JPH0976511A - Nozzle plate for ink jet printer head and production thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance the reliability of an ink jet printer by protecting a liquid repelling film and stably emitting ink droplets. SOLUTION: A nozzle plate is composed of a flat plate-shaped member having an ink emitting surface on one surface thereof and a piercing ink emitting orifice 2, the liquid repelling film 4 covering the periphery of the ink emitting orifice 2 of the ink emitting surface 3 and a hard carbon film 7 thicker than the liquid repelling film 4 formed to the outside of the periphery of the ink emitting orifice 2 are provided at a predetermined position of the flat plate- shaped member.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of a nozzle plate used in an ink jet printer head and a manufacturing method thereof.

[0002]

2. Description of the Related Art Conventionally, in an ink jet printer which is one type of non-impact printer in the field of printing computer output, a means for applying the piezoelectric action of a piezoelectric body as a driving force for ink ejection is disclosed in, for example, Japanese Patent Publication No. 4-48622. It is proposed in the official gazette and Japanese Patent Laid-Open No. 63-247051.

In the ink jet printer manufacturing method and structure described in these publications, a piezoelectric substrate is processed to form fine penetrating grooves for ink flow paths, and then an electrode film is formed on the surface of the piezoelectric substrate. Then, the surface is polished to form an electrode film inside the groove.

After that, a parylene film made of polyparaxylylene resin is formed on the inner surface of the groove as an insulating film by a vapor phase synthesis method. This insulating film is positioned as an important constituent for preventing the generation of bubbles due to the electrolysis of the ink, which causes unstable ejection of the ink, and the deterioration of the ink.

Ink is prepared by adhering the grooved surfaces of the piezoelectric substrate produced as described above so as to face each other, or by adhering a flat plate-shaped lid made of glass, ceramic, metal or plastic on the grooved surface. Form a flow path.

Further, a diameter 30 is provided at one end of the ink flow path.
~ 0.1 micron thickness with 60 micron ink ejection holes
After adhering the nozzle plate of (1), an ink jet printer head is constructed by connecting a drive circuit to the electrode film. At this time, the nozzle plate is made of metal, plastic, ceramics or the like.

The driving principle of the ink jet printer head utilizing the piezoelectric effect will be described below. When a voltage is applied to the electrode film formed in each groove, the partition wall forming the groove is deformed so as to increase or decrease the volume of the ink flow path due to its piezoelectric action. Then, the force generated by the deformation of the volume reduction of the ink flow path propagates to the ink filled in the groove and can be ejected as an ink droplet from the ink ejection hole.

Generally, in order to stably and straightly eject ink droplets, residual ink is prevented from adhering around the ink ejection holes in the nozzle plate after ejection, and is chemically stable against aqueous or non-aqueous ink. It has to be required.

As a means therefor, it has been proposed to form a liquid-repellent surface on the ink ejection surface, and as the liquid-repellent material, a silicone resin, a fluororesin, or Teflon eutectoid plating is used. Coatings and the like are known.

Further, for example, JP-A-60-184852.
As described in Japanese Patent Laid-Open No. 63-9550 and Japanese Patent Laid-Open No. 63-9550, it has been proposed to make the periphery of the ink ejection hole of the ink ejection surface more water repellent than the outer region thereof. As a result, the ink droplets that have adhered to the periphery of the ink ejection holes are guided to the outside thereof, and the ink is prevented from remaining around the ink ejection holes.

[0011]

However, even if the nozzle plate having the ink ejection surface as described above is used, the ink cannot be completely recovered. Therefore, the ink adheres to the periphery of the ink ejection holes due to drying, and as a result, unstable ejection of ink droplets occurs.

As a countermeasure against this ink adhesion, an ink jet printer is generally equipped with a cleaning mechanism. This cleaning mechanism wipes the ink ejection surface with a blade made of a rubber material.

When the ink ejection surface is wiped many times with this blade, the liquid repellent surface of the ejection surface is gradually worn away, and finally the liquid repellent property disappears. As a result, the direction of the ink droplet is bent, and printing cannot be performed normally. Further, there is a problem that the broken pieces of the liquid-repellent material, which are worn and peeled off, block the ink ejection holes, making it impossible to eject ink droplets. Further, when the printing paper is manually pulled out from the printer, the ink ejection surface is abraded by the printing paper, and a phenomenon similar to the result of wiping the ink ejection surface with a blade many times occurs.

The object of the present invention is to solve the above problems, to provide sufficient liquid repellency to ink, to have excellent durability against wiping of the ink ejection surface, and to stabilize ink droplets. An object is to provide a structure of a nozzle plate for an inkjet printer head for discharging and a manufacturing method for forming this structure.

[0015]

In order to achieve the above object, the structure of the nozzle plate for an ink jet printer head and the manufacturing method thereof according to the present invention employ the following means.

The ink jet printer head nozzle plate of the present invention comprises a flat plate-shaped member having an ink discharge surface on one side, and a penetrating ink discharge hole through which ink is discharged to a predetermined position of the flat plate-shaped member, and an ink discharge surface. The liquid-repellent coating that covers the periphery of the ink-ejection hole and the hard carbon film that is thicker than the liquid-repellent coating on the outer periphery of the ink-ejection hole.

The ink jet printer head nozzle plate of the present invention comprises a flat plate-shaped member having an ink discharge surface on one side, and a penetrating ink discharge hole through which ink is discharged to a predetermined position of the flat plate-shaped member, and an ink discharge surface. Has a liquid-repellent coating around the ink ejection holes and a hard carbon film having a thickness thicker than the liquid-repellent coating around the ink ejection holes. The hard carbon film is formed on the liquid-repellent coating. The intermediate layer is coated on the intermediate layer.

The ink jet printer head nozzle plate of the present invention comprises a flat plate-shaped member having an ink discharge surface on one side, and a penetrating ink discharge hole through which ink is discharged to a predetermined position of the flat plate-shaped member, and an ink discharge surface. Of the ink ejection hole, and a hard carbon film thicker than the liquid repellent film around the ink ejection hole, and the hard carbon film is formed on the ink ejection surface. It is characterized by coating on the intermediate layer.

The ink jet printer head nozzle plate of the present invention comprises a flat plate-shaped member having an ink discharge surface on one side, and a penetrating ink discharge hole through which ink is discharged to a predetermined position of the flat plate-shaped member, and an ink discharge surface. Liquid-repellent coating around the ink ejection holes and a hard carbon film thicker than the liquid-repellent coating around the ink ejection holes. The hard carbon film is coated on the liquid-repellent coating. It is characterized by doing.

