JPH10168132A - Alkenylphenol-based copolymer having narrow distribution and its production - Google Patents

Alkenylphenol-based copolymer having narrow distribution and its production

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Publication number
JPH10168132A
JPH10168132A JP8344556A JP34455696A JPH10168132A JP H10168132 A JPH10168132 A JP H10168132A JP 8344556 A JP8344556 A JP 8344556A JP 34455696 A JP34455696 A JP 34455696A JP H10168132 A JPH10168132 A JP H10168132A
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JP
Japan
Prior art keywords
group
general formula
formula
reaction
copolymer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8344556A
Other languages
Japanese (ja)
Other versions
JP3711550B2 (en
Inventor
Hiroo Muramoto
博雄 村本
Yukio Yamase
幸雄 山瀬
Yukikazu Nobuhara
幸和 信原
Hitoshi Matsumoto
仁志 松本
Yutaka Shimizu
豊 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Soda Co Ltd
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Nippon Soda Co Ltd
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Filing date
Publication date
Application filed by Nippon Soda Co Ltd filed Critical Nippon Soda Co Ltd
Priority to JP34455696A priority Critical patent/JP3711550B2/en
Publication of JPH10168132A publication Critical patent/JPH10168132A/en
Application granted granted Critical
Publication of JP3711550B2 publication Critical patent/JP3711550B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

Abstract

PROBLEM TO BE SOLVED: To obtain the subject copolymer having a single peak and a narrow molecular weight distribution by polymerizing a specific protected phenol compound, subsequently block-copolymerizing the resultant product with a (meth)acrylic acid alkyl ester and further copolymerizing the resultant block-copolymer with a (meth)acrylic acid ester. SOLUTION: A compound of formula I (R1 is H or methyl; R6 is a 1-6C alkyl), in which the hydroxyl group of the phenol residue is protected with a saturated aliphatic protecting group, is homo-polymerized or copolymerized with a vinyl aromatic compound. Subsequently, the resultant product is block-copolymerized with a (meth) acrylic acid alkyl ester of formula II (R2 is H or methyl; R4 is a (substituted) 1-12C alkyl or a heterocycle]. Further subsequently, the resultant block-copolymer is copolymerized with a (meth)acrylic acid ester of formula III [R3 is H or methyl; R5 is a (substituted) 7-15C alicyclic group or an alkyl having the alicyclic group]. Then, the protecting group of formula I is removed to obtain the objective copolymer. The obtained copolymer consists of a structural unit of formula IV to formula VI and has a number average molecular weight of 1000-50,000, a ratio of a number average molecular weight (Mn ) to a weight average molecular weight (Mw ), Mw /Mn , is 1.00-1.50 and a ratio of formula V/formulae (V+VI) is 1/9 to 9/1.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、狭分散アルケニル
フェノール系共重合体に係り、更に詳しくは、数平均分
子量が1,000〜50,000であり、数平均分子量
(Mn)と重量平均分子量(Mw)との比がMw/Mn
=1.00〜1.50である狭分散アルケニルフェノー
ル系共重合体、及びその製造方法に関する。本発明の共
重合体は、エキシマレーザーレジスト材料としての利用
が期待される。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a narrow-dispersion alkenylphenol-based copolymer, and more particularly to a copolymer having a number average molecular weight of 1,000 to 50,000, a number average molecular weight (Mn) and a weight average molecular weight. (Mw) and Mw / Mn
= 1.00 to 1.50, and a method for producing the same. The copolymer of the present invention is expected to be used as an excimer laser resist material.

【0002】[0002]

【従来の技術】ポリp−ヒドロキシスチレンに代表され
るアルケニルフェノールのホモポリマー、コポリマー
は、化学増幅型・エキシマレーザーレジスト材料として
有用な事が知られている。コポリマーの中で(メタ)ア
クリル酸エステル類とのコポリマーは、従来は、ビニル
フェノールモノマーと(メタ)アクリル酸エステルモノ
マーとを熱重合させる事により製造されていた。
2. Description of the Related Art It is known that alkenylphenol homopolymers and copolymers represented by poly-p-hydroxystyrene are useful as chemically amplified excimer laser resist materials. Among copolymers, copolymers with (meth) acrylates have conventionally been produced by thermally polymerizing vinylphenol monomers and (meth) acrylate monomers.

【0003】LSIの高集積化は年々進んでおり、それ
と共にパターンの微細化が要求されている。微細加工に
は光露光によるフォトリソグラフィー技術が使われてお
り、次世代の技術として、0.25μmルールを要求さ
れる256MbDRAMにはKrFエキシマレーザー光
を使用するエキシマリソグラフィーが有望視されてい
る。KrFエキシマレーザーレジストのベース樹脂とし
ては、最近、ポリp−ヒドロキシスチレンのホモポリマ
ーやスチレンとのコポリマーが使われ始めている。化学
増幅型レジストの潜像形成反応は、酸発生反応(露光
時)と触媒反応(post exposure bak
ing−PEB時)の2段階になる事が特徴である。こ
のため触媒酸の安定性が問題であり、露光からPEBま
でのインターバルが長くなると、空気中の不純物の影響
等によりT−トップを形成したり、パターン形成が不可
能となる。従って、いわゆる環境安定型のレジストが必
要となり、その有力なものとしてヒドロキシスチレン
と、光酸発生剤(PAG)により分解してカルボン酸を
生成し易い(メタ)アクリル酸エステル類、例えばアル
キルメタクリレートとのコポリマーが注目されている。
しかしながら、従来の前記コポリマーは、熱重合法で製
造される為、必然的に未反応モノマーや低分子量体、
又、各成分のホモポリマーを含む混合物の形で得られ、
従って、設定通りの構造を有する狭分散の共重合体を得
る事は不可能であった。
[0003] High integration of LSIs is progressing year by year, and at the same time, miniaturization of patterns is required. Photolithography technology using light exposure is used for fine processing. As a next-generation technology, a 256 Mb DRAM that requires a 0.25 μm rule is expected to use excimer lithography using KrF excimer laser light. Recently, homopolymers of poly-p-hydroxystyrene and copolymers with styrene have begun to be used as base resins for KrF excimer laser resists. The latent image forming reaction of the chemically amplified resist includes an acid generating reaction (during exposure) and a catalytic reaction (post exposure bak).
ing-PEB). For this reason, the stability of the catalyst acid is a problem, and if the interval from exposure to PEB becomes long, it becomes impossible to form a T-top or form a pattern due to the influence of impurities in the air. Therefore, a so-called environmentally-stable resist is required, and the most promising ones are hydroxystyrene and (meth) acrylic acid esters which are easily decomposed by a photoacid generator (PAG) to generate a carboxylic acid, such as alkyl methacrylate. Are attracting attention.
However, since the conventional copolymer is manufactured by a thermal polymerization method, it is inevitable that unreacted monomers, low molecular weight substances,
Also obtained in the form of a mixture containing a homopolymer of each component,
Therefore, it was impossible to obtain a narrowly dispersed copolymer having a structure as set.

