JPH10171965A - Method and system for inputting image for accumulating area sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To loose a limitation in a resolution of image and image input speed limited by a quantity of illumination light by dividing the number of pixel stages in the integrating direction of an integrating type area sensor by an integer number. and illuminating a subject in a cycle corresponding to the integration of charge in vertical direction by the pixel width corresponding to this divided value. SOLUTION: Strobe lights radiated from an illuminating device 10 are converged on the subject 2 by a converging optical system 4. Then, a synchronization control device 12 intermittently strobe-emit-controls the illuminating device 10 in synchronization with the movement by the pixel width corresponding to the divided value by the integer number of the number of pixel stages in the integrating direction of the integrating type area sensor 6, and transmits a scan interval signal for fetching an image signal from the integrating type area sensor 6 to a sensor driving circuit 11 synchronizing with the timing of the strobe emitting. At the same time, a moving table 1 moves by the driving of a table driving unit 13 in synchronization with the timing of the strobe emitting.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for inputting an image of an integrating area sensor when an object placed on a moving table is imaged by the integrating area sensor.

[0002]

2. Description of the Related Art FIG. 7 is a block diagram of an image input device of an integrating area sensor. A subject 2 is placed on the moving table 1. An illumination device 3 that emits continuous light or strobe light is disposed above the subject 2, and the continuous light or strobe light emitted from the illumination device 3 is condensed on the subject 2 by a condensing optical system 4. It has become so.

[0006] An integrating area sensor 6 is disposed below the subject 2 via an imaging optical system 5. This integrating type area sensor 6 has a configuration in which a plurality of pixels are arranged in the vertical and horizontal directions as shown in FIG.
The number of pixels is 2048 pixels in the horizontal direction.

The operation of the accumulation type area sensor 6 is to continuously accumulate each electric charge photoelectrically converted by each pixel in the horizontal direction while sequentially moving the electric charge to a vertically adjacent pixel in each scanning direction of the sensor. Are output as image signals from the pixels at the 96th stage, which is the last stage in the vertical direction.

At the last stage in the vertical direction, an image signal corresponding to each pixel in the horizontal direction is output for each scanning cycle, similarly to a normal line sensor. The line sensor 6
In the description below, the number of pixels in the vertical direction is referred to as the number of accumulation stages, and the movement of electric charges in the vertical direction is referred to as the accumulation direction.

With such a configuration, image input is performed by the following two methods. The first image input method is a basic image input method of the line sensor 6, in which the moving table 1 is continuously moved in the direction of the arrow shown in FIG. Table 1
The image signal of the integrating area sensor 6 is taken in while controlling the table speed.

In this table speed control, as shown in the positional relationship between the number of scans and the image of the subject 2 on the sensor surface in FIG. The moving table 1 is moved so that the time required to move by one pixel size of the integrating area sensor 6, that is, by one pixel width p, coincides with the scan cycle of the integrating area sensor 6.
Is controlling the table speed.

Accordingly, in order to obtain the whole image of the subject 2, for example, the subject 2 shown in FIG. 9 is scanned 96 times, which is the number of pixels in the vertical direction of the integrating area sensor 6.

In the second image input method, an image corresponding to the image pickup area of the integrating area sensor 6 is input at a time, and the object 2 is irradiated with the strobe light 3 at regular intervals, and the strobe light is irradiated. The moving table 1 is moved in synchronism with the above operation to capture an image.

That is, as shown in FIG. 10, the image of the subject 2 formed on the sensor surface of the integrating area sensor 6 has a distance corresponding to a 96 pixel width which is the number of integrating stages of the integrating area sensor 6. The movement time of the table movement is set to be equal to the flash light emission interval time.

Therefore, in order to obtain the entire image of the subject 2, the subject 2 is moved by a distance corresponding to a width of 96 pixels corresponding to the number of stages of integration of the integrating type area sensor 6, so that the subject 2 shown in FIG. Will be.

[0012]

However, in the first image input method, since it moves by one pixel width corresponding to one pixel size of the integrating area sensor 6, it is very difficult to obtain the entire image of the subject 2. It takes time.

