JPH10153672A - Height and inclination positioning mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform a fine adjustment and to maintain the adjustment value for a long time by changing the amounts of screwing three adjustment screws having three contacts, adjust the height and inclination, eliminating and fixing the backlash of the adjustment screws, and preventing an unreasonable amount of force such as bending force from being applied to a base. SOLUTION: An external thread 6-2 is rotated so that a straight line part 15-16 of a table upper surface 2 in parallel with a straight line for connecting two through threaded holes 5-1 for adjustment is at a specific same height through the center of three through screw holes for adjustment, thus adjusting height and inclination. After that, by rotating afixed bolt 7 in the clamping direction of a screw, a lower screw inclined surface 19 of an external thread part 6 pushes an upper screw inclined surface 20 of a through screw hole 5, thus pushing down a base 4 at a part to be adjusted. The base 4 at a part to be adjusted pushes an upper side screw inclined surface 22 of the external thread 6 in cylindrical shape by a lower screw inclined surface 21 of a through threaded hole 5 for adjustment and a base contact surface 23 of the external thread 6 in cylindrical shape is pushed and fixed onto the upper surface of a base 8. A member 13 between slit-shaped cut-outs 11 and 12 is deflected.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mechanism for adjusting the height and inclination of a work or a detector, an optical component, etc., and a positioning mechanism used in a precision dimension / shape measuring device, an optical application device and the like.

[0002]

2. Description of the Related Art As a conventional height and tilt positioning mechanism, there is a method shown in FIG. 4 for adjusting and fixing the parallelism of a table on the upper surface of a .theta. . V-groove above the middle block 30 in FIG.
A fulcrum pin 32 is inserted into the fulcrum pin 31 and a V-groove 33 is
Is placed on the base 34 to be adjusted, and
While measuring the parallelism of the table upper surface 37 of the stage 36, 2
The tilt around the fulcrum pin 32 is adjusted with the bolts 38, and the bolts 38 on both sides are properly tightened and fixed in a parallel state. Further, the intermediate block 30 is provided with a downward V-groove 39 in a direction intersecting 90 degrees with the above-described V-groove 31, and two fulcrum pins 40 are also inserted therein, and the V-groove 42 of the base 35 is attached thereto. While maintaining the parallelism of the upper surface 37 with the base 35 in the same manner as the previous time, adjust the inclination with the bolts 41 on both sides of the fulcrum pin 40, and tighten and fix the bolts 40 on both sides in the parallel state .

[0003]

In the above-mentioned prior art, since the adjusting mechanism is arranged in two stages, the apparatus becomes large, the number of parts is large, and the cost is high. In addition, when the screw is tightened strongly when fixing after adjustment, the base is bent, so that fine positioning is difficult. Further, there is a problem that it is difficult to maintain the adjusted accuracy for a long period of time because strong fixing cannot be performed. An object of the present invention is to provide a mechanism that eliminates these disadvantages, has a small and simple structure, allows fine and precise adjustment, and maintains the adjustment value for a long period of time.

[0004]

According to the present invention, in order to achieve the above object, the height and inclination are adjusted by changing the screwing amounts of three adjusting screws for three-point contact. Adjustment is performed, and positioning after adjustment is performed by removing the backlash of the adjustment screw and fixing it, and by preventing excessive force such as bending force on the base, so that it can be stably fastened while maintaining adjustment accuracy. It was made.

[0005]

