JPH0979835A - Manual operation type three-dimensional measuring machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manual operation type three-dimensional measuring machine of which construction can be simplified, and dispersion of measurement accuracy depending on an operator can be reduced. SOLUTION: A probe adapter 6 detachably holding a probe 7 is fitted to the lower end of a Z-axis spindle 5, and a slide ring 15 is provided on the outer circumference of the probe adapter 6 so as to be slidable in the optional direction in the XY plane and in the direction of Z-axis. Compression coil springs 16, 17 are interposed between the inner circumferential face of the slide ring 15 and the trunk part 11 of the probe adapter 6, and between the upper and lower end faces of the slide ring 15 and the flange parts 12, 13 of the probe adapter 6.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manually operated coordinate measuring machine. Specifically, the probe is configured to be movable in the three axis directions of the X axis, the Y axis, and the Z axis which are orthogonal to each other, and the Z axis member to which the probe is attached is manually operated to move in the three axis directions. The present invention relates to a manually operated three-dimensional measuring machine that obtains the size and shape of an object to be measured from the amount of displacement of each axis when the object is in contact with the object.

[0002]

BACKGROUND ART A probe is configured to be movable in three axial directions of an X axis, a Y axis, and a Z axis which are orthogonal to each other, and a tip end (lower end) of a Z axis member to which the probe is attached is manually measured by a measurer. There is known a manually operated three-dimensional measuring machine which is manually operated and moved in the three-axis directions to obtain the size and shape of the measured object from the displacement of each axis when the probe contacts the measured object. There is.

Such a manual operation type three-dimensional measuring machine has a structure as compared with an automatic drive type three-dimensional measuring machine in which a drive mechanism is provided for each axis to automatically move in each axis direction. The advantage is that the probe can be moved easily in any direction and position easily and manually, but on the other hand, since the measurer moves the tip of the Z-axis member by hand, the Z-axis member can be moved. There is a problem in that a force is applied to the tip of the Z-axis, which causes the Z-axis member and other X- and Y-axis components to bend. In addition, since the velocity (acceleration) of the Z-axis member when moving the Z-axis member varies depending on the measurer, the measurer does not perform measurement (when the probe contacts the object to be measured).
In addition, there is a problem in that the force applied to the tip portion of the Z-axis member is different, and the measurement accuracy varies. Further, in a manually operated three-dimensional measuring machine that employs an air bearing device for each shaft sliding portion, the flying height due to air fluctuates, resulting in variations in measurement accuracy.

Conventionally, Japanese Patent Laid-Open No. 54-107763 "Movement assisting force adding device for coordinate measuring machine" has been proposed to reduce the bending of the Z-axis member at the time of starting. This is provided with a pair of parallel leaf springs having an upper end fixed to the Z axis and a lower end displaceable in the X axis direction in parallel with the Z axis at the lower end portion of the Z axis having a probe (measuring element). An X-axis movement direction discriminating device having an operation flange portion attached to the lower end of a parallel leaf spring and a limit switch facing each leaf spring for detecting the displacement direction (movement direction) of the leaf spring, and an apparatus having the same structure. A Y-axis movement direction discriminating device is arranged at a 90 degree offset, air is ejected in a direction opposite to the movement direction discriminated by these direction discriminating devices, and an assisting force adding device for giving a thrust smaller than the frictional resistance in that direction. Is provided on each axis.

In such a structure, when the probe is to be moved in the X and Y axis directions by the operation flange portion, the parallel leaf spring is displaced in that direction, so that the limit switch facing this is turned on. As a result, when the moving direction is determined, air is ejected from the assisting force adding device in the direction opposite to the moving direction, and as a result, a hysteresis error caused by bending in the X and Y axis directions when moving the Z axis is generated. It can be removed, and the measurement accuracy can be improved.

[0006]

However, in the above-mentioned structure, the moving direction discriminating device including the X-axis moving direction discriminating device and the Y-axis moving direction discriminating device including the pair of parallel leaf springs, and the moving direction discriminating device are used. Since an assisting force adding device that ejects air in the direction opposite to the determined moving direction and gives a thrust smaller than the frictional resistance in that direction is required, the structure becomes complicated and the assisting force on each axis is increased. Since an additional device has to be mounted, there is a further problem that bending due to its weight occurs. Moreover, the moving direction discriminating device has to have a more complicated structure because the X-axis moving direction discriminating device and the Y-axis moving direction discriminating device including a pair of parallel leaf springs must be arranged so as to be shifted by 90 degrees with respect to the Z axis. Turn into.

