JPH0966404A - Covered hard alloy tool - Google Patents

Covered hard alloy tool

Info

Publication number
JPH0966404A
JPH0966404A JP22508595A JP22508595A JPH0966404A JP H0966404 A JPH0966404 A JP H0966404A JP 22508595 A JP22508595 A JP 22508595A JP 22508595 A JP22508595 A JP 22508595A JP H0966404 A JPH0966404 A JP H0966404A
Authority
JP
Japan
Prior art keywords
film
aspect ratio
hard alloy
coating
crystal grains
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22508595A
Other languages
Japanese (ja)
Other versions
JP3018952B2 (en
Inventor
Hideki Moriguchi
秀樹 森口
Daisuke Murakami
大介 村上
Akihiko Ikegaya
明彦 池ケ谷
Kazuo Yamagata
一夫 山縣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP7225085A priority Critical patent/JP3018952B2/en
Publication of JPH0966404A publication Critical patent/JPH0966404A/en
Application granted granted Critical
Publication of JP3018952B2 publication Critical patent/JP3018952B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

PROBLEM TO BE SOLVED: To improve deficit resistance and wear resistance and attempt a long life by removing some layers counted from an upper side out of a ceramic film for constituting a cover and exposing the film having a larger crystal grain than a specific aspect ratio on the surface of this removed part. SOLUTION: In a covered hard alloy tool formed with the covered film 4 of multi-layer ceramic film on the surface of the mother material 5 consisting of a hard alloy and containing at least one layer of the cover having a crystal grain with the aspect ratio 5 or less in this covered film 4, out of the ceramic film for constituting the cover, some layers counted from an upper layer side are removed partially on the area (cutting edge ridgeline part A) in which the friction to a material to be processed is generated or across the entire area of a friction area. It is removed so that at least one layer of the cover having a crystal grain with the aspect ratio (1/d: l is the major axis diameter, d is the minor axis diameter) 5 or less may be contained in the removed layer and a film having a larger crystal grain than the aspect ratio 5 may be exposed on the surface of the removed part.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、耐摩耗性の要求さ
れる切削工具やその他の耐摩工具として利用される被覆
硬質合金工具、中でも多層セラミック膜の耐剥離性及び
耐欠損性に優れた被覆硬質合金工具に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coated hard alloy tool used as a cutting tool or other wear resistant tool which is required to have wear resistance, and more particularly, to a coating having excellent peeling resistance and chipping resistance of a multilayer ceramic film. Hard alloy tools.

【0002】[0002]

【従来の技術】従来、鋼切削用の工具材質としては、超
硬合金(WC−Co合金にTiやTa、Nbの炭窒化物
を添加した合金)が用いられてきたが、近年は切削の高
速化に伴い、超硬合金、サーメット、或いはアルミナ系
や窒化珪素系のセラミックを母材としてその表面にCV
D法やPVD法で元素周期律表のIVa、Va、VIa族金
属やAl等の炭化物、窒化物、炭窒化物、炭酸化物、ホ
ウ窒化物、酸化物もしくはこれらの固溶体からなる膜を
3〜10μmの厚さに被覆した硬質合金工具の使用割合
が増大している。コーティング工具の開発当初は逃げ面
の耐摩耗性に優れた高硬度のチタン系化合物を被覆した
工具が登場したが、切削条件が高速になるにつれて、す
くい面のクレータ摩耗を抑制するために、チタン系化合
物の被覆の上に耐酸化性に優れたAl2 3 をコーティ
ングし、さらに外層に切削済み(使用済み)コーナの識
別用に金色のTiNを被覆した工具が登場し、現在は、
この膜構造を持った被覆硬質合金が大部分を占め、被覆
膜中のAl2 3 などの酸化物被膜は欠かせないものに
なっている。
2. Description of the Related Art Conventionally, as a material for cutting steel, cemented carbide (alloy in which carbonitrides of Ti, Ta and Nb are added to WC-Co alloy) has been used. With the increase in speed, cemented carbide, cermet, or alumina-based or silicon-nitride-based ceramic is used as the base material for CV on the surface.
The D or PVD method is used to form a film of a carbide, nitride, carbonitride, carbonitride, boronitride, oxide or a solid solution of IVa, Va, VIa group metals or Al of the periodic table of 3 to 3 The use rate of hard alloy tools coated to a thickness of 10 μm is increasing. At the beginning of the development of the coated tool, a tool coated with a high hardness titanium compound with excellent wear resistance on the flank appeared, but as the cutting conditions became faster, titanium was used to suppress crater wear on the rake face. A tool with Al 2 O 3 excellent in oxidation resistance coated on the coating of the system compound and gold TiN on the outer layer for identifying the cut (used) corner has appeared, and nowadays,
The coated hard alloy having this film structure occupies the majority, and the oxide film such as Al 2 O 3 in the coating film is indispensable.

【0003】このように、被覆の膜厚を厚くしたり、被
覆の中にAl2 3 膜を含めることによって、工具の耐
摩耗性は確かに向上したが、耐欠損性は逆に低下する傾
向にあった。これは、膜を厚くすることで脆性材料であ
るコーティング膜の厚みそのものが亀裂長さとなった
り、Al2 3 膜をコーティングする事によって被覆膜
の面粗さが低下する事が原因とされる。そこで、耐欠損
性の改善のために、特開昭55−150941や特公平
5−9201では切れ刃稜線部のみ被覆を薄膜化した
り、特開昭62−228305や特開平5−57507
ではAl2 3 膜の面粗さをある規定値以下にする提案
がなされている。
As described above, by increasing the thickness of the coating or by including the Al 2 O 3 film in the coating, the wear resistance of the tool is certainly improved, but the fracture resistance is decreased. There was a tendency. This is because the thickness of the coating film, which is a brittle material, becomes the crack length when the film is made thick, and the surface roughness of the coating film is reduced by coating the Al 2 O 3 film. It Therefore, in order to improve the fracture resistance, in JP-A-55-150941 and JP-B-5-9201, the coating is thinned only on the cutting edge ridge, or in JP-A-62-228305 and JP-A-5-57507.
Proposes that the surface roughness of the Al 2 O 3 film be below a certain specified value.

【0004】[0004]

【発明が解決しようとする課題】上記の公報に開示され
る技術では耐欠損性に関してはある程度の効果が得られ
るが、耐摩耗性、特に膜の耐剥離性に関しては充分な効
果を上げるに至っておらず、膜の剥離が原因となった損
傷が起こるため、工具寿命は短かった。したがって、膜
の耐剥離性を十分に考慮した被覆硬質合金工具の開発が
望まれていた。
The technique disclosed in the above publication has some effect on the fracture resistance, but has reached a sufficient effect on the wear resistance, particularly the peeling resistance of the film. However, the tool life was short because of damage caused by peeling of the film. Therefore, it has been desired to develop a coated hard alloy tool in which the peeling resistance of the film is sufficiently taken into consideration.

【0005】本発明は、かかる従来の事情に鑑み、耐欠
損性と耐摩耗性、特に耐欠損性と膜の耐剥離性をバラン
スよく向上させ、それにより、金属材料の切削において
優れた性能を示し、しかも長寿命を発揮する被覆硬質合
金工具を提供することを目的とする。
In view of the above conventional circumstances, the present invention improves the fracture resistance and wear resistance, in particular, the fracture resistance and the peeling resistance of the film in a well-balanced manner, thereby achieving excellent performance in cutting metal materials. It is an object of the present invention to provide a coated hard alloy tool which exhibits the above-mentioned and exhibits a long life.

【0006】[0006]

【課題を解決するための手段】上記の目的を達成するた
め、本発明者らは、金属材料の切削においてその切削メ
カニズムについて検討、研究した結果、硬質合金から成
る母材の表面に多層セラミック膜の被覆を有し、その被
覆膜中にはアスペクト比5以下の結晶粒を有する被膜が
少なくとも一層含まれている被覆硬質合金工具におい
て、前記被覆を構成するセラミック膜のうち、上層側か
ら数えた何層かが被加工材との摩擦が生じる領域上で部
分的に又は摩擦領域の全域にわたって除去され、その除
去層の中にアスペクト比5以下の結晶粒を有する被膜が
少なくとも一層含まれ、除去部の表面にアスペクト比5
より大の結晶粒を有する膜が露出している構造となすこ
とによって、膜の耐剥離性と耐欠損性を大幅に、しかも
バランス良く向上させることができることを見いだし
た。
In order to achieve the above object, the present inventors have studied and studied the cutting mechanism in cutting a metal material, and as a result, have found that a multilayer ceramic film is formed on the surface of a base material made of a hard alloy. In the coated hard alloy tool, the coating comprises at least one coating having crystal grains with an aspect ratio of 5 or less, and the ceramic film constituting the coating is counted from the upper layer side. Several layers are partially or entirely removed over the region where friction with the work material occurs, and the removed layer includes at least one coating film having crystal grains with an aspect ratio of 5 or less, Aspect ratio of 5 on the surface of the removed part
It was found that the peeling resistance and the chipping resistance of the film can be improved significantly and in a well-balanced manner by making the structure in which the film having larger crystal grains is exposed.