BRIEF DESCRIPTION OF THE DRAWINGS FIG.
This will be described with reference to FIGS. 2 is a plan view of one embodiment of the present invention, FIG. 3 is a side sectional view of FIG. 2, and FIG. 1 is a partially enlarged view of FIG. 1 to 3, a table 3 having a table upper surface 2 for holding a workpiece by suction is provided above the θ stage 1. The θ stage 1 is mounted on the base 4 to be adjusted, and the base 4
A plurality of through screw holes 5 for adjustment are provided. A cylindrical male screw 6 is incorporated in the adjusting through screw hole 5, and a fixing bolt 7 is screwed into a fixing screw hole 9 of the base 8 therethrough. The cylindrical male screw 6 has a wrench 10 at the head, and a slit-shaped notch 11 substantially at the center of the cylindrical male screw 6 in the axial direction. Same-shaped slit notch 12 at symmetrical position
The thickness t of the member 13 between the slit-shaped notches 11 and 12 is as thin as 1 mm, and the rigidity is high in the axial rotation direction of the male screw 6 but rigid in the axial direction. Is low. At this time, the thickness of the adjusted portion base 4 is 15 mm.
It is. In order to perform height and tilt adjustment with this mechanism, the table top surface 2 that passes through the center of the three adjustment through-screw holes 5 and is parallel to the straight line that connects the two adjustment through-screw holes 5-1, The male screw 6-1 is rotated and adjusted so that the straight portions 15-16 have the same predetermined height. Next, a male screw is inserted so that the height of the linear portion 17-18 of the table upper surface 2 is the same as the linear portion 15-16, passing through the center of the three adjusting through-holes 5 and orthogonal to the linear portion 15-16. Turn 6-2 to adjust. When the fixing bolt 7 is rotated in the screw tightening direction after the height and the inclination can be adjusted in this way, the lower screw slope 19 of the male screw part 6 pushes the upper screw slope 20 of the through screw hole 5 to move the adjusted part base 4. Push down. Adjusted part base 4 is now the lower screw slope of through screw hole 5 for adjustment
The upper thread slope 22 of the cylindrical male screw 6 is pushed by 21, and the base contact surface 23 of the cylindrical male screw 6 is pressed against and fixed to the upper surface of the base 8. At this time, since the member 13 between the slit-shaped notches 11 and 12 forms and bends the cylindrical male screw 6, the slopes 19 and 20 and 21 and 22 are strongly pressed, and the axial force of the fixing bolt 7 is affected. The adjusting portion base 4 is placed on the base contact surface 23, and the adjusted portion base 4 is firmly positioned and fixed. The slit-shaped notches 11 and 12 do not have to be at the axial center of the male screw 6, the shape of the slit-shaped notches 11 and 12 is arbitrary, and the number of notches may be plural instead of one. In FIG. 1 illustrating the above embodiment, the male screw 6 has a larger screw thread, a larger screw pitch, and the like than the screw on the adjusted part base 4 side than the screw on the fixing bolt 7 side, but may be the same or smaller. . The fixing bolt 7 may be fixed by other means such as a hexagon wrench, a Phillips screwdriver, or a flathead screwdriver other than the spanner. In addition, the position of the adjusting through screw hole 5 may be any distance as long as the height and the tilt position can be adjusted, and may be, for example, the same circular shape at a pitch of 120 degrees, and conversely, the same circular shape may have any shape The center of rotation of the table 3 and the center of gravity of the adjusting through screw hole 5 need not be the same or symmetric. When tightening the fixing bolt 7, slit-shaped notch 1
Because the member 13 between 1 and 12 bends, the initial adjustment value is 20 to 3
It is necessary to readjust it because it falls by 0 μm, but this can be easily adjusted by measuring the amount of displacement once the fixing bolt 7 is tightened.

[0006]

As described above, according to the present invention, three through-threaded holes are drilled in the member to be adjusted, and a cylindrical male screw having a slit-like notch is screwed into the hole and fixed with a bolt. The height and inclination can be easily adjusted around 1μm with just
Fixing after adjustment can be performed firmly, and there is no deterioration in adjustment accuracy. Therefore, fine adjustment can be easily performed with high accuracy, there is no change with time, and the structure is simple, so that the size is small and the cost is low.

[Brief description of the drawings]

FIG. 1 is an enlarged sectional view of one embodiment of the present invention.

FIG. 2 is a plan view of one embodiment of the present invention.

FIG. 3 is a side sectional view of FIG. 2;

FIG. 4 is a side sectional view for explaining a conventional example of technology.

[Explanation of symbols]

1: θ stage, 2: Table top, 3: Table,
4: Base to be adjusted, 5, 5-1 and 5-2: Through screw holes for adjustment, 6, 6-1 and 6-2: Male screw, 7: Fixing bolt,
8: Base, 9: Adjustment part fixing screw hole, 10: Wrench, 11: Slit notch, 12: Slit notch,
13: Member between slits 11 and 12, 14: Drive unit, 15
-16: Table top 2 parallel to the straight line that passes through the center of three adjustment through-holes 5 and connects two adjustment through-holes 5-1
17-18: The straight part of the table upper surface 2 which passes through the center of the three through-thread holes for adjustment 5 and is orthogonal to the straight line 15-16, 19: The lower screw slope of the male screw 6, 20: Upper screw slope of through screw hole 5, 21: Lower screw slope of through screw hole 5, 22: Upper screw slope of male screw 6, 23: Contact surface between male screw 6 and base 8, 30: Intermediate block, 31 : V groove (upper part of the intermediate block 30), 32: fulcrum pin, 33: V groove (θ
Stage base 34 lower part), 34: θ stage base,
35: Base, 36: θ stage, 37: Table top,
38: bolt, 39: V-groove (under the middle block 30), 4
0: fulcrum pin, 41: bolt, 42: V-groove (upper part of base 35).

Claims (1)

[Claims] 1. A base having three adjustment portion fixing screw holes, an adjustment portion base having three adjustment through screw holes, and a male threaded through the adjustment through screw holes. At the approximate center of the threaded part in the axial direction, two slit-shaped notches with a depth exceeding the axial center from the normal direction are provided in the axial direction at a distance greater than the slit width, and substantially axially symmetric, and a wrench on the head Consisting of three cylindrical male screws having a clasp, and three fixing bolts that penetrate through a cylindrical hole provided inside the cylindrical male screw and are screwed into the adjustment portion fixing screw holes. Height and tilt positioning mechanism.