JPH0992898A - Piezoelectric transformer - Google Patents

Piezoelectric transformer

Info

Publication number
JPH0992898A
JPH0992898A JP7242715A JP24271595A JPH0992898A JP H0992898 A JPH0992898 A JP H0992898A JP 7242715 A JP7242715 A JP 7242715A JP 24271595 A JP24271595 A JP 24271595A JP H0992898 A JPH0992898 A JP H0992898A
Authority
JP
Japan
Prior art keywords
piezoelectric
rectangular plate
electrodes
piezoelectric transformer
strip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7242715A
Other languages
Japanese (ja)
Other versions
JP3577615B2 (en
Inventor
Yoshiaki Fuda
良明 布田
Tetsuo Yoshida
哲男 吉田
Yukifumi Katsuno
超史 勝野
Yuji Ono
裕司 小野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Corp filed Critical Tokin Corp
Priority to JP24271595A priority Critical patent/JP3577615B2/en
Publication of JPH0992898A publication Critical patent/JPH0992898A/en
Application granted granted Critical
Publication of JP3577615B2 publication Critical patent/JP3577615B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a piezoelectric transformer which has such a structure that no microcrack defect may appear at the time of polarization and the device may not break even if it is used for a long time and a high reliability can be achieved. SOLUTION: This is a piezoelectric transformer using a resonance mode in the longitudinal direction of a piezoelectric rectangular board 11 made of piezoelectric ceramic. Such a piezoelectric transformer has surface electrodes 12 and 13 which are so located as to cover nearly half the area in the longitudinal direction of the piezoelectric rectangular board 11 and which face each other in the thickness direction and a plurality of belt-like internal electrodes 14 which are located at the center of the remaining half area in the longitudinal direction of the piezoelectric rectangular board 11 and which are also located at one-fourth position in the longitudinal direction of the piezoelectric rectangular board 11 from one end of the board 11 and which are so formed as to cross at right angles with the longitudinal direction of the piezoelectric rectangular board 11. The belt-like internal electrodes 14 are connected to belt-like external electrodes 15 and 16 on side faces of the piezoelectric rectangular board 11.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は,圧電性セラミック
スを用いた圧電トランスに関し,特に圧電性セラミック
スからなる圧電矩形板の内部と表面に分極用と入出力用
の電極を形成し,矩形板の長さ方向の共振を利用した圧
電トランスに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric transformer using piezoelectric ceramics, and in particular, a piezoelectric rectangular plate made of piezoelectric ceramics is provided with electrodes for polarization and input / output, and The present invention relates to a piezoelectric transformer that utilizes resonance in the length direction.

【0002】[0002]

【従来の技術】従来,静電気発生装置や液晶ディスプレ
イのバックライト点灯用などでは,大きな電流値は必要
としないが,1kV−数ワット程度の高電圧電源が用い
られている。現在,これらの電源には電磁式トランスが
昇圧用として用いられているが,発生電磁ノイズの低減
や低消費電力化,機器の小型低背化などの要求により,
圧電トランスの実用化の検討がなされている。
2. Description of the Related Art Conventionally, a high voltage power supply of about 1 kV-several watts has been used for a static electricity generator or for lighting a backlight of a liquid crystal display without requiring a large current value. Currently, electromagnetic transformers are used for boosting these power supplies, but due to demands such as reduction of generated electromagnetic noise, low power consumption, and small and low profile of equipment,
The practical application of the piezoelectric transformer is being studied.

【0003】図3は従来のλモードの圧電振動子を用い
た圧電トランス30の構造の概略斜視図である。図3に
おいて,圧電性セラミックスからなる矩形板(以下,圧
電矩形板と呼ぶ)31の表面には,長さ方向のおよそ半
分の部分に厚さ方向に互いに対向する電極32および3
3が夫々形成されている。また,圧電矩形板31一対の
表面電極32および33が形成された部分とは反対側の
長さ方向のほぼ半分の位置に長さ方向に直交する方向に
延在する帯状表面電極34および35が形成されてい
る。圧電矩形板31は,矢印36で示すように,表面電
極32,33の部分は厚さ方向に分極され,帯状表面電
極34および35の間の部分は,矢印37で示すよう
に,圧電矩形板31の長さ方向に分極されている。
FIG. 3 is a schematic perspective view of the structure of a piezoelectric transformer 30 using a conventional λ-mode piezoelectric vibrator. In FIG. 3, on the surface of a rectangular plate 31 (hereinafter referred to as a piezoelectric rectangular plate) made of piezoelectric ceramics, electrodes 32 and 3 facing each other in the thickness direction are formed in approximately half the length direction.
3 are formed respectively. Further, the strip-shaped surface electrodes 34 and 35 extending in the direction orthogonal to the length direction are provided at approximately half positions in the length direction on the side opposite to the portion where the pair of surface electrodes 32 and 33 of the piezoelectric rectangular plate 31 are formed. Has been formed. In the piezoelectric rectangular plate 31, the surface electrodes 32 and 33 are polarized in the thickness direction as shown by an arrow 36, and the part between the strip-shaped surface electrodes 34 and 35 is a piezoelectric rectangular plate as shown by an arrow 37. 31 is polarized in the longitudinal direction.

【0004】また,圧電トランス30としては,セラミ
ック矩形板の振動に影響の少ない振動の節点で支持し,
かつ節点で入出力電極を取り出す必要が有り,41,4
1´はλモード振動の節点を夫々示す。
Further, as the piezoelectric transformer 30, the piezoelectric rectangular plate is supported at a vibration nodal point which has little influence on the vibration of the ceramic rectangular plate.
And it is necessary to take out the input / output electrodes at the nodes, 41, 4
Reference numerals 1'indicate nodes of λ-mode vibration, respectively.

【0005】図4は図3の圧電振動子を用いたλモード
共振駆動の圧電トランスの動作原理の説明図であり,図
4(a)は圧電矩形板の断面図,図4(b)は圧電矩形
板が長さ方向振動の1波長共振モードで振動している場
合の変位分布であり,図4(c)はその時の歪分布を示
している。図4(a)において,表面電極33をアース
端子とし,表面電極32に圧電矩形板31の長さ方向の
1波長共振モードの共振周波数に等しい周波数の電圧を
印加すると,圧電矩形板は,図4(b)および(c)に
示すように振動する。この時,表面電極33と帯状表面
電極34,35の間には圧電効果により電圧が発生す
る。ここで,表面電極32に印加した入力電圧と帯状表
面電極34,35間に発生した出力電圧について説明す
ると,表面電極32と表面電極33の対向電極間隔は,
帯状表面電極34,35との間隔に比べ十分に小さく,
表面電極32,33の面積は,帯状表面電極34および
35間の面積より十分に大きいため,入力側の静電容量
は出力側の静電容量に比べ十分大きな値となる。従っ
て,入力側に低い電圧を印加して振動子を振動した場
合,出力側に入力側電極間隔と入力側電極と出力側電極
間の間隔の比,および入出力側の静電容量の比に比例し
た大きな電圧が発生する。
FIG. 4 is an explanatory view of the operating principle of a λ-mode resonance drive piezoelectric transformer using the piezoelectric vibrator of FIG. 3, FIG. 4 (a) is a sectional view of a piezoelectric rectangular plate, and FIG. 4 (b) is FIG. 4C shows a strain distribution when the piezoelectric rectangular plate vibrates in the one-wavelength resonance mode of longitudinal vibration, and FIG. 4C shows a strain distribution at that time. In FIG. 4A, when the surface electrode 33 is used as a ground terminal and a voltage having a frequency equal to the resonance frequency of the one-wavelength resonance mode in the length direction of the piezoelectric rectangular plate 31 is applied to the surface electrode 32, the piezoelectric rectangular plate 4) Vibrate as shown in (b) and (c). At this time, a voltage is generated between the surface electrode 33 and the strip-shaped surface electrodes 34 and 35 by the piezoelectric effect. Here, the input voltage applied to the surface electrode 32 and the output voltage generated between the strip-shaped surface electrodes 34 and 35 will be described.
It is sufficiently smaller than the distance between the strip surface electrodes 34 and 35,
Since the area of the surface electrodes 32 and 33 is sufficiently larger than the area between the strip-shaped surface electrodes 34 and 35, the electrostatic capacitance on the input side is sufficiently larger than the electrostatic capacitance on the output side. Therefore, when a low voltage is applied to the input side to vibrate the oscillator, the ratio of the input side electrode spacing to the output side and the spacing between the input side electrode and the output side electrode, A large proportional voltage is generated.

【0006】[0006]

【発明が解決しようとする課題】図3で説明した圧電ト
ランスで,入力側の表面電極32と33の間の矩形板厚
み方向分極は均一に分極が可能である。また,出力側の
分極は表面電極の無いセラミック部ではほぼ長さ方向に
均一な分極が可能である。しかし,表面電極32,33
の圧電矩形板31中央部端部と帯状表面電極34,35
の近傍では,電極直下が等電位で電界方向が電極面と直
交するので,分極方向も電極面に対して直交する事にな
り,その結果,表面電極32,33の矩形板中央部端部
と帯状表面電極34,35の近傍では,分極による歪み
が集中する事になる。圧電矩形板31の中で,この分極
による歪みの集中箇所は,マイクロクラック等の欠陥が
発生し易くなる。
In the piezoelectric transformer described with reference to FIG. 3, the rectangular plate thickness direction polarization between the input side surface electrodes 32 and 33 can be uniformly polarized. In addition, the polarization on the output side can be uniform in the length direction in the ceramic part without surface electrodes. However, the surface electrodes 32, 33
Piezoelectric rectangular plate 31 central end and strip surface electrodes 34, 35
In the vicinity of, since the electrode directly under the electrode is equipotential and the electric field direction is orthogonal to the electrode surface, the polarization direction is also orthogonal to the electrode surface, and as a result, the central portions of the rectangular plates of the surface electrodes 32 and 33 are In the vicinity of the strip-shaped surface electrodes 34, 35, distortion due to polarization is concentrated. In the piezoelectric rectangular plate 31, defects such as microcracks are likely to occur at locations where strain due to this polarization is concentrated.

【0007】さらに,図4(c)で説明したように,帯
状表面電極34,35は振動の節点41,41に相当
し,振動した時の歪みが最大となる部位に当たり,分極
により発生したマイクロクラックが圧電トランス駆動時
の振動の歪みの集中によりクラックに成長し,長時間使
用しているとクラックがさらに成長して,圧電矩形板3
1が破壊に至るという欠点がある。
Further, as described with reference to FIG. 4 (c), the strip-shaped surface electrodes 34, 35 correspond to the nodes 41, 41 of vibration, and correspond to the site where the strain at the time of vibration becomes the maximum, and the micro-electrodes generated by polarization. The crack grows due to the concentration of vibration strain when the piezoelectric transformer is driven, and the crack grows further when used for a long time.
There is a defect that 1 leads to destruction.

【0008】そこで,本発明の技術的課題は,分極時に
マイクロクラックの欠陥が発生せずに,長時間使用して
も破壊せず,高信頼性が得られる構造を備えた圧電トラ
ンスを提供することにある。
[0008] Therefore, the technical problem of the present invention is to provide a piezoelectric transformer having a structure in which defects of microcracks do not occur during polarization, they do not break even when used for a long time, and high reliability is obtained. Especially.

【0009】[0009]

【課題を解決するための手段】前述したように,圧電ト
ランスの出力電極部における分極の集中は,分極時に出
力側圧電セラミックの長さ方向の電気力線が,表面電極
間距離の最短箇所で電極に直交して分布する事に起因し
ている。さらに,分極の歪みの集中部位と圧電トランス
駆動時の振動の歪みの最大部位とが一致していること
が,圧電トランスを長時間駆動したときに破壊に至ると
いう信頼性の低下の原因である。そこで,本発明者ら
は,圧電トランス駆動時の振動の歪みの最大部位におい
て,分極時の歪みの集中を分散することにより,マイク
ロクラックの発生を防止することが,圧電トランスの駆
動時の破壊防止には有効であることを見出だし,本発明
をなすに至ったものである。
[Means for Solving the Problems] As described above, the polarization concentration at the output electrode portion of the piezoelectric transformer is caused when the electric line of force in the length direction of the output side piezoelectric ceramic is polarized at the shortest distance between the surface electrodes. This is due to the distribution orthogonal to the electrodes. Furthermore, the fact that the polarization distortion concentration part and the vibration distortion maximum part when the piezoelectric transformer is driven coincide with each other is the cause of the decrease in reliability that leads to damage when the piezoelectric transformer is driven for a long time. . Therefore, the inventors of the present invention can prevent the occurrence of microcracks by dispersing the concentration of strain at the time of polarization at the site of the maximum strain of vibration at the time of driving the piezoelectric transformer. The present invention has been found to be effective for prevention, and has led to the present invention.

【0010】本発明によれば,圧電性セラミックからな
る圧電矩形板の長さ方向の共振モードを利用した圧電ト
ランスにおいて,前記圧電矩形板の長さ方向のほぼ半分
の部分に設けられ,厚さ方向に対向する一対の表面電極
と,前記圧電矩形板の長さ方向の残り半分の部分のほぼ
中央部の前記圧電矩形板の長さ方向の四分の一の位置に
設けられ,前記圧電矩形板の長さ方向と交叉する方向に
形成された複数の帯状内部電極と,前記圧電矩形板の側
面に設けられ,前記帯状内部電極に接続した帯状の外部
電極とを備えていることを特徴とする圧電トランスが得
られる。
According to the present invention, in a piezoelectric transformer utilizing a resonance mode in the length direction of a piezoelectric rectangular plate made of a piezoelectric ceramic, the piezoelectric transformer is provided at approximately half the length of the piezoelectric rectangular plate and has a thickness. A pair of surface electrodes facing each other in the direction of the piezoelectric rectangular plate, and the piezoelectric rectangular plate is provided at a position approximately one-quarter of the lengthwise half of the piezoelectric rectangular plate in the longitudinal direction. A plurality of strip-shaped internal electrodes formed in a direction intersecting with the length direction of the plate, and strip-shaped external electrodes provided on the side surface of the piezoelectric rectangular plate and connected to the strip-shaped internal electrodes. A piezoelectric transformer that operates is obtained.

【0011】また,本発明によれば,前記圧電トランス
において,前記表面電極はその長さ方向のほぼ中間の位
置で前記圧電矩形板の側面に設けられた帯状の側面電極
にそれぞれ接続し,前記外部電極は,更に,前記圧電矩
形板の表面に,前記内部電極に対向して延在しているこ
とを特徴とする圧電トランスが得られる。
Further, according to the present invention, in the piezoelectric transformer, the front surface electrode is connected to a strip-shaped side surface electrode provided on a side surface of the piezoelectric rectangular plate at a substantially middle position in the longitudinal direction, Further, the external electrode further extends on the surface of the piezoelectric rectangular plate so as to face the internal electrode, thereby obtaining a piezoelectric transformer.

【0012】[0012]

【発明の実施の形態】以下,本発明の実施の形態を図面
を用いて説明する。
Embodiments of the present invention will be described below with reference to the drawings.

【0013】まず,本発明の第1の実施の形態について
説明する。
First, a first embodiment of the present invention will be described.

【0014】図1は本発明の第1の実施の形態に係る圧
電トランスを斜視図である。図1(a)に示すように,
λモードの圧電振動子を用いた圧電トランス10は,圧
電性セラミックからなる矩形板(以下,圧電矩形板と呼
ぶ)11の表裏面の長さ方向の約半分に互いに対向する
表面電極12,13の層が形成されている。また,矩形
板11の長さ方向の残りの半分の長さ方向中央部,即
ち,圧電矩形板11の長さ方向の1/4の位置で,圧電
矩形板に内部に,圧電矩形板11の幅方向に長い帯状内
部電極14が複数(図では4列),圧電矩形板11の厚
さ方向に対向して,互いに平行に形成されている。複数
列の帯状内部電極14は,圧電矩形板11の両側まで延
在しこれらの両端は圧電矩形板11の側面に,厚さ方向
に長く形成された外部電極15及び16にそれぞれ接続
している。
FIG. 1 is a perspective view of a piezoelectric transformer according to a first embodiment of the present invention. As shown in FIG. 1 (a),
A piezoelectric transformer 10 using a λ-mode piezoelectric vibrator includes front surface electrodes 12 and 13 facing each other in about half of a front surface and a back surface of a rectangular plate (hereinafter referred to as a piezoelectric rectangular plate) 11 made of piezoelectric ceramic. Layers have been formed. In addition, at the central portion of the remaining half of the rectangular plate 11 in the length direction, that is, at a position of ¼ of the length of the piezoelectric rectangular plate 11, the piezoelectric rectangular plate 11 is provided inside the piezoelectric rectangular plate 11. A plurality of strip-shaped internal electrodes 14 (four rows in the drawing) that are long in the width direction are formed in parallel with each other, facing each other in the thickness direction of the piezoelectric rectangular plate 11. The strip-shaped internal electrodes 14 in a plurality of rows extend to both sides of the piezoelectric rectangular plate 11, and both ends thereof are connected to the side surfaces of the piezoelectric rectangular plate 11 and the external electrodes 15 and 16 formed long in the thickness direction, respectively. .

【0015】ここで,表面電極12,13を一端とし,
帯状内部電極14を他端すなわち,一対の外部電極1
5,16を他端として,一端と他端間に,一端を正極と
して高直流電圧を印加すると,図1(b)の破線17に
示すように,電気力線を形成して分極される。分極され
た状態で,表面電極12,13間に,一方の表面電極1
3をアースとして1次側の交流電圧V1を印加して,圧
電矩形板11を共振させると,表面電極13と外部電極
15,16との間に2次側の高交流電圧V2が発生す
る。尚,符号41,41´は,λモードの振動の接点を
示し,圧電矩形板11の両端からλ/4の位置にある。
Here, with the surface electrodes 12, 13 as one end,
The strip-shaped internal electrode 14 is connected to the other end, that is, the pair of external electrodes 1
When a high DC voltage is applied between one end and the other end with 5, 16 as the other end and one end as a positive electrode, a line of electric force is formed and polarized as shown by a broken line 17 in FIG. In the polarized state, one surface electrode 1 is placed between the surface electrodes 12 and 13.
When the primary side AC voltage V1 is applied with 3 as the earth to resonate the piezoelectric rectangular plate 11, a secondary side high AC voltage V2 is generated between the surface electrode 13 and the external electrodes 15 and 16. In addition, reference numerals 41 and 41 ′ indicate contacts for λ-mode vibration, and are located at λ / 4 from both ends of the piezoelectric rectangular plate 11.

【0016】図1(a)及び(b)に示された圧電トラ
ンス10は次のように製造されている。まず,PZT系
圧電セラミックスの厚み230μmのグリーンシート上
に銀−パラジウム電極ペーストで出力部帯状電極パター
ンを印刷し,該印刷シートを5層積層し,その上に電極
パターンのないセラミックグリーンシートを1層積層
し,該積層体を熱圧着し,大気中1150℃で焼結し
た。次に,銀ペーストをもちいて,内部帯状電極を含ま
ない矩形板の長さ方向のほぼ半分の部分に,厚さ方向に
対向する表面電極を形成し,更に矩形板側面部に帯状内
部電極と接続する帯状外部電極を形成し,長さ40m
m,幅10mm,厚さ1mmの長さ方向1波長共振モー
ドの圧電トランスを試作した。1波長共振モードの節の
部分が圧電セラミック矩形板の長さ方向の端面からそれ
ぞれ10mmの位置にあるので,その近傍の外部電極と
表面電極部を支持し,かつ該電極をリード線の接続取り
出し部とした。圧電セラミックの分極は,温度150
℃,電界強度1.2kV/mmで実施した。第1の実施
の形態の圧電トランスのセラミックス結晶粒径,機械
的,電気的性能を従来構造と比較して下記表1に示し
た。
The piezoelectric transformer 10 shown in FIGS. 1A and 1B is manufactured as follows. First, an output section strip-shaped electrode pattern is printed with a silver-palladium electrode paste on a PZT-based piezoelectric ceramics green sheet having a thickness of 230 μm, five layers of the printed sheets are laminated, and a ceramic green sheet having no electrode pattern is formed thereon. The layers were laminated, the laminate was thermocompression bonded, and sintered in air at 1150 ° C. Next, a silver paste is used to form surface electrodes facing each other in the thickness direction at approximately half the length of the rectangular plate that does not include the internal strip electrodes. 40m long by forming a band-shaped external electrode to be connected
A piezoelectric transformer with m, width of 10 mm, and thickness of 1 mm in the longitudinal direction single wavelength resonance mode was prototyped. Since the nodes of the one-wavelength resonance mode are located 10 mm from the end faces of the piezoelectric ceramic rectangular plate in the lengthwise direction, they support the external electrodes and surface electrode parts in the vicinity, and connect the electrodes with lead wires. Part and The polarization of a piezoelectric ceramic has a temperature of 150
It was carried out at a temperature of 1.2 ° C. and an electric field strength of 1.2 kV / mm. The ceramic crystal grain size, mechanical and electrical performance of the piezoelectric transformer of the first embodiment are shown in Table 1 below in comparison with the conventional structure.

【0017】次に,本発明の第2の実施の形態について
説明する。
Next, a second embodiment of the present invention will be described.

【0018】図2は本発明の第2の実施の形態に係るλ
モード圧電振動子を用いた圧電トランスを示す斜視図で
ある。図2(a)に示すように,圧電トランス20は圧
電セラミックからなる矩形板21に表面電極22,23
の層,及び帯状内部電極26が形成されている点で,第
1の実施の形態による圧電トランス10と同様な構造を
有する。しかし,第2の実施の形態による圧電トランス
20は,表面電極22,23の層の一部分が夫々圧電矩
形板21の側面まで延在して側面電極24,25が互い
に対向するように形成されている点,および,帯状内部
電極26に接触する外部電極27が,表裏面に夫々帯状
内部電極26に対向するように延在してリング状に形成
されている点で異なっている。
FIG. 2 shows a λ according to the second embodiment of the present invention.
It is a perspective view showing a piezoelectric transformer using a mode piezoelectric vibrator. As shown in FIG. 2A, the piezoelectric transformer 20 includes a rectangular plate 21 made of piezoelectric ceramic and a surface electrode 22, 23.
2 and the strip-shaped internal electrode 26 are formed, the structure is similar to that of the piezoelectric transformer 10 according to the first embodiment. However, the piezoelectric transformer 20 according to the second embodiment is formed such that part of the layers of the surface electrodes 22 and 23 extend to the side surface of the piezoelectric rectangular plate 21 and the side surface electrodes 24 and 25 face each other. And the external electrodes 27 contacting the strip-shaped internal electrodes 26 are formed in a ring shape extending on the front and back sides so as to face the strip-shaped internal electrodes 26, respectively.

【0019】ここで,表面電極12,13に接続された
一対の側面電極24,25を一端とし,帯状内部電極2
6に接続された外部電極27を他端とし,一端を正極と
して,一端と他端との間に直流高電圧を印加すると,図
2(b)の破線28で示すように電気力線を形成して分
極される。
Here, the pair of side surface electrodes 24, 25 connected to the surface electrodes 12, 13 are used as one end, and the strip-shaped internal electrode 2
When the external electrode 27 connected to 6 is the other end and one end is the positive electrode and a high DC voltage is applied between the one end and the other end, an electric force line is formed as shown by a broken line 28 in FIG. 2B. And be polarized.

【0020】分極された状態で,側面電極24,25間
に,一方の側面電極24をアースとして1次側の交流電
圧V1を印加して,圧電矩形板21を共振させると,側
面電極24と外部電極27との間に2次側の高交流電圧
V2が発生する。尚,符号41,41´はλモードの振
動の節を示し,両端からλ/4の位置にある。
In the polarized state, when one side electrode 24 is grounded and the primary side AC voltage V1 is applied between the side electrodes 24 and 25 to cause the piezoelectric rectangular plate 21 to resonate, the side electrodes 24 and A high AC voltage V2 on the secondary side is generated between the external electrode 27 and the external electrode 27. Incidentally, reference numerals 41 and 41 'indicate nodes of vibration of the λ mode, which are located at λ / 4 from both ends.

【0021】図2(a)及び(b)に示された圧電トラ
ンス20は,次のように製造されている。まず,PZT
系圧電セラミックスの厚み115μmのグリーンシート
上に銀−パラジウム電極ペーストで出力部帯状電極パタ
ーンを印刷し,該印刷シートを10層積層し,その上に
電極パターンのないセラミックグリーンシートを1層積
層し,該積層体を熱圧着し,大気中1150℃で焼結し
た。次に,銀ペーストを用いて,内部帯状電極26を含
まない矩形板の長さ方向のほぼ半分の部分に,厚さ方向
に対向する表面電極22,23を形成し,これらの表面
電極22,23のその長さ方向のほぼ中央の位置で,矩
形板の側面部の側面電極24,25にそれぞれ接続し,
更に矩形板側面部に帯状内部電極26と接続する帯状外
部電極27を形成し,長さ40mm,幅10mm,厚さ
1mmの長さ方向1波長共振モードの圧電トランスを試
作した。
The piezoelectric transformer 20 shown in FIGS. 2A and 2B is manufactured as follows. First, PZT
An electrode strip electrode pattern is printed with a silver-palladium electrode paste on a 115 μm thick green sheet of piezoelectric ceramics, 10 layers of the printed sheet are laminated, and 1 layer of a ceramic green sheet having no electrode pattern is laminated thereon. The laminate was thermocompression bonded and sintered at 1150 ° C. in the atmosphere. Next, the silver paste is used to form the surface electrodes 22 and 23 facing each other in the thickness direction on the approximately half portion of the rectangular plate not including the internal strip electrode 26 in the length direction. 23 is connected to the side electrodes 24 and 25 on the side surface of the rectangular plate, respectively, at a position approximately at the center in the length direction,
Further, a strip-shaped external electrode 27 connected to the strip-shaped internal electrode 26 was formed on the side surface of the rectangular plate, and a piezoelectric transformer of 40 mm in length, 10 mm in width, and 1 mm in thickness in the lengthwise one-wavelength resonance mode was prototyped.

【0022】本発明の第2の実施の形態に係る圧電トラ
ンスは,1波長共振モードの節の部分が圧電セラミック
矩形板の長さ方向の端面からそれぞれ10mmの位置に
あるので,その近傍の外部電極27と表面電極22,2
3とを支持し,かつ夫々の電極をリード線の接続取り出
し部とした。圧電セラミックの分極は,温度150℃,
電界強度1.2kV/mmで実施した。第2の実施の形
態による圧電トランスのセラミックス結晶粒径,機械
的,電気的性能を従来構造を有する圧電トランスと比較
して下記表1に示した。
In the piezoelectric transformer according to the second embodiment of the present invention, since the nodes of the one-wavelength resonance mode are located 10 mm from the end faces in the length direction of the piezoelectric ceramic rectangular plate, the vicinity of the outside Electrode 27 and surface electrodes 22, 2
3 was supported, and each electrode was used as a lead-out / connecting portion. The polarization of piezoelectric ceramics is 150 ℃
The test was performed at an electric field strength of 1.2 kV / mm. The ceramic crystal grain size, mechanical and electrical performance of the piezoelectric transformer according to the second embodiment are shown in Table 1 below in comparison with the piezoelectric transformer having the conventional structure.

【0023】[0023]

【表1】 [Table 1]

【0024】上記表1より明らかに,本発明の第1及び
第2の実施の形態による圧電トランスでは,出力部に部
電極を形成することにより,出力部の節点における分極
時の歪みの集中を分散し,マイクロクラックの発生を防
止し,従来構造の圧電トランスに比較し,3点曲げ強度
が3倍以上,初期故障率が10分の1以下,千時間駆動
後の故障率が7分の1以下の高信頼性の圧電トランスが
得られた。
As is clear from Table 1 above, in the piezoelectric transformers according to the first and second embodiments of the present invention, by forming partial electrodes in the output section, the strain concentration at the time of polarization at the nodes of the output section can be concentrated. Compared with the piezoelectric transformer of the conventional structure, it is dispersed and prevents the generation of microcracks, and the three-point bending strength is three times or more, the initial failure rate is one-tenth or less, and the failure rate after driving for 1,000 hours is seven minutes. A highly reliable piezoelectric transformer of 1 or less was obtained.

【0025】[0025]

【発明の効果】以上,詳細に説明したように,本発明に
よれば,分極の歪みの集中部位と圧電トランス駆動時の
振動の歪みの最大部位である圧電トランス出力部である
セラミック矩形板の長さ方向の四分の一の位置に,矩形
板の長さ方向と直交方向に複数の帯状内部電極を有し,
該帯状内部電極は矩形板の側面で帯状の外部電極に接続
した構造とする事で,分極時の歪みの集中が避けられ,
機械的特性に優れた,高信頼性の圧電トランスを提供す
ることができる。
As described above in detail, according to the present invention, the ceramic rectangular plate serving as the piezoelectric transformer output portion, which is the concentrated portion of polarization distortion and the maximum portion of vibration distortion when the piezoelectric transformer is driven, is provided. A plurality of strip-shaped internal electrodes are provided at a quarter position in the length direction in a direction orthogonal to the length direction of the rectangular plate,
The band-shaped internal electrode is connected to the band-shaped external electrode on the side surface of the rectangular plate, so that the concentration of strain during polarization can be avoided,
It is possible to provide a highly reliable piezoelectric transformer with excellent mechanical characteristics.

【図面の簡単な説明】[Brief description of drawings]

【図1】(a)は,本発明の第1の実施の形態に係る圧
電トランスの斜視図である。(b)は,(a)の長さ方
向の断面図である。
FIG. 1A is a perspective view of a piezoelectric transformer according to a first embodiment of the present invention. (B) is sectional drawing of the length direction of (a).

【図2】(a)は,本発明の第2の実施の形態に係る圧
電トランスの斜視図である。(b)は,(a)の長さ方
向の断面図である。
FIG. 2A is a perspective view of a piezoelectric transformer according to a second embodiment of the present invention. (B) is sectional drawing of the length direction of (a).

【図3】従来の1波長共振モードの圧電振動子を用いた
圧電トランスの概略斜視図である。
FIG. 3 is a schematic perspective view of a piezoelectric transformer using a conventional one-wavelength resonance mode piezoelectric vibrator.

【図4】(a)は,図3に示した圧電セラミック矩形板
の断面図である。(b)は,(a)の圧電セラミック矩
形板が長さ方向1波長共振モードで振動している場合の
変位分布を示す図である。(c)は,(b)の振動時の
歪分布をそれぞれ示す図である。
FIG. 4A is a sectional view of the piezoelectric ceramic rectangular plate shown in FIG. (B) is a diagram showing a displacement distribution when the piezoelectric ceramic rectangular plate of (a) is vibrating in a longitudinal single wavelength resonance mode. (C) is a figure which shows the strain distribution at the time of the vibration of (b), respectively.

【符号の説明】[Explanation of symbols]

10,20,30 圧電トランス 11,21,31 圧電矩形板 12,13,22,23,32,33 表面電極 15,16,27 外部電極 14,26 帯状内部電極 17,28 電気力線の分布を示す破線 24,25 側面電極 34,35 帯状表面電極 41,41´ 振動の節 10, 20, 30 Piezoelectric transformer 11, 21, 31 Piezoelectric rectangular plate 12, 13, 22, 23, 32, 33 Surface electrode 15, 16, 27 External electrode 14, 26 Strip-shaped internal electrode 17, 28 Distribution of lines of electric force Dashed line 24,25 Side electrode 34,35 Strip surface electrode 41,41 'Vibration node

───────────────────────────────────────────────────── フロントページの続き (72)発明者 小野 裕司 宮城県仙台市太白区郡山六丁目7番1号 株式会社トーキン内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yuji Ono 6-7 Koriyama, Taichiro-ku, Sendai-shi, Miyagi Tokin Co., Ltd.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 圧電性セラミックからなる圧電矩形板の
長さ方向の共振モードを利用した圧電トランスにおい
て,前記圧電矩形板の長さ方向のほぼ半分の部分に設け
られ,厚さ方向に対向する一対の表面電極と,前記圧電
矩形板の長さ方向の残り半分の部分のほぼ中央部の前記
圧電矩形板の長さ方向の四分の一の位置に設けられ,前
記圧電矩形板の長さ方向と交叉する方向に形成された複
数の帯状内部電極と,前記圧電矩形板の側面に設けら
れ,前記帯状内部電極に接続した帯状の外部電極とを備
えていることを特徴とする圧電トランス。
1. A piezoelectric transformer using a resonance mode in a length direction of a piezoelectric rectangular plate made of a piezoelectric ceramic, the piezoelectric transformer being provided in approximately half the length direction of the piezoelectric rectangular plate and facing each other in the thickness direction. The pair of surface electrodes and the piezoelectric rectangular plate are provided at approximately one-fourth positions in the lengthwise direction of the piezoelectric rectangular plate at approximately the center of the other half of the lengthwise direction of the piezoelectric rectangular plate. 2. A piezoelectric transformer, comprising: a plurality of strip-shaped internal electrodes formed in a direction intersecting with a direction; and strip-shaped external electrodes provided on a side surface of the piezoelectric rectangular plate and connected to the strip-shaped internal electrodes.
【請求項2】 請求項1記載の圧電トランスにおいて,
前記表面電極はその長さ方向のほぼ中間の位置で前記圧
電矩形板の側面に設けられた帯状の側面電極にそれぞれ
接続し,前記外部電極は,更に,前記圧電矩形板の表面
に,前記内部電極に対向して延在していることを特徴と
する圧電トランス。
2. The piezoelectric transformer according to claim 1, wherein
The surface electrodes are respectively connected to strip-shaped side surface electrodes provided on the side surfaces of the piezoelectric rectangular plate at positions approximately in the longitudinal direction, and the external electrodes are further connected to the internal surface of the piezoelectric rectangular plate. A piezoelectric transformer characterized in that it extends facing the electrodes.
JP24271595A 1995-09-21 1995-09-21 Piezoelectric transformer Expired - Lifetime JP3577615B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24271595A JP3577615B2 (en) 1995-09-21 1995-09-21 Piezoelectric transformer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24271595A JP3577615B2 (en) 1995-09-21 1995-09-21 Piezoelectric transformer

Publications (2)

Publication Number Publication Date
JPH0992898A true JPH0992898A (en) 1997-04-04
JP3577615B2 JP3577615B2 (en) 2004-10-13

Family

ID=17093168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24271595A Expired - Lifetime JP3577615B2 (en) 1995-09-21 1995-09-21 Piezoelectric transformer

Country Status (1)

Country Link
JP (1) JP3577615B2 (en)

Also Published As

Publication number Publication date
JP3577615B2 (en) 2004-10-13

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