【0004】[0004]

【発明が解決しようとする課題】本発明は、単峰性で分
子量分布が狭く、且つ、構造の制御された、アルケニル
フェノールと、PAGにより容易に分解してカルボン酸
を生成する(メタ)アクリル酸エステル類との共重合
体、及びその製造方法を提供する事をその目的とする。
DISCLOSURE OF THE INVENTION The present invention is directed to a (meth) acrylic compound which is monomodal, has a narrow molecular weight distribution, and has a controlled structure, and is easily decomposed by alkenylphenol and PAG to produce a carboxylic acid. An object of the present invention is to provide a copolymer with an acid ester and a method for producing the copolymer.

【0005】[0005]

【課題を解決するための手段】本発明者らは、前記目的
を達成すべく鋭意研究した結果、リビングアニオン重合
法によりアルケニルフェノールのフェノール性水酸基を
飽和脂肪族系保護基により保護した化合物を単独重合又
はビニル芳香族化合物とを共重合した後、PAGにより
容易に分解してカルボン酸を生成する(メタ)アクリル
酸エステル類とブロック共重合を行い、更に特定の(メ
タ)アクリル酸エステルを共重合し、しかる後酸性試剤
を作用させる事により飽和脂肪肪族系保護基のみが脱離
して、分子量分布が狭く、且つ構造の制御されたアルケ
ニルフェノールと前記(メタ)アクリル酸エステル類と
のブロック共重合体が製造出来る事を見出し、本発明を
完成した。
Means for Solving the Problems As a result of intensive studies to achieve the above object, the present inventors have found that a compound in which the phenolic hydroxyl group of alkenylphenol is protected by a living anionic polymerization method with a saturated aliphatic protecting group alone. After polymerization or copolymerization with a vinyl aromatic compound, block copolymerization is carried out with (meth) acrylates which easily decompose by PAG to generate carboxylic acid, and further, a specific (meth) acrylate is copolymerized. Polymerization, and then the action of an acidic reagent causes only the saturated aliphatic protecting group to be eliminated, thereby blocking the alkenylphenol having a narrow molecular weight distribution and a controlled structure with the (meth) acrylates. They have found that a copolymer can be produced, and have completed the present invention.

【0006】即ち、本発明は、一般式(I)、一般式
(II)及び一般式(III)
That is, the present invention relates to the compounds represented by the general formulas (I), (II) and (III)

【0007】[0007]

【化7】 Embedded image

【0008】[0008]

【化8】 Embedded image

【0009】[0009]

【化9】 Embedded image

【0010】(R1 、R2 、R3 は、各々独立に水素原
子又はメチル基を表し、R4 は、置換基を有してもよい
炭素数が1〜12のアルキル基、もしくはヘテロ環基を
表し、R5 は、置換基を有してもよい炭素数が7〜15
の脂環族基または、該脂環族基を有するアルキル基を表
す。)で表される構造単位からなり、数平均分子量が
1,000〜50,000、数平均分子量(Mn)と重
量平均分子量(Mw)との比がMw/Mn=1.00〜
1.50でかつ、一般式(I)の構造単位の繰り返しと
〔一般式(II)の構造単位の繰り返し+一般式(II
I)の構造単位の繰り返し〕との比が1/9〜9/1で
ある狭分散アルケニルフェノール系共重合体であり、ブ
ロック共重合体である。
(R 1 , R 2 and R 3 each independently represent a hydrogen atom or a methyl group; R 4 represents an optionally substituted alkyl group having 1 to 12 carbon atoms or a heterocyclic group; R 5 represents a group having 7 to 15 carbon atoms which may have a substituent;
Or an alkyl group having the alicyclic group. ), The number average molecular weight is 1,000 to 50,000, and the ratio of the number average molecular weight (Mn) to the weight average molecular weight (Mw) is Mw / Mn = 1.00 to 1.00.
1.50 and repeating the structural unit of the general formula (I) and [the repeating of the structural unit of the general formula (II) + the general formula (II
Is a narrowly dispersed alkenylphenol-based copolymer having a ratio of 1/9 to 9/1, and a block copolymer.

【0011】また、アルカリ金属又は有機アルカリ金属
を重合開始剤とするアニオン重合法により、一般式(I
V)
In addition, an anion polymerization method using an alkali metal or an organic alkali metal as a polymerization initiator is carried out by the general formula (I)
V)

【0012】[0012]

【化10】 Embedded image

【0013】(R1 は、水素原子又はメチル基を表し、
6 は、炭素数が1〜6のアルキル基を表す。)で表さ
れるフェノール残基の水酸基が飽和脂肪族系保護基によ
り保護された化合物を単独重合あるいはビニル芳香族化
合物とを共重合し、次いで一般式(V)
(R 1 represents a hydrogen atom or a methyl group,
R 6 represents an alkyl group having 1 to 6 carbon atoms. ), A compound in which the hydroxyl group of the phenol residue is protected by a saturated aliphatic protecting group is homopolymerized or copolymerized with a vinyl aromatic compound;

【0014】[0014]

【化11】 Embedded image

【0015】(R2 は、各々独立に水素原子又はメチル
基を表し、R4 は、置換基を有してもよい炭素数が1〜
12のアルキル基、またはヘテロ環基を表す。)で表さ
れる(メタ)アクリル酸アルキルエステル類とブロック
共重合を行い、次いで、一般式(VI)
(R 2 each independently represents a hydrogen atom or a methyl group, and R 4 has 1 to 5 carbon atoms which may have a substituent.
12 represents an alkyl group or a heterocyclic group. Block copolymerization with alkyl (meth) acrylates represented by the formula (VI)

【0016】[0016]

【化12】 Embedded image

【0017】(R3 は、各々独立に水素原子又はメチル
基を表し、R5 は、置換基を有してもよい炭素数が7〜
15の脂環族基または、該脂環族基を有するアルキル基
を表す。)で表される(メタ)アクリル酸エステル類と
共重合を行った後、一般式(IV)の飽和脂肪族系保護
基を脱離させることを特徴とする請求項1記載の狭分散
アルケニルフェノール系ブロック共重合体の製造方法で
ある。
(R 3 each independently represents a hydrogen atom or a methyl group, and R 5 has 7 to 7 carbon atoms which may have a substituent.
15 represents an alicyclic group or an alkyl group having the alicyclic group. 2. The narrowly dispersed alkenyl phenol according to claim 1, wherein after the copolymerization with the (meth) acrylic acid ester represented by the formula (1), the saturated aliphatic protecting group of the general formula (IV) is eliminated. This is a method for producing a system block copolymer.

【0018】[0018]

【発明の実施の形態】以下、本発明を詳細に説明する。
本発明において用いる一般式(IV)で表される化合物
としては、p−n−ブトキシスチレン、p−sec−ブ
トキシスチレン、p−tert−ブトキシスチレン、p
−tert−ブトキシ−α−メチルスチレン、m−te
rt−ブトキシスチレン、m−tert−ブトキシ−α
−メチルスチレン等が例示され、これらは一種単独又は
2種以上の混合物として使用される。
BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described in detail.
Examples of the compound represented by the general formula (IV) used in the present invention include pn-butoxystyrene, p-sec-butoxystyrene, p-tert-butoxystyrene,
-Tert-butoxy-α-methylstyrene, m-te
rt-butoxystyrene, m-tert-butoxy-α
-Methylstyrene and the like, which are used alone or as a mixture of two or more.

