JPH0990172A - Connection device for optical fiber and optical element - Google Patents
Connection device for optical fiber and optical elementInfo
- Publication number
- JPH0990172A JPH0990172A JP24807795A JP24807795A JPH0990172A JP H0990172 A JPH0990172 A JP H0990172A JP 24807795 A JP24807795 A JP 24807795A JP 24807795 A JP24807795 A JP 24807795A JP H0990172 A JPH0990172 A JP H0990172A
- Authority
- JP
- Japan
- Prior art keywords
- hole
- block
- optical fiber
- optical element
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 55
- 239000013307 optical fiber Substances 0.000 title claims abstract description 32
- 238000003466 welding Methods 0.000 claims abstract description 16
- 230000008878 coupling Effects 0.000 claims description 21
- 238000010168 coupling process Methods 0.000 claims description 21
- 238000005859 coupling reaction Methods 0.000 claims description 21
- 238000003780 insertion Methods 0.000 abstract description 5
- 230000037431 insertion Effects 0.000 abstract description 5
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000005304 joining Methods 0.000 description 5
- 230000008602 contraction Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、光ファイバと光学素子
との結合装置に係わり、特に光ファイバとレーザダイオ
ード(LD)のような光半導体素子との光軸を位置合わ
せ調整した、結合装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coupling device for an optical fiber and an optical element, and more particularly to a coupling device in which the optical axes of the optical fiber and an optical semiconductor element such as a laser diode (LD) are aligned and adjusted. Regarding
【0002】[0002]
【従来の技術】レーザダイオード(LD)、フォトダイ
オード(PD)のような光学素子と光ファイバとを、光
軸を合わせて最適な位置関係に置くことは、一般に結合
と呼ばれており、光通信システム、光計測機器等の構成
において極めて重要なこととされている。2. Description of the Related Art Placing an optical element such as a laser diode (LD) or a photodiode (PD) and an optical fiber in an optimum positional relationship with their optical axes aligned with each other is generally called coupling. It is considered to be extremely important in the configuration of communication systems, optical measuring instruments and the like.
【0003】従来から光ファイバと前記光学素子との結
合は、光ファイバを保持するフェルールを、光学素子に
対して固定用部品およびアダプタを介して固定配置する
ことにより行なわれている。Conventionally, the coupling of the optical fiber and the optical element has been performed by fixing the ferrule holding the optical fiber to the optical element via a fixing component and an adapter.
【0004】すなわち従来の結合装置においては、図4
に示すように、内部に光学素子1を収容したケース2の
上面に、固定用部品であるフェルールホルダー3が固定
され、このフェルールホルダー3の挿入孔内に、光ファ
イバ4を固定保持する円筒状のフェルール5が挿入され
固定されている。That is, in the conventional coupling device, FIG.
As shown in FIG. 3, a ferrule holder 3 which is a fixing component is fixed on the upper surface of a case 2 which accommodates the optical element 1, and a cylindrical shape for fixing and holding the optical fiber 4 in an insertion hole of the ferrule holder 3. Ferrule 5 is inserted and fixed.
【0005】このような結合装置の製造にあたっては、
光学素子1の光軸と光ファイバ4の光軸を位置合わせし
た(光軸調整)後、光学素子ケース2とフェルールホル
ダー3との接合面(図中aで示す。)を固定することが
行なわれている。そして、接合面の固定に、従来は樹脂
系の接着剤が用いられていたが、この方法では確実に接
着するまで長時間保持しておく必要があり、生産効率が
低いため、最近はレーザ照射によって溶接し固定する方
法が主流になりつつある。In manufacturing such a coupling device,
After the optical axis of the optical element 1 and the optical axis of the optical fiber 4 are aligned (optical axis adjustment), the joint surface (shown by a in the figure) between the optical element case 2 and the ferrule holder 3 is fixed. Has been. Conventionally, resin-based adhesives have been used to fix the joint surfaces, but this method requires holding for a long time to ensure reliable adhesion, and production efficiency is low. The method of welding and fixing is becoming mainstream.