Further, since the above-mentioned structure eliminates the bending in the X and Y axis directions when the Z axis is moved, that is, the hysteresis error caused by the bending when the Z axis is moved from the stationary state, the Z axis is removed. Before the X-axis moves in the X-axis or Y-axis direction, the movement direction must be determined. For that purpose, the parallel leaf springs provided in the movement direction discriminating device must be structured so as to be displaced by a weak force. However, in this case, the probe is moved while the Z-axis moves while the leaf springs are bent. Since it comes into contact with the object to be measured, there remains a problem that the force applied to the tip end portion of the Z-axis member at the time of measurement varies depending on the measurer, and the measurement accuracy varies.

In view of such conventional problems, an object of the present invention is to provide a manual operation type three-dimensional measuring machine which can simplify the structure and reduce variations in measurement accuracy among measuring persons.

[0009]

In a manually operated three-dimensional measuring machine of the present invention, a probe is constructed so as to be movable in three axial directions of an X-axis, a Y-axis and a Z-axis which are orthogonal to each other, and the probe is attached to the probe. In a manually operated three-dimensional measuring machine, the Z-axis member is moved in the three-axis directions by manual operation, and the size and shape of the measured object is obtained from the displacement of each axis when the probe contacts the measured object. A slide ring is provided on the lower end side of the Z-axis member so as to be slidable in an arbitrary direction within a plane orthogonal to the axial direction of the Z-axis member, and the slide ring is set at a fixed position within the plane. An elastic member is provided that holds the slide ring and elastically deforms when a force of a certain amount or more is applied to the slide ring from any direction in the plane to allow the slide ring to slide in the plane. It is characterized in. Here, the lower end side of the Z-axis member means the lower end position of the Z-axis member, or Z
It is meant to include a position lower than the lower end surface of the shaft member (for example, a probe adapter position attached to the lower end surface of the Z-axis member).

According to this structure, in measuring, the slide ring is gripped, and the probe is brought into contact with the object to be measured while moving the probe in the three axial directions. When the probe is moved in the X-axis and Y-axis directions and the acceleration during movement of the probe exceeds a certain level, the slide ring has a constant direction from a plane (XY plane) orthogonal to the axial direction of the Z-axis member. Since the above force acts, the elastic member is elastically deformed and the slide ring slides in the plane. At this time, since the measurer is holding the slide ring, the measurer can recognize the slide of the slide ring. Therefore, immediately before the probe comes into contact with the object to be measured, while the elastic member is being reduced to a speed at which it does not elastically deform, that is, while the acceleration is kept below a certain value, the probe can be brought into contact with the object to be measured. The force acting on the slide ring (force from the plane orthogonal to the axial direction of the Z-axis member) can be kept below a certain level. Therefore, it is possible to reduce variations in measurement accuracy depending on the measurer. Further, structurally, the structure can be simplified because it can be configured by a slide ring and an elastic member.

Further, in the manually operated three-dimensional measuring machine having the above structure, the slide ring is slidably provided in the axial direction of the Z-axis member, and the slide ring is provided in the axial direction of the Z-axis member. An elastic member that holds the slide ring in a fixed position and elastically deforms when a force of a certain amount or more acts on the slide ring from the axial direction of the Z-axis member to allow the slide ring to slide in the axial direction of the Z-axis member. It is characterized by being provided.

According to this structure, when the probe is moved in the Z-axis direction during measurement, if the acceleration during movement of the probe becomes a certain amount or more, a force of a certain amount or more acts on the slide ring from the Z-axis direction. Therefore, the elastic member is elastically deformed and the slide ring is slid in the Z-axis direction. At this time, since the measurer is holding the slide ring, the measurer can recognize the slide of the slide ring. Therefore, immediately before the probe comes into contact with the object to be measured, it is possible to bring the probe into contact with the object to be measured while reducing all elastic members to a speed at which they do not elastically deform, that is, while keeping the acceleration below a certain value. In, the force acting on the slide ring (the force from the axial direction of the Z-axis member and the force from the plane orthogonal to the axial direction) can be kept below a certain level. Therefore, it is possible to reduce variations in measurement accuracy by the measurer.

