JPH0952756A - Alumina ceramic - Google Patents
Alumina ceramicInfo
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- JPH0952756A JPH0952756A JP7224598A JP22459895A JPH0952756A JP H0952756 A JPH0952756 A JP H0952756A JP 7224598 A JP7224598 A JP 7224598A JP 22459895 A JP22459895 A JP 22459895A JP H0952756 A JPH0952756 A JP H0952756A
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Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、高純度及び緻密性
・切削性に優れたアルミナセラミックスに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to alumina ceramics having high purity and excellent compactness and machinability.
【0002】[0002]
【従来の技術】アルミナ(Al2O3)に代表されるファ
インセラミックスは、金属やプラスチックに比べ耐熱性
や耐摩耗性に優れるが、難加工性の故に高価となり充分
に実用化が進んでいるとは言い難い。 2. Description of the Related Art Fine ceramics represented by alumina (Al 2 O 3 ) are superior in heat resistance and abrasion resistance to metals and plastics, but are difficult to process and expensive, and have been sufficiently put into practical use. It is hard to say.
【0003】これまで、平均粒子径が数μm(1μm
超)のAl2O3を主成分(99重量%)とし、焼結助剤
であるSiO2、MgO、CaO等のガラス相成分を合
計で1重量%を含有するセラミックス原料を、1500
〜1600℃で焼成することによって平均粒子径が20
〜40μmのアルミナセラミックスを得る方法が開示さ
れている。Until now, the average particle diameter was several μm (1 μm).
A ceramic raw material containing Al 2 O 3 (exceeding 1) as a main component (99% by weight) and a glass phase component such as SiO 2 which is a sintering aid, MgO, CaO in a total amount of 1% by weight is 1500
The average particle size is 20 by firing at ~ 1600 ° C.
Disclosed is a method for obtaining alumina ceramics having a size of ˜40 μm.
【0004】特公昭63―66795号、特公平3―5
1244号公報などに示されるように、Al2O3含有量
を99.6〜99.9重量%とし、残部がSiO2、M
gO、CaOからなる高純度アルミナセラミックスは耐
摩耗性が高く、不純物量が少ないことを特長としてい
る。これらには、Y2O3を添加する記述は認められな
い。Japanese Patent Publication No. 63-66795, Japanese Patent Publication No. 3-5
As disclosed in Japanese Patent No. 1244, the Al 2 O 3 content is set to 99.6 to 99.9% by weight, and the balance is SiO 2 , M.
High-purity alumina ceramics composed of gO and CaO are characterized by high wear resistance and low impurity content. No description of adding Y 2 O 3 is found in these documents.
【0005】特公平7―12969、特公平7―174
59号公報には、Y2O3、MgO、La2O3、ZrO2
添加によるAl2O3焼結体結晶粒径の縮小に伴う絶縁性
の向上効果を述べているが、本願発明のMgO―SiO
2―Y2O3及びSiO2―Y2O3系による焼結時の液相析
出温度の低下によるAl2O3焼結体の結晶粒成長の促
進、増大効果は調べられていない。さらに、SiO2は
出来る限り添加しないことが望ましいという記述があ
る。Japanese Patent Publication No. 7-12969, Japanese Patent Publication No. 7-174
No. 59 discloses that Y 2 O 3 , MgO, La 2 O 3 and ZrO 2
The effect of improving the insulating property due to the reduction of the crystal grain size of the Al 2 O 3 sintered body by the addition is described.
The effect of accelerating and increasing the crystal grain growth of the Al 2 O 3 sintered body due to the lowering of the liquid phase precipitation temperature during sintering with 2- Y 2 O 3 and SiO 2 —Y 2 O 3 system has not been investigated. Further, there is a description that it is desirable to add SiO 2 as little as possible.
【0006】[0006]
【発明が解決しようとする課題】ところが、このような
Al2O3含有量の高いアルミナセラミックスは焼結時に
緻密化させることが困難である。However, it is difficult to densify such alumina ceramics having a high Al 2 O 3 content during sintering.
