JPH0996413A - Fuel gas supply control method of ironworks - Google Patents

Fuel gas supply control method of ironworks

Info

Publication number
JPH0996413A
JPH0996413A JP7255037A JP25503795A JPH0996413A JP H0996413 A JPH0996413 A JP H0996413A JP 7255037 A JP7255037 A JP 7255037A JP 25503795 A JP25503795 A JP 25503795A JP H0996413 A JPH0996413 A JP H0996413A
Authority
JP
Japan
Prior art keywords
cog
demand
supply
amount
fuel gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP7255037A
Other languages
Japanese (ja)
Inventor
Hiroyuki Takahashi
宏之 高橋
Hiroshi Tamura
博 田村
Yasuhiro Nagai
安広 永井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP7255037A priority Critical patent/JPH0996413A/en
Publication of JPH0996413A publication Critical patent/JPH0996413A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

Landscapes

  • Feeding And Controlling Fuel (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a fuel gas supply control method for an ironworks which executes accurately supply-timing for a synthetic gas to COG, and controls the level of a COG holder reliably and reduces the amount of synthetic gas to be used when demand balance for COG is disturbed. SOLUTION: This fuel gas supply control method of an ironworks determines synthetic gas supply timing to COG based on COG demand and LDG demand and supplies the gas and increases a heat release value, thereby reducing the supply amount of COG and controlling a COG holder level within a demand supply control range during operation when SOC, LDG and BFG are being supplied to an iron manufacturing process and a power plant boiler.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明方法は、製鉄所の燃料
ガス供給制御方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fuel gas supply control method for an iron mill.

【0002】[0002]

【従来の技術】製鉄所において、製鉄工程で発生するガ
スとしてはコークス炉発生ガス(以下COGという)、
高炉ガス(以下BFGという)及び転炉ガス(以下LD
Gという)があり、これらのガスは副生ガスとして回収
し燃料ガスとして製鉄工程の加熱炉等々及び発電用ボイ
ラーへ供給し、エネルギーとして利用している。このよ
うな燃料ガスの供給制御方法としては、製鉄の生産計画
に基づく長期エネルギー運用計画と、運用実績に応じた
短期エネルギー運用計画に基づき購入電力量及び購入ガ
ス量が最小になるごとく、副生ガスを回収するガスホル
ダーのレベル推移(貯蔵量)及び自家発電設備の発電量
をそれぞれ決定して、制御することが特公平5−221
57号公報に開示されている。
2. Description of the Related Art In a steelworks, a gas generated in an ironmaking process is a coke oven gas (hereinafter referred to as COG),
Blast furnace gas (hereinafter referred to as BFG) and converter gas (hereinafter referred to as LD)
G)), and these gases are collected as by-product gases and supplied as fuel gas to heating furnaces and the like in the iron making process and boilers for power generation, and used as energy. Such a fuel gas supply control method is based on a long-term energy operation plan based on the steelmaking production plan and a short-term energy operation plan based on the operation results, so It is desirable to determine and control the level transition (storage amount) of the gas holder that collects gas and the power generation amount of the private power generation facility, respectively.
No. 57 is disclosed.

【0003】[0003]

【発明が解決しようとする課題】上記のごとき燃料ガス
の発熱量はBFG約760Kcal/m3N 、COG約4000Kcal/m
3N 、LDG約2000Kcal/m3NとCOGの発熱量が最も高
く、かつ発生量も大量である。このようなことからCO
Gは、大量に燃料ガスを必要とするコークス炉、熱風
炉、連続熱間圧延(熱延)工程の加熱炉等に主として供
給し、またコークス炉及び熱風炉へ供給するCOGへL
DGを混入することもある。一方発電用のボイラーへの
燃料ガス供給は、COGの回収が余剰基調のときは供給
するが基本的にはBFGとLDGの混合ガスを供給す
る。
The calorific value of the fuel gas as described above is about 760 Kcal / m 3 N for BFG and 4000 Kcal / m for COG.
3 N, the highest heating value of LDG about 2000 kcal / m 3 N and COG, and the generation amount is also large quantities. Because of this, CO
G is mainly supplied to a coke oven that requires a large amount of fuel gas, a hot blast stove, a heating oven for a continuous hot rolling (hot rolling) process, and the like.
DG may be mixed in. On the other hand, fuel gas is supplied to the power generation boiler when COG recovery is in an excessive tone, but basically a mixed gas of BFG and LDG is supplied.