Further, in the manual operation type three-dimensional measuring machine having the above structure, the slide ring is attached to a lower end of the Z-axis member and is provided on an outer periphery of a probe adapter which detachably holds the probe, The member is interposed between the slide ring and the probe adapter. According to such a configuration, Z
Since it is not necessary to perform processing for attaching the slide ring to the shaft member, a probe adapter that detachably holds the probe on the Z-axis member of the existing manually operated coordinate measuring machine can be used. You can

Further, the manual operation type three-dimensional measuring machine having the above-mentioned structure is characterized in that it is provided with an informing means for informing that the slide ring has slid by a predetermined amount. Here, the notification includes, in addition to lighting (or extinguishing or blinking) display of the light emitting element, emitting sound for a certain period of time. According to such a configuration, when the slide ring slides by a certain amount in the process of movement of the probe in the measurement, the fact is notified by the notifying means. Therefore, while confirming the notifying means, the slide ring moves by the certain amount. The probe can be brought into contact with the object to be measured in a state before sliding, that is, in a state where the acceleration is equal to or lower than a certain value.

Further, in the manually operated three-dimensional measuring machine having the above-mentioned structure, the notifying means fixes the fixed contact provided on the probe adapter and the fixed contact when the slide ring provided on the slide ring slides by a predetermined amount. It is characterized by comprising a movable contact that comes into contact with the contact, and a light emitting element that lights up when both of the contacts come into contact. According to such a configuration, the notification means can be configured by the fixed contact, the movable contact, and the light emitting element, and thus can be easily configured.

Further, in the manual operation type three-dimensional measuring machine having the above-mentioned structure, when the slide ring slides by a predetermined amount, movement of each axis based on a touch signal generated when the probe comes into contact with the object to be measured. An error prevention unit for canceling the process of reading the displacement amount is provided. According to such a configuration, when the slide ring slides by a certain amount, that is,
When the amount of bending of the Z-axis member or other axis-constituting members is equal to or more than a certain value, even if the probe comes into contact with the object to be measured and a touch signal is issued, the amount of movement displacement of each axis is not taken in, so an error occurs. Including measurement can be prevented.

Further, in the manual operation type three-dimensional measuring machine having the above-mentioned structure, the error prevention means is provided when the fixed contact provided on the probe adapter and the slide ring provided on the slide ring slide a certain amount. It is characterized by comprising a movable contact that contacts the fixed contact, and a touch signal processing circuit that cancels the processing based on the touch signal when both the contacts are in contact. According to such a configuration, the error prevention means
Since the fixed contact, the movable contact, and the touch signal processing circuit can be configured, the configuration can be simplified.

[0018]

Embodiments of the present invention will be described below in detail with reference to the drawings. In the following description, the same constituents will be given the same reference numeral, and the description thereof will be omitted or simplified.

[First Embodiment] FIGS. 1 to 3 show a first embodiment. As shown in FIG. 1, a manual operation type three-dimensional measuring machine according to the present embodiment is provided with an installation table 1 and a table 2 on the installation table 1 on which an object to be measured W is placed.
And a gate-shaped column 3 provided movably in the front-rear direction (Y-axis direction) of the table 2, and in the left-right direction (X-axis direction) along the X-axis beam 3B of the gate-shaped column 3. An X-axis slider 4 provided, a Z-axis spindle 5 as a Z-axis member provided on the X-axis slider 4 so as to be vertically movable (Z-axis direction), and a probe adapter at the lower end of the Z-axis spindle 5. 6 and a probe 7 which is detachably provided via 6. A balancer 8 balances the weight of the Z-axis spindle 5.

