JPH0947627A - Apparatus for cleaning exhaust gas - Google Patents
Apparatus for cleaning exhaust gasInfo
- Publication number
- JPH0947627A JPH0947627A JP7203594A JP20359495A JPH0947627A JP H0947627 A JPH0947627 A JP H0947627A JP 7203594 A JP7203594 A JP 7203594A JP 20359495 A JP20359495 A JP 20359495A JP H0947627 A JPH0947627 A JP H0947627A
- Authority
- JP
- Japan
- Prior art keywords
- exhaust gas
- adsorbent
- adsorbent layer
- adsorption
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
- F24F3/1411—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification by absorbing or adsorbing water, e.g. using an hygroscopic desiccant
- F24F3/1423—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification by absorbing or adsorbing water, e.g. using an hygroscopic desiccant with a moving bed of solid desiccants, e.g. a rotary wheel supporting solid desiccants
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2203/00—Devices or apparatus used for air treatment
- F24F2203/10—Rotary wheel
- F24F2203/1004—Bearings or driving means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2203/00—Devices or apparatus used for air treatment
- F24F2203/10—Rotary wheel
- F24F2203/1032—Desiccant wheel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2203/00—Devices or apparatus used for air treatment
- F24F2203/10—Rotary wheel
- F24F2203/1076—Rotary wheel comprising three rotors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2203/00—Devices or apparatus used for air treatment
- F24F2203/10—Rotary wheel
- F24F2203/1088—Rotary wheel comprising three flow rotor segments
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Treating Waste Gases (AREA)
- Separation Of Gases By Adsorption (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、産業施設から発生する
有害もしくは悪臭物質を含有する排ガスの浄化装置に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for purifying exhaust gas containing harmful or odorous substances generated from industrial facilities.
【０００２】[0002]
【従来の技術】産業施設から発生する排ガスに有害もし
くは悪臭物質が含まれている場合、環境保全のため運用
条件に適した型式の排ガス浄化処理が選定され、実施さ
れている。特に排ガス量が比較的多く、処理すべき物質
の濃度が低い場合には一工程で排ガス中の被処理物質の
除去を行うより、排ガス中から被処理物質の分離、濃縮
を行ってから被処理物質の処理を行う方が、装置の小型
化、運転費・維持費の軽減などの点から有利なことが多
い。2. Description of the Related Art When the exhaust gas generated from an industrial facility contains harmful or odorous substances, an exhaust gas purification treatment of a type suitable for operating conditions is selected and implemented for environmental protection. Especially when the amount of exhaust gas is relatively large and the concentration of the substance to be treated is low, the substance to be treated is separated and concentrated from the exhaust gas rather than being removed in one step. It is often advantageous to treat the substance in terms of downsizing of the device and reduction of operating cost / maintenance cost.
【０００３】例えば、図２は回転する吸着材ロータ２を
利用し、排ガス中から有害物質の分離、濃縮を連続的に
行う装置の概要を示したものである。常温の排ガス１が
流れる領域（吸着領域１０）で排ガス中の有害物質を吸
着した吸着材層は、駆動装置８による回転で移動して高
温の脱離ガスが流れる領域（脱離領域６）で吸着した物
質を脱離して再生する。再生した吸着材層は再び吸着領
域１０に移動して有害物質を吸着する。For example, FIG. 2 shows an outline of an apparatus for continuously separating and concentrating harmful substances from exhaust gas by utilizing a rotating adsorbent rotor 2. The adsorbent layer that has adsorbed the harmful substances in the exhaust gas in the region where the exhaust gas 1 at room temperature flows (adsorption region 10) moves in the region where the desorbed gas at high temperature moves by the rotation of the drive device 8 (desorption region 6). The adsorbed substance is desorbed and regenerated. The regenerated adsorbent layer moves to the adsorption region 10 again and adsorbs harmful substances.
