JPH10140169A - Lubricant composition - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a semisolid lubricant compsn. which is easily cleaned because of its high compatibility with other lubricants, has a low vapor pressure, and is excellent in lubricity at high temps. in a high vacuum by incorporating tris(2-octyldodecyl)cyclopentane into the same. SOLUTION: Tris(2-octyldodecyl)cyclopentane (hereinafter abbreviated as TS) is a synthetic hydrocarbon oil having a pour point of -57 deg.C, a vapor pressure at 20 deg.C of 10<-12> Torr, and lubricating characteristics similar to those of a perfluoroalkyl ether and, exhibiting excellent lubricating characteristics esp. at high temps. in a high vacuum, is suitable for apparatuses, semiconductor devices, etc., used in the outer space. The semisolid lubricant compsn. is pref. prepd. by mixing TS with an additive in an amt. enough to convert TS into a semisolid; for instance, Ts is mixed with 1-30wt.% thickener (e.g. a metal soap) for a lubricating grease to give a grease or is mixed with 1-50wt.% solid lubricant (e.g. molybdenum disulfide) to give a compd.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lubricant composition, and more particularly to a lubricant composition under high temperature and high vacuum, for example, in space (space station) or semiconductor device (sputtering device).
The present invention relates to a semi-solid lubricant composition suitable for use in such applications.

[0002]

BACKGROUND OF THE INVENTION Lubricants used at high temperatures and under high vacuum include mineral oils, ester oils, polyalphaolefin oils,
PFAE with lower vapor pressure than phenyl ether oil etc.
(Perfluoroalkyl ether) as the base oil in many cases. However, lubricants based on PFAE cannot be mixed with other lubricants due to poor compatibility between PFAE and other lubricants. There is a problem that it must be used. Furthermore, PF
Lubricants based on AE also have the problem of poor lubricity and poor wear resistance.

[0003]

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a composition having excellent compatibility with other lubricants, low vapor pressure,
An object of the present invention is to provide a semi-solid lubricant composition which has excellent lubricity at high temperature and high vacuum and can efficiently act on a lubricated surface.

[0004]

SUMMARY OF THE INVENTION The present invention provides a tris (2
(Octyldodecyl) cyclopentane. The present invention further provides a semi-solid lubricant composition comprising a thickener or solid lubricant for lubricating grease and tris (2-octyldodecyl) cyclopentane.

[0005]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described in more detail. Tris (2-octyldodecyl) cyclopentane is a hydrocarbon having a pour point of −57 ° C. and a vapor pressure of 10 ⁻¹² Torr at 20 ° C., and is a synthetic oil having the same lubricating performance as PFAE. Tris (2-octyldodecyl) cyclopentane was supplied by NYELUBRICANTS from Nye Synthetic
It is sold under the trade name Oil 2001A or Pennzane SHF X2000. Japanese Patent Publication No. 8-2803 describes a method for producing synthetic oils such as tris (2-octyldodecyl) cyclopentane, and that these synthetic oils are excellent as lubricating substances.

According to the present invention, among the synthetic oils described in the above-mentioned publications, in particular, tris (2-octyldodecyl) cyclopentane has particularly excellent lubricating properties at high temperatures and high vacuums. The present invention has been found to be effective as a main component of a semi-solid lubricant composition suitable for use in a device used in space (space station) or a semiconductor device (sputtering device), and has completed the present invention. It is. The semi-solid lubricant composition of the present invention comprises tris (2-octyldodecyl) cyclopentane and an additive in an amount necessary to make the lubricant composition semi-solid, for example, a thickener for lubricating grease. Or it contains a solid lubricant. For example, it is preferable to add a thickening agent for lubricating grease to tris (2-octyldodecyl) cyclopentane to form a grease, or to add a solid lubricant to form a compound.

[0007] Examples of such thickeners include metal soaps, urea compounds, urethane compounds, bentonite, silica compounds and the like. Examples of the metallic soap include lithium soap such as lithium stearate and lithium 12-hydroxystearate, and calcium soap. The amount of the thickener used is an amount effective to make the lubricant composition semi-solid, and is 1 to the entire lubricant composition.
-30% by weight is suitable, and 1-20% by weight is more preferred. In addition, as a solid lubricant, molybdenum disulfide,
Examples thereof include organic molybdenum, graphite, polytetrafluoroethylene, and boron nitride. The amount of the solid lubricant used is an amount effective to make the lubricant composition semi-solid, and is suitably 1 to 50% by weight, and 3 to 40% by weight based on the entire lubricant composition. More preferred. The lubricant composition of the present invention may contain additives commonly used in ordinary lubricant compositions, such as antioxidants and rust inhibitors.
It is also possible to further improve the lubricating performance by adding other additives, but it is not preferable to add an additive accompanied by decomposition and reaction.

[0008]

Embodiments of the present invention will be described below. “Parts” indicates parts by weight. <Example 1> To 85 parts of Nye Synthetic Oil 2001A, 15 parts of lithium stearate was added, heated to 230 ° C, allowed to cool to room temperature, and then kneaded with a three-roll mill to obtain grease. The properties of this grease were as follows: Mixing consistency 280 Evaporation (100 ° C × 24H) 0.1% or less Applying this grease to an electron microscope (vacuum equipment) sample insertion jig and examining its lubrication performance, the lubrication is extremely good. No contamination in the cylinder was observed.
It can be seen that this lubricant composition is excellent in detergency since it is well dispersed in petroleum solvents. The compatibility with other lubricants was also examined. Table 1 shows the results.

<Example 2> Nye Synthetic Oil 2001A 9
To 10 parts, 10 parts of lithium 12-hydroxystearate was added, heated to 230 ° C., allowed to cool to room temperature, and kneaded with a three-stage roll mill to obtain grease. The properties of this grease were as follows: Mixing penetration 260 Evaporation (100 ° C × 24H) 0.1% or less This grease was applied to a sample insertion jig of an electron microscope (vacuum equipment), and its lubrication performance was examined. No contamination in the cylinder was observed.
It can be seen that this lubricant composition is excellent in detergency since it is well dispersed in petroleum solvents. The compatibility with other lubricants was also examined. Table 1 shows the results.

<Example 3> Nye Synthetic Oil 2001A 7
To 0 part, 30 parts of PTFE wax was added, and the mixture was stirred and kneaded with a three-stage roll mill to obtain a semi-solid lubricant. The properties of this semi-solid lubricant were as follows. Mixing penetration 310 Evaporation (100 ° C × 24H) 0.1% or less This semi-solid lubricant was applied to a sample insertion jig of an electron microscope (vacuum equipment) and its lubrication performance was examined. And no contamination in the lens barrel was observed. It can be seen that this lubricant composition is excellent in detergency since it is well dispersed in petroleum solvents. The compatibility with other lubricants was also examined. Table 1 shows the results.

Example 4 Nye Synthetic Oil 2001A 6
To 0 part, 40 parts of boron nitride was added, stirred, and kneaded with a three-stage roll mill to obtain a semi-solid lubricant. The properties of this semi-solid lubricant were as follows. Mixing consistency 415 Evaporation (100 ° C × 24H) 0.1% or less This semi-solid lubricant was applied to an electron microscope (vacuum equipment) sample insertion jig and its lubrication performance was examined. And no contamination in the lens barrel was observed. It can be seen that this lubricant composition is excellent in detergency since it is well dispersed in petroleum solvents. The compatibility with other lubricants was also examined. Table 1 shows the results.

[0012]

[Table 1] Table 1 Compatibility with other lubricants ─────────────────────────────────── Lubricant Composition Mineral oil ester Ether ether Silicone grease Grease Grease Example 1 ○ ○ ○ ○ Example 2 ○ ○ ○ ○ Example 3 ○ ○ ○ ○ Example 4 ○ ○ ○ ○ PFAE grease × × × × ○: Uniform ×: There is an uneven part

[0013]

The semisolid lubricant composition of the present invention is excellent in compatibility with other lubricants, so that it is easy to clean, has a low vapor pressure, and is lubricated at high temperature and high vacuum. Excellent in nature. For this reason, lubrication and sealing of high-vacuum equipment, especially of semiconductor manufacturing equipment that does not want to be contaminated, sealing, lubrication of various equipment in a clean room, sealing, lubrication under various high-temperature conditions, sealing, outer space (space station) Can be effectively used for lubrication, sealing, etc. of various facilities.

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁶ Identification code FI C10M 117: 02 115: 08 113: 10 113: 12) (C10M 169/04 105: 04 125: 22 139: 00 125: 02 147 : 02 125: 20) C10N 10:12 30:00 30:08 40:06 50:10

Claims (8)

[Claims] 1. A semi-solid lubricant composition containing tris (2-octyldodecyl) cyclopentane. 2. A semi-solid lubricant composition containing a thickener and tris (2-octyldodecyl) cyclopentane. 3. The thickener is at least one selected from the group consisting of metallic soaps, urea compounds, urethane compounds, bentonite and silica compounds.
The lubricant composition according to any one of the preceding claims. 4. The lubricant composition according to claim 2, which comprises 1 to 30% by weight of a thickener. 5. The lubricant composition according to claim 3, wherein the metallic soap is lithium soap or calcium soap. 6. A semi-solid lubricant composition containing a solid lubricant and tris (2-octyldodecyl) cyclopentane. 7. The lubricant composition according to claim 6, comprising 1 to 50% by weight of a solid lubricant. 8. The solid lubricant of at least one selected from the group consisting of molybdenum disulfide, organomolybdenum, graphite, polytetrafluoroethylene and boron nitride.
The lubricant composition according to claim 6 or 7, which is a seed.