JPH09329404A - Supporting device for reference plane disc - Google Patents
Supporting device for reference plane discInfo
- Publication number
- JPH09329404A JPH09329404A JP15138796A JP15138796A JPH09329404A JP H09329404 A JPH09329404 A JP H09329404A JP 15138796 A JP15138796 A JP 15138796A JP 15138796 A JP15138796 A JP 15138796A JP H09329404 A JPH09329404 A JP H09329404A
- Authority
- JP
- Japan
- Prior art keywords
- reference plane
- disc
- supporting
- disk
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、工作機械あるいは
平面度測定器等の移動テーブルや回転テーブル等の運動
精度を測定する際に使用される基準平面円盤の支持装置
に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a support device for a reference flat disk used when measuring the motion accuracy of a moving table or a rotary table of a machine tool or a flatness measuring instrument.
【０００２】[0002]
【従来の技術】工作機械あるいは平面度測定器等の移動
テーブルや回転テーブル等の運動精度を測定する方法の
一つとして、基準平面円盤（ optical flat とも呼ばれ
る）を用いる方法がある。この基準平面円盤は、使用し
ないときは専用の保管箱に入れておき、測定の際には手
で取り出して、測定すべきテーブル等の上に直接載置し
ていた。2. Description of the Related Art As one of methods for measuring the motion accuracy of a moving table, a rotary table or the like of a machine tool or a flatness measuring instrument, there is a method of using a reference flat disk (also called an optical flat). When not in use, this reference flat disk was placed in a special storage box, and when measuring, it was taken out by hand and placed directly on the table or the like to be measured.
【０００３】[0003]
【発明が解決しようとする課題】一般に上記のような各
種テーブルの表面には、凹凸やうねり、あるいは加工屑
や空気中のゴミなどが付着している。このような状態
で、該テーブルの運動精度を測定するために、極めて高
い精度に加工された基準平面円盤をテーブル上におく
と、テーブルの凹凸やゴミなどの影響で基準平面円盤は
変形してしまい、測定基準としての機能を失ってしま
う。また、ミクロンオーダあるいはそれ以下の極めて高
い精度の測定を行おうとすると、基準平面円盤をテーブ
ル上に移動するために手を触れただけでも、体温と円盤
との温度差によって、円盤に熱が流れて熱変形する。Generally, unevenness, undulations, processing dust, dust in the air, or the like is attached to the surfaces of the above-mentioned various tables. In this state, if a reference plane disk processed with extremely high precision is placed on the table to measure the motion accuracy of the table, the reference plane disk may be deformed due to the unevenness of the table or dust. Therefore, the function as a measurement standard is lost. In addition, when attempting to perform measurement with extremely high accuracy on the order of microns or less, heat will flow to the disc due to the temperature difference between the body temperature and the disc, even if only the hand is moved to move the reference plane disc onto the table. It deforms by heat.
【０００４】さらに、移動のために円盤を持ち、外力を
加えることによっても円盤は変形してしまう。このよう
な変形が起きると、元の安定静止状態が得られるのに時
間を要し、場合によっては安定するまでに半日から１日
以上もかかる場合があった。しかも、安定した場合でも
前述の凹凸やゴミ等の影響で、円盤本来の精度を測定時
に再現できないという問題があった。Further, the disk is deformed by holding the disk for movement and applying an external force. When such deformation occurs, it takes time to obtain the original stable quiescent state, and in some cases, it may take half a day to more than one day to stabilize. In addition, even when it is stable, there is a problem that the original precision of the disk cannot be reproduced at the time of measurement due to the influence of the above-mentioned unevenness and dust.
【０００５】本発明は、工作機械あるいは平面度測定器
等の移動テーブルや回転テーブル等の運動精度を測定す
る際に、基準平面円盤の変形を小さくし、安定静止状態
が得られる時間を短縮することのできる支持装置を提供
することを目的とする。The present invention reduces the deformation of the reference flat disk when measuring the motion accuracy of a moving table or a rotary table of a machine tool or a flatness measuring instrument, and shortens the time for obtaining a stable stationary state. It is an object of the present invention to provide a support device that can be used.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するため
の本発明は、基準平面円盤の半径の６８％±５％を半径
とする円周上に、等間隔に設けられた３点の支点を有す
ることを特徴とする基準平面円盤の支持装置である。そ
して、３点の支点の中で２点以上の支点が高さ調整機構
を有していることが好ましい。According to the present invention for achieving the above object, three fulcrums provided at equal intervals on a circumference having a radius of 68% ± 5% of the radius of a reference plane disk. It is a supporting device for a reference plane disk, which has: Of the three fulcrums, at least two fulcrums preferably have a height adjusting mechanism.
