JPH10170372A - Pressure gauge - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pressure gauge by using a linear position detecting device having a small size and a simple structure. SOLUTION: A pressure gauge is provided with a detecting part 300 containing a diaphragm 302 which is displaced upon receiving a pressure to detected, a rod-like mobile section attached to the diaphragm 302, a winding part 10, and a magnetic responding member 22 which is linearly displaced relatively to the winding part 10 so that either the winding part 10 or responding member 22 can be displaced linearly in an interlocking way with the mobile part 20. When the pressure applied to the diaphragm 302, the diaphragm 302 is linearly displaced in a direction nearly perpendicular to the surface of the diaphragm 302 and the mobile part 20 is also linearly displaced in accordance with the linear displacement of the diaphragm 302. When the mobile part 20 is displaced, the winding part 10 outputs the output signal corresponding to the linear position of the mobile part 20 and output signal can be utilized as a pressure detecting signal.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressure gauge, and more particularly to an inductive type in which an output AC signal showing an amplitude function characteristic of a plurality of phases is induced and output in accordance with a linear position to be detected based on excitation by a single-phase AC signal. The present invention relates to a device using a linear position detecting device.

[0002]

2. Description of the Related Art There is a differential transformer as a conventionally known inductive linear position detecting device. The differential transformer excites one primary winding in one phase, and performs differential operation in accordance with a linear position of an iron core interlocking with a detection target position at each arrangement position of two differentially connected secondary windings. This causes reluctance to change gradually, and the voltage amplitude level of the resulting one-phase inductive output AC signal indicates the linear position of the iron core. In this differential transformer, only in a range where two secondary windings provided so that an induced voltage changes differentially are provided, only in a range where the induced voltage value shows linearity with respect to a paired linear position. The linear position cannot be detected, and the function of the change of the induced voltage value versus the linear position does not change over one cycle of a periodic function (for example, a trigonometric function such as a sine function). Therefore, the only way to extend the detectable range is to increase the winding length and the core length. There is a natural limit and the size of the device is increased. Further, it is impossible to obtain an output indicating an electrical phase correlated with the position of the detection target straight line.
Further, the voltage amplitude level of the inductive output signal is easily affected not only by the linear position of the iron core but also by the surrounding environment such as a temperature change, so that there is a difficulty in accuracy.

On the other hand, there is also known a phase shift type inductive linear position detecting device which outputs an AC signal having an electric phase angle correlated with a linear position to be detected. For example, Japanese Patent Application Laid-Open Nos.
No. -106065, Japanese Patent Application Laid-Open No. 55-13891 and Japanese Utility Model Publication No. 1-25286. In this type of conventionally known phase-type inductive linear position detecting device, for example, two primary windings which are arranged to be shifted from each other with respect to the direction of linear displacement of a movable iron core linked to a position to be detected are electrically connected to each other. Excitation is performed by two-phase alternating-current signals (for example, sin ωt and cos ωt), each of which is shifted in phase.
One secondary output signal is generated by synthesizing the secondary-side induction signal from the secondary winding. The electrical phase shift in the secondary output signal with respect to the excitation AC signal indicates the linear position of the iron core linked to the position to be detected.
Further, in the structure disclosed in Japanese Utility Model Publication No. 1-25862, a plurality of iron cores are intermittently repeated at a predetermined pitch to detect a linear position over a wider range than a range in which primary and secondary windings are provided. Is possible.

[0004]

The above-described conventional phase-shift-type inductive linear position detecting device has many advantages over the differential transformer, but at least two advantages are obtained.
Since phase AC signals (for example, sin ωt and cos ωt) must be prepared, there is a problem that the configuration of the excitation circuit is complicated. Another problem is that if the impedances of the primary and secondary windings change due to a temperature change or the like, an error occurs in the electrical phase shift in the secondary output signal. Further, in a case where a plurality of iron cores are intermittently repeated at a predetermined pitch to enable linear position detection over a wider range than the range in which the primary and secondary windings are provided, the primary and secondary windings are provided. Is set to the range of the movable core 1
Since it must be provided in a range longer than the pitch length,
The size of the entire winding assembly has been increased, and there has been a limit to miniaturization of the detection device. That is, assuming that the length of one pitch of the iron core is P, in the case of the four-phase type, the arrangement interval of each phase winding must be at least “3P / 4”. × (3P / 4) = 3P ”
Therefore, the winding assembly must be provided over a range of at least three pitches of the movable core.

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and has a small and simple structure, and is capable of detecting a linear position over a wide range as well as having a high resolution even in a minute range. It is an object of the present invention to provide a mold linear position detecting device, and to provide a pressure gauge using such an inductive linear position detecting device.

[0006]

A pressure gauge according to the present invention comprises:
A diaphragm that is displaced by receiving a pressure to be detected, a movable portion attached to the diaphragm, a winding portion and a magnetic response member that is linearly displaced relatively to the winding portion, A detection unit arranged so that one of the magnetic response members is linearly displaced in conjunction with the movable unit, and an output signal for detecting the displacement in response to the pressure is obtained from the winding unit. It is characterized by the following.

An inductive linear position detecting device which can be used in the above pressure gauge comprises a primary winding excited by a one-phase AC signal and a plurality of secondary windings arranged at different positions with respect to the direction of linear displacement. And a magnetic response member having a predetermined magnetic response characteristic is displaced relative to the winding portion in conjunction with a linear position to be detected, and the magnetic response member is moved in the linear displacement direction. And a magnetic coupling between the primary winding and each secondary winding by changing a corresponding position of the member with respect to the winding portion according to the relative displacement. Is changed according to the linear position to be detected, whereby the inductive output AC signal amplitude-modulated according to the linear position to be detected is
Variable magnetic coupling means for inducing in each of the secondary windings with different amplitude function characteristics according to the displacement of the arrangement of each of the secondary windings, wherein each of the induction output AC signals induced in each of the secondary windings is provided. Are characterized in that their electric phases are in phase, and their amplitude functions change periodically with the repetition pitch of the magnetic response member as one cycle. Such a periodic signal is advantageous because it is suitable for an arithmetic process for calculating detection data, as will be described later. According to the above configuration, the configuration is such that the excitation is performed by a one-phase AC signal, so that the configuration of the excitation circuit is simple.
It has the advantage that. Also, in the variable magnetic coupling means, a plurality of magnetic response members having predetermined magnetic response characteristics are repeatedly provided at a predetermined pitch along the direction of linear displacement, so that an induced output AC signal induced in the secondary winding is provided. ,
A signal that changes periodically with the repetition pitch of the magnetic response member as one cycle can be obtained, and the detectable range can be expanded. Further, since the absolute position within one pitch can be detected with high resolution, it is possible to detect minute displacement with high accuracy.

In one embodiment of the linear position detecting device, four secondary windings are provided, and the amplitude function of each induced output AC signal is represented by a sine function, a cosine function, an inverse sine function, and an inverse sine function. Respectively, and outputs a first output AC signal having an amplitude function of a sine function by synthesizing induced output AC signals of a sine function and an inverse sine function, and outputting a first output AC signal of a cosine function and an inverse cosine function. A second signal having a cosine function amplitude function
Output AC signal. According to the above configuration, two output AC signals (sine output and cosine output) can be obtained in the linear position detecting device in the same manner as obtained in a conventionally known resolver which is a rotary position detecting device. Therefore, in such a linear position detecting device according to the present invention, the first output AC signal and the second output AC signal are input, and the phase of the sine function and the cosine function corresponding to the amplitude values of both signals are input. A phase detection circuit for detecting a value may be further provided. As such a phase detection circuit, an RD (resolver-digital) converter conventionally known as a resolver phase detection circuit can be used, or a phase detection circuit of another system can be used. The fact that such a resolver type phase detection circuit can be used is that the impedance of the primary and secondary windings is changed due to temperature changes and the like, as in the conventional phase shift type inductive linear position detection device. This is advantageous because it can eliminate the drawback that an error occurs in the electrical phase shift in the secondary output signal due to the change.

In one embodiment of the above linear position detecting device, the plurality of secondary windings are connected to one of the magnetic response members.
They can be arranged at predetermined intervals within the range of the pitch. Further, it is preferable that the winding directions of the primary winding and the secondary winding substantially coincide with the direction of the linear displacement, and the variable magnetic coupling means is inserted into the winding. Further, it is preferable that the plurality of primary windings excited by the AC signal having the same phase are separately arranged at an intermediate position between the secondary windings. Such a winding arrangement sufficiently contributes to downsizing the configuration of the entire detection device and securing sufficient detection accuracy. That is, by arranging the plurality of secondary windings at predetermined intervals within the range of one pitch of the magnetically responsive member, the size of the entire winding portion is substantially reduced to the range of one pitch of the magnetically responsive member. It can be accommodated in a correspondingly small size, which helps to reduce the overall configuration of the detection device.
Further, the plurality of primary windings excited by the AC signal having the same phase are arranged separately at an intermediate position between the secondary windings. Can be effectively applied to the individual secondary windings, and the effect of the magnetic response member on the magnetic field can be effectively applied, which helps to ensure sufficient detection accuracy.

[0010] In addition, a light member such as a wire or a piano wire is used as a movable portion that is interlocked with the diaphragm,
By providing the magnetic response member made of a lightweight metal piece on the side of the movable portion, the load on the diaphragm can be reduced, and an unnecessary load can be prevented. It is extremely advantageous to use a metal piece such as a spring pin as the magnetic response member, since the work for crimping work becomes easy and the cost is low. In addition, a substantially circular or elliptical metal piece may be used as the metal piece. An ideal one in which a change in magnetic coupling coefficient according to a linear position is approximated to a trigonometric function by a substantially circular or elliptical shape. This is advantageous because Of course, not limited to this,
The magnetic response member may be formed using a surface processing technique such as plating, etching, baking, or laser processing.

In one embodiment of the above-described linear position detecting device, the variable magnetic coupling means includes a cylindrical portion made of a non-magnetic responsive object and a magnetic member of a predetermined size alternately and repeatedly disposed inside the cylindrical portion. A responsive object and a non-magnetic responsive object, wherein one or more magnetic responsive objects of a predetermined size are continuously arranged, and then the non-magnetic responsive object of a predetermined size is 1 to A plurality of the magnetically responsive members are continuously arranged, and the magnetically responsive member is constituted by one or a plurality of the continuously magnetically responsive objects. The length of the predetermined pitch can be changed.
Also in this case, the configuration of the variable magnetic coupling means is simple, the manufacturing is easy, the manufacturing cost can be reduced, and the magnetically responsive object and the non-magnetically responsive object of a predetermined size are each one. Or by continuously arranging a plurality of magnetic response members, the length of one predetermined pitch of the repetitive arrangement of the magnetic response members can be changed arbitrarily.
Materials can be shared.