Here, between the table 2 and both side legs 3A of the gate-shaped column 3, between the X-axis beam 3B and the X-axis slider 4, and between the X-axis slider 4 and the Z-axis spindle 5.
An air bearing device (not shown) is provided between and. That is, the gate-shaped column 3, the X-axis slider 4, and the Z-axis spindle 5 can be moved with a light force by a manual operation. As a result, when the probe 7 is brought into contact with the object to be measured W while being moved in the directions of the X axis, Y axis and Z axis which are orthogonal to each other, the amount of movement displacement in each axis based on the touch signal issued at that time. After being read by a displacement detector (not shown), the size and shape of the object to be measured W are obtained based on these displacement amount data.

As shown in FIGS. 2 and 3, the probe adapter 6 has a cylindrical body portion 11 and a diameter larger than the diameter dimension of the body portion 11 which is integrally formed on the upper and lower end surfaces of the body portion 11. And a holding hole 14 penetratingly formed in the center of the body 11 on the side of the flanges 12 and 13 for holding the probe 7 in a detachable manner. Body 1
A ring-shaped slide ring 15 is slidable on the outer periphery of No. 1 in any direction within a plane (XY plane) orthogonal to the axial direction of the Z-axis spindle 5, and in the axial direction of the Z-axis spindle 5. It is provided so as to be slidable in the Z-axis direction. Note that the allowable slide amount in the plane of the slide ring 15 (in the XY plane) and the allowable slide amount in the Z-axis direction are as follows when the Z-axis spindle 5 is moved with the slide ring 15 by hand. The amount is set to be equal to or larger than the amount at which the slide can be felt by hand (for example, about 2 mm).

The inner peripheral surface of the slide ring 15 and the body portion 1
The slide ring 15 is held at a fixed position in the plane (in the XY plane) between the outer peripheral surface of the slide ring 15 and the slide ring 15 from a given direction in the plane (in the XY plane) or more. A compression coil spring 16 as an elastic member which is elastically deformed when the force is applied and allows the slide ring 15 to slide in the plane is arranged at 90-degree intervals. Further, between the upper and lower end surfaces of the slide ring 15 and the flange portions 12 and 13, the slide ring 15 is held at a fixed position in the axial direction of the Z-axis spindle 5, and the slide ring 15 is fixed to a predetermined distance or more from the Z-axis direction. Elastically deforms when the force of
A compression coil spring 17 as an elastic member that allows sliding in the axial direction is arranged at 90-degree intervals.

Next, the operation of this embodiment will be described. In the measurement, the slide ring 15 is held with one hand and the probe 7 is manually moved in the three axial directions of the X-axis, the Y-axis, and the Z-axis, that is, the X-slider 4 is moved in the X-axis direction and the gate-shaped column 3 is used. While moving the Y axis direction and the Z axis spindle 5 in the Z axis direction, the probe 7 is brought into contact with the object W to be measured.

When the velocity (acceleration) during the movement of the probe 7 exceeds a certain level during the movement of the probe 7, a force above a certain level acts on the slide ring 15, so that the compression coil springs 16 and 17 are elastically deformed. . For example, when a certain force or more is applied to the slide ring 15 from any direction in the XY plane, the compression coil spring 16 elastically deforms,
Further, when a certain force or more acts on the slide ring 15 from the Z-axis direction, the compression coil spring 17 elastically deforms.

At this time, the measurer uses the slide ring 15
Since it is gripping, the slide of the slide ring 15 can be recognized. Therefore, at least immediately before the probe 7 contacts the measured object W, the compression coil spring 1
The probe 7 is brought into contact with the object to be measured W while being lowered to a speed at which the elastic deformation of 6 and 17 does not occur. Accordingly, at the time of measurement, the force acting on the slide ring 15 can be kept below a certain level, so that the measurement accuracy of the measurer can be reduced.

According to the present embodiment, the Z-axis spindle 5
A probe adapter 6 that detachably holds the probe 7 is attached to the lower end of the, and the slide ring 15 can be slid to this probe adapter 6 in any direction within the XY plane,
Further, it is provided so as to be slidable in the Z-axis direction, between the inner peripheral surface of the slide ring 15 and the outer peripheral surface of the body portion 11 of the probe adapter 6, and between the upper and lower end surfaces of the slide ring 15 and the flange portions 12, 13 of the probe adapter 6. Since the compression coil springs 16 and 17 are interposed between and, when the probe 7 is moved in the three axial directions without gripping the slide ring 15 in the measurement, the velocity (acceleration) during the movement of the probe 7 is constant. In the above case, since a certain force or more acts on the slide ring 15, the compression coil springs 16 and 17 are elastically deformed and the slide ring 15 is slid in the moving direction.