The ink jet printer head nozzle plate of the present invention comprises a flat plate-shaped member having an ink discharge surface on one side, and a penetrating ink discharge hole through which ink is discharged to a predetermined position of the flat plate-shaped member, and an ink discharge surface. Liquid-repellent coating around the ink ejection holes and a hard carbon film thicker than the liquid-repellent coating around the ink ejection holes. The hard carbon film is coated on the ink ejection surface. It is characterized by

The method for manufacturing a nozzle plate for an ink jet printer head according to the present invention comprises a step of coating a liquid repellent film around the ink ejection holes on the ink ejection surface, and a film thickness of the liquid repellent film outside the ink ejection holes. And a step of forming a hard carbon film thicker than the above.

The method for manufacturing a nozzle plate for an ink jet printer head according to the present invention comprises a step of coating a liquid repellent film around the ink ejection holes on the ink ejection surface, and a film thickness of the liquid repellent film around the ink ejection holes. A step of forming a hard carbon film thicker than the above, and a step of coating a liquid-repellent coating on the ink ejection surface, and a photosensitive resin film is coated on the liquid-repellent coating, and then subjected to an exposure treatment and a development treatment. A step of masking the periphery of the ink ejection hole, a step of sequentially laminating an intermediate layer and a hard carbon film on the entire ink ejection surface, and a step of removing the intermediate layer and the hard carbon film laminated on the photosensitive resin film and the photosensitive resin film. And a process.

The method for manufacturing a nozzle plate for an ink jet printer head of the present invention comprises a step of coating a liquid repellent coating on the ink ejection surface around the ink ejection holes, and a film thickness of the liquid repellent coating on the outer periphery of the ink ejection holes. A step of forming a hard carbon film thicker than the above, and a step of coating a liquid-repellent coating on the ink ejection surface, and a photosensitive resin film is coated on the liquid-repellent coating, and then subjected to an exposure treatment and a development treatment. A step of masking the periphery of the ink ejection hole, a step of removing the exposed liquid repellent film, a step of sequentially laminating an intermediate layer and a hard carbon film over the entire ink ejection surface, a photosensitive resin film and a photosensitive resin The method is characterized by including an intermediate layer laminated on the film and a step of removing the hard carbon film.

The method for manufacturing a nozzle plate for an ink jet printer head according to the present invention comprises a step of coating a liquid repellent coating on the ink ejection surface around the ink ejection holes, and a film thickness of the liquid repellent coating on the outer periphery of the ink ejection holes. A step of forming a hard carbon film thicker than the above, and a step of coating a liquid-repellent coating on the ink ejection surface, and a photosensitive resin film is coated on the liquid-repellent coating, and then subjected to an exposure treatment and a development treatment. It has a step of masking the periphery of the ink ejection hole, a step of forming a hard carbon film on the entire ink ejection surface, and a step of removing the photosensitive resin film and the hard carbon film formed on the photosensitive resin film. And

The method for manufacturing a nozzle plate for an ink jet printer head according to the present invention comprises a step of coating a liquid repellent coating on the ink ejection surface around the ink ejection holes, and a film thickness of the liquid repellent coating on the outer periphery of the ink ejection holes. A step of forming a hard carbon film thicker than the above, and a step of coating a liquid-repellent coating on the ink ejection surface, and a photosensitive resin film is coated on the liquid-repellent coating, and then subjected to an exposure treatment and a development treatment. Masking the area around the ink ejection holes, removing the exposed liquid repellent coating, forming a hard carbon film over the entire ink ejection surface, and forming on the photosensitive resin film and the photosensitive resin film And removing the hard carbon film.

The hard carbon film used in the nozzle plate for the ink jet printer head of the present invention generally has a Vickers hardness value of about 3000 to 5000 kg / mm ^2, which is the second hardest hardness after diamond, and is an amorphous carbon film containing hydrogen. Is. The hard carbon film has excellent wear resistance due to its high hardness characteristics. And this hard carbon film can be formed by plasma chemical vapor deposition of hydrocarbon gas.

A hard carbon film having such characteristics is formed outside the liquid repellent film formed around the ink ejection holes, and is thicker than the liquid repellent surface film. This makes it possible to protect the liquid-repellent coating against wiping of a blade made of a rubber material when cleaning the ink ejection surface.

That is, the blade made of a rubber material wipes only the surface of the hard carbon film having excellent wear resistance. Therefore, the liquid repellent coating film is not worn, and the fragments of the liquid repellent material do not block the ink ejection holes. For the same reason, it is possible to prevent the abrasion of the liquid repellent coating film due to the contact between the printing paper and the ink ejection surface.

Further, since the hard carbon film has a lyophilic property, the ink attached to the surface of the liquid repellent film is attracted to the hard carbon film side. Therefore, the nozzle plate for an inkjet printer head of the present invention also has an effect of preventing ink from remaining on the liquid-repellent coating.

[0030]

BEST MODE FOR CARRYING OUT THE INVENTION The structure of a nozzle plate for an ink jet printer head and a method for manufacturing the nozzle plate according to an embodiment of the present invention will be described below with reference to the drawings. First, the structure of the nozzle plate for an ink jet printer head in the first embodiment of the present invention will be described with reference to the sectional view of FIG.

As shown in FIG. 6, a nozzle plate 1 for an ink jet printer head is provided so as to cover a liquid repellent film 4 around an ink ejection hole 2 on an ink ejection surface 3. Further, on the outside of the liquid repellent coating 4, a hard carbon film 7 is provided via an intermediate layer 8 provided on the liquid repellent coating 4.

The structure in which the hard carbon film 7 is provided on the ink ejection surface 3 side with respect to the liquid repellent coating 4 protects the liquid repellent coating 4 against wiping of a blade made of a rubber material during cleaning. It will be possible.

Next, a manufacturing method for forming the nozzle plate having the structure shown in FIG. 6 will be described with reference to FIGS. FIG. 1 is a perspective view showing a thin plate nozzle plate for an inkjet printer head to which a manufacturing method according to an embodiment of the present invention is applied. 2 to 6 are sectional views showing the method for manufacturing the nozzle plate for an ink jet printer head in the first embodiment of the present invention and enlarging the peripheral region of the ink ejection holes. A description will be given below with reference to the perspective view of FIG. 1 and the process cross-sectional views of FIGS.

First, as shown in FIGS. 1 and 2, in order to manufacture a nozzle plate for an ink jet printer head according to the present invention, first, a circular shape for ejecting ink having a length of 50 mm, a width of 5 mm and a thickness of 0.1 mm. The liquid-repellent coating 4 is formed on the entire surface of the ink ejection surface 3 of the nozzle plate 1 having the through holes. The nozzle plate 1 is manufactured by an electroforming method, and its material is nickel.

