JPH0989548A - Method and device for three-dimensional measurement - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately measure with simple constitution the shape of a subject for measurement by correcting using a correction value the measurements of the straightness of the horizontal plane and the slit vertical plane of the subject for measurement. SOLUTION: A subject W for measurement, having a slit S with a vertical plane WV and having a horizontal plane WH, is secured to a table 9. A horizontal-plane probe 31 that is in contact with the plane WH is moved horizontally by the table 9 and a stage 16 to make threedimensional measurements of the positions of three points on the plane WH with a base 2 serving as a reference, so as to calculate the levelness of the plane WH and to obtain a correction. Next, the probe 31 is moved horizontally on a straight line on the plane WH by either the table 9 or the stage 16 alone, and the straightness of the plane WH is measured from the amount of displacement of the end of the probe 31. Then a vertical-plane probe 26 is inserted into the slit S by a head 21 to measure the perpendicularity and straightness of both vertical planes WV in sequence. The probe 26 is inserted again to measure the levelness and straightness of the plane WV using either the table 9 or the stage 16 alone. These measurements of the straightness are corrected using a correction to determine the shape of the subject W for measurement.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention uses a mold having minute slits such as an extrusion mold for molding an aluminum mold material such as a building material as an object to be measured, and a three-dimensional shape of the object to be measured. The present invention relates to a three-dimensional measuring method and apparatus for measuring.

[0002]

2. Description of the Related Art Generally, an aluminum mold material such as a building material, for example, a sash frame is obtained by extrusion molding. A mold is used for this extrusion molding process, but since this mold has a cross-sectional shape such as a sash frame, which is a molded product, it is formed in a slit shape. Is determined. Therefore, it is premised that the slit shape of the die is precisely processed, and the slit shape and the like are precisely measured before the die is used.

Conventionally, a three-dimensional object to be measured, such as the above-mentioned mold, has been measured by a measurer using a measuring instrument such as a caliper. However, the error varies from person to person and skill is required. For a while, automation was desired.

Therefore, for example, a method of measuring the outer shape of the contact probe or a contact-type measuring device that moves the object to be measured up and down, left and right, and back and forth, an image processing device such as a CCD camera, and an optical sensor. Various measuring methods and measuring devices have been devised, such as non-contact type measuring methods.

[0005]

However, in the above-mentioned conventional measuring device, according to the former device using the contact probe, the contact probe or the object to be measured can be freely moved in the up, down, left and right directions. However, it is necessary to design each drive part with high precision because the coordinates of three-dimensional position are measured by driving each of them at the same time. This is a method for obtaining (measuring) the shape, and the measurement at this point must be repeated, and high precision that does not cause an error for each measurement is required. Therefore, regarding the manufacturing, assembly, and adjustment of this device Each of them has a drawback that requires reliability and is very expensive.

Further, in this contact type measuring device, the contact probe has a structure in which a needle-like thin shaft rod is formed and a spherical contactor is formed at the tip thereof. Since it is designed to withstand the impact applied during contact, the probe tip cannot be inserted into the minute gap such as the slit of the die used for extrusion molding described above, and the surface inside this slit There is a drawback that it is impossible to measure the shape.

Further, in the latter case of the non-contact type such as the image processing device, the accuracy is determined by the resolution of the image processing device, but the size of the entire device becomes large and the cost becomes high. Since only the surface shape of the object to be measured is measured, there is a drawback that it is impossible to measure the surface shape in the slit.

Therefore, in order to solve the above problems, the present invention provides a three-dimensional measuring method capable of accurately measuring the shape of an object to be measured having a slit, which is a minute gap, with a simple structure. The purpose is to provide the device.

[0009]

Means for achieving the above object will be described below with reference to the drawings corresponding to the embodiments. The three-dimensional measuring method of the present invention includes a reference horizontal plane WH and a vertical plane WV perpendicular to the horizontal plane WH.
In the three-dimensional measuring method for measuring the shape of the object to be measured W, which includes the slit S composed of, the object to be measured W is fixed to the table 9 that moves horizontally with respect to the base 2. At least three points of the object to be measured W that are not on the same straight line in the horizontal plane WH are directly moved horizontally in the table 9 and in a direction orthogonal to the table 9 with the tip of the horizontal plane probe 31 being in contact. The horizontal plane probe 31 is moved horizontally on the stage 16 to measure the three-dimensional vertical, horizontal, and height coordinates with respect to the base 2 at each point position, and the base of the horizontal plane WH is measured. The correction value is calculated by obtaining the levelness with respect to the table 2, and then, with the horizontal plane probe 31 in contact with the horizontal plane WH of the measured object W, the table 9 or the stage 16 alone Horizontal WH Is linearly moved in the horizontal direction to measure the linearity of the horizontal plane WH, and the head 21 is movable in the vertical and vertical directions respectively orthogonal to the moving directions of the table 9 and the stage 16. , The vertical plane probe 26 is inserted into the slit S, and one of the facing vertical planes WV of the slit S is in contact with the vertical plane WV, and the vertical plane WV is placed on an arbitrary straight line of the vertical plane WV. By linearly moving while raising in the vertical direction, the linearity of each vertical surface WV is sequentially measured, and the vertical surface probe 26 is again inserted into the slit S,
With the probe 26 in contact with the one vertical surface WVa or the other vertical surface WVb in the slit S, the table 9 or the stage 16 alone is used to horizontally extend on a straight line of the vertical surface WV. By linearly moving, the straightness of the vertical surface WV is measured, and the respective surfaces WH, W
It is characterized in that the measured value of each linearity of V is corrected by the correction value to obtain the shape of the object to be measured W.