【0007】そこで、特公平6―88832号公報に見
られるように、アルコキシド法などの高価な化学合成法
による高密度化や、Al2O3の原料粒子径が0.3μm
以下の原料を用いた研究も盛んに行われているが、焼結
体の平均粒径が2μm以下、ビッカース硬さが1500
kgf/mm2 以上であるため加工性が低く、原料や粉
末価格が高い、製造工程が複雑なことが問題であった。Therefore, see Japanese Patent Publication No. 6-88832.
Expensive chemical synthesis method such as alkoxide method
Densification due to2OThreeRaw material particle size is 0.3 μm
Research using the following raw materials is also actively carried out, but sintering
The average particle size of the body is 2 μm or less, and the Vickers hardness is 1500
kgf / mm2 Since it is above, the workability is low, and raw materials and powder
The problem was that the final price was high and the manufacturing process was complicated.
【0008】[0008]
【課題を解決するための手段】本発明は、Al2O3含有
量が99.05〜99.85重量%、MgO含有量0.
01〜0.10重量%、SiO2含有量0.05〜0.
50重量%、Y2O3含有量0.05〜0.50重量%に
よって構成される原料粉末を最高焼成温度が1550〜
1650℃の範囲内で少なくとも1時間以上保持してな
るアルミナセラミックス焼結体において、該焼結体のア
ルキメデス密度が3.85g/cm3 以上、平均粒径が
5〜20μmの範囲内、ビッカース硬さが1500kg
f/mm2以下、かつ弾性率が370MPa以上である
ことを特徴とするアルミナセラミックスが得られる方法
を明らかにしたものである。The present invention is based on Al2OThreeContained
Content of 99.05 to 99.85% by weight, MgO content of 0.
01-0.10% by weight, SiO2Content 0.05-0.
50% by weight, Y2OThreeContent of 0.05 to 0.50% by weight
The maximum firing temperature of the raw material powder constituted by
Keep the temperature within the range of 1650 ℃ for at least 1 hour.
Alumina ceramics sintered body
Lukimeds density is 3.85 g / cmThree Above, the average particle size is
Vickers hardness of 1500 kg within the range of 5 to 20 μm
f / mm2Below, and the elastic modulus is 370 MPa or more
Method for obtaining alumina ceramics characterized by
Is made clear.
【0009】本発明において、Al2O3含有量を99.
05〜99.85重量%の範囲に限定した理由を示す。
99.05重量%未満ではガラス相または希土類酸化物
相が粒界に偏析し、Al2O3本来の機械的特性の低下を
もたらすために好ましくなく、99.85重量%を超え
ると緻密化や結晶粒径の粗大化が困難となり、加工性の
向上が望めなくなるため不適である。In the present invention, the Al 2 O 3 content is 99.
The reason why it is limited to the range of 05 to 99.85% by weight will be shown.
If it is less than 99.05% by weight, the glass phase or the rare earth oxide phase segregates at the grain boundaries, and the mechanical properties inherent to Al 2 O 3 are deteriorated, which is not preferable, and if it exceeds 99.85% by weight, densification or It is not suitable because it is difficult to increase the crystal grain size and improvement in workability cannot be expected.
【0010】MgOの0.01〜0.10重量%で示さ
れる含有量は、市販のアルミナ粉末に故意に添加してあ
る範囲内であり、公知の範囲内として扱うことが可能で
ある。このため、特に言及することはないが、含有量に
応じて焼結体の色あいが変化する点に留意した。The content of MgO represented by 0.01 to 0.10% by weight is within the range intentionally added to commercially available alumina powder, and can be treated as a known range. Therefore, although not particularly mentioned, it was noted that the color tone of the sintered body changes depending on the content.
【0011】SiO2含有量の0.05〜0.50重量
%は、後述するY2O3と同量もしくは1:4〜4:1、
好ましくは1:2〜2:1の範囲内で用いることが有効
であったため、この範囲とした。0.05 to 0.50% by weight of the SiO 2 content is the same as Y 2 O 3 described later or 1: 4 to 4: 1.
Since it was effective to use within the range of preferably 1: 2 to 2: 1, it was set to this range.
