JP3090573B2 - Optical component angle adjustment device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical component for adjusting the angle of the opposing surfaces of the optical components prior to the alignment of the optical axes of two optical components coupled with their end faces facing each other. The present invention relates to an angle adjusting device.

[0002]

2. Description of the Related Art Conventionally, an optical fiber system used for optical communication includes an LD module (light receiving module) in which light emitted from a semiconductor laser diode (hereinafter, LD) or a light emitting diode (LED) enters an optical fiber, Alignment work is indispensable in connecting the branch coupler and the optical fiber.

Since the core diameter of an optical fiber, particularly a single mode optical fiber, is as small as 10 μm, a slight optical axis shift leads to a large loss. Therefore, when connecting the optical components, the optical axis of the optical fiber is aligned by the alignment device before the connection.

That is, the first clamp is fixed to the centering device.
And the second optical component is mounted on the moving stage, and the first and second optical components are connected to each other at right angles to X,
They face each other via an XY plane formed by the Y axis.

[0005] Then, by moving the moving stage in the XY direction and in the Z direction perpendicular to the XY plane, an optimum position for maximizing the amount of transmitted light is searched for. In addition, 1
When performing optical axis alignment of a book, move three axes of X, Y, and Z. When performing multiple optical axis alignment, move four axes of X, Y, Z, and C (rotation axes around the Z axis). Alignment is common.

By the way, prior to the above-described alignment, it is necessary to correct the angles about the X axis and the Y axis so that the opposing boundary surfaces of the first and second optical components are parallel to each other. Conventionally, there has been no optical component angle adjusting device that can be attached to the alignment device.

[0007]

Therefore, when aligning optical components such as an LD module and a branch coupler with a conventional alignment device without an angle adjusting device, a first optical component guide surface (fixed holder) is required. And a second optical component guide surface (a reference surface with which the optical component comes into contact with the optical component holding clamp device held by the moving stage). It is necessary to assemble the parallelism with high precision, which is very difficult in terms of the configuration of the apparatus.

Further, even if the above-described high-precision device is manufactured, if the alignment is performed with the boundary surfaces of the first and second optical components pressed against each other with a constant force, the first and second optical components are aligned. In the case of an optical component having poor accuracy (squareness) between the side surface of the second optical component (the surface in contact with the optical component guide surface) and the end surface of each optical component, elastic deformation occurs in each optical component holding clamp device, Although the boundary faces are in a parallel state, an excessive force acts on the optical component holding clamp device.

When the rigidity of the optical component holding clamp device is large and elastic deformation does not occur, the boundary surfaces do not become parallel, and the edge of one of the optical component boundary surfaces scratches the partner during alignment. I will.

For this reason, even if the rigidity of the optical component holding clamp device is small or large, an excessive force is required at the time of alignment, and after the alignment is completed, the first and second optical components are removed. When bonding, for example, when heating and melting bonding is performed with a laser, etc., this may cause distortion, especially as a result of displacement, resulting in a change in the optimum amount of light searched by alignment. Happens.

[0011] In addition, even if heating and fusion bonding are performed after the alignment is performed at a boundary surface between two optical components with a space therebetween, if the boundary surfaces are not parallel, distortion may occur. As a result, there has been a problem that a change in the optimum light amount occurs.

The present invention has been made on the basis of the above circumstances. In order to make the boundary surfaces of two opposing optical components parallel to each other, there is no need to artificially correct angles around the X axis and the Y axis. It is another object of the present invention to provide an optical component angle adjusting device capable of correcting an angle shift around the X axis and the Y axis without giving an elastic deformation to a holder of the optical component even when the interface is pressed. I do.

[0013]

According to the present invention, as a first means for solving the above problems, a first optical component is mounted on a fixed holder, and an X axis and a Y axis orthogonal to the X axis are mounted on a moving stage. A second optical component facing the first optical component is attached via an XY plane comprising the first and second optical components.
The opposing surfaces of the optical components are brought into contact with each other on the XY plane.
In the optical component angle adjusting device for adjusting the angle of the opposing surface, the optical device is attached to the fixed holder or the moving stage and holds the first or second optical component, and the first and second optical components are XY. by being pressed against the Z-direction perpendicular to the plane, the rotation about the X-axis and Y-axis, and a movable member for adjusting the angle of the opposing surfaces of the first and second optical component, wherein the movable member X axis and Y axis
A fixed member rotatably supporting the movable member, and a movable member and a fixed portion for holding the movable member so as not to rotate after adjusting the angle.
And a holding mechanism provided between the members.

As a second means, the first optical component is mounted on a fixed holder, and the X-axis and the X-axis are mounted on the moving stage.
Mounting a second optical component facing the first optical component via an XY plane composed of a Y axis orthogonal to the axis;
And an opposing surface of the second optical component on the XY plane.
An optical component angle adjusting device that adjusts the angle of the opposing surface by attaching to the fixed holder or the moving stage and holding the first or second optical component;
The first and second optical components are arranged in a Z direction perpendicular to the XY plane.
, The first and second optical components rotate about the X and Y axes with the first and second axes parallel to the X and Y axes as rotation axes , and the opposing surfaces of the first and second optical components. A movable member for adjusting the angle of the movable member, a fixed member having a rotating bearing for guiding the rotating shaft of the movable member, and a movable portion for holding the first and second rotating shafts from rotating after adjusting the angle.
The structure includes a holding mechanism provided between the material and the fixing member .

As a third means, a first optical component is mounted on a fixed holder, and the X-axis and the X-axis are mounted on a moving stage.
Mounting a second optical component facing the first optical component via an XY plane composed of a Y axis orthogonal to the axis;
And an opposing surface of the second optical component on the XY plane.
An optical component angle adjusting device that adjusts the angle of the opposing surface by attaching to the fixed holder or the moving stage and holding the first or second optical component;
The first and second optical components are arranged in a Z direction perpendicular to the XY plane.
The first and second axes parallel to the X-axis and the Y-axis to rotate around the X-axis and the Y-axis along a spherical guide surface having the center of rotation as the center of rotation. And adjusting the angle of the facing surface of the second optical component , at least
A movable member having a convex spherical surface on a part of its circumference, a fixed member having a concave spherical surface for guiding the convex spherical surface of the movable member, and a movable member for holding the movable member so as not to rotate after adjusting the angle
And a holding mechanism provided between the holding member and the fixing member .