【０００４】このようにして連続的に排ガス中から有害
物質を吸着除去するが、脱離ガス量を排ガス量より少な
くすることにより、脱離ガス中の有害物質の濃度は排ガ
ス濃度の２倍から１０倍の濃度となる。有害物質を含む
ガスの流量が少なくなるので、有害物質の焼却処理や回
収処理は排ガスに直接行うより容易になる。In this way, the harmful substances are continuously adsorbed and removed from the exhaust gas, but by reducing the amount of the desorbed gas to be smaller than the amount of the exhaust gas, the concentration of the harmful substances in the desorbed gas becomes twice the exhaust gas concentration. The concentration is 10 times. Since the flow rate of the gas containing the harmful substance is small, the incineration process and the recovery process of the harmful substance are easier than the direct treatment of the exhaust gas.
【０００５】このような装置では吸着材の吸脱着能が重
要であり、吸着材の飽和吸着量、及び脱離速度が高いほ
ど同じ性能で吸着材ロータ２を小型化できる。吸着材ロ
ータ２を小型化すれば装置を小型化できるばかりでな
く、長期間の使用で吸着材が性能低下を生じた場合の交
換が容易になり、脱離ガスの脱離ガスヒータ７の熱源を
小さくできるので、運転費も軽減できる。In such an apparatus, the adsorption / desorption ability of the adsorbent is important, and the adsorbent rotor 2 can be miniaturized with the same performance as the saturated adsorption amount of the adsorbent and the desorption rate are higher. If the adsorbent rotor 2 is downsized, not only the device can be downsized, but also when the adsorbent is deteriorated in performance due to long-term use, replacement can be facilitated, and the heat source of the desorbed gas heater 7 for the desorbed gas can be changed. Since it can be made smaller, operating costs can be reduced.
【０００６】[0006]
【発明が解決しようとする課題】しかし、上記の吸着材
性能は吸着材の種類によって決められ、特殊な吸着材を
使用すると、装置の価格上昇やロータの交換による維持
費の増大が生じるので、吸着材の高性能化による装置の
小型化は困難である。However, the above adsorbent performance is determined by the type of adsorbent, and the use of a special adsorbent causes an increase in the cost of the device and an increase in maintenance costs due to replacement of the rotor. It is difficult to downsize the device by improving the performance of the adsorbent.
【０００７】本発明の目的は、特殊な吸着材を使用する
ことなしに吸着材層の吸脱着能を向上し、装置を小型化
できる排ガス浄化装置を提供することにある。An object of the present invention is to provide an exhaust gas purifying apparatus capable of improving the adsorption / desorption ability of the adsorbent layer and downsizing the apparatus without using a special adsorbent.
【０００８】[0008]
【課題を解決するための手段】上記の目的は、装置内の
排ガスの流れ方向に複数の吸着材層を設け、排ガス流の
上流側の吸着材層の吸脱着領域間の移動速度を下流側の
吸着材層の移動速度より速くすることで達成できる。The above object is to provide a plurality of adsorbent layers in the exhaust gas flow direction in the apparatus, and to control the moving speed between the adsorption / desorption regions of the adsorbent layer on the upstream side of the exhaust gas flow on the downstream side. This can be achieved by increasing the moving speed of the adsorbent layer.
【０００９】[0009]
【作用】図３は、ゼオライトを１００ｇ／Ｌ担持したハ
ニカム吸着材層に１００ｐｐｍのトルエルを含む空気を
流した時の、ゼオライトの単位重量当たりに吸着された
トルエン重量を示したものである。また図４は、この時
の吸着材層のトルエン吸着率を示したものである。これ
らの図から明らかなように、ＳＶが高い条件ほど一定時
間でゼオライトの単位重量当たりに吸着されるトルエン
重量は高くなるが、トルエン吸着率は低くなり、吸着材
層から下流側に漏れるトルエン量は増加する。これは、
接触するガス中の被吸着物質の濃度が高いほど吸着量が
多くなる性質が吸着材にあるので、図５に示すように、
吸着材層の中に吸着量の分布（破過曲線）を生じるため
である。このため、前述したような排ガス吸着処理装置
において、吸着材層の下流側に漏れるトルエン量を少な
くするには、吸着材層の最下流部の吸着材がほとんど利
用されていない状態のうちに吸着材層の再生を始めなけ
ればならず、また吸着材層の再生時間を長くして（言い
換えれば吸着、脱離のサイクルを長くして）、吸着物質
の脱離を完全に行う必要がある。FIG. 3 shows the weight of toluene adsorbed per unit weight of zeolite when air containing 100 ppm of toluel was passed through the honeycomb adsorbent layer carrying 100 g / L of zeolite. Further, FIG. 4 shows the toluene adsorption rate of the adsorbent layer at this time. As is clear from these figures, the higher the SV condition, the higher the weight of toluene adsorbed per unit weight of zeolite over a certain period of time, but the lower the toluene adsorption rate, and the lower the amount of toluene that leaks from the adsorbent layer to the downstream side. Will increase. this is,
Since the adsorbent has the property that the higher the concentration of the substance to be adsorbed in the contacting gas is, the larger the amount of adsorption becomes, as shown in FIG.
