JPH1012185A - Photomultiplier - Google Patents
PhotomultiplierInfo
- Publication number
- JPH1012185A JPH1012185A JP15847096A JP15847096A JPH1012185A JP H1012185 A JPH1012185 A JP H1012185A JP 15847096 A JP15847096 A JP 15847096A JP 15847096 A JP15847096 A JP 15847096A JP H1012185 A JPH1012185 A JP H1012185A
- Authority
- JP
- Japan
- Prior art keywords
- light receiving
- light
- photomultiplier
- flange
- receiving surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Measurement Of Radiation (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は光電子増倍管に関す
るものである。[0001] 1. Field of the Invention [0002] The present invention relates to a photomultiplier tube.
【0002】[0002]
【従来の技術】微弱光等を計測する光センサとしては、
いわゆるヘッドオン型光電子増倍管が従来から広く用い
られている。ヘッドオン型光電子増倍管は、円筒形の真
空容器の一端を受光面板としている。このようなヘッド
オン型光電子増倍管の真空容器はガラス管からなるもの
が一般的であるが、近年、特開平6−310084号公
報等に開示されているように、円筒形状の金属側管と、
その一端に内向きフランジの内面に接合された受光面板
とから構成されたものが開発されている。2. Description of the Related Art As an optical sensor for measuring weak light or the like,
A so-called head-on type photomultiplier has been widely used. The head-on type photomultiplier tube has one end of a cylindrical vacuum vessel as a light receiving face plate. The vacuum vessel of such a head-on type photomultiplier is generally made of a glass tube. In recent years, as disclosed in JP-A-6-310084, a cylindrical metal side tube is used. When,
A structure having one end thereof and a light receiving surface plate joined to the inner surface of the inward flange has been developed.
【0003】[0003]
【発明が解決しようとする課題】ところが、金属側管か
らなる真空容器においては、金属側管の内向きフランジ
によって受光面の面積が、同じ管径を有するガラス管か
らなるものに比して狭められているので、検出対象であ
る被検出光の受光効率が劣化する。However, in a vacuum vessel made of a metal side tube, the area of the light receiving surface is reduced by the inward flange of the metal side tube as compared with a glass tube having the same tube diameter. Therefore, the light receiving efficiency of the light to be detected, which is a detection target, is deteriorated.
【0004】そこで本発明は、真空容器が金属側管から
なる光電子増倍管であって、受光効率が劣化しないもの
を提供することを目的とする。Accordingly, an object of the present invention is to provide a photomultiplier tube in which the vacuum vessel is a metal side tube, which does not deteriorate the light receiving efficiency.
【0005】[0005]
【課題を解決するための手段】本発明に係る光電子増倍
管によれば、円筒形の金属側管の一端に形成されたフラ
ンジの内面に、光電面を有する受光面板が接合された真
空容器と、真空容器の受光面板側端部と接合され、入射
光を受光面板の中心側に偏向させる平凸レンズとを備え
た光電子増倍管であって、受光面板の外面には、フラン
ジの内周縁によって画定される空間と実質的に同形の凸
部が一体的に形成されていることを特徴とする。本発明
の構成では、平凸レンズが真空容器の受光面板側端部と
接合していることから、受光面板に入射する被検出光は
受光面板の中央寄りに偏向される。また、受光面板外面
に凸部を設けることで、平凸レンズ及び真空容器は間隙
なく接合し、それらの接合面では多重反射による光の減
衰はほとんどない。したがって、光電面は被検出光を効
率良く受光する。According to the photomultiplier tube according to the present invention, a vacuum vessel in which a light receiving surface plate having a photoelectric surface is joined to the inner surface of a flange formed at one end of a cylindrical metal side tube. And a plano-convex lens that is joined to the end of the vacuum vessel on the side of the light-receiving surface plate and deflects incident light toward the center of the light-receiving surface plate. Is characterized in that a convex portion having substantially the same shape as the space defined by the above is integrally formed. In the configuration of the present invention, since the plano-convex lens is joined to the end of the vacuum vessel on the light receiving surface plate side, the light to be detected incident on the light receiving surface plate is deflected toward the center of the light receiving surface plate. Further, by providing the convex portion on the outer surface of the light receiving surface plate, the plano-convex lens and the vacuum container are joined without any gap, and light is not substantially attenuated due to multiple reflection at the joining surface. Therefore, the photocathode efficiently receives the detected light.