Further, the three-dimensional measuring apparatus 1 of the present invention includes a reference horizontal plane WH and a slit S having a vertical plane WV perpendicular to the horizontal plane WH. In the three-dimensional measuring device 1 for measuring the shape,
A table 9 which is horizontally movable linearly with respect to a base 2 installed via an anti-vibration base 3 and holds the object to be measured W, and the base 2 is crossed over the table 9. A stage 16 supported by an upright gate bridge 13 and arranged above the table 9 and linearly movable in a horizontal direction orthogonal to the moving direction of the table 9;
6, a head 21 which is linearly movable in a vertical up and down direction orthogonal to the moving direction of the stage 16 and orthogonal to the moving direction of the table 9, and the head 21.
A vertical surface probe 26 that extends downwardly and is fixedly installed on the bottom portion 21a of the vertical surface 21a and that measures the linearity in the vertical and horizontal directions of the vertical surface WV in the slit S of the object to be measured W; 26 is provided on the bottom portion 21a of the head 21 in parallel with the reference numeral 26, and is slidably provided in the same direction parallel to the moving direction of the head 21, and is held on the table 9 on the horizontal plane of the object to be measured W. And a horizontal plane probe 31 for measuring the horizontality of the WH with respect to the base 2 and the straightness of the horizontal plane WH.

In the vertical plane probe 26, the shape of the feeler 27 at the tip is such that the vertical plane WV of the object W to be measured is large.
It is also possible to have a configuration in which only one side surface 29 that comes into contact with is made into a convex curved surface shape.

[0012]

The object to be measured W having the horizontal plane WH and the slit S composed of the vertical plane WV that is perpendicular to the horizontal plane WH is fixed to the table 9 that moves linearly with respect to the base 2. Then, with the tip (39) of the probe 31 for the horizontal plane in contact with at least three points which are not on the same straight line on the horizontal plane WH of the object to be measured W, the table 9 and the direction orthogonal to the table 9. The horizontal plane probe 31 is moved horizontally on the stage 16 that moves horizontally, and the vertical position with the base 2 at each point position as a reference,
The horizontal and vertical three-dimensional coordinates are measured, and the horizontal plane WH is measured.
Then, the correction value is calculated by obtaining the horizontal degree of the above with respect to the base 2.

Next, with the horizontal plane probe 31 in contact with the horizontal surface WH of the object to be measured W, the table 9 or the stage 16 alone is moved linearly to horizontally move an arbitrary straight line on the horizontal surface WH. The horizontal displacement of the contact 38 of the probe 31 for horizontal surfaces is measured, and the linearity of the horizontal surface WH of the measured object W is measured.

Next, the vertical plane probe 26 is inserted into the slit S of the object to be measured W by the head 21 which is movable in the vertical up and down directions orthogonal to the moving directions of the table 9 and the stage 16. , One of the vertical surfaces WV facing each other of the slit S is moved linearly while vertically rising on an arbitrary straight line of the vertical surface WV with the probe 26 in contact with the vertical surfaces WV. The vertical straightness of is measured sequentially.

Next, the vertical plane probe 26 is again inserted into the slit S of the object to be measured W, and one or the other vertical plane WV of the slit S is brought into contact with the table 26 while the probe 26 is in contact with the table. 9 or the stage 16 alone is moved linearly in the horizontal direction on a straight line of the vertical surface WV to measure the horizontal straightness of the vertical surface WV.

Then, the measured values of the linearity of each of the surfaces WH and WV are corrected with the correction values to obtain the shape of the object to be measured W.

[0017]

1 is a schematic perspective view showing an embodiment of a three-dimensional measuring apparatus according to the present invention, FIG. 2 is a side sectional view of a table according to the same embodiment, and FIG. 3 is according to the same embodiment. FIG. 4 is a front view of the stage and the head, and FIG. 4 is a front view of the probe according to the same embodiment.

As shown in FIG. 1, the three-dimensional measuring apparatus 1 of the present invention is roughly composed of a base 2, a table 9, a stage 16, a head 21, and a sensor section 25.

First, the base 2 is installed on the anti-vibration base 3 so that the vibration from the floor surface is not transmitted. As shown in FIG. 2, a pair of straight guide rails 4 that are parallel to each other and a ball screw 6 that is disposed in parallel with each guide rail 4 via a bearing 5 are disposed on the upper surface of the base 2. Has been done.

Each of the guide rails 4 is provided with a slidable guide slider 7, and a slide block 8 is screwed onto the ball screw 6. Then, the table 9 is mounted on the base 2 by the rotation driving motor 10 which is arranged so as to extend over the respective guide sliders 7 and the slide block 8 and is connected to the ball screw 6. On the other hand, it is movable in the horizontal front-back direction (Y direction in the figure).