As a fourth means, the first optical component is mounted on a fixed holder, and the X-axis and the X-axis are mounted on the moving stage.
Attaching a second optical component facing the first optical component via an XY plane composed of an X axis orthogonal to the axis;
And an opposing surface of the second optical component on the XY plane.
An optical component angle adjusting device that adjusts the angle of the opposing surface by attaching to the fixed holder or the moving stage and holding the first or second optical component;
The first and second optical components are arranged in a Z direction perpendicular to the XY plane.
By pressing in the directions, it rotates around the X-axis and the Y-axis along the cylindrical guide surface centering on the first and second axes parallel to the X-axis and the Y-axis, respectively. A two-tiered movable member for adjusting the angle of the opposing surface of the second optical component, a fixed member having a guide surface for receiving the cylindrical guide surface of the lower movable member, and the movable member does not rotate after the angle adjustment. Provided between movable member and fixed member to hold
And a holding mechanism provided.

As a fifth means, the first optical component is mounted on a fixed holder, and the X-axis and the X-axis are mounted on the moving stage.
Mounting a second optical component facing the first optical component via an XY plane composed of a Y axis orthogonal to the axis;
And an opposing surface of the second optical component on the XY plane.
An optical component angle adjusting device that adjusts the angle of the opposing surface by attaching to the fixed holder or the moving stage and holding the first or second optical component;
The first and second optical components are arranged in a Z direction perpendicular to the XY plane.
By being pressed in the axial direction, it rotates about the intersection of the first and second axes parallel to the X-axis and the Y-axis, and changes the angle of the opposing surface of the first and second optical components. adjust,
A movable member having a convex spherical surface on at least a part of the outer periphery, a fixed member having a plurality of spherical members for guiding the convex spherical surface of the movable member to rotate about the rotation center, and the movable member rotating after an angle adjustment. Moving parts to keep it from
The structure includes a holding mechanism provided between the material and the fixing member .

[0018]

According to the optical component angle adjusting device of the present invention, the first and second optical components are attached to the fixed holder and the moving stage, and the moving stage is moved, whereby the first and second optical components are moved. Press the end faces together. At this time, the first
And when the end faces of the second optical component are not parallel, the movable member rotates about the X axis and the Y axis. This makes it possible to adjust the angles of the opposing surfaces of the first and second optical components in parallel without giving elastic deformation to the holding member of the optical component.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below in detail with reference to FIGS. FIG. 1 shows the overall configuration of a centering device 100. In FIG.
And a second optical component.

The first optical component 1 is fixed to a fixed holder 3. The second optical component 2 is mounted on an XYZ stage 4 that is a moving stage, and the position of the second optical component 2 is controlled by the XYZ stage 4 so that alignment with the first optical component 1 is performed.

Normally, the alignment of the LD module 110 shown in FIG.
XYZC (C axis is rotation axis around Z axis) for alignment of 20
In many cases, the centering axis is.

The XYZ stage 4 has a base 5, on which a Z guide 6 is provided. A Z stage 7 is mounted on the Z guide section 6, and the Z stage 7 is moved by a Z motor 8 in the Z direction, which is the vertical direction in FIG.

On the Z stage 7, a Y guide 9 is provided.
And a Y stage 10 mounted thereon, and can be moved in a vertical Y direction by a Y motor 11 mounted on the Z stage 7. Further, X is placed on the Y stage 10.
The guide unit 12 and the X stage 13 are mounted, and the Y stage 1
It can be moved in the X direction (the left-right direction in the figure) by the X motor 14 mounted on the upper side.

Although not shown in FIG. 1, when the C-axis is required, the C-axis which is a rotation axis around Z is mounted on the X stage 13. The configuration of the XYZ stage 4 has no direct relation to the present invention,
Any structure can be used as long as the direction, the Z direction, and the (C direction) can be adjusted.

The centering device 100 incorporates the optical component angle adjusting device 20 of the present invention. In this embodiment, a case is shown in which the angle adjustment device 20 is mounted on the XYZ stage 4 which is a moving stage.

In FIG. 1, reference numeral 25 denotes an XYZ stage 4.
Is a control device that performs control in the XYZ directions. The control unit 25 has a display unit 26 for displaying the current position of each axis.
Is provided.

A wiring 27 indicates a control signal path from the control device 25 to each of the motors 8, 11, and 14 and a feedback signal path from a position sensor. In the optical power measuring section 30, a power source section 28 (a light source section 28 'and an optical power measuring instrument 29 are arranged for alignment of the branch coupler).
The power supply 28 is connected to the second optical component 2.
In the case of alignment of the branch coupler, the light source unit 28 'is connected to the second optical component 2 via an optical fiber.

The optical power measuring device 29 includes an optical fiber 4
0 is connected to the first optical component 1. The CPU 41 is connected to the optical power measuring unit 29, receives a signal from the optical power measuring device 29, determines the alignment state of the first and second optical components 1 and 2, and controls the next new command by the control. It is sent to the device 25.

Note that reference numeral 15 shown in FIG. 1 is a YAG laser generator. FIG. 2 shows an LD module 110 and a branch coupler 120 that require alignment work. Since the configuration of the alignment device 100 shown in FIG. 1 is mainly for alignment of the LD module 110, a case where the LD module 110 is aligned will be described.

In FIG. 2, the LD 42 emits light by obtaining electricity from the power supply unit 28. Then, this light is condensed by the lens 43 and made incident on the optical fiber 40. Optical fiber 40
Is a core 55 having a diameter of 0.01 mm as shown in FIG.
And a cladding portion 56 having a diameter of 0.125 mm outside thereof.
And a covering material 57 on the outer periphery thereof. Since the light emitted from the LD 42 passes through the core portion 55 having a diameter of 0.01 mm, a high-precision alignment work is required to increase the light transmission amount.