[0012]

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1A is a cross-sectional view showing one embodiment of the pressure gauge according to the present invention. The pressure gauge 301 includes a diaphragm 302 which is displaced by receiving a pressure to be detected, a rod-shaped movable portion 20 attached to the diaphragm 302, the winding portion 10, and the winding portion 10. Magnetic response member 2 that moves linearly
2, and a detecting unit 300 in which one of the winding unit 10 and the magnetic responsive member 22 is linearly displaced in conjunction with the movable unit 20 to detect the displacement responsive to the pressure. An output signal is obtained from the winding section 10. Accordingly, the diaphragm 302 is linearly displaced in a direction substantially perpendicular to the surface in response to the pressure applied to the diaphragm 302, and the movable portion 20 is linearly displaced in accordance with the linear displacement, and corresponds to the linear position of the movable portion 20. An output signal is output from the winding unit 10, and the output signal can be used as a pressure detection signal. FIG.
(B) shows a modified example of the pressure gauge of (a), in which the length of the rod-shaped movable part 20 is increased to cope with the case where the distance between the diaphragm 302 receiving pressure and the detection unit 300 is long. An example is shown below. This is because the temperature of the portion of the diaphragm 302 under pressure is high,
This is advantageous in a case where there is no space for disposing.

As the detecting section 300, an inductive linear position detecting device as shown in FIG. 2 and thereafter can be used. When an inductive linear position detecting device as shown in FIG. 2 is used as the detecting section 300 for the pressure gauge, one pitch p of the array of the magnetic response members 22 is shortened to obtain a precise detection resolution. In this case, it is preferable that a very small displacement can be detected. Further, as will be described later, a light-weight member such as a wire or a piano wire is used as the movable part 20 linked to the diaphragm 302, and the magnetic response member 22 made of a light metal piece is placed on the side of the movable part 20. , The load on the diaphragm 302 can be reduced, and no extra load can be applied.

Next, referring to FIG.
An embodiment of a linear position detecting device applicable as 00 will be described. The detecting unit 300 is not limited to a linear position detecting device as described below, but may be an appropriately modified design, a differential transformer type linear sensor, or a conventional technology of two-phase AC excitation and one-phase output. Other appropriate linear sensors, such as the phase shift type linear sensor described in the above section, can also be used. However, when using the one based on the new linear position detection device described below,
This is advantageous in various points such as simplification of the configuration, improvement in accuracy, and cost reduction.

The linear position detecting device shown in FIG. 2, ie, the detecting section 300, includes the winding section 10 and the movable section 20 functioning as a variable magnetic coupling section. The movable portion 20 functioning as a variable magnetic coupling portion is connected to the diaphragm 302, and can be displaced linearly and reciprocally in conjunction with the displacement of the diaphragm 302. Is appropriately fixed. Thus, the movable section 20 functioning as the variable magnetic coupling section is displaced linearly relative to the winding section 10 in conjunction with the linear position of the diaphragm 302 to be detected. Of course, conversely, the winding portion 10 may be displaced in conjunction with the diaphragm 302 to be detected, and the variable magnetic coupling portion, that is, the magnetic response member 22 described later may be fixed. In short, the detection unit 300 detects a relatively linear position of the variable magnetic coupling unit, that is, the magnetic response member 22 with respect to the winding unit 10. The direction of this relative linear displacement is indicated by the arrow with the symbol X in the figure.

The winding section 10 includes primary windings PW1 to PW5 which are excited by a one-phase AC signal and a plurality of secondary windings SW1 to SW arranged at different positions in the linear displacement direction X.
W4. In order to clarify these primary and secondary winding configurations, the winding portion 10 is shown including a cross section in FIG. 2, but in fact, as shown by a dotted line, the winding portion 10 has a rod shape. An appropriate gap is provided around the movable portion 20 so that the wound coil is wound. Since it is commonly excited by a one-phase AC signal, the primary winding P
The number of W1 to PW5 may be one or an appropriate number, and the arrangement may be appropriate. However, a plurality of primary windings P
By arranging W1 to PW5 appropriately so as to sandwich each of the secondary windings SW1 to SW4 as shown in FIG. 2, for example, the magnetic field generated by the primary winding is individually This is preferable because the magnetic field can be effectively exerted on the secondary windings SW1 to SW4 and the magnetic field by the magnetic response member 22 of the movable section 20 can be effectively exerted.

The linear or rod-shaped movable portion 20 is formed by moving a magnetic response member 22 having a predetermined magnetic response characteristic along a linear displacement direction at a predetermined pitch p in a rod 21 serving as a base.
And is provided by repeating a plurality of times. As already known, the magnetic responsive member 22 is made of a magnetic material such as iron or nickel, or a non-magnetic conductor such as copper or aluminum, so that the magnetic permeability, the magnetic resistance or the eddy current can be increased. Since a predetermined magnetic response characteristic such as a current loss can be provided, the magnetic response member 22 may be formed using such an appropriate material. The material of the rod 21 serving as the base may also be an appropriate material such as a magnetic material, a non-magnetic material, or a conductor. Is determined by In short, the magnetic response member 2
It suffices that the magnetic response characteristics exerted on the winding portion 10 be different between the portion where 2 exists and the portion where it does not exist. Also, the magnetic responsive member 22 may be formed on the rod 21 by any suitable method such as pasting, bonding, crimping, cutting, plating, vapor deposition, and baking. The rod 21 is not necessarily limited to a rigid body, and may be made of a flexible material such as a wire. In this example, the magnetic responsive member 22 is provided on the side of the movable unit 20 to constitute a variable magnetic coupling unit.

The corresponding position of the variable magnetic coupling portion 20 with respect to the winding portion 10 of the magnetically responsive member 22 changes according to the change of the linear position to be detected, so that the primary windings PW1 to PW1.
The magnetic coupling between the PW5 and each of the secondary windings SW1 to SW4 is changed in accordance with the position of the detection target straight line. It is induced in each of the secondary windings SW1 to SW4 with different amplitude function characteristics according to the displacement of the windings SW1 to SW4. Each of the induced output AC signals induced in each of the secondary windings SW1 to SW4 has the same electrical phase because the primary windings PW1 to PW5 are commonly excited by a single-phase AC signal. The amplitude function periodically changes with a displacement amount corresponding to one repetition pitch p of the magnetic response member 22 as one cycle.

The four secondary windings SW1 to SW4 are arranged at predetermined intervals within the range of one pitch p of the repetition pitch of the magnetic response member 22, and the induced output AC signal generated in each of the secondary windings SW1 to SW4. Are set so as to exhibit desired characteristics. For example, when configured as a resolver type position detection device, the amplitude function of the induced output AC signal generated in each of the secondary windings SW1 to SW4 is a sine function, a cosine function, a minus sine function, and a minus cosine function. Set to correspond to each. For example, as shown in FIG. 2, the range of one pitch p is divided into four,
It is arranged at each divided position shifted by / 4. Thus, the amplitude function of the induced output AC signal generated in each of the secondary windings SW1 to SW4 can be set so as to correspond to a sine function, a cosine function, a minus sine function, and a minus cosine function, respectively. Of course, depending on various conditions, the arrangement of each winding can be slightly changed. Therefore, the arrangement of each winding is appropriately adjusted so as to obtain a desired function characteristic, or the secondary output level is adjusted by electrical amplification.
A desired amplitude function characteristic is finally obtained.

For example, assuming that the output of the secondary winding SW1 corresponds to a sine function (s is added in the figure), the output of the secondary winding SW3 arranged at a position shifted by p / 2 is minus. A first output AC signal having an amplitude function of the sine function is obtained by differentially combining the outputs of the two, corresponding to the sine function (/ s (s bar) is added in the figure). The output of the secondary winding SW2, which is arranged at a position p / 4 shifted from the secondary winding SW1 corresponding to the sine function output, corresponds to a cosine function (c is added in the figure). The output of the secondary winding SW4, which is displaced by two, corresponds to a minus cosine function (/ c (c bar) is added in the figure), and the cosine is obtained by differentially combining these two outputs. A second output AC signal having an amplitude function of the function is obtained. . In the specification, for convenience of notation, a bar symbol indicating inversion is described as “/ (slash)”, which corresponds to the bar symbol in the figure.

FIG. 3 is a circuit diagram of the winding section 10. A common exciting AC signal (indicated by sinωt for convenience of explanation) is applied to the primary windings PW1 to PW5. This primary winding PW1
In response to the excitation of .about.PW5, an AC signal having an amplitude value corresponding to the position of the variable magnetic coupling portion 20 corresponding to the winding portion 10 of the magnetic response member 22 is guided to each of the secondary windings SW1 to SW4. Each of the induced voltage levels shows a two-phase function characteristic sin θ and cos θ and a negative-phase function characteristic −sin θ and −cos θ corresponding to the detection target linear position x. That is, each secondary winding SW
The induced output signals of 1 to SW4 are output in a state of being amplitude-modulated by the two-phase function characteristics sin θ and cos θ and the opposite-phase function characteristics −sin θ and −cos θ corresponding to the detection target linear position x. Note that θ is proportional to x, for example, θ = 2π
(X / p). For convenience of explanation, coefficients according to other conditions such as the number of turns of the winding are omitted, and the secondary winding S
With W1 as the sine phase, the output signal is expressed as “sinθ · sinω
t ", and the output signal thereof is represented by" cos θ · sin ωt "with the secondary winding SW2 as the cosine phase. The output signal of the secondary winding SW3 is set to minus sinusoidal phase, and the output signal of the secondary winding SW4 is set to minus sinusoidal phase.
t ". By differentially combining the induced outputs of the sine phase and the minus sine phase, a first output AC signal (2 sin θ · sin ωt) having a sine function amplitude function is obtained. A second output AC signal (2 cos θ · sin ωt) having an amplitude function of a cosine function is obtained by differentially combining the induced outputs of the cosine phase and the negative cosine phase. For simplicity of expression, the coefficient “2” is omitted, and the first output AC signal is hereinafter referred to as “sinθ · sin
ωt ”and the second output AC signal is expressed as“ cos θ · sin ω
t ".

Thus, the first output AC signal A = sinθ · sinωt having the first function value sinθ corresponding to the detection target linear position x as the amplitude value, and the second function corresponding to the same detection target linear position x A second output AC signal B = cos θ · sin ωt having the value cos θ as an amplitude value is output. According to such a winding configuration, two output AC signals having a two-phase amplitude function (a sine output) similar to those obtained in a conventionally known resolver that is a rotary position detection device are obtained. And cosine output) can be obtained in the linear position detecting device. Therefore, the two-phase output AC signals (A = sin θ · sin ωt and B = cos θ · sin ωt) obtained in the linear position detecting device of the present invention can be used in the same manner as the output of a conventionally known resolver. Also, as described above, the four secondary windings SW1 to SW1
The configuration in which the SW4s are arranged at predetermined intervals within a range of one pitch p of the repetition pitch of the magnetic response member 22 has a relatively small size that substantially corresponds to the range of one pitch of the magnetic response member 22. Since it can be accommodated in size, it is useful to reduce the size of the entire linear position detecting device.