A work table 11 is provided on the upper surface of the table 9. This work table 11 is
The upper surface is finished to be smooth, and the object to be measured W to be measured by the measuring device 1 is placed. The upper surface of the base 2 located at both ends of the table 9 in the moving direction is covered with a bellows 12 for dust protection.

Next, on the base 2, as shown in FIG.
A gate bridge 13 is vertically erected and fixed so as to extend above the table 9 in a direction orthogonal to the moving direction of the table 9.

The gate-shaped bridge 13 has a pair of straight guide rails 14 having the same structure as the table 9 and parallel to each other, as shown in FIG.
Ball screw 15 arranged in parallel with each guide rail 14.
Are provided so as to be horizontal and orthogonal to the moving direction of the table 9.

The stage 16 is mounted on a plate through a guide slider (not shown) slidably provided on each guide rail 14 and a slider block (not shown) screwed to the ball screw 15. The surface 16 is provided to be vertical, that is, the stage 16 can be moved in the left-right direction (X direction in the drawing) horizontal to the base 2 by the rotation driving motor 17 connected to the ball screw 15. Has become.

As shown in FIG. 3, a pair of straight guide rails 18 having the same structure as the table 9 and the stage 16 and parallel to each other are provided on the plate surface on the vertical front side of the movable stage 16. So that the ball screws 19 arranged in parallel with the respective guide rails 18 are orthogonal to the respective moving directions of the table 9 and the stage 16,
The stage 16 is provided so as to be perpendicular to the plate surface.

The head 21 is constituted by a guide slider (not shown) slidably provided on each guide rail 18 and a slider block (not shown) screwed to the ball screw 19. The substrate 20 is provided with its plate surface vertical, that is, the substrate 20 is vertically moved (Z direction in the drawing) perpendicular to the substrate 20 by the rotation driving motor 22 connected to the ball screw 19.
It is freely movable.

On the movement loci of the stage 16 and the head substrate 20, dustproof bellows 23 and 24 are provided, respectively.

As shown in FIGS. 1 and 4, a rectangular head 21 is provided on the substrate 20, and the bottom portion 2 is provided.
The sensor unit 25 is arranged so as to extend to the la 1a.

This sensor unit 25 is used for the vertical plane probe 2.
6 and a horizontal plane probe 31, each of which is arranged in parallel as shown in FIG.
It is provided in a hanging shape on 1a.

As shown in FIG. 4, the vertical surface probe 26 is fixed so that the feeler 27 provided at the tip extends downward from the bottom portion 21a of the head 21.

In the probe 26 for the vertical surface, the base portion 27a of the feeler 27 at the tip is pivotally supported by the probe main body 28, and the tip side of the feeler 27 is swingable, and the electrostatic capacitance which changes due to this swing is set. The probe is a lever type probe that outputs an analog signal by a frequency modulation method, and detects the change in the swing angle of the feeler 27 to measure the shape of the object to be measured W. In the case of the present embodiment. The shaft supporting portion is biased by an elastic member or the like so that the tip end side of the feeler 27 is slightly inclined with respect to the pivotally supported base 27a, and the contact surface 29 of the feeler 27 is biased by the biasing force of this elastic member. , Is in contact with the surface to be measured.

The feeler 27 has a tip portion 27b.
However, the needle 30 is made of a needle-shaped super-hard rod having a small diameter, and the contact 30 is provided at the leading end. As shown in FIGS. 5 (a) and 5 (b), the contactor 30 is formed by notching three vertical surfaces adjacent to each other on a sphere (C in FIG. 5 (a) and C in FIG. 5 (b)). The cross-sectional shape is formed into a substantially semicylindrical shape, that is, only the contact surface 29 that contacts the measurement surface of the object to be measured W has a convex curved surface shape.

The vertical plane probe 26 has a rotation drive mechanism (not shown) at the base end thereof, and the feeler tip 2
The convex spherical contact surface 29 of 7b can be controlled to face a desired direction.

Next, the horizontal plane probe 31, as shown in FIG.
It is provided in.

In the horizontal plane probe 31, the probe body 32 is fixed to the straight slide rail 34 via a fixture (not shown), and the substrate 20 of the head 21 is provided.
Is slidably provided on a guide block 35 disposed on the bottom 21a of the head 21. The sliding direction is the same direction parallel to the moving direction of the head 21, that is, the vertical direction. On the other hand, the probe 31 is provided so as to be vertically movable.

As shown in FIG. 4, a bracket 36 protruding horizontally is provided on the slide rail 34.
Is provided, and the fastening screw 3 is provided through a vertically elongated guide slit (not shown) formed on a side portion of the head 21.
7 is screwed, and the vertical position of the horizontal plane probe 31 with respect to the head 21 can be fixed.

The tip 3 of the horizontal plane probe 31
In the contactor 38 of 1a, the tip surface 39 serving as the bottom surface is formed in a spherical shape, and the contactor 38 is formed by the probe main body 3
2 is made up of a plunger type probe that can be moved back and forth within a predetermined range in the longitudinal direction, and the capacitance that changes due to this forward and backward movement is output as an analog signal by a frequency modulation method. This is to detect and measure an advance / retreat distance (displacement) within a predetermined range.