【0006】[0006]
【発明が解決しようとする課題】しかしながら、ケース
2とフェルールホルダー3との接合面をレーザ溶接によ
り固定する方法では、レーザ溶接の際に生起する局所
的、瞬間的な爆発、すなわち溶融部の急激な膨脹と溶融
飛沫の生成と、その後の凝固に伴う収縮等によって、光
学素子ケース2に対してフェルールホルダー3の軸が傾
きやすい。そのため、予め光ファイバ4と光学素子1と
の光軸調整を行なったにもかかわらず、図5に示すよう
に、光軸調整位置Aからのずれすなわち位置ずれΔxや
角度ずれθが生じるという問題があった。However, in the method of fixing the joining surface between the case 2 and the ferrule holder 3 by laser welding, local and instantaneous explosion that occurs during laser welding, that is, abrupt melting point, occurs. The axis of the ferrule holder 3 is likely to tilt with respect to the optical element case 2 due to such expansion and generation of molten droplets and subsequent contraction accompanying solidification. Therefore, although the optical axes of the optical fiber 4 and the optical element 1 are adjusted in advance, a deviation from the optical axis adjustment position A, that is, a positional deviation Δx or an angular deviation θ occurs, as shown in FIG. was there.
【0007】ちなみに、シシングルモード光ファイバの
モードフィールド径は約 9.5μm と小さいため、結合位
置はサブミクロン単位で規定される。rを溶接位置から
光軸調整位置までの長さの鉛直成分とするとき、角度の
ずれθはrθの位置ずれを意味し、r=約 300〜1000μ
m と大きいため、例えば 0.1°の角度ずれも1000× 0.1
/180×π=約 1.7μm と極めて大きな位置ずれとなる。Incidentally, since the mode field diameter of the single-mode optical fiber is as small as about 9.5 μm, the coupling position is specified in submicron units. When r is the vertical component of the length from the welding position to the optical axis adjustment position, the angular deviation θ means the positional deviation of rθ, and r = approximately 300 to 1000μ
Since it is as large as m, an angular deviation of 0.1 ° is 1000 × 0.1, for example.
/ 180 × π = about 1.7 μm, which is a very large displacement.
【0008】従来から、このような結合の位置ずれや角
度ずれを防止するために、レーザ溶接の際に、図4にお
いて矢印で示すように、中フェルールホルダー3の接合
面aをケース2の上面に押え付ける方法が採られている
が、平坦な面どうしの押圧接触であるため、溶接部に変
形や応力が生じるのを防ぐことが困難であった。そし
て、フェルールホルダー3の溶接部の変形膨大により、
変形部が浮上がってフェルールホルダー3が傾く等の現
象が生じていた。Conventionally, in order to prevent such positional displacement and angular displacement of the coupling, during laser welding, as shown by an arrow in FIG. 4, the joining surface a of the middle ferrule holder 3 is placed on the upper surface of the case 2. However, it is difficult to prevent the welded portion from being deformed or stressed because of the pressing contact between the flat surfaces. And due to the huge deformation of the welded part of the ferrule holder 3,
A phenomenon such as the deformed portion being lifted and the ferrule holder 3 tilting has occurred.
【0009】本発明はこのような問題を解決するために
なされたもので、光軸調整後のレーザ溶接等による固定
の際に、位置ずれや角度ずれが生じにくい、光ファイバ
と光学素子との結合装置を提供することを目的とする。The present invention has been made in order to solve such a problem, and it is unlikely that a positional deviation or an angular deviation will occur during fixing by laser welding after adjusting the optical axis. An object is to provide a coupling device.