As one embodiment of the variable magnetic coupling unit 20,
A flexible wire or piano wire or the like is used as the rod 21 as a base, a predetermined metal piece is used as the magnetic response member 22, and a magnetic response member 22 is formed around the rod 21 made of the wire or piano wire or the like. It is preferable to form the magnetic responsive member 22 repeatedly arranged at the predetermined pitch by repeatedly arranging the metal pieces as a plurality at a predetermined pitch and caulking each metal piece. Such a configuration of the variable magnetic coupling unit 20 simply prepares a wire or piano wire of a desired length and a desired number of metal pieces, and connects the metal pieces at a desired pitch to the wire or piano wire. Since it can be manufactured only by crimping, the structure is extremely simple, the manufacturing is extremely easy, and the manufacturing cost can be extremely low, which is quite significant. Moreover, the diameter of the variable magnetic coupling part 20, that is, the diameter of the movable core part is equal to the diameter of the wire wire or the piano wire (rod 21).
Is small enough to add the thickness of
Since the diameter of each winding of the winding part 10 can also be considerably reduced, it is possible to provide a linear position detecting device that is considerably reduced in size as a whole. Also, the rod 2 which is the core
1 is composed of a wire or a piano wire, so it is strong but lightweight and highly flexible, and is advantageous in all respects of strength, weight and flexibility. This is advantageous in constructing a possible linear position detecting device, and is also inexpensive. The wire used as the rod 21 may be an existing stainless steel multi-core stranded wire.

Further, in that case, an existing spring pin may be used as the metal piece as the magnetic response member 22, and when such a spring pin is used, the work for crimping becomes extremely easy, and This is extremely advantageous because it is reliable and inexpensive. When a rectangular metal piece is used in the unfolded state as the metal piece for forming the magnetic response member 22, when the metal piece is crimped around the rod 21 (wire wire), the metal piece shown in FIG.
As shown in FIG. 5, the magnetic response member 22 has a substantially cylindrical shape.
However, the present invention is not limited to this. A substantially circular or elliptical metal piece 22 ′ may be used in the unfolded state as the metal piece for forming the magnetic response member 22. When crimping is performed, as shown in FIG. 4, the area of the magnetic response member 22 covering the periphery of the rod 21 changes continuously, and the change in the magnetic coupling coefficient according to the change in the linear position is converted into a trigonometric function. This is advantageous because it becomes easy to approximate to an ideal one. Further, as shown in FIG. 5, if one or a plurality of metal pieces 22a having a predetermined size are continuously caulked around the rod 21 (wire wire), a repetitive arrangement of the magnetic response members 22 can be achieved. Since the length of one predetermined pitch p can be changed arbitrarily, the same metal piece 22a can be used in any case when manufacturing linear position detecting devices having different specifications according to the present invention, so that materials can be shared. it can.

As a configuration having several advantages such as miniaturization, low cost, high sensitivity, flexibility, strength, and durability, the base of the rod portion 21 is made of a stainless steel multi-core stranded wire. And
It is advantageous to make the magnetically responsive member 22 with an iron spring pin. That is, since such a wire is non-magnetic, the detection sensitivity in response to the presence or absence of the magnetic responsive member 22 formed of a magnetic spring pin is higher than that in the case of using a piano wire. In addition, the multifilament stranded wire is excellent in flexibility, strength, and durability. In addition, since the existing wire and spring pin are used as materials, it can be manufactured at low cost. Further, since a wire is used as the rod 21, the diameter can be reduced, which contributes to downsizing of the entire detection device. In this case, for example, a wire having a small diameter of about 0.8 mm can be used, a spring pin of an appropriate size is caulked around the wire, and a non-magnetic and non-conductive material for surface protection is further placed thereon. Even if a coating such as a conductive resin is appropriately applied as a whole, the overall size can be as small as about 2 to 3 mm. On the other hand, the inner diameter of the winding part 10 disposed around the periphery is set to 3.
Even if the outer diameter is set to about 5 mm and the outer diameter is set to about 6 to 8 mm, it is possible to provide an ultra-miniaturized apparatus of about 10 mm in radial size of the entire detection apparatus. Of course, the detection pitch p in the linear direction can also be made as small as about 10 mm. Since the rod portion 21 using the wire as the base is suitable for winding, the winding portion 1
0 is fixed, and the rod portion 21 of the wire wire can be wound on an appropriate reel or unreeled from the reel, and can be disposed so as to be displaced in conjunction with the displacement of the detection target position. On the other hand, when the winding part 10 is disposed so as to be displaced in conjunction with the displacement of the detection target position, the wire wire of the rod part 21 may be appropriately stretched and fixed.

FIG. 6 shows another embodiment of the variable magnetic coupling section 20, in which one or a plurality of spheres 22b of a predetermined diameter made of a magnetic material are continuously arranged as a magnetic response member 22, and then a non-magnetic material is formed. One or a plurality of spheres 23 having a predetermined diameter are continuously arranged to determine a desired length of one pitch p. Such a predetermined pitch of the magnetic sphere 22b and the non-magnetic body 23 is repeated. It is formed in large numbers along the wire line 21a. In this case, a hole allowing insertion of the wire 21a is formed in the center axis of each of the spheres 22b and 23.
The variable magnetic coupling unit 20 is configured by providing the magnetic coupling 23 closely. Also in this configuration, since the length of the predetermined pitch p of the repetitive arrangement of the magnetic response members 22 can be arbitrarily changed, the same spheres 22b and 23 are always used when manufacturing linear position detecting devices having different specifications according to the present invention. The use of materials makes it possible to share materials. Further, since it is sufficient to simply insert the wire 21a into the holes of the spheres 22b and 23, the manufacture is extremely simple.

FIG. 7 shows still another embodiment of the variable magnetic coupling unit 20, in which a magnetic responsive member 22 is placed in a cylindrical portion 24 made of a non-magnetic and non-conductive, that is, non-magnetic responsive object.
One or more spheres 22b of a predetermined diameter made of a magnetic material are continuously arranged, and
3 are arranged one or more consecutively, and a desired pitch p
The length of the magnetic material ball 22b and the non-magnetic material 23 are repeatedly formed at a predetermined pitch. Also in this case, the length of the predetermined pitch p of the repetitive arrangement of the magnetic response members 22 can be arbitrarily changed. Therefore, when manufacturing a linear position detecting device having different specifications according to the present invention, the same spheres 22b and 23 are used in any case. The use of materials makes it possible to share materials. Also,
Since the balls 22b and 23 need only be put in the cylindrical portion 24, the manufacture is extremely simple.

In both cases shown in FIGS. 6 and 7, the sphere 22b as the magnetic response member 22 is not limited to a magnetic material.
It may be made of a conductor. Also, one ball 2
2b (or 23) is a magnetic material, and the other sphere 23 (or 2)
2b) may be a conductor. 6 and 7, it can be easily understood that an object having an arbitrary shape such as an elliptical sphere or a cylinder can be used instead of the spheres 22b and 23. For example, FIG. 8 shows a tapered member 25 (or 2) having a substantially rhombic cross section such as an abacus ball.
Two trapezoids are attached in opposite directions) and the length is one pitch p, and a plurality of the trapezoids are continuously arranged in a cylindrical portion 24 made of a non-magnetic responsive object, whereby the variable magnetic coupling portion 20 is formed. The example which comprised is shown. Also in this case, the cylinder 2
Without using 4, drill a hole in the center axis of the tapered member 25,
The wire (21) may be inserted. The taper member 25 is made of a magnetic material or a conductor, and corresponds to the magnetic response member 22. Of course, the inclination of the tapered member 25 is not limited to a straight line, but may be a curved line.

FIG. 9 shows another embodiment of the winding arrangement in the winding part 10. In the example of FIG. 9, four secondary windings SW
The arrangement of 1 to SW4 is the same as that shown in FIG.
Since no secondary winding is interposed, each secondary winding SW1
The coil length of SW4 is longer than the example of FIG. in this case,
The primary windings PW1 and PW2 have a larger diameter than the secondary windings SW1 to SW4, and are wound around the secondary windings SW1 to SW4. Here, two adjacent secondary windings S
One primary winding PW1 is wound around the outside corresponding to the intermediate position between W1 and SW2.
Another primary winding PW2 is wound around the outside corresponding to the intermediate position of another two adjacent secondary windings SW3 and SW4. The coil length of each of the primary windings PW1 and PW2 may be appropriate, but the two primary windings PW1
1. It is desirable that PW2 be separated without sticking. The winding arrangement in which the primary winding is separated so that a magnetic field can be applied only to a required range to the individual secondary windings is similar to the case of FIG. This is preferable because the magnetic field generated by the wire can be effectively applied to the individual secondary windings SW1 to SW4, and the magnetic field by the magnetic response member 22 of the variable magnetic coupling unit 20 can be effectively applied.

In each of the winding arrangements of FIGS. 2 and 9, if a magnetic metal for magnetic shielding is interposed at the boundary between adjacent windings, crosstalk can be improved and individual individual windings can be improved. Desired amplitude function characteristics in the induction output signal for each of the secondary windings SW1 to SW4 are improved. Of course, the configuration of the winding unit 10 is not limited to the examples shown in FIGS. 2 and 9 and other design changes are possible. Further, as shown in FIG. 10, the secondary windings SW1,
In order to improve the inductive output characteristics of SW4, the winding 1
0 at both ends of the primary winding PW
6 and PW7 may be added.

FIG. 11 (a) is a diagram showing another example of the arrangement of the winding section 10, in which the winding of each phase is connected to four poles 11, 12, 13, 1.
4 are arranged separately. Each pole 11, 12, 1
Numerals 3 and 14 are formed by winding a primary winding and a secondary winding coaxially around respective iron cores (not shown), and have an appropriate spacing in the circumferential direction of the rod-shaped variable magnetic coupling portion 20. Put
At a predetermined interval in the linear displacement direction (the direction of the arrow X), (1
The pitch p is divided into four equal intervals). FIG.
(B) shows one of the magnetic response members 22 of the variable magnetic coupling unit 20;
FIG. 3 is a development view showing an arrangement relationship of poles 11, 12, 13, 14 with respect to a pitch. 2 shows, for example, if the pole 11 is a sine phase (s), a primary winding PW1 and a secondary winding SW1 are wound coaxially around the pole 11,
2 is a cosine phase (c), a primary winding PW2 and a secondary winding SW2 are coaxially wound around the pole 12, and a pole 13 is a minus sine phase (/ s). 1
The secondary winding PW3 and the secondary winding SW3 are wound coaxially,
Is the negative cosine phase (/ c), this pole 14
In this case, the primary winding PW4 and the secondary winding SW4 may be wound coaxially. Although not shown, each pole 11-
The 14 cores are fixed to a common base, and a predetermined mutual arrangement is fixed.