Therefore, the second optical component 2 and the first optical component 1 of the LD module 110 are
It is mounted on the YZ stage 4 and the fixed holder 3 for centering.
The alignment directions are the X, Y, and Z directions, and the X stage 13, the Y stage 10, and the Z stage 7 in FIG. 1 are moved to move the first optical component 1 and the second optical component 2 relative to each other. This is to optimize the position.

After the alignment is completed, the cylinders 44 and 45 of the two optical components 1 and 2 are welded by laser welding or an ultraviolet curing adhesive 46.
And fix it. Further, in order to eliminate a gap in the Z direction, an intermediate member 47 shown in FIG. 4 may be used. In this case, the number of fixed portions is larger than that of FIG.

FIGS. 5 to 8 show the angles of the opposing surfaces of the first and second optical components 1 and 2 before the alignment of the opposing boundary surfaces of the first and second optical components 1 and 2. 3 shows an angle adjusting device 20 for making the angle parallel.

The angle adjusting device 20 mounts a fixed member 61 incorporating a rotary bearing 60 around the Y axis on the X stage 13 of the XYZ stage 4 as the moving stage.
A first bearing having a rotary shaft 62 around the Y axis on a rotary bearing 60
The rotary shaft 62 of the movable member 63 is inserted into the movable member 63 so as to be able to rotate around the Y axis.

Further, the first movable member 63 has a rotary bearing 64 around the X axis in a direction perpendicular to the rotary shaft 62 around the Y axis. Then, the rotating shaft 65 around the X bearing of the second movable member 66 having the rotating shaft 65 around the X bearing is inserted into the rotating bearing 64 around the X axis, so that the rotating motion around the X axis is also possible.

At the end of the rotating shaft 62 around the Y axis, there is a first clamp device 67. By clamping with the clamp device 67, the fixed member 61 and the first movable member 63 can be integrated. .

Further, a second clamping device 68 is provided at the end of the rotating shaft 65 around the X axis, and the first movable member 63 and the second movable member 66 are integrated by clamping with the clamp device 68. it can.

As described above, after the angles around the X axis and the Y axis are adjusted, the first and second clamping devices 67 as the holding mechanism are used.
And 68, the rotational movement about the X axis and the Y axis cannot be performed, and the optimum angle can be maintained. The rotating shaft 62 and the rotating shaft 65 are arranged at the same height as the joint of the first and second optical components 1 and 2.

In FIG. 5, reference numeral 69 denotes a screw for clamping the second optical component 2. By tightening the screw 69, the clamping arm 70 shown in FIG. It can be sandwiched between the second movable member 66 and clamped.

The first optical component 1 is fixed to the fixed holder 3 by tightening a clamping screw 71 as a clamping device.
Can be clamped. The fixed holder 3 includes a rotating shaft 82 held by a bearing 72 for facilitating attachment of the second optical component 2 to the angle adjusting device 20 and for facilitating attachment of the first optical component 1 to the fixed holder 3 itself. It can jump up as a center of rotation.

Further, the fixed holder 3 holds the first optical component 1.
After mounting, the clamping screw 7 as a clamping device
3 attaches and fixes to the base 74. 90 shown in FIG. 7 is a cord, and 91 shown in FIG. 8 is a clamp piece.

Next, the operation will be described with reference to FIG. 1, FIG. 4, FIG. 5 to FIG. Prior to alignment, to obtain the parallelism of the opposing end faces of the first and second optical components 1 and 2,
First, the fixing screw 73 for fixing the fixed holder 3 to the base 74 is loosened, and the fixed holder 3 is flipped up about the rotation shaft 82 held by the bearing 72 as the center of rotation. Then, the first optical component 1 is clamped to the fixed holder 3 by turning the optical component clamping screw 71 of the fixed holder 3.

Next, the clamping arm 70 is pressed against the second optical component 2 by turning the optical component clamping screw 69 of the angle adjusting device 20 attached to the XYZ stage 4 as a moving stage, and the optical component clamping is performed. The second optical component is clamped between the second optical component and the stopper 75.

In FIG. 8, reference numeral 76 denotes a holding member made of a spring material, which is provided between the intermediate member 47 and the second optical component 2 when the LD module 110 having the intermediate member 47 as shown in FIG. And presses the intermediate member 47 against the second optical component 2 so that no gap is opened.

As described above, the first and second optical components 1 and 2
Are attached to the fixed holder 3 and the angle adjusting device 20, respectively.
Fix to 4.

Next, the Z stage 7 of the moving stage is moved in the Z (+) direction by the Z motor 8, and the end surface of the second optical component 2 is pressed against the end surface of the first optical component 1 of the fixed holder 3. . Thereby, the boundary surfaces of the first and second optical components 1 and 2 are brought into pressure contact with each other.

If the boundary surface between the first and second optical components 1 and 2 is not parallel due to this pressure contact, the rotary bearing 6 around the Y axis in which the second optical component 2 is incorporated in the fixing member 61 is used.
The first movable member 63 rotates around the Y axis by using 0 as a guide for rotational movement. Further, the second movable member 66 rotates around the X-axis by using a rotation bearing 64 around the X-axis, which is vertically assembled with the rotation shaft 62 around the Y-axis of the first movable member 63, as a guide for the rotational motion. I do.

Further, the rotational center 7 of the rotational motion about the X axis
7 and the rotation center 78 of the rotational movement about the Y axis are in the same XY plane, and if the XY plane and the fixing point (end face) 48 of the second optical component 2 are in the same XY plane, the second The optical component 2 is a fixed portion (end face) 48 of the second optical component.
The second optical component 2 rotates around a center point 79 (see FIG. 4), ideally, at a point in FIG. 4 (ideally).

Due to the rotational movement of the second optical component 2,
The end faces of the first and second optical components 1 and 2 are collimated to determine the optimum angle. As described above, when the optimum angle is determined, the first and second clamping devices 67 and 68 are tightened to connect and fix the fixed member 61 and the first movable member 63 and further the second movable member 66 to align the center. Prepare for.