【0004】このような燃料ガス供給においては、特に
最大需要工程でのフル稼動による需要増大、一部コーク
ス炉の定期修理等でCOGが不足することがある。また
転炉の稼動率の低下によるLDG回収量の低減により、
COG供給が増大する等々によってCOGの需給バラン
スがくずれることがある。このようなときには、例えば
BFGとLPG(プロパンガス、発熱量28500Kcal
/ m3N )の合成ガスを主として大需要工程である熱風
炉、加熱炉等へ供給するCOGへ混入してCOGの発熱
量を増加し、その発熱量増加分のCOG供給量を減少す
ることによって、全体のガスバランス維持しつつエネル
ギーの需給管理を行うものである。
In such fuel gas supply, COG may become insufficient due to increased demand due to full operation particularly in the maximum demand process and periodic repair of some coke ovens. Also, by reducing the LDG recovery amount due to a decrease in the operating rate of the converter,
The COG supply / demand balance may be disrupted due to an increase in COG supply and the like. In such a case, for example, BFG and LPG (propane gas, calorific value 28500 Kcal
/ m 3 N) of synthetic gas is mixed with COG that is mainly supplied to high demand processes such as hot blast stoves and heating furnaces to increase the calorific value of COG and reduce the COG supply amount corresponding to the increased calorific value. It manages energy supply and demand while maintaining the overall gas balance.

【0005】しかして上記のごとく、合成ガスを製鉄工
程へ供給中のCOGへ混入すべきか否かの判断は、回収
したCOGホルダーのレベル(COG貯蔵レベル)の変
動によって、オペレターが判断しているのが実情であ
る。従って、オペレターによる合成ガスのCOGへの混
入タイミングに個人差があり、また合成ガス混入の必要
がないのに混入することもある。このようなことからL
PG等の購入ガス量が増加し、エネルギーコストを著し
く上昇させる等の課題がある。本発明方法は、このよう
な課題を有利に解決するためなされたものであり、CO
G等の需要量に基づき、合成ガスのCOGへの混入タイ
ミングを決定し、必要時に正確に合成ガスを混入する製
鉄所の燃料ガス供給制御方法を提供することを目的とす
るものである。
However, as described above, the operator decides whether or not the synthesis gas should be mixed with the COG being supplied to the steelmaking process, based on the fluctuation of the level of the collected COG holder (COG storage level). Is the reality. Therefore, there are individual differences in the timing of mixing the synthetic gas into the COG due to the operator, and there is a case where the synthetic gas may be mixed into the COG when it is not necessary. Because of this, L
There are problems such as an increase in the amount of purchased gas such as PG and a significant increase in energy cost. The method of the present invention has been made in order to advantageously solve such a problem.
An object of the present invention is to provide a fuel gas supply control method for a steel mill, which determines the mixing timing of the syngas into the COG based on the demand amount of G and the like and accurately mixes the syngas when necessary.