【0019】ビニル芳香族化合物としては、スチレン、
o−メチルスチレン、p−メチルスチレン、α−メチル
スチレン、p−tert−ブチルスチレン、1,3−ブ
チルスチレン等が挙げられ、これらは一種単独又は2種
以上の混合物として使用される。
As the vinyl aromatic compound, styrene,
Examples include o-methylstyrene, p-methylstyrene, α-methylstyrene, p-tert-butylstyrene, 1,3-butylstyrene, and the like, and these are used alone or as a mixture of two or more.

【0020】一般式(V)で示される(メタ)アクリル
酸エステルとしては、メチルアクリレート、メチルメタ
クリレート、エチルアクリレート、エチルメタクリレー
ト、n−プロピルアクリレート、n−プロピルメタクリ
レート、イソプロピルアクリレート、イソプロピルメタ
クリレート、n−ブチルアクリレート、n−ブチルメタ
クリレート、t−ブチルアクリレート、t−ブチルメタ
クリレート、2−エチルヘキシルアクリレート、2−エ
チルヘキシルメタクリレート、イソデシルアクリレー
ト、イソデシルメタクリレート、イソオクチルアクリレ
ート、イソオクチルメタクリレート、ラウリルアクリレ
ート、ラウリルメタクリレート等が例示され、炭素数3
〜7の脂環族基又はヘテロ環基を有する(メタ)アクリ
ル酸エステルとしては、シクロヘキシルアクリレート、
シクロヘキシルメタクリレート、テトラヒドロフラニル
アクリレート、テトラヒドロフラニルメタクリレート、
テトラヒドロピラニルアクリレート、テトラヒドロピラ
ニルメタクリレート、3−オキソシクロヘキシルアクリ
レート、3−オキソシクロヘキシルメタクリレート等が
例示され、これらは一種単独又は二種以上の混合物とし
て使用される。
Examples of the (meth) acrylate represented by the general formula (V) include methyl acrylate, methyl methacrylate, ethyl acrylate, ethyl methacrylate, n-propyl acrylate, n-propyl methacrylate, isopropyl acrylate, isopropyl methacrylate and n-methacrylate. Butyl acrylate, n-butyl methacrylate, t-butyl acrylate, t-butyl methacrylate, 2-ethylhexyl acrylate, 2-ethylhexyl methacrylate, isodecyl acrylate, isodecyl methacrylate, isooctyl acrylate, isooctyl methacrylate, lauryl acrylate, lauryl methacrylate, etc. Are exemplified, and the number of carbon atoms is 3
Examples of the (meth) acrylate having an alicyclic group or heterocyclic group of from 7 to 7 include cyclohexyl acrylate,
Cyclohexyl methacrylate, tetrahydrofuranyl acrylate, tetrahydrofuranyl methacrylate,
Examples thereof include tetrahydropyranyl acrylate, tetrahydropyranyl methacrylate, 3-oxocyclohexyl acrylate, and 3-oxocyclohexyl methacrylate, and these are used alone or as a mixture of two or more.

【0021】一般式(VI)で示される(メタ)アクリ
ル酸エステルとしては、1−アダマンチルアクリレー
ト、1−アダマンチルメタクリレート、2−メチルー2
−アダマンチルアクリレート、2−メチル−2−アダマ
ンチルメタクリレート、1−メチレンアダマンチルアク
リレート、1−メチレンアダマンチルメタクリレート、
1−エチレンアダマンチルアクリレート、1−エチレン
アダマンチルメタクリレート、3,7−ジメチル−1−
アダマンチルアクリレート、3,7−ジメチル−1−ア
ダマンチルメタクリレート、イソボルニルアクリレー
ト、イソボルニルメタクリレート、トリシクロデカニル
アクリレート、トリシクロデカニルメタクリレート、ノ
ルボルナンアクリレート、ノルボルナンメタクリレー
ト、メンチルアクリレート、メンチルメタクリレート、
ジシクロペンテニルアクリレート、ジシクロペンテニル
メタクリレート等が例示され、これらは一種単独又は2
種以上の混合物として使用される。
The (meth) acrylate represented by the general formula (VI) includes 1-adamantyl acrylate, 1-adamantyl methacrylate, and 2-methyl-2
-Adamantyl acrylate, 2-methyl-2-adamantyl methacrylate, 1-methylene adamantyl acrylate, 1-methylene adamantyl methacrylate,
1-ethylene adamantyl acrylate, 1-ethylene adamantyl methacrylate, 3,7-dimethyl-1-
Adamantyl acrylate, 3,7-dimethyl-1-adamantyl methacrylate, isobornyl acrylate, isobornyl methacrylate, tricyclodecanyl acrylate, tricyclodecanyl methacrylate, norbornane acrylate, norbornane methacrylate, menthyl acrylate, menthyl methacrylate,
Examples include dicyclopentenyl acrylate, dicyclopentenyl methacrylate, and the like.
Used as a mixture of more than one species.

【0022】本発明の共重合体の製造方法は、アルカリ
金属又は有機アルカリ金属を重合開始剤として、前記一
般式(IV)で示される化合物、要すればビニル芳香族
化合物とを併用してアニオン重合を行い、次いで反応系
に前記一般式(V)で示される化合物、前記一般式(V
I)で示される化合物を逐次添加してブロック共重合が
行われるが、この反応は通常、窒素、アルゴン等の不活
性ガス雰囲気下、有機溶媒中において、−100℃〜5
0℃の温度で行われる。
The process for producing a copolymer according to the present invention is characterized in that an alkali metal or an organic alkali metal is used as a polymerization initiator together with a compound represented by the above general formula (IV) and, if necessary, a vinyl aromatic compound to form an anion. After polymerization, the compound represented by the general formula (V) and the compound represented by the general formula (V
Block copolymerization is carried out by successively adding the compounds represented by I). This reaction is usually carried out in an organic solvent under an atmosphere of an inert gas such as nitrogen or argon in the range of -100 ° C to 5 ° C.
It is performed at a temperature of 0 ° C.

【0023】重合開始剤のアルカリ金属としては、リチ
ウム、ナトリウム、カリウム、セシウム等が例示され、
有機アルカリ金属としては、前記アルカリ金属のアルキ
ル、アリル化物及びアリール化物が使用可能である。こ
れらの化合物として、エチルリチウム、n−ブチルリチ
ウム、s−ブチルリチウム、t−ブチルリチウム、エチ
ルナトリウム、リチウムビフェニル、リチウムナフタレ
ン、リチウムトリフェニル、ナトリウムビフェニル、ナ
トリウムナフタレン、ナトリウムトリフェニル、1,1
−ジフェニルヘキシルリチウム、1,1−ジフェニル−
3−メチルペンチルリチウム等が例示される。
Examples of the alkali metal of the polymerization initiator include lithium, sodium, potassium, cesium and the like.
As the organic alkali metal, the alkyl, allylic compound and arylated compound of the alkali metal can be used. As these compounds, ethyl lithium, n-butyl lithium, s-butyl lithium, t-butyl lithium, ethyl sodium, lithium biphenyl, lithium naphthalene, lithium triphenyl, sodium biphenyl, sodium naphthalene, sodium triphenyl, 1,1
-Diphenylhexyllithium, 1,1-diphenyl-
3-methylpentyllithium and the like are exemplified.