As described above, since the second optical component 2 is only pressed against the end face of the first optical component 1, the parallelization of the boundary surface can be performed in a very short time. Further, since no excessive force is applied to the holding members of the first and second optical components 1 and 2, the parallel state can be reliably maintained without the optical components and the holding members of the optical components being elastically deformed.

After the interface between the first optical component 1 and the second optical component 2 is made parallel, the first and second clamping devices 67 and 68 are tightened to fix the fixing member 61 and the first optical component 2. The movable member 63 and the second movable member 66 are connected and fixed,
In order to prevent the rotational movement about the X axis and the rotational movement about the Y axis, even when the center is provided with a gap between the end faces of the first optical component 1 and the second optical component 2, the optimum angle is not changed. Don't go crazy.

Thereafter, the X stage 13 and the Y stage 10
Alignment is performed by Next, a first other embodiment of the present invention will be described with reference to FIG. The angle adjusting device 20 is configured to control the X of the XYZ stage 4 as the moving stage.
A fixing member 156 having a spherical rotary motion guide surface 150 including a concave spherical surface 154 and a convex spherical surface 155 on the stage 13.
And a convex spherical surface 157 having the same radius of curvature as the spherical rotational motion guide surface 150 at least partially on the outer periphery between the concave spherical surface 154 and the convex spherical surface 155 constituting the spherical rotational motion guide surface 150 of the fixing member 156. And a movable member 159 having a concave spherical surface 158.

Since the movable member 159 rotates with the spherical rotary motion guide surface 150 of the fixed member 156 as a guide surface, the same operation as the rotary motion about the X axis and the Y axis shown in FIGS. Can be performed. At this time, the fixing member 156
The hole 1 from which gas is blown out
60, 161 are open.

Each of the holes 160 and 161 has a separate gas supply source, and it is possible to independently select one of the start and stop of gas blowing. There is a gap of about several μm between the concave spherical surface 154 of the fixed member and the convex spherical surface 157 of the movable member, and between the convex spherical surface 155 of the fixed member and the concave spherical surface 158 of the movable member 159. Therefore, if the gas does not flow from the hole 160, the convex member 157 of the movable member and the concave spherical surface 154 of the fixed member are in contact with each other due to the weight of the movable member 159.

However, by flowing gas from the holes 160 and 161, the movable member 159 is pushed up, so that the movable member 159 does not come into contact with the fixed member 156, and a smooth rotational movement can be performed.

By stopping the gas blowing from the hole 160 while continuing to blow the gas from the hole 161, the concave spherical surface 154 of the fixed member 156 and the movable member 159 are stopped.
The convex spheres 157 can be tightly clamped by the pressure of gas.

After adjusting the angles about the X axis and the Y axis in this way, by stopping only the blowing of the gas from the hole 160, the rotational movement about the X axis and the Y axis cannot be performed, and the optimum angle is maintained. be able to.

Next, the operation will be described with reference to FIGS. Thus, the optical component 2 of the angle adjustment device 20 attached to the moving stage receives compressed gas (about 6 to 7 kgf / cm ² ) from the gas port 162 into the space 16.
3, the clamping arm 164 is pressed against the optical component 2, and clamped between the receiving part 165 fixed to the movable member 159.

Next, the Z stage 7 of the moving stage is moved in the Z (+) direction (upward in FIG. 1) by the Z motor 8, and the end surface of the second optical component 2 is attached to a fixed holder (not shown). To the end surface of the first optical component 1. Thereby, the boundary surfaces of the first and second optical components 1 and 2 are brought into pressure contact with each other.

When the boundary surface between the first and second optical components 1 and 2 is not parallel due to this pressure contact, the movable member 159 to which the second optical component 2 is attached becomes the fixed member 1 as described above.
Since the rotary motion is performed using the 56 spherical rotary motion guide surfaces 150 as the guide surfaces, the same operation as the rotary motion about the X axis and the Y axis shown in FIGS. 5 to 8 can be performed.

At this time, the holes 160 and 161 are provided in the spherical rotary motion guide surface 150, and the holes 1 and 161 are provided.
The movable member 159 is formed by flowing gas from
Does not come into contact with the fixing member 156 and can perform a smooth rotational movement.

The spherical surfaces 154, 155, 157, 15
If the center of 8 is at the same position and this point is within the end face of the second optical component 2, the end face of the second optical component 2 is the fixing point 48 of the second optical component (see FIG. 4). One of the
Ideally, the second optical component 2 rotates around the center 149 (see FIG. 4) of the end surface of the second optical component 2.

By the rotational movement of the second optical component 2,
The end faces of the first and second optical components 1 and 2 are collimated to determine the optimum angle. As described above, when the optimum angle is determined, the blowing of the gas from the hole 160 is stopped while the gas is continuously blown from the hole 161, so that the concave spherical surface 154 of the fixed member 156 and the convex spherical surface 15 of the movable member 159.
7 Combined and clamped by gas pressure
The movable member 159 and the movable member 159 are connected and fixed to prepare for alignment.

As described above, since only the second optical component 2 is pressed against the end face of the first optical component 1, the parallelization of the boundary surface can be easily performed in a very short time. Further, since no excessive force is applied to the holding members of the first and second optical components 1 and 2, the parallel state can be reliably maintained without the optical components and the holding members of the optical components being elastically deformed.

A first optical component 1 and a second optical component 2
After the boundary surface is made parallel, the gas blowing from the hole 160 is stopped while the gas continues to be blown from the hole 161, so that the concave spherical surface 154 of the fixed member 156 and the convex spherical surface 157 of the movable member 159 are connected. Are fixed to each other by the pressure of the gas and clamped, and the fixed member 156 and the movable member 159 are connected and fixed to prevent the rotational movement.
In the case where the alignment is performed with a gap between the end faces of the optical component 2 and the second optical component 2, the optimum position is not deviated.

Next, referring to FIGS. 10 and 11,
A second other embodiment of the present invention will be described. The angle adjusting device 20 is provided with the moving stage (a fixed holder may be used).
A fixed member 171 having a cylindrical rotary motion guide surface 170 around the Y-axis is mounted on the X stage 13 of the first movable member 17 using the rotary motion guide surface 170 as a guide surface.
2 is incorporated in the rotational motion guide surface 170 of the fixing member 171.