【0012】ここで、SiO2とY2O3の配合比を同量
もしくは1:4〜4:1の範囲内にする根拠として、こ
の組成域で比較的低融点の液相を形成するため、結晶粒
の成長を促進することが挙げられる。Here, the reason why the mixing ratio of SiO 2 and Y 2 O 3 is the same amount or within the range of 1: 4 to 4: 1 is because a liquid phase having a relatively low melting point is formed in this composition range. , Promoting the growth of crystal grains.
【0013】Y2O3は、本願発明による新たな配合系の
特徴要素であり、結晶構造が希土類酸化物C型であり、
同時にY3+とO2-の両イオン半径比(rcaton/
ranion)が0.693である。Y 2 O 3 is a characteristic element of the new compounding system according to the present invention, and has a crystal structure of rare earth oxide C type,
At the same time, both ionic radius ratios of Y 3+ and O 2− (r caton /
r anion ) is 0.693.
【0014】α―Al2O3はコランダム型であるが希土
類酸化物C型とともに6配位の酸素イオンを有する点で
一致する。Α-Al 2 O 3 is a corundum type, but is in agreement with the rare earth oxide C type in that it has a hexacoordinate oxygen ion.
【0015】しかも希土類酸化物C型は8配位の2個の
酸素イオンが抜けた構造であるため、ここにアルミニウ
ムイオンが入り込み易く、置換が進行し易い特徴を有す
る。In addition, since the rare earth oxide C type has a structure in which two oxygen ions with eight coordinations are eliminated, aluminum ions are easily introduced into the rare earth oxide C type, and substitution is facilitated.
【0016】例えば、Si3N4の焼結助剤としてAl2
O3―Y2O3系が広く用いられている理由の一つに、A
l2O3―Y2O3の融液が1550〜1650℃の温度域
で安定かつSi3N4のα→β相転移を円滑に行う機能が
あげられる。For example, Al 2 is used as a sintering aid for Si 3 N 4.
One of the reasons why the O 3 -Y 2 O 3 system is widely used is
The function is that the melt of l 2 O 3 —Y 2 O 3 is stable in the temperature range of 1550 to 1650 ° C. and the α → β phase transition of Si 3 N 4 is smoothly performed.
【0017】反面、Paulingによって示された結
合のイオン性がPMg-O=PY-O=0.73で等しく、A
l2O3のPAl-O=0.63より高いことからイオン結合
性がMgO並に高いため、高温での易動性が著しいこと
が特徴である。On the other hand, the ionicity of the bond shown by Pauling is equal to P Mg-O = P YO = 0.73, and A
Since it is higher than P Al-O = 0.63 of l 2 O 3, the ionic bondability is as high as that of MgO, and the feature is that the mobility at high temperature is remarkable.
【0018】したがって、Al2O3の拡散を促進する
が、固溶量は比較的少なくAl2O3単味の結晶粒成長を
促進するはたらきをもつ。Therefore, although the diffusion of Al 2 O 3 is promoted, the solid solution amount is relatively small, and it has the function of promoting the growth of crystal grains of Al 2 O 3 alone.
【0019】最高焼成温度を1550〜1650℃にし
た理由として、1550℃未満では充分に緻密化が進行
せず、1650℃以上ではSiO2などの分解が発生し
組成が外れることに加え、結晶粒が40μm以上に巨大
化するため焼結体の機械的性質の低下が起こり、好まし
くない。The reason for setting the maximum firing temperature to 1550 to 1650 ° C. is that if the temperature is less than 1550 ° C., the densification does not proceed sufficiently, and if it is 1650 ° C. or more, decomposition of SiO 2 or the like occurs and the composition becomes out of order. Is increased to 40 μm or more, the mechanical properties of the sintered body are deteriorated, which is not preferable.
【0020】同様に最高温度で1時間未満の保持時間で
は充分に緻密化が進行せず、5〜20μmの粒成長も起
こらないため好ましくない。工業的な生産性と焼結体の
適切な結晶粒成長範囲から考えれば、1〜8時間が適し
ている。Similarly, if the holding time is less than 1 hour at the maximum temperature, densification does not proceed sufficiently and grain growth of 5 to 20 μm does not occur, which is not preferable. Considering the industrial productivity and the appropriate crystal grain growth range of the sintered body, 1 to 8 hours is suitable.