【0007】アスペクト比5以下の結晶粒を有する被膜
は摩擦領域例えば切れ刃稜線部においてはすべて除去す
ることが最も好ましいが、その除去形態が局部的である
場合、或いは、被覆膜中にアスペクト比5以下の結晶粒
を有する被膜が複数層存在する形態において、その数層
のアスペクト比5以下の結晶粒を有する被膜の中の少な
くとも一層が切れ刃稜線部で局部的に、若しくは稜線部
の全域にわたって除去されている場合にも発明の効果が
得られる。
It is most preferable to completely remove the coating film having crystal grains with an aspect ratio of 5 or less in the friction region, for example, the cutting edge ridge portion. However, when the removal form is local, or in the coating film, the aspect ratio is reduced. In a form in which a plurality of coating films having crystal grains with a ratio of 5 or less are present, at least one layer of the coating films having crystal grains with an aspect ratio of 5 or less is locally present at the cutting edge ridge portion or at the ridge portion. The effect of the invention can be obtained even when the entire area is removed.

【0008】ここで云う切れ刃稜線部とは、刃先の強化
処理を施した領域であり、例えば図1(b)、図1
(c)のA部である。両図とも1はすくい面、2は逃げ
面を示す。また、図1(b)は丸ホーニングによる強化
処理を、図1(c)はチャンファによる強化処理を表わ
しているが、図1(c)の平面の面取りを緩やかな円弧
の面に代えたような強化処理を施した稜線部も考えられ
る。
The cutting edge ridge portion referred to here is a region where the cutting edge is strengthened, for example, as shown in FIGS.
It is a part A of (c). In both figures, 1 is a rake face and 2 is a flank face. Further, FIG. 1 (b) shows the strengthening process by round honing and FIG. 1 (c) shows the strengthening process by chamfer, but it seems that the chamfering of the plane of FIG. 1 (c) is replaced by a gentle arc surface. A ridge line portion that has undergone various strengthening treatments is also possible.

【0009】アスペクト比の測定は、被膜を薄片化した
試料をTEM(Transmission Electron Microscope)によ
り写真撮影し、その写真を用いて行った。その模式図を
図3に示す。アスペクト比の計算はl÷dにより行っ
た。ここでlは長軸径、dは短軸径とした。
The aspect ratio was measured by taking a photograph of a thin film sample with a TEM (Transmission Electron Microscope) and using the photograph. The schematic diagram is shown in FIG. The aspect ratio was calculated by 1 / d. Here, 1 is the major axis diameter and d is the minor axis diameter.

【0010】アスペクト比5以下の結晶粒を有する被膜
の除去は、切削に関与する切れ刃長さの10%以上の領
域で除去されていると効果があるが、その除去率が50
%以上、より好ましくは100%の場合、特に効果が著
しい。ここで云う除去率は、走査電子顕微鏡で適当な角
度から工具刃先を観察してアスペクト比5以下の結晶粒
を有する膜の存在状態を確認できる写真撮影を行い、そ
の写真上で切れ刃稜線部に切れ刃に平行な任意の線を引
き、その線上でノーズR部3(図1a参照)を含む切削
に関与する切れ刃長さの何割の部分にアスペクト比5以
下の結晶粒を有する膜の消滅が起こっているかをパーセ
ンテージで表わした。
The removal of the coating film having a crystal grain with an aspect ratio of 5 or less is effective if it is removed in a region of 10% or more of the cutting edge length involved in cutting, but the removal rate is 50.
% Or more, more preferably 100%, the effect is particularly remarkable. The removal rate here is determined by observing the tool edge with a scanning electron microscope from an appropriate angle and confirming the existence state of a film having crystal grains with an aspect ratio of 5 or less. An arbitrary line parallel to the cutting edge is drawn on the film, and a film having crystal grains with an aspect ratio of 5 or less at a portion of the cutting edge length related to cutting including the nose R portion 3 (see FIG. 1a) on that line Is expressed as a percentage of whether or not the disappearance has occurred.

【0011】図4は、この定義を図解したものである。
ここでは被覆膜が母材側からTiCN膜/Al2 3
/TiN膜の3層構造である場合を例に挙げている。な
お、TEM観察の結果、各膜質のアスペクト比は、Ti
CN膜が約10、Al2 3膜が約3、TiN膜が約1
であった。同図(a)のαの範囲が切れ刃の切削に関与
する長さを表わしている。同図(b)、(c)はその部
分の上層膜除去処理後のSEM組成像である。同図
(d)は(b)図のX−Y断面図、同図(e)は(c)
図のX−Y断面である。この組成像ではTiN、Al2
3 、TiCNがそれぞれ異なった色調に見える。そこ
で、図4(b)、(c)にそれぞれ切れ刃と平行な線C
を加え、この線上でAl2 3 又はTiCNが露出して
いる部分を見る。図4(b)では、線C上にはAl2
3 が全く存在せず、従って、Al2 3 の除去率は10
0%である。一方、図4(c)の場合、切れ刃稜線部A
の中にTiN、Al2 3 、TiCNが点在して露出し
ている。除去処理の状況によってはこのような状態が生
じるので、この場合には、線C上で下層のTiCNが表
面に現われている(つまりAl2 3 が除去されてい
る)長さa1 〜a8 を加算し、(a1 +a2 +……
8 )/切れ刃長さの式により除去率を求める。
FIG. 4 illustrates this definition.
Here, the case where the coating film has a three-layer structure of a TiCN film / Al 2 O 3 film / TiN film from the base material side is taken as an example. As a result of TEM observation, the aspect ratio of each film quality is Ti
CN film is about 10, Al 2 O 3 film is about 3, TiN film is about 1
Met. The range of α in FIG. 9A represents the length involved in cutting the cutting edge. (B) and (c) of the same figure are SEM composition images after the removal of the upper layer film in that portion. (D) is a cross-sectional view taken along the line XY in (b), and (e) is (c).
It is an XY cross section of a figure. In this composition image, TiN, Al 2
O 3 and TiCN appear to have different color tones. Therefore, the lines C parallel to the cutting edges are shown in FIGS. 4 (b) and 4 (c), respectively.
And see the part of this line where Al 2 O 3 or TiCN is exposed. In FIG. 4B, Al 2 O is on the line C.
3 is not present at all, therefore the removal rate of Al 2 O 3 is 10
0%. On the other hand, in the case of FIG. 4C, the cutting edge ridge line portion A
TiN, Al 2 O 3 , and TiCN are scattered and exposed in the inside. Since such a state occurs depending on the state of the removal process, in this case, the length a 1 to a 1 in which the lower layer of TiCN appears on the surface on the line C (that is, Al 2 O 3 is removed). Add 8 and (a 1 + a 2 + ...
a 8) / cutting edge determining removal rate by the length expression.

【0012】被覆層中に含まれるアスペクト比5以下の
結晶粒を有する被膜は、その膜が数層ある場合には必ず
しも全てを除去する必要はない。但し、アスペクト比5
以下の結晶粒を有する被膜の中で、上記結晶粒の短軸径
が0.7μmより大の被膜は、指定域となる切れ刃稜線
部の少なくとも一部で除去されていた方が耐剥離性向上
に関して特に好ましい。中でも、アスペクト比が3以下
で結晶粒の短軸径が0.7μmより大のAl2 3 膜は
特に耐剥離性が悪いため、このAl2 3 膜やAl2
3 を主体とする膜は切れ刃稜線部の最表面に全く存在し
ないようにしておくのがよい。Al2 3 を主体とする
膜とは、Al2 3 とZrO2 、Al23 とTiC、
Al2 3 とAlNなどの複合膜でAl2 3 が主とな
っている膜のことである。
It is not always necessary to completely remove the coating film having crystal grains with an aspect ratio of 5 or less contained in the coating layer when the film has several layers. However, the aspect ratio is 5
Among the coatings having the following crystal grains, the coating with the minor axis diameter of the crystal grains larger than 0.7 μm has peeling resistance when it is removed at least at a part of the cutting edge ridge line portion which is the designated area. Particularly preferred for improvement. Among them, an Al 2 O 3 film having an aspect ratio of 3 or less and a crystal grain minor axis diameter of more than 0.7 μm has particularly poor peeling resistance, and therefore, the Al 2 O 3 film and the Al 2 O 3 film are poor.
It is preferable that the film mainly composed of 3 does not exist at all on the outermost surface of the cutting edge ridge. The film mainly made of Al 2 O 3, Al 2 O 3 and ZrO 2, Al 2 O 3 and TiC,
It is a composite film of Al 2 O 3 and AlN, etc., in which Al 2 O 3 is the main film.