This is because the distribution of the adsorption amount (breakthrough curve) is generated in the adsorbent layer. Therefore, in the exhaust gas adsorption treatment device as described above, in order to reduce the amount of toluene leaked to the downstream side of the adsorbent layer, the adsorbent in the most downstream part of the adsorbent layer is adsorbed while it is rarely used. The regeneration of the material layer must be started, and the regeneration time of the adsorbent layer must be extended (in other words, the adsorption / desorption cycle should be extended) to completely desorb the adsorbed substance.
【００１０】逆に、上流側の吸着材は速い時期に飽和に
近い状態まで吸着するが、下流側の吸着材層にある程度
吸着してから再生処理に入るので、吸着操作を行ってい
る時間の大部分は吸着処理に寄与していない。On the contrary, the adsorbent on the upstream side adsorbs to a state close to saturation at an early stage, but since it is adsorbed to the adsorbent layer on the downstream side to some extent before starting the regeneration process, the adsorbing time during the adsorbing operation is reduced. Most do not contribute to the adsorption process.
【００１１】以上のような理由から、従来の装置では吸
着材層の利用効率が悪い。そこで、排ガスの流れ方向に
直列に吸着材層を幾つかに分割し、短時間で飽和状態に
なる上流側の吸着材層ほど吸着、脱離のサイクルを短く
すれば、吸着材層の利用率が高くなると同時に飽和濃度
近くまで吸着するので、単位吸着材層当たりの吸着処理
量は大きくなる。このため、同じ吸脱着性能を得るの
に、一体型の吸着材層より分割型の吸着材層の方が吸着
材層の大きさは小さくなる。For the above reasons, the utilization efficiency of the adsorbent layer is poor in the conventional device. Therefore, if the adsorbent layer is divided into several parts in series in the exhaust gas flow direction and the adsorbent layer on the upstream side that becomes saturated in a short time has a shorter adsorption / desorption cycle, the utilization rate of the adsorbent layer The adsorption amount per unit adsorbent layer becomes large because the adsorption becomes close to the saturated concentration at the same time as the value becomes higher. Therefore, in order to obtain the same adsorption / desorption performance, the size of the adsorbent layer of the split type adsorbent layer is smaller than that of the integral type adsorbent layer.
【００１２】[0012]
（実施例）以下、本発明の実施例について図１とともに
説明する。この実施例に係る排ガス浄化装置は、排ガス
流に対し直列に並べた３個の円筒形状の吸着材ロータ２
Ａ，２Ｂ，２Ｃからなる。この吸着材ロータ２Ａ，２
Ｂ，２Ｃはいずれも、直径が３２０ｍｍ、幅が１７０ｍ
ｍ、及び中心の軸径が５０ｍｍであり、ガス流の断面１
ｉｎｃｈ2 当たり２００個のセルを有するハニカムであ
り、各吸着材ロータ２Ａ，２Ｂ，２Ｃにはロータの見掛
け容積１リッター当たり１００ｇのゼオライトが担持し
てある。(Embodiment) An embodiment of the present invention will be described below with reference to FIG. The exhaust gas purifying apparatus according to this embodiment has three cylindrical adsorbent rotors 2 arranged in series with respect to the exhaust gas flow.