The diameter of the ink ejection hole 2 on the ink ejection surface 3 side is 35 μm, and the diameter of the back surface thereof is 100 μm. Since the ink is supplied smoothly and ejected straight, the cross-sectional shape of the ink ejection hole 2 is thus tapered.

The material for the liquid repellent coating film 4 is fluororesin,
Silicone resin or Teflon eutectoid plating can be applied. As the forming method, there are a spin coating method, a dipping method, a coating method, a wet method such as plating, and a dry method such as a vacuum deposition method.

In the liquid repellent coating film 4 of the first embodiment of the present invention, a coating type fluororesin CYTOP (Asahi Glass Co., Ltd.) having a film thickness of 0.5 μm is used by spin coating. The surface of the ink ejection surface 3 is covered, and then the temperature is set to 15
It is formed by heating at 0 ° C. for 1 hour. When forming the liquid-repellent coating 4, spin coating is performed while blowing air from the back surface side of the ink ejection surface 3 so that Cytop does not enter the inside of the ink ejection hole 2.

Next, as shown in FIG. 3, a dry film resist, which is a negative photosensitive resin film 11 having a thickness of 25 μm, is preliminarily heated to a temperature of 60 ° C. to 80 ° C. and the liquid repellency of the nozzle plate 1 is increased. The coating 4 is coated with a laminator.

After that, the area of the ink ejection surface 3 excluding the periphery of the ink ejection hole 2 is masked so that the photosensitive resin film 11 remains around the ink ejection hole 2, and the light amount from the ink ejection surface 3 side is 150 to 150 in the vertical direction. Ultraviolet (UV) irradiation of 200 mJ / cm ² is performed to perform exposure processing, and further development processing.

As a result, the photosensitive resin film 11 can be patterned into a shape that masks the liquid repellent coating 4 around the ink ejection holes 2 as shown in FIG.

Next, as shown in FIG. 5, the intermediate layer 8 and the hard carbon film 7 are sequentially laminated on the entire area on the ink ejection surface 3 side.

Here, the intermediate layer 8 is introduced to improve the adhesion between the liquid repellent coating 4 and the hard carbon film 7. In the embodiment of the present invention, the intermediate layer 8 having a laminated structure made of a combination of titanium and silicon is adopted. That is, the lower layer of the intermediate layer is formed of titanium having a thickness of 0.3 μm by the sputtering method, and the upper layer of the intermediate layer is formed of the intermediate layer 8 having a laminated structure of silicon and having a thickness of 0.5 μm.

The hard carbon film 7 is formed by plasma chemical vapor deposition (CV) using a hydrocarbon gas, specifically methane.
It is formed by the method D) using the apparatus shown in FIG.
A cathode electrode 22 for arranging the nozzle plate 1 is provided in a vacuum chamber 21 having a gas introduction port 25 and an exhaust port 26. Further, a high frequency power source 24 is connected to the cathode electrode 22 to apply high frequency power.

The conditions for forming the hard carbon film 7 formed by the plasma chemical vapor deposition (CVD) method are shown below.
The thickness of the hard carbon film 7 formed under these conditions was 5 μm. Source gas: methane Excitation method: high frequency (13.56 MHz) Excitation output: 200 W Gas pressure: 0.1 Torr Film formation rate: 20 nm / min. Processing temperature: <150 ℃

Next, as shown in FIG. 6, the photosensitive resin film 11 is immersed in an aqueous solution of sodium hydroxide having a concentration of 1% and a temperature of 30 ° C., and is irradiated with ultrasonic waves. As a result, the photosensitive resin film 11 is dissolved by the sodium hydroxide aqueous solution that enters from the ink ejection hole 2 side of the nozzle plate 1. By this dissolution, the intermediate layer 8 and the hard carbon film 7 formed on the upper surface and the side surface of the photosensitive resin film 11 are destroyed because their supports are lost.

Further, the photosensitive resin film 11 is much thicker than the intermediate layer 8 and the hard carbon film 7. For this reason, the edge pattern accuracy of the side surfaces of the intermediate layer 8 and the hard carbon film 7 remaining on the liquid repellent coating film 4 becomes substantially equal to the edge pattern accuracy of the photosensitive resin film 11.

When the photosensitive resin film 11 is removed, a liquid repellent coating 4 is formed around the ink ejection holes 2 on the ink ejection surface 3 as shown in FIG. A nozzle plate for an inkjet printer head, in which the hard carbon film 7 is formed on the coating film 4 via the intermediate layer 8, is completed.

In order to confirm the effect of the embodiment of the present invention described with reference to FIGS. 1 to 6, a sample formed by the embodiment of the present invention and a comparative sample 1 for comparison therewith
And 3 samples for comparison were manufactured.

As a comparative sample 1, a coating type fluororesin, trade name CYTOP (Asahi Glass Co., Ltd.) was used.
A liquid-repellent coating 4 was formed by coating the surface of the ink ejection surface 3 with a film thickness of 5 microns to form a nozzle plate. That is, the liquid-repellent coating 4 is formed flat on the entire surface of the ink ejection surface 3 of the nozzle plate 1 as shown in FIG.

As a comparative sample 2, a step portion having a height of 5 μm was previously formed in the peripheral region of the ink ejection hole 2 on the ink ejection surface 3 side, and the peripheral region of the ink ejection hole 2 was 5 μm lower than this step portion. Molded to the position, and then coated with a coating type fluororesin CYTOP (Asahi Glass Co., Ltd.) with a film thickness of 0.5 micron on the entire ink ejection surface 3 by a spin coating method. Liquid coating 4 was formed. That is, the sample 2 for comparison is prepared by forming the periphery of the ink ejection hole 2 to be 5 microns lower so that the blade does not directly contact the periphery of the ink ejection hole 2.

Then, with a rubber blade, 20 g /
A wiping test was conducted in which the pigment-based ink containing carbon black was dropped onto the ink ejection surface side at a contact pressure of cm ² while sliding on the ink ejection surface side 10,000 times in one direction. After that, an inkjet head was assembled using the nozzle plate used for this wiping test, a pigment-based ink was injected, and a discharge test was performed.

As a result, the nozzle plate for an ink jet printer head formed according to the embodiment of the present invention in which the hard carbon film is formed does not cause deterioration of the liquid repellency around the ink ejection holes after the wiping test. Furthermore, no abnormality was found in the ink ejection test.

