 so as to be continuous with the conductor pattern 22, and this process is repeated several times. Ferrite green sheet 20 on the top layer
Are laminated and fired at a time, and end electrodes 25 are formed at both ends of the laminated body.

[0005]

In the above method, it is necessary to increase the number of turns of the conductor pattern in order to obtain a coil component having a large inductance value, so that an extremely large number of ferrite layers 21 and 23 and conductor patterns 22 and 24 are required. Need to be laminated and printed, which increases the number of man-hours for production, and is problematic in terms of productivity. Further, in the coil component obtained by this method, since the conductor patterns 24 are formed so as to be opposed to each other via the ferrite layers 21 and 23, the stray capacitance between the conductor patterns increases, and the self-resonant frequency However, there is also a problem in terms of characteristics such as a reduction in the resistance and a low withstand voltage.

Further, in this laminated coil component, since the conductor pattern is formed on a part of the ferrite layer, if the thickness of the conductor pattern is increased in order to reduce the coil conductor resistance, the overall thickness becomes smaller than the conductor pattern 22. , 24 are significantly different from each other, and even if fired, cracks occur and a coil component of stable quality cannot be obtained.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a method for manufacturing a coil component which eliminates the above-mentioned drawbacks of the prior art, is excellent in productivity, has a small stray capacitance and is excellent in electric characteristics.

[0008]

In order to solve the above-mentioned problems, a method of manufacturing a coil component according to the present invention has a conical or pyramid-shaped hollow portion, and the inner surface of the hollow portion has a plurality of turns. Forming a hollow insulator having a stepwise slope such that the diameter gradually changes from one end to the other end and at least each turn portion is located in a different plane; and from the stepped slope of the insulator, The basic process is to form a conductor by thermal spraying such that the inner surface has a plurality of turns, and the diameter of each turn portion gradually changes from one end to the other end, and at least each turn portion is located in a different plane.

Another method is to use a conical or pyramid-shaped insulator instead of forming the above-mentioned hollow insulator having a specific inner surface. The diameter of each turn part is gradually different from one end to the other end, and at least each turn part is formed in an insulator which is a step-like slope located in a different plane, or the hollow body-shaped outside. A method of manufacturing a coil component including a method of forming both an insulator and an inner insulator or a step of forming an end surface layer on at least one of upper and lower end surfaces of the insulator.

In any of the above-mentioned methods, the outer peripheral surface or the inner peripheral surface of the insulator is composed of a plurality of turns, and the diameter of each turn portion is gradually different from one end to the other end, and at least each turn portion is in a different plane. This is a method of manufacturing a coil component obtained by forming a conductor on a specific surface by a thermal spraying method.

According to the present invention, a coil component having excellent electric characteristics can be obtained by a method excellent in productivity.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The invention according to claim 1 of the present invention has a hollow portion having a conical or pyramid shape, the inner surface of the hollow portion has a plurality of turns, and the diameter of each turn portion is from one end to the other end. A step of forming a hollow-body-shaped insulator which is a step-like slope such that at least each turn portion is located in a different plane, and comprising a plurality of turns on an inner surface formed by the step-like slope of the insulator; Forming a conductor by thermal spraying such that the diameter of each turn portion is gradually different from one end to the other end and at least each turn portion is located in a different plane. Coil components can be manufactured with high productivity.

According to a second aspect of the present invention, the conical or pyramid-shaped insulator has a plurality of turns on a side surface, and the diameter of each turn portion is gradually different from one end to the other end, and at least each turn portion is in a different plane. A step of forming an insulator that is a step-like slope positioned as described above, and a plurality of turns on a side surface of the insulator consisting of the step-like slope, and the diameter of each turn portion gradually varies from one end to the other end. Forming a conductor by a thermal spraying method so that at least each turn portion is located in a different plane. A coil component can be manufactured with excellent productivity.