The arrangement shown in FIG. 11A is effective when the diameter of the rod 210 forming the base of the variable magnetic coupling portion 20 is relatively large. Such a large-diameter rod 210
If the winding part 10 is configured to be inserted into the space inside the coil as shown in FIG. 2, the diameter of each winding becomes large, so that the winding part 10 becomes large. In contrast, FIG.
In the arrangement as shown in (a), the winding provided on each of the poles 11 to 14 may be of a small diameter, which is advantageous because the configuration of the winding part 10 does not increase. Moreover, since the arrangement of the poles 11 to 14 is shifted in the circumferential direction, even if the length of one pitch p is minute, the windings of the poles 11 to 14 are arranged so as not to collide with each other. This is advantageous because In FIG. 11A, the rod 210 is made of a magnetic material such as iron, and a ring-shaped concave portion 21a is repeatedly formed with a predetermined width on the rod 210 to obtain a magnetic material formed of a convex portion of the magnetic material. An example is shown in which the response member 22 is repeatedly formed with a predetermined width. Of course, the ends of the poles 11 to 14 and the surface of the rod 210 face each other in a non-contact manner, and when the ends of the poles 11 to 14 face the concave portion 21a and when they face the convex portion 22. Then, a difference in magnetic coupling occurs due to a difference in gap between them.

As described above, according to the inductive linear position detecting device according to the present invention, a two-phase output AC signal (A = sin θ · sin ωt and B = cos θ · sin ωt)
0 can be output from the secondary windings SW1 to SW4. Therefore, by applying an appropriate digital phase detection circuit, the phase value θ of the sine function sin θ and the cosine function cos θ is detected by digital phase detection, and based on this, the position detection data of the linear position x is obtained. it can.

For example, FIG. 12 shows an example in which a known RD (resolver-digital) converter is applied. Resolver type two-phase output AC signals A = sinθ · sinωt and B = c output from the secondary windings SW1 to SW4 of the winding unit 10
os θ · sin ωt is input to analog multipliers 30 and 31, respectively. The phase generating circuit 32 sequentially generates digital data of the phase angle φ, and the sine / cosine generating circuit 33
From the sine value sinφ and the cosine value c corresponding to the phase angle φ
Generate an analog signal of osφ. The multiplier 30 multiplies the sine phase output AC signal A = sin θ · sin ωt by the cosine value cos φ from the sine / cosine generating circuit 33 to obtain “cos φ · sin θ · sin ωt”. The other multiplier 31 outputs the cosine phase output AC signal B = cos θ · sin
ωt is multiplied by the sine value sinφ from the sine / cosine generating circuit 33 to obtain “sinφ · cosθ · sinωt”.
The difference between the output signals of the two multipliers 30 and 31 is obtained by a subtractor 34, and the phase generator 3
The second phase generation operation is controlled as follows. That is, the generated phase angle φ of the phase generating circuit 32 is reset to 0 at first, and then increases sequentially, and stops increasing when the output of the subtractor 34 becomes 0. The output of the subtractor 34 becomes 0 because “cosφ · sinθ · sinωt” = “sinφ · cosθ · sin”
ωt ”is satisfied, that is, φ = θ is satisfied, and the digital data of the phase angle φ sequentially from the phase generation circuit 32 matches the digital value of the phase angle θ of the amplitude function of the output AC signals A and B. ing. Therefore, a reset trigger is given periodically at an arbitrary timing to sequentially generate the phase
Is reset to 0, the increment of the phase angle φ is started, and when the output of the subtractor 34 becomes 0, the increment is stopped to obtain digital data of the phase angle θ. It is known that the phase generating circuit 32 is configured to include an up / down counter and a VCO, and the output of the subtractor 34 drives the VCO to control the up / down counting operation of the up / down counter. In that case, a periodic reset trigger is unnecessary.

An error occurs in the electrical AC phase ωt of the secondary output AC signal due to a change in impedance of the primary and secondary windings of the winding unit 10 due to a temperature change or the like. In the above, the phase error of sinωt is automatically canceled, which is advantageous. On the other hand, a conventionally known two-phase AC signal (for example, sinω
In a method in which an electric phase shift occurs in a one-phase output AC signal by exciting at t and cosωt), an output phase error based on such a temperature change cannot be removed. By the way, the phase detection circuit including the conventional R-D converter as described above employs a tracking comparison method, so that there is a problem that a clock delay occurs when φ is tracked and counted, resulting in poor response. Therefore, the present inventors have developed a novel phase detection circuit as described below, and it is convenient to use this.

FIG. 13 shows an embodiment of a novel phase detecting circuit applied to the inductive linear position detecting device according to the present invention. 13, in a detection circuit section 41, a counter 42 counts a predetermined high-speed clock pulse CK, and based on the count value, generates an excitation AC signal (for example, sinωt) from an excitation signal generation circuit 43. 10 primary windings PW1 to PW5. The modulo number of the counter 42 corresponds to one cycle of the exciting AC signal, and for convenience of explanation, it is assumed that the count value 0 corresponds to the zero phase of the reference sine signal sinωt. For example, when the count value of the counter 42 is 1 from 0 to the maximum value,
During the cycle, when one cycle from the zero phase to the maximum phase of the reference sine signal sinωt is generated, an excitation AC signal sinωt is generated from the excitation signal generation circuit 43 correspondingly. Two-phase output AC signals A = sinθ · sinωt and B = c output from the secondary windings SW1 to SW4 of the winding unit 10
osθ · sinωt is input to the detection circuit unit 41.

In the detection circuit section 41, the first AC output signal A = sin θ · sin ωt is input to the phase shift circuit 44, and its electric phase is phase-shifted by a predetermined amount.
AC signal A '= sin advanced by 0 degree and phase shifted
θ · cosωt is obtained. The detection circuit 41 includes an addition circuit 45 and a subtraction circuit 46. In the addition circuit 45, the phase-shifted AC signal A ′ = sin θ · cosωt output from the phase shift circuit 44 is wound. The second AC output signal B = cosθ · sinωt output from the secondary windings SW1 to SW4 of the line unit 10 is added, and the added output is B + A ′ = cosθ · sinωt + sinθ · cosωt.
= Sin (ωt + θ) is obtained as a first electrical AC signal Y1. In the subtraction circuit 46, the phase-shifted AC signal A ′ = sin θ · cos ωt and the second AC output signal B = cos θ · sin ωt are subtracted, and as a subtraction output, B−A ′ = cos θ · sin ωt− sinθ ・ cosω
As a result, a second electrical AC signal Y2 can be obtained, which can be represented by a simplified expression of t = sin (ωt−θ). Thus, the first electric AC signal Y1 = sin (ωt) having the electric phase angle (+ θ) shifted in the positive direction corresponding to the detection target position (x)
+ Θ) and a second electric AC signal Y2 = sin (ωt−θ) having an electric phase angle (−θ) shifted in the negative direction corresponding to the same detection target position (x). Each is obtained by electrical processing.

The output signals Y1 and Y2 of the adder circuit 45 and the subtractor circuit 46 are input to zero-cross detection circuits 47 and 48, respectively, where the respective zero-crosses are detected. As a method of detecting the zero cross, for example, a zero cross in which the amplitude values of the signals Y1 and Y2 change from negative to positive, that is, zero phase is detected. The zero-cross detection pulse, that is, the zero-phase detection pulse detected by each of the circuits 47 and 48 is a latch pulse LP
1 and LP2 are input to the latch circuits 49 and 50. The latch circuits 49 and 50 latch the count value of the counter 42 at the timing of the respective latch pulses LP1 and LP2. As described above, the modulo number of the counter 42 corresponds to one cycle of the exciting AC signal, and the count value of 0 corresponds to the 0 phase of the reference sine signal sinωt. The data D1 and D2 latched by the latch circuits 49 and 50 respectively correspond to the phase shifts of the output signals Y1 and Y2 with respect to the reference sine signal sinωt. The output of each of the latch circuits 49 and 50 is input to the error calculation circuit 51, and "(D1 + D2) / 2"
Is calculated. Note that this calculation is actually “D
This may be performed by shifting the addition result of the binary data of “1 + D2” by one bit lower.

Here, the influence of the length of the wiring cable between the winding part 10 and the detection circuit part 41, the influence of each length of the winding part 10,
Taking into account that an impedance change due to a temperature change or the like has occurred in the secondary and secondary windings, if the phase variation error of the output signal is indicated by “± d”, the above signals in the detection circuit section 41 are as follows: Is represented as A = sinθ · sin (ωt ± d) A ′ = sinθ · cos (ωt ± d) B = cosθ · sin (ωt ± d) Y1 = sin (ωt ± d + θ) Y2 = sin (ωt ± d−θ) D1 = ± d + θ D2 = ± d-θ

That is, each phase shift measurement data D1, D
No. 2 performs the phase shift count using the reference sine signal sinωt as the reference phase, so that a value including the phase variation error “± d” is obtained as described above. Therefore, the error calculation circuit 51 calculates “(D1 + D2) / 2” to obtain (D1 + D2) / 2 = {(± d + θ) + (± d−θ)} / 2 = ± 2d / 2 = ± By using d, the phase fluctuation error “± d” can be calculated.

The data of the phase variation error “± d” obtained by the error calculation circuit 51 is supplied to a subtraction circuit 52, and is subtracted from one of the phase shift measurement data D1. That is,
In the subtraction circuit 52, since the subtraction of “D1− (± d)” is performed, D1− (± d) = ± d + θ− (± d) = θ, and the correct detection after removing the phase variation error “± d” Digital data indicating the phase difference θ is obtained. As described above, according to the present invention, it can be understood that the phase fluctuation error “± d” is canceled and only the correct phase difference θ corresponding to the detection target position x is extracted.

This point will be further described with reference to FIG. In FIG. 14, a sine signal sin as a reference for phase measurement
ωt and the waveforms near the zero phase of the first and second AC signals Y1 and Y2 are shown. FIG. 11A shows a case where the phase fluctuation error is plus (+ d), and FIG. −
d) is shown. In the case of FIG. 7A, the reference sine signal sin
The 0 phase of the first signal Y1 is “θ +
d ”, and the corresponding phase difference detection data D1 indicates a phase difference corresponding to“ θ + d ”. Also, the second signal Y2 with respect to the zero phase of the reference sine signal sinωt
Is delayed by “−θ + d”, and the corresponding phase difference detection data D2 indicates a phase difference corresponding to “−θ + d”. In this case, the error calculation circuit 51 calculates the phase fluctuation error “+ d” according to (D1 + D2) / 2 = {(+ d + θ) + (+ d−θ)} / 2 = + 2d / 2 = + d. Then, D1-(+ d) = + d + θ − (+ d) = θ is calculated by the subtraction circuit 52, and the correct phase difference θ is extracted.