However, in the comparative sample 1 in which the liquid-repellent coating 4 was formed in a flat shape on the ink ejection surface 3 side, the liquid repellency disappeared after the wiping test, and further foreign matter was observed to adhere inside the ink ejection holes. Was done. Further, in the ink ejection test, no ink was ejected.

In the comparative sample 2 in which the liquid-repellent coating 4 was formed on the entire surface on which the step was formed, the liquid-repellent property was good after the wiping test, but foreign matter was observed to adhere to the inside of the ink discharge hole, and discharge was performed. In the test, a phenomenon in which the ink ejection direction was bent was observed.

As can be seen from the above results, the nozzle plate for an ink jet printer head according to the present invention having a hard carbon film has excellent wiping resistance, does not cause deterioration of liquid repellency, and enables stable ink ejection. I was able to confirm that.

Next, a structure of a nozzle plate for an ink jet printer head and a manufacturing method thereof according to a second embodiment of the present invention will be described with reference to the drawings. First, the structure of the nozzle plate for an inkjet printer head according to the second embodiment of the present invention will be described with reference to the sectional view of FIG.

As shown in FIG. 12, the nozzle plate 1 for an ink jet printer head has a liquid repellent coating 4 coated around the ink ejection holes 2 on the ink ejection surface 3. Further, an intermediate layer 8 is provided on the surface of the ink ejection surface 3 outside the liquid repellent coating film 4, and a hard carbon film 7 is formed via the intermediate layer 8.

The structure in which the hard carbon film 7 is provided with steps on the liquid-repellent coating 4 shown in FIG. 12 can protect the liquid-repellent coating 4 against wiping of a blade made of a rubber material during cleaning. It will be possible.

Next, a manufacturing method for forming the nozzle plate 1 shown in FIG. 12 will be described with reference to FIGS. 1 and 7 to 12. FIG. 1 is a perspective view showing a thin plate nozzle plate for an inkjet printer head to which a manufacturing method according to an embodiment of the present invention is applied. 7 to 12 show a method of manufacturing a nozzle plate for an inkjet printer head in a second embodiment of the present invention, and are process sectional views in which an area around an ink ejection hole is enlarged. Hereinafter, the perspective view of FIG. 1 and FIG.
From now on, the description will be made with reference to the sectional view of FIG.

First, as shown in FIGS. 1 and 7, in order to manufacture a nozzle plate for an ink jet printer head according to the present invention, first, a circular shape for ejecting ink having a length of 50 mm, a width of 5 mm and a thickness of 0.1 mm. The liquid-repellent coating 4 is formed on the entire surface of the ink ejection surface 3 of the nozzle plate 1 having the through holes. The nozzle plate 1 is manufactured by an electroforming method, and its material is nickel.

The diameter of the ink ejection hole 2 on the side of the ink ejection surface 3 is 35 μm, and the diameter of the back surface thereof is 100 μm. Since the ink is supplied smoothly and ejected straight, the cross section of the ink ejection hole 2 is thus tapered.

In the second embodiment of the present invention, as the liquid-repellent coating 4, CYTOP (trade name) (Asahi Glass Co., Ltd.), which is a coating type fluororesin by spin coating, is used as an ink with a thickness of 0.5 μm. It is formed so as to cover the surface of the ejection surface 3, and then heated at a temperature of 150 ° C. for 1 hour to form the liquid repellent coating film 4. At this time, spin coating is performed while blowing air from the back surface of the ink ejection surface 3 so that CYTOP does not enter the inside of the ink ejection hole 2.

Next, as shown in FIG. 8, a dry film resist, which is a negative photosensitive resin film 11 having a film thickness of 25 μm, is preliminarily heated to a temperature of 60 ° C. to 80 ° C. and a liquid repellent coating film on the nozzle plate. Coat the upper surface of 4 with a laminator.

Thereafter, the area of the ink ejection surface 3 is masked except for the periphery of the ink ejection hole 2 so that the photosensitive resin film 11 remains in the area around the ink ejection hole 2, and the amount of light in the vertical direction is increased from the ink ejection surface 3 side. Ultraviolet (UV) irradiation of 150 to 200 mJ / cm ² is performed to perform exposure processing, and further development processing.

As a result, the photosensitive resin film 11 can be patterned into a shape that masks the liquid-repellent coating 4 around the ink ejection holes 2 as shown in FIG.

Next, as shown in FIG. 10, by using the photosensitive resin film 11 as an etching mask, the repellency exposed from the photosensitive resin film 11 on the ink ejection surface 3 is plasma-etched in an oxygen gas atmosphere. The liquid coating 4 is removed by etching.

Next, as shown in FIG. 11, the intermediate layer 8 and the hard carbon film 7 are sequentially laminated on the entire area on the ink ejection surface 3 side.

The intermediate layer 8 is formed to improve the adhesion between the liquid repellent coating 4 and the hard carbon film 7. In the second embodiment of the present invention, a laminated film made of a combination of titanium and silicon is adopted as the intermediate layer 8. That is, the film thickness of the lower layer of the intermediate layer is 0.
Intermediate layer 8 having a laminated structure of titanium having a thickness of 3 microns and further having an upper layer of an intermediate layer made of silicon and having a thickness of 0.5 micron.
To form

The hard carbon film 7 is formed by plasma chemical vapor deposition (CV) using a hydrocarbon gas, specifically methane.
It is formed by the method D) using the apparatus shown in FIG.
A cathode electrode 22 for arranging the nozzle plate 1 is provided in a vacuum chamber 21 having a gas introduction port 25 and an exhaust port 26. Further, a high frequency power source 24 is connected to the cathode electrode 22 to apply high frequency power.

The conditions for forming the hard carbon film 7 formed by the plasma chemical vapor deposition (CVD) method are shown below.
The thickness of the hard carbon film 7 formed under these conditions was 5 μm. Source gas: methane Excitation method: high frequency (13.56 MHz) Excitation output: 200 W Gas pressure: 0.1 Torr Film formation rate: 20 nm / min. Processing temperature: <150 ℃

Next, as shown in FIG. 6, the photosensitive resin film 11 is immersed in an aqueous solution of sodium hydroxide having a concentration of 1% and a temperature of 30 ° C., and is irradiated with ultrasonic waves. As a result, the photosensitive resin film 11 is dissolved by the sodium hydroxide aqueous solution that enters from the ink ejection hole 2 side of the nozzle plate. Due to this dissolution, the intermediate layer 8 and the hard carbon film 7 formed on the upper surface and the side surface of the photosensitive resin film 11 are destroyed because their supports are lost.

