JPH10115824A - Liquid crystal display panel substrate and its production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make it possible to flatten and orient the surface of the same substrate by providing a liquid crystal display panel substrate with a substrate having electrodes formed on its surface and flattering/orienting film consisting of a photosensitive resin which are laminated on the surface of this substrate and have a flattening function and an orienting function. SOLUTION: The liquid crystal display panel substrate 12 consist of the substrate 10 having TFT elements, pixel electrodes, etc., formed on its surface and the flattening/orienting films 11 laminated on the surface of the substrate 10. The flattening/orienting films 11 consist of the photosensitive resin having the flattening function and the orienting function. These films are formed by forming the films to 2 to 3μm film thickness by a coating method, such as spin coating, printing or dipping, then drying and curing the coatings. Materials of compd. systems, such as polyacrylate system, polyvinyl system, amide system and imide system, or material mixtures composed of these materials are usable as the photosensitive resin having the flattening function and the orienting function. There are many advantages in manufacturing the liquid crystal display panel in such a manner and in addition, the display performance may be enhanced.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display panel substrate used for a liquid crystal display device in a personal computer, a word processor or the like, and a method of manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, on a glass substrate of a liquid crystal display panel, a color filter necessary for performing color display and an electrode for receiving an electric signal from an external drive circuit and transmitting the signal to the inside of the substrate are formed. Therefore, the shape of the substrate surface has irregularities of about 0.1 to 1.0 μm. The size of the concavities and convexities has a large difference in optical distance for a liquid crystal display panel having a sandwich configuration while maintaining a gap of several μm, and is one of the main causes of display unevenness.

The display performance required of recent liquid crystal display panels is color display, large display capacity, high definition,
High contrast, uniformity of display, high speed of display response, wide viewing angle, etc. In this display performance,
In order to improve the display performance, it is necessary to flatten the unevenness of the color filter and the unevenness of the TFT element formed on the substrate. Conventionally, there has been proposed a technique for flattening by silicon oxide or a technique for forming silicon oxide by plasma CVD or vapor deposition and flattening it (Japanese Patent Laid-Open No. 8-152651).

[0004] Conventionally, a liquid crystal display panel is constructed by using a substrate which has been subjected to an alignment treatment by a method of rubbing a polyimide alignment film with a cloth such as rayon in order to align liquid crystal molecules in a certain direction. . However, this method has problems such as scratches and dust being easily generated on the alignment film due to the frictional action between the cloth and the alignment film, and easy generation of pinholes in the alignment film due to electrostatic discharge. At the time of manufacture, it causes display unevenness and has a problem in display uniformity.

[0005] Therefore, a suitable method has been expected to replace the conventional rubbing method using a cloth. As an orientation method instead of the rubbing method, oblique vapor deposition of silicon oxide, a Langmuir-Blodgett film, or formation of an orientation film by a chemical adsorption method has been attempted. Further, as described in JP-A-4-7520, there has been proposed a method in which a photosensitive resin is made to have anisotropy in photo-alignment and liquid crystal molecules are aligned in the formed film.

[0006]

FIGS. 7 and 8 show a concrete example of a conventional liquid crystal display panel substrate constituting a liquid crystal display panel. FIG. 7 shows that when the TFT element 31 and the pixel electrode 32 are formed on the substrate 30, a step is generated between the TFT element 31 and the pixel electrode 32 and the substrate 30. This is a conventional example in which a flattening film 33 is formed. FIG. 8 shows a stripe electrode 36 on a substrate 35.
This is a conventional example in which an alignment film 37 is formed on the stripe electrode 36.

As described above, the formation of the flattening film 33 of FIG. 7 and the alignment film 37 of FIG. 8 are limited to one of them, and the flattening film and the alignment film are formed on the same substrate. There was no liquid crystal display panel substrate on which both films were formed. Accordingly, it is an object of the present invention to provide a liquid crystal display panel substrate having a flattening film and an alignment film formed on the same substrate, and a method of manufacturing the same.

[0008]

According to a first aspect of the present invention, there is provided a liquid crystal display panel substrate comprising a substrate having electrodes formed on a surface thereof, and a photosensitive resin having a flattening function and an orientation function laminated on the surface of the substrate. And a planarizing and orientation film. According to the liquid crystal display panel substrate of the first aspect, since the flattening and alignment film is formed on the substrate surface, the same substrate can be flattened and aligned.

