JPH095522A - Non-polarizing beam splitter - Google Patents

Non-polarizing beam splitter

Info

Publication number
JPH095522A
JPH095522A JP7180694A JP18069495A JPH095522A JP H095522 A JPH095522 A JP H095522A JP 7180694 A JP7180694 A JP 7180694A JP 18069495 A JP18069495 A JP 18069495A JP H095522 A JPH095522 A JP H095522A
Authority
JP
Japan
Prior art keywords
refractive index
polarized component
light
beam splitter
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7180694A
Other languages
Japanese (ja)
Inventor
Nobuo Funabiki
伸夫 船引
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Electric Glass Co Ltd
Original Assignee
Nippon Electric Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Glass Co Ltd filed Critical Nippon Electric Glass Co Ltd
Priority to JP7180694A priority Critical patent/JPH095522A/en
Publication of JPH095522A publication Critical patent/JPH095522A/en
Pending legal-status Critical Current

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  • Optical Communication System (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Optical Filters (AREA)

Abstract

PURPOSE: To provide a non-polarizing beam splitter which is compact and inexpensive and where the ratio of the S polarized component and the P polarized component of emitted light is equal to that of incident light over a wide wavelength band. CONSTITUTION: A plate-like transparent base plate 10 is provided with multilayer films 20 and 30 obtained by alternately laminating a high refractive index thin film and a low refractive index thin film on both surfaces. Since the ratio of the S polarized component and the P polarized component of the emitted light reflected on and transmitted through the respective surfaces of the base plate 10 is equal to that of the incident light, and the multilayer films 20 and 30 are formed on both surfaces of the base plate 10, the ratio of the S polarized component and the P polarized component of the emitted light reflected on and transmitted through the respective surfaces is freely selected, and the effective wavelength area of non-polarized light becomes very wide.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、光学機器等において光
路を二分するビームスプリッターに関し、特に、光ファ
イバ通信機器の光学系中に設けられて信号光からモニタ
ー光を分岐する無偏向ビームスプリッターに関するもの
である。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a beam splitter which divides an optical path in an optical device or the like, and more particularly to a non-deflecting beam splitter which is provided in an optical system of an optical fiber communication device and branches monitor light from signal light. It is a thing.

【0002】[0002]

【従来の技術】一般に、ビームスプリッターは、図6に
示すように、プリズム40と41との傾斜面の間に、一
定の反射率を有する光学膜50が設けられた構造をして
いる。このビームスプリッターに入射した光は、光学膜
50の反射率特性により、透過光と反射光に分岐され、
反射光は入射光に対して通常90°の方向に出射され
る。
2. Description of the Related Art In general, a beam splitter has a structure in which an optical film 50 having a constant reflectance is provided between the inclined surfaces of prisms 40 and 41, as shown in FIG. The light incident on the beam splitter is split into transmitted light and reflected light by the reflectance characteristic of the optical film 50,
The reflected light is normally emitted in the direction of 90 ° with respect to the incident light.

【0003】[0003]

【発明が解決しようとする課題】ところで、近年の光フ
ァイバ通信技術の発展により、高品位レーザーダイオー
ド光源や光ファイバアンプ等のコヒーレント光を扱う光
学系には、入射光と出射光との間に偏光特性の変化が生
じない、つまり無偏光の光学素子が要求されおり、特
に、信号光モニター用のビームスプリッターでは、ビー
ムスプリッターを透過する信号光、およびモニター光に
偏光特性の差が生じることは、信号光それ自体の品位を
低下させ、かつ不正確なモニターを行うことになる。
By the way, due to the recent development of optical fiber communication technology, an optical system for handling coherent light, such as a high-quality laser diode light source or an optical fiber amplifier, is provided between an incident light and an outgoing light. There is a demand for non-polarized optical elements that do not cause changes in polarization characteristics. In particular, in a beam splitter for a signal light monitor, there is no difference in polarization characteristics between the signal light that passes through the beam splitter and the monitor light. , The quality of the signal light itself is degraded, and inaccurate monitoring is performed.