【0021】また、Al2O3粉末の平均粒子径が0.4
μm未満では通常市販されていないか、もしくは高価か
つ取り扱いが困難なため除外した。1.0μmを超える
と緻密化が阻害された。BET比表面積が5m2 /g未
満では同様に焼結時の緻密化が低下したため除外した。In addition, Al2OThreeThe average particle size of the powder is 0.4
If it is less than μm, it is usually not commercially available or expensive.
It was difficult to handle and was excluded. Over 1.0 μm
And densification was hindered. BET specific surface area is 5m2 / G not
Similarly, when it was full, the densification at the time of sintering decreased, so it was excluded.
【0022】ボーリング穴開け研削加工(軸心注水)、
使用砥石としてメタルボンドダイヤモンドコアドリル砥
石(#120、φ8mm、砥石周速は60m/mi
n.、切り込みは40mm/min.、総切り込みは1
0mm×10回という条件で加工を行う場合のキスラー
動力計による動力抵抗値が600N以下を選定した根拠
として、600Nを超える場合、砥石の摩耗量が著しく
大きくなるとともに目詰まりが発生し易くなる。この砥
石の変化に伴って、チッピングや割れの発生率が高ま
る。Boring hole grinding (axial water injection),
Metal bond diamond core drill wheel (# 120, φ8mm, wheel peripheral speed is 60m / mi)
n. , The cut is 40 mm / min. , Total cut is 1
As a basis for selecting a power resistance value of 600 N or less by the Kistler dynamometer when processing is performed under the condition of 0 mm × 10 times, when the power resistance value exceeds 600 N, the abrasion amount of the grindstone becomes significantly large and clogging easily occurs. The rate of occurrence of chipping and cracks increases with the change in the grindstone.
【0023】[0023]
【作用】通常市販のAl2O3粉末や焼成炉を用いること
が可能なため、製造費の増加を考慮せずに加工時間や費
用の低減が可能になった。Since it is possible to use a commercially available Al 2 O 3 powder or a firing furnace, it is possible to reduce the processing time and cost without considering the increase in manufacturing cost.
【0024】[0024]
【実施例】以下、本発明の実施例の一例を示す。EXAMPLE An example of the present invention will be described below.
【0025】Al2O3原料粉末として、純度99.85
重量%(残分はNa2O、Fe2O3等の不可避化合
物)、平均粒子径が0.6μm、純度99.99重量%
のMgO、純度99.99重量%のSiO2、純度9
9.9重量%のY2O3を以下の第1表に示した配合系で
評価を行った。As the Al 2 O 3 raw material powder, the purity is 99.85.
% By weight (the balance is unavoidable compounds such as Na 2 O and Fe 2 O 3 ), average particle size is 0.6 μm, purity 99.99% by weight
MgO, purity 99.99% by weight SiO 2 , purity 9
9.9 wt% Y 2 O 3 was evaluated in the compounding system shown in Table 1 below.
【0026】これらの配合をボールミルで24時間混合
した後、公知の噴霧乾燥法によって造粒した。これを
1.4t/cm2 の静水圧加圧により75×100×2
0mmの板状体に成形した。この成形体を大気雰囲気中
で各最高温度まで昇温した後、同保持時間で焼成した。
この焼結体をアルキメデス法にて嵩密度の測定を行い、
荷重10kgfのビッカース硬さを測定した。また、焼
結体の平均粒径は研磨面のSEM写真を拡大し、一線破
断法にて測定した。Mix these compounds in a ball mill for 24 hours
After that, it was granulated by a known spray drying method. this
1.4t / cm2 75 × 100 × 2 by hydrostatic pressurization
It was molded into a 0 mm plate-shaped body. This molded body in the atmosphere
After the temperature was raised to each maximum temperature in, the firing was performed for the same holding time.
This sintered body is measured for the bulk density by the Archimedes method,
The Vickers hardness with a load of 10 kgf was measured. Also baked
For the average particle size of the aggregate, magnify the SEM photograph of the polished surface and break the line.
It was measured by cutting method.
【0027】次に、以上の測定を終えた焼結体の切削加
工性を評価する目的で、以下の加工条件で切断加工を行
った。Next, for the purpose of evaluating the machinability of the sintered body after the above measurement, cutting was performed under the following machining conditions.