【0010】[0010]
【課題を解決するための手段】本発明の光ファイバと光
学素子との結合装置は、光ファイバを固定保持するフェ
ルールと、前記フェルールの先端部が挿入される貫通孔
が、偏心した位置に設けられた円柱状の第1のブロック
と、前記第1のブロックの外径とほぼ同径の内径を有す
る貫通孔が、偏心した位置に設けられており、この貫通
孔に前記第1のブロックが回転および軸方向への進退が
自在に挿嵌される円柱状の第2のブロックと、前記第2
のブロックの外径とほぼ同径の内径を有する貫通孔が同
軸的に設けられており、この貫通孔に前記第2のブロッ
クが回転自在に挿嵌される第3のブロックと、前記第3
のブロックの貫通孔を臨む位置に配設された光学素子と
を備え、前記光ファイバと光学素子とが結合するように
位置合わせされ、かつ前記各ブロックの接合面が固定さ
れていることを特徴とする。In a device for coupling an optical fiber and an optical element according to the present invention, a ferrule for fixing and holding the optical fiber and a through hole into which the tip of the ferrule is inserted are provided at eccentric positions. And a through hole having an inner diameter substantially the same as the outer diameter of the first block is provided at an eccentric position, and the first block is provided in the through hole. A cylindrical second block into which the second block can be freely rotated and moved back and forth in the axial direction;
A through hole having an inner diameter substantially the same as the outer diameter of the block is coaxially provided, and the third block into which the second block is rotatably fitted is inserted into the through hole;
And an optical element disposed at a position facing the through hole of the block, the optical fiber and the optical element are aligned so as to be coupled, and the joint surface of each block is fixed. And
【0011】[0011]
【作用】本発明の結合装置においては、ケースを兼ねた
第3のブロックの貫通孔の中心またはその近傍に、LD
のような光学素子が配設されるとともに、この貫通孔
に、それ自体の貫通孔が偏心して設けられた第2のブロ
ックが回転自在に挿嵌され、かつこの第2のブロックの
貫通孔に、光ファイバを保持するフェルールが挿入され
る偏心した貫通孔を有する第1のブロックが、回転およ
び軸方向に沿った進退が自在に挿嵌されているので、第
3のブロックに対してその貫通孔内で第2のブロックを
しゅう動回転させ、さらに第2のブロックに対してその
貫通孔内で第1のブロックをしゅう動回転させることに
より、光ファイバの光軸と光学素子の光軸とを、X−Y
軸方向(光軸に垂直方向)に位置合わせ調整することが
できる。また、それと同時にあるいはその後に、第2の
ブロックに対して第1のブロックを、軸方向に沿って前
進乃至後退させることにより、光ファイバと光学素子と
のZ軸方向(光軸方向)の光軸調整を行なうことができ
る。In the coupling device of the present invention, the LD is provided at or near the center of the through hole of the third block which also serves as the case.
Such an optical element is arranged, and a second block, in which the through hole of itself is eccentrically provided, is rotatably fitted into the through hole, and the through hole of the second block is inserted. Since the first block having the eccentric through hole into which the ferrule for holding the optical fiber is inserted is movably inserted in the third block so that it can be rotated and moved forward and backward along the axial direction. By sliding the second block in the hole and slidingly rotating the first block in the through hole with respect to the second block, the optical axis of the optical fiber and the optical axis of the optical element are To XY
The alignment can be adjusted in the axial direction (direction perpendicular to the optical axis). At the same time or after that, the first block is moved forward or backward along the axial direction with respect to the second block, so that the light in the Z-axis direction (optical axis direction) between the optical fiber and the optical element is moved. Axis adjustment can be performed.
【0012】また、第1のブロックが第2のブロックの
貫通孔内に嵌合されており、第1のブロックが第2のブ
ロックに対して軸が傾きにくい構造となっているので、
これらのブロックの接合面をレーザ溶接により固定する
際に、溶接部の急激な膨脹やその後の収縮等に起因する
結合位置からのずれ、特に角度ずれが生じにくい。さら
に、第2のブロックと第3のブロックとの固定について
も同様であり、レーザ溶接時に位置ずれや角度ずれが生
じにくい。Further, since the first block is fitted in the through hole of the second block and the shaft of the first block is less likely to tilt with respect to the second block,
When the joining surfaces of these blocks are fixed by laser welding, the deviation from the joining position, especially the angular deviation due to the rapid expansion of the welded portion and the subsequent contraction is unlikely to occur. Further, the same applies to fixing the second block and the third block, and positional deviation and angular deviation are unlikely to occur during laser welding.