The first movable member 172 has four rollers 17
3, and is in contact with the fixing member 171 to enable rotational movement about the Y axis. Further, the first movable member 1
72 has a cylindrical rotary motion guide surface 175 around the X axis orthogonal to the Y axis.

Then, a second movable member 176 having the rotational motion guide surface 170 as a guide surface is incorporated into the rotational motion guide surface 175 about the X axis. The second movable member 176 is in contact with the first movable member 172 via four rollers 177, and is capable of rotating around the X axis.

Further, a first clamp device 178 which operates by gas pressure is attached to the fixing member 171.
The clamp device 178 presses a clamp rod (not shown) against the side surface of the first movable member 172 by air pressure, and integrates and clamps the fixed member 171 and the first movable member 172. Further, a second clamp device 179 that operates by gas pressure is also attached to the first movable member 172.
Similarly to the clamp device 178, the clamp device 179 connects a clamp rod (not shown) to the second movable member 17
6, the first movable member 172 and the second movable member 176 are integrated and clamped. After adjusting the angles about the X axis and the Y axis in this manner, the clamp devices 178 and 17
By clamping at 9, the rotational movement about the X axis and the Y axis becomes impossible, and the optimum angle can be maintained.

Next, the operation will be described with reference to FIGS. 1, 4, 10, and 11. The optical component 2 of the angle adjusting device 20 attached to the moving stage is clamped as in FIG.

Next, the Z stage 7 of the moving stage is moved in the Z (+) direction by the Z motor 8 and pressed against the end surface of the second optical component 2 against the end surface of the first optical component 1. The boundary surfaces of the first and second optical components 1 and 2 are brought into pressure contact with each other.

When the boundary between the first and second optical components 1 and 2 is not parallel due to this pressure contact, the second optical component 2 moves the rotational motion guide surface 17 around the Y axis of the fixing member 171.
The first movable member 172 rotates around the Y axis via a roller 173 with 0 as a guide surface for rotational movement.

The first movable member 172 is provided with a rotary motion guide surface 175 around the X axis which is incorporated in a direction perpendicular to the Y axis.
The second movable member 176 rotates around the X-axis via the roller 177 with the rotation direction as a guide surface for rotational movement. Also, X
The rotation center of the rotation about the axis and the rotation center of the rotation about the Y axis are in the same XY plane, and the XY plane is fixed to the second optical component 2 (end face) 48 (see FIG. 4). Are in the same XY plane, the second optical component 2
Of the second optical component 2 (see FIG. 4).

The rotational movement of the second optical component 2 allows
The end faces of the first and second optical components 1 and 2 are collimated to determine the optimum angle. As described above, when the optimum position is determined, the first clamping device 178 and the second clamping device 179 are operated to apply the fixed member 171, the first movable member 172 and the second movable member 176 to the gas pressure. To fix it and prepare for alignment.

As described above, since only the second optical component 2 is pressed against the end face of the first optical component 1, parallelization of the boundary surface can be performed in a very short time. Also, since no excessive force is applied to the holding members of the first and second optical components, the optical components and the holding members of the optical components can be reliably maintained in a parallel state without being elastically deformed.

A first optical component 1 and a second optical component 2
Are parallelized, the first clamp device 178 and the second clamp device 179 are actuated to operate the fixed member 171, the first movable member 172, and the second movable member 1.
76 is pressed against and fixed by the pressure of the gas, so that a rotational movement around the X axis and a rotational movement around the Y axis are not possible, so that a gap is provided between the end surfaces of the first optical component 1 and the second optical component 2. The optimum angle will not be out of order even when the center is opened.

Next, a third embodiment of the present invention will be described with reference to FIGS. The angle adjusting device 20 is provided with the moving stage (a fixed holder is also possible).
Is mounted on the X stage 13 of the XYZ stage 4. The angle adjusting device 20 includes a rotation movable member 180, a rotation clamp movable arm 181, a fixed member 182, a rotation clamp arm guide 183, and a clamp air cylinder 1.
84, an auxiliary air cylinder 185 and a position detection sensor 186 in the Z direction of the rotatable movable member (vertical direction in FIGS. 12 and 13).

The rotatable movable member 180 has, at least in part, a convex spherical surface 187 and a concave spherical surface 188 having a center equal to the above-mentioned convex spherical surface 187. The rotary clamp movable arm 181 is attached to the second movable movable member 180. It is hollow to pass a cord (electric wire) 90 for supplying electricity to the optical component 2.

FIGS. 12 and 13 show a state in which the movable arm 181 for rotating clamp has been raised to the full Z (+) direction (upward in FIGS. 12 and 13) by the air cylinder 184 for clamping. Movable arm 181 for rotary clamp
Is restricted by a rotary clamp arm guide 183 incorporated in the fixing member 182 from movements other than in the Z direction (vertical direction in FIGS. 12 and 13).

When the rotary clamp movable arm 181 is raised by the clamp air cylinder 184, the lift limit stopper 189 of the rotary clamp movable arm 181 comes into contact with the lift limit stopper guide surface 190 of the fixed member 182 to rotate the rotary clamp movable arm 181. The movement of the movable arm 181 stops.

In this state, the rotatable movable member 180 is pushed up in the z (+) direction (upward in FIGS. 12 and 13) by the rotary motion guiding ball 191 attached to the rotary clamp movable arm 181 to rotate. Convex spherical surface 18 of movable member 180
7 and the concave spherical surface 192 for rotation clamp having the same radius of curvature, there is a gap, and the angle can be adjusted. Since there are a plurality of balls 191, the balls 191 are held by a retainer so as not to fall apart, can only rotate, and are attached to the rotating clamp movable arm 181, so that the rotating clamp movable arm 181 moves up and down. When it moves, it moves in conjunction.

The convex spherical surface 187 may be supported at three points, and need not be a concave spherical surface. At this time, the concave spherical surface 188 of the rotatable movable member 180 and the convex spherical surface 193 having the same radius of curvature as the concave spherical surface 188 have.
A gap is provided between them. The concave spherical surface 188 may be pressed at three points, and need not be a convex spherical surface.