According to a third aspect of the present invention, there is provided a conical or pyramid-shaped hollow portion, wherein the inner surface of the hollow portion has a plurality of turns, and the diameter of each turn portion gradually varies from one end to the other end, and at least each turn has a different diameter. Forming a hollow body-shaped outer insulator that is a step-shaped slope such that the portion is located in a different plane, and comprising a plurality of turns on the inner surface formed by the step-shaped slope of the outer insulator, comprising: Forming a conductor by thermal spraying such that the diameter gradually changes from one end to the other end and at least each turn portion is located in a different plane; and insulates the hollow portion of the conical or pyramid-shaped outer insulator by a thermal spraying method. A method of manufacturing a coil component having a step of filling with a body, and it is possible to obtain a chip-shaped coil component with excellent productivity.

According to a fourth aspect of the present invention, there is provided a conical or pyramid-shaped hollow portion, wherein the inner surface of the hollow portion has a plurality of turns, and the diameter of each turn portion is gradually different from one end to the other end, and at least each turn is different. Forming a hollow body-shaped outer insulator that is a step-shaped slope such that the portion is located in a different plane, and comprising a plurality of turns on the inner surface formed by the step-shaped slope of the outer insulator, comprising: Forming a conductor by thermal spraying such that the diameter gradually changes from one end to the other end and at least each turn portion is located in a different plane; and insulates the hollow portion of the conical or pyramid-shaped outer insulator by a thermal spraying method. A method of manufacturing a coil component, comprising: a step of filling with a body; and a step of forming an end face layer on at least one of upper and lower end faces in contact with the outer insulator and the inner insulator. There, it is possible to obtain a chip-shaped coil component that can ensure good productivity, yet mechanically superior reliability.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows a sectional view of a coil component obtained by the manufacturing method of the present invention. The conductor 3 has a plurality of turns, and the diameter of each turn portion gradually changes from one end to the other end, and at least each turn portion is located in a different plane. The insulator located outside the conductor 3 is the outer insulator 1, and the insulator located inside the conductor 3 is the inner insulator 2. The two ends of the conductor 3 are connected to extraction electrodes 4 and 5, respectively, and the extraction electrodes 4 and 5 are further connected to end electrodes 6 and 7.

FIG. 2 shows a cross section of still another coil part obtained by the method of manufacturing a coil part according to the present invention. Unlike the one shown in FIG. 1, the outer insulator 1 and the inner insulator 2 have end face layers 8 and 9 on upper and lower end faces. Other configurations are the same as those in FIG.

Here, the outer insulator 1, the inner insulator 2, and the end face layers 8, 9 are made of one kind of material, and these insulators may be non-magnetic or magnetic.

Any non-magnetic material may be used as long as it has electrical insulation properties, such as an organic insulating material such as glass epoxy or polyimide, or an inorganic insulating material such as glass, glass ceramics or ceramics. You may.

As the magnetic material, NiZn or NiZnC
Any ferrite material having a generally high magnetic permeability, such as a u-based material, may be used.

When the outer insulator 1 or the inner insulator 2 is made of a magnetic material, the inductance value can be increased, and when it is made of a non-magnetic material, a large inductance value cannot be obtained. And the usable frequency band becomes wider.

Further, each of the outer insulator 1, the inner insulator 2, and the insulators 8 and 9 does not need to be made of one kind of insulating material. For example, the inner insulator 2 is made of two or more kinds of insulating materials. You may comprise. As described above, by combining various insulating materials, particularly by combining insulating materials having different magnetic properties, the electrical characteristics of the coil component obtained by the manufacturing method of the present invention can be freely controlled. For example, it becomes possible to adjust the inductance and the DC superimposition characteristic, take measures against the leakage magnetic flux, and control the usable frequency band.

Any material may be used as the material of the conductor 3 or the extraction electrodes 4 and 5 as long as it is an electrically good conductor. However, since a material having a high resistivity and a low resistance is required for a coil component, copper and silver are required. Conductive materials such as palladium alloys or silver are effective.

The end electrodes 6 and 7 may be made of a conductive material. However, in general, it is preferable that the end electrodes are composed of a plurality of layers instead of a single layer. It is necessary to consider the mounting strength at the time of soldering, the wettability of the solder at the time of mounting, solder cracking, etc. Specifically, the lowermost layer uses the same conductive material as the extraction electrodes 4 and 5, and the middle layer is And nickel having high wettability to the solder is used for the outermost layer.