【0006】[0006]
【発明の実施の形態】本発明の光電子増倍管に係る一実
施形態を図面を参照して説明する。また、本明細書で使
用する「上」、「下」という語は図面と対応させて用い
ることとする。DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of a photomultiplier according to the present invention will be described with reference to the drawings. Further, the terms “upper” and “lower” used in this specification are used in correspondence with the drawings.
【0007】図1及び図2はそれぞれ本発明に係る光電
子増倍管の一実施形態を示した側断面図及び上面図であ
る。図示の光電子増倍管はいわゆるヘッドオン型であ
り、円筒形の真空容器を有している。FIGS. 1 and 2 are a side sectional view and a top view, respectively, showing an embodiment of a photomultiplier tube according to the present invention. The illustrated photomultiplier is a so-called head-on type and has a cylindrical vacuum vessel.
【0008】真空容器は円筒形状の金属側管3と、金属
側管3の一端に形成された内向きのフランジFの内面に
気密に接合された例えばUVガラスからなる受光面板1
と、金属側管3の他端に設けられ、基台部を構成する円
形のステム4とから構成されている。受光面板1の内面
には光電面2が形成されている。The vacuum vessel is a light receiving surface plate 1 made of, for example, UV glass airtightly bonded to a cylindrical metal side tube 3 and an inner surface of an inward flange F formed at one end of the metal side tube 3.
And a circular stem 4 provided at the other end of the metal side tube 3 and constituting a base portion. A photoelectric surface 2 is formed on the inner surface of the light receiving surface plate 1.
【0009】真空容器内部には、光電面2側から収束電
極6、二次元状に配列された電子増倍孔8を有する平板
により複数段に積層して電子増倍部5を形成するダイノ
ード7、9、及びアノード10が順次配設して構成され
ている。ダイノード7、9及びアノード10の外周部に
は接続端子20が突設され、ステムピン11の一端と接
続されており、その他端はステム4を貫通して外部に延
びている。A dynode 7 for forming an electron multiplier 5 by stacking a plurality of stages of a focusing electrode 6 and a flat plate having two-dimensionally arranged electron multipliers 8 from the side of the photocathode 2 inside the vacuum vessel. , 9 and the anode 10 are sequentially arranged. A connection terminal 20 protrudes from the outer peripheral portions of the dynodes 7 and 9 and the anode 10, and is connected to one end of the stem pin 11. The other end extends through the stem 4 to the outside.
【0010】本実施形態による光電子増倍管は、さら
に、平凸レンズ、好ましくは半球状レンズ30が真空容
器の上端面に接合されている。半球状レンズ30の下面
の直径は真空容器の上端面の直径と実質的に等しくされ
ている。また、その下面は特別平坦に加工されている。
ところで、この半球状レンズ30は、後述するように受
光面板1の有効受光面積を広げるためのものであるが、
そのためには半球状レンズ30を真空容器と同軸に配置
させるのが好ましい。ところが、半球状レンズ30を上
記のように配置させても、受光面板1の外面及び半球状
レンズ30の下面が平坦であるとき、両者の間に生じた
空隙によって被検出光は多重反射を受けて減衰されるの
で、その効果は相殺される。そこで本実施形態では、受
光面板1の外面に、円柱形状の凸部31を一体形成させ
ることによって、両者の間の間隙をなくすようにしてい
る。In the photomultiplier according to the present embodiment, a plano-convex lens, preferably a hemispherical lens 30, is further joined to the upper end surface of the vacuum vessel. The diameter of the lower surface of the hemispherical lens 30 is substantially equal to the diameter of the upper surface of the vacuum container. The lower surface is specially flattened.
By the way, the hemispherical lens 30 is for expanding the effective light receiving area of the light receiving face plate 1 as described later.
For that purpose, it is preferable to arrange the hemispherical lens 30 coaxially with the vacuum container. However, even when the hemispherical lens 30 is arranged as described above, when the outer surface of the light receiving surface plate 1 and the lower surface of the hemispherical lens 30 are flat, the detected light is subjected to multiple reflections due to a gap formed therebetween. And the effect is offset. Therefore, in the present embodiment, the gap between the light receiving surface plate 1 and the light receiving surface plate 1 is eliminated by integrally forming the columnar convex portion 31 on the outer surface.