【0024】有機溶媒としては、n−ヘキサン、n−ヘ
プタン等の脂肪族炭化水素類、シクロヘキサン、シクロ
ペンタン等の脂環族炭化水素類、ベンゼン、トルエン等
の芳香族炭化水素類、ジエチルエーテル、テトラヒドロ
フラン、ジオキサン等のエーテル類の他アニソール、ヘ
キサメチルホスホルアミド等の通常アニオン重合におい
て使用される有機溶媒の一種単独または2種以上の混合
溶媒として使用される。
Examples of the organic solvent include aliphatic hydrocarbons such as n-hexane and n-heptane; alicyclic hydrocarbons such as cyclohexane and cyclopentane; aromatic hydrocarbons such as benzene and toluene; diethyl ether; In addition to ethers such as tetrahydrofuran and dioxane, they are used alone or as a mixture of two or more of organic solvents usually used in anionic polymerization such as anisole and hexamethylphosphoramide.

【0025】得られた共重合体から飽和脂肪族系保護基
を脱離させ、アルケニルフェノール骨格を生成せしめる
反応は、前記重合反応で例示した溶媒の他、メタノー
ル、エタノール等のアルコール類、アセトン、メチルエ
チルケトン等のケトン類、エチルセロソルブ等のセロソ
ルブ類、四塩化炭素等のハロゲン化炭化水素類の存在
下、塩酸、塩化水素ガス、硫酸、臭化水素酸、1,1,
1−トリフロロ酢酸、p−トルエンスルホン酸等の酸性
試剤を触媒として室温〜150℃の温度で反応を行う事
が出来る。この反応において、前記一般式(V)で示さ
れる(メタ)アクリル酸エステルセグメントのエステル
置換基は、前記一般式(VI)で示される(メタ)アク
リル酸エステルセグメントのバルキーなエステル置換基
の立体障害効果により加水分解を起こさず、前記一般式
(IV)で示される化合物の飽和脂肪族系保護基のみが
脱離される。その結果、本発明である狭分散且つ構造の
制御されたアルケニルフェノール系共重合体が製造され
る。
The reaction for removing a saturated aliphatic protecting group from the obtained copolymer to form an alkenylphenol skeleton is carried out by using the solvents exemplified in the above polymerization reaction, alcohols such as methanol and ethanol, acetone, and the like. In the presence of ketones such as methyl ethyl ketone, cellosolves such as ethyl cellosolve, and halogenated hydrocarbons such as carbon tetrachloride, hydrochloric acid, hydrogen chloride gas, sulfuric acid, hydrobromic acid, 1,1,
The reaction can be carried out at room temperature to 150 ° C. using an acidic reagent such as 1-trifluoroacetic acid or p-toluenesulfonic acid as a catalyst. In this reaction, the ester substituent of the (meth) acrylate segment represented by the general formula (V) is changed to the stereochemistry of the bulky ester substituent of the (meth) acrylate segment represented by the general formula (VI). Hydrolysis does not occur due to the hindrance effect, and only the saturated aliphatic protecting group of the compound represented by the general formula (IV) is eliminated. As a result, an alkenylphenol copolymer having a narrow dispersion and a controlled structure according to the present invention is produced.

【0026】[0026]

【実施例】本発明を実施例、及び比較例により、更に詳
細に説明する。但し、本発明の範囲は、下記実施例によ
り何ら制限を受けるものではない。実施例中、mは、ア
ルケニルフェノールの繰り返し単位の総数を、nは、一
般式(V)で示される(メタ)アクリル酸エステルが重
合した繰り返し単位の総数を、また、pは、一般式(V
I)で示される(メタ)アクリル酸エステルが重合した
繰り返し単位の総数を示す。
The present invention will be described in more detail with reference to Examples and Comparative Examples. However, the scope of the present invention is not limited by the following examples. In the examples, m is the total number of repeating units of alkenylphenol, n is the total number of repeating units obtained by polymerizing the (meth) acrylate represented by the general formula (V), and p is the general formula ( V
The total number of repeating units in which the (meth) acrylic acid ester represented by I) is polymerized is shown.