However, this is an example, and it is not always necessary to employ this, and a conductive resin material may be included in addition to a material having excellent conductivity such as a metal.

A predetermined wiring pattern is formed on a ceramic substrate such as alumina or ferrite, a window is provided on the ceramic substrate, a coil component is inserted, and the wiring pattern and the end electrodes 6, 7 of the coil component are brought into contact with each other to form a thick film. Since it is fired and electrically connected by using the forming process, it is conceivable to increase the heat resistance and adopt a configuration corresponding to this thick film forming process.

In the above-described embodiment, only the surface mounting type in which the end electrodes 6 and 7 are provided at both ends has been described. It is also possible to obtain a lead-type coil component in which cap-shaped electrodes having terminals are fitted and connected to both ends of an insulator.

Next, a method of manufacturing a coil component according to the present invention will be described. The method for manufacturing a coil component of the present invention has a conical or pyramid-shaped hollow portion, and the inner surface of the hollow portion has a plurality of turns, and the diameter of each turn portion gradually changes from one end to the other end, and at least each turn portion has A step of forming a hollow body-shaped outer insulator 1 which is a step-like slope located in a different plane; and a plurality of turns on an inner surface of the outer insulator 1 formed by the step-like slope, and a diameter of each turn portion. Forming the conductors 3 by thermal spraying so that at least each turn portion is located in a different plane from one end to the other end, and filling the hollow portion of the outer insulator 1 with the inner insulator 2. And a method of manufacturing a coil component including a step of forming end face layers 8 and 9 on at least one of the upper and lower end faces of the outer insulator 1 or the inner insulator 2. Since formation surface is stepped planar, it is possible to obtain the coil component with excellent productivity.

Next, a more detailed method of manufacturing the coil component of the present invention will be described with reference to the drawings.

3 to 8 are sectional views showing a method of manufacturing a coil component according to the present invention in the order of steps. First, as shown in FIG. 3, a hollow outer insulator 1 having a conical or pyramidal hollow portion formed at the center is formed. The inner surface of the outer insulator 1 has a three-dimensional spiral-shaped stepped portion having a plurality of turns. The diameter of each turn portion gradually changes from one end to the other end, and at least each turn portion has a different plane. The conductor 3 can be formed so as to be located inside.

As a method of forming the hollow outer insulator 1 having the inner surface having the above-mentioned shape, the slurry outer insulator 1 is flowed on a support having a convex portion capable of meshing with the inner surface. By separating from the support after drying, a specific hollow portion can be formed in the outer insulator 1. Another method is to pour the slurry-like outer insulator 1 on a flat support to form a smooth sheet-like outer insulator 1 and then form the above-described specific hollow portion in the same manner as described above. Is a method of forming a specific hollow portion in the outer insulator 1 using a mold having the following shape. Further, the hollow outer insulator 1 having a specific hollow portion can be similarly formed by a generally known powder molding method. Either method can form the hollow outer insulator 1 having the specific inner surface described above, as shown in FIG.

Next, as shown in FIG. 4, a conductor 3 is formed by thermal spraying on the inner surface of the outer insulator 1 having a specific hollow portion in a spiral stepped shape. The conductor 3 has a plurality of turns, and the diameter of each turn portion gradually changes from one end to the other end, and at least each turn portion is located in a different plane. As described above, as described above, there is a shape obtained by pulling down the center of the mosquito-carrying incense-shaped conductor 3 to form a trumpet shape or a series of concentric circles.

As the thermal spraying method for forming the conductor 3, there are generally known arc thermal spraying, gas thermal spraying or plasma thermal spraying, and these may be selected as appropriate.

As shown in FIG. 5, the outer insulator 1 on which the conductor 3 is formed is provided with a lead electrode 4 formed on the bottom surface of the outer insulator 1 so as to be joined to the conductor end of the conductor 3 on the smaller conductor diameter. And the end face layer 8 having the same.

As shown in FIG. 6, the hollow portion formed by the outer insulator 1 and the end face layer 8 is filled with the inner insulator 2.