In the first image input method, a strobe light is emitted at regular intervals, and an image corresponding to the image pickup area of the integrating area sensor 6 is taken in accordance with the light emission interval. The illumination light amount is determined by one strobe light amount, and therefore, depending on image input conditions, the resolution of an image that can be input to the integrating area sensor 6 or the image input speed is limited by the limitation of the strobe light amount.

If illumination light such as strobe light has illumination unevenness, the captured image will have illumination unevenness. Accordingly, the present invention provides an image input method and an apparatus for an integrated area sensor that can provide a margin for the image resolution and image input speed limited by the amount of illumination light and can reduce illumination unevenness. Aim.

[0015]

According to the first aspect of the present invention, a plurality of pixels are arranged in the vertical and horizontal directions, the electric charges photoelectrically converted by these pixels are respectively integrated in the vertical direction, and a final stage of this integration is provided. In the image input method of the integration type area sensor which scans each pixel in the horizontal direction and takes in an image signal, the number of pixel stages in the integration direction of the integration type area sensor is divided by an integer, and only the pixel width corresponding to the division value is obtained. This is an image input method of an integrating area sensor that illuminates a subject at a cycle corresponding to the integration of charges in the vertical direction.

According to a second aspect of the present invention, in the method for inputting an image of the integrating area sensor according to the first aspect, the cycle of illuminating the subject is equivalent to a pixel width corresponding to an integral multiple of the scanning cycle of the integrating area sensor. Is an interval corresponding to moving in the vertical direction.

According to a third aspect of the present invention, in the image input method of the integrating area sensor according to the first or second aspect, the positional relationship between the integrating area sensor and the subject is relatively moved in synchronization with the illumination timing of the subject. I do.

According to the fourth aspect, a plurality of pixels are arrayed in the vertical and horizontal directions, the electric charges which are photoelectrically converted by these pixels are respectively integrated in the vertical direction, and each pixel in the horizontal direction which is the final stage of the integration is calculated. In the image input device of the integrating type area sensor that scans and captures an image signal, an electric device is illuminated with an illumination device, and charges are accumulated by an amount equivalent to a pixel width corresponding to a division value of the number of pixels in the integrating direction of the integrating type area sensor by an integer. Synchronization control means for controlling the light emission of the lighting device in synchronization with the integration, and taking in the image signal from the integration type area sensor in synchronization with the emission control, and an integral number of pixel stages in the integration direction of the integration type area sensor. A moving mechanism for relatively moving the subject in the direction of accumulation by a pixel width corresponding to the value obtained by dividing the area by the pixel width. Input device.

According to the fifth aspect, a plurality of pixels are arranged in the vertical and horizontal directions, the electric charges photoelectrically converted by these pixels are respectively integrated in the vertical direction, and each pixel in the horizontal direction which is the final stage of the integration is calculated. An image input device for an integrating area sensor that scans an image and scans an image signal. The illumination device illuminates a subject, and controls the light emission of the illuminating device at a cycle of an integral multiple of the scanning cycle of the integrating area sensor. Synchronous control means for taking in an image signal from the integrating area sensor in synchronization with the scanning, and moving the integrating area sensor and the subject relatively in the integrating direction by a pixel width corresponding to an integral multiple of the scanning cycle of the integrating area sensor. An image input device for an integrating area sensor, comprising:

[0020]

BEST MODE FOR CARRYING OUT THE INVENTION

(1) Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. The image input method of the integration type area sensor according to the present invention includes a method of arranging a plurality of pixels in the vertical and horizontal directions, integrating the charges photoelectrically converted by these pixels in the vertical direction, and forming the final stage of the integration in the horizontal direction. In the image input method of the integrating type area sensor which scans each pixel of the pixel and captures an image signal, the number of pixel stages in the integrating direction of the integrating type area sensor is divided by an integer, and the electric charge is vertically extended by a pixel width corresponding to the divided value. The object is illuminated at a cycle corresponding to the integration in the direction.

In this case, the positional relationship between the integrating area sensor and the subject moves relatively in synchronization with the illumination timing of the subject. FIG. 1 is a configuration diagram of an image input device of an integrating area sensor to which the image input method is applied.
The same parts as those in FIG. 7 are denoted by the same reference numerals, and detailed description thereof will be omitted.