【0013】このほか、このようにして上側から何層か
の膜を除去した部分には当然に下層の膜が露出するが、
その露出膜が窒化物や炭窒化物を主体とする膜、中でも
C:Nのモル比が5:5〜7:3の範囲にあるTiCN
膜であると特に好ましい。
Besides, although the lower layer film is naturally exposed at the portion where several layers of film are removed from the upper side in this way,
The exposed film is mainly composed of nitride or carbonitride, and in particular, TiCN having a C: N molar ratio in the range of 5: 5 to 7: 3.
A membrane is particularly preferable.

【0014】また、前記除去部の表面に露出した膜中の
残留応力が−5〜10kgf/mm2 であると特に好ま
しい。さらに、その露出膜の面粗さRaの平均値が0.
05μm以下であることも非常に好ましく、露出膜が
(422)面、もしくは(311)面に最大回折強度を
もつTiCN膜であるとさらに好ましい。
It is particularly preferable that the residual stress in the film exposed on the surface of the removed portion is -5 to 10 kgf / mm 2 . Further, the average value of the surface roughness Ra of the exposed film is 0.
It is also very preferable that the thickness is 05 μm or less, and it is further preferable that the exposed film is a TiCN film having the maximum diffraction intensity on the (422) plane or the (311) plane.

【0015】また、かかる除去部の表面に露出した膜中
の結晶粒のアスペクト比が10以上であると特に好まし
い。
It is particularly preferable that the aspect ratio of the crystal grains in the film exposed on the surface of the removed portion is 10 or more.

【0016】[0016]

【作用】金属材料の切削、特に鋼の切削ではすくい面の
最高温度は1000℃以上の高温になることもあり、耐
酸化性に優れた酸化物を被覆することが必要である。こ
のため、Al2 3 を代表とする酸化物系膜のコーティ
ングが市販工具に適用されている。このような工具につ
いてその損傷状況を詳細に観察した結果、摩耗量は非常
に小さいのに、使用済みチップとして処分されている事
例が多いことに気づいた。それらのチップの刃先を走査
電子顕微鏡で観察したところ、切れ刃稜線部において微
細なチッピングが発生し、その部分では超硬母材が露出
していることが判明した。つまり、そのようなチップを
摩耗量が小さいからといって継続して使用すると、超硬
母材が露出しているために溶着が生じたり、急激に摩耗
や欠損が進行したりして、生産ラインでトラブルが発生
することから、そのような小さい摩耗量でも工具は寿命
と判断されていたものと推定される。従って、そのよう
な膜のチッピング現象が抑制できれば工具寿命を延ばせ
ると考え、その膜の損傷メカニズムについて調査した。
その結果、切れ刃稜線部の切削温度はすくい面ほど高温
でないため、温度的に凝着摩耗が発生しやすい環境にな
っている上、すくい面上で発生する摩擦応力は切れ刃稜
線部で最大となるため、切り屑がまず最初に切れ刃稜線
部に凝着した後、摩擦応力が被覆膜を引きはがす剪断応
力となって作用し、被覆膜の微小チッピングが生じると
の結論を得た。従って、切れ刃稜線部で凝着しにくい膜
構造もしくは膜質が見いだせれば、使用済みチップの損
傷部に見られた微小チッピング、つまり膜の剥離を抑え
ることができるのではないかと考えたのである。
In the cutting of metal materials, especially the cutting of steel, the maximum temperature of the rake face may be as high as 1000 ° C. or higher, and it is necessary to coat the oxide with excellent oxidation resistance. For this reason, coating of an oxide film represented by Al 2 O 3 is applied to commercially available tools. As a result of observing the damage condition of such a tool in detail, it was found that there are many cases in which the tool is disposed as a used chip although the amount of wear is very small. When the cutting edges of these chips were observed with a scanning electron microscope, it was found that fine chipping occurred at the ridgeline of the cutting edge and the cemented carbide base material was exposed at that part. In other words, if such a chip is used continuously even if the wear amount is small, welding will occur due to the exposed cemented carbide base material, or rapid wear or breakage will occur. Since troubles occur in the line, it is estimated that the tool was judged to have reached the end of its life even with such a small amount of wear. Therefore, if the chipping phenomenon of such a film can be suppressed, the tool life can be extended and the damage mechanism of the film was investigated.
As a result, the cutting temperature of the cutting edge ridge is not as high as that of the rake face, which creates an environment in which adhesive wear is likely to occur with temperature, and the frictional stress generated on the rake face is the maximum at the cutting edge ridge. Therefore, it is concluded that after the chips first adhere to the ridge of the cutting edge, the frictional stress acts as a shearing stress that peels off the coating film, resulting in minute chipping of the coating film. It was Therefore, we thought that if we could find a film structure or film quality that does not easily adhere to the edge of the cutting edge, it would be possible to suppress the minute chipping found in the damaged parts of the used chips, that is, the film peeling. .

【0017】そこで、本発明者らは、凝着摩耗を抑制す
る方法を種々検討して本発明を見いだすに至った。つま
り、凝着の発生には、面粗さで表わされる物理的な凸凹
が関係している。この観点から特開昭62−22830
5や特開平5−57507ではAl2 3 膜の面粗さを
後処理により向上させ、膜の剥離や強度劣化、溶着を防
止したとしている。しかしながら、Al2 3 膜は、ア
スペクト比が5以下の結晶粒として成長し易く、凝着や
溶着により塊(ブロック)状に脱落し易い。このため、
切削前に面粗さを向上させても、切削時にAl2 3
塊状に脱落すると大きな凹凸ができて脱落部に凝着が生
じ、急激に膜剥離が進行することを本発明者等は突き止
めた。また、一方で、アスペクト比が5より大の結晶粒
を有する被膜が表面に露出していると膜の脱落が生じ難
く、耐剥離性に非常に優れることを見い出した。そこ
で、本発明者らは、Al2 3 などのアスペクト比5以
下の結晶粒を有する被膜を摩擦応力が最も大きくなる切
れ刃稜線部から局部的に若しくはすべて除去し、その除
去部にアスペクト比が5より大の結晶粒を有する膜を露
出させることを試みた。そして、この構造によれば膜の
脱落が減少し、被覆膜の耐剥離性が大幅に向上してチッ
ピングが防止され、工具寿命が大巾に延長されることを
確認した。
Therefore, the present inventors have found out the present invention by variously examining methods for suppressing adhesive wear. In other words, the occurrence of adhesion is associated with physical unevenness represented by surface roughness. From this viewpoint, JP-A-62-22830
5 and JP-A-5-57507, the surface roughness of the Al 2 O 3 film is improved by post-treatment to prevent peeling, strength deterioration and welding of the film. However, the Al 2 O 3 film is likely to grow as crystal grains having an aspect ratio of 5 or less, and is likely to drop off in a lump (block) shape by adhesion or welding. For this reason,
Even if the surface roughness is improved before cutting, the present inventors have found that when Al 2 O 3 falls off in a lump form during cutting, large unevenness is formed and adhesion occurs in the dropout portion, and film peeling proceeds rapidly. I found it. On the other hand, it has been found that when a coating film having crystal grains with an aspect ratio of greater than 5 is exposed on the surface, the film is unlikely to fall off and the peeling resistance is very excellent. Therefore, the present inventors locally or entirely remove the coating film having crystal grains with an aspect ratio of 5 or less such as Al 2 O 3 from the cutting edge ridge portion where the frictional stress is the largest, and the aspect ratio is removed in the removed portion. Attempts were made to expose a film with grains larger than 5. Then, it was confirmed that this structure reduces the loss of the film, significantly improves the peeling resistance of the coating film, prevents chipping, and greatly extends the tool life.