In the case of FIG. 14B, the reference sine signal si
The zero phase of the first signal Y1 is “θ” with respect to the zero phase of nωt.
−d ”, and the corresponding phase difference detection data D1 indicates a phase difference corresponding to“ θ−d ”. Also, the second signal Y with respect to the zero phase of the reference sine signal sinωt
The 0 phase of No. 2 is delayed by “−θ−d”, and the corresponding phase difference detection data D2 indicates a phase difference corresponding to “−θ−d”. In this case, the error calculation circuit 51 calculates the phase fluctuation error “−d” according to (D1 + D2) / 2 = {(− d + θ) + (− d−θ)} / 2 = −2d / 2 = −d . Then, D1-(− d) = − d + θ − (− d) = θ is calculated by the subtraction circuit 52, and a correct phase difference θ is extracted. In the subtraction circuit 52, A subtraction of “D2− (± d)” may be performed, and in principle, the correct phase difference θ
It can be understood that data (−θ) reflecting the above is obtained.

As can be understood from FIG. 14, the electrical phase difference between the first signal Y1 and the second signal Y2 is 2θ, and the phase variation error “± d” between them is always obtained.
, Which is twice the value of the accurate phase difference θ. Accordingly, the configuration of the circuit portion including the latch circuits 49 and 50, the error calculation circuit 51, the subtraction circuit 52, and the like in FIG. It may be. For example, from the point in time when the pulse LP1 corresponding to the zero phase of the first signal Y1 output from the zero-cross detection circuit 47 occurs, the pulse LP2 corresponding to the zero phase of the second signal Y2 output from the zero-cross detection circuit 48 By gating by an appropriate means until the time of occurrence, and counting this gate period, digital data corresponding to the electrical phase difference (2θ) can be obtained in which the phase fluctuation error “± d” is canceled. , Is shifted one bit lower, data corresponding to θ is obtained.

In the above embodiment, the output of the same counter 42 is latched by the latch circuit 49 for latching + θ and the latch circuit 50 for latching -θ. No particular reference is made to the sign of. However, the sign of the data may be subjected to appropriate design processing so as to conform to the gist of the present invention. For example, assuming that the modulo number of the counter 42 is 4096 (decimal notation), the digital counts 0 to 4095 may be appropriately processed according to the phase angle of 0 to 360 degrees. In the simplest design example, the most significant bit of the count output of the counter 42 is a sign bit, the digital counts 0 to 2047 correspond to +0 to +180 degrees, and the digital counts 2048 to 4095 correspond to −180 to −0.
The arithmetic processing may be performed in accordance with the degree.
Alternatively, as another example, by converting input data or output data of the latch circuit 50 into a two's complement number, the digital counts 4095-0 are made to correspond to negative angle data expressions of -360 degrees to -0 degrees. You may.

There is no particular problem when the detection target position x is stationary, but when the detection target position x changes with time, the corresponding phase angle θ also changes with time. . In this case, the phase shift amount θ of each of the output signals Y1 and Y2 of the addition circuit 45 and the subtraction circuit 46 is not a constant value, but shows a dynamic characteristic that changes with time according to the moving speed. As shown by t), the output signals Y1 and Y2 are as follows: Y1 = sin {ωt ± d + θ (t)} Y2 = sin {ωt ± d−θ (t)} That is, with respect to the frequency of the reference signal sinωt, the leading output signal Y1 makes a frequency transition in a direction of increasing the frequency in accordance with + θ (t), and the lagging output signal Y2 becomes −θ.
Frequency transition is performed in a direction in which the frequency becomes lower according to (t).
Under such dynamic characteristics, the periods of the signals Y1 and Y2 transition in the opposite directions one after another for each period of the reference signal sinωt. The measurement time reference for D2 will be different, and both data D1 and D2 will simply be
By simply performing the calculations at 1, 52, the accurate phase variation error “±
d "cannot be obtained.

The simplest method for avoiding such a problem is to ignore the output when the detection target position x is moving in time and to use only the output when the detection target position x is stationary in the configuration of FIG. The function of the apparatus is limited so as to measure the position x to be detected at rest. That is, the present invention may be implemented for such a limited purpose. However, it is desirable that the phase difference θ corresponding to the linear position x to be detected every moment can be accurately detected even while the position x to be detected is temporally changing. Therefore, in order to solve the above-described problems, the phase difference θ corresponding to the detection target position x can be detected every moment even while the detection target linear position x is changing with time. The above-described improvement will be described with reference to FIG.

FIG. 15 shows a modified example of a part of the error calculating circuit 51 and the subtracting circuit 52 in the detecting circuit part 41 of FIG. 13. It may be. If the phase difference θ corresponding to the position x of the detection target linear position that changes with time is represented by + θ (t) and −θ (t), the output signals Y1 and Y2 are as described above. Can be expressed as The phase shift measurement value data D1 and D2 obtained by the latch circuits 49 and 50 respectively become D1 = ± d + θ (t) and D2 = ± d−θ (t). In this case, ± d + θ (t) repeatedly temporally changes in the plus direction from 0 ° to 360 ° in accordance with the temporal change of θ. Further, ± d-θ (t) repeatedly and temporally changes in the minus direction from 360 degrees to 0 degrees in accordance with the temporal change of θ. Therefore, ± d
+ Θ (t) ≠ ± d-θ (t), but sometimes both changes intersect, in which case ± d + θ (t) = ±
d−θ (t) holds. Thus, ± d + θ (t) =
When ± d-θ (t) holds, the output signals Y1, Y2
Of the latch pulses LP1 and LP2 corresponding to the respective zero-cross detection timings.
Are coincident with each other.

In FIG. 15, the coincidence detection circuit 53 detects that the generation timings of the latch pulses LP1 and LP2 corresponding to the zero-cross detection timing of each of the output signals Y1 and Y2 coincide with each other, and responds to this detection. A coincidence detection pulse EQP is generated. On the other hand, the time variation determination circuit 54
Then, by appropriate means (for example, by detecting the presence or absence of a temporal change in the value of one of the phase difference measurement data D1), it is determined that the detection target position x is in a temporally changing mode. In response to this determination, the time-varying mode signal TM
Is output. A selector 55 is provided between the error calculation circuit 51 and the subtraction circuit 52, and when the time variation mode signal TM is not generated, that is, TM = "0", that is, the detection target linear position x changes with time. If not, the output of the error calculation circuit 51 added to the selector input B is selected and input to the subtraction circuit 52. Thus, when the input B of the selector 55 is selected, the circuit of FIG.
It operates equivalently to the circuit of FIG. That is, when the detection target linear position x is stationary, the output data of the error calculation circuit 51 is supplied to the subtraction circuit 5 via the input B of the selector 55.
2 and operates similarly to the circuit of FIG.

On the other hand, when the time-varying mode signal TM is generated, that is, when TM = "1", that is, when the detection target position x is temporally changing, the latch circuit 56 applied to the input A of the selector 55 Is selected and input to the subtraction circuit 52. When the time variation mode signal TM is "1"
And when the coincidence detection pulse EQP is generated,
When the condition of the AND gate 57 is satisfied, a pulse responsive to the coincidence detection pulse EQP is output from the AND gate 57, and a latch command is given to the latch circuit 56. The latch circuit 56 latches the output count data of the counter 42 according to the latch instruction. Here, when the coincidence detection pulse EQP occurs, the output of the counter 42 is latched by the latch circuits 49 and 50 at the same time.
D1 = D2, and the data latched in the latch circuit 56 corresponds to D1 or D2 (where D1 = D2).

The coincidence detection pulse EQP is generated when the zero-cross detection timing of each of the output signals Y1 and Y2 coincides, that is, when “± d + θ (t) = ± d−θ (t)” is satisfied. Therefore, in response to this, the latch circuit 5
6 is D1 or D2 (where D1
= D2), which is equivalent to (D1 + D2) / 2. This means that (D1 + D2) / 2 = [{± d + θ (t)} + {± d−θ (t)}] / 2 = 2 (± d) / 2 = ± d. The data latched by the circuit 56 means that the data accurately indicates the phase fluctuation error “± d”.

Thus, when the linear position x to be detected fluctuates with time, data accurately indicating the phase fluctuation error "± d" is latched by the latch circuit 5 in accordance with the coincidence detection pulse EQP.
6 and the output data of the latch circuit 56 is supplied to the subtraction circuit 52 via the input A of the selector 55. Therefore, in the subtraction circuit 52, the phase fluctuation error “± d”
Can be obtained as data θ that responds accurately only to the detection target position x from which the data has been removed (or θ (t) if time-varying). In FIG. 15, the AND gate 57 may be omitted, and the coincidence detection pulse EQP may be directly supplied to the latch control input of the latch circuit 56. The latch circuit 56 may latch not only the output count data of the counter 42 but also the output data “± d” of the error calculation circuit 51 as shown by a broken line in FIG. In this case, the output timing of the output data of the error calculation circuit 51 corresponding to the generation timing of the coincidence detection pulse EQP is slightly delayed due to the circuit operation delay of the latch circuits 49 and 50 and the error calculation circuit 51. Therefore, the output of the error calculation circuit 51 may be latched in the latch circuit 56 after an appropriate time delay adjustment. Further, when the detection circuit unit 41 is configured in consideration of only the dynamic characteristics, it can be understood that the circuit 51 and the selector 55 in FIG. 15 and the one latch circuit 49 or 50 in FIG. 2 may be omitted. There will be.

FIG. 16 shows another embodiment of the phase difference detection calculation method capable of canceling the phase fluctuation error "± d". The resolver-type first and second AC output signals A and B output from the secondary windings SW1 to SW4 of the winding unit 10 are input to the detection circuit unit 60, and similar to the example of FIG. The first AC output signal A = sin θ · sin ωt is input to the phase shift circuit 44, and its electric phase is phase-shifted by a predetermined amount, and the phase-shifted AC signal A ′ = sin θ ·
cosωt is obtained. In the subtraction circuit 46, the phase-shifted AC signal A ′ = sin θ · cos ωt and the second AC output signal B = cos θ · sin ωt are subtracted. sinωt-sinθ ・ c
As a result, an electrical AC signal Y2 can be obtained, which can be represented by a simplified expression of osωt = sin (ωt−θ). The output signal Y2 of the subtraction circuit 46 is input to the zero-cross detection circuit 48, and a latch pulse LP2 is output in response to the zero-cross detection.
Is input to

The embodiment shown in FIG. 16 differs from the embodiment shown in FIG. 13 in that the phase shift θ
Are different from each other in the reference phase when measuring. FIG.
In the example of 3, the reference phase when measuring the phase shift amount θ is:
The zero phase of the reference sine signal sinωt, which is not input to the position sensor 10, and includes a phase variation error “± d” based on a change in winding impedance due to a temperature change or other various factors. Is not. Therefore, in the example of FIG. 13, two AC signals Y1
= Sin (ωt + θ) and Y2 = sin (ωt−θ), and the electrical phase difference is obtained to cancel the phase fluctuation error “± d”. On the contrary,
In the embodiment of FIG. 16, based on the first and second AC output signals A and B output from the winding unit 10, the phase shift θ
Is formed, and the reference phase itself includes the above-mentioned phase fluctuation error “± d”, thereby eliminating the above-mentioned phase fluctuation error “± d”.