【0004】しかしながら、従来、図6に示すビームス
プリッターの光学膜50の特性として、反射光のS偏光
成分の割合がP偏光成分の割合より遥かに大きくなる傾
向、即ち、透過光のP偏光成分の割合をS偏光成分の割
合より遥かに大きくさせる傾向がある。そこで、前記ビ
ームスプリッターの出射光のS偏光成分とP偏光成分の
割合を入射光と同等にするため、光学膜50を多層構造
としたものが提案されているが、S偏光成分とP偏光成
分の割合に波長依存性があり、広い波長域での割合を同
等にすることができず、近年の波長多重型光通信機器の
光学系には使用できないという問題点があった。
However, conventionally, as a characteristic of the optical film 50 of the beam splitter shown in FIG. 6, there is a tendency that the ratio of the S-polarized component of the reflected light is much larger than that of the P-polarized component, that is, the P-polarized component of the transmitted light. Tends to be much higher than the proportion of S-polarized component. Therefore, in order to make the ratio of the S-polarized light component and the P-polarized light component of the light emitted from the beam splitter equal to that of the incident light, it is proposed that the optical film 50 has a multilayer structure. However, there is a problem that the ratio cannot be equalized in a wide wavelength range and cannot be used in an optical system of a recent wavelength division multiplexing optical communication device.

【0005】更に、プリズムを二個用いるビームスプリ
ッターは、それ自体の小型化が困難であり、かつ部材加
工や多層光学膜の成膜、並びにそれらの組立てに要する
費用が高価となる問題点があった。
Further, the beam splitter using two prisms has a problem that it is difficult to miniaturize the beam splitter itself, and the cost required for processing the members, forming the multilayer optical film, and assembling them is expensive. It was

【0006】本発明は、従来のビームスプリッターの上
記問題点に鑑みて成されたもので、小型で安価、かつ波
長多重形光通信機器の光学系に使用可能な広い波長帯域
に亙って出射光のS偏光成分とP偏光成分の割合が入射
光と同等である無偏光ビームスプリッターを提供するこ
とを目的とする。
The present invention has been made in view of the above problems of the conventional beam splitter, and it is small and inexpensive, and has a wide wavelength band usable for an optical system of a wavelength division multiplexing optical communication device. It is an object of the present invention to provide a non-polarization beam splitter in which the ratio of S-polarized component and P-polarized component of incident light is equal to that of incident light.

【0007】[0007]

【課題を解決するための手段】上記目的を達成するた
め、本発明の無偏光ビームスプリッターは、平板状の透
明基板の両面に、高屈折率薄膜と低屈折率薄膜とを交互
に積層し、出射光のS偏光成分とP偏光成分の割合を入
射光と同等にしてなることを特徴とする。
In order to achieve the above object, the non-polarizing beam splitter of the present invention comprises a flat transparent substrate, both surfaces of which a high refractive index thin film and a low refractive index thin film are alternately laminated, It is characterized in that the ratio of the S-polarized component and the P-polarized component of the emitted light is made equal to that of the incident light.

【0008】また、本発明の無偏光ビームスプリッター
は、前記透明基板の屈折率(NS )と、高屈折率薄膜の
屈折率(NH )と、低屈折率薄膜の屈折率(NL )とを 1.4<NS <1.8 1.7<NH <2.5 1.3<NL <1.8 にしてなることを特徴とする。
In the non-polarizing beam splitter of the present invention, the refractive index (N S ) of the transparent substrate, the refractive index (N H ) of the high refractive index thin film, and the refractive index (N L ) of the low refractive index thin film. And 1.4 <N S <1.8 1.7 <N H <2.5 1.3 <N L <1.8.