The horizontal and vertical probes 26 and 31 are connected to a control unit (not shown) from the base end via a cable 40, and the numerical values of the respective detected values and the displacements represented based on these numerical values are provided. Graphic figures are displayed on the display.

Although not shown in the drawings, a rotary position sensor such as a rotary encoder provided in each of the motors 10, 17, and 22 as a drive source is provided in each of the above-described table 9, stage 16 and head 21. Then, it can be converted into each position coordinate, and three-dimensional coordinates of vertical, horizontal, and height with the base 2 as a reference are measured, and each part 9, 1
A control unit for driving and controlling 6, 6 and 21, a console K (see FIG. 1) for instructing these drives from the outside, measured three-dimensional coordinates and each measurement value obtained by each probe 26, 31 are stored. Storage means and the like are connected.

Next, a method of measuring the object to be measured W by the three-dimensional measuring apparatus 1 having the above-mentioned configuration will be described by following each step procedure.

The object to be measured W to be measured by the measuring apparatus 1 of the present invention is for extrusion molding as shown in FIG. 6 (a) for molding an aluminum mold material such as a building material as described in the prior art. 6B, a horizontal plane WH and a vertical plane W perpendicular to the horizontal plane WH.
It has a shape including a slit S serving as a mouthpiece composed of V.

Then, the mold W which is the object to be measured is placed on the work table 11 of the measuring apparatus 1.

The front-rear direction which is the moving direction of the table 9 is the Y-axis direction, the left-right direction which is the moving direction of the stage 16 is the X-axis direction, and the vertical direction which is the moving direction of the head 21 is the Z-direction.
The axial direction is defined as + Y direction in the Y-axis direction, -Y direction in the backward direction, + X direction in the left direction in the X-axis direction, -X direction in the right direction, + Z direction in the upward direction in the Z-axis direction.
The downward direction will be described as the -Z direction (see FIGS. 1, 2, and 3).

(1) Measurement of Horizontalness of Horizontal Surface WH of Mold W (See FIG. 7) First, the motor 10 on the base 2 is driven to move the table 9 in the horizontal Y direction to move it on the table 9. The fixed die W is attached to the sensor portion 2 extending from the head bottom portion 21a.
Move it to a position just below 5.

At this time, in the sensor section 25, the horizontal plane probe 31 is moved by the slide rail 34 so as to be positioned immediately before the horizontal plane WH (arrow line in FIG. 4), and the fastening screw 3
Then, the contactor tip surface 39 of the horizontal plane probe 31 is extended below the contactor 30 of the vertical plane probe 26 (one-dot chain line in FIG. 4).

Next, the table 9 and the stage 16 are driven to move in the Y-axis direction and the X-axis direction with respect to the base 2, and the tip terminal 38 of the horizontal plane probe 31 is moved to the mold W.
The measurement is stopped right above the starting point position of the horizontal plane WH on which the measurement is performed (position A in FIG. 7A). The positioning of the probe 31 and the mold W by the table 9 and the stage 16 may be performed by driving the motors 10 and 17, or may be manually performed to perform the positioning. .

Next, the head 21 is moved in the downward (-Z) direction to bring the contact tip end surface 39 of the horizontal plane probe 31 into contact with the horizontal plane WH of the mold W and to slightly retract the contact 38. Stop, and the vertical, horizontal, and height positions based on the base 2 at this position, that is, the three-dimensional coordinate values in the X-, Y-, and Z-axis directions are displayed on the table 9, stage 16, and head 21. While measuring with each sensor installed in
The displacement value, which is the value in the height direction of the detection value of the probe 31, is set to 0.
Is corrected to (position B in FIG. 7A). At this time, the displacement value which is the detection value of the horizontal plane probe 31 is displayed on the display as shown in FIG. 7B by the control unit, and the expansion / contraction state of the contact 38 is range-displayed. .

The head 21 descends when the contact 3
8 is a position 1 to 2 mm above the horizontal plane WH of the mold W (see FIG. 7).
It may be moved manually until it reaches the (a) middle B ′ position), or the procedure may be such that the contacts 38 are brought into contact with and retracted from this position by driving by the motors 10 and 22.

Next, the table 9 and / or the stage 16 is manually operated or driven by the motors 10 and 17.
Is moved, that is, moved in a horizontal one-dimensional or two-dimensional direction, and the three-dimensional coordinate value of the position of the second point (point C in FIG. 7A) and the displacement value are measured. At this time, the head 21 that moves in the Z-axis direction is not moved and the contact 38
Slidably move in a state of being in contact with the horizontal surface of the mold W,
Measure the stopped position.

Then, again, manually or with the motors 10, 17
Is driven to move the table 9 and / or the stage 16, that is, in a horizontal one-dimensional or two-dimensional direction to move the third point position (point D in FIG. 7A).
The three-dimensional coordinate value and the displacement value are measured. Also at this time, similarly to the above, the head 21 that moves in the Z-axis direction is not moved, and the contactor 38 is slidably moved in a state of being in contact with the horizontal surface WH of the mold W, and the stopped position is measured.

Further, as shown in FIG. 7 (b), the starting point, the second point, and the third point are not on the same straight line, and the fourth and subsequent points may be measured. Measure so that they are not on the same straight line. In addition,
The number of measurement points is 3 or more and 10 or less.