When the movable arm 181 for rotating clamp is lowered in the Z (-) direction (downward in FIGS. 12 and 13) by the air cylinder 184 for clamping after the angle adjustment of the optical components, The convex spherical surface 187 of the member 180
And the concave spherical surface 192 for rotation clamping of the fixing member 182 comes into contact with each other. As it is further lowered, the convex spherical surface 193 of the rotary clamp movable arm 181 comes into contact with the concave spherical surface 188 of the rotary movable member 180.

Finally, the concave and convex spherical surfaces 192 of the rotary movable member 180 are sandwiched between the concave spherical surface 192 for the rotary clamp of the fixed member 182 and the convex spherical surface 193 for the rotary clamp of the movable arm 181 for the rotary clamp.

At the time of this clamping, the convex spherical surface 187 and the concave spherical surface 188 of the rotary movable member 180 and the convexity for the rotary clamp of the rotary clamp movable arm 181 are maintained so that the attitude of the optical component 2 after adjusting the angle is not lost. It is necessary to make the X and Y coordinates of the center of the spherical surface 193 and the center of the concave spherical surface 192 for rotation clamping of the fixing member 182 coincide.

The auxiliary air cylinder 185 incorporated in the fixed member 182 and the position detection sensor 186 in the movable member Z direction (vertical direction in FIGS. 12 and 13) will be described in the following description of the operation.

Next, the operation will be described with reference to FIGS. 1, 4 and 9. Thus, the optical component 2 of the angle adjustment device 20 attached to the moving stage further rotates the lever of the clamp cam 194, and further presses the clamp block 196 via the spring 195 against the optical component 2 to rotate and move. It is clamped by being sandwiched between the receiving member 197 fixed to the member 180.

Next, the Z stage 7 of the moving stage is
The motor 8 is moved in the Z (+) direction (upward in FIG. 1), and the end surface of the second optical component 2 is pressed against the end surface of the first optical component 1 attached to a fixed holder (not shown). Thereby, the boundary surfaces of the first and second optical components 1 and 2 are brought into pressure contact with each other.

At this time, if there is a variation in the length of the first optical component 1 and the second optical component 2 in the Z (+) direction (upward direction in FIG. 1), an installation error, etc. , First
In addition, variations occur in the Z coordinate when the end faces of the second optical component come into contact with each other. When trying to control the pressing force based on the position of the Z coordinate, there is a possibility that the pressing pressure becomes excessive due to this variation. In this case, excessive force is applied to the first and second optical components 1 and 2, the fixed holder 3, and the clamp portions of the first and second optical components 1 and 2 of the angle adjustment device 20, which may cause breakage. Become.

Therefore, in the angle adjusting device 20 shown in FIGS. 12 and 13, the Z stage 7 of the moving stage is moved by the Z motor 8 in the Z (+) direction (upward in FIGS. 1, 12 and 13). When the end surface of the second optical component 2 is pressed against the end surface of the first optical component 1 mounted on a fixed holder (not shown), when the pressing pressure becomes excessive, the rotary clamp is movable. As the arm 181 and the rotatable movable member 180 cooperating therewith move upward in the Z (+) direction (the upward direction of the upward direction 12 in FIGS. 1, 12, and 13) of the Z stage 7 as the moving stage, the arm 181 and the rotational movable member 180 move upward. The structure does not rise.

The pressing force for stopping the rotation of the rotary clamp movable arm 181 is determined by the lifting force of the rotary clamp arm 181 of the clamp air cylinder 184 in the Z (+) direction (upward in FIGS. 12 and 13). It can be set by controlling the air pressure.

However, the movable arm 181 for the rotary clamp
Even if the rotation of the rotatable movable member 180 is stopped, the fixed member 182 moves along with the movement of the Z stage 7 in the Z (+) direction (upward in FIGS. 1, 12, and 13). The convex spherical surface 187 of the rotation movable member 180 and the concave spherical surface 1 for the rotation clamp of the fixed member 182
The distance between the convex spherical surface 92 and the convex spherical surface 1
1 and FIG. 1, the Z stage 7 is kept in the Z (+) direction even after the distance between the concave surface 87 and the concave spherical surface 192 for rotation clamp becomes zero.
(2) (upward in FIG. 13), an excessive pressing pressure state occurs again.

Therefore, in order to prevent the pressing pressure from becoming excessive again, the movable member Z-direction (vertical direction in FIGS. 12 and 13) position detection sensor 186 is incorporated in the rotary clamping concave spherical surface 192 of the fixed member 182. The aforementioned convex spherical surface 1
The Z stage 7 is stopped from rising in the Z (+) direction when the interval between the concave surface 87 and the concave spherical surface 192 becomes zero.

In this step, the Z stage 7 of the moving stage is moved by the Z motor 8 in the Z (+) direction (upward in FIG. 1), and the end surface of the second optical component 2 is placed in a fixed holder (not shown). Is also pressed against the end face of the attached first optical component 1. "
The process starts when the ascending limit stopper 189 contacts the ascending limit stopper guide surface 190 of the fixed member 182 and the ascending of the rotary clamp movable arm 181 is stopped, that is, the angle can be adjusted.

When the interface between the first and second optical components 1 and 2 is not parallel due to this pressure contact, the rotatable movable member 180 to which the second optical component 2 is attached can be used as described above. Ball 191 for rotating motion guide of movable arm 181
X shown in FIG. 5 to FIG.
The same operation as the rotational movement about the axis and the Y axis can be performed.

The rotation of the second optical component 2 causes
The first and second optical components 1 and 2 are collimated to determine an optimum angle. Thus, once the optimal angle is determined,
In this state, air is sent to three or more auxiliary air cylinders 185 incorporated in the fixed member 182, and the distal end 198 of the auxiliary air cylinder is pressed against the convex spherical surface 187 of the rotatable movable member 180.

Since this step is performed for the purpose of maintaining the above-described optimum angle, the thrust of the auxiliary air cylinder 185 is smaller than that of the clamping air cylinder 184. The auxiliary air cylinder tip 198 is a rotatable movable member 18.
0 so that the convex spherical surface 187 is not damaged.
In order to increase the frictional resistance between the front end 7 and the front end portion 198 of the auxiliary air cylinder, it is desirable to use rubber or plastic.