【0009】本発明の無偏光ビームスプリッターは、平
板状の透明基板の夫々の面上の多層膜のS偏光成分とP
偏光成分の反射率の割合どうしを使用波長領域に亙って
相殺しあう分布となるように膜屈折率と光学的膜厚およ
び膜層数を設定することにより、基板の両面で反射およ
び透過してくる出射光のS偏光成分とP偏光成分の割合
を入射光と同等にするものである。ここで「同等」と表
現しているのは、全く同じ場合のみならず、実用に差し
支えのない程度の差を有する場合も含むことを意味す
る。具体的な数字で示すと、例えば、所定の光の波長域
で、基板の吸収による損失を0%と仮定すると、基板の
入射側でS偏光成分の反射率が2%で透過率98%、P
偏光成分の反射率が3%で透過率97%となる場合、透
過側でS偏光成分の反射率が3%で透過率97%、P偏
光成分の反射率が2%で透過率98%となれば、このビ
ームスプリッターでは、光のS偏光成分、P偏光成分共
に同等の5%反射され、95%透過する。
The non-polarizing beam splitter of the present invention comprises an S-polarized component and a P-polarized component of a multilayer film on each surface of a flat transparent substrate.
By setting the film refractive index, the optical film thickness, and the number of film layers so that the distributions of the reflectance ratios of the polarization components cancel each other out over the wavelength range used, the light is reflected and transmitted on both sides of the substrate. The ratio of the S-polarized light component and the P-polarized light component of the incoming outgoing light is made equal to that of the incoming light. The expression "equivalent" is meant to include not only the same case but also a case where there is a difference that is practically acceptable. Specifically, for example, assuming that the loss due to the absorption of the substrate is 0% in the predetermined wavelength range of light, the reflectance of the S-polarized component is 2% and the transmittance is 98% on the incident side of the substrate. P
When the reflectance of the polarized component is 3% and the transmittance is 97%, the reflectance of the S-polarized component is 3% and the transmittance is 97% on the transmitting side, and the reflectance of the P-polarized component is 2% and the transmittance is 98%. In this case, the beam splitter reflects 5% of both the S-polarized component and the P-polarized component of light, and transmits 95% thereof.

【0010】本発明の平板状の透明基板に使用され、波
長帯域が1400〜1700nmにおける屈折率が1.
4〜1.8の範囲の材料として、例えば、BLC(日本
電気硝子(株)製ホウ硅酸ガラス、屈折率が1.48〜
1.49)、石英ガラス(屈折率が1.43〜1.4
6)、サファイア(屈折率が1.73〜1.76)等が
使用可能であり、屈折率が1.7〜2.5の範囲の高屈
折率薄膜の材料として、例えば、誘電体であるTiO2
(屈折率が2.20〜2.30)、Ta25(屈折率が
1.90〜2.10)、ZrO2 (屈折率が1.90〜
2.00)等が使用可能であり、屈折率が1.3〜1.
8の範囲の低屈折率薄膜の材料として、例えば、誘電体
であるSiO2 (屈折率が1.44〜1.46)、Mg
2F (屈折率が1.35〜1.36)、Al23(屈折
率が1.50〜1.60)等が使用可能である。これら
の誘電体は光通信で使用される赤外領域の光を殆ど吸収
することなく、膜それ自体の強度が高い上に、基板に対
する膜付着強度も高く、更に物理的・化学的耐久性に優
れており取り扱いが容易である。
It is used for the flat transparent substrate of the present invention and has a refractive index of 1. in the wavelength band of 1400 to 1700 nm.
As a material having a range of 4 to 1.8, for example, BLC (borosilicate glass manufactured by Nippon Electric Glass Co., Ltd., a refractive index of 1.48 to
1.49), quartz glass (refractive index 1.43 to 1.4
6), sapphire (refractive index 1.73 to 1.76), etc. can be used, and as a material of the high refractive index thin film having a refractive index in the range of 1.7 to 2.5, for example, a dielectric is used. TiO 2
(Refractive index 2.20 to 2.30), Ta 2 O 5 (refractive index 1.90 to 2.10), ZrO 2 (refractive index 1.90 to
2.00) or the like can be used, and the refractive index is 1.3 to 1.
As the material of the low refractive index thin film in the range of 8, for example, SiO 2 (refractive index is 1.44 to 1.46) which is a dielectric, Mg
2 F (refractive index 1.35 to 1.36), Al 2 O 3 (refractive index 1.50 to 1.60) and the like can be used. These dielectrics hardly absorb the light in the infrared region used in optical communication, and the strength of the film itself is high, and the adhesion strength of the film to the substrate is also high, and the physical and chemical durability is further improved. Excellent and easy to handle.