Next, as shown in FIG.
The outer insulator 1 is joined to an end face layer 9 having an extraction electrode 5 for joining to a conductor end of the conductor 3 on the side with a larger conductor diameter.

Further, as shown in FIG. 8, end surface electrodes 6 and 7 are formed on two surfaces of the chip-like component. By firing the obtained laminate, a coil component can be obtained. However, the firing may be performed without forming the end electrodes 6 and 7. That is, the electrode without the end face electrodes 6 and 7 is fired, and after firing, the end face electrodes 6 and 7 are fired.
It is a method of forming. An example of a forming method in this case will be described. A conductor layer is formed in the same shape as the end face electrodes 6 and 7 shown in FIG. Thereafter, nickel plating and solder or tin plating are performed using the conductor layer as an electrode. Finally, the end face electrodes 6 and 7 have a three-layer structure of a base conductor layer formed by firing and nickel and solder or tin formed by electroplating.

In the above example, the method of forming the outer insulator 1 and forming the conductor 3 on the inner surface thereof has been described. Similarly, the method of forming the inner insulator 2 and forming the conductor 3 on the outer side surface thereof is described. There may be.

The outer insulator 1, the inner insulator 2, and the end face layers 8 and 9 are formed by a generally known green sheet forming method.
It can be formed by a printing method, a dipping method, a powder molding method, a spin coating method, or the like. As a method of forming the extraction electrodes 4 and 5, a printing method is generally used, but a pattern formation using a laser, a method of transferring a conductor previously formed into a predetermined shape by a mold or the like, a dropping method, a potting method, or a thermal spraying method Method may be used.

In the examples shown in FIGS. 3 to 8, the end face layers 8 and 9 are formed on the end faces located so as to be in contact with the outer insulator 1 and the inner insulator 2, respectively. , 9 alone or both need not be formed.

The coil component obtained by the manufacturing method of the present invention is a coil component having excellent heat resistance, and therefore can be easily modularized. For example, a predetermined wiring layer is formed on a ceramic substrate such as an alumina substrate or a ferrite substrate, and the wiring of the substrate and the end electrodes 6 to 7 of the coil component are simultaneously connected to be integrated or assembled.
In this case, it is possible to connect the end electrodes 6 to 7 on the side surfaces of the coil component to the wiring on the ceramic substrate by opening a window at a predetermined position on the substrate, and thus obtain a thin module. In this case, an ordinary thick film forming process using a generally known ceramic substrate can be applied. The end electrodes 6 and 7 of the coil component are not premised on soldering, but may be fired and electrically connected.

The two terminals of the conductor 3 forming the above-mentioned coil are formed on the end face of the chip component to form the end face electrodes 6 to 7
It is in a state of being electrically connected to. In other words, the uppermost and lowermost portions of the conductor 3 have the extraction electrodes 4 to 5 for electrically connecting to the end surface electrodes 6 to 7, and are connected to the end surface electrodes 6 to 7.

The paste for forming each of the above layers is as follows:
Solvents such as butyl carbitol, terpineol, and alcohol, binders such as ethyl cellulose, polyvinyl butyral, polyvinyl alcohol, polyethylene oxide, and ethylene-vinyl acetate; and sintering aids such as various oxides and glasses. In addition, a plasticizer or a dispersant such as butylbenzyl phthalate, dibutyl phthalate, and glycerin may be added.
Each layer is formed using a kneaded material obtained by mixing these. These are laminated in a predetermined structure as described above and fired to obtain a coil component. When producing a green sheet, various solvents having excellent evaporating properties, for example, butyl acetate, methyl ethyl ketone, toluene, alcohol, and the like are desirable in place of the above-mentioned solvents.

The firing temperature range is from about 800 ° C. to 13
It is in the range of 00 ° C. In particular, it depends on the conductor material. For example, when silver is used as the conductor material, it is necessary to be around 900 ° C., and at 950 ° C. for an alloy of silver and palladium, and nickel or palladium is used as the conductor material for firing at a higher temperature. .