That is, in the detection circuit section 60, the first and second AC output signals A and B output from the winding section 10 are input to zero cross detection circuits 61 and 62, respectively, and the respective zero crosses are detected. You. The zero-cross detection circuits 61 and 62 respond to either a zero-cross where the amplitude values of the input signals A and B change from negative to positive (so-called 0 phase) or a zero-cross where the amplitude value changes from positive to negative (so-called 180 degree phase). Output a zero-cross detection pulse. This is because sinθ and cosθ, which determine the positive and negative polarities of the amplitudes of the signals A and B, are arbitrarily positive or negative according to the value of θ. This is because it is necessary to detect a zero cross every 180 degrees. Both zero cross detection circuits 61,
The zero-crossing detection pulse output from the OR circuit 62
3 or the output of the OR circuit 63 is
The pulse is input to a divide-by-2 pulse circuit 64 (including, for example, a 分 -divider circuit such as a T-flip-flop and a pulse output AND gate). , A zero-crossing detection pulse corresponding to only the zero phase is output as the reference phase signal pulse RP. This reference phase signal pulse R
P is provided to the reset input of counter 65. The counter 65 constantly counts a predetermined clock pulse CK, and its count value is repeatedly reset to 0 in accordance with the reference phase signal pulse RP. The output of the counter 65 is input to the latch circuit 50, and the count value is latched by the latch circuit 50 at the generation timing of the latch pulse LP2. The data D latched by the latch circuit 50 is output as measurement data of the phase difference θ corresponding to the detection target position x.

The first and second AC output signals A and B output from the winding unit 10 are A = sin θ · sin ω, respectively.
t, B = cos θ · sin ωt, and the electric phases are in phase. Therefore, zero crossings should be detected at the same timing, but the amplitude coefficient is sine sin θ and cosine c
Since it fluctuates with osθ, either amplitude level may be 0 or close to 0, and in such a case, zero crossing cannot be practically detected for one of them. Therefore, in this embodiment, two AC output signals A =
By performing zero-crossing detection processing for each of sin θ · sin ωt and B = cos θ · sin ωt, and OR-combining both zero-crossing detection outputs, even if either one cannot detect zero-crossing due to a small amplitude level, the other amplitude level cannot be detected. It is characterized in that the larger zero-cross detection output signal can be used.

In the case of the example shown in FIG. 16, the phase variation error due to a change in the winding impedance of the winding section 10 is, for example, "-
d ", the AC signal Y2 output from the subtraction circuit 46 becomes Y2 = sin, as shown in FIG.
(Ωt−d−θ). In this case, the output signals A and B of the winding unit 10 have amplitude values sin θ and cos θ according to the angle θ, respectively, and A = sin as illustrated in FIG.
The phase variation error is included, such as θ · sin (ωt−d) and B = cos θ · sin (ωt−d). Accordingly, the reference phase signal pulse RP obtained at the timing shown in FIG. 17C based on the zero-cross detection is obtained from the phase variation error −d from the zero phase of the original reference sine signal sinωt.
It is shifted only. Accordingly, based on the reference phase signal pulse RP, the output AC signal Y2
By measuring the phase shift amount of = sin (ωt−d−θ), an accurate value θ from which the phase fluctuation error −d is removed can be obtained.

When the device conditions such as the wiring length of the winding section 10 are determined, the impedance change mainly depends on the temperature. Then, the phase variation error ± d is
This corresponds to data indicating the temperature of the surrounding environment in which the linear position detecting device is provided. Therefore, in the circuit having the circuit 51 for calculating the phase variation error ± d as in the embodiment of FIG. 13, the data of the phase variation error ± d obtained therefrom can be appropriately output as the temperature detection data. Therefore,
According to such a configuration of the present invention, an excellent effect that not only the position of the detection target can be detected by one position detection device but also data indicating the temperature of the surrounding environment can be obtained. Thus, it is possible to provide an unusually versatile sensor. Of course, there is an excellent effect that high-precision detection in response to the detection target position can be performed without being affected by a change in impedance on the sensor side due to a temperature change or the like and a length of the wiring cable. Further, since the examples of FIG. 13 and FIG. 16 are methods for measuring the phase difference in the AC signal, it is possible to perform detection excellent in high-speed response as compared with the detection method as shown in FIG. It has excellent effects.

In the above example, the phase data D1 and D2 of the output signals Y1 and Y2 are digitally operated and the position detection data θ is output as a digital value. However, the present invention is not limited to this. You may make it output by an analog value. To do so, the position detection data θ
May be D / A converted. As another example, FIG.
The analog position detection data θ may be directly obtained by analog operation using a circuit as shown in FIG. The zero-crossing detection circuit 80 detects a zero-crossing (0-degree phase) of the primary AC signal sinωt for excitation and generates a zero-crossing detection pulse ZP. The phase shift detection circuit 81 calculates the difference between the generation time of the zero-cross detection pulse (latch pulse) LP1 of the output signal Y1 = sin (ωt + θ) LP1 and the zero-cross detection pulse ZP + θ (specifically, + θ ± d).
And outputs a gate pulse having a time width corresponding to. This gate pulse is input to the voltage conversion circuit 83, and an integrated voltage + Vθ corresponding to the pulse time width (that is, an analog voltage corresponding to the phase amount + θ ± d) is output. The other phase shift detection circuit 82 calculates the time difference -θ (specifically, -θ ± d) between the zero-cross detection pulse ZP and the zero-cross detection pulse (latch pulse) LP2 of the output signal Y2 = sin (ωt−θ). A gate pulse with a corresponding time width is output. The gate pulse is input to the voltage conversion circuit 84, and an integrated voltage −Vθ corresponding to the pulse time width (that is, an analog voltage corresponding to the phase amount −θ ± d) is output. The two voltages + Vθ and −Vθ are added by the adder 85, the output is halved by the divider 86, and the quotient is + Vθ by the subtracter 87.
13, these analog calculators perform the same calculations as the calculators 49 to 52 in FIG.
As a result, analog position detection data θ can be obtained.

The circuit shown in FIG. 18A can be simplified as shown in FIG. In FIG. 18B, a zero-cross detection pulse (latch pulse) LP1 of the output signal Y1 = sin (ωt + θ) and the output signal Y2 = sin (ωt)
-Θ) zero cross detection pulse (latch pulse) LP2
From the phase difference detection circuit 88. The gate pulse is input to the voltage conversion circuit 89, and an integrated voltage corresponding to the pulse time width (that is, an analog voltage corresponding to the phase amount 2θ) is output. The analog voltage thus obtained is obtained by removing the error ± d due to temperature and the like, and also corresponds (proportionally) to θ, so that the analog voltage can be used as it is as the position detection data θ.

In each of the above embodiments, one of the magnetic response members 22 is used.
The linear position x within the range of the pitch p can be detected by an absolute value. This one pitch p
The absolute value of the linear position x exceeding the above can be obtained by counting the number of pitches up and down with an appropriate counter every time the detection target position exceeds the one pitch. This increase / decrease count is calculated every time the output signal of the winding unit 10 makes one round within one pitch range.
Can be performed by counting plus one or minus one according to the moving direction of. As another example, two detectors having different lengths of one pitch p are provided on one movable portion, that is, on both sides of a rod-shaped variable magnetic coupling portion 20, and an absolute at a linear position x exceeding one pitch based on the Vernier principle is provided. The value may be detected. Of course, when the entire movement range of the detection target falls within the range of one pitch p, the magnetic response member 22 may be provided only for one pitch (one cycle).

As still another embodiment, as shown in FIG. 19, apart from the winding section 10 shown in FIG. 2, windings 90, 91, 92 which are long in the axial direction are provided as second winding sections. May be provided over a predetermined long range L (longer than one pitch p of the magnetic response member 22), and the absolute position over the range L may be detected by these windings. This winding configuration consists of one primary winding 90 and two 2
It comprises the next windings 91 and 92. In the example of the figure, a secondary winding 91 is wound outside the primary winding 90, and the secondary winding 91
, The secondary winding 92 is wound, but this order is not limited to this. The two secondary windings 91 and 92 have the same winding length L and cover the same range L. As described below, this range L is defined by these windings 90,
Absolute position detectable range by 91 and 92. The rod 21 in which the magnetic response members 22 are repeatedly provided at a predetermined pitch p enters this range L and moves in conjunction with the movement of the detection target position. In this case, it is assumed that the rod 21 is not endless, has a predetermined length as shown in the drawing, and has a shape such that it enters the range of the windings 90, 91, and 92 from its end. As is apparent, the degree of magnetic coupling between the windings 90, 91, and 92 changes in accordance with the amount of penetration of the rod 21 on which the magnetic response member 22 is mounted in the range L, and the amount of penetration of the rod 21, that is, the position to be detected. Can be obtained from the secondary windings 91 and 92.

As is apparent from one secondary winding 91 (or 92), the rod 2 on which the magnetic response member 22 is mounted is mounted.
1, an AC signal having a peak voltage level corresponding to the detection target position within the range L is output. Most simply, the peak voltage level of the output signal of the one secondary winding 91 (or 92) may be measured, and this may be used as the absolute position detection information over the range L. In order to obtain such simple long absolute position detection information, it is not necessary to provide two secondary windings 91 and 92, but only one. Such a simple embodiment also
Of course, it is included in the scope of the present invention. However, in the method using the voltage level value as the position detection information, the voltage level value fluctuates due to a temperature change or the like, so that there is a disadvantage that an error easily occurs. In order to improve such a defect, two secondary windings 91 and 92 are provided corresponding to the primary winding 90, and a balance winding unit is provided corresponding to each of the secondary windings 91 and 92. 93,
94 is provided so that the output signal of each of the secondary windings 91 and 92 has a difference so that long absolute position detection based on the measurement of the electrical phase can be performed. The winding section 10 and the windings 90 to 94 are arranged in a cylindrical sensor head 95 such that one end 95 a of the head 95 is open so that the rod 21 can enter and exit. Has become.

