JPH10115377A - Fluid controller - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fluid controller to eliminate a need for increased fastening of a bolt without the occurrence of relaxation of a stress even during use for a long period, to prevent a synthetic resin membrane from being moved due to opening and closing of a valve, prevent the occurrence of wear, keep sealing ability, and besides perform fastening of a bolt with appropriate torque without using a torque wrench. SOLUTION: A fluid controller comprises a valve box 4 having an inlet flow passage 2 and an outlet flow passage 3; a diaphragm 6 fixed in a nipped state in a gap between the valve box 4 and a valve element 5; and an operation mechanism to expand and contract the diaphragm 6. The diaphragm 6 consists of a synthetic resin membrane and a rubber membrane 8 having an area lower than that of the synthetic resin membrane. The synthetic resin membrane is directly nipped not through the rubber membrane 8 but by a nipping member 10 arranged on the outer periphery of the rubber membrane 8.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to a fluid controller,
An object of the present invention is to provide a fluid controller which can maintain a stable sealing property for a long period of time and does not require retightening of bolts.

[0002]

2. Description of the Related Art An example of a conventional fluid controller will be described with reference to FIG. In the conventional fluid controller (A) shown in FIG. 7, the diaphragm (B) is made of polytetrafluoroethylene resin (P).
TFE) synthetic resin film (C) and rubber film (D)
The synthetic resin film (C) and the rubber film (D) have substantially the same shape and are positioned by holes of the same pitch, so that the valve body (E) and the valve box (F) can be connected to each other. It was fixed between them.

[0003]

However, the fluid controller (A) having the above-mentioned conventional structure has the following problems. That is, since the synthetic resin film (C) is sandwiched and fixed via the thick rubber film (D), stress relaxation occurs due to temperature change and repeated opening and closing of the valve. Therefore, the bolt (G) is retightened at regular intervals. Needed. Also,
Since the peripheral portion of the synthetic resin film (C) slides on the valve box (F) during opening and closing of the valve due to stress relaxation, wear of the synthetic resin film (C) deteriorates sealing performance. Further, it is difficult to judge the completion of the bolt tightening due to the elasticity of the rubber film (D). Therefore, a torque wrench is required for tightening the bolts. Yes, proper bolt tightening could not be performed when replacing the diaphragm.

The present invention has been made in view of the above-mentioned conventional problems, and does not require retightening of bolts without causing stress relaxation even when used for a long period of time. It is an object of the present invention to provide a fluid controller which can prevent abrasion without movement, maintain sealing properties, and can perform bolt tightening with an appropriate torque without using a torque wrench.

[0005]

According to the present invention, as a means for solving the above-mentioned problems, according to the first aspect of the present invention, a valve box having an inlet flow path and an outlet flow path, and the valve box and the valve body are connected to each other. A diaphragm that is fixed in a gap and a fluid controller that includes an operation mechanism that expands and contracts the diaphragm, wherein the diaphragm has a synthetic resin film and a rubber film having an area smaller than that of the synthetic resin film. Wherein the synthetic resin film is directly sandwiched by a sandwiching member provided on the outer periphery of the rubber film without interposing the rubber film. Further, in the invention according to claim 2, the rubber controller is a fluid controller according to claim 1, wherein the rubber film has a circular shape smaller than a positioning hole provided in the synthetic resin film. According to a third aspect of the present invention, there is provided the fluid controller according to the first or second aspect, wherein the rubber film has a larger thickness than a holding member. In the invention according to claim 4, the holding member is formed integrally with a diaphragm holding portion of the valve body.
The fluid controller according to any one of the first to third aspects.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a fluid controller according to the present invention will be described below with reference to the drawings. FIG. 1 is a partial sectional view showing one embodiment of a fluid controller according to the present invention,
2 is a plan view of a diaphragm of the fluid controller according to the present invention, FIG. 3 is a cross-sectional view of FIG. 2, FIG. 4 is a plan view of a holding member, and FIG. 5 is a cross-sectional view showing another embodiment of the holding member. FIG. 6 is a partial sectional view showing another embodiment of the fluid controller according to the present invention.