【0006】[0006]

【課題を解決するための手段】本発明方法の特徴とする
ところは、COG、LDG及びBFGを製鉄工程及び発
電用ボイラーへ供給して操業するに際し、COG需要量
とLDG需要量から製鉄工程へ供給中のCOGへの合成
ガス供給タイミングを決定して供給し、発熱量を増加せ
しめるとともに、代替えガスとして供給してCOG供給
量を低減し、COGホルダーレベルを需要供給調整範囲
内に制御することを特徴とする製鉄所の燃料ガス供給制
御方法である。
A feature of the method of the present invention is that COG, LDG and BFG are supplied from a COG demand amount and an LDG demand amount to a steelmaking process when the COG, LDG and BFG are supplied to a steelmaking process and a power generation boiler for operation. Determine and supply the syngas supply timing to the COG that is being supplied to increase the calorific value, and supply it as an alternative gas to reduce the COG supply amount and control the COG holder level within the supply and demand adjustment range. Is a fuel gas supply control method for an iron mill.

【0007】[0007]

【発明の実施の形態】本発明方法の一例を図面により説
明する。図1において、コークス炉1から発生したCO
GをCOGホルダー2へ回収するとともに、COGの一
部にLDGとBFGの混合ガスをコークス炉1の石炭乾
留(コークス製造)用の燃料ガスとして供給し、COG
ホルダー2へ回収したCOGは、余剰基調のときに発電
用ボイラー3へ供給するが、通常はBFGとLDGの混
合ガスを別系統から供給する。またCOGは熱風炉4へ
LDGを混入した混合ガスを供給し、更にCOGを熱延
加熱炉5、厚板加熱炉6及びその他工場7の熱処理炉等
へ供給する。COGの需給バランスがくずれたときは、
制御器8(計算器)で例えば、製鉄工程である熱延加熱
炉5と厚板加熱炉6の稼動基数、熱風炉4の稼動状況及
びその他工場7の熱処理炉等の稼動状況から例えば最大
需要工程のCOGとLDGの需要量を予測し、COGホ
ルダー2のCOG貯蔵量(ホルダーレベル)変動に対し
て、合成ガスを混入するか否かを判断する。即ち、CO
Gの供給をこのまま続行すれば、COGホルダー2の運
用下限レベルを割り込むおそれがあると判断したとき
は、合成ガス供給設備9へ合成ガスの供給をオペレータ
ーまたは自動的に指示して、製鉄工程へ供給中のCOG
へ合成ガスを供給しCOGとの混合ガスとして、COG
の発熱量を増加せしめて熱風炉4、熱延加熱炉5、厚板
加熱炉6及びその他工場7へ供給することによって、C
OGの発熱量増加分に相当するCOG供給量を低減して
COGホルダー2のレベル(COG貯蔵量)の運用範囲
(需給調整範囲)に調整するものである。
DESCRIPTION OF THE PREFERRED EMBODIMENTS One example of the method of the present invention will be described with reference to the drawings. In FIG. 1, CO generated from the coke oven 1
G is collected in the COG holder 2, and a mixed gas of LDG and BFG is supplied as a fuel gas for coal carbonization (coke production) in the coke oven 1 to a part of the COG, thereby
The COG collected in the holder 2 is supplied to the power generation boiler 3 when there is an excess tone, but normally a mixed gas of BFG and LDG is supplied from another system. Further, COG supplies a mixed gas containing LDG to the hot-air stove 4, and further supplies COG to the hot rolling heating furnace 5, the plate heating furnace 6 and the heat treatment furnaces of other factories 7. When the supply-demand balance of COG collapses,
In the controller 8 (calculator), for example, the maximum demand from the operating number of the hot-rolling heating furnace 5 and the plate heating furnace 6 in the iron making process, the operating status of the hot blast stove 4, and the operating status of the heat treatment furnace of the other factory 7, etc. The demands of COG and LDG in the process are predicted, and it is determined whether or not the synthesis gas is mixed in with respect to the COG storage amount (holder level) fluctuation of the COG holder 2. That is, CO
If it is determined that the operation lower limit level of the COG holder 2 may be interrupted if the G supply is continued as it is, an operator or automatically instructs the synthesis gas supply facility 9 to supply the synthesis gas to the steelmaking process. COG being supplied
COG is supplied as a mixed gas with COG
C by increasing the calorific value of C to supply to the hot-blast stove 4, hot-rolling heating furnace 5, thick plate heating furnace 6 and other factories 7.
The COG supply amount corresponding to the increase in the heat generation amount of the OG is reduced and adjusted to the operating range (supply / demand adjustment range) of the level of the COG holder 2 (COG storage amount).

【0008】このように制御器8において、COGとL
DGの需要量から合成ガスのCOGへの供給タイミング
を決定するには、計算器による制御で確実にできるが、
一層正確にタイミングを決定するには、ファジィ制御
(理論)が有利であり、かつメンバーシップ関数を用い
ることが有効である。
Thus, in the controller 8, COG and L
In order to determine the supply timing of the syngas to the COG from the demand amount of the DG, it can be surely controlled by a computer,
To determine the timing more accurately, fuzzy control (theory) is advantageous, and it is effective to use the membership function.

【0009】次に前記のごとき、COGの大需要工程で
ある熱延加熱炉のCOG需要量予測算出の具体例を挙げ
る。 COG需要量=A×T1+B×T1×D2 +C×T2×
3 +D×Z1+E T1:均熱帯T/Hr、T2:加熱帯T/Hr D2 :加熱帯昇温量(鋼片抽出温度−鋼片装入温度) D3 :予熱帯昇温量(鋼片抽出温度−鋼片装入温度) Z1:均熱帯 A、B、C、D、E:各予測因子の係数で加熱炉稼動率
によりテーブル化
Next, a concrete example of the COG demand forecast calculation of the hot rolling furnace, which is a large COG demand process as described above, will be given. COG demand = A × T1 + B × T1 × D 2 + C × T2 ×
D 3 + D × Z1 + E T1: soaking zone T / Hr, T2: heating zone T / Hr D 2: heating ObiNoboru Yutakaryou (slab extraction temperature - billet loading temperature) D 3: preheating ObiNoboru Yutakaryou (Steel Piece extraction temperature-steel piece charging temperature) Z1: Soaking zone A, B, C, D, E: Table of heating factor operating rates with coefficients of each predictive factor

【0010】また厚板加熱炉のCOG需要量予測算出例
としては、 COG需要量=A×TON+B×QS+B×QS+C×
QH+E TON:鋼片抽出T/10分 QS:均熱帯における鋼片抽出温度−鋼片装入温度×T
ON QH:加熱帯における鋼片抽出温度−鋼片装入温度×T
ON A、B、C、E:各予測因子の係数 鋼片装入温度:熱片400℃、冷片20℃の固定値
Further, as an example of COG demand prediction calculation of a thick plate heating furnace, COG demand = A × TON + B × QS + B × QS + C ×
QH + E TON: Slab extraction T / 10 minutes QS: Slab extraction temperature in soaking zone-Strip charging temperature x T
ON QH: Steel piece extraction temperature in heating zone-steel piece charging temperature x T
ON A, B, C, E: Coefficient of each predictive factor Steel billet charging temperature: Fixed value of hot strip 400 ° C, cold strip 20 ° C

【0011】次に、合成ガスを製鉄工程へ供給中のCO
Gへ供給することによって、COG供給量が低減するこ
とからCOGホルダーの回収COGが増加することによ
る合成ガス混入(供給)からt時間後までのホルダーレ
ベルの変化値の算出例を挙げる。 合成ガス供給後の時間 X ホルダーレベルの変化 Y 0≦t≦0.5のとき Y=∫0 t (60x+20+a−45)dx 0.5≦t Y=∫0 0.5(60x+20−35)dx+∫0.5 t (5
0+a−45)dx このようにしてホルダーレベルの最大落ち込み量Ymin
を計算する。但し計算誤差を考慮してYmin は5000
3 N単位で切り上げる。(安全サイドの基準とする) 運用上のホルダーレベル=|最大落ち込み量Ymin |+
設備保安上の下限レベルこのようにして、合成ガスの供
給タイミングを決定してCOGホルダーレベルの需要調
整範囲を逸脱すないようにする。
Next, the CO that is supplying the synthesis gas to the ironmaking process.
An example of calculating the change value of the holder level from the time (t) after the mixing (supply) of the synthesis gas due to the increase of the COG recovery COG of the COG holder due to the decrease of the COG supply amount by supplying to G will be given. Time after syngas supply X Change in holder level Y 0 ≤ t ≤ 0.5 Y = ∫ 0 t (60x + 20 + a-45) dx 0.5 ≤ t Y = ∫ 0 0.5 (60x + 20-35) dx + ∫ 0.5 t (5
0 + a-45) dx In this way, the maximum amount of holder level drop Ymin
Is calculated. However, Ymin is 5000 considering the calculation error.
Round up in units of m 3 N. (The standard for safety side) Operational holder level = | Maximum drop amount Ymin | +
Lower limit level of facility security In this way, the supply timing of synthesis gas is determined so as not to deviate from the COG holder level demand adjustment range.

【0012】[0012]

【実施例】次に、本発明方法の実施例を挙げる。 1)燃料ガス COG平均発生量:13万m3 N/Hr LDG平均発生量: 6万m3 N/Hr BFG平均発生量:110万m3 N/Hr 合成ガス:LPG:BFG=1:2 合成ガスのCOGへの供給量:7500m3 N/Hr 2)COGホルダー ホルダー容量:10万m3 ホルダーのCOG需要調整範囲(量)5万m3 3)COG需要量 コークス炉:平均2.3万m3 N/Hr(LDG平均
1.8万m3 N/Hr) 熱風炉:平均1.6万m3 N/Hr(LDG平均2.4
万m3 N/Hr) 熱延加熱炉:平均2.5万m3 N/Hr(基数4基) 厚板加熱炉:平均0.3万m3 N/Hr(基数1基) その他工場:平均8.6万m3 N/Hr
Next, examples of the method of the present invention will be described. 1) Fuel gas COG average generation amount: 130,000 m 3 N / Hr LDG average generation amount: 60,000 m 3 N / Hr BFG average generation amount: 1.1 million m 3 N / Hr Synthesis gas: LPG: BFG = 1: 2 Supply of syngas to COG: 7500 m 3 N / Hr 2) COG holder Capacity of holder: 100,000 m 3 COG demand adjustment range (amount) 50,000 m 3 3) COG demand Coke oven: 2.3 on average 10,000 m 3 N / Hr (LDG average 18,000 m 3 N / Hr) Hot stove: Average 16,000 m 3 N / Hr (LDG average 2.4
10,000 m 3 N / Hr) Hot rolling furnace: Average 25,000 m 3 N / Hr (4 units) Thick plate furnace: Average 330,000 m 3 N / Hr (1 unit) Other plants: Average 86,000 m 3 N / Hr

【0013】このような燃料ガスの需給において、次記
のごとくファジィ制御によりCOGの最大需要工程であ
る熱延加熱炉のCOG需要量、LDG需要量から供給中
のCOGへの合成ガス供給タイミングをメンバーシップ
関数で表し、25個の規則にまとめ制御した。
In such supply and demand of fuel gas, fuzzy control is used to determine the COG demand amount of the hot rolling furnace, which is the maximum demand process of COG, and the syngas supply timing from the LDG demand amount to the COG being supplied. It is represented by a membership function and is controlled by 25 rules.

【表1】 [Table 1]

【0014】上記のごとき、メンバーシップ関数表によ
り制御したところ、製鉄工程へ供給中のCOGへの合成
ガスの供給タイミングが正確にとれ、COGホルダーの
レベルも常時需要調整範囲に確実に調整でき、しかもオ
ペレーターの合成ガス供給タイミングの判断に比べ合成
ガス使用量を約 %低減することができた。
When controlled by the membership function table as described above, the timing of supplying the syngas to the COG being supplied to the steelmaking process can be accurately taken, and the level of the COG holder can be reliably adjusted to the demand adjustment range at all times. Moreover, compared to the operator's judgment of the timing of supplying the syngas, the amount of syngas used could be reduced by about%.

【0015】[0015]

【発明の効果】本発明方法によれば、COGホルダーの
レベルを常時正確に需要調整範囲に調整することがで
き、ホルダーの機能(バックアップ機能等)を十分に発
揮することができる。また合成ガスの使用量を低減する
ことができ、燃料ガスのコストを低下することができる
等の優れた効果が得られる。
According to the method of the present invention, the level of the COG holder can always be accurately adjusted to the demand adjustment range, and the holder function (backup function, etc.) can be sufficiently exerted. Further, it is possible to reduce the amount of the syngas used, and it is possible to obtain the excellent effects such as the cost of the fuel gas.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明方法の一例を示すフロー図である。FIG. 1 is a flow chart showing an example of a method of the present invention.

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【手続補正書】[Procedure amendment]

【提出日】平成7年10月20日[Submission date] October 20, 1995

【手続補正1】[Procedure Amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0014[Correction target item name] 0014

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0014】上記のごとき、メンバーシップ関数表によ
り制御したところ、製鉄工程へ供給中のCOGへの合成
ガスの供給タイミングが正確にとれ、COGホルダーの
レベルも常時需要調整範囲に確実に調整でき、しかもオ
ペレーターの合成ガス供給タイミングの判断に比べ合成
ガス使用量を約25%低減することができた。
When controlled by the membership function table as described above, the timing of supplying the syngas to the COG being supplied to the steelmaking process can be accurately taken, and the level of the COG holder can be reliably adjusted to the demand adjustment range at all times. Moreover, the amount of syngas used could be reduced by about 25 % compared to the operator's judgment of the syngas supply timing.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 COG、LDG及びBFGを製鉄工程及
び発電用ボイラーへ供給して操業するに際し、COG需
要量とLDG需要量から製鉄工程へ供給中のCOGへの
合成ガス供給タイミングを決定して供給し、発熱量を増
加せしめてCOG供給量を減少し、COGホルダーレベ
ルを需要供給調整範囲内に制御することを特徴とする製
鉄所の燃料ガス供給制御方法。
1. When supplying COG, LDG and BFG to a steelmaking process and a power generation boiler for operation, the timing of synthesis gas supply to the COG being supplied to the steelmaking process is determined from the COG demand and the LDG demand. A fuel gas supply control method for a steel mill, which comprises supplying the COG supply amount to increase the heat generation amount to reduce the COG supply amount and controlling the COG holder level within a supply / demand adjustment range.
【請求項2】 ファジィ制御のメンバーシップ関数を用
いて製鉄工程へ供給中のCOGへの合成ガス供給タイミ
ングを決定することを特徴とする請求項1に記載の製鉄
所の燃料ガス供給制御方法。
2. The fuel gas supply control method for a steel mill according to claim 1, wherein the fuzzy control membership function is used to determine the timing of supplying the syngas to the COG being supplied to the steelmaking process.
JP7255037A 1995-10-02 1995-10-02 Fuel gas supply control method of ironworks Withdrawn JPH0996413A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7255037A JPH0996413A (en) 1995-10-02 1995-10-02 Fuel gas supply control method of ironworks

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7255037A JPH0996413A (en) 1995-10-02 1995-10-02 Fuel gas supply control method of ironworks

Publications (1)

Publication Number Publication Date
JPH0996413A true JPH0996413A (en) 1997-04-08

Family

ID=17273299

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7255037A Withdrawn JPH0996413A (en) 1995-10-02 1995-10-02 Fuel gas supply control method of ironworks

Country Status (1)

Country Link
JP (1) JPH0996413A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011085291A (en) * 2009-10-14 2011-04-28 Ihi Corp Device and method for supplying gas

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011085291A (en) * 2009-10-14 2011-04-28 Ihi Corp Device and method for supplying gas

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