FIG. 20 is a circuit diagram showing a connection example of each winding of FIG. Each of the balance winding portions 93 and 94 is composed of a pair of a primary winding 93p and 94p and a secondary winding 93s and 94s, respectively. The primary windings 93p and 94p are connected in phase with the primary winding 90 and are excited by a predetermined AC signal (for example, sinωt). The secondary winding 93s of the balance winding section 93 corresponding to the one secondary winding 91 provided over the detection target range L is connected in a phase opposite to that of the secondary winding 91. The secondary winding 94s of the balance winding part 94 corresponding to the other secondary winding 92 is also connected in the opposite phase to the secondary winding 92. The number of turns of each of the secondary windings 91 and 92 provided over the detection target range L is the same, while the number of windings of the secondary windings 93s and 94s for balance are set appropriately different from each other. . The distal end of the rod 21 (that is, the magnetic response member 22) does not enter the position of the balance winding portions 93 and 94.

With the above configuration, each of the secondary windings 91, 92 is set in accordance with the amount of magnetic material (ie, the magnetically responsive member 22 mounted on the rod 21) entering the windings 91, 92 in the detection range L. The levels of the output signals O1 and O2 are 90
The characteristics of a part of the trigonometric function characteristics shifted in degree phase (approximately 9
(Characteristics in the 0 degree range) can be adjusted by setting the secondary windings 93s and 94s for balance. For example, the differential output signal O1 of the windings 91 and 93s shows a sine function characteristic (for convenience, this is represented by sin α · sin
ωt), and the differential output signal O2 of the windings 92 and 94s exhibits a cosine function characteristic (for convenience, this is represented by cos α · s
inωt). However, the range of the angle α corresponding to the detection target range L is approximately 9
The range is about 0 degrees. This is because the entire 360 degree change cannot be obtained due to the structure. Depending on the setting method, the range of the angle α corresponding to the detection target range L is set to 9
Although it is not impossible to expand to a range of 0 degrees or more, 9
It is certain that the angle is set to about 0 degrees. Further, within the range of detectable 90 degrees, 90
The detection process may be performed by associating the detection target range L with a narrower angle range less than degrees. It goes without saying that α corresponds to the current position of the detection target in the detection target range L. With such a configuration, the signals O1 and O2 output from the respective secondary windings 91 and 92 become two-phase signals just like the output of a known resolver. O1 = sinα · sinωt O2 = cosα · sinωt

As is apparent, the output signals O1, O2
Are the two output AC signals A = sin of the winding unit 10 described above.
θ · sin ωt, B = cos θ · sin ωt, and the above α can be digitally measured as an electrical phase angle using the phase detection type detection circuit shown in FIGS. 12 to 16. The illustration and description of the detection circuit unit for that will be omitted because they are the same. In this case, the detection circuit unit for θ and the detection circuit unit for α are separately required, but those that can be shared by the hardware circuits of each detection circuit unit are shared and time-division processing is performed. Of course, it is also possible to make each digital measurement. Of course, α may be obtained as an analog value.

In this way, the absolute data indicating the current position of the rod 21 in the detection target range L is converted to the phase angle α.
Can be determined by the measurement of Of course, the long range L
Corresponds to an angle range of almost 90 degrees,
The detection resolution is coarser than the detection data based on the phase measurement of θ in which the short range p corresponds to the 360-degree angle range based on the output signals A and B of 0. However, since the precise absolute position detection resolution within the short range p can be obtained as described above based on the output signals A and B of the winding unit 10, the signals O1 and O output from the secondary windings 91 and 92, respectively.
2, the absolute position detection resolution within the long range L obtained is coarse and may be inevitable. That is, it is sufficient that absolute position detection data can be obtained in units of the length p corresponding to one pitch of the arrangement pitch of the plurality of magnetic response members 22.

Thus, θ obtained from the winding section 10
And the digital absolute position detection data corresponding to α obtained from the additional windings 90, 91, and 92, can accurately obtain the absolute position detection data over a long range. . Since the magnetic response member 22 is provided intermittently along the rod 21, the rod 2 is not connected to the windings 91 and 92 in the detection range L.
The change in the inductance (coupling coefficient change) of the windings 90, 91, and 92 due to the intrusion of 1 does not become a clean sine curve or cosine curve, but has some unevenness. If there is no problem, and even if such a process is not performed, the measurement accuracy of α is rough as described above, and it is possible to perform measurement without any problem.

When a precise detection resolution is not required, in the example of FIG. 19, the winding section 10 is omitted, and only the long winding sections 90, 91, 92 and the corresponding balancing winding sections 93, 94 are provided. May be provided. FIG.
An example in that case is shown. In this case, it is not necessary to repeatedly provide the magnetic response member 22 having the predetermined pitch p.
It may be one magnetic response member (22).
That is, if a magnetic metal is used for the rod 21,
It becomes one magnetic response member (22) as it is. In FIG. 21, each winding 9 corresponds to the omission of the winding 10.
The length L ′ of 0, 91, 92 is longer than in the example of FIG. The operation is the same as that described with reference to FIGS. This configuration is applicable not only to position detection in a long range but also to position detection in a short range. That is, the range of the length L ′ in FIG. 21 is one pitch p in the example of FIG.
The range may be as short as. Even when the length L ′ is small, the advantage of the configuration of FIG. 21 is great because it is not necessary to precisely form the size of the magnetic response member 22.

With the winding arrangement as shown in FIG.
Since it is limited to the range of degrees, the position detection resolution becomes coarse as described above. FIG. 22 shows an example in which this point is improved, and the absolute position in the long range L can be detected with a high resolution using one detection unit. Of course, also in this case, similarly to the above, the detection range L does not necessarily have to be long, and may be as short as one pitch p in the example of FIG. Similarly to the above, even when the length L is minute, when the configuration shown in FIGS. In FIG. 22, the sensor head 95 includes a winding portion 10, and the configuration of the winding portion 10 includes a plurality of primary and secondary windings having a predetermined arrangement as described later over a predetermined detection range L. It is something that is. The rod 96 has a predetermined length substantially equal to the detection range L, enters and exits the detection range L from its end, and is made of a magnetic material (or may be a conductor). The rod 96 itself is the magnetic response member 22.
, And therefore corresponds to the movable section 20 in FIG. In the sensor head 95, corresponding to the predetermined detection range L,
The number of windings and the winding direction of the plurality of windings are appropriately controlled so that a desired inductance change over one cycle (0 to 360 degrees) of the trigonometric function is obtained according to the entry position of the tip of the rod 96. Is provided. FIG.
FIG. 24D shows an example of obtaining an inductance change of a sine function characteristic, and FIGS. 24A to 24D show examples of obtaining an inductance change of a cosine function characteristic. In other words, such a change in inductance indicates a cumulative inductance according to the degree of unilateral entry of the rod 96 (the inductance of the forward winding is added, and the inductance of the reverse winding is subtracted).

FIG. 23 (a) shows a desired sine output signal A
= Sin θ · sin ωt, and the horizontal axis indicates the entry position X of the tip of the rod 96, and θ corresponds to X (is proportional) as described above. FIG. 23 (b)
With the entry of the magnetic body in the positive direction of the horizontal axis, the number of coil turns at each point in the range of L is vertically determined so that a composite inductance characteristic of a sine characteristic as shown in FIG. An example plotted on an axis is shown. The plot position of the x mark is the number of turns N, and the plot position of the o mark is the number of turns N
/ 2. Of course, the plotting position may be any position along the function line shown in FIG. 3B, and the number of turns may be the number of turns corresponding to the plotting position. Note that this plot example is an empirical value, not a theoretical value.
Desired inductance change (sinθ or cosθ)
May be set to an arbitrary number of turns at an arbitrary position by trial and error so as to be obtained cumulatively. FIG. 23C shows four secondary windings 101, 102, 103, and 104 having the number of turns N in FIG.
An example is shown in which the sensor head 95 is arranged in a distributed manner within the range of L corresponding to each plot of the x mark of 3 (b). The outputs of the windings 101 to 104 are additively combined to obtain a desired sine output signal A = sin θ · sin ω
t is obtained. "Negative" of -N indicates that the winding direction is reversed. When the distal end of the rod 96 made of a magnetic material moves rightward in order from the leftmost secondary winding 101, 102, 103, 104 sequentially from the secondary winding 101.
As a result, an output signal is obtained cumulatively, and an output signal A = sinθ · sinωt having a sine characteristic that makes one rotation in the range of L as shown in FIG.
FIG. 23D shows an example in which the arrangement of the secondary windings is made denser, and the sensor head 95 is configured so that the sine curve of the output signal A = sinθ · sinωt becomes smoother. That is, a secondary winding having N turns is arranged corresponding to the plot point of the x mark, and a secondary winding having N / 2 turns is arranged corresponding to the plot point of the o mark. Of course, the number of turns N or N / 2 is not strict, and the desired ideal inductance change (sin θ or cos θ) is
These turns may be increased or decreased as needed by trial and error so as to be obtained cumulatively.

FIGS. 24 (a) to 24 (d) illustrate the secondary winding arrangement for obtaining a desired cosine output signal B = cos θ · sin ωt, and FIGS. 23 (a) to 23 (d).
Are shifted by 90 degrees (that is, by a distance of L / 4) as compared with the example of FIG. FIG. 24 (c) shows four secondary windings 201, 202, 203,
FIG. 24 (d) shows an example of arranging the reference numerals 204 in FIG.
An example in which the arrangement of the secondary windings is made denser as in (d) to make the cosine curve of the output signal B = cos θ · sin ωt smoother is shown. Actually, FIG.
An auxiliary secondary winding 205 is added as shown on the left side of (c). This auxiliary secondary winding 205 compensates for the rise of the inductance of the cosine characteristic at the position of zero degree (origin). Of course, this auxiliary winding 20
The number 5 is not limited to one, and a plurality may be provided substantially corresponding to plot positions of the x mark and the o mark. By the way, FIG.
(C) and the winding arrangement of FIG. 24 (c), the sine output secondary windings 101 to 104 and the cosine output
The next windings 201 to 204 will be at the same position,
This may be double-wound. Alternatively, the sine output secondary windings 101 to 104 may be arranged at predetermined positions, and the cosine output secondary windings 201 to 204 may be arranged on both sides in close contact with each other.

The sensor head 95 has a signature output 2.
Secondary windings 101 to 104 and secondary winding 20 for cosine output
Nos. 1 to 204 are arranged respectively, and a primary winding for excitation is arranged in an appropriate arrangement (for example, corresponding to each secondary winding) to excite with a one-phase AC signal sinωt. by this,
As in the example of FIG. 2, a two-phase output signal of a sine and cosine resolver type A = sinθ · sinωt, B = cos
θ · sin ωt is obtained from the sensor head 95. The method of obtaining data of the phase angle θ corresponding to the detection target position X from the two-phase output signals A and B may be the same as described above. As described above, it has been experimentally confirmed that extremely accurate detection can be performed by arranging a plurality of in-phase excited primary windings between the respective secondary windings. For example, in the case of the example of FIG.
Taking three secondary windings of 2, N and N / 2 as an example, if a total of four primary windings, two in the middle and two on both sides, are arranged, the distribution of the magnetic field due to excitation is obtained. And the detection accuracy is improved.