【0011】[0011]

【作用】本発明の無偏光ビームスプリッターは、平板状
の透明基板の両面に、高屈折率薄膜と低屈折率薄膜とを
交互に積層し、出射光のS偏光成分とP偏光成分の割合
を入射光と同等にしてなるので、基板の夫々の面で反射
および透過する光のS偏光成分とP偏光成分の割合を夫
々の面の多層膜で調整することにより、出射光のS偏光
成分とP偏光成分の割合を入射光と同等にできると共
に、基板両面に多層膜を形成するので、その多層膜での
反射光および透過光のS偏光成分とP偏光成分の割合を
自由に選択でき、その偏光特性の有効波長域を十分広く
できる。
In the non-polarizing beam splitter of the present invention, a high refractive index thin film and a low refractive index thin film are alternately laminated on both sides of a flat transparent substrate, and the ratio of the S polarization component and the P polarization component of the emitted light is adjusted. Since it becomes the same as the incident light, by adjusting the ratio of the S-polarized component and the P-polarized component of the light reflected and transmitted by each surface of the substrate with the multilayer film of each surface, The ratio of the P-polarized component can be made equal to that of the incident light, and since the multilayer film is formed on both surfaces of the substrate, the ratio of the S-polarized component and the P-polarized component of the reflected light and the transmitted light at the multilayer film can be freely selected. The effective wavelength range of the polarization characteristics can be sufficiently widened.

【0012】[0012]

【実施例】図1は、本発明の実施例を示す概念図、図2
は要部拡大断面図を示している。これらの図において、
1、3は入射側高屈折率薄膜、2、4は入射側低屈折率
薄膜、5、7は透過側高屈折率薄膜、6、8は透過側低
屈折率薄膜、10は板状透明基板、20は入射側多層
膜、30は透過側多層膜をそれぞれ示している。
1 is a conceptual diagram showing an embodiment of the present invention, FIG.
Shows an enlarged sectional view of a main part. In these figures,
1 and 3 are incident side high refractive index thin films, 2 and 4 are incident side low refractive index thin films, 5 and 7 are transmission side high refractive index thin films, 6 and 8 are transmission side low refractive index thin films, and 10 is a plate-like transparent substrate. Reference numeral 20 denotes an incident side multilayer film, and 30 denotes a transmission side multilayer film.

【0013】平板状の透明基板10としてホウ硅酸ガラ
スのBLC(日本電気硝子(株)製、屈折率1.48〜
1.49)を材料として、寸法が4mm×4mm×0.
5mmの両面が鏡面であるガラス板を精密洗浄した後、
この基板の夫々の面に、高屈折率薄膜としてTa25
低屈折率薄膜としてSiO2 を膜材料として使用して、
理論設計上、中心波長1550nm、入射角45°、反
射率5%の仕様となる表1に示す膜の順序および光学的
膜厚の多層膜20および30を真空蒸着法で蒸着して成
膜して、無偏光ビームスプリッターを作製した。
BLC of borosilicate glass (manufactured by Nippon Electric Glass Co., Ltd., refractive index 1.48 to 10) as the flat transparent substrate 10.
1.49) as a material and the dimensions are 4 mm × 4 mm × 0.
After precision cleaning a 5 mm glass plate with mirror surfaces on both sides,
On each surface of this substrate, using Ta 2 O 5 as a high refractive index thin film and SiO 2 as a low refractive index thin film as film materials,
The theoretical design is such that the center wavelength is 1550 nm, the incident angle is 45 °, and the reflectance is 5%. As a result, a non-polarizing beam splitter was produced.