【0027】実施例1 窒素雰囲気下において、テトラヒドロフラン(以下、T
HFと略す) 1500g中に、n−ブチルリチウム
(以下、NBLと略す)35ミリモルを加え、攪拌下、
−40℃に保持しながら、p−tert−ブトキシスチ
レン(以下、PTBSTと略す)1.03モルを1時間
かけて滴下、更に反応を1時間継続し、ガスクロマトグ
ラフィー(以下、GCと略す)により反応完結を確認し
た。この段階で反応系から少量を採取し、メタノールに
より反応を停止させた液についてゲルパーミィエイショ
ンクロマトグラフィー(以下、GPCと略す)により分
析した所、PTBSTポリマーは、Mn=5200、M
w/Mn=1.08の単分散ポリマーであった。次い
で、反応系に、tert−ブチルメタクリレート(以
下、t−BMAと略す)1モルを1時間かけて滴下、更
に反応を1時間継続して、GCにより反応完結を確認し
た。この段階で前記と同様に採取、GPC分析を行った
所、Mn=9400、Mw/Mn=1.12の単分散ポ
リマーであった。次いで、反応系に、イソボルニルメタ
クリレート0.2モルを30分かけて滴下、更に反応を
1時間継続し、GCにより反応完結を確認した。つぎ
に、反応系にメタノールを加えて反応を停止させ、反応
液を大量のメタノール中に投入してポリマーを析出さ
せ、濾過、洗浄後、60℃で15時間乾燥して白色粉体
状のポリマーを得た。用いたモノマー総量に対する重合
収率は、99.5%であった。このコポリマーをGPC
分析を行った所、Mn=10700、Mw/Mn=1.
12の単分散ポリマーであった。つぎに、得られたポリ
マー10gをエタノールに溶解して30%溶液とし、濃
塩酸3gを加えて70℃で3時間反応を行った後、反応
液を大量の水中に投入してポリマーを析出させ、濾過、
洗浄後、60℃で5時間乾燥して白色粉体状のポリマー
8.4gを得た。この反応において、反応前後における
ポリマーの赤外吸収スペクトル(以下、IRと略す)及
13C NMR(以下、NMRとのみ記す)を比較し
た。 IR:890cm-1におけるポリPTBSTのt−ブチ
ル基由来の吸収(ポリt−BMAには存在しない)が反
応後は消失し、あらたに3300cm-1付近に水酸基由
来のブロードな吸収が観察された。 NMR:29ppm付近におけるポリPTBSTのt−
ブチル基由来のピークが反応後は消失しており、一方、
27ppm付近のポリt−BMAのt−ブチル基由来の
ピークは、ベンゼン環カーボンに対する面積比が反応前
後において変化していなかった。更に、生成したポリマ
ーの酸価を測定した所、2.8KOHmg/gでポリ−
p−ヒドロキシスチレンホモポリマーと殆ど同じ値であ
った。また、生成したポリマーについてGPCを測定し
た所、Mn=9000、Mw/Mn=1.12の単分散
ポリマーであリ、NMRにより測定した共重合比率は、
m/n/p=29/29/6であった。以上の事から、
共重合及びその後の脱離反応は設定通り行われ、p−ヒ
ドロキシスチレンと、t−BMAとを主構成セグメント
とし、末端にイソボルニルメタクリレートセグメントを
有する狭分散アルケニルフェノール系ブロック共重合体
が生成した事を確認した。
Example 1 In a nitrogen atmosphere, tetrahydrofuran (hereinafter referred to as T
HF) 35 mmol of n-butyllithium (hereinafter abbreviated as NBL) was added to 1500 g, and the mixture was stirred.
While maintaining at −40 ° C., 1.03 mol of p-tert-butoxystyrene (hereinafter abbreviated as PTBST) was added dropwise over 1 hour, the reaction was further continued for 1 hour, and gas chromatography (hereinafter abbreviated as GC). Indicated that the reaction was complete. At this stage, a small amount was collected from the reaction system and analyzed by gel permeation chromatography (hereinafter abbreviated as GPC) for a solution in which the reaction was stopped with methanol. The PTBST polymer had Mn = 5200, M
It was a monodisperse polymer with w / Mn = 1.08. Next, 1 mol of tert-butyl methacrylate (hereinafter abbreviated as t-BMA) was dropped into the reaction system over 1 hour, and the reaction was further continued for 1 hour, and the completion of the reaction was confirmed by GC. At this stage, when collection and GPC analysis were performed in the same manner as described above, it was a monodisperse polymer having Mn = 9400 and Mw / Mn = 1.12. Next, 0.2 mol of isobornyl methacrylate was added dropwise to the reaction system over 30 minutes, and the reaction was further continued for 1 hour, and the completion of the reaction was confirmed by GC. Next, methanol was added to the reaction system to stop the reaction, the reaction solution was poured into a large amount of methanol to precipitate a polymer, which was filtered, washed, dried at 60 ° C. for 15 hours, and dried to obtain a white powdery polymer. I got The polymerization yield based on the total amount of the monomers used was 99.5%. GPC
Upon analysis, Mn = 10700, Mw / Mn = 1.
Twelve monodispersed polymers. Next, 10 g of the obtained polymer was dissolved in ethanol to make a 30% solution, 3 g of concentrated hydrochloric acid was added, and the reaction was performed at 70 ° C. for 3 hours. Then, the reaction solution was poured into a large amount of water to precipitate the polymer. ,filtration,
After washing, the polymer was dried at 60 ° C. for 5 hours to obtain 8.4 g of a white powdery polymer. In this reaction, the infrared absorption spectrum of the polymer before and after the reaction (hereinafter abbreviated as IR) and 13 C NMR (hereinafter simply referred to as NMR) were compared. IR: absorption at 890 cm -1 derived from the t-butyl group of polyPTBST (not present in poly-t-BMA) disappeared after the reaction, and broad absorption derived from hydroxyl group was observed at around 3300 cm -1 . . NMR: t- of poly PTBST at around 29 ppm
The peak derived from the butyl group disappeared after the reaction, while
In the peak around 27 ppm derived from the t-butyl group of poly-t-BMA, the area ratio to benzene ring carbon did not change before and after the reaction. Further, the acid value of the produced polymer was measured.
The value was almost the same as that of the p-hydroxystyrene homopolymer. When GPC was measured on the produced polymer, it was a monodisperse polymer having Mn = 9000 and Mw / Mn = 1.12. The copolymerization ratio measured by NMR was as follows:
m / n / p = 29/29/6. From the above,
The copolymerization and the subsequent elimination reaction are carried out as set, and a narrowly dispersed alkenylphenol-based block copolymer having p-hydroxystyrene and t-BMA as main constituent segments and having an isobornyl methacrylate segment at a terminal is formed. I confirmed that I did.

【0028】実施例2 窒素雰囲気下において、THF1500g中に、NBL
50ミリモルを加え、攪拌下、−40℃に保持しなが
ら、PTBST1モルを1時間かけて滴下、更に1時間
反応を継続し、GCにより反応完結を確認した。この段
階でのPTBSTポリマーは、Mn=3500、Mw/
Mn=1.10の単分散ポリマーであった。次いで、反
応系に、メチルメタクリレート0.3モル、t−BMA
0.3モルの混合物を1時間かけて滴下、更に反応を1
時間継続し、GCにより反応完結を確認した。この段階
でのポリマーは、Mn=5000、Mw/Mn=1.1
3の単分散ポリマーであった。次いで、反応系にトリシ
クロデカニルメタクリレート0.1モルを30分かけて
滴下、更に1時間反応を継続してGCにより反応完結を
確認した。つぎに、反応液を実施例.1におけると同様
にしてあと処理を行い、白色粉体状のポリマーを得た。
用いたモノマー総量に対する重合収率は、99.0%で
あった。このポリマーのGPC分析を行った所、Mn=
5500、Mw/Mn=1.13の単分散ポリマーであ
った。つぎに、得られたポリマー10gをエタノールに
溶解して、濃硫酸0.5gを加えて60℃で3時間反応
を行った後、反応液を大量の水中に投入してポリマーを
析出させ、濾過、洗浄後、60℃で5時間乾燥して白色
粉体状のポリマー 7.9gを得た。この反応におい
て、反応前後におけるポリマーのIR及びNMRを比較
した。 IR:反応後、890cm-1の吸収が消失し、新たに3
300cm-1付近にブロードな吸収が観察された。 NMR:反応後、29ppm付近のピークが消失、27
ppm付近のピーク及び50ppm付近のポリメチルメ
タクリレートのメチル基由来のピークは、ベンゼン環カ
ーボンに対する面積比が前後において変化していなかっ
た。更に、生成したポリマーの酸価は、2.8KOHm
g/gであった。また、生成したポリマーについてGP
Cを測定した所、Mn=4300、Mw/Mn=1.1
3であり、NMRにより測定した共重合比率は、m/n
/p=20/16/2であった。以上の事から、共重合
及びその後の脱離反応は設定通り行われ、p−ヒドロキ
シスチレンセグメントと、メチルメタクリレートセグメ
ントと、t−BMAセグメントを主構成単位とし、末端
にトリシクロデカニルメタクリレートセグメントを有す
る狭分散ブロック共重合体が生成した事を確認した。
Example 2 In a nitrogen atmosphere, NBL was added to 1500 g of THF.
50 mmol was added, and 1 mol of PTBST was added dropwise over 1 hour while maintaining the temperature at -40 ° C with stirring, and the reaction was further continued for 1 hour, and the completion of the reaction was confirmed by GC. The PTBST polymer at this stage has Mn = 3500, Mw /
It was a monodisperse polymer with Mn = 1.10. Next, 0.3 mol of methyl methacrylate, t-BMA were added to the reaction system.
0.3 mol of the mixture was added dropwise over 1 hour.
The reaction was continued for a while, and the completion of the reaction was confirmed by GC. The polymer at this stage has Mn = 5000, Mw / Mn = 1.1
3 was a monodispersed polymer. Next, 0.1 mol of tricyclodecanyl methacrylate was added dropwise to the reaction system over 30 minutes, and the reaction was continued for 1 hour, and the completion of the reaction was confirmed by GC. Next, the reaction solution was prepared in Example. Post-treatment was carried out in the same manner as in Example 1 to obtain a white powdery polymer.
The polymerization yield based on the total amount of the monomers used was 99.0%. GPC analysis of this polymer showed that Mn =
It was a monodisperse polymer having an Mw / Mn of 1.500 and Mw / Mn = 1.13. Next, 10 g of the obtained polymer was dissolved in ethanol, 0.5 g of concentrated sulfuric acid was added, and the reaction was carried out at 60 ° C. for 3 hours. Then, the reaction solution was poured into a large amount of water to precipitate the polymer, followed by filtration. After washing and drying at 60 ° C. for 5 hours, 7.9 g of a white powdery polymer was obtained. In this reaction, the IR and NMR of the polymer before and after the reaction were compared. IR: After the reaction, the absorption at 890 cm -1 disappeared, and 3
Broad absorption was observed at around 300 cm -1 . NMR: after the reaction, a peak around 29 ppm disappeared, 27
In the peak around ppm and the peak around 50 ppm derived from the methyl group of polymethyl methacrylate, the area ratio to benzene ring carbon did not change before and after. Further, the acid value of the produced polymer is 2.8 KOHm
g / g. In addition, GP
When C was measured, Mn = 4300, Mw / Mn = 1.1.
3, and the copolymerization ratio measured by NMR was m / n
/ P = 20/16/2. From the above, the copolymerization and the subsequent elimination reaction are carried out as set, and a p-hydroxystyrene segment, a methyl methacrylate segment, and a t-BMA segment are used as main constitutional units, and a tricyclodecanyl methacrylate segment is added to a terminal. It was confirmed that a narrow-dispersion block copolymer having the same was produced.