【0018】なお、窒化物や炭窒化物は金属との耐焼き
付き性に優れているので被覆除去部の表面にこれ等の膜
が現われている場合には耐剥離性の改善効果が高い。中
でも、C:Nのモル比が5:5〜7:3の範囲のTiC
N膜は耐焼き付き性だけではなく、膜そのものの耐摩耗
性も特に優れているため、この膜を除去部の表面に露出
させるものは非常に優れた耐剥離性を示し、工具寿命を
著しく延長できる。このような組成比のTiCN膜は通
常のHT(HIGH TEMPERATURE)−CVD法でも作成でき
るが、有機CN化合物を反応ガスとするCVD法の方が
より安定してこの組成比の膜を形成できる。
Since nitrides and carbonitrides have excellent seizure resistance with metals, when these films appear on the surface of the coating removal portion, the effect of improving peeling resistance is high. Among them, TiC having a C: N molar ratio in the range of 5: 5 to 7: 3.
The N film has not only seizure resistance, but also the wear resistance of the film itself. Therefore, the one that exposes this film on the surface of the removed part shows extremely excellent peeling resistance and significantly extends the tool life. it can. A TiCN film having such a composition ratio can be formed by a normal HT (HIGH TEMPERATURE) -CVD method, but a CVD method using an organic CN compound as a reaction gas can more stably form a film having this composition ratio.

【0019】なお、C:Nのモル比はESCA(ELECTR
ON SPECTROSCOPY FOR CHEMICAL ANALYSIS )やEPMA
(ELECTRON PROBE MICRO ANALYZER )による分析、もし
くはX線分析でTiCN膜の格子定数を求めることによ
って測定できる。発明者らがX線分析で求めた結果で
は、C:Nのモル比が5:5〜7:3の範囲にあるTi
CN膜の格子定数は4.275〜4.295オングスト
ロームの範囲にあり、このときに、特に優れた耐焼き付
け性、耐摩耗性を示した。この結果は、化学量論組成の
TiCNで考えると、ずれを含むが、TiCN膜が非化
学量論組成たとえば、Ti(CN)0.9 のような組成を
もつことがあるため、このようなずれが生じたものと思
われた。
The molar ratio of C: N is ESCA (ELECTR
ON SPECTROSCOPY FOR CHEMICAL ANALYSIS) and EPMA
(ELECTRON PROBE MICRO ANALYZER) analysis or X-ray analysis to determine the lattice constant of the TiCN film. According to the results obtained by the inventors by X-ray analysis, Ti having a C: N molar ratio in the range of 5: 5 to 7: 3 is used.
The CN film had a lattice constant in the range of 4.275 to 4.295 angstroms, and at this time, particularly excellent seizure resistance and abrasion resistance were exhibited. Although this result includes a deviation when considering TiCN having a stoichiometric composition, such a deviation may occur because the TiCN film may have a non-stoichiometric composition such as Ti (CN) 0.9. It seemed to have occurred.

【0020】このほか、除去部の表面に露出した膜中の
残留応力が−5〜10kgf/mm2 の範囲にあるのが
好ましいとしたのは膜の耐剥離性が更に向上するからで
ある。これは実験により確認したもので、その残留応力
が−5kgf/mm2 より小さいと膜が圧縮破壊する恐
れがあり、また、10kgf/mm2 より大きい場合に
は耐剥離性の向上効果が小さかった。
In addition, the reason why the residual stress in the film exposed on the surface of the removed portion is preferably in the range of -5 to 10 kgf / mm 2 is because the peeling resistance of the film is further improved. This has been confirmed by experiments. If the residual stress is less than -5 kgf / mm 2 , the film may be damaged by compression, and if it is greater than 10 kgf / mm 2 , the effect of improving peeling resistance is small. .

【0021】また、この除去部の表面に露出した膜の面
粗さRaの平均値が0.05μm以下の場合、膜の耐剥
離性がより優れていたが、Raが0.05μmより大き
いものは耐剥離性の向上効果が小さかった。さらに、除
去部の表面に露出した膜が(422)面もしくは(31
1)面に最大回折強度を有するTiCN膜である場合に
は耐剥離性の向上効果が特に著しかった。
Further, when the average value of the surface roughness Ra of the film exposed on the surface of the removed portion is 0.05 μm or less, the peeling resistance of the film was more excellent, but Ra was more than 0.05 μm. The effect of improving peel resistance was small. Furthermore, the film exposed on the surface of the removed portion has a (422) plane or a (31) plane.
In the case of the TiCN film having the maximum diffraction intensity on the 1) plane, the effect of improving the peel resistance was particularly remarkable.

【0022】また、除去部の表面に露出した膜のアスペ
クト比が10以上である場合は、耐剥離性の向上効果が
大きかった。
Further, when the aspect ratio of the film exposed on the surface of the removed portion was 10 or more, the effect of improving the peeling resistance was large.

【0023】次に、逃げ面では、アスペクト比が5以下
の結晶粒を有する膜は、脱落時に塊状となって逃げ面を
擦過し、耐摩耗性を低下させるので、耐摩耗性の観点か
らは逃げ面側の被覆除去幅をすくい面側のそれよりも大
きくするのがよい。一方、耐欠損性の観点からは逆にす
くい面側の除去幅を逃げ面側よりも大としたり、ノーズ
R部での除去幅を切れ刃直線部での除去幅よりも大とす
るのがよい。また、切れ味、耐境界摩耗の観点からは、
ノーズR部での除去面幅を切れ刃直線部での除去幅より
小とするのがよく、その除去幅は性能面で何を重視する
かによって変える。
Next, on the flank, the film having crystal grains with an aspect ratio of 5 or less becomes a lump when falling off, rubbing the flank and lowering the wear resistance, so from the viewpoint of wear resistance. It is preferable to make the coating removal width on the flank side larger than that on the rake side. On the other hand, from the viewpoint of fracture resistance, on the contrary, the removal width on the rake face side may be made larger than that on the flank face side, or the removal width on the nose R portion may be made larger than the removal width on the cutting edge straight line portion. Good. From the viewpoint of sharpness and boundary wear resistance,
The removal surface width at the nose R portion is preferably smaller than the removal width at the cutting edge straight line portion, and the removal width varies depending on what is important in terms of performance.

【0024】なお、本発明における切れ刃稜線部の被覆
薄肉化は、公知のCVD法やPVD法で硬質合金上に被
覆処理を行った後、バレル研磨、ショットブラスト、シ
ョットピーニング、弾性砥石、砥粒を有する樹脂製のブ
ラシ、ローラ仕上げ、バニッシュ仕上げ、化学薬品によ
る処理、超音波振動法、レーザ加工などの方法で達成す
ればよい。
The thinning of the cutting edge ridge in the present invention is carried out by coating the hard alloy by a known CVD method or PVD method, and then barrel polishing, shot blasting, shot peening, an elastic grindstone, and grinding. It may be achieved by a method such as a resin brush having particles, a roller finish, a vanish finish, a treatment with a chemical agent, an ultrasonic vibration method, or a laser processing.

【0025】次に、膜中の残留応力は、X線によりsi
2 φ法により求めることができる。また、膜の面粗さ
Raの平均値は、酸化物被膜が図4(c)のように残存
している場合、接触式面粗さ計では触針が露出部に入り
込めず、正確な測定が不可能であるため、凹凸SEM
(エリオニクス製 ERA4000)により、電子線を用いて面
粗さRaを計測した。測定倍率は5000倍で、切れ刃
稜線が水平となるように試料を配置した。ここでいう面
粗さRaの平均値とは、測定視野18×24mmの水平
方向ライン180本の面粗さRaの平均値であり、1ラ
イン当りの測定ポイント数は240点とした。
Next, the residual stress in the film is determined by X-ray analysis using si.
It can be obtained by the n 2 φ method. Further, the average value of the surface roughness Ra of the film is accurate because the contact type surface roughness meter does not allow the stylus to enter the exposed portion when the oxide film remains as shown in FIG. 4C. Uneven SEM because measurement is impossible
(ERA4000 manufactured by Elionix) was used to measure the surface roughness Ra using an electron beam. The measurement magnification was 5000 times, and the sample was arranged so that the cutting edge ridge was horizontal. The average value of the surface roughness Ra referred to here is the average value of the surface roughness Ra of 180 horizontal lines having a measurement visual field of 18 × 24 mm, and the number of measurement points per line was 240 points.

【0026】図4(c)のような状態では、残存したA
2 3 膜を含めて面粗さを測定するとその面粗さが非
常に悪く、Rmaxは除去された被膜の膜厚よりも大き
くなる。本発明では、このような残存被膜を含めた面粗
さではなく、除去部に露出した膜の面粗さをある規定値
以下(好ましくは0.05μm以下)とすることにより
膜の耐剥離性が向上することを見い出した。
In the state shown in FIG. 4C, the remaining A
When the surface roughness including the l 2 O 3 film is measured, the surface roughness is very poor, and Rmax becomes larger than the film thickness of the removed film. In the present invention, the peeling resistance of the film is controlled by controlling the surface roughness of the film exposed in the removed portion to a certain specified value or less (preferably 0.05 μm or less) instead of the surface roughness including the residual film. Have been found to improve.