Thus, according to the examples of FIGS.
The absolute position in the long range L is determined with a high resolution using a single detection unit (sensor head 95 and rod 96) (the range of L is determined with a resolution corresponding to a phase change for one rotation).
Can be detected. The rod 96 may be formed of an inflexible metal rod. Alternatively, when the detection device is miniaturized, a thin magnetic wire such as a piano wire may be used as described above. Note that the example of FIG. 22 has a structure in which the rod 96 is inserted into the ring-shaped winding space of the sensor head 95 (that is, the axial direction of each winding coincides with the linear displacement direction X of the rod 96).
It is. However, the relationship is not limited to this, and the relationship may be such that the axial direction of each winding is orthogonal to the displacement direction X of the variable magnetic coupling unit 20.

In each of the above embodiments, the winding 10
The configuration of the detection unit using the magnetic response member 22 may be configured like a known phase shift type position detector. For example, in the winding unit 10 shown in FIG.
The relationship of the next winding is reversed, and the sine-phase winding SW1 and the minus sine-phase winding SW3 are excited by the sine signals sinωt and −sinωt of opposite phases, and the cosine-phase winding SW2 and the negative cosine are excited. The phase winding SW4 is excited by cosine signals cos ωt and −cos ωt having phases opposite to each other, and an output signal sin (ωt−) including an electric phase shift θ corresponding to the detection target position x from the windings PW1 to PW5.
θ) may be obtained.

Further, a novel hardware configuration of the guide type linear position detecting device according to the present invention is adopted,
The position detection processing is performed by a detection method of a type different from the above-described resolver type, for example, a multiple phase excitation type (a type in which a primary AC signal of a plurality of phases with a phase shift is used) or a voltage detection type. Is also good. For example, the novel structures of the variable magnetic coupling unit 20 can be applied to any type of detection method. In addition, the position detecting device may be configured by selectively adopting a part of the new and meaningful configuration shown in the embodiment. Of course, the shape of the variable magnetic coupling unit 20 is not limited to the rod shape, and may be any shape. In addition, the phase detection circuit is not limited to one configured by combining individual circuits,
Software processing may be performed using a CPU.

[0077]

As described above, according to the present invention, not only is it possible to detect a linear position over a wide range with a small and simple structure, but also to obtain an inductive linear line having a high detection resolution even in a minute range. Providing a position detection device,
A highly accurate pressure gauge can be provided by using such an inductive linear position detecting device. In particular, use a lightweight member such as a wire or piano wire as the movable part,
By providing a magnetic responsive member made of a lightweight metal piece on the side of the movable portion, or by using such a lightweight movable portion itself as a magnetic responsive member, the load on the diaphragm is reduced, and an extra burden is not applied. In such a case, pressure detection can be performed without such a great effect.

In addition, since the detection section is configured to be excited by a one-phase AC signal, there is an advantage that the configuration of the excitation circuit is simple. Further, in the variable magnetic coupling unit, a plurality of magnetic response members having predetermined magnetic response characteristics are repeatedly provided at a predetermined pitch along the direction of linear displacement, so that an inductive output AC signal induced in the secondary winding is provided. Thus, it is possible to obtain a signal that periodically changes with the repetition pitch of the magnetic response member as one cycle, and to expand the detectable range. In addition, since the linear displacement of one pitch is detected by being converted into a phase change of 360-degree full rotation, there is an effect that a minute displacement can be detected with high resolution.

Further, according to the present invention, two output AC signals (sine output and cosine output) similar to those obtained in a resolver conventionally known as a rotary type detection device.
Can be obtained in the linear position detecting device. Therefore, in such a linear position detecting device according to the present invention, the first output AC signal and the second output AC signal are input, and the phase of the sine function and the cosine function corresponding to the amplitude values of both signals are input. A phase detection circuit for detecting a value may be further provided, and by using such a resolver type phase detection circuit, the temperature may be increased as in a conventional phase shift type inductive linear position detection device. This is extremely advantageous because it can eliminate the drawback that an error occurs in the electrical phase shift in the secondary output signal due to a change in the impedance of the primary and secondary windings due to a change or the like.

Further, according to the present invention, the size of the entire winding portion is reduced by arranging the plurality of secondary windings at predetermined intervals within one pitch of the magnetic response member. The response member can be accommodated in a relatively small size substantially corresponding to the range of one pitch of the response member, which helps to reduce the size of the entire detection device. Further, by arranging the plurality of primary windings excited by the AC signal of the same phase separately at an intermediate position between the secondary windings, a magnetic field generated by each primary winding is provided. Can be effectively applied to the individual secondary windings, and the effect of the magnetic response member on the magnetic field can be effectively applied, which helps to secure sufficient detection accuracy. Further, in the invention having the phase difference detection calculating means as shown in the embodiment,
Various new and excellent effects as described above are exhibited.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view showing one embodiment of a pressure gauge according to the present invention.

FIG. 2 is a partially cutaway perspective view showing an embodiment of an inductive linear position detecting device applicable as a detecting unit of the pressure gauge of FIG. 1;

FIG. 3 is a circuit diagram showing a configuration example of a winding unit in FIG. 2;

FIG. 4 is an exemplary perspective view showing a modification of the variable magnetic coupling unit in FIG. 2;

FIG. 5 is a perspective view showing another modification of the variable magnetic coupling unit in FIG. 2;

FIG. 6 is a schematic side view showing still another modification of the variable magnetic coupling unit in FIG. 2;

FIG. 7 is a schematic side view showing still another modification of the variable magnetic coupling unit in FIG. 2;

FIG. 8 is a partial cross-sectional side schematic view showing still another modified example of the variable magnetic coupling unit in FIG. 2;

FIG. 9 is a schematic diagram showing another example of the winding arrangement of the winding unit in FIG. 2;

FIG. 10 is a schematic diagram showing still another example of the winding arrangement of the winding unit in FIG. 2;

FIG. 11A is a schematic perspective view showing another example of the arrangement of windings in the inductive linear position detecting device according to the present invention;
FIG. 2B is a development view illustrating an arrangement relationship of each pole of the winding unit in FIG.

FIG. 12 is a block diagram showing an example of a phase detection type measurement circuit applicable to the inductive linear position detection device according to the present invention.

FIG. 13 is a block diagram showing another example of a phase detection type measurement circuit applicable to the inductive linear position detection device according to the present invention.

FIG. 14 is an operation explanatory diagram of FIG. 13;

FIG. 15 is a block diagram showing a modification example added to the circuit of FIG. 13;

FIG. 16 is a block diagram showing still another example of a phase detection type measurement circuit applicable to the inductive linear position detection device according to the present invention.

FIG. 17 is an operation explanatory diagram of FIG. 16;

FIG. 18 is a block diagram showing a configuration example of obtaining analog position detection data by analog calculation as another example of a phase detection type measurement circuit applicable to the inductive linear position detection device according to the present invention.

FIG. 19 is a schematic axial sectional view showing another embodiment for absolutely detecting a position in a long range exceeding one pitch of the magnetic response member in the inductive linear position detecting device according to the present invention.

FIG. 20 is a circuit diagram showing a connection example of each winding in FIG. 19;

FIG. 21 is a schematic axial sectional view showing another embodiment of the inductive linear position detecting device according to the present invention, which can detect an absolute position over a relatively long range.

FIG. 22 is a schematic perspective view showing still another embodiment of the inductive linear position detecting device according to the present invention, which is capable of detecting an absolute position over a relatively long range with a relatively high resolution.

FIG. 23 is a view showing an example of the arrangement and the number of turns of a secondary winding for generating an output signal having a sine function characteristic provided in the sensor head of FIG. 22;

24 is a diagram showing an example of the arrangement and the number of turns of a secondary winding for generating an output signal having a cosine function characteristic provided in the sensor head of FIG. 22;

[Explanation of symbols]

 Reference Signs List 10 winding part PW1 to PW5 primary winding SW1 to SW4 secondary winding 11 to 14 poles 101 to 104 sine secondary winding 201 to 204, 205 cosine secondary winding 20 movable part (variable magnetic coupling part) ) 21, 210, 96 Rod (or wire) 22 Magnetic response member 21a Depression 41, 60 Detection circuit unit 95 Sensor head 300 Detection unit 301 Pressure gauge 302 Diaphragm

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Nobuyuki Akazu 2-1453-43, Niibori, Higashiyamato-shi, Tokyo (72) Inventor Kazuya Sakamoto 1-1-5 Kawasaki, Hamura-shi, Tokyo, MAC Hamura Court II- 405 (72) Inventor Hiroshi Sakamoto 896-8 Yamada, Kawagoe-shi, Saitama (72) Inventor Akio Yamamoto 1-13-29 Nishi, Kunitachi-shi, Tokyo KM Heights 101

Claims (3)

[Claims] 1. A diaphragm which is displaced by receiving a pressure to be detected, a movable part attached to the diaphragm, a winding part and a magnetic responsive member which is displaced linearly relative to the winding part, A detection unit arranged so that one of the winding unit and the magnetic response member is linearly displaced in conjunction with the movable unit, and an output signal for detecting a displacement in response to the pressure is output from the winding unit. A pressure gauge characterized by being obtained. 2. The detecting section, wherein the winding section includes a primary winding excited by a one-phase AC signal and a plurality of secondary windings arranged at different positions in a linear displacement direction. Each winding is arranged within a predetermined range along the displacement direction, and the magnetic response member is repeatedly provided at a predetermined pitch along the linear displacement direction, and at least in the range where the winding portion is arranged. The magnetic responsive member for one pitch is provided, and a corresponding position of the magnetic responsive member with respect to the winding portion changes according to the displacement of the diaphragm, so that the primary winding and each secondary winding are changed. The magnetic coupling between the two is changed according to the linear position of the valve shaft, so that the inductive output AC signal, which is amplitude-modulated according to the displacement of the diaphragm, is reduced to two each.
Each of the induced output AC signals induced in each of the secondary windings with different amplitude function characteristics according to the dislocation of the secondary winding, and each of the induced output AC signals induced in each of the secondary windings has the same electrical phase. 2. The pressure gauge according to claim 1, wherein the amplitude function periodically changes with the repetition pitch of the magnetic response member as one cycle. 3. The method according to claim 1, wherein four secondary windings are provided.
The amplitude function of each induction output AC signal is sine function, cosine function, minus sine function, minus
A first output AC signal having a sine function and an amplitude function of a sine function, and outputting a first output AC signal having an amplitude function of a sine function. A second output AC signal having an amplitude function of a cosine function is output by synthesizing the output AC signals. 3. The pressure gauge according to claim 2, further comprising a phase detection circuit that detects a phase value of the sine function and the cosine function corresponding to the following.