According to a second aspect of the present invention, there is provided a method of manufacturing a liquid crystal display panel substrate, wherein a photosensitive resin having a flattening function and an orientation function is applied to the surface of the substrate on which the electrodes are formed, and the photosensitive resin is planarized by light irradiation. The orientation treatment is performed to form a flattened and oriented film. According to a third aspect of the present invention, there is provided a method of manufacturing a liquid crystal display panel substrate according to the second aspect, wherein a photosensitive resin having a planarizing function and an aligning function is irradiated with non-polarized light from one light source and planarized. The resin is irradiated with linearly polarized light from one light source to perform an alignment treatment.

According to a fourth aspect of the present invention, there is provided a method of manufacturing a liquid crystal display panel substrate according to the second aspect, wherein the photosensitive resin having a flattening function and an aligning function is irradiated with non-polarized light from one light source and then flattened. And irradiating the photosensitive resin with linearly polarized light from another light source to perform an alignment treatment.
According to the method of manufacturing a liquid crystal display panel substrate according to the second aspect of the present invention, since the flattening and alignment film is formed on the substrate surface, the same substrate can be flattened and aligned. Also,
The flattening and alignment film can be formed by flattening and orienting a photosensitive resin having a flattening function and an aligning function by irradiating light, thereby preventing generation of scratches and dust, and generation of pinholes due to static electricity. be able to. Further, since the flattening and alignment film has both the flattening function and the alignment function, the manufacturing process can be simplified.

According to a fifth aspect of the present invention, there is provided a liquid crystal display panel substrate comprising: a substrate having electrodes formed on a surface thereof; a planarizing film formed of a photosensitive resin having a planarizing function laminated on the surface of the substrate; And an alignment film made of a photosensitive resin having an alignment function laminated on the surface. Claim 5
According to the liquid crystal display panel substrate described above, since the flattening film and the alignment film are formed on the substrate surface, the same substrate can be flattened and aligned.

According to a sixth aspect of the present invention, in the method of manufacturing a liquid crystal display panel substrate, a photosensitive resin having a planarizing function and a photosensitive resin having an aligning function are sequentially applied to the substrate surface on which the electrodes are formed, and the planarizing function is provided. The light-sensitive resin is polymerized by light irradiation to form a flattened film, and the photosensitive resin having an alignment function is polymerized by light irradiation of linearly polarized light to form an oriented film.

According to a seventh aspect of the present invention, in the method for manufacturing a liquid crystal display panel substrate according to the sixth aspect, the photosensitive resin having a flattening function is irradiated with non-polarized light from one light source and polymerized, and then has an alignment function. The photosensitive resin is irradiated with linearly polarized light from one light source and polymerized. Claim 8
The method for manufacturing a liquid crystal display panel substrate according to claim 6, wherein the photosensitive resin having a planarizing function is irradiated with non-polarized light from one light source and polymerized, and then the photosensitive resin having an aligning function is converted into another photosensitive resin having an aligning function. It is characterized by irradiating with linearly polarized light from a light source and polymerizing.

According to the method of manufacturing a liquid crystal display panel substrate of the present invention, since the flattening film and the alignment film are formed on the substrate surface, the same substrate can be flattened and aligned. In addition, the flattening film and the alignment film can be formed by flattening and orienting a photosensitive resin having a flattening function and an alignment function by irradiating light. Occurrence can be prevented.

According to a ninth aspect of the present invention, in the method of manufacturing a liquid crystal display panel substrate, a photosensitive resin having a flattening function is applied to the substrate surface on which the electrodes are formed, and the photosensitive resin having the flattening function is flattened by light irradiation. Process to form a planarization film, apply a photosensitive resin having an orientation function to the surface of the planarization film, and orient the photosensitive resin having an orientation function by irradiating linearly polarized light. It forms a film.

According to a tenth aspect of the present invention, there is provided a method of manufacturing a liquid crystal display panel substrate according to the ninth aspect, wherein the photosensitive resin having a flattening function is irradiated with non-polarized light from one light source to perform a flattening process. And irradiating linearly polarized light from a light source to a photosensitive resin having the following properties to perform an alignment treatment. In the method for manufacturing a liquid crystal display panel substrate according to claim 11, in claim 9, the photosensitive resin having a planarizing function is irradiated with non-polarized light from a light source with a non-polarized light, and then the photosensitive resin having an aligning function is obtained. It is characterized in that an alignment treatment is performed by irradiating the linear resin with light from another light source to the reactive resin.

According to the method for manufacturing a liquid crystal display panel substrate according to the ninth to eleventh aspects, since the flattening film and the alignment film are formed on the substrate surface, the same substrate can be flattened and aligned. In addition, the flattening film and the alignment film can be formed by flattening and orienting a photosensitive resin having a flattening function and an alignment function by irradiating light. Occurrence can be prevented.