At this time, the measurer takes the slide ring 15
Since it is gripping, the slide of the slide ring 15 can be recognized. Therefore, immediately before the probe 7 comes into contact with the object to be measured W, the probe 7 can be brought into contact with the object to be measured W while being lowered to a speed at which the compression coil springs 16 and 17 do not elastically deform.
The force acting on the slide ring 15 can be kept below a certain level. Therefore, the flexure of the Z-axis spindle 5 in the X- and Y-axis directions and the flexure of the X-axis beam 3B in the Y- and Z-axis directions can be reduced, and moreover, the fluctuation of the flying height of the X-axis slider 4 and the gate-shaped column 3 is also suppressed. Since it can be made small, it is possible to reduce variations in measurement accuracy.

Further, structurally, since the slide ring 15 and the compression coil springs 16 and 17 can be used, the structure can be extremely simplified. In particular, since the slide ring 15 has a structure that can slide in any direction within the XY plane and can slide in the Z-axis direction,
The structure can be much simplified compared to the structure described in the background art in which two moving direction discriminating devices using a pair of parallel leaf springs are attached by shifting 90 degrees with respect to the Z axis. Moreover, since the slide ring 15 is provided on the outer periphery of the probe adapter 6 that removably holds the probe 7 on the Z-axis spindle 5, it is not necessary to perform processing for attaching the slide ring 15 to the Z-axis spindle 5. Of course, since the probe adapter that detachably holds the probe on the Z-axis spindle of the existing manually operated coordinate measuring machine can be used as it is, the cost can be reduced.

[Second Embodiment] A second embodiment is shown in FIGS. 4 and 5. In the manual operation type three-dimensional measuring machine according to the second embodiment, the informing means for informing the manual operation type three-dimensional measuring machine according to the first embodiment that the slide ring 15 is slid by a certain amount. In the state where the notification circuit 21 and the slide ring 15 are slid by a certain amount, a process of capturing the movement displacement amount of each axis based on the touch signal generated when the probe 7 contacts the object W to be measured is performed. An error prevention circuit 31 as an error prevention means for canceling is added.

The notification circuit 21 is, as shown in FIG.
The first, respectively provided on the outer periphery of the body portion 11 of the probe adapter 6, the lower surface of the collar portion 12 and the upper surface of the collar portion 13,
Second and third fixed contacts 22A, 22B, 22C,
The fixed contacts 22A, 2 provided on the inner peripheral surface and the upper and lower end surfaces of the slide ring 15 respectively when the slide ring 15 slides by a certain amount in the XY axis direction and the Z axis direction.
It includes first, second and third movable contacts 23A, 23B and 23C contacting 2B and 22C. Then, as shown in FIG. 5, the fixed contacts 22A, 22B and 22C, the movable contacts 23A, 23B and 23C, and the LED drive circuit 24.
The notification circuit 21 is configured to include an LED 25 as a light emitting element that lights up when both contacts are in contact with each other.
The LED 25 is attached to the lower end of the Z-axis spindle 5.

The error prevention circuit 31, as shown in FIG. 4, is provided on the outer periphery of the body portion 11 of the probe adapter 6, the lower surface of the collar portion 12 and the upper surface of the collar portion 13, respectively. Third fixed contacts 32A, 32B, 32
C and the fixed contact 32 when the slide ring 15 is provided on the inner peripheral surface and the upper and lower end surfaces of the slide ring 15 and slides a certain amount in the XY axis direction and the Z axis direction.
It includes first, second and third movable contacts 33A, 33B and 33C which are in contact with A, 32B and 32C. Then, as shown in FIG. 5, fixed contacts 32A, 32B, 32C,
Touch signal processing for canceling the processing of outputting a latch signal to the counter 35 (a counter indicating the movement displacement amount of each axis) based on the touch signal when the movable contacts 33A, 33B and 33C are in contact with each other. The error prevention circuit 31 is composed of the touch signal interface circuit 34 as a circuit.