【0027】[0027]

【発明の実施の形態】以下、本発明の実施例について詳
細に述べる。
Embodiments of the present invention will be described below in detail.

【0028】−実施例1− 型番CNMG433の形状の表1に示すイ〜ヘの各種硬
質合金と表2に示すHT(HIGH TEMPERATURE)−CVD
法で作成した各種硬質被覆膜の組み合わせからなる表4
に示すサンプルNo1〜13の被覆硬質合金工具(チッ
プ)を準備した。そして、先ず、表2に示す被覆膜のア
スペクト比をTEMと先に述べた計算式を用いて測定し
た。その結果を表3に示す。
Example 1 Various hard alloys (a) to (f) shown in Table 1 and HT (HIGH TEMPERATURE) -CVD shown in Table 2 in the shape of the model number CNMG433
Table 4 consisting of combinations of various hard coating films prepared by the method
The coated hard alloy tools (tips) of Sample Nos. 1 to 13 shown in 1 were prepared. Then, first, the aspect ratio of the coating film shown in Table 2 was measured using TEM and the above-described calculation formula. Table 3 shows the results.

【0029】次に、表4中のサンプルNo1のチップを
振動バレル機を用いて切れ刃稜線部の被覆膜の除去処理
を行い、その処理時間を変化させることで、表5に示す
切れ刃稜線部でのアスペクト比5以下の結晶粒を有する
TiN(アスペクト比0.9)とAl2 3 (アスペク
ト比3.5)膜の除去割合の異なった比較品1と本発明
品1〜6の工具を得た。なお、Al2 3 膜が除去され
た後の切れ刃稜線部にはアスペクト比が約15のTiC
Nが露出していることがTEM及びSEMの反射電子像
による観察により確認できた。図2は、本発明品の刃先
部断面の一例であり、5は母材を、4は多層セラミック
の被覆膜を示している。次に、ここで得た比較品1、本
発明品1〜6の工具を用いて図5に示すSCM415製
被削材(外周に4つの溝があり断続切削になる丸棒材)
を下記条件で切削し、各工具の寿命を比較した。
Next, the tip of sample No. 1 in Table 4 was subjected to a treatment of removing the coating film on the ridge line of the cutting edge using a vibrating barrel machine, and the treatment time was changed to obtain the cutting edge shown in Table 5. Comparative product 1 and invention products 1 to 6 having different removal ratios of TiN (aspect ratio 0.9) and Al 2 O 3 (aspect ratio 3.5) films having crystal grains with an aspect ratio of 5 or less at the ridge portion. Got the tool. After the Al 2 O 3 film is removed, the ridgeline of the cutting edge has a TiC ratio of about 15
It was confirmed that N was exposed by observation with a backscattered electron image of TEM and SEM. FIG. 2 is an example of a cross section of the cutting edge portion of the product of the present invention, wherein 5 is a base material and 4 is a coating film of a multilayer ceramic. Next, using the tools of the comparative product 1 and the products 1 to 6 of the present invention obtained here, the SCM415 work material shown in FIG. 5 (a round bar material having four grooves on the outer circumference and intermittent cutting)
Was cut under the following conditions, and the life of each tool was compared.

【0030】 切削条件 切削速度 :250m/min 送り :0.3mm/rev 切込み :1.5mm 切削形態 :湿式 使用ホルダ:PCLNR2525−43 なお、寿命の判定はSEMの反射電子像観察にて行い、
母材が露出した時点を寿命時間とした。その結果、表5
に示したように、処理を何も行わなかった比較品1に比
べて、発明品1〜6は優れた耐剥離性を示し、特にアス
ペクト比5以下の結晶粒を有する膜が50%以上除去さ
れた4〜6、中でもアスペクト比5以下の結晶粒を有す
る膜を切れ刃稜線部から100%除去した6の工具は比
較品1に対して、6倍もの耐剥離性を示した。
Cutting conditions Cutting speed: 250 m / min Feed: 0.3 mm / rev Depth of cut: 1.5 mm Cutting form: Wet Holder used: PCLNR2525-43 The life is determined by SEM reflection electron image observation,
The life time was defined as the time when the base material was exposed. As a result, Table 5
As shown in FIG. 5, the invention products 1 to 6 show excellent peeling resistance as compared with the comparative product 1 which was not subjected to any treatment, and particularly, 50% or more of the film having crystal grains with an aspect ratio of 5 or less was removed. The tools of Nos. 4 to 6, in which the film having crystal grains with an aspect ratio of 5 or less was 100% removed from the cutting edge ridge portion, showed 6 times as much peeling resistance as Comparative product 1.

【0031】[0031]

【表1】 [Table 1]

【0032】[0032]

【表2】 [Table 2]

【0033】[0033]

【表3】 [Table 3]

【0034】[0034]

【表4】 [Table 4]

【0035】[0035]

【表5】 [Table 5]

【0036】−実施例2ー 表4のサンプルNo1と6のチップの切れ刃稜線部から
短軸径が0.7μmより大きく、アスペクト比が5以下
の結晶粒を有するAl2 3 膜とZrO2 膜を100%
除去した発明品6、7を切れ刃稜線部での膜構造および
膜厚、刃先処理量がほぼ同じになるようにダイヤブラシ
を用いて作成し、実施例1と同じ切削試験に供した。そ
の結果、表6に示したように、処理後の耐剥離性は、両
者ともに同じ性能を示したが、未処理品の耐剥離性は、
比較品1の方が比較品2よりも悪く、処理による耐剥離
性の向上効果はAl2 3 を除去した発明品6の方がZ
rO2 を除去した発明品7よりも大きく、Al2 3
除去した効果はZrO2 を除去した効果よりも大きいこ
とがわかる。
Example 2-Al 2 O 3 film having crystal grains with a minor axis diameter of more than 0.7 μm and an aspect ratio of 5 or less from the cutting edge ridges of the chips of Sample Nos. 1 and 6 in Table 4 and ZrO. 2 films 100%
The removed invention products 6 and 7 were prepared using a diamond brush so that the film structure and film thickness at the cutting edge ridge line portion and the blade edge treatment amount were almost the same, and subjected to the same cutting test as in Example 1. As a result, as shown in Table 6, the peel resistance after treatment showed the same performance, but the peel resistance of the untreated product was
The comparative product 1 is worse than the comparative product 2, and the effect of improving the peeling resistance by the treatment is that the invention product 6 from which Al 2 O 3 is removed is Z
It can be seen that the effect of removing AlO 2 is larger than that of the invention product 7 in which rO 2 was removed, and the effect of removing Al 2 O 3 was larger than that in removing ZrO 2 .

【0037】[0037]

【表6】 [Table 6]

【0038】−実施例3− 表4のサンプルNo5のチップの切れ刃稜線部から、ア
スペクト比1.8のAl2 3 膜を除去した発明品8と
Al2 3 、TiCNおよびアスペクト比3.1のZr
2 被膜を除去した発明品9をガラスビーズによるショ
ットブラストにより作成し、実施例1と同じ切削試験に
サンプルNo5の未処理チップである比較品3とともに
供した。その結果、表7に示したように、処理後の耐剥
離性は、切れ刃稜線部ですべてのアスペクト比5以下の
結晶粒を有する被膜を除去した発明品9の方がAl2
3 のみを除去し、ZrO2 が切れ刃稜線部に残っている
発明品8よりも優れた性能を示した。
Example 3 Inventive product 8 in which the Al 2 O 3 film having an aspect ratio of 1.8 was removed from the ridge of the cutting edge of the sample No. 5 in Table 4 and Al 2 O 3 , TiCN and the aspect ratio 3 Zr of 1
Inventive product 9 from which the O 2 film was removed was prepared by shot blasting with glass beads, and was subjected to the same cutting test as in Example 1 together with comparative product 3, which was an untreated chip of sample No. 5. As a result, as shown in Table 7, the peeling resistance after the treatment showed that the invention product 9 in which the coating film having all the crystal grains with the aspect ratio of 5 or less at the cutting edge ridge was removed was Al 2 O.
Only the 3 was removed, and ZrO 2 showed better performance than the invention product 8 in which the cutting edge ridge line portion remained.

【0039】また、発明品6と9の比較より、上層の膜
が消失した切れ刃稜線部上において、窒化物もしくは炭
窒化物を主体とする膜のみが存在する発明品6は、除去
処理後の切れ刃稜線部上に炭化物を主体とする膜のみが
存在する発明品9よりも耐剥離性に優れていた。
Further, from the comparison between the invention products 6 and 9, the invention product 6 in which only the film mainly composed of nitride or carbonitride is present on the cutting edge ridge portion where the film of the upper layer disappears after the removal treatment The peeling resistance was superior to that of Inventive product 9 in which only the film mainly containing carbide was present on the ridgeline of the cutting edge.