An illumination device 10 for emitting strobe light is arranged above the subject 2, and the strobe light emitted from the illumination device 10 is condensed on the subject 2 by the condenser optical system 4. ing.

The integration type area sensor 6 is driven by a sensor drive circuit 11 so that each pixel in the horizontal direction, which is the last stage, is scanned and an image signal is captured.

A synchronization control device 12 is connected to the illumination device 10 and the sensor drive circuit 11. The synchronization control device 12 intermittently controls the strobe light emission of the illuminating device 10 in synchronization with the integration of the charge by the pixel width corresponding to a value obtained by dividing the number of pixel stages in the integration direction of the integration type area sensor 6 by an integer, In addition, it has a function of sending a scan interval signal to the sensor drive circuit 13 for taking in an image signal from the integrating area sensor 6 in synchronization with the timing of the strobe light emission.

On the other hand, the moving table 1 on which the subject 2 is placed
Are moved in the illustrated table moving direction by the driving of the table driving device 13. That is, the table driving device 11 synchronizes with the strobe light emission of the illumination device 10, that is, in synchronization with the accumulation of the charges by the pixel width corresponding to the value obtained by dividing the number of pixel stages in the integrating direction of the integrating type area sensor 6 by an integer. And has a function as a moving mechanism for relatively moving the integrating area sensor 6 and the subject 2 in the integrating direction (table moving direction).

Next, the operation of the above-configured device will be described. The synchronization control device 12 intermittently controls the flash emission of the illumination device 10 in synchronization with the movement of a pixel width corresponding to a division value of the number of pixel stages in the integration direction of the integration type area sensor 6 by an integer. Scan interval signal for taking in an image signal from the integrating type area sensor 6 in synchronization with the timing of the sensor driving circuit 1
Send to 3.

At the same time, the moving table 1 on which the subject 2 is placed is moved in the illustrated table moving direction in synchronization with the flash emission timing by the driving of the table driving device 11.

If the actual operation specification sequence is shown, for example, the number of pixel stages in the integrating direction of the integrating type area sensor 6 is 96.
When the integer for dividing the number of steps and the number of pixel steps is “10”, the interval of the strobe light emission of the lighting device 10 is 960 μsen.
Becomes

The scanning interval of the integrating area sensor 6 is 100 μsen, and the oscillation frequency of the strobe light is 1042H.
z, the averaging number at the time of image capture is 10 times. FIG.
Indicates the positional relationship between the number of sensor scans when the strobe light is emitted and the image of the subject 2 on the sensor surface under such image input conditions.

Under such conditions, the synchronous control device 1
2 is the number of pixel stages 96 in the integration direction of the integration type area sensor 6.
The lighting device 10 is intermittently controlled to emit strobe light with a cycle of 960 μsen divided by the integer 10 of the stage.

At the same time, the synchronous control device 12 sends a scan interval signal to the sensor drive circuit 13 for taking in an image signal from the integrating area sensor 6 in synchronization with the strobe light emission control of the lighting device 10.

On the other hand, the moving table 1 is moved in the illustrated table moving direction in synchronization with strobe light emission by driving of the table driving device 11. Therefore, as shown in FIG.
At the first strobe light emission, the relative position of the upper end of the integrating area sensor 6 with respect to the image of the subject 2 is “0”. The relative position is “9.6p” corresponding to a width of 9.6 pixels.

Further, at the third flash emission, the relative position of the upper end of the integrating type area sensor 6 with respect to the image of the subject 2 is "19.2p" corresponding to the width of 19.2 pixels, and at the eleventh flash emission. The relative position of the upper end of the integrating area sensor 6 with respect to the image of the subject 2 is "96p" corresponding to a width of 96 pixels.

In order to obtain an image signal of the entire image of the subject 2 in this manner, the integrating area sensor 6 moves the subject 2 by 9.6 pixels each time the strobe light is emitted.
Obtained at the eleventh flash emission. Note that the entire image of the subject 2 is obtained by averaging 10 image captures.

Further, the image of the subject 2 can be input under the condition that the light quantity is a multiple of the total number of stages / (flash emission interval / scan interval) (1).

As described above, in the first embodiment, while the electric charge moves by the number of stages in the vertical direction on the integrating area sensor 6, the number of integrating stages of the integrating area sensor 6 is divided by an integer. Since the strobe light is emitted at the strobe emission interval corresponding to the value, the image signal output from the integrating area sensor 6 can always be output under the condition that the strobe light is irradiated an integral number of times, and the image signal is integrated every time the strobe light is emitted. The position of the charged electric charge and the position of the image of the subject 2 formed on the sensor surface for each light emission can be relatively matched.

As a result, it is possible to obtain an image of the subject 2 integrated from the integrating area sensor 6 for each flash emission. In the first embodiment, a laser device 14 is provided as shown in FIG. 3 instead of the illumination device 10, and the pulse laser output from the laser device 14 is used as a mirror 1
The light may be condensed on the object 2 from the object 5 via the condensing optical system 4.

Also in this case, while the electric charges move in the vertical direction by the number of stages of integration on the integrating type area sensor 6, the number of integrating stages of the integrating type area sensor 6 is divided by an integer and the pulse laser is emitted at intervals corresponding to the values. Output.

If the actual operation specification sequence is shown, for example, the number of pixel stages in the integration direction of the integration type area sensor 6 is 96.
When the integer for dividing the number of pixels and the number of pixel stages is set to 10, the interval of the strobe light emission of the illumination device 10 is 288 μsen, and the scanning interval of the integrating area sensor 6 is 30 μsen.
The oscillation frequency of the strobe light is 3472 Hz, and the averaging number at the time of capturing an image is 10.

With this configuration, similarly to the first embodiment, the image signal output from the integrating area sensor 6 can always be output under the condition that the pulse laser is irradiated an integer number of times. The position of the electric charge integrated for each pulsed laser output can be relatively matched with the position of the image of the subject 2 formed on the sensor surface for each pulsed laser output. Problems can also be reduced by averaging, for example, 10 image captures. (2) Hereinafter, a second embodiment of the present invention will be described with reference to the drawings.

According to the image input method of the integrating type area sensor of the present invention, a plurality of pixels are arrayed in the vertical and horizontal directions, the electric charges photoelectrically converted by these pixels are integrated in the vertical direction, respectively. In the image input method of the integration type area sensor which scans each pixel in the horizontal direction and captures an image signal, the cycle of illuminating the subject is changed by an amount corresponding to a pixel width equivalent to an integral multiple of the scanning cycle of the integration type area sensor. The interval corresponds to the vertical movement.

Also in this case, the positional relationship between the integrating area sensor and the subject relatively moves in synchronization with the illumination timing for the subject. FIG. 4 is a configuration diagram of an image input device of an integrating area sensor to which the image input method is applied. The same parts as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.

The synchronization control device 20 intermittently controls strobe light emission of the illuminating device 10 with a cycle of an integral multiple of the scan cycle of the accumulation type area sensor 6 in the horizontal direction, and synchronizes with the timing of the strobe light emission. It has a function of sending a scan interval signal for taking in an image signal from the area sensor 6 to the sensor drive circuit 11.

The table driving device 21 synchronizes the strobe light emission of the illumination device 10, that is, relatively moves the integrating type area sensor 6 and the subject 2 by a pixel width corresponding to an integral multiple of the scanning cycle of the integrating type area sensor 6 in the horizontal direction. It has a function as a moving mechanism that moves in the direction of integration in an integrated manner.

Next, the operation of the device configured as described above will be described. The synchronization control device 20 intermittently controls the strobe light emission of the illumination device 10 with a cycle of an integral multiple of the scan cycle of the integrating area sensor 6 in the horizontal direction, and synchronizes with the timing of the strobe light to synchronize with the integrating area sensor 6. A scan interval signal for taking in an image signal from is sent to the sensor drive circuit 11.

At the same time, the moving table 1 on which the subject 2 is placed moves in the illustrated table moving direction in synchronization with the flash emission by the driving of the table driving device 21. When the actual operation specification sequence is shown, for example, when the light emission interval of the strobe light is set to 24 times the scan cycle, the number of sensor scans at the time of the strobe light emission as shown in FIG. It becomes a positional relationship.