It consists of A, 2B and 2C. This adsorbent rotor 2A, 2
Both B and 2C have a diameter of 320 mm and a width of 170 m.
m, and the central shaft diameter is 50 mm, and the cross section of the gas flow is 1
It is a honeycomb having 200 cells per inch 2 , and each adsorbent rotor 2A, 2B, 2C carries 100 g of zeolite per 1 liter of apparent volume of the rotor.
【００１３】吸着材ロータ２Ａ，２Ｂ，２Ｃの断面積の
６０％に当たる部分が吸着領域１０であり、２０％が１
６０℃に加熱した空気を２ｍ／ｓの流速で流し吸着材を
再生する脱離領域６、残りの２０％が脱離操作で温度が
高くなった吸着材層を冷却する冷却領域５である。脱離
領域６で脱離した有害成分は脱離ガスとともに燃焼装置
９に送られ焼却される。装置内を流れる排ガス流に対し
最上流側の吸着材ロータ２Ａは毎時３回転、その下流側
の吸着材ロータ２Ｂは毎時２回転、及び最下流側の吸着
材ロータ２Ｃは毎時１回転で回転し、各吸着材ロータ２
Ａ，２Ｂ，２Ｃは吸着領域１０での排ガスの吸着浄化と
脱離領域６での再生を連続的に繰り返す。The portion corresponding to 60% of the cross-sectional area of the adsorbent rotors 2A, 2B and 2C is the adsorption region 10, and 20% is 1%.
The desorption region 6 in which the air heated to 60 ° C. is flowed at a flow rate of 2 m / s to regenerate the adsorbent, and the remaining 20% is the cooling region 5 for cooling the adsorbent layer whose temperature has been raised by the desorption operation. The harmful components desorbed in the desorption region 6 are sent to the combustion device 9 together with the desorbed gas and incinerated. The adsorbent rotor 2A on the most upstream side rotates 3 times per hour, the adsorbent rotor 2B on the downstream side rotates about 2 times per hour, and the adsorbent rotor 2C on the most downstream side rotates about 1 rotation per hour with respect to the exhaust gas flow flowing in the apparatus. , Each adsorbent rotor 2
A, 2B and 2C continuously repeat the adsorption purification of the exhaust gas in the adsorption region 10 and the regeneration in the desorption region 6.
【００１４】なお、図中の３は浄化された排ガス、４は
冷却ガス、７は脱離ガスヒータ、９は燃焼装置に延びた
管路である。In the figure, 3 is purified exhaust gas, 4 is cooling gas, 7 is a desorbed gas heater, and 9 is a conduit extending to the combustion device.
【００１５】（比較例）図２に比較例である排ガス処理
装置の概要を示した。装置の吸着材ロータ２は一体型で
実施例と同じ直径が３２０ｍｍ及び中心の軸径が５０ｍ
ｍであるが、幅が５１０ｍｍであり、吸着材ロータ２の
見掛け総容積は実施例と同じである。吸着材ロータ２は
実施例と同じセル密度のハニカムであり、吸着材も実施
例と同様に、ロータの見掛け容積１リッター当たり１０
０ｇのゼオライトが担持してある。吸着領域１０、脱離
領域６及び冷却領域５の割合も実施例と同じく、それぞ
れ断面積の６０％、２０％及び２０％であり、脱離領域
６での脱離操作条件も同じである。吸着材ロータ２は毎
時３回転の速度で回転し、吸着材ロータ２は吸着領域１
０での排ガスの吸着浄化と脱離領域６での再生を連続的
に繰り返す。(Comparative Example) FIG. 2 shows an outline of an exhaust gas treating apparatus which is a comparative example. The adsorbent rotor 2 of the apparatus is an integral type and has the same diameter as the embodiment of 320 mm and the central shaft diameter of 50 m.
Although it is m, the width is 510 mm, and the apparent total volume of the adsorbent rotor 2 is the same as that of the embodiment. The adsorbent rotor 2 is a honeycomb having the same cell density as that of the embodiment, and the adsorbent is also 10 as per 1 liter of the apparent volume of the rotor as in the embodiment.