According to the second embodiment, when the slide ring 15 slides by a certain amount while the probe 7 is moving during measurement, the LED 2 of the notification circuit 21 is moved.
Since 5 is turned on, the probe 7 can be brought into contact with the object to be measured W in a state before the slide ring 15 slides by a certain amount while confirming that the LED 25 is not turned on.
Therefore, since the force acting on the slide ring 15 can be kept below a certain level, it is possible to reliably reduce the variation in measurement accuracy. Moreover, even if the probe 7 is accidentally brought into contact with the object to be measured W while the LED 25 is lit, the error prevention circuit 31 does not capture the movement displacement amount of each axis, so that measurement including an error can be prevented. .

Further, the notification circuit 21 includes fixed contacts 22A,
22B, 22C and movable contacts 23A, 23B, 23C
Since it can be composed of the LED drive circuit 24 and the LED 25, it can be simply structured. The error prevention circuit 31 also has fixed contacts 32A, 32B, 32C.
Since it can be constituted by the movable contacts 33A, 33B, 33C and the touch signal interface circuit 34, the constitution can be simplified.

In the second embodiment, the alarm circuit 21 has fixed contacts 22A, 22B, 22C and movable contacts 23A, 23B, 23C, and the error prevention circuit 31 has fixed contacts 32A, 32B, 32C and movable contacts. 33A,
Although 33B and 33C are provided respectively, either one of the contact groups may be commonly used. For example, the common connection point of the fixed contacts 22A, 22B and 22C and the common connection point of the movable contacts 23A, 23B and 23C may be connected to the touch signal interface circuit 34.
By doing so, the fixed contacts 32A, 32B, 32C and the movable contacts 33A, 33B, 33C can be omitted, so that the circuit can be simplified.

[Third Embodiment] FIGS. 6 and 7 show a third embodiment. The manually operated coordinate measuring machine according to the third embodiment is configured such that the slide ring 15 is slidable only in the XY plane. The probe adapter 6 in the present coordinate measuring machine has a ring mounting member 41 having the body portion 11 and the collar portion 12, and is fixed to the lower surface of the ring mounting member 41 with two bolts 42 and holds the collar portion 13 and the holding portion. And a probe holding member 43 having a hole 14. And these are 3
The bolt 44 is attached to the lower end surface of the Z-axis spindle 5.

A spring accommodating hole 45 for accommodating the four compression coil springs 16 is formed in the ring mounting member 41. Further, a clamp screw 46 for clamping the shank of the probe 7 inserted into the holding hole 14 is screwed into the probe holding member 43, and
A connector case 47 is provided for processing the signal line drawn from the probe 7 through the Z-axis spindle 5.

According to the third embodiment, since the slide ring 15 can be slid only in the XY plane, the Z-axis spindle 5 is bent in the X and Y axis directions, and the X axis beam 3B is moved in the Y axis direction. Can be reduced.

The present invention has been described above with reference to the preferred embodiments, but the present invention is not limited to these embodiments, and changes can be made without departing from the gist of the present invention. is there. For example, in each of the above embodiments,
Although the probe adapter 6 is attached to the lower end surface of the Z-axis spindle 5 and the slide ring 15 is attached to the outer periphery of the probe adapter 6, the slide ring 15 may be attached directly to the lower end of the Z-axis spindle 5.

The shape of the slide ring 15 does not have to be an annular shape, and may be a rectangular tube shape when seen in a plan view. Further, the elastic member is not limited to the compression coil springs 16 and 17 described in each of the above-described embodiments, but a leaf spring, rubber, wire material, or the like can be used. In the case of the wire rod, as shown in FIG. 8, one end of the wire rod 51 spirally swung along the outer periphery of the body portion 11 of the probe adapter 6 is fixed to the probe adapter 6 side, and the other end is slid ring 15. It should be fixed to the side.

Further, in the notification circuit 21, the fact that the slide ring 15 has slid by a certain amount is indicated by the lighting of the LED 25, but conversely, the LED 25 is turned off or blinks and turns. Good. further,
The sound may be sounded for a certain period of time to notify.