【0040】[0040]

【表7】 [Table 7]

【0041】−実施例4− 表4のサンプルNo2〜4およびNo7、8のチップの
切れ刃稜線部からアスペクト比が5以下の結晶粒を有す
る被膜のうち最上層に位置するAl2 3 及びTiN膜
を除去するため、弾性砥石をチップすくい面上方から押
しつけるようにして使用し、切れ刃稜線部にアスペクト
比5より大の結晶粒を有する被膜が露出するようにして
発明品10〜14を得た。それらのチップを用いて、S
KD62製金型材を下記の条件で切削した。
-Example 4-Al 2 O 3 and the Al 2 O 3 located in the uppermost layer of the coatings having crystal grains with an aspect ratio of 5 or less from the cutting edge ridges of the chips of Nos. 2 to 4 and Nos. 7 and 8 in Table 4 In order to remove the TiN film, an elastic grindstone was used by pressing it from above the chip rake face, and the invention products 10 to 14 were prepared by exposing the coating film having crystal grains with an aspect ratio of greater than 5 at the cutting edge ridge. Obtained. Using those chips, S
The mold material made of KD62 was cut under the following conditions.

【0042】 切削条件 切削速度 :150m/min 送り :0.2mm/rev 切込み :2mm 切削形態及び使用ホルダは実施例1に同じ。Cutting Conditions Cutting Speed: 150 m / min Feeding: 0.2 mm / rev Cutting Depth: 2 mm The cutting form and holder used are the same as in Example 1.

【0043】寿命基準は母材が露出するまでの切削時間
とした。その結果を表8に示す。発明品10と11では
ともに切れ刃稜線部にAl2 3 膜が存在しない構造と
なっている上に、切れ刃稜線部での膜厚がほぼ同じとな
っているにもかかわらず、発明品11の方が優れた耐剥
離性を示した。この結果は、発明品10には切れ刃稜線
部に炭化物、窒化物、炭窒化物の膜が存在しているのに
対し、発明品11では炭窒化物のみが存在しているた
め、特に優れた耐剥離性を示したものと考えられる。ま
た、表8より、ISO K20超硬合金、サーメット母
材においても、本発明品は未処理品に対して、優れた耐
剥離性を示すことがわかる。
The life criterion was the cutting time until the base material was exposed. Table 8 shows the results. Inventive products 10 and 11 both have a structure in which the Al 2 O 3 film does not exist at the cutting edge ridge line, and the film thickness at the cutting edge ridge line is almost the same, No. 11 showed excellent peeling resistance. This result is particularly excellent because invention product 10 has a carbide, nitride, or carbonitride film at the cutting edge ridge, whereas invention product 11 has only carbonitride. It is considered that the peeling resistance was exhibited. In addition, it can be seen from Table 8 that the products of the present invention also show excellent peeling resistance with respect to the untreated products in the ISO K20 cemented carbide and the cermet base material.

【0044】[0044]

【表8】 [Table 8]

【0045】−実施例5− 表4のサンプルNo9〜11のチップの切れ刃稜線部か
らアスペクト比5以下の結晶粒を有する膜を除去するた
め、遠心バレルを用いて、切れ刃稜線部からすべてのア
スペクト比5以下の結晶粒を有する被膜を除去した発明
品15〜17を作成した。それらのチップを用いて、ダ
クタイル鋳鉄FCD30を下記の条件で切削した。
Example 5-In order to remove the film having crystal grains with an aspect ratio of 5 or less from the cutting edge ridges of the chips of Sample Nos. 9 to 11 in Table 4, all the cutting edges were cut using a centrifugal barrel. Invention products 15 to 17 were prepared by removing the coating film having crystal grains with an aspect ratio of 5 or less. Using those chips, the ductile cast iron FCD30 was cut under the following conditions.

【0046】 切削条件 切削速度 :250m/min 送り :0.3mm/rev 切込み :2mm 切削形態 :乾式 使用ホルダ寿命基準は他の実施例と同じ。Cutting Conditions Cutting Speed: 250 m / min Feeding: 0.3 mm / rev Cutting Depth: 2 mm Cutting Form: Dry Type The holder life standard is the same as in the other examples.

【0047】その結果を表9に示す。同表より、各種の
セラミック母材についても、本発明品は未処理品に比し
て、優れた耐剥離性を示すことがわかる。
The results are shown in Table 9. From the table, it can be seen that also with respect to various ceramic base materials, the product of the present invention exhibits excellent peeling resistance as compared with the untreated product.

【0048】[0048]

【表9】 [Table 9]

【0049】−実施例6− 表4のサンプル1と同じ母材および同じ膜構造で、有機
CN化合物を反応ガスとするCVD法でTiCN膜を作
成した点のみがサンプル1と異なるサンプルNo12の
チップを作成した。このTiCN膜のアスペクト比はT
EMで測定したところ約33であった。また、サンプル
1と12のTiCN膜のC:Nモル比をESCAで測定
したところ、サンプル1のC:N比は8:2、サンプル
12は6:4であった。実施例1と同じ方法で切れ刃稜
線部におけるアスペクト比3.5であるAl2 3 とア
スペクト比0.9であるTiNの除去率の異なった発明
品18〜20を作成し、実施例1と同じ切削テストを行
った。なお、Al2 3 及びTiN膜が除去された後の
切れ刃稜線部には局部的もしくはすべての部分にTiC
Nが露出していることがSEMの反射電子像による観察
により確認できた。
Example 6 A chip of Sample No. 12 different from Sample 1 only in that a TiCN film was formed by the CVD method using the organic CN compound as a reaction gas with the same base material and the same film structure as those of Sample 1 in Table 4. It was created. The aspect ratio of this TiCN film is T
It was about 33 when measured by EM. Also, when the C: N molar ratio of the TiCN films of Samples 1 and 12 was measured by ESCA, the C: N ratio of Sample 1 was 8: 2, and Sample 12 was 6: 4. Inventive products 18 to 20 having different removal rates of Al 2 O 3 having an aspect ratio of 3.5 and TiN having an aspect ratio of 0.9 in the cutting edge ridge portion were prepared in the same manner as in Example 1, and Example 1 was prepared. The same cutting test was performed. In addition, after the Al 2 O 3 and TiN films are removed, the cutting edge ridges are locally or entirely covered with TiC.
The exposure of N was confirmed by observation with a backscattered electron image of the SEM.

【0050】その結果を表10に示す。比較品1、サン
プル12のチップを未処理のまま使用した比較品4、発
明品1〜6及び18〜20を比較したところ、上層膜の
除去により切れ刃稜線部上の一部もしくはすべての部分
に、C:Nのモル比が5:5〜7:3の範囲にあるTi
CN膜が露出しているチップは、特に優れた耐剥離性を
有していることがわかった。
The results are shown in Table 10. Comparison of Comparative Product 1, Comparative Product 4 in which chips of Sample 12 were used without treatment, Invention Products 1 to 6 and 18 to 20 revealed that some or all of the parts on the cutting edge ridge due to removal of the upper layer film. And Ti with a C: N molar ratio in the range of 5: 5 to 7: 3.
It was found that the chip in which the CN film was exposed had particularly excellent peeling resistance.

【0051】[0051]

【表10】 [Table 10]

【0052】−実施例7− 実施例1で作成した試料No1(比較品1)、発明品1
〜6を用いて、図3に示すSCM435の4溝のついた
丸棒材を下記の条件で切削した。
-Example 7-Sample No. 1 (Comparative Product 1) prepared in Example 1 and Inventive Product 1
3 to 6 were used to cut a round bar material having four grooves of SCM435 shown in FIG. 3 under the following conditions.

【0053】 [0053]

【0054】寿命判定基準は欠損の発生とし、チップの
4コーナの平均寿命を切削可能時間とした。その結果を
表11に示す。これより、本発明品は被覆未処理の比較
品と違って、優れた耐欠損性を有していることがわか
る。
The life criterion was the occurrence of chipping, and the average life of the four corners of the chip was the cutting possible time. Table 11 shows the results. From this, it is understood that the product of the present invention has excellent fracture resistance, unlike the comparative product which is not treated with a coating.