In this case, the number of pixels in the integrating direction of the integrating area sensor 6 is 96, the scanning interval of the integrating area sensor 6 is 200 μsen, the strobe light emission interval of the illumination device 10 is 4800 μsen, and the oscillation frequency of the strobe light is 208.
Hz, the number of averaging at the time of image capture is four.

Note that setting the light emission interval of the strobe light to 24 times the scan period is equivalent to moving the 96 pixel stages of the integrating area sensor 6 by a pixel width corresponding to a value obtained by dividing by an integer "4". It is.

Under such conditions, the synchronization control device 1
Reference numeral 2 controls strobe light emission of the illumination device 10 at a cycle that is 24 times the scan cycle of the integrating area sensor 6. At the same time, the synchronization control device 12 sends a scan interval signal for taking in an image signal from the integrating type area sensor 6 in synchronization with the strobe light emission control of the illumination device 10 and the sensor drive circuit 13.
Send to

On the other hand, the moving table 1 is moved in the illustrated table moving direction in synchronization with the flash emission by the driving of the table driving device 11. Therefore, as shown in FIG.
At the first strobe light emission, the relative position of the upper end of the integrating area sensor 6 with respect to the image of the subject 2 is “0”. The relative position is “24p” corresponding to a width of 24 pixels.

Further, at the third flash emission, the relative position of the upper end of the integration type area sensor 6 with respect to the image of the subject 2 is "48p" corresponding to a width of 48 pixels. The relative position of the upper end of the integration type area sensor 6 to the image is “72p” corresponding to a width of 72 pixels.

In order to obtain an image signal of the entire image of the subject 2 in this manner, the integrating area sensor 6 moves the subject 2 by a width of 24 pixels each time the strobe light is emitted. Can be Note that the entire image of the subject 2 is obtained by averaging four image captures.

The image of the subject 2 can be input under the condition that the amount of light is a multiple of the number of integration stages / (flash emission interval / scan interval) as in the above equation (1).

As described above, in the second embodiment, the integration type area sensor 6 has a pixel width corresponding to an integral multiple of the scanning cycle of the integration type area sensor 6 in the horizontal direction.
And the subject 2 are relatively moved in the integration direction and the strobe light is emitted in synchronization with this movement. Therefore, similarly to the first embodiment, the electric charge accumulated each time the strobe light is emitted is calculated. The position and the position of the image of the subject 2 formed on the sensor surface each time the light emission is performed can be relatively matched.
Image can be obtained.

In the second embodiment, a laser device 14 is provided in place of the illumination device 10 as shown in FIG. The light may be focused on the subject 2 via the system 4.

Also in this case, the integrating area sensor 6 and the subject 2 are relatively moved in the integrating direction by a pixel width corresponding to an integral multiple of the scanning period of the integrating area sensor 6 in the horizontal direction, and synchronized with this movement. To output a pulse laser.

The actual operation specification sequence is as follows. For example, if the strobe light emission interval is set to 24 times the scan period, the number of pixel stages in the integrating direction of the integrating type area sensor 6 becomes 9
6 steps, scan interval of integrating area sensor 6 is 30μse
n, the strobe emission interval of the lighting device 10 is 240 μsen,
The oscillation frequency of the strobe light is 4167 Hz, and the averaging number at the time of capturing an image is 12 times.

Even in this configuration, similarly to the second embodiment, the position of the electric charge integrated for each pulse laser output and the object imaged on the sensor surface for each pulse laser output The positions of the two images can be relatively matched, and the problem of speckle caused by using a laser can be reduced by averaging, for example, 10 image captures.

The present invention is not limited to the first and second embodiments, but may be modified as follows. For example, in the first embodiment, when moving the pixel width corresponding to a value obtained by dividing the number of pixel stages in the integrating direction of the integrating type area sensor 6 by an integer, the integer is “1”.
It goes without saying that the value is not limited to “0” and may be another integer.

Similarly, in the first embodiment, the integration type area sensor 6 and the subject 2 are relatively moved in the integration direction by a pixel width corresponding to an integral multiple of the scan period of the integration type area sensor 6. When moving, it goes without saying that the number is not limited to 24 and may be an arbitrary integer.