【0029】実施例3 窒素雰囲気下において、THF 2500g中に、ナト
リウム40ミリモルを含むナトリウム−ケロシン分散体
加え、攪拌下、−60℃に保持しながら、p−tert
−ブトキシ−α−メチルスチレン(以下、PTBMST
と略す)1モルとスチレン 0.2モルとの混合物を1
時間かけて滴下、更に1時間反応を継続して、GCによ
り反応完結を確認した。この段階でのポリマーは、Mn
=11500、Mw/Mn=1.22の単分散ポリマー
であった。ついで、反応系に、テトラヒドロピラニルメ
タクリレート1モルを1時間かけて滴下し、更に反応を
1時間継続して、GCにより反応完結を確認した。この
段階でのポリマーは、Mn=21000、Mw/Mn=
1.25の単分散ポリマーであった。ついで、反応系
に、ジシクロペンテニルメタクリレート0.1モルを3
0分かけて滴下、更に1時間反応を継続し、GCにより
反応完結を確認した。つぎに、反応液を実施例.1にお
けると同様にして後処理を行い、白色粉体状のポリマー
を得た。用いたモノマー総量に対する重合収率は、9
8.7%であった。このポリマーのGPC分析を行った
所、Mn=22000、Mw/Mn=1.25の単分散
ポリマーであった。つぎに、得られたポリマー10gを
エタノール/トルエン=3/1(重量比)の混合溶媒に
溶解して20%溶液とし、濃塩酸3gを加えて70℃で
3時間反応を行った後、反応液を大量の水中に投入して
ポリマーを析出させ、濾過、洗浄後、60℃で5時間乾
燥して白色粉体状のポリマー8.6gを得た。この反応
において、反応前後におけるポリマーのIR及びNMR
を測定、比較した。その結果、IRにおいて、890c
-1の吸収が消失し、あらたに3300cm-1付近にブ
ロードな吸収が観察され、NMRにおいて29ppm付
近のピークが消失している事が確認された。更に、生成
したポリマーの酸価は、2.3KOHmg/gであっ
た。また、生成したポリマーについてGPCを測定した
所、Mn=19200、Mw/Mn=1.25の単分散
ポリマーであり、NMRにより測定した共重合比率は、
m/n/p= 60/50/5であった。以上の事か
ら、共重合及びその後の脱離反応は設定通り行われ、p
−ヒドロキシ−α−メチルスチレン−スチレンセグメン
トと、テトラヒドロピラニルメタクリレートセグメント
とを主構成単位とし、末端にジシクロペンテニルメタク
リレートセグメントを有する狭分散ブロック共重合体が
生成した事を確認した。
Example 3 In a nitrogen atmosphere, a sodium-kerosene dispersion containing 40 mmol of sodium in 2500 g of THF was added, and the mixture was stirred at -60 ° C. while stirring at a temperature of p-tert.
-Butoxy-α-methylstyrene (hereinafter referred to as PTBMST)
A mixture of 1 mol and 0.2 mol of styrene is
The reaction was continued dropwise for 1 hour, and the reaction was completed by GC. The polymer at this stage is Mn
= 11500 and Mw / Mn = 1.22. Then, 1 mol of tetrahydropyranyl methacrylate was added dropwise to the reaction system over 1 hour, the reaction was further continued for 1 hour, and completion of the reaction was confirmed by GC. The polymer at this stage has Mn = 21000, Mw / Mn =
1.25 was a monodispersed polymer. Then, 0.1 mol of dicyclopentenyl methacrylate was added to the reaction system.
The reaction was added dropwise over 0 minutes, and the reaction was continued for another hour, and the completion of the reaction was confirmed by GC. Next, the reaction solution was prepared in Example. Post-treatment was carried out in the same manner as in Example 1 to obtain a white powdery polymer. The polymerization yield based on the total amount of the monomers used was 9
It was 8.7%. GPC analysis of this polymer showed a monodispersed polymer with Mn = 22000 and Mw / Mn = 1.25. Next, 10 g of the obtained polymer was dissolved in a mixed solvent of ethanol / toluene = 3/1 (weight ratio) to make a 20% solution, 3 g of concentrated hydrochloric acid was added, and the mixture was reacted at 70 ° C. for 3 hours. The liquid was poured into a large amount of water to precipitate a polymer, which was filtered, washed, and dried at 60 ° C. for 5 hours to obtain 8.6 g of a white powdery polymer. In this reaction, the IR and NMR of the polymer before and after the reaction
Were measured and compared. As a result, in the IR, 890c
The absorption at m -1 disappeared, a broad absorption was newly observed around 3300 cm -1 , and it was confirmed that the peak around 29 ppm disappeared in NMR. Further, the acid value of the produced polymer was 2.3 KOHmg / g. When GPC was measured for the produced polymer, it was a monodisperse polymer having Mn = 19,200 and Mw / Mn = 1.25, and the copolymerization ratio measured by NMR was:
m / n / p = 60/50/5. From the above, the copolymerization and the subsequent elimination reaction were carried out as set, and p
It was confirmed that a narrow-dispersion block copolymer having -hydroxy-α-methylstyrene-styrene segment and tetrahydropyranyl methacrylate segment as main constituent units and having a dicyclopentenyl methacrylate segment at a terminal was produced.