As shown in FIG. 1, a fluid controller (1) according to the present invention comprises a valve box (4) having an inlet channel (2) and an outlet channel (3); It comprises a diaphragm (6) fixedly held in a gap with the valve body (5), and an operating mechanism (7) for expanding and contracting the diaphragm (6).

The diaphragm (6) is composed of a rubber film (8) and a synthetic resin film (9) made of polytetrafluoroethylene resin (PTFE) or the like, and the synthetic resin film (9) is made of a rubber film (9). The holding member (10) provided on the outer periphery of (8) is directly held between the valve box (4) without the rubber film (8).

As shown in FIG. 2, the rubber film (8) has a circular shape smaller than the positioning hole (91) provided in the synthetic resin film (9). In addition, (14) in FIG. 2 is a hanging bracket. Further, the rubber film (8) is formed so as to be thicker than the holding member (10) in a natural state. The material of the rubber film (8) is not particularly limited, and is a known natural rubber, a nitrile rubber, a styrene rubber, a butadiene / isobutylene synthetic rubber, a polychloroprene rubber, a butyl rubber, a silicon having excellent cold resistance, flexibility, and corrosiveness. Rubber such as rubber, polyurethane rubber, fluorine rubber (FPM), and ethylene propylene rubber (EPDM) can be suitably used.

As shown in FIG. 4, the holding member (10)
Rubber film (8) having substantially the same outer shape as synthetic resin film (9)
Has a circular hole (11) in which can be stored. Outside the circular hole (11), a through hole (12) is formed at a position corresponding to the positioning hole (91) of the synthetic resin film (9).
Is provided. The material of the holding member (10) is not particularly limited as long as it is a hard member that is not deformed by opening and closing the valve, but is preferably made of a metal material such as SUS.

As described above, the rubber film (8) of the diaphragm (6) is formed smaller than the synthetic resin film (9), and is directly interposed between the holding members (10) without the rubber film (8). With the configuration in which the peripheral portion of (9) is sandwiched, stress relaxation due to temperature change and opening and closing of the valve can be prevented, and the tightening of the bolt (13) does not become loose. Furthermore, since the periphery of the synthetic resin film (9) is directly pressed by the holding member (10), the synthetic resin film (9) does not slide on the valve box (4) when the valve is opened and closed. In addition, even when bolts are tightened, the rubber film (8) is not interposed, so that when the tightening is completed, the torque rapidly increases, and it is possible to easily determine the completion of the tightening without using a torque wrench.

In the fluid controller (1) according to the present invention, as shown in FIGS. 5 and 6, the holding member (10) is formed integrally with the diaphragm holding portion (51) of the valve body (5). It may be configured. Thus, the holding member (10)
Is formed integrally with the diaphragm holding portion (51) of the valve body (5), whereby the rubber film (8) and the synthetic resin film (9) can be reliably positioned and fixed by the holding member (10) and manufactured. Costs can be reduced.

In the illustrated example, the diaphragm (6)
Although the operation mechanism (7) for expanding and contracting is configured manually, the operation mechanism (7) of the fluid controller according to the present invention is not limited to the illustrated example at all, and other operation mechanisms, for example, a compressor A known pneumatically operated operating mechanism using a spring and a spring may be used.

[0013]

As described above, according to the first aspect of the present invention, there is provided a valve box having an inlet flow path and an outlet flow path, and a diaphragm fixedly held in a gap between the valve box and the valve body. A fluid controller comprising an operating mechanism for expanding and contracting the diaphragm, wherein the diaphragm is composed of a synthetic resin film and a rubber film having a smaller area than the synthetic resin film, and the synthetic resin film Is a fluid controller characterized by being directly sandwiched by a sandwiching member provided on the outer periphery of the rubber film without the intervention of the rubber film, and has the following effects.