After the angles of the first and second optical components 1 and 2 have been adjusted, when the rotary clamp movable arm 181 is lowered in the Z (-) direction by the clamp air cylinder 184, the convex of the rotary movable member 180 is raised. Spherical surface 187 and fixing member 18
The two rotating clamp concave spherical surfaces 192 come into contact with each other. When further lowered, the rotating clamp convex spherical surface 193 of the rotating clamp movable arm 181 comes into contact with the concave spherical surface 188 of the rotating movable member 180.

Finally, the concave spherical surface 188 and the convex spherical surface 187 of the rotary movable member 180 are connected to the concave spherical surface 192 and the convex spherical surface 187 of the rotary movable member 180 by the rotary clamp concave spherical surface 192 of the fixed member 182 and the rotary clamp convex spherical surface 193 of the rotary clamp movable arm 181. 1
The fixed member 182 and the rotatable movable member 180 are connected and fixed by the pressure of the gas acting on the retraction side of 84 to prepare for alignment.

As described above, since only the second optical component 2 is pressed against the end face of the first optical component 1, the boundary surface can be parallelized in a very short time. In addition, even when there is a variation in the length of the first and first and second optical components 1 and 2 in the Z (+) direction (upward in FIG. 1), an installation error, and the like, the optical components and the optical components are not affected. The parallel state can be reliably maintained without the holding member elastically changing more than necessary.

A first optical component 1 and a second optical component 2
After the boundary surface of the fixing member 18 is made parallel,
2 and the rotatable movable member 180 are connected and fixed to prevent rotational movement. Therefore, even when the center is provided with a gap between the end faces of the first optical component 1 and the second optical component 2, the optimum position is not changed. Don't go crazy.

In each of the embodiments described above, the angle adjusting device 20 uses the XYZ stage 4 as a moving stage.
, But is not limited to this, the fixing holder 3
It may be provided on the side.

In fixing the first and second optical components 1 and 2 to the angle adjusting device 20 and the fixing holder 3, respectively, a manual screw clamp device is used in the embodiment shown in FIGS. In the embodiment shown in FIG. 9, a clamp device using gas pressure is used, but either clamp device may be used in either embodiment.

Further, the fixing of the first and second movable members 63 and 66 of FIGS. 5 to 8 and the fixing of the movable member 159 of FIG. 9 are performed by the pneumatic clamps shown in FIGS. May be performed.

Further, in the spherical system of FIG. 9, various modifications are possible, such as only one set of guide surfaces, and a rolling guide surface system instead of the gas guide surface system. In addition, the present invention is not limited to the above-described embodiment, and it is needless to say that various modifications can be made without departing from the spirit of the present invention.

[0106]

As described above, according to the present invention, since only the second optical component 2 is pressed against the end face of the first optical component 1, the parallelization of the boundary surface can be easily performed in a very short time. Can be. Also, since no excessive force is applied to the holding members of the first and second optical components, the optical components and the holding members of the optical components can be reliably maintained in a parallel state without being elastically deformed.

Accordingly, unnecessary force is not required for alignment, and when the first and second optical components are joined and fixed after the completion of the alignment, a distortion occurs and a positional shift occurs after the joining and fixing. There is no, and the optimum light amount searched by the alignment can be maintained.

Also, when alignment is performed at a boundary surface between the first and second optical components with a space therebetween, and then heating and fusion bonding (eg, laser welding) are performed, no distortion occurs. This produces an effect that the optimum light amount can be maintained.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a centering device provided with an angle adjusting device of the present invention.

FIG. 2 is a configuration explanatory view of an optical component whose angle is adjusted and aligned by the alignment device of FIG. 1;

FIG. 3 is a sectional view of an optical fiber used in the embodiment.

FIG. 4 is another configuration explanatory view of an optical component whose angle is adjusted and aligned by the alignment apparatus of FIG. 1;

FIG. 5 is a schematic plan view of an angle adjusting device which is a main part of the embodiment.

FIG. 6 is a sectional view taken along the line AA in FIG. 5;

FIG. 7 is a sectional view taken along the line BB of FIG. 5;

FIG. 8 is a sectional view taken along line CC of FIG. 5;

FIG. 9 is a cross-sectional view of an optical component angle adjusting device according to another first embodiment of the present invention.

FIG. 10 is a sectional view of an angle adjusting device for an optical component according to another second embodiment of the present invention.

FIG. 11 is a sectional view taken along the line DD in FIG. 10;

FIG. 12 is a sectional view of an optical component angle adjusting device according to another third embodiment of the present invention.

FIG. 13 is a sectional view taken along the line EE in FIG. 12;

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... 1st optical component, 2 ... 2nd optical component, 3 ... Fixed holder, 4 ... XYZ stage (moving stage), 20 ... Angle adjustment device, 61 ... Fixed member, 62 ... Rotation axis around Y axis, 63: a first movable member, 65: a rotating shaft around the X axis, 66: a second movable member, 67: a first clamp device, 68: a second clamp device, 71: a clamp device,
73: clamping device, 100: alignment device, 110: LD
Module, 120: Branch coupler, 150: Rotational motion guide surface, 154: Concave sphere, 155: Convex sphere, 156: Fixed member, 157: Convex sphere, 158: Concave sphere, 159: Movable member, 160, 161: Hole, 162: gas port, 16
4 ... Clamping arm, 165 ... Receiver, 170 ... Rotary motion guide surface around Y axis, 171 ... Fixed member, 172 ... First movable member, 175 ... Rotary motion guide surface around X axis,
176 second movable member, 178 first clamp device, 179 second clamp device, 180 movable rotary member, 181 movable arm for rotary clamp, 182 fixed member, 183 arm guide for rotary clamp , 184 ...
Air cylinder for clamping, 185 ... Auxiliary air cylinder,
186: Z-direction position detection sensor, 187: convex spherical surface, 18
Reference numeral 8: concave spherical surface, 189: ascending limit stopper, 190: ascending limit stopper guide surface, 191 ... rotational motion guiding sphere, 192
... Concave spherical surface for rotary clamp, 193 ... Convex spherical surface for rotary clamp, 194 ... Cam for clamp, 195 ... Spring, clamp block, 196 ... Block for clamp, 197 ... Receiver, 198 ... Front end of auxiliary air cylinder.

