JPH10107011A5 - - Google Patents

Info

Publication number
JPH10107011A5
JPH10107011A5 JP1996275392A JP27539296A JPH10107011A5 JP H10107011 A5 JPH10107011 A5 JP H10107011A5 JP 1996275392 A JP1996275392 A JP 1996275392A JP 27539296 A JP27539296 A JP 27539296A JP H10107011 A5 JPH10107011 A5 JP H10107011A5
Authority
JP
Japan
Prior art keywords
plasma processing
mode
processing apparatus
microwaves
waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1996275392A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10107011A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP8275392A priority Critical patent/JPH10107011A/ja
Priority claimed from JP8275392A external-priority patent/JPH10107011A/ja
Priority to US08/936,820 priority patent/US5874706A/en
Priority to KR1019970048683A priority patent/KR100405932B1/ko
Priority to TW086113974A priority patent/TW362238B/zh
Publication of JPH10107011A publication Critical patent/JPH10107011A/ja
Publication of JPH10107011A5 publication Critical patent/JPH10107011A5/ja
Pending legal-status Critical Current

Links

JP8275392A 1996-09-26 1996-09-26 プラズマ処理装置 Pending JPH10107011A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP8275392A JPH10107011A (ja) 1996-09-26 1996-09-26 プラズマ処理装置
US08/936,820 US5874706A (en) 1996-09-26 1997-09-24 Microwave plasma processing apparatus using a hybrid microwave having two different modes of oscillation or branched microwaves forming a concentric electric field
KR1019970048683A KR100405932B1 (ko) 1996-09-26 1997-09-25 마이크로파플라즈마처리장치
TW086113974A TW362238B (en) 1996-09-26 1997-09-25 Microwave plasma processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8275392A JPH10107011A (ja) 1996-09-26 1996-09-26 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPH10107011A JPH10107011A (ja) 1998-04-24
JPH10107011A5 true JPH10107011A5 (enExample) 2004-09-30

Family

ID=17554865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8275392A Pending JPH10107011A (ja) 1996-09-26 1996-09-26 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH10107011A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4523118B2 (ja) * 2000-06-14 2010-08-11 東京エレクトロン株式会社 プラズマ処理装置
JP3625197B2 (ja) * 2001-01-18 2005-03-02 東京エレクトロン株式会社 プラズマ装置およびプラズマ生成方法
CN1293789C (zh) * 2001-01-18 2007-01-03 东京毅力科创株式会社 等离子体装置及等离子体生成方法
JP2010050046A (ja) 2008-08-25 2010-03-04 Hitachi High-Technologies Corp プラズマ処理装置

Similar Documents

Publication Publication Date Title
CA2249731A1 (en) Audio signal processor with pitch and effect control
TW328617B (en) Plasma processing device and plasma processing method
AU3358795A (en) Method and apparatus for improving the performance and steam mixing capabilities of a nuclear power electrical generation system
EP0237078A3 (en) Downstream microwave plasma processing apparatus having an improved coupling structure between microwave and plasma
NO955322D0 (no) Adkomstpluggflens
TW346701B (en) Power converter apparatus
JPH10107011A5 (enExample)
AU1285692A (en) Microwave ashing and analytical apparatuses, components and processes
AU3459197A (en) Apparatus for accepting request of processing through speech and its accepting method
AU6719390A (en) Apparatus for the processing of mixes and pastes
KR900000441B1 (en) Microwave plasma process and device therefor
CA2098018A1 (en) Device and method for polarisation-independent processing of a signal comprising a combined waveguide and polarisation converter
AU7335600A (en) Method and apparatus for microwave signal generation that uses photonic mixing
DZ1328A1 (fr) Procédé d'oxydation d'une charge oxydable en phasegazeuse et réacteur pour la mise en oeuvre de ce procédé.
JP2808888B2 (ja) マイクロ波プラズマ装置
Evele Influence of Process Variables on Hairlining
JP2505741B2 (ja) マイクロ波プラズマ処理装置
JP2607832B2 (ja) マイクロ波プラズマ処理方法
JPS55141806A (en) Corrugate cone horn/circular waveguide converter
SE9803319D0 (sv) Converter process and device with electromagnetic stirrer
JPS56112477A (en) Microwave plasma treating apparatus
CA2215065A1 (en) Apparatus and process for transporting molten metal
JPH0617284Y2 (ja) マイクロ波プラズマ処理装置
JPS6360530A (ja) マイクロ波プラズマ処理装置
SE8500860D0 (sv) Sett och anordning for kontroll av en i en turbulent vetskestrom forlopande, heterogen, diffusionskinetisk omvandlingsprocess