A method of manufacturing a liquid crystal display panel substrate according to a twelfth aspect of the present invention is a method of manufacturing a liquid crystal display panel substrate according to the third aspect, the fourth aspect, the sixth aspect, the seventh aspect, the eighth aspect, the ninth aspect, the tenth aspect or the eleventh aspect. It is characterized in that light is irradiated with the linearly polarized light traveling axis inclined with respect to the substrate surface. According to the method of manufacturing a liquid crystal display panel substrate according to the twelfth aspect, in addition to the effects of the third, fourth, sixth, seventh, eighth, ninth, tenth, or tenth aspect, Since the traveling axis of the linearly polarized light irradiated on the photosensitive resin having the alignment function is inclined with respect to the substrate surface, the liquid crystal molecules can be inclined with respect to the substrate surface.

According to a thirteenth aspect of the present invention, there is provided a method for manufacturing a liquid crystal display panel substrate according to the third aspect, the fourth aspect, the sixth aspect, the seventh aspect, the eighth aspect, the ninth aspect, the tenth aspect, or the eleventh aspect. The method is characterized in that light is irradiated with the linearly polarized light traveling axis inclined with respect to the substrate surface and the azimuth of the irradiation direction is changed with respect to the substrate.

According to the method of manufacturing a liquid crystal display panel substrate according to the present invention, it is preferable that the liquid crystal display panel substrate be manufactured in the following manner. In addition to the function, the advancing axis of the linearly polarized light that irradiates the photosensitive resin having the orientation function is inclined with respect to the substrate surface, and the azimuth of the irradiation direction with respect to the substrate is changed. The liquid crystal molecules can be tilted.

According to a fourteenth aspect of the present invention, there is provided a method of manufacturing a liquid crystal display panel substrate according to the second aspect, the third aspect, the fourth aspect, the sixth aspect, the seventh aspect, the eighth aspect, the nineth aspect, or the tenth aspect. Claim 11 or Claim 12
Alternatively, in claim 13, the wavelength of light applied to the photosensitive resin having a planarizing function is longer than the wavelength of light applied to the photosensitive resin having an alignment function.

According to a method for manufacturing a liquid crystal display panel substrate according to claim 14, claim 2, claim 3, claim 4, claim 6, claim 6, claim 7, claim 8, claim 9, or claim 10 or In addition to the function of claim 11, 12, or 13, the wavelength of light applied to the photosensitive resin having a planarizing function is made longer than the wavelength of light applied to the photosensitive resin having an alignment function. Therefore, the material is selected so that the photosensitive resin having a planarization function is polymerized when irradiating the long wavelength first, and the photosensitive resin having the alignment function is polymerized by irradiating the short wavelength second. Is performed, and a film can be formed by separately performing the light irradiation process.

According to a fifteenth aspect of the present invention, there is provided a method of manufacturing a liquid crystal display panel substrate according to the second aspect, the third aspect, the fourth aspect, the sixth aspect, the seventh aspect, the eighth aspect, the nineth aspect, or the tenth aspect. Claim 11 or Claim 12
Alternatively, in claim 13 or claim 14, an optical reflection element is provided behind the substrate to irradiate light.

According to the method for manufacturing a liquid crystal display panel substrate according to the present invention, the second, third, fourth, sixth, seventh, eighth, ninth, tenth, or tenth aspect of the present invention is provided. In addition to the functions of claim 11, claim 12, claim 13, or claim 14, an optical reflection element is installed behind the substrate to irradiate light, so that light emitted from the light source and passing through the substrate is reflected again. And light irradiation can be effectively used.

A method of manufacturing a liquid crystal display panel substrate according to claim 16 is the method of claim 2 or claim 3 or claim 4 or claim 6 or claim 7 or claim 8 or claim 9 or claim 10 or claim 10. Claim 11 or Claim 12
Alternatively, in claim 13 or claim 14 or claim 15, the substrate is irradiated with light a plurality of times, respectively.

According to a method of manufacturing a liquid crystal display panel substrate according to the present invention, the second, third, fourth, sixth, seventh, eighth, ninth, tenth, or tenth aspect of the present invention is provided. In addition to the effects of claim 11, claim 12, claim 13, claim 14, or claim 15, by irradiating the substrate with light a plurality of times, a rapid rise in the substrate temperature due to the light irradiation can be prevented. For example, different energies and different wavelengths of light can be used in the first irradiation and the second irradiation, so that a wider range of selection of alignment conditions can be made in the alignment step by light irradiation.