Then, the horizontality of the horizontal plane WH of the mold W fixed on the table 9 with respect to the base 2 is calculated from the above measured values, and this is used as a correction value. This correction value is calculated and stored as an angle. After the measurement, the probe 31 is moved up by the movement of the head and moved to a position substantially above the starting point. Numerical values such as measurement values and correction values are displayed on the display and measurement points are graphically displayed.

(2) Measurement of the linearity of the horizontal surface WH of the mold W (see FIG. 8) Next, the horizontal plane probe 31 is again attached to the horizontal surface W of the mold W.
It is moved so as to come into contact with H. Next, the measurement distance, measurement pitch, and measurement direction of the horizontal plane probe 31 are set. This setting is performed by an input means such as a keyboard, the measurement distance is the length on the horizontal plane WH to be measured, and the measurement direction is the Y-axis direction or the X-axis direction with respect to the base 2 and is + or − direction. The probe 31 is selected so as to move in a straight line in any one of the types of directions, that is, on the horizontal plane WH of the mold W. In this embodiment, + X
An example of setting the direction will be described.

Then, the contactor 38 is slightly retracted, and the contactor 38 is stopped at the displacement position where the expanded / contracted state of the contactor 38 is approximately 0 in the range display (point A in FIG. 8A). The three-dimensional coordinate value of this position is measured, and the displacement value of this detected value is corrected to zero.

Next, the stage 16 is moved in the + X direction without moving the head 21 according to the measurement distance, the measurement pitch, and the measurement direction which are input and set from the outside, and the horizontal plane probe 31 is aligned with the desired distance by a straight line. It is moved like a circle and the three-dimensional coordinate value and the displacement value between the distances are measured. Each measured value is measured at a predetermined pitch between moving distances, and the displacement value is the linearity of the horizontal plane WH of the mold W, in other words, the displacement amount in the Z-axis direction with respect to the X-axis direction.

The measured values are shown as numerical values and figures in FIG.
As shown in (b), it is displayed on the display and these measurement results are stored.

After the measurement, the head 21 moves up (+ Z direction).
By moving, the horizontal plane probe 31 is lifted from the mold W (points B and C in FIG. 8A).

(3) Measurement of linearity of the vertical surface WV in the slit S of the mold W (a) Measurement of linearity in the vertical direction on the vertical surface WV (see FIG. 9) Next, the horizontal plane WH of the mold W is measured. The horizontal plane probe 31 to be measured is moved upward by the slide rail 34 so as to be retracted from the extended state and fixed by the fastening screw 37 at the uppermost position, and only the vertical plane probe 26 is fixed to the bottom portion 21a of the head 21. It is set so as to be in a drooping state (see FIG. 4).

In the present embodiment, the slit S of the mold W to be measured is fixed on the table 9 with the Y-axis direction with respect to the base 2 as the longitudinal direction and the X-axis direction as the width direction. To be done.

Next, the table 9 and the stage 16 are respectively moved manually or by driving by the motors 10 and 17, and the vertical surface probe 26 is positioned above the slit S of the mold W (see FIG. 9A). Head 2 together with point A)
1 is manually moved or driven by the motor 22 in the lower (−Z) direction, and the contact 30 of the vertical surface probe 26 is inserted into the slit S (point B in FIG. 9A). At this time,
The height position of the contact 30 is set approximately at the middle of the vertical surfaces WV facing each other, which are slightly below the horizontal surface WH of the mold W.

Next, the contact 30 of the vertical plane probe 26.
The stage 16 is moved in the + X direction so as to come into contact with one vertical surface WVa of the mold W. Next, the direction of the contact surface 29 of the contact 30 of this vertical surface probe 26,
A measurement interval width (measurement pitch) by the probe 26 is set. This setting is performed by an input means such as a keyboard.

Next, the stage 16 moves, the contact 30 of the vertical surface probe 26 is brought into contact with the vertical surface WVa of the mold W, and the feeler 27 becomes substantially vertical and substantially straight to the probe main body 28. Is moved to the X-axis direction until the position becomes, and is stopped at a position where the range display indicates substantially 0 (point C in FIG. 9A).

At this time, the feeler 27 is in a state of being pressed and biased in the direction of the vertical surface WV about the shaft supporting portion of the base portion 27a. Further, the three-dimensional coordinate value of the stopped position (point C) at this time is measured, and the displacement value of the probe 26 is corrected to zero.

Next, with the contact 30 in contact with the vertical surface WV of the mold W, the head 21 descends (-Z direction), and the displacement value of the contact 30 greatly changes (see FIG. 9 (a). )
The middle D point) is set as the measurement start point, and the three-dimensional coordinate value at this position is measured. The point where this displacement value changes greatly is the lowermost end of the vertical surface WV.

Next, without moving the table 9 and the stage 16, only the head 21 is moved upward, and the vertical plane probe 26 is moved in a vertical straight line at every set pitch to perform measurement. The measured values are the three-dimensional coordinate value for each pitch and the displacement amount in the X-axis direction with respect to the Z-axis,
This displacement amount is a value of linearity on a straight line perpendicular to the vertical surface WV with respect to the stop position (point C) corrected to 0,
Measurement is performed. Then, the measurement ends when the contactor 30 of the vertical surface probe 26 crosses the upper edge of the vertical surface WV and the feeler 27 changes from the substantially vertical state to the inclined state (point E in FIG. 9A).

The measured values are shown in FIG. 9 as numerical values and figures.
As shown in (b), it is displayed on the display and these measurement results are stored.

After the measurement, the head 21 moves upward,
The vertical surface probe 26 is lifted from the mold W (FIG. 9).
(A) Medium F point).

Next, the vertical plane probe 26 located above the horizontal plane WH of the mold W (point F in FIG. 10A) is
1 by a rotary drive mechanism (not shown) provided at the base end
Rotate horizontally by 80 ° and rotate the contact surface 29 of the contact 30 in the opposite direction,
That is, in the present embodiment, it faces in the -X direction. At this time, since the feeler 27 of the probe 26 is inclined with respect to the main body 28, the contact 30 is moved to point G in the figure by this rotation.

Next, the head 21 descends again, and the contact 30 of the probe 26 is moved to the vertical surface W facing the slit S.
At approximately the middle of V, the mold W is inserted into the slit S at a position slightly below the horizontal plane WH and stopped (point H in FIG. 10A).

Next, the contact 30 of the vertical plane probe 26.
-X so that the stage 16 is brought into contact with the one vertical surface WVa of the mold W and the other vertical surface WVb opposite thereto.
Move in the direction.

Next, the stage 16 moves and the contact 30 of the vertical surface probe 26 is moved to the other vertical surface WV of the mold W.
While being brought into contact with b, the feeler 27 is moved in the -X direction to a position where it is substantially vertical and is substantially straight to the probe main body 28, and is stopped at a position where the range display indicates substantially 0 (in FIG. 10 (a)). Point I).

At this time, the feeler 27 is in a state of being pressed and biased in the direction of the vertical surface WVb around the shaft supporting portion of the base. At this time, the stopped position (I
3D coordinate value of the point) and the probe 26
The displacement value of is corrected to 0.

Next, the contact 30 is the vertical surface WVb of the mold W.
Head 21 descends in contact with
The point where the displacement value due to 7 changes significantly (J in Fig. 10 (a))
Point) is set as the measurement start point, and the three-dimensional coordinate value at this position is measured. The point where this displacement value changes greatly is the lowermost end of the vertical surface WVb.

Next, without moving the table 9 and the stage 16, only the head 21 is moved upward, and the vertical plane probe 26 is moved in a vertical straight line at every set pitch to perform measurement.

The measured value is the displacement amount in the X-axis direction with respect to the three-dimensional coordinate axis and the Z-axis for each pitch, and this displacement amount is corrected to 0 and the mold W for the stop position (point I) is corrected.
Is the value of the linearity on the vertical straight line of the vertical surface WVb of
Measurement is performed. Then, the contact 30 of the vertical surface probe 26 crosses over the upper edge of the vertical surface WV, and the feeler 27 changes from the substantially vertical state to the inclined state (point K in FIG. 10A).
The measurement ends with.

The measured values are shown as numerical values and figures in FIG.
The display is displayed as shown in 0 (b), and these measurement results are stored.

After the measurement, the head 21 moves upward,
The vertical surface probe 26 is lifted from the mold W (FIG. 10).
(A) L point in the middle).

(B) Measurement of horizontal straightness on the vertical surface WV (see FIG. 11) Next, the table 9 and the stage 16 are moved manually or by driving with the motors 10 and 17 to move the probe 2 for the vertical surface.
6 is located above the slit S of the mold W (see FIG. 11).
Along with (a) point A), the head 21 is moved in the lower (−Z) direction manually or by driving by the motor 22 to bring the contact 30 of the vertical surface probe 26 to a desired measurement depth in the slit S. Insert (point B in FIG. 11A). The orientation of the contact surface 29 of the contact 30 is set so as to face the initial state at the time of measuring the linearity of the vertical surface WV in the vertical direction, that is, to face one vertical surface WVa of the slit S (+ X direction). Is set.

Next, the direction of the contact surface 29 of the contact 30 of the vertical surface probe 26, the measurement distance by the probe 26, the moving direction of the probe, and the measurement pitch width are set. This setting is performed by an input means such as a keyboard. In the case of this embodiment, the moving direction of the probe 26 is the −Y direction with respect to the base 2.

Next, the stage 16 moves to bring the contact 30 of the vertical surface probe 26 into contact with the vertical surface WV of the mold W, and the feeler 27 becomes substantially vertical and is substantially straight to the probe main body 28. Is moved to the + X direction until the position becomes, and stopped at a position where the range display indicates substantially 0, and this point is set as a starting point (point C in FIG. 11A).

At this time, the feeler 27 is pressed and biased in the direction of the vertical surface WV about the shaft supporting portion of the base portion 27a. Further, the three-dimensional coordinate value of the stopped position (point C) at this time is measured, and the displacement value of the probe 26 is corrected to zero.

Next, with the contact 30 in contact with the vertical surface WV of the mold W, only the table 9 is moved without moving the head 21 and the stage 16, and the vertical surface is used for each set pitch. Make the probe 26 parallel and straight-
Measurement is performed by moving in the Y direction.