Further, the photosensitive resin film 11 is much thicker than the intermediate layer 8 and the hard carbon film 7. For this reason, the edge pattern accuracy of the side surfaces of the intermediate layer 8 and the hard carbon film 7 remaining on the ink ejection surface 3 becomes substantially equal to the edge pattern accuracy of the photosensitive resin film 11.

As a result of the above processing steps, the liquid repellent coating 4 is coated around the ink ejection holes 2 on the ink ejection surface 3 as shown in FIG. A nozzle plate for an inkjet printer head is completed in which the intermediate layer 8 is formed on the ejection surface 3 and the hard carbon film 7 is formed via the intermediate layer 8.

In the second embodiment of the present invention described with reference to FIGS. 7 to 12, the intermediate layer 8 is formed directly on the ink ejection surface 3, and the hard carbon film 7 is formed through the intermediate layer 8. Is forming. Therefore, stronger adhesion can be obtained between the intermediate layer 8 and the hard carbon film 7.

In order to confirm the effect of the second embodiment of the present invention described with reference to FIGS. 1 and 7 to 12, a sample formed according to the second embodiment of the present invention will be compared with this. Three types of samples, Comparative Sample 1 and Comparative Sample 2, were manufactured.

As a comparative sample 1, a coating type fluororesin, trade name CYTOP (Asahi Glass Co., Ltd.) was used.
A liquid-repellent coating 4 was formed by coating the surface of the ink ejection surface 3 with a film thickness of 5 microns to form a nozzle plate. That is, a liquid-repellent coating 4 is formed on the entire surface of the ink ejection surface 3 of the nozzle plate 1 as shown in FIG.

As a sample 2 for comparison, a step portion having a height of 5 μm was previously formed in the peripheral region of the ink discharge hole 2 on the ink discharge surface 3 side, and the peripheral region of the ink discharge hole 2 was 5 μm lower than this step portion. Molded to the position, and then coated with a coating type fluororesin CYTOP (Asahi Glass Co., Ltd.) with a film thickness of 0.5 micron on the entire ink ejection surface 3 by a spin coating method. Liquid coating 4 was formed. That is, the sample 2 for comparison is prepared by forming the periphery of the ink ejection hole 2 to be 5 microns lower so that the blade does not directly contact the periphery of the ink ejection hole 2.

Then, with a rubber blade, 20 g /
A wiping test was conducted in which the pigment-based ink containing carbon black was dropped onto the ink ejection surface side at a contact pressure of cm ² while sliding on the ink ejection surface side 10,000 times in one direction. After that, an inkjet head was assembled using the nozzle plate used for this wiping test, a pigment-based ink was injected, and a discharge test was performed.

As a result, the nozzle plate for an ink jet printer head formed according to the second embodiment of the present invention in which the hard carbon film is formed does not cause deterioration of liquid repellency around the ink ejection holes after the wiping test. . further,
No abnormalities were found in the ink ejection test.

However, in the comparative sample 1 in which the liquid-repellent coating 4 was formed in a flat shape on the ink ejection surface 3 side, the liquid repellency disappeared after the wiping test, and further foreign matter was observed to adhere inside the ink ejection holes. Was done. Further, in the ink ejection test, no ink was ejected.

In the comparative sample 2 in which the liquid-repellent coating 4 was formed on the entire surface having the step difference, after the wiping test, although the liquid-repellent property was good, foreign matter was observed to be adhered to the inside of the ink discharge hole, and the discharge test was performed. Then, it was observed that the ink ejection direction was bent.

As can be seen from the above results, the nozzle plate for an ink jet printer head in the second embodiment of the present invention in which the hard carbon film is formed has excellent wiping resistance, does not cause deterioration of liquid repellency, It was confirmed that the stable discharge was possible.

Next, the structure of a nozzle plate for an ink jet printer head in the third embodiment of the present invention and the manufacturing method thereof will be described with reference to the drawings. First, the structure of the nozzle plate for an inkjet printer head in the third embodiment of the present invention will be described with reference to the sectional view of FIG.

As shown in FIG. 17, the nozzle plate for an ink jet printer head has a liquid-repellent coating 4 coated around the ink ejection holes 2 on the ink ejection surface 3. Further, a hard carbon film 7 is directly formed on the surface of the liquid repellent coating film 4.

The structure in which the hard carbon film 7 is provided with a step on the liquid-repellent coating 4 shown in FIG. 17 protects the liquid-repellent coating 4 against wiping of a blade made of a rubber material during cleaning. Will be possible.

Next, the manufacturing method of the third embodiment for forming the nozzle plate having the structure shown in FIG. 17 will be described with reference to FIGS.
It will be described with reference to FIGS. FIG. 1 is a perspective view showing a thin plate nozzle plate for an inkjet printer head to which a manufacturing method according to an embodiment of the present invention is applied. FIG.
17 to 17 show a method of manufacturing a nozzle plate for an inkjet printer head according to a third embodiment of the present invention, which is a process cross-sectional view for enlarging a peripheral region of an ink ejection hole. Hereinafter, description will be made with reference to the perspective view of FIG. 1 and the cross-sectional views of FIGS. 13 to 17.

First, as shown in FIGS. 1 and 13, in order to manufacture a nozzle plate for an ink jet printer head according to a third embodiment of the present invention, first, a length of 50 mm,
A liquid-repellent coating 4 is formed on the entire surface of the ink ejection surface 3 of the nozzle plate 1 having a circular through hole having a width of 5 mm and a thickness of 0.1 mm. The nozzle plate 1 is manufactured by electroforming, and the material of the nozzle plate 1 is nickel.

The diameter of the ink ejection hole 2 on the ink ejection surface 3 side is 35 μm, and the diameter of the back surface thereof is 100 μm, which is tapered. Since the ink is supplied smoothly and is ejected straight, the cross-sectional shape is tapered in this way.

In the liquid repellent coating film 4 of the third embodiment of the present invention, a coating type fluororesin, Cytop (Asahi Glass Co., Ltd.), which is a coating type fluororesin, is used as an ink with a thickness of 0.5 μm. Cover the surface of the discharge surface 3 and then the temperature is 150 ℃
And heated for 1 hour to form the liquid repellent coating film 4. When the liquid repellent coating 4 is formed, spin coating is performed while blowing air from the back surface of the ink ejection surface 3 so that Cytop does not enter the inside of the ink ejection hole 2.

Next, as shown in FIG. 14, a photosensitive resin film 11 which is a negative photosensitive resin film having a thickness of 25 μm is preliminarily heated to a temperature of 60 ° C. to 80 ° C. and a liquid repellent coating film on the nozzle plate. 4 is coated using a laminator.