【0014】[0014]

【表1】 [Table 1]

【0015】先ず、平板状の透明基板10の入射側にT
25とSiO2 とが交互に四層積層された多層膜20
を成膜して試料を作成し、その試料に対し、波長140
0〜1700nmの光を入射角45°で光を入射させ、
S偏光成分およびP偏光成分の夫々の反射率を測定し
た。その測定結果を図3の分光特性図に示す。
First, T is provided on the incident side of the flat transparent substrate 10.
Multilayer film 20 in which four layers of a 2 O 5 and SiO 2 are alternately laminated
Is formed into a sample and a wavelength of 140
Light of 0 to 1700 nm is incident at an incident angle of 45 °,
The reflectance of each of the S-polarized component and the P-polarized component was measured. The measurement results are shown in the spectral characteristic diagram of FIG.

【0016】先記の多層膜20が付いた試料とは別個
に、平板状の透明基板10の透過側にTa25とSiO
2 とが交互に四層積層された多層膜30を成膜して試料
を作成し、その試料に対し、波長1400〜1700n
mの光を入射角45°で光を入射させ、S偏光成分およ
びP偏光成分の夫々の反射率を測定した。その測定結果
を図4の分光特性図に示す。
Separately from the sample having the above-mentioned multilayer film 20, Ta 2 O 5 and SiO 2 are provided on the transparent side of the flat plate-like transparent substrate 10.
A sample is created by forming a multilayer film 30 in which four layers of 2 and 2 are alternately laminated, and a wavelength of 1400 to 1700n is applied to the sample.
The light of m was incident at an incident angle of 45 °, and the reflectances of the S-polarized component and the P-polarized component were measured. The measurement result is shown in the spectral characteristic diagram of FIG.

【0017】図3と図4とに示した分光特性を有する多
層膜を、平板状の透明基板10の入射側および透過側の
夫々の面に多層膜20および30を積層して成膜した完
成品のビームスプリッターに対し、波長1400〜17
00nmの光を入射角45°で光を入射させ、S偏光成
分およびP偏光成分の夫々の反射率を測定した。その測
定結果を図5の分光特性図に示す。
A multilayer film having the spectral characteristics shown in FIGS. 3 and 4 is formed by laminating the multilayer films 20 and 30 on each of the incident side and the transmitting side of the flat transparent substrate 10. 1400 to 17 for the beam splitter of the product
Light having a wavelength of 00 nm was incident at an incident angle of 45 °, and the reflectances of the S-polarized component and the P-polarized component were measured. The measurement result is shown in the spectral characteristic diagram of FIG.

【0018】その結果、図5に示されたS偏光成分とP
偏光成分の反射率の分布から、反射率5.0±1.0
%、S偏光成分とP偏光成分の反射率差0.3dB以内
の条件で、有効波長範囲が1480nm〜1600nm
におよぶ120nmに亙る広帯域の無偏光ビームスプリ
ッターが製作できたことが確認された。
As a result, the S-polarized component and P shown in FIG.
From the distribution of the reflectance of the polarized component, the reflectance of 5.0 ± 1.0
%, The effective wavelength range is 1480 nm to 1600 nm under the condition that the reflectance difference between the S-polarized component and the P-polarized component is within 0.3 dB.
It was confirmed that a wide-band unpolarized beam splitter covering 120 nm was manufactured.

【0019】[0019]

【発明の効果】本発明の無偏光ビームスプリッターによ
れば、出射光のS偏光成分とP偏光成分の割合を入射光
に対して同等にすると共に、その偏光特性の有効波長域
を十分な広さに確保できるので、高品位レーザーダイオ
ード光源や光ファイバアンプ等のコヒーレント光を扱う
光学系および波長多重型光通信機器の光学系の信号光の
モニターに使用できる。
According to the non-polarizing beam splitter of the present invention, the ratio of the S-polarized component and the P-polarized component of the emitted light is made equal to that of the incident light, and the effective wavelength range of the polarization characteristic is sufficiently wide. Therefore, it can be used for monitoring the signal light of an optical system that handles coherent light such as a high-quality laser diode light source or an optical fiber amplifier and an optical system of a wavelength division multiplexing optical communication device.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の構成を示す概念図。FIG. 1 is a conceptual diagram showing the configuration of the present invention.