【0055】[0055]

【表11】 [Table 11]

【0056】−実施例8− 表4のサンプルNo13のチップの切れ刃稜線部から、
外層のアスペクト比1.2のTiNとアスペクト比3.
4のAl2 3 膜を除去した発明品21を振動バレル機
を用いて作成し、実施例1と同じ切削試験に供した。そ
の結果、表12に示したように、発明品21は内層のア
スペクト比4.1のAl2 3 膜を残し、外層のAl2
3 を除去しただけであるにもかかわらず比較品5に比
べて優れた耐剥離性を示した。
-Example 8- From the cutting edge ridge of the tip of sample No. 13 in Table 4,
An outer layer of TiN with an aspect ratio of 1.2 and an aspect ratio of 3.
Invention product 21 from which the Al 2 O 3 film of No. 4 was removed was prepared using a vibrating barrel machine and subjected to the same cutting test as in Example 1. As a result, as shown in Table 12, Inventive product 21 leaving the Al 2 O 3 film of the inner layer of the aspect ratio 4.1, the outer layer Al 2
Even though only O 3 was removed, the exfoliation resistance was superior to that of Comparative product 5.

【0057】[0057]

【表12】 [Table 12]

【0058】−実施例9− 実施例1で作成した表4のサンプルNo3のチップの切
れ刃稜線部から、アスペクト比5以下の結晶粒を有する
膜を100%除去したチップ(発明品22〜25)を準
備した、発明品22は除去をブラスト処理で行ったも
の、発明品23はその除去を遠心バレル処理で、発明品
24は振動バレル処理で、発明品25は回転バレル処理
で各々行ったものである。
-Example 9-A chip (invention products 22 to 25) in which 100% of the film having crystal grains with an aspect ratio of 5 or less was removed from the cutting edge ridge of the chip of sample No. 3 in Table 4 prepared in Example 1 Inventive product 22 was removed by blasting, invention 23 was removed by centrifugal barreling, invention 24 was vibrating barreling, and invention 25 was rotating barreling. It is a thing.

【0059】この発明品22〜25の各チップについ
て、切れ刃稜線部での露出非酸化物膜中の残留応力をX
線(Cr−Kα)を用いてTiC(311)面にてsi
2 φ法により測定したところ、表13に示す結果が得
られた。
For each of the chips of the invention products 22 to 25, the residual stress in the exposed non-oxide film at the ridgeline of the cutting edge was measured as X.
Si on the TiC (311) plane using the line (Cr-Kα)
When measured by the n 2 φ method, the results shown in Table 13 were obtained.

【0060】また、これ等の試料で実施例1と同じ切削
試験を行ったところ、表13から判るように、膜中の残
留応力が−5〜10kgf/mm2 の範囲にある発明品
23、24の方が範囲外の発明品22、25よりも耐久
性に関して優れた性能を示した。
Further, when the same cutting test as in Example 1 was carried out on these samples, as shown in Table 13, the invention product 23 in which the residual stress in the film is in the range of -5 to 10 kgf / mm 2 , No. 24 showed superior performance in terms of durability to invention products 22 and 25 out of the range.

【0061】[0061]

【表13】 [Table 13]

【0062】−実施例10− 実施例1で用いた表4のサンプルNo1のチップを、平
均粒径が約200μmの鋼球ブラスト処理により切れ刃
稜線部から約50%の率でアスペクト比0.9のTiN
とアスペクト比3.5のAl2 3 を除去した発明品2
6と、同じサンプルを回転バレルを用い、処理時間を変
化させてバニッシングコンパウンドで研磨し、TiNと
Al2 3 を除去した発明品27、28、29を作成し
た。そして、これ等のチップの切れ刃稜線部に露出した
TiCN膜の面粗さRaの平均値をエリオニクス(株)
製のERA4000にて5000倍に拡大して測定し
た。
Example 10 The chips of Sample No. 1 in Table 4 used in Example 1 were subjected to steel ball blasting with an average particle size of about 200 μm at an aspect ratio of 0. 9 TiN
And invention 2 from which Al 2 O 3 having an aspect ratio of 3.5 was removed
Inventive products 27, 28 and 29 in which TiN and Al 2 O 3 were removed by polishing the same sample as No. 6 with a burnishing compound while changing the treatment time using a rotating barrel. Then, the average value of the surface roughness Ra of the TiCN film exposed at the cutting edge ridges of these chips is calculated by Elionix Co., Ltd.
It was measured at a magnification of 5000 times with an ERA4000 manufactured by K.K.

【0063】その結果を表14に示す。The results are shown in Table 14.

【0064】また、これ等の試料を実施例1と同じ切削
試験に供し、膜の耐剥離性(切削可能時間)について調
べた結果も併せて表14に示す。これから判るように除
去処理で露出した膜の面粗さRaの平均値が0.05μ
m以下の発明品27、28、29の方が0.05μm以
上の平均粗さの発明品26よりも耐久性に関して優れた
性能を示している。
Table 14 also shows the results obtained by subjecting these samples to the same cutting test as in Example 1 and examining the peel resistance (cuttable time) of the film. As can be seen, the average value of the surface roughness Ra of the film exposed by the removal treatment is 0.05 μm.
Inventive products 27, 28, and 29 having an average particle size of m or less exhibit superior performance in terms of durability than the inventive product 26 having an average roughness of 0.05 μm or more.

【0065】[0065]

【表14】 [Table 14]

【0066】−実施例11− 表2の膜質GのTiCN膜を、被覆温度、ガス組成、ガ
ス組成比、製造プロセスを変化させて作成し、表15に
示す試料を得た。なお、同表の最大回折強度面とは、X
線(Cu−Kα)により、10°〜140°までの範囲
で最大ピーク強度を示した面のことを意味する。
Example 11 A TiCN film having the film quality G shown in Table 2 was prepared by changing the coating temperature, gas composition, gas composition ratio and manufacturing process, and the samples shown in Table 15 were obtained. The maximum diffraction intensity surface in the table is X
By a line (Cu-Kα), it means the surface showing the maximum peak intensity in the range of 10 ° to 140 °.

【0067】[0067]

【表15】 [Table 15]

【0068】各試料は比較品7を除いて、遠心バレルを
用いて結晶粒のアスペクト比が3.2のZrO2 とアス
ペクト比0.9のTiNの一部を刃先稜線部から除去し
てある。
In each of the samples, except for Comparative product 7, a part of ZrO 2 having an aspect ratio of crystal grains of 3.2 and TiN having an aspect ratio of 0.9 was partially removed from the edge of the cutting edge using a centrifugal barrel. .

【0069】これ等の試料を用いて実施例4と同じ切削
条件で切削テストを行った結果、各試料の切削可能時間
は表15中に示す通りであった。この結果に、TiCN
膜が(311)もしくは(422)に最大回折強度を有
する発明品32、33は特に優れた切削性能を示すこと
が明確に現れている。また、除去部の表面に露出した膜
のアスペクト比が10より小さい発明品35に比べ、ア
スペクト比が大きい発明品32は優れた切削性能を示し
ている。
As a result of a cutting test using these samples under the same cutting conditions as in Example 4, the cuttable time of each sample was as shown in Table 15. This result shows that TiCN
It is clearly shown that the invention products 32 and 33 whose films have the maximum diffraction intensity at (311) or (422) exhibit particularly excellent cutting performance. Further, the invention product 32 having a large aspect ratio exhibits excellent cutting performance as compared with the invention product 35 in which the aspect ratio of the film exposed on the surface of the removed portion is smaller than 10.

【0070】以上、いくつかの実施例を挙げて、本発明
の効果を説明したが、本発明はこれらの実施例に限定さ
れるものではない。
The effects of the present invention have been described above with reference to some examples, but the present invention is not limited to these examples.

【0071】例えば、フライス切削用工具、ドリルやエ
ンドミルのような転削工具は勿論、パンチやダイス、ス
リッタのような切削用途以外の耐摩工具などでもその効
果は大きい。即ち、パンチ、スリッタは切削工具の切れ
刃稜線部に相当するエッジを有しており、一方、ダイス
はそのようなエッジは無いが、被加工材が擦過する面を
広く有しているので、脱落現象を起こし易いアスペクト
比5以下の結晶粒を有する膜を除去する本発明によれ
ば、この種の工具においても優れた効果が期待できる。
For example, not only milling tools, milling tools such as drills and end mills, but also wear resistant tools other than cutting applications such as punches, dies, and slitters have great effects. That is, the punch, slitter has an edge corresponding to the cutting edge ridge portion of the cutting tool, while the die has no such edge, but since the work material has a wide surface to rub, According to the present invention for removing a film having a crystal grain with an aspect ratio of 5 or less, which easily causes a falling phenomenon, an excellent effect can be expected also in this kind of tool.