After that, the region of the ink ejection surface 3 excluding the periphery of the ink ejection hole 2 is masked so that the photosensitive resin film 11 remains around the ink ejection hole 2, and the light amount of 150 to 150 is emitted in the vertical direction from the ink ejection surface 3 side. Ultraviolet (UV) irradiation of 200 mJ / cm ² is performed to perform exposure processing, and further development is performed.

As a result, the photosensitive resin film 11 is patterned so as to mask the liquid repellent coating 4 around the ink ejection holes 2 as shown in FIG.

Next, the photosensitive resin film 11 on the ink ejection surface 3 is subjected to plasma treatment in an oxygen gas atmosphere.
Hydroxyl groups and carbonyl groups are introduced into the surface of the liquid-repellent coating 4 exposed from the inside to modify the liquid-repellent coating 4 to be lyophilic.

As a result, the hard carbon film 7 can be directly formed on the liquid repellent film 4 exposed on the ink ejection surface 3. Then, as shown in FIG. 16, the hard carbon film 7 is formed over the entire area on the ink ejection surface 3 side.

The hard carbon film 7 is formed by plasma chemical vapor deposition (CV) using a hydrocarbon gas, specifically methane.
It is formed by the method D) using the apparatus shown in FIG.
A cathode electrode 22 for arranging the nozzle plate 1 is provided in a vacuum chamber 21 having a gas introduction port 25 and an exhaust port 26. Further, a high frequency power source 24 is connected to the cathode electrode 22 to apply high frequency power.

The conditions for forming the hard carbon film 7 formed by the plasma chemical vapor deposition (CVD) method are shown below.
The thickness of the hard carbon film 7 formed under these conditions was 5 μm. Source gas: methane Excitation method: high frequency (13.56 MHz) Excitation output: 200 W Gas pressure: 0.1 Torr Film formation rate: 20 nm / min. Processing temperature: <150 ℃

Then, the photosensitive resin film 11 is heated to a temperature of 3
Immersion in a 0% aqueous solution of 1% sodium hydroxide,
Irradiate with ultrasonic waves. As a result, the photosensitive resin film 11
Is dissolved by an aqueous sodium hydroxide solution that enters from the ink ejection hole 2 side of the nozzle plate. Due to this dissolution, the hard carbon film 7 formed on the upper surface and the side surface of the photosensitive resin film 11 is destroyed because the support is lost.

Further, the photosensitive resin film 11 is much thicker than the hard carbon film 7. Therefore, the edge pattern accuracy of the side surface portion of the hard carbon film 7 remaining on the liquid repellent coating film 4 becomes substantially equal to the edge pattern accuracy of the photosensitive resin film 11.

Through the treatment steps described above, the liquid repellent coating 4 is coated around the ink ejection holes 2 on the ink ejection surface 3 as shown in FIG. 17, and the upper surface of the liquid repellent coating 4 is hard. A nozzle plate for an inkjet printer head that forms the carbon film 7 is completed.

In order to confirm the effect of the embodiment of the present invention described with reference to FIG. 1 and FIGS. 13 to 17, a sample formed by the embodiment of the present invention and a comparative sample 1 for comparison therewith And 3 samples for comparison were manufactured.

As a comparative sample 1, a coating type fluororesin having a trade name of CYTOP (Asahi Glass Co., Ltd.) was used.
A liquid-repellent coating 4 was formed by coating the surface of the ink ejection surface 3 with a film thickness of 5 microns to form a nozzle plate. That is, a liquid-repellent coating 4 is formed flat on the entire surface of the ink ejection surface 3 of the nozzle plate 1 as shown in FIG.

As a comparative sample 2, a step portion was previously formed on the ink ejection surface 3 side in a region around the ink ejection hole 2 with a height of 5 microns, and the region around the ink ejection hole 2 was lower than the step portion by 5 microns. Molded to the position, and then coated with a coating type fluororesin CYTOP (Asahi Glass Co., Ltd.) with a film thickness of 0.5 micron on the entire ink ejection surface 3 by a spin coating method. Liquid coating 4 was formed. That is, the sample 2 for comparison is prepared by forming the periphery of the ink ejection hole 2 to be 5 microns lower so that the blade does not directly contact the periphery of the ink ejection hole 2.

Then, with a rubber blade, 20 g /
A wiping test was conducted in which the pigment-based ink containing carbon black was dropped onto the ink ejection surface side at a contact pressure of cm ² while sliding on the ink ejection surface side 10,000 times in one direction. After that, an inkjet head was assembled using the nozzle plate used for this wiping test, a pigment-based ink was injected, and a discharge test was performed.

As a result, the nozzle plate for an ink jet printer head formed according to the embodiment of the present invention in which the hard carbon film is formed does not cause deterioration of the liquid repellency around the ink ejection holes after the wiping test. Furthermore, no abnormality was found in the ink ejection test.

However, in the comparative sample 1 in which the liquid-repellent coating 4 was formed in a flat shape on the ink ejection surface 3 side, the liquid repellency disappeared after the wiping test, and further, the adherence of foreign matter inside the ink ejection holes was observed. Was done. Further, no ink was ejected in the ink ejection test.

In the comparative sample 2 in which the liquid-repellent coating 4 was formed on the entire surface on which the step was formed, the liquid-repellent property was good after the wiping test, but foreign matter was observed to adhere to the inside of the ink discharge hole, and discharge was performed. In the test, a phenomenon in which the ink ejection direction was bent was observed.

As can be seen from the above results, the nozzle plate for an ink jet printer head according to the present invention, which has a hard carbon film formed thereon, has excellent wiping resistance, does not cause deterioration of liquid repellency, and enables stable ink ejection. I was able to confirm that.

Next, the structure of a nozzle plate for an ink jet printer head and the manufacturing method thereof according to the fourth embodiment of the present invention will be described with reference to the drawings. First, the structure of the nozzle plate for an ink jet printer head in the fourth embodiment of the present invention will be described with reference to the sectional view of FIG.

As shown in FIG. 23, the nozzle plate for an ink jet printer head has a liquid repellent coating 4 coated around the ink ejection holes 2 on the ink ejection surface 3. further,
A hard carbon film 7 is directly formed on the surface of the ink ejection surface 3 in the outer region of the liquid repellent film 4.

By adopting a structure having a step in which the hard carbon film 7 thicker than the liquid repellent film 4 is provided on the nozzle plate having the structure shown in FIG. 23, wiping of the blade made of rubber material at the time of cleaning It becomes possible to protect the liquid-repellent coating 4.