The measured values are the three-dimensional coordinate values for each pitch and the amount of displacement in the X-axis direction with respect to the Y-axis, and this amount of displacement is perpendicular to the starting point (point C) corrected to 0. The value is taken as the linearity value on the horizontal straight line of the surface WV, and the measurement is performed. Then, when the contact 30 of the vertical surface probe 26 reaches the set measurement distance (point D in FIG. 11B).
Then, the measurement is completed.

The measured values are shown as numerical values and figures in FIG.
Displayed as shown in FIG. 1 (c), and these measurement results are stored.

After the measurement, the stage 16 moves in the -X direction to disengage the vertical surface probe 26 from the vertical surface WV of the mold W (point E in FIG. 11B), and the head 21.
Moves up and up from within the slit S.

(4) Correction of Each Measured Value Next, the measured value of each linearity obtained by the procedure of (2), (3) (a), (3) and (b) described above is converted into the above (1). ) Is corrected by the correction value obtained by the procedure of (1), and the linearity on each surface of the actual mold W excluding the error of the fixed state of the mold W fixed to the base 2 is calculated. calculate.

Then, the shape or numerical value is displayed on the display screen, and the measurement result of the three-dimensional shape is obtained.

Therefore, in the three-dimensional measuring method and the apparatus 1 thereof configured as described above, the probe 26 is used when measuring the shape of the mold W as the object to be measured in which the slit S which is a minute gap is formed. , 31 on which the heads 31 are arranged,
Each of the stage 16 provided with the head 21 and the table 9 provided with the stage 16 is linearly moved individually with respect to the base 2, that is, when measurement is performed by the probes 26 and 31, the primary Originally probe 26,3
1 is moved linearly for measurement, so this probe 26,
It is not affected by anything other than the one drive part that moves 31
Since the measurement can be performed while maintaining the accuracy of the probes 26 and 31, accurate results can be obtained.

Further, since the respective drive parts are not driven simultaneously, it is sufficient to make adjustments during manufacture and assembly or during maintenance so as to maintain accuracy in each part, so that the work is simple and the structure is simple. Therefore, the entire device can be manufactured at low cost.

Further, unlike the conventional measuring method, since an arbitrary straight line of the surface (WH, WV) to be measured is continuously measured, no error occurs when the probe is moved, and the reference measurement target object is not generated. Since the horizontality of the horizontal plane WH is measured and corrected to calculate the shape of the measured object W, it is possible to obtain a more reliable measurement result.

Further, the feeler 2 of the vertical plane probe 26
The shape of the tip portion 30 of 7 is a surface 29 that contacts as compared with the conventional case.
Since only the convex spherical surface is used and the measuring method is such that a large impact is not applied at the time of contact, it is possible to make the shape small, so that the slit S of the die W for extrusion molding, which is a minute gap, can be formed. It is possible to sufficiently deal with this, and thereby, it becomes possible to measure the surface shape in the slit S,
Moreover, since the measurement is performed by contact, the reliability of the measured value is improved.

In the embodiment described above, the fixed state of the mold W, which is the object to be measured, on the table 9 is changed to the slit S.
The longitudinal direction of the slit S is the Y-axis direction, the width direction is the X-axis direction, and the measurement procedure of each surface of the slit S in this state has been described, but the longitudinal direction and the width direction of the slit S are not limited to this state, When the longitudinal direction is the X-axis direction and the width direction is the Y-axis direction, the moving directions of the table 9 and the stage 16 are changed according to the slit S in the measurement procedure of the horizontal plane and the vertical plane.

When the object to be measured such as the mold W is obtained in a more strict three-dimensional shape, it can be obtained by performing the above-mentioned procedure in all directions.

[0094]

As described above, in the three-dimensional measuring method and the apparatus therefor according to the present invention, a head on which a probe is arranged when measuring an object to be measured in which a slit that is a minute gap is formed, Each of the stage provided with the head and the table provided with the stage linearly moves individually with respect to the base, that is, when the measurement is performed by the probe, the probe is linearly moved one-dimensionally. Since the measurement is performed by using the above-mentioned method, it is possible to obtain an accurate measurement result because the measurement can be performed while maintaining the accuracy of the probe without being affected by an error other than one driving portion that moves the probe. .

Further, since the table, the stage and the head are not driven at the same time, the adjustment at the time of manufacturing and assembling or the maintenance may be adjusted so as to maintain accuracy in each part, so that the assembling work and the adjusting work can be easily performed. Since this makes it possible to make the structure of each part a simple structure that is precise in each linear movement, there is an effect that the device as a whole can be manufactured at low cost.

Further, unlike the conventional measurement method, since an arbitrary straight line on the surface to be measured is continuously measured, an error of the three-dimensional coordinate value does not occur when the probe is moved by the table, the stage, the head, etc. Further, the measurement is performed with the horizontal plane of the measurement object as a reference, the inclination of the horizontal plane is obtained, and other measurement values are corrected to calculate the shape of the measured object, so that a more reliable measurement result can be obtained. There is an effect.