[0027]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In a liquid crystal display panel substrate constituting a liquid crystal display panel, a flattening and alignment film made of a photosensitive resin having a flattening function and an aligning function on the substrate surface, or a photosensitive film having a flattening function. A planarizing film made of a conductive resin and an alignment film made of a photosensitive resin having an alignment function are formed.

In order to form a flattening / alignment film, a photosensitive resin having a flattening function and an aligning function is applied to the surface of the substrate, and the photosensitive resin is flattened by irradiation with light and subjected to an orientation treatment to flatten the surface. And forming an alignment and orientation film. In addition, in order to form a planarization film and an alignment film, a photosensitive resin having a planarization function and a photosensitive resin having an alignment function are sequentially applied to the substrate surface, and the photosensitive resin having a planarization function is coated with light. A planarization film is formed by polymerization by irradiation, and a photosensitive resin having an alignment function is polymerized by irradiation of linearly polarized light to form an alignment film. Alternatively, a photosensitive resin having a flattening function is applied to the substrate surface, a flattening process is performed by light irradiation to form a flattening film, and a photosensitive resin having an orientation function is applied to the surface of the flattening film, An alignment treatment is performed by irradiation of linearly polarized light to form an alignment film.

As the photosensitive resin having an orientation function,
Polyvinyl cinnamate, polyvinyl, amide,
Examples include imide compounds, silane compounds, and siloxane compounds. Polyvinyl cinnamate (hereinafter referred to as PVCN) molecules undergo polymerization cross-linking in a specific direction due to photoreaction to a polarization vector of linearly polarized light, and spread two-dimensionally with directionality. Orientation.

The PVCN molecules are oriented in a direction substantially perpendicular to the polarization direction of the linearly polarized light, and the liquid crystal molecules of a liquid crystal display panel using this liquid crystal display panel substrate are also oriented along the orientation direction of the PVCN. In addition, polyvinyl-based materials other than PVCN,
Also in the case of amides, imides, silane compounds and siloxane compounds, linearly polarized light can cause polymerization crosslinking in a specific direction, or can be oriented with anisotropy in molecules.

As a method of applying the photosensitive resin on the substrate, for example, in the case of PVCN, a solution diluted in a solvent such as chloroethane or chlorobenzene is applied by a method such as spinning, printing, or dipping and then dried. An excimer laser or a mercury lamp can be used as a light source when irradiating the applied photosensitive resin with ultraviolet rays. At this time, the wavelength of the light source is 250 nm or more.
The wavelength is preferably 360 nm, but is not limited to the above-mentioned wavelength range because the optimal energy for photoreaction can be changed by chemically modifying the side chain of the PVCN molecule.

Although linearly polarized light is suitable for the alignment treatment, the wavelength is short with respect to visible light, such as 250 nm to 360 nm. Birefringent polarizers such as the Thomson type are preferred. Further, it is necessary to irradiate the substrate surface with a parallel light beam. The parallel light beam is irradiated by an optical lens system.
This is because the molecules are obliquely aligned with respect to the substrate surface and the liquid crystal molecules are tilted with respect to the substrate surface. For oblique irradiation, the irradiation axis for irradiating the substrate and linearly polarized light should be tilted relatively. This can be implemented by installing an optical system and a substrate on the optical disk.

As for the order of laminating the two layers of the flattening film and the alignment film on the substrate, the respective functions can be exhibited by laminating the flattening film and the alignment film in this order. Therefore, when a material in which the wavelength at which the planarization film undergoes a polymerization reaction is longer than the wavelength at which the alignment film undergoes a polymerization reaction, the first material is selected.
When the second long wavelength is irradiated, the flattening film polymerizes,
Second, the material is selected so that the alignment film is polymerized by irradiating the light with a short wavelength, and the film can be formed by separately performing the light irradiation process.

Further, as described above, the energy density used for ultraviolet irradiation can be set at 1 mJ / cm ^{2 to 1} J / cm ² , but when the equipment is made compact, the tact time is shortened, and energy saving equipment is considered. About several mJ / cm ²
A photosensitive resin having the following sensitivity is preferable. In addition, as a method of effectively using light irradiation, by arranging a light reflecting mirror on the opposite side of the light source with respect to the substrate, light emitted from the light source and passing through the substrate can be reused as reflected light. .

As described above, a liquid crystal display panel is manufactured using a pair of liquid crystal display panel substrates on which the photosensitive resin has been flattened and oriented by ultraviolet irradiation. To manufacture a liquid crystal display panel, the pair of liquid crystal display panel substrates are assembled in a sandwich while maintaining a certain gap (about several μm).
Liquid crystal is injected into the gap. Since the alignment film of the liquid crystal has directionality, the liquid crystal itself is also aligned in the direction of the alignment film.

When fabricating a liquid crystal display panel, if the orientation films of a pair of liquid crystal display panel substrates are perpendicular to each other, the liquid crystal molecules have a 90 ° twist arrangement. This 90 ° twist changes the light transmittance by rotating one of the polarizers after setting the linear polarizers on both outer surfaces of the substrate, and the polarizer is rotated by 90 °.
It can be confirmed by changing from light to dark or dark to light when rotated.

[0037]

Embodiments Specific embodiments will be described below. First Embodiment A first embodiment of the present invention will be described with reference to FIGS. This embodiment corresponds to claims 1 to 4.

FIG. 1 is a cross-sectional view of a liquid crystal display panel substrate 12, in which reference numeral 10 denotes a substrate on which TFT elements, pixel electrodes, and the like (not shown) are formed, and reference numeral 11 denotes a flat substrate laminated on the surface of the substrate 10. It is a modified and oriented film. Flattening and alignment film 1
Reference numeral 1 denotes a coating method such as spinning, printing, or dipping which is made of a photosensitive resin having a planarization function and an orientation function.
After being formed to a thickness of 3 μm, it is dried and cured.

As the photosensitive resin having a planarizing function and an orientation function, a material composed of a compound such as polyacrylate, polyvinyl, amide or imide, or a mixed material of these materials can be used. Next, in the optical system shown in FIG. 2, the photosensitive resin is irradiated with light to perform flattening and orientation processing. In FIG. 2, reference numeral 21 denotes a low-pressure or high-pressure mercury lamp or a UV light source composed of a laser; is there.

The wavelength from the ultraviolet light source 21 is 200 to
The photosensitive resin on the surface of the substrate 10 is irradiated with ultraviolet light of 360 nm. As a light source for irradiating the photosensitive resin, non-polarized light is not necessary for forming a flattening film, and non-polarized light is preferable, but in order to impart molecular anisotropy to the surface of the photosensitive resin. Since linearly polarized light is preferable, light irradiation treatment is performed on the flattening film and the alignment film using linearly polarized light.

After the photosensitive resin is irradiated with light from one light source in a non-polarized state and flattened, the photosensitive resin may be irradiated with linearly polarized light from the same light source to be oriented. Alternatively, the photosensitive resin may be irradiated with light in a non-polarized state from one light source to perform a planarization process, and then the photosensitive resin may be irradiated with linearly polarized light from another light source to perform an alignment process. Second Embodiment A second embodiment of the present invention will be described with reference to FIGS. This embodiment corresponds to claims 5 and 9 to 11.

FIG. 3 is a cross-sectional view of a liquid crystal display panel substrate 18. Reference numeral 15 denotes a substrate on which TFT elements, pixel electrodes, etc. (not shown) are formed, and 16 denotes a flat surface laminated on the surface of the substrate 15. Reference numeral 17 denotes an orientation film laminated on the surface of the flattening film 16. The flattening film 16 is made of a photosensitive resin having a flattening function, is formed to a thickness of 2 to 3 μm by a coating method such as spinning, printing, and dipping, and then dried and cured. Examples of the photosensitive resin having the flattening function include the polyacrylate-based, polyvinyl-based, amide-based, and imide-based materials of the first embodiment.

After the photosensitive resin having a planarizing function is dried and cured, the planarized film 16 is formed by irradiating ultraviolet rays with the optical system shown in FIG. The alignment film 17 is made of a photosensitive resin having an alignment function. The alignment film 17 is formed on the flattening film 16 to a thickness of 500 ° by a coating method such as spinning, printing, and dipping, and then dried and cured. As the photosensitive resin having an orientation function, polyacrylate, polyvinyl, amide, and imide resins can be used, and materials such as silane compounds and polysilane compounds can also be used. Materials can also be used.

Then, the applied photosensitive resin having an orientation function is irradiated with a linearly polarized light mode ultraviolet ray to form an orientation film 17. After irradiating the photosensitive resin having the planarizing function with light from one light source in a non-polarized state and performing a flattening process, the photosensitive resin having the aligning function is irradiated with linearly polarized light from the same light source and aligned. May be processed. Or,
After irradiating the photosensitive resin having a planarizing function with light from one light source in a non-polarized state and performing a flattening process, the photosensitive resin having an aligning function is irradiated with light with linearly polarized light from another light source to perform an alignment process. May be.

Third Embodiment A third embodiment of the present invention will be described with reference to FIG. This embodiment corresponds to claim 12. In this embodiment, as shown in FIG. 4, when irradiating linearly polarized light in the first and second embodiments, irradiation is performed at an angle θ with respect to the substrate surface. Thereby, the liquid crystal molecules can be inclined with respect to the substrate surface.

Although FIG. 4 shows an example in which the substrates 10 and 15 are inclined at an angle θ with respect to the traveling axis L when irradiating light, the traveling axis L is inclined at an angle θ by an optical system. May be. Fourth Embodiment A fourth embodiment of the present invention will be described with reference to FIGS. This embodiment corresponds to claim 13.

This embodiment is different from the first and second embodiments in that the substrate surface is irradiated at an angle θ as shown in FIG. 4 and the linearly polarized light 24 is applied to the substrate 1 as shown in FIG.
When irradiating light to 0 and 15, the linearly polarized light 24 is irradiated while being changed by the azimuth angle α from the direction of first irradiation. Thereby, the liquid crystal molecules can be inclined with respect to the substrate surface.

Fifth Embodiment A fifth embodiment of the present invention will be described with reference to FIG. This embodiment corresponds to claim 15. This embodiment differs from the first to fourth embodiments in that, as shown in FIG. 6, an optically reflective material such as an aluminum thin film, a silver thin film, or an aluminum-magnesium alloy thin film is provided behind the substrates 10 and 15. A high reflecting mirror is installed to irradiate light, and the reflected light can efficiently carry out polymerization and crosslinking of the photosensitive resin.

Sixth Embodiment This embodiment corresponds to a fourteenth embodiment, and corresponds to the first embodiment.
In the embodiments to the fifth to fifth embodiments, when irradiating light, the first is ultraviolet light having a low light energy (for example, a light having a wavelength of 3).
The second method is to polymerize and crosslink the planarization film, and the second is to polymerize and crosslink the alignment film with ultraviolet rays (for example, having a wavelength of 254 nm) having higher light energy than the first.

Seventh Embodiment This embodiment corresponds to the sixteenth embodiment, and the first embodiment
In each of the sixth to sixth embodiments, light irradiation is performed a plurality of times.

[0051]

According to the liquid crystal display panel substrate of the first aspect, since the flattening and alignment film is formed on the substrate surface, the same substrate can be flattened and aligned. According to the method of manufacturing a liquid crystal display panel substrate according to the second aspect of the present invention, since the flattening and alignment film is formed on the substrate surface, the same substrate can be flattened and aligned. In addition, the flattening and alignment film can be formed by flattening and orienting a photosensitive resin having a flattening function and an aligning function by light irradiation, thereby generating scratches and dust, and generating pinholes due to static electricity. When a liquid crystal display panel having a large display capacity, high definition and color is formed, a uniform display device can be manufactured. Further, since the flattening and alignment film has both the flattening function and the alignment function, the manufacturing process can be simplified and the equipment can be made compact. Further, since the reaction of the photosensitive resin can be accurately controlled by the energy amount of light irradiation, it is easy to control in the process and a liquid crystal display panel with less process variation can be manufactured.

According to the liquid crystal display panel substrate of the fifth aspect, since the flattening film and the alignment film are formed on the substrate surface, the same substrate can be flattened and aligned. According to the method for manufacturing a liquid crystal display panel substrate according to the sixth to eighth aspects, since the flattening film and the alignment film are formed on the substrate surface, the same substrate can be flattened and aligned. In addition, the flattening film and the alignment film can be formed by flattening and orienting a photosensitive resin having a flattening function and an alignment function by irradiating light. Generation can be prevented, and a display device having high uniformity when forming a large-capacity, high-definition, colorized liquid crystal display panel can be manufactured. Further, since the reaction of the photosensitive resin can be accurately controlled by the energy amount of light irradiation, it is easy to control in the process and a liquid crystal display panel with less process variation can be manufactured.

According to the method for manufacturing a liquid crystal display panel substrate according to the ninth to eleventh aspects, since the flattening film and the alignment film are formed on the substrate surface, the same substrate can be flattened and aligned. In addition, the flattening film and the alignment film can be formed by flattening and orienting a photosensitive resin having a flattening function and an alignment function by irradiating light. Generation can be prevented, and a display device having high uniformity when forming a large-capacity, high-definition, colorized liquid crystal display panel can be manufactured. Further, since the reaction of the photosensitive resin can be accurately controlled by the energy amount of light irradiation, it is easy to control in the process and a liquid crystal display panel with less process variation can be manufactured.

According to the method for manufacturing a liquid crystal display panel substrate according to the twelfth aspect, the third aspect, the fourth aspect, the sixth aspect, the seventh aspect, the eighth aspect, the nineth aspect, the tenth aspect, or the eleventh aspect of the present invention provide a liquid crystal display panel. In addition to the effect, since the advancing axis of the linearly polarized light applied to the photosensitive resin having the alignment function is inclined with respect to the substrate surface, the liquid crystal molecules can be inclined with respect to the substrate surface.

According to the method of manufacturing a liquid crystal display panel substrate according to the thirteenth aspect, the third aspect, the fourth aspect, the sixth aspect, the seventh aspect, the eighth aspect, the nineth aspect, the tenth aspect, or the eleventh aspect of the present invention provide a liquid crystal display panel substrate. In addition to the effect, the advancing axis of the linearly polarized light that irradiates the photosensitive resin having an orientation function is tilted with respect to the substrate surface, and the azimuth of the irradiation direction with respect to the substrate is changed. The liquid crystal molecules can be tilted.

According to the method for manufacturing a liquid crystal display panel substrate according to claim 14, claim 2, claim 3, claim 4, claim 6, claim 6, claim 7, claim 8, claim 9, claim 10, or claim 10 In addition to the effects of claim 11, claim 12, or claim 13, the wavelength of light applied to the photosensitive resin having a planarizing function is made longer than the wavelength of light applied to the photosensitive resin having an alignment function. Therefore, the material is selected so that the photosensitive resin having a planarization function is polymerized when irradiating the long wavelength first, and the photosensitive resin having the alignment function is polymerized by irradiating the short wavelength second. Is performed, and a film can be formed by separately performing the light irradiation process.

According to a method of manufacturing a liquid crystal display panel substrate according to claim 15, claim 2, claim 3, claim 4, claim 6, claim 6, claim 7, claim 8, claim 9, or claim 10 or In addition to the effects of claim 11, claim 12, claim 13, or claim 14, since an optical reflection element is provided behind the substrate to irradiate light, light radiated from the light source and passed through the substrate is reflected again. And light irradiation can be effectively used.

According to the method of manufacturing a liquid crystal display panel substrate of the present invention, the second, third, fourth, sixth, seventh, eighth, ninth, tenth, or tenth aspect of the present invention is provided. In addition to the effects of claim 11, claim 12, claim 13, claim 14, or claim 15, by irradiating the substrate with light a plurality of times, it is possible to prevent a rapid rise in the substrate temperature due to the light irradiation. For example, different energies and different wavelengths of light can be used in the first irradiation and the second irradiation, so that a wider range of selection of alignment conditions can be made in the alignment step by light irradiation.

As described above, it is possible to manufacture a liquid crystal display device which is a very advantageous method for manufacturing a liquid crystal display panel in the future and has a high display performance.

[Brief description of the drawings]

FIG. 1 is a sectional view of a liquid crystal display panel substrate according to a first embodiment of the present invention.

FIG. 2 is a schematic view of an optical system showing a method for manufacturing a liquid crystal display panel substrate according to the first embodiment of the present invention.

FIG. 3 is a sectional view of a liquid crystal display panel substrate according to a second embodiment of the present invention.

FIG. 4 is a schematic view of an optical system showing a method of manufacturing a liquid crystal display panel substrate according to a third embodiment of the present invention.

FIG. 5 is a schematic view of an optical system showing a method for manufacturing a liquid crystal display panel substrate according to a fourth embodiment of the present invention.

FIG. 6 is a schematic view of an optical system showing a method for manufacturing a liquid crystal display panel substrate according to a fifth embodiment of the present invention.

FIG. 7 is a sectional view of a conventional liquid crystal display panel substrate.

FIG. 8 is a sectional view of a conventional liquid crystal display panel substrate.

[Explanation of symbols]

 10, 15 Substrate 11 Flattening and alignment film 12, 18 Liquid crystal display panel substrate 16 Flattening film 17 Alignment film 21 Light source 22 Prism 23 Lens 24 Linear polarization 25 Reflector L Light traveling axis

Claims (16)

[Claims] 1. A liquid crystal display panel substrate comprising: a substrate having electrodes formed on a surface thereof; and a flattening and alignment film formed of a photosensitive resin having a flattening function and an alignment function laminated on the surface of the substrate. 2. A step of applying a photosensitive resin having a flattening function and an orientation function to a substrate surface on which electrodes are formed, and flattening and orienting the photosensitive resin by irradiating light with light. Forming a liquid crystal display panel substrate. 3. A photosensitive resin having a planarizing function and an aligning function is irradiated with light from one light source with non-polarized light to perform a flattening process, and then the photosensitive resin is irradiated with light with linear polarized light from the one light source. 3. The method for manufacturing a liquid crystal display panel substrate according to claim 2, wherein an orientation treatment is performed. 4. A photosensitive resin having a planarizing function and an aligning function is irradiated with light from one light source with non-polarized light to perform a flattening process, and then the photosensitive resin is irradiated with light with linear polarized light from another light source. 3. The method for manufacturing a liquid crystal display panel substrate according to claim 2, wherein an orientation treatment is performed. 5. A substrate having electrodes formed on the surface, a planarizing film made of a photosensitive resin having a planarizing function laminated on the surface of the substrate, and having an orientation function laminated on the surface of the planarizing film. A liquid crystal display panel substrate comprising: an alignment film made of a photosensitive resin. 6. A step of sequentially applying a photosensitive resin having a planarization function and a photosensitive resin having an orientation function to a surface of a substrate on which electrodes are formed, and polymerizing the photosensitive resin having a planarization function by light irradiation. Forming a flattening film by
Forming an alignment film by polymerizing the photosensitive resin having the alignment function by irradiation with linearly polarized light. 7. A photosensitive resin having a planarizing function is irradiated with non-polarized light from one light source and polymerized, and then a photosensitive resin having an alignment function is irradiated with linear polarized light from the one light source and polymerized. 7. The method for manufacturing a liquid crystal display panel substrate according to claim 6, wherein: 8. A photosensitive resin having a planarizing function is irradiated with light from one light source with non-polarized light to polymerize, and then a photosensitive resin having an aligning function is irradiated with light with linear polarized light from another light source and polymerized. 7. The method for manufacturing a liquid crystal display panel substrate according to claim 6, wherein: 9. A step of applying a photosensitive resin having a flattening function to a surface of a substrate on which electrodes are formed, and forming a flattening film by flattening the photosensitive resin having a flattening function by light irradiation. Forming an alignment film by applying a photosensitive resin having an alignment function to the surface of the planarization film, and orienting the photosensitive resin having the alignment function by irradiating linearly polarized light. And a method of manufacturing a liquid crystal display panel substrate. 10. A photosensitive resin having a planarizing function is irradiated with non-polarized light from one light source to perform a flattening process, and then a photosensitive resin having an aligning function is irradiated with linear polarized light from the one light source. 10. The method for manufacturing a liquid crystal display panel substrate according to claim 9, wherein an orientation treatment is performed. 11. A photosensitive resin having a planarizing function is irradiated with non-polarized light from one light source to perform a flattening process, and then a photosensitive resin having an aligning function is irradiated with linear polarized light from another light source. 10. The method for manufacturing a liquid crystal display panel substrate according to claim 9, wherein an orientation treatment is performed. 12. The method according to claim 3, wherein the light is irradiated with the linearly polarized light traveling axis inclined with respect to the substrate surface.
A method for manufacturing a liquid crystal display panel substrate according to claim 9, claim 10, or claim 11. 13. The method of claim 3, wherein the linearly polarized light is irradiated with light by changing the azimuth of the irradiation direction with respect to the substrate surface while inclining the traveling axis of the linearly polarized light with respect to the substrate surface. 12. The method of manufacturing a liquid crystal display panel substrate according to claim 6, claim 7, claim 7, claim 8, claim 9, claim 10, or claim 11. 14. The method according to claim 2, wherein the wavelength of light applied to the photosensitive resin having a planarizing function is longer than the wavelength of light applied to the photosensitive resin having an alignment function. 14. The method of manufacturing a liquid crystal display panel substrate according to claim 4, claim 6, claim 6, claim 7, claim 8, claim 9, claim 10, claim 11, or claim 12, or claim 13. 15. An optical reflection element is provided behind a substrate to irradiate light. Claim 9 or Claim 10 or Claim 11
15. The method for manufacturing a liquid crystal display panel substrate according to claim 12, or claim 13 or claim 14. 16. The method according to claim 2, wherein the substrate is irradiated with light a plurality of times. Claim 11 or Claim 1
Claim 2 or Claim 13 or Claim 14 or Claim 15
The manufacturing method of the liquid crystal display panel substrate described in the above.