【0013】[0013]
【実施例】以下、本発明の実施例を図面に基づいて説明
する。Embodiments of the present invention will be described below with reference to the drawings.
【0014】図1は、本発明の光ファイバと光学素子と
の結合装置の一実施例を示す斜視図であり、図2はこの
実施例の要部を示す縦断面図である。FIG. 1 is a perspective view showing an embodiment of a device for coupling an optical fiber and an optical element according to the present invention, and FIG. 2 is a longitudinal sectional view showing a main part of this embodiment.
【0015】これらの図において、符号6は円盤状の基
盤を示し、その上に、下端部が段差突出部7により縮径
された大径の貫通孔8aが同軸的に設けられた円筒状の
ケース部材8が搭載され固定されている。そして、この
ケース部材8の貫通孔8aの中心位置に、LDのような
光学素子9が配置され、基盤6上に搭載固定されてい
る。また、このケース部材8の貫通孔8aに、その内径
とほぼ等しい外径を有し、それ自体の貫通孔10aが偏
心して設けられた円筒状の連結部材10が、回転自在
に、かつ下端面がケース部材8の貫通孔8a内の段差突
出部7に当接するように嵌合されている。さらに、この
連結部材10の偏心した貫通孔10aには、その内径と
ほぼ等しい外径を有し、フェルール挿入孔11aが偏心
して設けられた円筒状のフェルール保持部材11が、回
転自在でかつ軸方向に進退自在に嵌合されている。そし
て、このようなフェルール保持部材11のフェルール挿
入孔11aには、光ファイバ12を同軸的に固定保持す
るフェルール13の先端部が挿入されるようになってい
る。In these drawings, reference numeral 6 denotes a disk-shaped base, on which a cylindrical through-hole 8a having a large diameter whose lower end is reduced by the step projection 7 is coaxially provided. The case member 8 is mounted and fixed. An optical element 9 such as an LD is arranged at the center of the through hole 8a of the case member 8 and mounted and fixed on the base 6. In addition, the through hole 8a of the case member 8 has an outer diameter substantially equal to the inner diameter thereof, and the through hole 10a of itself is eccentrically provided, and the cylindrical connecting member 10 is rotatably and has a lower end surface. Is fitted so as to abut the step projection 7 in the through hole 8a of the case member 8. Further, the eccentric through hole 10a of the connecting member 10 has a cylindrical ferrule holding member 11 having an outer diameter substantially equal to the inner diameter thereof and the ferrule insertion hole 11a provided eccentrically. It is fitted so that it can move back and forth in any direction. Then, the distal end portion of the ferrule 13 for coaxially fixing and holding the optical fiber 12 is inserted into the ferrule insertion hole 11a of the ferrule holding member 11 as described above.
【0016】さらに、これら3つの部材の接合部は、光
学素子9と光ファイバ12とが光結合された状態で、そ
れぞれレーザ溶接により固定されている。すなわち、固
定されたケース部材8に対して連結部材10次いでフェ
ルール保持部材11をそれぞれしゅう動回転させて、光
学素子9と光ファイバ12の光軸のX−Y軸方向の位置
合わせを行なう同時にあるいはその後に、連結部材10
に対してフェルール保持部材11を軸方向に沿って前進
あるいは後退させることでZ軸方向の光軸合わせが行な
われており、このように光軸調整された状態で、ケース
部材8と連結部材10との接合部および連結部材10と
フェルール保持部材11との接合部は、それぞれYAG
レーザの照射により溶接固定されている。Further, the joint portion of these three members is fixed by laser welding while the optical element 9 and the optical fiber 12 are optically coupled. That is, the coupling member 10 and then the ferrule holding member 11 are each slidably rotated with respect to the fixed case member 8 to perform the alignment of the optical axes of the optical element 9 and the optical fiber 12 in the X-Y axis directions simultaneously or. After that, the connecting member 10
On the other hand, the ferrule holding member 11 is moved forward or backward along the axial direction to perform the optical axis alignment in the Z-axis direction. With the optical axis adjusted in this way, the case member 8 and the connecting member 10 are aligned. And the joint between the connecting member 10 and the ferrule holding member 11 are respectively made of YAG.