Next, more specific embodiments of the present invention will be described. Example 1 A ferrite slurry was prepared by mixing 8 g of butyral resin, 4 g of butylbenzyl phthalate, 24 g of methyl ethyl ketone and 24 g of butyl acetate with 100 g of NiZnCu-based ferrite powder and kneading them using a pot mill.

Using this slurry, a ferrite green sheet having a thickness of 0.2 mm was prepared after drying using a coater. The green sheet was formed on a PET film.

The three ferrite green sheets were stacked and laminated. A hot press was used for lamination of the ferrite green sheets, the platen temperature of the hot press was set to 100 ° C., and the pressure was 500 kg / cm ² . A conductor 3 is formed such that a plurality of turns are formed on the inner surface of a hollow insulator as shown in FIG. 3 and the diameter of each turn portion gradually changes from one end to the other end and at least each turn portion is located in a different plane. Using a puncher using a mold having a shape for forming a predetermined inner surface such that a predetermined inner surface can be formed, a predetermined inner surface of the laminated ferrite green sheet is formed, and a conical hollow portion is formed. Was formed in the center of the hollow insulator, that is, the outer insulator 1.

Next, a plurality of turns are formed on the inner surface of the outer insulator 1 by plasma spraying using silver powder, and the diameter of each turn portion gradually changes from one end to the other end, and at least each turn portion is located in a different plane. Conductor 3
Was formed.

Next, as shown in FIG. 5, an extraction electrode 4 was formed on the ferrite green sheet (thickness: 0.2 mm) prepared above using the same silver paste and printing machine as described above.
That is, the extraction electrode 4 was formed on the end face layer 8. Further, it was bonded to the outer insulator 1 on which the end face layer 8 and the conductor 3 were formed.

Further, as shown in FIG.
The above-mentioned ferrite slurry was poured into the inner surface, that is, the cavity, to produce a substantially flat ferrite green sheet. That is, the inner insulator 2 was formed by this filling.

Next, as shown in FIG. 7, an extraction electrode 5 is formed on the previously prepared ferrite green sheet having a thickness of 0.2 mm in the same manner as described above, and the outer insulator 1 containing the conductor 3 and the inner insulator are formed. The body 2 and the end face layer 9 were laminated using a lamination press as shown in the figure. Further, end electrodes 6 and 7 as shown in FIG. 8 are formed using a commercially available silver paste,
It was fired under the condition of holding at 900 ° C. for 2 hours.

No defects such as peeling, cracking and warping were found in the coil component of the present invention obtained by the above method.
When various electrical characteristics were measured using an impedance analyzer or the like, it was found that the coil component had excellent characteristics.

As described above, according to the coil component of the present invention, a coil component having excellent electrical characteristics can be obtained with a smaller number of layers than a conventional laminated coil component.

(Embodiment 2) As in Embodiment 1, NiZnC
6 g of butyral resin, 4 g of butylbenzyl phthalate, and 50 g of butyl acetate were mixed with 100 g of the u-based ferrite powder and kneaded using a pot mill to prepare a ferrite slurry.

Using this slurry, a plurality of turns are formed on the inner surface of the hollow insulator in the same manner as in the first embodiment, and the diameter of each turn portion is gradually different from one end to the other end, and at least each turn portion is in a different plane. After drying using a coater on a sheet-like polyimide having a shape to form a predetermined inner surface such that a conductor can be formed so as to be located on a ferrite green sheet having a thickness of 0.6 mm, An insulator 1 was formed.

Next, a conductor 3 was formed on the inner surface of the outer insulator 1 by plasma spraying in the same manner as in Example 1. Further, FIG.
As shown below, the end face layer 8 is formed in the same manner as in the first embodiment.
The inner insulator 2, the end face layer 9, the end face electrodes 6, 7 and the like were formed and baked at 900 ° C. for 2 hours.

No defects such as peeling, cracking and warping were found in the coil component of the present invention obtained by the above method.
When various electrical characteristics were measured using an impedance analyzer, the coil component had excellent characteristics.

As described above, according to the coil component of the present invention, a coil component having excellent electrical characteristics can be obtained with a smaller number of layers than a conventional laminated coil component. Further, this method can form the outer insulator 1 in one step as compared with the method shown in Embodiment 1, and is a method which is advantageous in terms of man-hours.