0 g of zeolite are supported. The proportions of the adsorption region 10, the desorption region 6, and the cooling region 5 are 60%, 20%, and 20% of the cross-sectional area, respectively, as in the embodiment, and the desorption operation conditions in the desorption region 6 are also the same. The adsorbent rotor 2 rotates at a speed of 3 revolutions per hour, and the adsorbent rotor 2 moves in the adsorption area 1
The adsorption purification of the exhaust gas at 0 and the regeneration at the desorption region 6 are continuously repeated.
【００１６】（比較試験）実施例と比較例の排ガス処理
装置にそれぞれ、トルエンを１００ｐｐｍ、２００ｐｐ
ｍ及び６００ｐｐｍ含む試験ガスを２０ｍ３／ｍｉｎの
流量で順次流し、定常状態に達したところで装置のトル
エン除去率を測定した。この時、実施例の装置の吸着材
ロータ２の１個当たりのＳＶは９０，０００ｈ-1とな
り、比較例のＳＶは３０，０００ｈ-1となる。(Comparative Test) Toluene of 100 ppm and 200 pp were respectively added to the exhaust gas treating apparatuses of Examples and Comparative Examples.
The test gas containing m and 600 ppm was sequentially flowed at a flow rate of 20 m3 / min, and when the steady state was reached, the toluene removal rate of the apparatus was measured. At this time, the SV per adsorbent rotor 2 of the apparatus of the example is 90,000 h −1 , and the SV of the comparative example is 30,000 h −1 .
【００１７】図６にその結果を示したが、実施例と比較
例の排ガス処理装置は同じ材料、同じ見掛け容量の吸着
材を使用しているにも係わらず、各トルエン濃度条件
で、いずれも実施例の装置の方が高いトルエン除去率を
示した。The results are shown in FIG. 6, and although the exhaust gas treating apparatuses of the example and the comparative example use the same material and the adsorbent having the same apparent capacity, they are all under each toluene concentration condition. The device of the example showed a higher toluene removal rate.
【００１８】[0018]
【発明の効果】以上の結果に示されるように、本発明の
装置は同じ材料、同じ見掛け容量の吸着材を使用して、
一体型の吸着材層を使用した従来の装置より吸着性能を
高めることができる。従って、同じ性能の装置であれ
ば、従来より、吸着材層を小型にでき、装置の小型化、
装置価格の軽減、吸着材層の交換費用の軽減が図れる。As shown in the above results, the device of the present invention uses the same material and the same apparent capacity of the adsorbent,
The adsorption performance can be improved as compared with the conventional device using the integrated adsorbent layer. Therefore, if the device has the same performance, the adsorbent layer can be made smaller than before, and the device can be made smaller.
It is possible to reduce the cost of the device and the exchange cost of the adsorbent layer.
【図１】本発明の実施例である排ガス浄化装置の概要を
示した図である。FIG. 1 is a diagram showing an outline of an exhaust gas purifying apparatus that is an embodiment of the present invention.
【図２】従来の排ガス浄化装置の概要を示した図であ
る。FIG. 2 is a diagram showing an outline of a conventional exhaust gas purifying apparatus.
【図３】吸着材のトルエン吸収量の経時変化を示した図
である。FIG. 3 is a diagram showing a change with time of a toluene absorption amount of an adsorbent.
【図４】吸着材層をトルエン含有空気が通過した時のト
ルエン除去率の経時変化を示した図である。FIG. 4 is a view showing a change with time of a toluene removal rate when toluene-containing air passes through an adsorbent layer.
【図５】吸着材層内における吸着材のトルエン吸着量の
分布を示した図である。FIG. 5 is a diagram showing a distribution of the amount of toluene adsorbed by the adsorbent in the adsorbent layer.
【図６】実施例と比較例の性能を比較して示す図であ
る。FIG. 6 is a diagram showing a comparison between performances of an example and a comparative example.