【0028】 研削方式:ボーリング穴開け加工(軸心注水) 使用砥石:メタルボンドダイヤモンドコアドリル砥石
(#120、φ8mm) 砥石周速:60m/min. 切り込み:40mm/min. 総切り込み:10mm×10回Grinding method: Boring boring (axial center water injection) Wheel used: Metal bond diamond core drill wheel (# 120, φ8 mm) Wheel peripheral speed: 60 m / min. Notch: 40 mm / min. Total incision: 10 mm x 10 times
【0029】これらの条件でGC(グラインディングセ
ンター)による穴開け加工を行い、この加工中のZ軸方
向の研削抵抗値をキスラー動力計により検出し、研削加
工性の評価指標とした。研削抵抗値が600(N)以下
であれば良好な加工性を有するものとした。これらの結
果を第1表に示した。Drilling was carried out by a GC (grinding center) under these conditions, and the grinding resistance value in the Z-axis direction during this processing was detected by a Kistler dynamometer to be used as an evaluation index of grinding workability. If the grinding resistance value was 600 (N) or less, it was determined that the workability was good. The results are shown in Table 1.
【0030】[0030]
【表1】 [Table 1]
【0031】以上の結果より、本発明のアルミナセラミ
ックスは3.85g/cm3 以上の焼結体密度と焼結体
平均粒径が5〜20μmにあり、30%以上の動力抵抗
値の低減を可能にする良好な加工性を有することが確認
された。From the above results, the alumina ceramics of the present invention
X is 3.85 g / cmThree Sintered body density and sintered body
Average particle size is 5 to 20 μm, power resistance of 30% or more
Confirmed to have good workability that enables reduction of values
Was done.
【0032】図1に本発明のアルミナセラミックス研磨
面のSEM写真の模式図を示した。FIG. 1 shows a schematic view of an SEM photograph of the polished surface of the alumina ceramics of the present invention.
【0033】[0033]
【発明の効果】本発明によれば、アルミナセラミックス
におけるAl2O3含有量を99.05〜99.85重量
%に保持しながら、容易に緻密化が可能であり、かつ切
削性に優れる配合系が確立出来た。EFFECTS OF THE INVENTION According to the present invention, it is possible to easily densify the alumina ceramics while maintaining the Al 2 O 3 content in the alumina ceramics at 99.05 to 99.85% by weight, and to have a composition excellent in machinability. The system was established.
【0034】ここに開示したアルミナセラミックスは、
Al2O3含有量が99.05〜99.85重量%、Mg
O含有量0.01〜0.10重量%、SiO2含有量
0.05〜0.50重量%、Y2O3添加量0.05〜
0.50重量%によって構成される原料粉末を最高焼成
温度が1550〜1650℃の範囲内で少なくとも1時
間以上保持して得られる。The alumina ceramics disclosed herein are
Al 2 O 3 content is 99.05 to 99.85% by weight, Mg
O content 0.01 to 0.10% by weight, SiO 2 content 0.05 to 0.50% by weight, Y 2 O 3 addition amount 0.05 to
The raw material powder composed of 0.50% by weight is obtained by keeping the maximum firing temperature within the range of 1550 to 1650 ° C. for at least 1 hour or more.
【0035】本発明により、アルミナセラミックス部材
を製造する際に、原料費が安く抑えながら切削加工性に
優れることが可能になったので、製造コストの低減が達
成された。According to the present invention, when the alumina ceramic member is manufactured, it is possible to reduce the raw material cost and excel in the machinability, so that the manufacturing cost can be reduced.
【図1】本発明のアルミナセラミックスの研磨面をSE
M観察した際の写真の模式図である。FIG. 1 shows the SE of the polished surface of the alumina ceramics of the present invention.
It is a schematic diagram of the photograph at the time of M observation.