In the first and second embodiments,
The moving table 1 on which the subject 2 is placed is moving,
Not limited to this, the lighting device 10 and the integrating type area sensor 6,
Further, the condensing optical system 4 and the imaging optical system 5 may be integrally moved.

[0062]

As described above in detail, according to the present invention, it is possible to provide a margin for limiting the resolution of an image and the image input speed, which are limited by the amount of illumination, and to reduce uneven illumination. Image input method and device thereof can be provided.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a first embodiment of an image input device of an integrating area sensor according to the present invention.

FIG. 2 is a diagram showing the positional relationship between the number of sensor scans and emission of a subject image on a sensor surface when strobe light is emitted.

FIG. 3 is a configuration diagram showing a modification of the first embodiment.

FIG. 4 is a configuration diagram showing a second embodiment of the image input device of the integrating area sensor according to the present invention.

FIG. 5 is a diagram showing the positional relationship between the number of sensor scans and emission of a subject image on a sensor surface when strobe light is emitted.

FIG. 6 is a configuration diagram showing a modification of the second embodiment.

FIG. 7 is a configuration diagram of a conventional image input device of an integrating area sensor.

FIG. 8 is a diagram illustrating a pixel configuration of an integrating area sensor.

FIG. 9 is a diagram illustrating a positional relationship between the number of scans of an integrating area sensor and a subject image on a sensor surface.

FIG. 10 is a diagram showing a positional relationship between the number of scans of an integrating area sensor and a subject image on a sensor surface.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Moving table, 2 ... Subject, 6 ... Integration type area sensor, 10 ... Illumination device, 11, 21 ... Sensor drive circuit, 12, 20 ... Synchronous control device, 13 ... Table drive device.

Claims (5)

[Claims] An image is obtained by arranging a plurality of pixels in the vertical and horizontal directions, accumulating each of the charges photoelectrically converted by these pixels in the vertical direction, and scanning each pixel in the horizontal direction which is the final stage of the integration. In the image input method of the integration type area sensor for capturing a signal, the number of pixels in the integration direction of the integration type area sensor is divided by an integer, and charges are integrated in the vertical direction by a pixel width corresponding to the division value. Illuminating the subject with a cycle corresponding to (a). 2. A cycle for illuminating the subject is an interval corresponding to the vertical movement of the charge by a pixel width corresponding to an integral multiple of a scan cycle of the integrating area sensor. The image input method of the integrating area sensor according to claim 1. 3. The relative position of the integrating area sensor and the subject is relatively shifted in synchronization with the illumination timing of the subject.
The image input method of the integrating type area sensor described in the above. 4. A plurality of pixels are arranged in the vertical and horizontal directions, the electric charges converted by these pixels are integrated in the vertical direction, and each pixel in the horizontal direction which is the final stage of the integration is scanned to form an image. In an image input device of an integrating area sensor that captures a signal, an illumination device that illuminates a subject, and the charge is integrated by a pixel width corresponding to a division value of the number of pixel stages in the integrating direction of the integrating area sensor by an integer. Synchronous control means for controlling the light emission of the lighting device in synchronization with the light emission control, and capturing an image signal from the integrating area sensor in synchronization with the light emitting control; and the number of pixel stages in the integrating direction of the integrating area sensor. And a moving mechanism that relatively moves the integrating area sensor and the subject in the integrating direction by a pixel width corresponding to a value obtained by dividing the integral area sensor by an integer. Image input device of arithmetic area sensor. 5. Arranging a plurality of pixels in the vertical and horizontal directions, accumulating each of the charges photoelectrically converted by these pixels in the vertical direction, and scanning each pixel in the horizontal direction, which is the final stage of the integration, to form an image. In an image input device of an integrating area sensor that captures a signal, a lighting device that illuminates a subject, and a lighting control of the lighting device with a cycle of an integral multiple of a scan cycle of the integrating area sensor, and synchronizing with the lighting control. Synchronous control means for taking in an image signal from the integrating area sensor, and the integrating area sensor and the subject are relatively moved in the integrating direction by a pixel width corresponding to an integral multiple of a scan period of the integrating area sensor. An image input device for an integrating area sensor, comprising: a moving mechanism that moves.