Next, the manufacturing method of the fourth embodiment for forming the nozzle plate having the structure shown in FIG. 23 will be described with reference to FIGS.
This will be described with reference to FIGS. FIG. 1 is a perspective view showing a thin plate nozzle plate for an inkjet printer head to which a manufacturing method according to an embodiment of the present invention is applied. FIG.
23 to 23 show a method of manufacturing a nozzle plate for an inkjet printer head according to a fourth embodiment of the present invention, which is a process sectional view of enlarging the ink ejection hole portion. Hereinafter, FIG.
Will be described with reference to the perspective view of FIG.

First, as shown in FIGS. 1 and 18, in order to manufacture a nozzle plate for an ink jet printer head according to a fourth embodiment of the present invention, first, a length of 50 mm,
A liquid-repellent coating 4 is formed on the entire surface of the ink ejection surface 3 of the nozzle plate 1 having a circular penetrating hole with a width of 5 mm and a thickness of 0.1 mm. The nozzle plate 1 is manufactured by an electroforming method, and the nozzle plate 1 is composed of a nickel plate.

The diameter of the ink ejection hole 2 on the ink ejection surface 3 side is 35 μm, and the diameter of the back surface thereof is 100 μm, which is tapered. Since the ink is supplied smoothly and ejected straight, the cross section thereof is tapered in this way.

In the liquid-repellent coating 4 of the fourth embodiment of the present invention, a coating type fluororesin, Cytop (Asahi Glass Co., Ltd.), which is a coating type fluororesin, is used as an ink with a thickness of 0.5 μm. Cover the surface of the discharge surface 3 and then the temperature is 150 ℃
And heated for 1 hour to form the liquid repellent coating film 4. When forming the liquid-repellent coating 4, spin coating is performed while blowing air from the back surface of the ink ejection surface 3 so that Cytop does not enter the inside of the ink ejection hole 2.

Next, as shown in FIG. 19, a dry film resist, which is a negative photosensitive resin film 11 having a thickness of 25 μm, is preliminarily heated to a temperature of 60 ° C. to 80 ° C., and the liquid repellent coating 4 on the nozzle plate 4 is heated. Coat with a laminator on top.

After that, the region of the ink ejection surface 3 excluding the periphery of the ink ejection hole 2 is masked so that the photosensitive resin film 11 remains around the ink ejection hole 2, and the light amount of 150 to 150 is emitted in the vertical direction from the ink ejection surface 3 side. Ultraviolet (UV) irradiation of 200 mJ / cm ² is performed to perform exposure processing, and further development is performed.

As a result, the photosensitive resin film 11 can be patterned into a shape that masks the liquid repellent coating 4 around the ink ejection holes 2 as shown in FIG.

Next, as shown in FIG. 21, the liquid-repellent coating 4 exposed from the photosensitive resin film 11 on the ink ejection surface 3 by plasma etching in an oxygen gas atmosphere.
Are removed by etching. At this time, minute irregularities are formed by plasma etching on the surface of the ink ejection surface 3 from which the liquid-repellent coating 4 has been removed.

As a result, the hard carbon film 7 formed in the next step is directly attached to the ink ejection surface 3 by the anchor effect.
It can be formed on. Next, as shown in FIG. 22, the hard carbon film 7 is formed on the entire area of the ink ejection surface 3.

The hard carbon film 7 is formed by plasma chemical vapor deposition (CV) using a hydrocarbon gas, specifically methane.
It is formed by the method D) using the apparatus shown in FIG.
A cathode electrode 22 for arranging the nozzle plate 1 is provided in a vacuum chamber 21 having a gas introduction port 25 and an exhaust port 26. Further, a high frequency power source 24 is connected to the cathode electrode 22 to apply high frequency power.

The conditions for forming the hard carbon film 7 formed by the plasma chemical vapor deposition (CVD) method are shown below.
The thickness of the hard carbon film 7 formed under these conditions was 5 μm. Source gas: methane Excitation method: high frequency (13.56 MHz) Excitation output: 200 W Gas pressure: 0.1 Torr Film formation rate: 20 nm / min. Processing temperature: <150 ℃

Then, the photosensitive resin film 11 is heated to a temperature of 3
Immersion in a 0% aqueous solution of 1% sodium hydroxide,
Irradiate with ultrasonic waves. As a result, the photosensitive resin film 11
Is dissolved by the aqueous sodium hydroxide solution that has entered from the ink ejection hole 2 side of the nozzle plate. Due to this dissolution, the hard carbon film 7 formed on the upper surface and the side surface of the photosensitive resin film 11 is destroyed because the support is lost.

Further, the photosensitive resin film 11 is much thicker than the hard carbon film 7. Therefore, the edge pattern accuracy of the side surface of the hard carbon film 7 remaining on the ink ejection surface 3 becomes substantially equal to the edge pattern accuracy of the photosensitive resin film 11.

Through the above processing steps, the liquid repellent coating 4 is coated around the ink ejection holes 2 on the ink ejection surface 3 as shown in FIG. 23, and the ink is ejected outside the liquid repellent coating 4. The nozzle plate for the inkjet printer head, in which the hard carbon film 7 is formed on the surface 3, is completed.

In order to confirm the effect of the embodiment of the present invention described with reference to FIGS. 1 and 18 to 23, the sample formed by the embodiment of the present invention and the comparative sample 1 for comparison therewith And 3 samples for comparison were manufactured.

As a comparative sample 1, a coating type fluororesin having a trade name of CYTOP (Asahi Glass Co., Ltd.) was used.
A liquid-repellent coating 4 was formed by coating the surface of the ink ejection surface 3 with a film thickness of 5 microns to form a nozzle plate. That is, a liquid-repellent coating 4 is formed flat on the entire ink ejection surface 3 of the nozzle plate 1 as shown in FIG.

As the comparative sample 2, a step portion having a height of 5 μm was previously formed in the area around the ink ejection hole 2 on the ink ejection surface 3 side, and the area around the ink ejection hole 2 was 5 μm lower than this step portion. Molded to the position, and then coated with a coating type fluororesin CYTOP (Asahi Glass Co., Ltd.) with a film thickness of 0.5 micron on the entire ink ejection surface 3 by a spin coating method. Liquid coating 4 was formed. That is, the sample 2 for comparison is prepared by forming the periphery of the ink ejection hole 2 to be 5 microns lower so that the blade does not directly contact the periphery of the ink ejection hole 2.