Further, the shape of the feeler tip of the vertical surface probe is a measuring method in which only the contacting surface has a convex curved surface as compared with the conventional one, and a large impact is not applied when contacting the object to be measured. Since it can be made into a small shape, it can be sufficiently applied even to a slit of a die for extrusion molding, which is a minute gap, and this makes it possible to measure the surface shape inside this slit and to make contact. Since the measurement is performed by, there is an effect that the reliability of the measured value is improved.

[Brief description of drawings]

FIG. 1 is a schematic perspective view showing an embodiment of a three-dimensional measuring apparatus according to the present invention.

FIG. 2 is a side sectional view of the table according to the same embodiment.

FIG. 3 is a front view of a stage and a head according to the same embodiment.

FIG. 4 is a front view of a vertical plane probe and a horizontal plane probe according to the same embodiment.

5A is a side view showing the tip shape of the vertical plane probe according to the embodiment, and FIG.

FIG. 6A is a schematic perspective view of an object to be measured (mold) measured by the three-dimensional measuring apparatus according to the present invention. FIG.

FIG. 7 (a) is a schematic side sectional view showing the procedure for measuring the horizontalness of the horizontal plane of the object to be measured by the three-dimensional measuring method according to the present invention.

FIG. 8 (a) is a schematic side sectional view showing the procedure for measuring the linearity of the horizontal plane of the object to be measured by the same measurement method. (B) Diagram of the same display screen.

FIG. 9 (a) is a schematic side sectional view showing a procedure for measuring the linearity in the vertical direction of the vertical surface in the slit of the object to be measured by the same measuring method.

FIG. 10 (a) is a schematic side sectional view showing a procedure of measuring the linearity in the vertical direction of the vertical surface in the slit of the object to be measured by the same measuring method.

FIG. 11 (a) is a schematic side sectional view showing a procedure for measuring horizontal straightness of a vertical surface in a slit of an object to be measured by the same measuring method, (b) same plan view, and (c) same display screen diagram.

[Explanation of symbols]

 1 ... Three-dimensional measuring device 2 ... Base 3 ... Anti-vibration stand 9 ... Table 13 ... Gate bridge 16 ... Stage 21 ... Head 21a ... Bottom 26 ... Vertical surface probe 31 ... Horizontal surface probe S ... Slit W ... Measured Object (mold) WH ... Horizontal surface WV ... Vertical surface

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Toshihiko Iwakiri 1-9-3 Kamatahonmachi, Ota-ku, Tokyo Incorporated Niigata Iron Works Engineering Center

Claims (3)

[Claims] 1. A three-dimensional measuring method for measuring the shape of an object to be measured, comprising: a reference horizontal plane; and a slit composed of a vertical plane perpendicular to the horizontal plane, wherein The object to be measured is fixed to a table that moves directly horizontally, and at least three points which are not on the same straight line on the horizontal surface of the object to be measured are in contact with the tip of the probe for the horizontal surface, and the table and the table. The horizontal plane probe is moved horizontally on a stage that moves horizontally in a direction orthogonal to, and three-dimensional coordinates of vertical, horizontal, and height with respect to the base at each point position are measured. Then, the correction value is calculated by obtaining the horizontality of the horizontal plane with respect to the base, and then, with the horizontal plane probe in contact with the horizontal plane of the object to be measured, only with the table or the stage. The above By linearly moving in a horizontal direction on an arbitrary straight line on the plane, the linearity of the horizontal plane is measured, and by the head movable vertically in the vertical direction orthogonal to the moving direction of the table and the stage, Inserting a vertical surface probe into the slit, and moving one of the opposite vertical surfaces of the slit in contact with the probe while moving vertically on any straight line of the vertical surface Then, the linearity of each vertical surface is sequentially measured, and again, the vertical surface probe is inserted into the slit, and the one vertical surface or the other vertical surface in the slit is replaced by the probe. In the contact state, the table or the stage alone is horizontally moved on a straight line of the vertical surface to measure the linearity of the vertical surface, and the linearity of each surface is measured. To correct the value by the correction value,
A three-dimensional measuring method, characterized in that the shape of the object to be measured is obtained. 2. A three-dimensional measuring device for measuring the shape of an object to be measured, which comprises a reference horizontal plane and a slit formed by a vertical plane perpendicular to the horizontal plane Is supported horizontally by a table that holds the object to be measured, and a gate bridge that is erected upright on the base across the table. A stage disposed above the table and linearly movable in a horizontal direction orthogonal to the moving direction of the table; and a stage provided on the stage that is orthogonal to the moving direction of the stage and moves the table. A head that is linearly movable in the vertical up and down direction orthogonal to the direction, and is fixed by extending downwardly at the bottom of the head and measuring the straightness in the vertical and horizontal directions of the vertical surface in the slit of the measured object. You A probe for a vertical surface and a probe for a vertical surface which are provided in parallel with the bottom portion of the head and are slidably provided in the same direction parallel to the moving direction of the head and are held on the table. A three-dimensional measuring device comprising: a horizontal plane probe that measures the horizontality of a measured object with respect to the base of the horizontal plane and the straightness of the horizontal plane. 3. The probe for a vertical surface according to claim 2, wherein the feeler at the tip has a convex curved surface shape only on one side in contact with the vertical surface of the object to be measured.
The three-dimensional measuring device described.