【0072】[0072]

【発明の効果】以上述べたように、本発明の被覆硬質合
金工具は、耐摩耗性向上のための多層セラミック膜中に
含まれるアスペクト比5以下の結晶粒を有する被膜を被
加工材との摩擦が起こる部分で除去して露出部にアスペ
クト比が5より大の結晶粒を有する膜が現れる構成と
し、膜の脱落に端を発する被膜の剥離、刃先等のチッピ
ングを減少させたので、工具の寿命が大きく延び、加工
面粗度も良くなるなど、産業上多大の効果を期待でき
る。
As described above, in the coated hard alloy tool of the present invention, a coating having crystal grains with an aspect ratio of 5 or less contained in a multilayer ceramic film for improving wear resistance is used as a work material. By removing it at the part where friction occurs, a film having crystal grains with an aspect ratio of greater than 5 appears on the exposed part, and peeling of the film that starts from falling off of the film and chipping of the cutting edge are reduced. The life of the product is greatly extended, and the roughness of the machined surface is improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】(a):切削工具(チップ)の一部を示す斜視
図 (b):(a)図のX−Y断面を拡大して示す図 (c):(a)図のX−Y断面の他の例を拡大して示す
FIG. 1A is a perspective view showing a part of a cutting tool (tip). FIG. 1B is an enlarged view of an XY cross section of FIG. 1A. FIG. The figure which expands and shows the other example of Y cross section.

【図2】実施例のチップの断面の一例を拡大して示す図FIG. 2 is an enlarged view showing an example of a cross section of a chip of an example.

【図3】被膜のアスペクト比についての解説図[Fig. 3] Explanatory drawing of the aspect ratio of the film

【図4】被膜の除去率についての解説図[Fig. 4] Explanatory diagram of the film removal rate

【図5】切削試験に用いた被削材の断面形状を表す図FIG. 5 is a diagram showing a cross-sectional shape of a work material used in a cutting test.

【符号の説明】[Explanation of symbols]

1 すくい面 2 逃げ面 3 ノーズR部 4 多層セラミック被覆膜 5 母材 A 切れ刃稜線部 1 rake face 2 flank face 3 nose R part 4 multilayer ceramic coating 5 base metal A cutting edge line

フロントページの続き (72)発明者 山縣 一夫 伊丹市昆陽北一丁目1番1号 住友電気工 業株式会社伊丹製作所内Front page continuation (72) Inventor Kazuo Yamagata 1-1-1 Kunyokita, Itami-shi Sumitomo Electric Industries Itami Works

Claims (9)

【特許請求の範囲】[Claims] 【請求項1】 硬質合金から成る母材の表面に多層セラ
ミック膜の被覆を有し、その被覆膜中にはアスペクト比
5以下の結晶粒を有する被膜が少なくとも一層含まれて
いる被覆硬質合金工具において、前記被覆を構成するセ
ラミック膜のうち、上層側から数えた何層かが被加工材
との摩擦が生じる領域中少なくとも一部の領域で除去さ
れ、その除去層の中にアスペクト比5以下の結晶粒を有
する被膜が少なくとも一層含まれ、除去部の表面にアス
ペクト比5より大の結晶粒を有する膜が露出しているこ
とを特徴とする被覆硬質合金工具。
1. A coated hard alloy having a coating of a multilayer ceramic film on the surface of a base material made of a hard alloy, and the coating film containing at least one coating having crystal grains with an aspect ratio of 5 or less. In the tool, among the ceramic films constituting the coating, some layers counted from the upper layer side are removed in at least a part of the region where friction with the work material occurs, and the aspect ratio of the removed layer is 5 A coated hard alloy tool, characterized in that at least one coating film having the following crystal grains is included, and a film having crystal grains with an aspect ratio of 5 or more is exposed on the surface of the removed portion.
【請求項2】 前記除去層中に含まれるアスペクト比5
以下の結晶粒を有する被膜層のうち、少なくとも一層の
膜の結晶粒の短軸径が0.7μm以上であることを特徴
とする請求項1記載の被覆硬質合金工具。
2. The aspect ratio included in the removal layer is 5.
The coated hard alloy tool according to claim 1, wherein the minor axis diameter of the crystal grains of at least one of the coating layers having the following crystal grains is 0.7 μm or more.
【請求項3】 前記除去層中に含まれるアスペクト比5
以下の結晶粒を有する被膜がAl2 3 、又はAl2
3 を主体とする被膜である請求項1記載の被覆硬質合金
工具。
3. An aspect ratio of 5 included in the removal layer.
A coating having the following crystal grains is Al 2 O 3 or Al 2 O
The coated hard alloy tool according to claim 1, which is a coating containing 3 as a main component.
【請求項4】 前記除去部の表面に露出した膜が、窒化
物又は炭窒化物を主体とする膜である請求項1、2又は
3記載の被覆硬質合金工具。
4. The coated hard alloy tool according to claim 1, wherein the film exposed on the surface of the removed portion is a film mainly composed of nitride or carbonitride.
【請求項5】 前記除去部の表面に露出した膜が、C:
Nのモル比を5:5〜7:3の範囲にしたTiCN膜で
ある請求項1、2、3又は4記載の被覆硬質合金工具。
5. The film exposed on the surface of the removed portion is C:
The coated hard alloy tool according to claim 1, which is a TiCN film in which the molar ratio of N is in the range of 5: 5 to 7: 3.
【請求項6】 前記除去部の表面に露出した膜中の残留
応力が−5〜10kgf/mm2 である請求項1、2、
3、4又は5記載の被覆硬質合金工具。
6. The residual stress in the film exposed on the surface of the removed portion is −5 to 10 kgf / mm 2 .
The coated hard alloy tool according to 3, 4, or 5.
【請求項7】 前記除去部の表面に露出した膜の面粗さ
Raの平均値が0.05μm以下である請求項1、2、
3、4、5又は6記載の被覆硬質合金工具。
7. The surface roughness Ra of the film exposed on the surface of the removed portion has an average value of 0.05 μm or less.
The coated hard alloy tool according to 3, 4, 5 or 6.
【請求項8】 前記除去部の表面に露出した膜が(42
2)面もしくは(311)面に最大回折強度を有するT
iCN膜である請求項1乃至7のいずれかに記載の被覆
硬質合金工具。
8. The film exposed on the surface of the removed portion is (42)
T having the maximum diffraction intensity on the (2) plane or the (311) plane
The coated hard alloy tool according to any one of claims 1 to 7, which is an iCN film.
【請求項9】 前記除去部の表面に露出した膜のアスペ
クト比が10以上である請求項1乃至8のいずれかに記
載の被覆硬質合金工具。
9. The coated hard alloy tool according to claim 1, wherein the aspect ratio of the film exposed on the surface of the removed portion is 10 or more.
JP7225085A 1995-09-01 1995-09-01 Coated hard alloy tool Expired - Lifetime JP3018952B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7225085A JP3018952B2 (en) 1995-09-01 1995-09-01 Coated hard alloy tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7225085A JP3018952B2 (en) 1995-09-01 1995-09-01 Coated hard alloy tool

Publications (2)

Publication Number Publication Date
JPH0966404A true JPH0966404A (en) 1997-03-11
JP3018952B2 JP3018952B2 (en) 2000-03-13

Family

ID=16823782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7225085A Expired - Lifetime JP3018952B2 (en) 1995-09-01 1995-09-01 Coated hard alloy tool

Country Status (1)

Country Link
JP (1) JP3018952B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001121310A (en) * 1999-10-28 2001-05-08 Kyocera Corp Throwaway tip with wear sensor
JP2002292505A (en) * 2001-03-29 2002-10-08 Kyocera Corp Cutting tool equipped with sensor and its manufacturing method
JP2011110654A (en) * 2009-11-27 2011-06-09 Kyocera Corp Cutting tool for grooving
JP2012223872A (en) * 2011-04-21 2012-11-15 Sumitomo Electric Ind Ltd Coated cutting tool
KR101537718B1 (en) * 2014-04-23 2015-07-20 한국야금 주식회사 Cutting tools having coated layer removed partly

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001121310A (en) * 1999-10-28 2001-05-08 Kyocera Corp Throwaway tip with wear sensor
JP2002292505A (en) * 2001-03-29 2002-10-08 Kyocera Corp Cutting tool equipped with sensor and its manufacturing method
JP2011110654A (en) * 2009-11-27 2011-06-09 Kyocera Corp Cutting tool for grooving
JP2012223872A (en) * 2011-04-21 2012-11-15 Sumitomo Electric Ind Ltd Coated cutting tool
KR101537718B1 (en) * 2014-04-23 2015-07-20 한국야금 주식회사 Cutting tools having coated layer removed partly
CN105980092A (en) * 2014-04-23 2016-09-28 韩国冶金株式会社 Cutting tool having partially-removed film formed thereon

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