That is, since the rubber film of the diaphragm is formed smaller than the synthetic resin film and is configured so that the peripheral portion of the synthetic resin film is directly sandwiched by the sandwiching member without the rubber film interposed therebetween, it is strong and uniform. The synthetic resin film can be fixed, and stress is not relaxed due to temperature change or opening / closing of the valve, so that bolt tightening is not loosened. Therefore, it is not necessary to periodically retighten the bolt, and maintenance and inspection are easy. Further, the tightening amount of the rubber film can be easily adjusted by the thickness of the holding member. Further, since the peripheral portion of the synthetic resin film is directly pressed by the holding member, the synthetic resin film does not move when the valve is opened and closed, so that wear of the synthetic resin film can be suppressed and excellent sealing performance can be maintained for a long period of time. be able to. Moreover, even when tightening the bolts, the rubber film does not intervene, so the torque rises sharply when the tightening is completed, and it is easy to judge the completion of the tightening without using a torque wrench, and the workability when replacing the diaphragm Extremely excellent.

The invention according to claim 2 is the fluid controller according to claim 1, wherein the rubber film has a circular shape smaller than a positioning hole provided in the synthetic resin film. The peripheral portion of the synthetic resin film can be directly sandwiched by the sandwiching member without the rubber film, and the shapes of the rubber film and the sandwiching member can be made simple and easy to manufacture.

According to a third aspect of the present invention, in the fluid controller according to the first or second aspect, the rubber film is made thicker than the holding member. Is easy to adjust, and the rubber film can be surely deformed, so that the sealing property is excellent.

The invention according to claim 4 is the fluid controller according to any one of claims 1 to 3, wherein the holding member is formed integrally with the diaphragm holding portion of the valve body. The rubber film and the synthetic resin film can be reliably positioned and fixed, and the manufacturing cost can be reduced.

[Brief description of the drawings]

FIG. 1 is a partial sectional view showing one embodiment of a fluid controller according to the present invention.

FIG. 2 is a plan view of a diaphragm of the fluid controller according to the present invention.

FIG. 3 is a sectional view of FIG. 2;

FIG. 4 is a plan view of a holding member.

FIG. 5 is a sectional view showing another embodiment of the holding member.

FIG. 6 is a partial sectional view showing another embodiment of the fluid controller according to the present invention.

FIG. 7 is a partial sectional view showing one embodiment of a conventional fluid controller.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Fluid controller 2 Inlet flow path 3 Outlet flow path 4 Valve box 5 Valve main body 51 Diaphragm holding part 6 Diaphragm 7 Operation mechanism 8 Rubber film 9 Synthetic resin film 91 Positioning hole 10 Holding member

 ──────────────────────────────────────────────────の Continuing on the front page (72) Inventor Hiroyoshi Mese 2-3-2, Nobori, Nishi-ku, Osaka-shi Fujikin Co., Ltd.

Claims (4)

[Claims] 1. A fluid control system comprising: a valve box having an inlet flow path and an outlet flow path; a diaphragm fixedly held in a gap between the valve box and the valve body; and an operation mechanism for expanding and contracting the diaphragm. Wherein the diaphragm is composed of a synthetic resin film and a rubber film having a smaller area than the synthetic resin film, and the synthetic resin film is formed of a rubber film by a sandwiching member provided on the outer periphery of the rubber film. A fluid controller characterized in that the fluid controller is sandwiched directly without interposition of the fluid controller. 2. The fluid controller according to claim 1, wherein the rubber film has a circular shape smaller than a positioning hole provided in the synthetic resin film. 3. The fluid controller according to claim 1, wherein the rubber film is made thicker than the sandwiching member. 4. The valve according to claim 1, wherein the holding member is formed integrally with a diaphragm holding portion of the valve body.
4. The fluid controller according to any one of claims 1 to 3.