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) G02B 6/42 G02B 6/24 G02B 7/00

Claims (9)

(57) [Claims] 1. A first optical component is mounted on a fixed holder,
A second stage facing the first optical component via an XY plane including an X axis and a Y axis orthogonal to the X axis on the moving stage;
And the pair of the first and second optical components
An angle adjusting device for an optical component that adjusts the angle of the facing surface by bringing the facing surfaces into contact with each other on the XY plane , wherein the device is attached to the fixed holder or the moving stage and holds the first or second optical component. When the first and second optical components are pressed against each other in the Z direction perpendicular to the XY plane, the first and second optical components rotate about the X axis and the Y axis, and the first and second optical components face each other. A movable member for adjusting the angle, a fixed member for rotatably supporting the movable member around the X axis and the Y axis, and a holder for preventing the movable member from rotating after the angle adjustment.
An angle adjusting device for an optical component, comprising: a holding mechanism provided between a movable member and a fixed member . 2. A first optical component is mounted on a fixed holder,
A second stage facing the first optical component via an XY plane including an X axis and a Y axis orthogonal to the X axis on the moving stage;
And the pair of the first and second optical components
An angle adjusting device for an optical component that adjusts the angle of the facing surface by bringing the facing surfaces into contact with each other on the XY plane , wherein the device is attached to the fixed holder or the moving stage and holds the first or second optical component. The first and second optical components are pressed against each other in a Z direction perpendicular to the XY plane, so that the first and second axes parallel to the X axis and the Y axis are rotated about the X axis and the Y axis. A movable member that rotates about an axis and adjusts the angle of the opposing surfaces of the first and second optical components; a fixed member that has a rotating bearing that guides the rotating shaft of the movable member; And a holding mechanism provided between the movable member and the fixed member to hold the second rotation shaft so as not to rotate. 3. A first optical component is mounted on a fixed holder,
A second stage facing the first optical component via an XY plane including an X axis and a Y axis orthogonal to the X axis on the moving stage;
And the pair of the first and second optical components
An angle adjusting device for an optical component that adjusts the angle of the facing surface by bringing the facing surfaces into contact with each other on the XY plane , wherein the device is attached to the fixed holder or the moving stage and holds the first or second optical component. The first and second optical components are pressed against each other in the Z direction perpendicular to the XY plane, so that the point of rotation is the intersection of the first and second axes parallel to the X axis and the Y axis. It rotates around the X axis and the Y axis along the guide surface, and adjusts the angle of the opposing surface of the first and second optical components.
A movable member having a spherical surface, and a fixing member having a concave spherical surface for guiding the convex spherical surface of the movable member, to hold to said movable member after the angle adjustment does not rotate
An angle adjusting device for an optical component, comprising: a holding mechanism provided between a movable member and a fixed member . 4. A first optical component is attached to a fixed holder,
A second stage that faces the first optical component via an XY plane including an X axis and an X axis orthogonal to the X axis;
And the pair of the first and second optical components
An angle adjusting device for an optical component that adjusts the angle of the facing surface by bringing the facing surfaces into contact with each other on the XY plane , wherein the device is attached to the fixed holder or the moving stage and holds the first or second optical component. The first and second optical components are pressed against each other in a Z direction perpendicular to the XY plane to thereby provide a cylindrical guide centered on first and second axes parallel to the X and Y axes, respectively. A two-tiered movable member that rotates about the X axis and the Y axis along the plane to adjust the angle of the opposing surfaces of the first and second optical components, and receives the cylindrical guide surface of the lower movable member A fixed member having a guide surface, and for holding the movable member so as not to rotate after adjusting the angle.
An angle adjusting device for an optical component, comprising: a holding mechanism provided between a movable member and a fixed member . 5. A first optical component is mounted on a fixed holder,
A second stage facing the first optical component via an XY plane including an X axis and a Y axis orthogonal to the X axis on the moving stage;
And the pair of the first and second optical components
An angle adjusting device for an optical component that adjusts the angle of the facing surface by bringing the facing surfaces into contact with each other on the XY plane , wherein the device is attached to the fixed holder or the moving stage and holds the first or second optical component. Since the first and second optical components are pressed against each other in the Z-axis direction perpendicular to the XY plane, the intersection of the first and second axes parallel to the X-axis and the Y-axis is set as the rotation center. rotated, adjusting the angle of the opposing surfaces of the first and second optical components, at least the outer
A movable member having a convex spherical surface on a part of its circumference; a fixed member having a plurality of spherical members for guiding the convex spherical surface of the movable member to rotate about the rotation center; and the movable member does not rotate after adjusting the angle. Should be kept
A holding mechanism provided between the movable member and the fixed member ,
An angle adjusting device comprising: 6. A fixing member having a plurality of spherical members is provided so as to be movable while applying a pressing force in a pressing direction of the optical member, and the holding mechanism is configured to move the movable member when the fixing member is pressed by the pressing force. 6. The optical component according to claim 5, comprising: a member provided on the back side for receiving the convex spherical surface; and a member for pressing the front side of the movable member to the rear side to press the convex spherical surface against the member. Angle adjustment device. 7. The angle adjusting device for an optical component according to claim 6, wherein a member for pressing the front side of the movable member toward the rear side is movably mounted integrally with the fixed member. 8. A pressure detecting device for detecting a position of a fixing member in a pressing direction in a pressing direction, wherein a pressing operation is controlled by an output of the sensor.
Or an angle adjusting device for an optical component according to 7. 9. A member for receiving a convex spherical surface, wherein at least three auxiliary cylinders are provided so as to face the convex spherical surface, and a tip of a piston rod thereof is configured to be able to contact the convex spherical surface. 9. The angle adjusting device for an optical component according to 7 or 8.