[0041]

As described above, according to the manually operated three-dimensional measuring machine of the present invention, the structure can be simplified and the variation in the measurement accuracy by the measurer can be reduced.

[Brief description of drawings]

FIG. 1 is a perspective view showing an appearance of a manually operated coordinate measuring machine according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a probe adapter portion in the above embodiment.

3 is a plan view of the probe adapter portion of FIG. 2. FIG.

FIG. 4 is a cross-sectional view showing a probe adapter portion in a manually operated coordinate measuring machine according to a second embodiment of the present invention.

FIG. 5 is a diagram showing a notification circuit and an error prevention circuit in the same embodiment.

FIG. 6 is a cross-sectional view showing a probe adapter portion in a manually operated coordinate measuring machine according to a third embodiment of the present invention.

FIG. 7 is a bottom view of the probe adapter portion of FIG.

FIG. 8 is a diagram showing a modification of the elastic member mentioned in each embodiment.

[Explanation of symbols]

5 Z-axis spindle (Z-axis member) 6 Probe adapter 7 Probe 15 Slide ring 16 Compression coil spring 17 Compression coil spring 21 Notification circuit (informing means) 22A, 22B, 22C Fixed contact 23A, 23B, 23C Movable contact 25 LED (light emission) Element) 31 Error prevention circuit (error prevention means) 32A, 32B, 32C Fixed contact 33A, 33B, 33C Movable contact 34 Touch signal interface circuit (touch signal processing circuit)

Claims (7)

[Claims] 1. A probe is configured to be movable in three axis directions of an X axis, a Y axis and a Z axis which are orthogonal to each other, and a Z axis member to which the probe is attached is manually moved in the three axis directions, In a manually operated three-dimensional measuring machine that obtains the size and shape of an object to be measured from the amount of displacement of each axis when the probe contacts the object to be measured, a slide ring is attached to the lower end of the Z-axis member. The slide ring is provided so as to be slidable in an arbitrary direction within a plane orthogonal to the axial direction of the shaft member, holds the slide ring at a fixed position within the plane, and is fixed to the slide ring from any direction within the plane. A manual operation type three-dimensional measuring machine comprising an elastic member which elastically deforms when the above force is applied to allow the slide ring to slide in the plane. 2. The manual operation type three-dimensional measuring machine according to claim 1, wherein the slide ring is provided slidably in the axial direction of the Z-axis member, and the slide ring is provided on the Z-axis member. The slide ring is held in a fixed position in the axial direction and elastically deformed when a force of a certain amount or more is applied to the slide ring from the axial direction of the Z-axis member to allow the slide ring to slide in the axial direction of the Z-axis member. A manually operated three-dimensional measuring machine characterized in that an elastic member is provided. 3. The manual operation type three-dimensional measuring machine according to claim 1 or 2, wherein the slide ring is attached to a lower end of the Z-axis member and is a probe adapter that detachably holds the probe. It is provided on the outer circumference,
The manually operated coordinate measuring machine, wherein the elastic member is interposed between the slide ring and the probe adapter. 4. The manual operation type three-dimensional measuring machine according to claim 3, further comprising an informing means for informing that the slide ring has slid by a predetermined amount. Machine. 5. The manual operation type three-dimensional measuring machine according to claim 4, wherein the informing means slides a fixed contact provided on the probe adapter and a slide ring provided on the slide ring by a predetermined amount. A manually operated coordinate measuring machine, further comprising a movable contact that contacts the fixed contact, and a light emitting element that lights up when the contacts are in contact with each other. 6. The manual operation type three-dimensional measuring machine according to claim 3, wherein when the slide ring slides a certain amount, when the probe comes into contact with an object to be measured. A manual operation type three-dimensional measuring machine, characterized in that it is provided with an error prevention means for canceling a process for taking in each axial movement displacement amount based on a touch signal issued. 7. The manual operation type three-dimensional measuring machine according to claim 6, wherein the error prevention means is such that a fixed contact provided on the probe adapter and a slide ring provided on the slide ring slide a certain amount. A manually-operated three-dimensional system characterized by comprising a movable contact that sometimes contacts the fixed contact, and a touch signal processing circuit that cancels the processing based on the touch signal when the two contacts are in contact. Measuring machine.