[0059]

As is clear from the above description, the method for manufacturing a coil component according to the present invention is excellent in productivity because it is not a lamination method, and has, for example, a hollow body shape provided with a conical or pyramid-shaped hollow portion. Since conductors are formed on the stepped inner surface of the insulator by thermal spraying, low-resistance conductors can be easily obtained, and problems such as remelting of the inner surface of the outer insulator due to the absence of a paste-like conductor are also encountered. Absent. Furthermore, the obtained coil component has a conductor positioned as described above, so that the component height can be kept low, and stray capacitance between the turn portions of the conductor hardly occurs, and the electrical characteristics are excellent. And of great industrial value.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view showing one embodiment of a coil component of the present invention.

FIG. 2 is a schematic cross-sectional view of another embodiment.

FIG. 3 is a schematic cross-sectional view showing a method for manufacturing a coil component according to the present invention.

FIG. 4 is a schematic cross-sectional view showing a method for manufacturing a coil component according to the present invention.

FIG. 5 is a schematic cross-sectional view showing a method for manufacturing a coil component according to the present invention.

FIG. 6 is a schematic cross-sectional view showing a method for manufacturing a coil component according to the present invention.

FIG. 7 is a schematic cross-sectional view showing a method for manufacturing a coil component according to the present invention.

FIG. 8 is a schematic cross-sectional view illustrating a method for manufacturing a coil component according to the present invention.

FIG. 9 is a schematic perspective view showing a conventional coil component.

FIG. 10 is an exploded perspective view of the same.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Outer insulator 2 Inner insulator 3 Conductor 4,5 Leader electrode 6,7 End electrode 8,9 End layer

Claims (4)

[Claims] 1. A conical or pyramid-shaped hollow portion, wherein the inner surface of the hollow portion has a plurality of turns, and the diameter of each turn portion gradually changes from one end to the other end, and at least each turn portion is located in a different plane. A step of forming a hollow body-shaped insulator that is a step-like slope, and a plurality of turns on the inner surface of the insulator consisting of the step-like slope, and the diameter of each turn portion gradually increases from one end to the other end. Forming a conductor by spraying such that at least each turn portion is located in a different plane. 2. A step-like shape in which a side surface of a conical or pyramid-shaped insulator has a plurality of turns, and the diameter of each turn portion gradually changes from one end to the other end, and at least each turn portion is located in a different plane. A step of forming an insulator which is a slope of the insulator and a plurality of turns on a side surface of the insulator having a step-like slope, wherein the diameter of each turn portion gradually changes from one end to the other end and at least each turn portion has a different plane Forming a conductor by a thermal spraying method so as to be positioned inside the coil component. 3. A hollow portion having a conical or pyramidal shape, wherein the inner surface of the hollow portion has a plurality of turns, and the diameter of each turn portion gradually changes from one end to the other end, and at least each turn portion is located in a different plane. A step of forming a hollow body-shaped outer insulator that is a step-like slope, and a plurality of turns on the inner surface formed by the step-like slope of the outer insulator, and the diameter of each turn portion is from one end to the other end. Forming a conductor by thermal spraying so that at least each turn portion is located in a different plane while gradually changing, and filling a hollow portion of the conical or pyramidal outer insulator with an inner insulator. Of manufacturing a coil component having the same. 4. A hollow portion having a conical or pyramid-shaped hollow portion, wherein the inner surface of the hollow portion has a plurality of turns, and the diameter of each turn portion is gradually different from one end to the other end, and at least each turn portion is located in a different plane. A step of forming a hollow body-shaped outer insulator that is a step-like slope, and a plurality of turns on the inner surface formed by the step-like slope of the outer insulator, and the diameter of each turn portion is from one end to the other end. A step of forming a conductor by thermal spraying so that at least each turn portion is located in a different plane while being gradually different, and a step of filling a hollow portion of the conical or pyramidal outer insulator with an inner insulator, Forming an end surface layer on at least one of the upper and lower end surfaces in contact with the outer insulator and the inner insulator.