【0030】比較例1 実施例1において、第3番目に加えた共重合成分,イソ
ボルニルメタクリレートを用いない他は、実施例1と同
様に共重合〜後処理を行い、Mn=9300、Mw/M
n=1.11の単分散コポリマーを得た。得られたポリ
マー10gをエタノールに溶解して実施例1におけると
同様にして脱離反応〜後処理を行い、白色粉体状のポリ
マー6.4gを得た。この反応において、反応前後にお
けるポリマーのIR及びNMRを測定した。 IR:890cm-1の吸収が消失し、あらたに3300
cm-1付近にブロードな吸収が観察された。 NMR:反応後、29ppm付近のピークが消失し、2
7ppm付近のピークは、ベンゼン環カーボンに対する
面積比が反応前の15%まで減少していた。又、生成し
たポリマーの酸価を測定した所、230KOHmg/g
であった。また、生成したポリマーについてGPCを測
定した所、Mn=6200、Mw/Mn=1.12の単
分散ポリマーであった。以上の事から、共重合反応は設
定通り進行し、脱離反応時、ポリPTBSTセグメント
のブトキシ基は予定通り完全に脱離したが、一方では、
ポリt−BMAのエステル部分も殆どが加水分解され、
設定通りのp−ヒドロキシスチレンセグメントと、t−
BMAセグメントとからなるブロック共重合体は得られ
なかった。
Comparative Example 1 Copolymerization and post-treatment were performed in the same manner as in Example 1 except that the third added copolymer component, isobornyl methacrylate, was not used, and Mn = 9300, Mw / M
A monodisperse copolymer with n = 1.11 was obtained. 10 g of the obtained polymer was dissolved in ethanol, and the elimination reaction to the post-treatment were performed in the same manner as in Example 1 to obtain 6.4 g of a white powdery polymer. In this reaction, IR and NMR of the polymer before and after the reaction were measured. IR: absorption at 890 cm -1 disappeared, and new
Broad absorption was observed around cm -1 . NMR: After the reaction, a peak around 29 ppm disappeared and 2
In the peak around 7 ppm, the area ratio to benzene ring carbon was reduced to 15% before the reaction. When the acid value of the produced polymer was measured, it was found to be 230 KOHmg / g.
Met. GPC measurement of the resulting polymer showed that the polymer was a monodisperse polymer having Mn = 6200 and Mw / Mn = 1.12. From the above, the copolymerization reaction proceeded as set, and at the time of the elimination reaction, the butoxy group of the polyPTBST segment was completely eliminated as planned.
Most of the ester portion of poly-t-BMA is also hydrolyzed,
P-hydroxystyrene segment as set, t-
No block copolymer consisting of BMA segments was obtained.

【0031】比較例2 実施例3において、第3番目に加えた成分,ジシクロペ
ンテニルメタクリレートを用いない他は、実施例3と同
様に共重合〜後処理を行い、Mn=21500、Mw/
Mn=1.25の単分散ポリマーを得た。得られたポリ
マーを実施例3と同様にして脱離反応〜後処理を行い、
白色粉体状のポリマー6.2gを得た。この反応におい
て、反応前後におけるポリマーのIRを測定した所、8
90cm-1の吸収が消失し、あらたに3300cm-1
近にブロードな吸収が観察され、また、1725cm-1
のエステル由来の吸収が著しく減少してショルダーとな
り、あらたに1700cm-1にカルボン酸由来の吸収が
観察された。また、生成したポリマーの酸価を測定した
所、218KOHmg/gであった。また、生成したポ
リマーについてGPCを測定した所、 Mn=1290
0、Mw/Mn=1.25の単分散ポリマーであった。
以上の事から、共重合反応は設定通りに進行し、脱離反
応において、ポリPTBMSTセグメントのブトキシ基
は予定通り完全に脱離したが、一方では、ポリ−テトラ
ヒドロピラニルメタクリレートセグメントのエステル部
分も殆どが加水分解され、設定通りのp−ヒドロキシ−
α−メチルスチレン−スチレンセグメントと、テトラヒ
ドロピラニルメタクリレートセグメントとからなるブロ
ック共重合体は得られなかった。
Comparative Example 2 Copolymerization and post-treatment were carried out in the same manner as in Example 3 except that the third added component, dicyclopentenyl methacrylate, was not used, and Mn = 21500, Mw /
A monodisperse polymer with Mn = 1.25 was obtained. The obtained polymer was subjected to elimination reaction to post-treatment in the same manner as in Example 3,
6.2 g of a white powdery polymer was obtained. In this reaction, the IR of the polymer before and after the reaction was measured.
90cm absorption of -1 disappeared, broad absorption was observed newly around 3300 cm -1, also, 1725 cm -1
The absorption derived from the ester significantly decreased and became a shoulder, and the absorption derived from a carboxylic acid was newly observed at 1700 cm -1 . When the acid value of the produced polymer was measured, it was 218 KOHmg / g. When GPC was measured for the produced polymer, Mn = 1290
0, Mw / Mn = 1.25.
From the above, the copolymerization reaction proceeded as set, and in the elimination reaction, the butoxy group of the polyPTBMST segment was completely eliminated as expected, while the ester portion of the poly-tetrahydropyranyl methacrylate segment was also eliminated. Most are hydrolyzed and p-hydroxy-
No block copolymer comprising an α-methylstyrene-styrene segment and a tetrahydropyranyl methacrylate segment was obtained.

【0032】[0032]

【発明の効果】単峰性で分子量分布が狭く、且つ、構造
の制御された、アルケニルフェノールと、PAGにより
用意に分解してカルボン酸を生成する(メタ)アクリル
酸エステル類との共重合体であり、エキシマレーザーレ
ジスト材料としての利用が期待される狭分散アルケニル
フェノール系共重合体を得ることが出来た。
EFFECT OF THE INVENTION Copolymer of alkenylphenol having a monomodal, narrow molecular weight distribution and controlled structure, and a (meth) acrylate ester which is easily decomposed by PAG to form a carboxylic acid Thus, a narrowly dispersed alkenylphenol copolymer expected to be used as an excimer laser resist material could be obtained.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 松本 仁志 千葉県市原市五井南海岸12−54 日本曹達 株式会社機能製品研究所内 (72)発明者 清水 豊 千葉県市原市五井南海岸12−54 日本曹達 株式会社機能製品研究所内 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Hitoshi Matsumoto 12-54, Goi-minamikaigan, Ichihara-shi, Chiba Japan Soda Co., Ltd. Soda Co., Ltd.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 一般式(I)、一般式(II)及び一般
式(III) 【化1】 【化2】 【化3】 (R1 、R2 、R3 は、各々独立に水素原子又はメチル
基を表し、R4 は、置換基を有してもよい炭素数が1〜
12のアルキル基、もしくはヘテロ環基を表し、R
5 は、置換基を有してもよい炭素数が7〜15の脂環族
基または、該脂環族基を有するアルキル基を表す。)で
表される構造単位からなり、数平均分子量が1,000
〜50,000、数平均分子量(Mn)と重量平均分子
量(Mw)との比がMw/Mn=1.00〜1.50で
かつ、一般式(I)の構造単位の繰り返しと〔一般式
(II)の構造単位の繰り返し+一般式(III)の構
造単位の繰り返し〕との比が1/9〜9/1である狭分
散アルケニルフェノール系共重合体。
1. A compound of the general formula (I), the general formula (II) and the general formula (III) Embedded image Embedded image (R 1 , R 2 , and R 3 each independently represent a hydrogen atom or a methyl group, and R 4 has 1 to 5 carbon atoms which may have a substituent.
12 represents an alkyl group or a heterocyclic group;
5 represents an alicyclic group having 7 to 15 carbon atoms which may have a substituent or an alkyl group having the alicyclic group. ) Having a number average molecular weight of 1,000
~ 50,000, the ratio of the number average molecular weight (Mn) to the weight average molecular weight (Mw) is Mw / Mn = 1.00 to 1.50, and repeating the structural unit of the general formula (I) [General formula (II) The repeating unit of the structural unit of formula (III) + the repeating unit of the general formula (III)] is 1/9 to 9/1.
【請求項2】 請求項1記載の共重合体がブロック共重
合体である請求項1記載の狭分散アルケニルフェノール
系共重合体。
2. The narrowly dispersed alkenylphenol copolymer according to claim 1, wherein the copolymer according to claim 1 is a block copolymer.
【請求項3】 アルカリ金属又は有機アルカリ金属を重
合開始剤とするアニオン重合法により、一般式(IV) 【化4】 (R1 は、水素原子又はメチル基を表し、R6 は、炭素
数が1〜6のアルキル基を表す。)で表されるフェノー
ル残基の水酸基が飽和脂肪族系保護基により保護された
化合物を単独重合あるいはビニル芳香族化合物とを共重
合し、次いで一般式(V) 【化5】 (R2 は、各々独立に水素原子又はメチル基を表し、R
4 は、置換基を有してもよい炭素数が1〜12のアルキ
ル基、またはヘテロ環基を表す。)で表される(メタ)
アクリル酸アルキルエステル類とブロック共重合を行
い、次いで、一般式(VI) 【化6】 (R3 は、各々独立に水素原子又はメチル基を表し、R
5 は、置換基を有してもよい炭素数が7〜15の脂環族
基または、該脂環族基を有するアルキル基を表す。)で
表される(メタ)アクリル酸エステル類と共重合を行っ
た後、一般式(IV)の飽和脂肪族系保護基を脱離させ
ることを特徴とする請求項1記載の狭分散アルケニルフ
ェノール系ブロック共重合体の製造方法。
3. An anion polymerization method using an alkali metal or an organic alkali metal as a polymerization initiator by the general formula (IV): (R 1 represents a hydrogen atom or a methyl group, and R 6 represents an alkyl group having 1 to 6 carbon atoms.) The hydroxyl group of the phenol residue represented by the above formula is protected by a saturated aliphatic protecting group. The compound is homopolymerized or copolymerized with a vinyl aromatic compound, and then the compound of the general formula (V) (R 2 each independently represents a hydrogen atom or a methyl group;
4 represents an alkyl group having 1 to 12 carbon atoms which may have a substituent, or a heterocyclic group. ) (Meta)
Block copolymerization with an acrylic acid alkyl ester is performed, and then the compound represented by the general formula (VI): (R 3 each independently represents a hydrogen atom or a methyl group;
5 represents an alicyclic group having 7 to 15 carbon atoms which may have a substituent or an alkyl group having the alicyclic group. 2. The narrowly dispersed alkenyl phenol according to claim 1, wherein after the copolymerization with the (meth) acrylic acid ester represented by the formula (1), the saturated aliphatic protecting group of the general formula (IV) is eliminated. A method for producing a block copolymer.
JP34455696A 1996-12-09 1996-12-09 Narrowly dispersed alkenylphenol copolymer and process for producing the same Expired - Fee Related JP3711550B2 (en)

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JP2002047322A (en) * 1999-09-08 2002-02-12 Nippon Soda Co Ltd A-b-a type alkenyl phenol copolymer
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JP2002539473A (en) * 1999-03-12 2002-11-19 アーチ・スペシャルティ・ケミカルズ・インコーポレイテッド Hydroxy-amino thermoset primer for 193NM lithography
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7217497B2 (en) 1999-03-12 2007-05-15 Arch Specialty Chemicals, Inc. Hydroxy-amino thermally cured undercoat for 193 nm lithography
JP2002539473A (en) * 1999-03-12 2002-11-19 アーチ・スペシャルティ・ケミカルズ・インコーポレイテッド Hydroxy-amino thermoset primer for 193NM lithography
EP1211270A4 (en) * 1999-08-31 2004-09-22 Nippon Soda Co Star block copolymer
EP1211270A1 (en) * 1999-08-31 2002-06-05 Nippon Soda Co., Ltd. Star block copolymer
US6743861B1 (en) 1999-09-03 2004-06-01 Nippon Soda Co. Ltd. Alkenylphenol copolymer and process for producing the same
WO2001018083A1 (en) * 1999-09-03 2001-03-15 Nippon Soda Co., Ltd. Alkenylphenol copolymer and process for producing the same
JP4627360B2 (en) * 1999-09-08 2011-02-09 日本曹達株式会社 ABA type alkenylphenol copolymer
JP2002047322A (en) * 1999-09-08 2002-02-12 Nippon Soda Co Ltd A-b-a type alkenyl phenol copolymer
WO2001018084A1 (en) * 1999-09-08 2001-03-15 Nippon Soda Co., Ltd. A-b-a type alkenylphenol copolymer
US6797828B1 (en) 1999-09-20 2004-09-28 Nippon Soda Co. Ltd. Processes for the preparation of 4(5)-amino-5(4)-carboxamidoimidazoles and intermediates thereof
JP2007246600A (en) * 2006-03-14 2007-09-27 Shin Etsu Chem Co Ltd Self-organizing polymeric membrane material, self-organizing pattern, and method for forming pattern
WO2011016226A1 (en) * 2009-08-04 2011-02-10 日本曹達株式会社 High-molecular-weight copolymer
CN102471410A (en) * 2009-08-04 2012-05-23 日本曹达株式会社 High-molecular-weight copolymer
US8729187B2 (en) 2009-08-04 2014-05-20 Nippon Soda Co., Ltd. High-molecular-weight copolymer
JP5564047B2 (en) * 2009-08-04 2014-07-30 日本曹達株式会社 High molecular weight copolymer
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JP2017190393A (en) * 2016-04-13 2017-10-19 Dicグラフィックス株式会社 Varnish for printing ink, printing ink, and printed matter

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