JPH10167381A - Container for high purity chemical liquid - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent a chem. liquid from being contaminated and to prevent the chem. liquid from leaking out caused by breakage of a liq. delivering hose by connecting the liq. delivering hose used when a high purity chem. liquid is delivered from a large scale container with a swivel pipe joint. SOLUTION: A tank truck, etc., are used for transportation of a high purity chem. liquid used for manufacturing a semiconductor and a liq. crystal displaying device, e.g. high purity hydrogen oxide, high purity ammonia water, etc., and when the chem. liquid is delivered from a large scale container 1 for it to a storing installation, a pipeline 2 is connected with the container 1 and a swivel pipe joint 3 is connected between the pipeline 2 and a liq. delivering hose 4. In addition, delivering the liquid is performed from the pipeline 2 through the swivel pipe joint 3 and the liq. delivering hose 4 by connecting a connecting tool of the end of the liq. delivering hose 4 with an inlet of the chem. liquid of the storing installation and pressing the inside of the large scale container 1. As the swivel pipe joint 3, e.g. fluorinated resins such as polytetrafluoroethylene and polychlorotrifluoroethylene are suitably used.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chemical liquid container and accessories for the electronic industry used in the semiconductor manufacturing field.

[0002]

2. Description of the Related Art In the field of the electronics industry, various high-purity chemicals are used for manufacturing semiconductors and liquid crystal display devices.
For example, high-purity hydrogen peroxide solution, high-purity ammonia water, high-purity tetramethylammonium hydroxide aqueous solution, high-purity sulfuric acid, high-purity hydrofluoric acid, and the like. The presence of a trace amount of impurities or fine particles in these chemicals adversely affects the device characteristics of semiconductor elements and liquid crystal display devices, and therefore, the chemicals must be of high purity. The purity required is extremely high, for example, 1 ppb or less for all metals and 100 or less foreign substances having a size of 0.2 μm or more. Therefore, contamination associated with operations such as liquid feeding, elution of impurities from container materials and dust generation are strictly controlled.

In general, a tank lorry or the like is used to transport a large amount of chemicals, and such a large-sized container for chemicals requires additional equipment for sending liquids as compared with a small container that can be handled by hand. .

[0004] As a method of sending a chemical solution from a large container to a storage facility, there is a method in which the container and the storage facility are connected by a delivery hose to perform the solution delivery. One end of the liquid supply hose is integrated with the container that is connected to the container piping in advance, and the other end is connected with a connecting part such as a one-touch coupler or screw, and is connected to the chemical liquid inlet of the storage facility . According to this method, the connection operation for liquid feeding can be performed at only one place between the liquid sending hose and the chemical solution receiving port, and by providing a joint box such as a clean booth covering the portion, the contamination of the chemical solution during the connection operation is prevented. I can do things.

[0005] For these reasons, large containers in which the piping of the container and the hose for feeding liquid are integrally used are widely used. However, since the container and the hose for feeding liquid are connected, the degree of freedom of the hose for feeding liquid is limited. Limited. The hose must be bent and connected depending on the position of the chemical solution inlet of the storage facility.
For this reason, when it is necessary to reduce the bending radius of the liquid sending hose and connect it, an excessive force is applied to the liquid sending hose.
As a result, dust and elution of impurities from the liquid supply hose occur, and as a result, the chemical liquid is contaminated, and high purity cannot be maintained in many cases. In addition, breakage sometimes occurs due to bending, and in this case, contamination of the chemical solution or leakage of the chemical solution due to impurities from the outside occurs, which has been a serious problem.

[0006]

SUMMARY OF THE INVENTION An object of the present invention is to prevent a chemical solution from being contaminated by preventing an excessive force from being applied to a liquid sending hose when a high-purity chemical solution is sent from a large container.
Another object of the present invention is to provide a high-purity chemical solution container capable of preventing leakage of a chemical solution due to breakage of a liquid supply hose.

[0007]

Means for Solving the Problems As a result of the intensive efforts of the present inventors, the present invention has been attained by using a container to which a swivel fitting is connected as a container for a high-purity chemical solution that does not exert an excessive force on a liquid supply hose. And completed the present invention. That is, the present invention relates to a high-purity chemical liquid container to which a liquid sending hose is connected by a swivel fitting.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail.
1 and 2 show an embodiment of the present invention. A pipe 2 is connected to the vessel 1, and a swivel fitting 3 is attached between the pipe 2 and the liquid sending hose 4.
Until it has an integral structure. Since the swivel fitting 3 connected to the pipe 2 can freely select the angle of the secondary side by the rotating structure, the direction of the liquid supply hose 4 installed on the secondary side of the swivel fitting 3 is freely adjusted. I can do it.
Therefore, it is not necessary to bend the liquid sending hose 4 itself to change the direction to the direction of the chemical liquid inlet of the storage facility, so that an excessive force is not applied to the liquid sending hose 4.

[0009] The liquid is sent to the storage facility through a swivel joint 3 and a liquid feed hose 4 from the pipe 2 by connecting the connector at the end of the liquid feed hose 4 to the chemical solution receiving port of the storage facility and then pressurizing the large vessel 1. Done. It is preferable that the swivel fitting 3 is attached at the end of the liquid supply hose 4 on the container side, and that the swivel fitting 3 is freely swung in the direction of the inlet of the storage facility.

As the material of the swivel fitting in the present invention, a material suitable for the high-purity chemical used is used.
For example, fluorine resins such as polytetrafluoroethylene (PTFE), polychlorotrifluoroethylene (PCTFE), and tetrafluoroethylene / perfluoroalkylvinyl ether copolymer (PFA) are preferably used.

According to the present invention, breakage of the liquid supply hose 4 due to bending is eliminated. Further, since an excessive force is not applied to the liquid sending hose 4, the purity of the chemical solution does not decrease. FIG.
And in FIG. 2, the container is mounted on a tank lorry,
The shape of the container is not limited to the shapes shown in FIGS. 1 and 2 as long as the requirements of the present invention are satisfied.

[0012]

According to the container of the present invention, when the high-purity chemical in the container is sent to the storage facility, the container does not bend due to excessive force, so that the high-purity chemical can be maintained and the accident such as leakage of the chemical can be prevented. can avoid.

[Brief description of the drawings]

FIG. 1 is a side view of a container of the present invention (when a liquid supply hose 4 is stored).

FIG. 2 is a top view of the container of the present invention (when the liquid supply hose 4 is used).

[Explanation of symbols]

 1: Container body 2: Piping 3: Swivel fitting 4: Hose for liquid feeding

Claims (3)

[Claims] 1. A high-purity chemical liquid container, wherein a liquid sending hose is connected by a swivel fitting. 2. The high-purity chemical liquid container according to claim 1, wherein the material of the swivel fitting is a fluororesin. 3. A tank lorry on which the high-purity chemical solution container according to claim 1 is mounted.