Then, with a rubber blade, 20 g /
A wiping test was conducted in which the pigment-based ink containing carbon black was dropped onto the ink ejection surface side at a contact pressure of cm ² while sliding on the ink ejection surface side 10,000 times in one direction. After that, a head was assembled using the nozzle plate used for this wiping test, a pigment-based ink was injected, and an ejection test was performed.

As a result, the nozzle plate for an ink jet printer head formed according to the embodiment of the present invention in which the hard carbon film is formed has no deterioration in liquid repellency around the ink ejection holes after the wiping test. Furthermore, no abnormality was found in the ink ejection test.

However, in the comparative sample 1 in which the liquid-repellent coating 4 was formed in a flat shape on the ink ejection surface 3 side, the liquid repellency disappeared after the wiping test, and further, the adherence of foreign matter inside the ink ejection holes was observed. Was done. Further, in the ink ejection test, no ink was ejected.

In the comparative sample 2 in which the liquid-repellent coating 4 was formed on the entire surface having the step, after the wiping test, although the liquid repellency was good, foreign matter was observed to be adhered to the inside of the ink discharge hole, and the discharge test was performed. Then, it was observed that the ink ejection direction was bent.

As can be seen from the above results, the nozzle plate for an ink jet printer head according to the present invention, which has a hard carbon film formed thereon, has excellent wiping resistance, does not cause deterioration of liquid repellency, and enables stable ejection of ink. I was able to confirm that.

[0133]

As is apparent from the above description of the embodiments, the nozzle plate for an ink jet printer head according to the present invention has a liquid repellent coating formed around the ink ejection holes on the ink ejection surface and a liquid repellent coating on the outside thereof. A hard carbon film having a thickness larger than that of the conductive film is formed. As a result, the nozzle plate of the present invention can protect the liquid-repellent coating and can impart excellent durability to wiping of the ink ejection surface. As a result, there is an effect of improving the reliability of the inkjet printer.

[Brief description of drawings]

FIG. 1 is a perspective view showing the structure and manufacturing method of a thin plate nozzle plate for an inkjet printer head in an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a structure and manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 3 is a cross-sectional view showing a structure and a manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 4 is a cross-sectional view showing a structure and manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 5 is a cross-sectional view showing a structure and manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 6 is a cross-sectional view showing a structure and manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 7 is a cross-sectional view showing the structure and manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 8 is a cross-sectional view showing a structure and manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 9 is a cross-sectional view showing the structure and manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 10 is a cross-sectional view showing a structure and a manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 11 is a cross-sectional view showing a structure and manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 12 is a cross-sectional view showing a structure and manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 13 is a cross-sectional view showing the structure and manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 14 is a cross-sectional view showing a structure and manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 15 is a cross-sectional view showing a structure and a manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 16 is a cross-sectional view showing a structure and manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 17 is a cross-sectional view showing a structure and manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 18 is a cross-sectional view showing a structure and manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 19 is a cross-sectional view showing a structure and manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 20 is a cross-sectional view showing a structure and manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 21 is a cross-sectional view showing the structure and manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 22 is a cross-sectional view showing the structure and manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 23 is a cross-sectional view showing a structure and manufacturing method of a nozzle plate for an inkjet printer head in an example of the present invention.

FIG. 24 is a sectional view showing a processing apparatus for forming a hard carbon film in the example of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Nozzle plate 2 Ink ejection hole 3 Ink ejection surface 4 Liquid repellent film 7 Hard carbon film 8 Intermediate layer 11 Photosensitive resin film

Claims (10)

[Claims] 1. A penetrating ink ejection hole for ejecting ink to a predetermined position of a flat plate-shaped member having an ink ejection surface on one side, and a repellant coating around the ink ejection hole on the ink ejection surface. A nozzle plate for an inkjet printer head, which has a liquid coating and a hard carbon film which is provided outside the periphery of the ink ejection hole and has a larger film thickness than the liquid repellent coating. 2. The nozzle plate for an ink jet printer head according to claim 1, wherein the hard carbon film is coated on an intermediate layer formed on the liquid repellent coating film. 3. The hard carbon film is coated on an intermediate layer formed on the ink ejection surface.
A nozzle plate for an inkjet printer head as described in 1. 4. The nozzle plate for an ink jet printer head according to claim 1, wherein the hard carbon film is coated on the liquid repellent film. 5. The nozzle plate for an inkjet printer head according to claim 1, wherein the hard carbon film covers the ink ejection surface. 6. A step of coating a liquid repellent coating on the periphery of the ink ejection hole on the ink ejection surface, and a step of forming a hard carbon film thicker than the thickness of the liquid repellent coating on the outer side of the periphery of the ink ejection hole. A method for manufacturing a nozzle plate for an inkjet printer head, which comprises: 7. A step of coating a liquid repellent coating on the ink ejection surface, and after coating a photosensitive resin film on the liquid repellent coating,
A step of masking the periphery of the ink ejection hole by performing exposure processing and development processing, a step of sequentially laminating an intermediate layer and a hard carbon film over the entire ink ejection surface, and an intermediate step of laminating a photosensitive resin film and a photosensitive resin film. The method for producing a nozzle plate for an inkjet printer head according to claim 6, further comprising the step of removing the layer and the hard carbon film. 8. A step of coating a liquid repellent coating on the ink ejection surface, and after coating a photosensitive resin film on the liquid repellent coating,
A step of masking the periphery of the ink ejection hole by performing an exposure process and a development process, a step of removing the exposed liquid repellent coating film, and a step of sequentially laminating an intermediate layer and a hard carbon film over the entire ink ejection surface. 7. The method for producing a nozzle plate for an inkjet printer head according to claim 6, further comprising: a step of removing the photosensitive resin film, the intermediate layer laminated on the photosensitive resin film, and the hard carbon film. 9. A step of coating a liquid repellent coating on the ink ejection surface, and after coating a photosensitive resin film on the liquid repellent coating,
A step of performing a light exposure process and a development process to mask the periphery of the ink ejection hole, a step of forming a hard carbon film on the entire ink ejection surface, and a process of removing the photosensitive resin film and the hard carbon film formed on the photosensitive resin film. The method for manufacturing a nozzle plate for an inkjet printer head according to claim 6, further comprising: 10. A step of coating a liquid-repellent coating on an ink ejection surface, and a step of coating a photosensitive resin film on the liquid-repellent coating and then performing an exposure process and a development process to mask the periphery of the ink ejection hole. , A step of removing the exposed liquid-repellent coating, a step of forming a hard carbon film over the entire ink ejection surface, and a step of removing the photosensitive resin film and the hard carbon film formed on the photosensitive resin film The method for manufacturing a nozzle plate for an inkjet printer head according to claim 6, further comprising: