JPH0975832A - Boiler tube with corrosion-resistant and wear-resistant surface flame-sprayed layer - Google Patents
Boiler tube with corrosion-resistant and wear-resistant surface flame-sprayed layerInfo
- Publication number
- JPH0975832A JPH0975832A JP7257244A JP25724495A JPH0975832A JP H0975832 A JPH0975832 A JP H0975832A JP 7257244 A JP7257244 A JP 7257244A JP 25724495 A JP25724495 A JP 25724495A JP H0975832 A JPH0975832 A JP H0975832A
- Authority
- JP
- Japan
- Prior art keywords
- boiler tube
- resistant
- sprayed layer
- flame
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000005260 corrosion Methods 0.000 title claims abstract description 9
- 230000007797 corrosion Effects 0.000 title claims abstract description 9
- 238000007789 sealing Methods 0.000 claims abstract description 23
- 239000000956 alloy Substances 0.000 claims abstract description 22
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims abstract description 10
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 9
- 239000011195 cermet Substances 0.000 claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims abstract description 6
- 239000002184 metal Substances 0.000 claims abstract description 6
- 229910000856 hastalloy Inorganic materials 0.000 claims abstract description 5
- 229910001026 inconel Inorganic materials 0.000 claims abstract description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 4
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims abstract description 4
- 150000004703 alkoxides Chemical class 0.000 claims abstract description 4
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 claims abstract description 4
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 4
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 4
- -1 polysiloxane Polymers 0.000 claims abstract description 4
- UFGZSIPAQKLCGR-UHFFFAOYSA-N chromium carbide Chemical compound [Cr]#C[Cr]C#[Cr] UFGZSIPAQKLCGR-UHFFFAOYSA-N 0.000 claims description 6
- 229910003470 tongbaite Inorganic materials 0.000 claims description 6
- 238000010304 firing Methods 0.000 claims description 5
- 238000000280 densification Methods 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 3
- 239000000835 fiber Substances 0.000 claims description 3
- 238000005299 abrasion Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 abstract description 9
- 239000011651 chromium Substances 0.000 abstract description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract description 2
- 230000002378 acidificating effect Effects 0.000 abstract description 2
- 229910000041 hydrogen chloride Inorganic materials 0.000 abstract description 2
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 abstract description 2
- 229920001296 polysiloxane Polymers 0.000 abstract description 2
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 abstract 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052804 chromium Inorganic materials 0.000 abstract 1
- 238000005507 spraying Methods 0.000 description 11
- 238000012360 testing method Methods 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910018487 Ni—Cr Inorganic materials 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 238000007751 thermal spraying Methods 0.000 description 2
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 2
- LSNNMFCWUKXFEE-UHFFFAOYSA-N Sulfurous acid Chemical compound OS(O)=O LSNNMFCWUKXFEE-UHFFFAOYSA-N 0.000 description 1
- 229910009043 WC-Co Inorganic materials 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
Landscapes
- Coating By Spraying Or Casting (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、ボイラーに使用さ
れる耐久性を向上したボイラーチューブに関し、特に耐
食性、耐摩耗性を向上した表面溶射溶射層を有するボイ
ラーチューブに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a boiler tube used for a boiler having improved durability, and more particularly to a boiler tube having a surface sprayed sprayed layer having improved corrosion resistance and wear resistance.
【０００２】[0002]
【従来の技術】従来から使用されている石炭焚きボイラ
ー、廃材焼却型ボイラー等において、ボイラーチューブ
は発生する亜硫酸ガスや塩化水素系ガスなど酸性ガスや
蒸気に曝され、また流動床ボイラーでは、飛散する粒子
による摩耗等の苛酷な使用条件に曝されるため、耐久性
の高いことが必要とされている。そして耐久性向上のた
め、耐熱性耐食性に優れた高合金材料を使用したり、配
管表面に保護溶射層を形成することが行なわれている。2. Description of the Related Art In conventional coal-fired boilers, waste material incineration type boilers, etc., boiler tubes are exposed to acid gases and vapors such as sulfurous acid gas and hydrogen chloride-based gas, and in fluidized bed boilers, they are scattered. It is required to have high durability because it is exposed to severe usage conditions such as wear due to the particles that form. In order to improve durability, high alloy materials excellent in heat resistance and corrosion resistance are used, and a protective sprayed layer is formed on the surface of piping.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、高合金
材料は価格が高く加工費も嵩むため経済的ではない。ま
た、溶射表面被覆は十分な技術が確立されておらず、火
炎や飛散粒子に対する高温腐食、耐摩耗性が十分ではな
かった。したがってボイラーチューブ故障によるボイラ
ーの稼動率低下を避けることができなかった。本発明は
前記したような従来技術におけるボイラーチューブ短寿
命による設備稼動率の低下および修繕費用高騰という問
題点を解決し、耐久性が高く、経済性のあるボイラーチ
ューブを提供することを目的としている。However, high alloy materials are not economical because they are expensive and processing costs are high. In addition, sufficient technology for thermal spray surface coating has not been established, and high temperature corrosion and wear resistance to flames and flying particles have not been sufficient. Therefore, it was unavoidable to reduce the operating rate of the boiler due to the failure of the boiler tube. SUMMARY OF THE INVENTION It is an object of the present invention to solve the above-mentioned problems of a decrease in equipment operating rate due to a short service life of a boiler tube and an increase in repair costs, and to provide a boiler tube having high durability and economic efficiency. .
【０００４】[0004]
【課題を解決するための手段】上記目的を達成するた
め、本発明者等は鋭意研究を重ねた結果、ボイラーチュ
ーブ表面に形成する過程の溶射皮膜緻密化が、ボイラー
チューブ使用寿命に密接な関連を有することを知見し、
本発明を完成するに至った。すなわち、前記知見に基づ
いてなされた本発明は、耐食耐摩耗性表面溶射層形成過
程中に組織緻密化の封孔処理を行なった溶射層を表面に
有することを特徴とするボイラーチューブを要旨として
いる。[Means for Solving the Problems] In order to achieve the above object, the inventors of the present invention have conducted extensive studies, and as a result, densification of the thermal spray coating in the process of forming on the boiler tube surface is closely related to the service life of the boiler tube. Found that
The present invention has been completed. That is, the present invention made on the basis of the above-mentioned findings is summarized as a boiler tube characterized in that it has a sprayed layer that has been subjected to a sealing treatment for tissue densification during the process of forming a corrosion resistant and abrasion resistant surface sprayed layer on the surface. There is.
【０００５】また、クロム炭化物含有サーメット、クロ
ム炭化物と自溶性合金、ハステロイ合金またはインコネ
ル合金のいずれかによる溶射皮膜の形成過程において、
焼成によって、金属酸化物を生成するクロム酸系、金属
アルコキシドアルコール系、珪酸塩系等の無機系封孔剤
あるいは耐熱性化合物を生成するフッ素樹脂系、ポリシ
ロキサン（シリコン）またはチラノ繊維系等の有機系封
孔剤のいずれか１種以上を使用して封孔処理をした組織
緻密化溶射層を有するボイラーチューブも本発明の要旨
である。Further, in the process of forming a thermal spray coating of cermet containing chromium carbide, chromium carbide and self-fluxing alloy, Hastelloy alloy or Inconel alloy,
Inorganic sealing agents such as chromic acid type, metal alkoxide alcohol type, and silicate type that generate metal oxides by firing, or fluororesin type that generates heat resistant compounds, polysiloxane (silicon), or tyranno fiber type A boiler tube having a texture-densified sprayed layer that has been subjected to a pore-sealing treatment using any one or more organic pore-sealing agents is also the subject matter of the present invention.
【０００６】[0006]
【発明の実施の形態】本発明の構成と作用を説明する。
本発明において、ボイラーチューブ表面に形成する溶射
皮膜の素材としては、クロム炭化物含有サーメット、ク
ロム炭化物と自溶性合金、ハステロイ合金またはインコ
ネル合金のいずれかを用いる。DESCRIPTION OF THE PREFERRED EMBODIMENTS The construction and operation of the present invention will be described.
In the present invention, as a material of the thermal spray coating formed on the surface of the boiler tube, any one of chromium carbide-containing cermet, chromium carbide and self-fluxing alloy, Hastelloy alloy or Inconel alloy is used.
【０００７】Ｃｒ3Ｃ2は、耐熱性のある高硬度のセラミ
ックスであり、酸性雰囲気に対する強い耐久性もある。
タングステン炭化物（ＷＣ）等は、高硬度であるが耐熱
性が低く、使用限度は５００℃程度までで、高価であ
り、Ｃｒ3Ｃ2のほうが利点が多い。Cr 3 C 2 is a heat-resistant and high-hardness ceramic, and also has strong durability against an acidic atmosphere.
Tungsten carbide (WC) and the like have high hardness but low heat resistance, are usable up to about 500 ° C., are expensive, and Cr 3 C 2 has more advantages.
【０００８】サーメット用金属として使用されるものは
耐熱性金属であることは当然であるが、ボイラーチュー
ブの使用環境に対して十分な抵抗力が必要である。適切
な材料としては、Ｎｉ−Ｃｒ系合金がよく、後述する試
験結果に示されるように、５０％Ｎｉ−Ｃｒ合金、ＪＩ
Ｓ ＳＦＡ系自溶合金、ハステロイ合金およびインコネ
ル合金などを使用する。これら合金は酸性ガスに対する
耐食性に優れ、かつ高温強度も大きい。したがってボイ
ラーで発生する高温雰囲気ガスに対して強い耐性を示
す。It is natural that the metal used for the cermet is a heat resistant metal, but it is required to have sufficient resistance to the environment in which the boiler tube is used. As a suitable material, a Ni-Cr alloy is preferable, and as shown in the test results described later, 50% Ni-Cr alloy, JI
An S SFA-based self-fluxing alloy, a Hastelloy alloy, an Inconel alloy, or the like is used. These alloys have excellent corrosion resistance against acid gas and have high strength at high temperature. Therefore, it has strong resistance to the high temperature atmospheric gas generated in the boiler.
【０００９】これらの素材を使用してボイラーチューブ
表面に溶射膜を形成する過程において、焼成により金属
酸化物を生成するクロム酸系、金属アルコキシドアルコ
ール系、珪酸塩系等の無機系封孔剤あるいは耐熱性化合
物を生成するフッ素樹脂（ＰＴＦＥ）系、ポリシロキサ
ン（シリコン）またはチラノ繊維系等の有機系封孔剤の
いずれか１種以上を使用し、焼成して封孔処理を実施す
る。In the process of forming a sprayed film on the surface of a boiler tube using these materials, an inorganic pore-sealing agent such as a chromic acid type, a metal alkoxide alcohol type, a silicate type or the like which produces a metal oxide by firing. A fluororesin (PTFE) -based, polysiloxane (silicon) or Tyranno fiber-based organic sealing agent that generates a heat-resistant compound is used, and the sealing treatment is performed by firing.
【００１０】特に溶射膜を多層で形成する場合には、溶
射工程と封孔工程を交互に行なうことにより気孔率の小
さい多層溶射膜が形成される。有機系封孔剤は比較的低
温部のボイラーチューブに好結果を示す。この場合、焼
成温度は３５０℃以上５分間で目的が達成される。自溶
合金サーメットの場合、高温における再溶融処理を行な
わなくても封孔緻密化処理を行なうことにより、他の合
金と同様の緻密な皮膜が得られる。In particular, when the sprayed film is formed in multiple layers, a multilayered sprayed film having a small porosity is formed by alternately performing the spraying process and the sealing process. Organic sealing agents show good results in boiler tubes at relatively low temperatures. In this case, the purpose is achieved when the firing temperature is 350 ° C. or higher for 5 minutes. In the case of the self-fluxing alloy cermet, a dense coating similar to that of other alloys can be obtained by performing the sealing densification treatment without performing the remelting treatment at high temperature.
【００１１】[0011]
【実施例】本発明を実施例により具体的に説明するが、
これによって本発明が限定されることはない。 実施例 本発明ボイラーチューブについて、実際の使用条件を模
した高温サンドブラスト試験によりその効果を確認し
た。この試験は、高温でのブラスティングによる摩耗減
量を測定するものである。EXAMPLES The present invention will be described specifically with reference to Examples.
This does not limit the invention. Example With respect to the boiler tube of the present invention, its effect was confirmed by a high temperature sand blast test simulating actual use conditions. This test measures the wear loss due to blasting at high temperature.
【００１２】図１に示されるように、Ａｌ2Ｏ3ショット
をサンプルの溶射皮膜上に７０度の角度で１００ｍｍの
位置から吹き付ける。溶射皮膜の摩耗減量は試験後のサ
ンプルの重量減から求めた。噴射時間は２分間で、吹き
付ける空気圧は２気圧、Ａｌ2Ｏ3ショット量は１００ｇ
／分である。またサンプルの溶射皮膜厚さは、３００μ
ｍとした。溶射皮膜の形成には表１に示す溶射パウダー
を使用し、高速ガス溶射法により溶射している。As shown in FIG. 1, shots of Al 2 O 3 are sprayed onto the sprayed coating of the sample from a position of 100 mm at an angle of 70 degrees. The wear loss of the sprayed coating was obtained from the weight loss of the sample after the test. Injection time is 2 minutes, air pressure is 2 atm, Al 2 O 3 shot amount is 100 g
/ Min. The thickness of the thermal spray coating of the sample is 300μ.
m. The thermal sprayed powders shown in Table 1 were used to form the thermal sprayed coating, and the thermal spraying was performed by the high-speed gas thermal spraying method.
【００１３】封孔処理は表１の封孔材料を左欄から順次
その回数だけ２層毎に行ない、１回塗りのもので最終仕
上げ層の封孔処理を行なっている。なお、封孔処理後の
加熱は４５０℃×１５分間行なったのち空冷した。前記
のようにして調整したサンプルは加熱炉中で３００℃に
加熱し、取り出して試験機にセッティングした後すみや
かに試験を行なった。In the sealing treatment, the sealing material shown in Table 1 is sequentially applied every two layers from the left column, and the final finishing layer is subjected to the sealing treatment with one coating. The heating after the sealing treatment was performed at 450 ° C. for 15 minutes and then air-cooled. The sample prepared as described above was heated to 300 ° C. in a heating furnace, taken out, set in a tester, and then immediately tested.
【００１４】本発明ボイラーチューブの例はＮｏ．２〜
５、Ｎｏ．７〜１０、Ｎｏ．１７〜２０であり、Ｎｏ．
１、Ｎｏ．６、Ｎｏ．１１、Ｎｏ．１６は封孔処理をし
ない比較例である。また、Ｎｏ．２１〜２３は自溶合金
溶射、ＷＣ−Ｃｏ系、ＷＣ−ＮｉＣｒ系の溶射皮膜によ
る従来例である。An example of the boiler tube of the present invention is No. Two
5, no. 7-10, No. 17 to 20, and No.
1, No. 6, No. 11, No. 16 is a comparative example in which the sealing treatment is not performed. In addition, No. Reference numerals 21 to 23 are conventional examples of spray coatings of self-fluxing alloy, WC-Co type and WC-NiCr type.
【００１５】[0015]
【表１】 [Table 1]
【００１６】表１の結果から、本発明ボイラーチューブ
はいずれも摩耗減量が少なく、ボイラーに使用したした
場合耐久性に優れていることがわかる。また、耐酸性試
験として、基材表面に溶射皮膜を形成後封孔処理したサ
ンプルを５％硫酸溶液中に浸漬し、２０分後に取り出し
てハンマーにより溶射皮膜の剥離性を調べた。この試験
においても本発明ボイラーチューブの溶射皮膜は良好な
耐剥離性を示した。From the results shown in Table 1, it can be seen that all the boiler tubes of the present invention have a small amount of wear loss and are excellent in durability when used in a boiler. Further, as an acid resistance test, a sample obtained by forming a thermal spray coating on the surface of the base material and then sealing the sample was immersed in a 5% sulfuric acid solution, taken out 20 minutes later, and the peelability of the thermal spray coating was examined with a hammer. Also in this test, the thermal spray coating of the boiler tube of the present invention showed good peel resistance.
【００１７】[0017]
【発明の効果】本発明は以上説明したように構成されて
いるから、流動床ボイラー、石炭焚きボイラーその他の
ボイラーに使用して寿命が長く、経済的であり、設備稼
動率の向上および修繕費用節減が達成されるという優れ
た効果が奏され、産業上極めて有用である。EFFECTS OF THE INVENTION Since the present invention is constructed as described above, it can be used in fluidized bed boilers, coal-fired boilers and other boilers with a long service life, is economical, improves the facility operation rate and repairs costs. It has an excellent effect of achieving saving and is extremely useful in industry.
【図１】 本発明ボイラーチューブの溶射皮膜性能を試
験する原理の概要説明図である。FIG. 1 is a schematic explanatory view of the principle of testing the spray coating performance of the boiler tube of the present invention.
１：基材 ２：溶射皮膜 ３：Ａｌ2Ｏ3粉噴
射ノズル1: Base material 2: Thermal spray coating 3: Al 2 O 3 powder injection nozzle
Claims (4)
織緻密化の封孔処理を行なった溶射層を表面に有するこ
とを特徴とするボイラーチューブ。1. A boiler tube having a sprayed layer on the surface of which a sealing treatment for tissue densification is performed during the process of forming a corrosion-resistant and abrasion-resistant surface sprayed layer.
射層である請求項１記載のボイラーチューブ。2. The boiler tube according to claim 1, wherein the boiler tube is a sprayed layer made of cermet containing chromium carbide.
合金またはインコネル合金のいずれかよりなる溶射層で
ある請求項１記載のボイラーチューブ。3. The boiler tube according to claim 1, which is a sprayed layer made of chromium carbide and any one of a self-fluxing alloy, a Hastelloy alloy and an Inconel alloy.
ロム酸系、金属アルコキシドアルコール系、珪酸塩系等
の無機系封孔剤あるいは耐熱性化合物を生成するフッ素
樹脂系、ポリシロキサン（シリコン）またはチラノ繊維
系等の有機系封孔剤のいずれか１種以上を使用した請求
項１、２または３記載のボイラーチューブ。4. A chromic acid-based, metal alkoxide alcohol-based, or silicate-based inorganic pore-sealing agent that produces a metal oxide or a fluororesin-based polysiloxane (silicon) that produces a heat-resistant compound by firing. The boiler tube according to claim 1, 2 or 3, wherein any one or more organic sealing agents such as Tyranno fiber type are used.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7257244A JPH0975832A (en) | 1995-09-11 | 1995-09-11 | Boiler tube with corrosion-resistant and wear-resistant surface flame-sprayed layer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7257244A JPH0975832A (en) | 1995-09-11 | 1995-09-11 | Boiler tube with corrosion-resistant and wear-resistant surface flame-sprayed layer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0975832A true JPH0975832A (en) | 1997-03-25 |
Family
ID=17303701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7257244A Withdrawn JPH0975832A (en) | 1995-09-11 | 1995-09-11 | Boiler tube with corrosion-resistant and wear-resistant surface flame-sprayed layer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0975832A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6082444A (en) * | 1997-02-21 | 2000-07-04 | Tocalo Co., Ltd. | Heating tube for boilers and method of manufacturing the same |
| US6604572B2 (en) * | 1999-04-14 | 2003-08-12 | Mitsubishi Denki Kabushiki Kaisha | Pipeline device and method for its production, and heat exchanger |
| JP2004190136A (en) * | 2002-11-28 | 2004-07-08 | Tokyo Electron Ltd | Member inside plasma treatment vessel |
| JP2006283176A (en) * | 2005-04-05 | 2006-10-19 | Nippon Steel Corp | Water-cooled steel pipe structure with excellent corrosion resistance and wear resistance and its manufacturing method |
| US8043971B2 (en) | 2003-02-07 | 2011-10-25 | Tokyo Electron Limited | Plasma processing apparatus, ring member and plasma processing method |
| US8877002B2 (en) | 2002-11-28 | 2014-11-04 | Tokyo Electron Limited | Internal member of a plasma processing vessel |
| JP2014529704A (en) * | 2011-08-17 | 2014-11-13 | ゼネラル・エレクトリック・カンパニイ | Rotor seal wire groove repair |
| CN112481579A (en) * | 2020-11-27 | 2021-03-12 | 安徽盈锐优材科技有限公司 | Ceramic insulating coating and preparation method thereof |
| KR20240022658A (en) | 2021-06-30 | 2024-02-20 | 제이에프이 스틸 가부시키가이샤 | Coating materials and surface coating methods for in-furnace structures and in-furnace structures |
-
1995
- 1995-09-11 JP JP7257244A patent/JPH0975832A/en not_active Withdrawn
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6082444A (en) * | 1997-02-21 | 2000-07-04 | Tocalo Co., Ltd. | Heating tube for boilers and method of manufacturing the same |
| US6604572B2 (en) * | 1999-04-14 | 2003-08-12 | Mitsubishi Denki Kabushiki Kaisha | Pipeline device and method for its production, and heat exchanger |
| JP2004190136A (en) * | 2002-11-28 | 2004-07-08 | Tokyo Electron Ltd | Member inside plasma treatment vessel |
| US8877002B2 (en) | 2002-11-28 | 2014-11-04 | Tokyo Electron Limited | Internal member of a plasma processing vessel |
| US8043971B2 (en) | 2003-02-07 | 2011-10-25 | Tokyo Electron Limited | Plasma processing apparatus, ring member and plasma processing method |
| JP2006283176A (en) * | 2005-04-05 | 2006-10-19 | Nippon Steel Corp | Water-cooled steel pipe structure with excellent corrosion resistance and wear resistance and its manufacturing method |
| JP2014529704A (en) * | 2011-08-17 | 2014-11-13 | ゼネラル・エレクトリック・カンパニイ | Rotor seal wire groove repair |
| CN112481579A (en) * | 2020-11-27 | 2021-03-12 | 安徽盈锐优材科技有限公司 | Ceramic insulating coating and preparation method thereof |
| KR20240022658A (en) | 2021-06-30 | 2024-02-20 | 제이에프이 스틸 가부시키가이샤 | Coating materials and surface coating methods for in-furnace structures and in-furnace structures |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20021203 |