It is welded and fixed by laser irradiation.
【0017】このように構成される実施例の結合装置に
おいては、ケース部材8に対して連結部材10次いでフ
ェルール保持部材11を回転および軸方向に前進乃至後
退させることにより、光学素子9と光ファイバ12と光
軸調整を容易にかつ精度良く行なうことができる。ま
た、フェルール保持部材11の下部が連結部材10の貫
通孔10aに嵌合されるとともに、連結部材10の軸方
向大部分がケース部材8の貫通孔8aに嵌合された構造
を有し、各々の部材が軸を囲む円周面で接合されている
ので、外側に配置された部材に対して内側の部材の軸が
傾きにくい構造となっている。そのため、これらの部材
の接合面をレーザ溶接する際に、溶接部の膨脹やその後
の収縮等に起因する光軸のずれ、特に角度ずれが生じに
くい。In the coupling device of the embodiment thus constructed, the optical element 9 and the optical fiber are rotated by moving the connecting member 10 and then the ferrule holding member 11 forward and backward in the axial direction with respect to the case member 8. 12 and the optical axis can be adjusted easily and accurately. Further, the lower part of the ferrule holding member 11 is fitted in the through hole 10a of the connecting member 10, and most of the axial direction of the connecting member 10 is fitted in the through hole 8a of the case member 8. Since the members are joined at the circumferential surface surrounding the shaft, the shaft of the inner member is less likely to tilt with respect to the members arranged on the outer side. Therefore, when laser welding the joining surfaces of these members, the deviation of the optical axis, particularly the angular deviation due to the expansion of the welded portion and the subsequent contraction is unlikely to occur.
【0018】なお、以上の実施例では、各部材間がYA
Gレーザ溶接により固定された例について説明したが、
固定手段としては、その他のレーザによる溶接や接着剤
による接着を用いることができる。In the above embodiment, the distance between each member is YA.
The example fixed by G laser welding was explained,
As the fixing means, welding by other laser or adhesion by an adhesive can be used.
【0019】また、ケース部材8の貫通孔8aの形状
は、軸方向に同径の直管状に限定されず、図3に示すよ
うに、下方に向かって縮径するように内周面が傾斜した
テーパ孔14とし、このような孔内に、傾斜内周面と同
じ角度に傾斜した外周面を有し貫通孔10aが偏心して
設けられた連結部材10を嵌合させた構造としても良
い。Further, the shape of the through hole 8a of the case member 8 is not limited to the straight tube shape having the same diameter in the axial direction, and the inner peripheral surface is inclined so that the diameter decreases downward as shown in FIG. The tapered hole 14 may be used, and the connecting member 10 having the outer peripheral surface inclined at the same angle as the inclined inner peripheral surface and the through hole 10a provided eccentrically may be fitted into such a hole.
【0020】[0020]
【発明の効果】以上説明したように本発明の結合装置に
おいては、光ファイバと光学素子との光軸調整を容易に
行なうことができるうえに、光軸調整後のレーザ溶接等
による固定の際に位置ずれや角度ずれが生じにくい。し
たがって、結合効率が良く信頼性の高い装置が得られ
る。As described above, in the coupling device of the present invention, the optical axes of the optical fiber and the optical element can be easily adjusted, and at the time of fixing by laser welding or the like after the optical axis adjustment. Positional deviation and angular deviation are unlikely to occur. Therefore, a device with high coupling efficiency and high reliability can be obtained.
【図1】本発明の光ファイバと光学素子との結合装置の
一実施例を示す斜視図。FIG. 1 is a perspective view showing an embodiment of a coupling device of an optical fiber and an optical element according to the present invention.
【図2】同実施例の要部を示す斜視断面図。FIG. 2 is a perspective sectional view showing a main part of the embodiment.
【図3】本発明の別の実施例において、ケース部材と連
結部材の形状を示す斜視断面図。FIG. 3 is a perspective sectional view showing the shapes of a case member and a connecting member according to another embodiment of the present invention.
【図4】従来の光ファイバと光学素子との結合装置を示
す斜視図。FIG. 4 is a perspective view showing a conventional coupling device of an optical fiber and an optical element.
【図5】従来の結合装置において位置ずれ、角度ずれが
生じた状態を示す斜視図。FIG. 5 is a perspective view showing a state in which positional displacement and angular displacement have occurred in the conventional coupling device.
8………ケース部材 8a………大径の貫通孔 9………光学素子 10………連結部材 10a………偏心した貫通孔 11………フェルール保持部材 11a………フェルール挿入孔 12………光ファイバ 13………フェルール 8: Case member 8a: Large-diameter through hole 9: Optical element 10: Connection member 10a: Eccentric through hole 11: Ferrule holding member 11a: Ferrule insertion hole 12 ……… Optical fiber 13 ……… Ferrule
Claims (2)
と、 前記フェルールの先端部が挿入される貫通孔が、偏心し
た位置に設けられた円柱状の第1のブロックと、 前記第1のブロックの外径とほぼ同径の内径を有する貫
通孔が、偏心した位置に設けられており、この貫通孔に
前記第1のブロックが回転および軸方向への進退が自在
に挿嵌される円柱状の第2のブロックと、 前記第2のブロックの外径とほぼ同径の内径を有する貫
通孔が同軸的に設けられており、この貫通孔に前記第2
のブロックが回転自在に挿嵌される第3のブロックと、 前記第3のブロックの貫通孔を臨む位置に配設された光
学素子とを備え、 前記光ファイバと光学素子とが結合するように位置合わ
せされ、かつ前記各ブロックの接合面が固定されている
ことを特徴とする光ファイバと光学素子との結合装置。1. A columnar first block in which a ferrule for fixing and holding an optical fiber, a through hole into which a tip of the ferrule is inserted are provided at an eccentric position, and an outer portion of the first block. A through hole having an inner diameter substantially the same as the diameter is provided at an eccentric position, and the first block is a cylindrical first member into which the first block is freely inserted so as to be rotatable and axially retractable. The second block and a through hole having an inner diameter substantially the same as the outer diameter of the second block are coaxially provided, and the second hole is provided in the through hole.
A third block into which the block is rotatably inserted, and an optical element disposed at a position facing the through hole of the third block, so that the optical fiber and the optical element are coupled to each other. A coupling device for an optical fiber and an optical element, which is aligned and the joint surface of each block is fixed.
により固定されていることを特徴とする請求項1記載の
光ファイバと光学素子との結合装置。2. The apparatus for coupling an optical fiber and an optical element according to claim 1, wherein the joint surface of each block is fixed by laser welding.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24807795A JPH0990172A (en) | 1995-09-26 | 1995-09-26 | Connection device for optical fiber and optical element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24807795A JPH0990172A (en) | 1995-09-26 | 1995-09-26 | Connection device for optical fiber and optical element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0990172A true JPH0990172A (en) | 1997-04-04 |
Family
ID=17172874
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24807795A Withdrawn JPH0990172A (en) | 1995-09-26 | 1995-09-26 | Connection device for optical fiber and optical element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0990172A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005158874A (en) * | 2003-11-21 | 2005-06-16 | Toshiba Corp | Optical receiving device and its manufacturing method |
WO2007050432A1 (en) * | 2005-10-24 | 2007-05-03 | Ondine International Ltd. | Optical aligment system and method |
-
1995
- 1995-09-26 JP JP24807795A patent/JPH0990172A/en not_active Withdrawn
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005158874A (en) * | 2003-11-21 | 2005-06-16 | Toshiba Corp | Optical receiving device and its manufacturing method |
WO2007050432A1 (en) * | 2005-10-24 | 2007-05-03 | Ondine International Ltd. | Optical aligment system and method |
US7334947B2 (en) | 2005-10-24 | 2008-02-26 | Ondine International Ltd | Alignment system and method |
JP2009514021A (en) * | 2005-10-24 | 2009-04-02 | オンディーヌ インターナショナル リミテッド | Optical alignment system and method |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20021203 |