【図2】図1の要部拡大断面図。FIG. 2 is an enlarged cross-sectional view of a main part of FIG.

【図3】本発明実施例の入射側多層膜の分光特性図。FIG. 3 is a spectral characteristic diagram of an incident side multilayer film according to an example of the present invention.

【図4】本発明実施例の透過側多層膜の分光特性図。FIG. 4 is a spectral characteristic diagram of a transmission-side multilayer film according to an example of the present invention.

【図5】本発明実施例のビームスプリッターの分光特性
図。
FIG. 5 is a spectral characteristic diagram of a beam splitter according to an embodiment of the present invention.

【図6】従来技術の構成を示す概念図。FIG. 6 is a conceptual diagram showing a configuration of a conventional technique.

【符号の説明】[Explanation of symbols]

1、3 入射側高屈折率薄膜 2、4 入射側低屈折率薄膜 5、6 透過側高屈折率薄膜 7、8 透過側低屈折率薄膜 10 板状透明基板 20 入射側多膜 30 透過側多層膜 40 入射側プリズム 41 透過側プリズム 50 光学膜 1, 3 Incident side high refractive index thin film 2, 4 Incident side low refractive index thin film 5, 6 Transmission side high refractive index thin film 7, 8 Transmission side low refractive index thin film 10 Plate transparent substrate 20 Incidence side multi-layer film 30 Transmission side multilayer Film 40 Incident side prism 41 Transmission side prism 50 Optical film

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 平板状の透明基板の両面に、高屈折率薄
膜と低屈折率薄膜とを交互に積層し、出射光のS偏光成
分とP偏光成分の割合を入射光と同等にしてなることを
特徴とする無偏光ビームスプリッター。
1. A high-refractive-index thin film and a low-refractive-index thin film are alternately laminated on both surfaces of a flat transparent substrate so that the ratio of S-polarized light component and P-polarized light component of emitted light is equal to that of incident light. A non-polarizing beam splitter characterized by that.
【請求項2】 前記透明基板の屈折率(NS )と、高屈
折率薄膜の屈折率(NH )と、低屈折率薄膜の屈折率
(NL )とを 1.4<NS <1.8 1.7<NH <2.5 1.3<NL <1.8 にしてなることを特徴とする請求項1記載の無偏光ビー
ムスプリッター。
2. The refractive index (N S ) of the transparent substrate, the refractive index (N H ) of the high refractive index thin film, and the refractive index (N L ) of the low refractive index thin film are 1.4 <N S < The non-polarizing beam splitter according to claim 1, wherein 1.8 1.7 <N H <2.5 1.3 <N L <1.8.
JP7180694A 1995-06-22 1995-06-22 Non-polarizing beam splitter Pending JPH095522A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7180694A JPH095522A (en) 1995-06-22 1995-06-22 Non-polarizing beam splitter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7180694A JPH095522A (en) 1995-06-22 1995-06-22 Non-polarizing beam splitter

Publications (1)

Publication Number Publication Date
JPH095522A true JPH095522A (en) 1997-01-10

Family

ID=16087679

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7180694A Pending JPH095522A (en) 1995-06-22 1995-06-22 Non-polarizing beam splitter

Country Status (1)

Country Link
JP (1) JPH095522A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11242116A (en) * 1998-02-25 1999-09-07 Nec Eng Ltd Wavelength variable optical filter and optical amplifier combining the filter
JP2009294679A (en) * 2004-12-02 2009-12-17 Asahi Glass Co Ltd Projection-type display device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11242116A (en) * 1998-02-25 1999-09-07 Nec Eng Ltd Wavelength variable optical filter and optical amplifier combining the filter
JP2009294679A (en) * 2004-12-02 2009-12-17 Asahi Glass Co Ltd Projection-type display device

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