【0011】より詳細に述べるならば、凸部31の外径
は金属側管3のフランジFの内径と実質的に等しくされ
ている。凸部31を形成するためには、受光面板1を金
属側管3のフランジFに接合するときに、図3に示され
るような熱融着を行う。まず、直径が金属側管3の直径
より小さく、フランジFの内径より大きい円筒形の凹部
32を有するカーボン製の台Sを備えた電気炉(図示せ
ず)を用意する。つぎに、金属側管3のフランジFを下
に向けて、フランジFの内面に受光面板1を載せる。こ
の状態でもって、フランジF及び受光面板1によって形
成された凹部33が台Sの凹部32と対向するように、
金属側管3を台Sの上に配置させる(図3(a)参
照)。その後、電気炉によって受光面板1と金属側管3
を850℃、1時間で加熱すると、受光面板1がフラン
ジFの面位置程度まで溶け落ちることにより、凸部31
が一体的に形成される(図3(b)参照)。このとき、
凸部31がフランジFの面位置を超えた高さを有して形
成されていても、台Sと接触することはないので、台S
のカーボンによって汚染されることはない。More specifically, the outer diameter of the projection 31 is substantially equal to the inner diameter of the flange F of the metal side tube 3. In order to form the convex portion 31, when the light receiving face plate 1 is joined to the flange F of the metal side tube 3, heat fusion as shown in FIG. 3 is performed. First, an electric furnace (not shown) provided with a carbon base S having a cylindrical concave portion 32 having a diameter smaller than the diameter of the metal side tube 3 and larger than the inner diameter of the flange F is prepared. Next, the light receiving face plate 1 is placed on the inner surface of the metal tube 3 with the flange F facing downward. In this state, the concave portion 33 formed by the flange F and the light receiving face plate 1 is opposed to the concave portion 32 of the base S.
The metal side tube 3 is disposed on the table S (see FIG. 3A). After that, the light receiving face plate 1 and the metal side tube 3 are
Is heated at 850 ° C. for one hour, the light-receiving face plate 1 melts down to the surface position of the flange F, so that the protrusions 31
Are integrally formed (see FIG. 3B). At this time,
Even if the convex portion 31 is formed with a height exceeding the surface position of the flange F, it does not come into contact with the table S, so that the table S
It is not contaminated by carbon.
【0012】このようにして形成された凸部31を有す
る受光面板1に半球状レンズ30を上記のように接合さ
せると、両者が密着して接合される。また、半球状レン
ズ30をフランジF及び受光面板1の外面と密着させる
ようにするには、凸部31の高さはフランジFの肉厚と
実質的に同一とされているのが好適である。When the hemispherical lens 30 is joined to the light receiving face plate 1 having the projections 31 formed in this manner as described above, the two are brought into close contact with each other. In order to make the hemispherical lens 30 be in close contact with the flange F and the outer surface of the light receiving face plate 1, it is preferable that the height of the convex portion 31 is substantially the same as the thickness of the flange F. .
【0013】実際の製造においては、凸部31の高さは
フランジFの面位置を基準にして若干ばらついてしま
う。このばらつきによる両者の間隙を埋めるために、半
球状レンズ30と屈折率が等しいオプティカルセメント
やシリコンゴム等の光学的接着剤によって、それらを接
着させるのが好ましい。この場合、光学的接着剤が受光
面板1と半球状レンズ30との間に介在するので、光学
的効率が向上するからである。In actual manufacturing, the height of the convex portion 31 slightly varies based on the surface position of the flange F. In order to fill the gap between the two due to this variation, it is preferable to bond them with an optical adhesive such as optical cement or silicone rubber having the same refractive index as the hemispherical lens 30. In this case, since the optical adhesive is interposed between the light receiving face plate 1 and the hemispherical lens 30, the optical efficiency is improved.
【0014】なお、半球状レンズ30の下面及び凸部3
1の端面は平坦に研磨加工されることがより好ましい。
これによって、半球状レンズ30及び受光面板1の接合
面で被検出光の反射・散乱といった光拡散が生じたりす
るのを防止するからである。The lower surface of the hemispherical lens 30 and the projection 3
It is more preferable that the end face of 1 is polished flat.
This prevents light diffusion such as reflection and scattering of the light to be detected at the joining surface between the hemispherical lens 30 and the light receiving face plate 1.
【0015】以上のように構成された光電子増倍管に、
被検出光が図1の矢印で示されるように入射するとき、
たとえフランジFの直上方からのものであっても、半球
状レンズ30によって偏向を受けて受光面板1中央に向
かう。このため、受光面板1の有効受光面積が増大す
る。また、この光電子増倍管では、半球状レンズ30及
び受光面板1の間の空隙がないので、受光効率の高い被
検出光が多重反射による減衰を受けることなく、光電面
2に受容される。このような被検出光を光電面2が受容
すると、光電効果により真空中に光電子が従来より多く
放出される。この光電子が電子増倍部5を用いて二次電
子増倍された後に結果として生じた二次電子群も従来よ
り多くアノード10に集められるので、ステムピン11
から外部に出力される電気信号も大きい。したがって、
本実施形態の光電子増倍管では、従来に比べて高い感度
が得られる。In the photomultiplier tube configured as described above,
When the light to be detected enters as shown by the arrow in FIG.
Even if it is directly above the flange F, it is deflected by the hemispherical lens 30 and heads toward the center of the light receiving face plate 1. For this reason, the effective light receiving area of the light receiving face plate 1 increases. Further, in this photomultiplier tube, since there is no gap between the hemispherical lens 30 and the light receiving surface plate 1, light to be detected having high light receiving efficiency is received by the photoelectric surface 2 without being attenuated by multiple reflection. When such a light to be detected is received by the photocathode 2, more photoelectrons are emitted into the vacuum due to the photoelectric effect than in the past. After the photoelectrons are secondary-multiplied using the electron multiplier 5, the resulting secondary electrons are also collected in the anode 10 in a larger amount than in the prior art.
The electric signal output from the outside is also large. Therefore,
In the photomultiplier according to the present embodiment, higher sensitivity can be obtained as compared with the related art.
【0016】[0016]
【発明の効果】本発明の光電子増倍管によれば、平凸レ
ンズを代表する半球状レンズが真空容器の受光面板側と
接合していることから、受光面板に入射する被検出光を
その中央寄りに偏向させるので、光電面の受光効率が増
大する。また、受光面板の外面には凸部が形成されてい
るので、半球状レンズとの接合面には間隙は生じない。
このため、被検出光は接合面で反射・散乱を受けること
はないので、光電面に受容される被検出光は減衰されな
い。したがって、この光電子増倍管は従来に比べて高い
感度を有する。According to the photomultiplier tube of the present invention, since the hemispherical lens representing the plano-convex lens is joined to the light receiving face plate side of the vacuum vessel, the light to be detected entering the light receiving face plate is centered. Since the light is deflected closer, the light receiving efficiency of the photocathode increases. In addition, since the convex portion is formed on the outer surface of the light receiving surface plate, no gap is generated at the joint surface with the hemispherical lens.
For this reason, the detected light is not reflected or scattered by the bonding surface, and the detected light received by the photocathode is not attenuated. Therefore, this photomultiplier tube has higher sensitivity than before.
【図1】本発明に係る光電子増倍管の一実施形態を示し
た側断面図である。FIG. 1 is a side sectional view showing one embodiment of a photomultiplier tube according to the present invention.
【図2】図1に示した光電子増倍管のA−A線断面図で
ある。FIG. 2 is a cross-sectional view taken along line AA of the photomultiplier tube shown in FIG.
【図3】本発明に係る光電子増倍管の受光面板に凸部を
形成する工程を順に示した断面図である。FIG. 3 is a sectional view sequentially showing a process of forming a convex portion on a light receiving surface plate of the photomultiplier according to the present invention.
1…受光面板、2…光電面、3…金属側管、F…フラン
ジ、4…ステム、5…電子増倍部、6…収束電極、7、
9…ダイノード、10…アノード、11…ステムピン、
12…ハーメチックガラス、20…接続端子、30…半
球状レンズ、31…凸部、32、33…凹部、S…台。DESCRIPTION OF SYMBOLS 1 ... Light receiving surface plate, 2 ... Photoelectric surface, 3 ... Metal side tube, F ... Flange, 4 ... Stem, 5 ... Electron multiplication part, 6 ... Focusing electrode, 7,
9 ... dynode, 10 ... anode, 11 ... stem pin,
12 ... hermetic glass, 20 ... connection terminal, 30 ... hemispherical lens, 31 ... convex part, 32, 33 ... concave part, S ... stand.
Claims (1)
ランジの内面に、光電面を有する受光面板が接合された
真空容器と、 前記真空容器の受光面板側端部と接合され、入射光を前
記受光面板の中心側に偏向させる平凸レンズと、を備え
た光電子増倍管であって、前記受光面板の外面には、前
記フランジの内周縁によって画定される空間と実質的に
同形の凸部が一体的に形成されていることを特徴とする
光電子増倍管。1. A vacuum vessel in which a light receiving face plate having a photoelectric surface is joined to an inner surface of a flange formed at one end of a cylindrical metal side tube; A plano-convex lens for deflecting light toward the center of the light-receiving surface plate, wherein the outer surface of the light-receiving surface plate has substantially the same shape as the space defined by the inner peripheral edge of the flange. A photomultiplier tube, wherein a convex portion is integrally formed.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15847096A JP3620925B2 (en) | 1996-06-19 | 1996-06-19 | Photomultiplier tube |
US08/879,052 US5864207A (en) | 1996-06-19 | 1997-06-19 | Photomultiplier with lens element |
DE69726222T DE69726222T2 (en) | 1996-06-19 | 1997-06-19 | photomultiplier |
EP97304318A EP0814496B1 (en) | 1996-06-19 | 1997-06-19 | Photomultiplier |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15847096A JP3620925B2 (en) | 1996-06-19 | 1996-06-19 | Photomultiplier tube |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH1012185A true JPH1012185A (en) | 1998-01-16 |
JP3620925B2 JP3620925B2 (en) | 2005-02-16 |
Family
ID=15672453
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15847096A Expired - Fee Related JP3620925B2 (en) | 1996-06-19 | 1996-06-19 | Photomultiplier tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3620925B2 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1085556A1 (en) * | 1998-06-01 | 2001-03-21 | Hamamatsu Photonics K.K. | Photomultiplier and radiation sensor |
JP2006127971A (en) * | 2004-10-29 | 2006-05-18 | Hamamatsu Photonics Kk | Photodetector |
JP2006127990A (en) * | 2004-10-29 | 2006-05-18 | Hamamatsu Photonics Kk | Photomultiplier tube and radiation detection device |
WO2007099958A1 (en) * | 2006-02-28 | 2007-09-07 | Hamamatsu Photonics K.K. | Photomultiplier, radiation sensor, and photomultiplier fabricating method |
US7838810B2 (en) | 2006-02-28 | 2010-11-23 | Hamamatsu Photonics K.K. | Photomultiplier tube and a radiation detecting device employing the photomultiplier tube |
US7847232B2 (en) | 2006-02-28 | 2010-12-07 | Hamamatsu Photonics K.K. | Photomultiplier tube and radiation detecting device employing the photomultiplier tube |
US7902509B2 (en) | 2006-02-28 | 2011-03-08 | Hamamatsu Photonics K.K. | Photomultiplier tube and radiation detecting device |
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JP7097313B2 (en) | 2019-02-07 | 2022-07-07 | 浜松ホトニクス株式会社 | Electron tube module and optical device |
-
1996
- 1996-06-19 JP JP15847096A patent/JP3620925B2/en not_active Expired - Fee Related
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1093150A1 (en) * | 1998-06-01 | 2001-04-18 | Hamamatsu Photonics K.K. | Photomultiplier |
EP1085556A4 (en) * | 1998-06-01 | 2007-05-02 | Hamamatsu Photonics Kk | Photomultiplier and radiation sensor |
EP1093150A4 (en) * | 1998-06-01 | 2007-05-02 | Hamamatsu Photonics Kk | Photomultiplier |
EP1085556A1 (en) * | 1998-06-01 | 2001-03-21 | Hamamatsu Photonics K.K. | Photomultiplier and radiation sensor |
JP4689234B2 (en) * | 2004-10-29 | 2011-05-25 | 浜松ホトニクス株式会社 | Photomultiplier tube and radiation detector |
JP2006127971A (en) * | 2004-10-29 | 2006-05-18 | Hamamatsu Photonics Kk | Photodetector |
JP2006127990A (en) * | 2004-10-29 | 2006-05-18 | Hamamatsu Photonics Kk | Photomultiplier tube and radiation detection device |
WO2007099958A1 (en) * | 2006-02-28 | 2007-09-07 | Hamamatsu Photonics K.K. | Photomultiplier, radiation sensor, and photomultiplier fabricating method |
US7812532B2 (en) | 2006-02-28 | 2010-10-12 | Hamamatsu Photonics K.K. | Photomultiplier tube, radiation detecting device, and photomultiplier tube manufacturing method |
US7838810B2 (en) | 2006-02-28 | 2010-11-23 | Hamamatsu Photonics K.K. | Photomultiplier tube and a radiation detecting device employing the photomultiplier tube |
US7847232B2 (en) | 2006-02-28 | 2010-12-07 | Hamamatsu Photonics K.K. | Photomultiplier tube and radiation detecting device employing the photomultiplier tube |
US7902509B2 (en) | 2006-02-28 | 2011-03-08 | Hamamatsu Photonics K.K. | Photomultiplier tube and radiation detecting device |
JP2007234364A (en) * | 2006-02-28 | 2007-09-13 | Hamamatsu Photonics Kk | Photomultiplier tube, radiation detecting device, and manufacturing method of photomultiplier tube |
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