１ 排ガス ２Ａ〜２Ｃ 吸着材ロータ ６ 脱離領域 ８ 駆動装置 １０ 吸着領域 DESCRIPTION OF SYMBOLS 1 Exhaust gas 2A-2C Adsorbent rotor 6 Desorption area 8 Drive device 10 Adsorption area
Claims (1)
まれる有毒物質もしくは悪臭物質を吸着させ排ガスを浄
化する領域、吸着材層に吸着した物質を脱離ガスに脱離
して吸着材層を再生する領域及び両領域の間を移動可能
な吸着材層から少なくとも構成され、排ガス中の有毒物
質もしくは悪臭物質を連続的に吸着して除去する排ガス
浄化装置において、 排ガスの流れ方向に複数の吸着材層を設け、排ガス流に
対し上流側の吸着材層の吸脱着領域間の移動速度を下流
側の吸着材層の移動速度より速くしたことを特徴とする
排ガス浄化装置。1. An area in which exhaust gas is brought into contact with an adsorbent layer to adsorb toxic substances or malodorous substances contained in the exhaust gas to purify the exhaust gas, and a substance adsorbed in the adsorbent layer is desorbed into desorbed gas to form an adsorbent layer. In an exhaust gas purification device that is composed of at least a regeneration area and an adsorbent layer that can move between both areas, and that continuously adsorbs and removes toxic substances or malodorous substances in the exhaust gas An exhaust gas purifying apparatus, wherein a material layer is provided, and a moving speed between adsorbing / desorbing regions of an adsorbent layer on an upstream side with respect to an exhaust gas flow is made faster than a moving speed of an adsorbent layer on a downstream side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7203594A JPH0947627A (en) | 1995-08-09 | 1995-08-09 | Apparatus for cleaning exhaust gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7203594A JPH0947627A (en) | 1995-08-09 | 1995-08-09 | Apparatus for cleaning exhaust gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0947627A true JPH0947627A (en) | 1997-02-18 |
Family
ID=16476660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7203594A Pending JPH0947627A (en) | 1995-08-09 | 1995-08-09 | Apparatus for cleaning exhaust gas |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0947627A (en) |
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|---|---|---|---|---|
| JP2002186821A (en) * | 2000-12-19 | 2002-07-02 | Seibu Giken Co Ltd | Organic solvent vapor treatment apparatus |
| WO2004026442A1 (en) * | 2002-09-20 | 2004-04-01 | Tokyo Electron Limited | Dry air-supplying apparatus and treating apparatus |
| CN100411087C (en) * | 2003-04-25 | 2008-08-13 | 霓佳斯株式会社 | Dried air supply device |
| JP2008302277A (en) * | 2007-06-06 | 2008-12-18 | Toyobo Co Ltd | System for treating gas containing organic solvent |
| JP2017078192A (en) * | 2015-10-19 | 2017-04-27 | 富士通株式会社 | Adsorbent, electrode for carbon dioxide reduction, and carbon dioxide reduction device |
| CN106731478A (en) * | 2015-11-24 | 2017-05-31 | 杰智环境科技股份有限公司 | Horizontal runner and fluid purification processing system |
-
1995
- 1995-08-09 JP JP7203594A patent/JPH0947627A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002186821A (en) * | 2000-12-19 | 2002-07-02 | Seibu Giken Co Ltd | Organic solvent vapor treatment apparatus |
| JP4523146B2 (en) * | 2000-12-19 | 2010-08-11 | 株式会社西部技研 | Organic solvent vapor processing equipment |
| WO2004026442A1 (en) * | 2002-09-20 | 2004-04-01 | Tokyo Electron Limited | Dry air-supplying apparatus and treating apparatus |
| US7207123B2 (en) | 2002-09-20 | 2007-04-24 | Tokyo Electron Limited | Dry air-supplying apparatus and treating apparatus |
| CN100384514C (en) * | 2002-09-20 | 2008-04-30 | 东京毅力科创株式会社 | Dry air-supplying apparatus and treating apparatus |
| CN100411087C (en) * | 2003-04-25 | 2008-08-13 | 霓佳斯株式会社 | Dried air supply device |
| JP2008302277A (en) * | 2007-06-06 | 2008-12-18 | Toyobo Co Ltd | System for treating gas containing organic solvent |
| JP2017078192A (en) * | 2015-10-19 | 2017-04-27 | 富士通株式会社 | Adsorbent, electrode for carbon dioxide reduction, and carbon dioxide reduction device |
| CN106731478A (en) * | 2015-11-24 | 2017-05-31 | 杰智环境科技股份有限公司 | Horizontal runner and fluid purification processing system |
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