フロントページの続き (72)発明者 遠藤 英宏 川崎市中原区井田1618番地 新日本製鐵株 式会社先端技術研究所内 (72)発明者 佐藤 裕 川崎市中原区井田1618番地 新日本製鐵株 式会社先端技術研究所内Front page continuation (72) Inventor Hidehiro Endo 1618 Ida, Nakahara-ku, Kawasaki City, Advanced Technology Research Laboratories, Nippon Steel Corporation (72) Yutaka Sato 1618 Ida, Nakahara-ku, Kawasaki City Company Advanced Technology Research Center
Claims (3)
5重量%、MgO含有量が0.01〜0.10重量%、
SiO2含有量が0.05〜0.50重量%、Y2O3含
有量が0.05〜0.50重量%によって構成される原
料粉末について、Al2O3粉末の平均粒子径が0.4〜
1.0μm、BET比表面積が5m2/g以上で、焼成
時の最高温度が1550〜1650℃の範囲内で少なく
とも1時間以上保持してなるアルミナセラミックス。1. An Al 2 O 3 content of 99.05 to 99.8.
5% by weight, the content of MgO is 0.01 to 0.10% by weight,
Regarding a raw material powder composed of a SiO 2 content of 0.05 to 0.50 wt% and a Y 2 O 3 content of 0.05 to 0.50 wt%, the average particle diameter of the Al 2 O 3 powder is 0. .4 ~
Alumina ceramics having a BET specific surface area of 1.0 μm, a BET specific surface area of 5 m 2 / g or more, and a maximum temperature during firing kept in the range of 1550 to 1650 ° C. for at least 1 hour or more.
デス密度が3.85g/cm3以上、平均粒径が5〜2
0μmの範囲内、ビッカース硬さが1500kgf/m
m2以下、かつ弾性率が370MPa以上であることを
特徴とするアルミナセラミックス。2. The sintered body according to claim 1, wherein the sintered body has an Archimedes density of 3.85 g / cm 3 or more and an average particle diameter of 5 to 2.
Vickers hardness is 1500kgf / m in the range of 0μm
Alumina ceramics characterized by having m 2 or less and an elastic modulus of 370 MPa or more.
5重量%、MgO含有量が0.01〜0.10重量%、
SiO2含有量が0.05〜0.50重量%、Y2O3含
有量が0.05〜0.50重量%によって構成される原
料粉末について、Al2O3粉末の平均粒子径が0.4〜
1.0μm、BET比表面積が5m2 /g以上で、焼成
時の最高温度が1550〜1650℃の範囲内で少なく
とも1時間以上保持してなるアルミナセラミックス焼結
体において、ボーリング穴開け研削加工(軸心注水)、
使用砥石としてメタルボンドダイヤモンドコアドリル砥
石(#120、φ8mm、砥石周速は60m/mi
n.、切り込みは40mm/min.、総切り込みは1
0mm×10回という条件で加工を行う場合のキスラー
動力計による動力抵抗値が600N以下であることを特
徴とするアルミナセラミックス。3. Al 2OThreeContent is 99.0-59.8
5% by weight, the content of MgO is 0.01 to 0.10% by weight,
SiO2Content is 0.05 to 0.50% by weight, Y2OThreeIncluding
Raw material whose content is comprised between 0.05 and 0.50% by weight
Al powder2OThreeThe average particle size of the powder is 0.4 to
1.0 μm, BET specific surface area 5 m2 / G or more, baking
The maximum temperature is less than 1550 to 1650 ℃
Alumina ceramics sintered by holding for 1 hour or more
In the body, boring and drilling grinding (axial center water injection),
Metal bond diamond core drill grinding wheel
Stone (# 120, φ8mm, grinding wheel peripheral speed is 60m / mi
n. , The cut is 40 mm / min. , Total cut is 1
Kistler when processing under the condition of 0 mm x 10 times
The power resistance value by the dynamometer is 600N or less
Alumina ceramics to collect.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP07224598A JP3075389B2 (en) | 1995-08-10 | 1995-08-10 | Alumina ceramics |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP07224598A JP3075389B2 (en) | 1995-08-10 | 1995-08-10 | Alumina ceramics |
Publications (2)
Publication Number | Publication Date |
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JPH0952756A true JPH0952756A (en) | 1997-02-25 |
JP3075389B2 JP3075389B2 (en) | 2000-08-14 |
Family
ID=16816240
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JP07224598A Expired - Fee Related JP3075389B2 (en) | 1995-08-10 | 1995-08-10 | Alumina ceramics |
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JP (1) | JP3075389B2 (en) |
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