【０００７】[0007]
【発明の実施の態様】本発明装置を具体例により説明す
る。図１は本発明装置例の平面図であり、基準平面円盤
１は破線で示す位置に載置される。図２は基準平面円盤
１を載置した状態の断面図であり、図１のＡ−Ａ矢視を
示す。載置に際しては、基準平面円盤の中心点２を、本
発明支持装置の３つの支点３のなす中心点１２に一致さ
せる。本発明支持装置の３つの支点３は、基準平面円盤
１の半径の６８％±５％を半径とする一点鎖線で示す円
周上に等間隔に設けられている。すなわち、該円周の中
心点１２と各支点３を結ぶ３本の直線のなす角は、１２
０°である。BEST MODE FOR CARRYING OUT THE INVENTION The device of the present invention will be described with reference to specific examples. FIG. 1 is a plan view of an example of the device of the present invention, in which a reference plane disk 1 is placed at a position indicated by a broken line. FIG. 2 is a cross-sectional view of the state in which the reference plane disk 1 is placed, and shows the AA arrow of FIG. At the time of placement, the center point 2 of the reference plane disk is made to coincide with the center point 12 formed by the three fulcrums 3 of the supporting device of the present invention. The three fulcrums 3 of the support device of the present invention are provided at equal intervals on the circumference indicated by the alternate long and short dash line having a radius of 68% ± 5% of the radius of the reference plane disk 1. That is, the angle formed by the three straight lines connecting the center point 12 of the circumference and each fulcrum 3 is 12
It is 0 °.
【０００８】各支点３の位置を、上記のように、基準平
面円盤１の半径の６８％を半径とする円周上に等間隔に
設けると、載置した該円盤１の自重による変形が最も少
なく、かつ最短時間で安定静止状態に達することができ
る。そして、各支点３を設ける円周の半径が、基準平面
円盤１の半径の６８％±５％の範囲、より好ましくは６
８％±１％の範囲であれば、その優れた性能を発揮する
ことができる。When the positions of the fulcrums 3 are provided at equal intervals on the circumference having a radius of 68% of the radius of the reference plane disk 1 as described above, the deformation of the mounted disk 1 due to its own weight is the most. It is possible to reach a stable quiescent state with few and in the shortest time. The radius of the circle around which each fulcrum 3 is provided is in the range of 68% ± 5% of the radius of the reference plane disk 1, and more preferably 6
Within the range of 8% ± 1%, the excellent performance can be exhibited.
【０００９】各支点３は、ファインセラミックス等のヤ
ング率の高い材料からなる球面形状のもので構成され、
本例では、支持台４の円錐状の穴に嵌入された球からな
る。そして、図３（ａ）の拡大図に示すように、支点３
の上部が、支持台４の上面から露出し、基準平面円盤１
を点接触で支持するように保持されている。Each fulcrum 3 is composed of a spherical surface made of a material having a high Young's modulus such as fine ceramics,
In this example, it is a sphere fitted in the conical hole of the support 4. Then, as shown in the enlarged view of FIG.
Of the reference plane disk 1 is exposed from the upper surface of the support base 4.
Are held so as to be supported by point contact.
【００１０】図２に示すように、支持台４は３点の支点
３の位置にて、下側からボール５を介して３個の昇降ね
じ６で支持され、各昇降ねじ６は、基台７に螺入して、
高さ調整可能となっている。そして、支持台４の中心部
には、基台７に固設された昇降ガイド８が遊嵌され、横
方向の位置ずれを防止している。ボール５を介した支持
台４と昇降ねじ６の接触部は、図３（ｂ）の拡大図に示
すように、ボール５が双方の円錐状の穴に嵌入されてい
るので、昇降ねじ６を回転したとき、支持台４は横方向
に位置ずれせず円滑に上下動する。各昇降ねじ６は、基
準平面円盤１を載置した状態で容易に回転できるよう、
図１に示すように、一部が該円盤１の外側に出ている。As shown in FIG. 2, the support base 4 is supported by three lifting screws 6 from the lower side through balls 5 at the positions of three fulcrums 3, and each lifting screw 6 is a base. Screwed into 7,
The height is adjustable. An elevating guide 8 fixedly mounted on the base 7 is loosely fitted in the center of the support 4 to prevent lateral displacement. As shown in the enlarged view of FIG. 3 (b), the contact portion between the support base 4 and the lifting screw 6 via the ball 5 has the balls 5 fitted in both conical holes. When rotated, the support base 4 moves up and down smoothly without displacement in the lateral direction. Each lifting screw 6 can be easily rotated while the reference flat disk 1 is placed,
As shown in FIG. 1, a part is projected to the outside of the disc 1.
【００１１】基台７は枠体９に固設され、枠体９にはハ
ンドル１０が設けてある。本発明装置で基準平面円盤１
を支持し、ハンドル１０を把持して、測定しようとする
テーブル１３上に載置し、必要に応じて昇降ねじ６を回
し、傾斜調整をする。昇降ねじ６は、２個または３個が
昇降可能になっていればよい。The base 7 is fixed to the frame body 9, and the frame body 9 is provided with a handle 10. Reference plane disk 1 in the device of the present invention
Is supported, and the handle 10 is gripped and placed on the table 13 to be measured, and if necessary, the lifting screw 6 is turned to adjust the inclination. It is only necessary that two or three lifting screws 6 can be raised and lowered.
【００１２】また、止めピン１１は支持台４に設置され
ており、基準平面円盤１の外周を該ピン１１に接触させ
たとき、上記のように３個の支点３の中心点１２と該円
盤１の中心点２とが一致する位置に設けてある。したが
って、本発明装置に基準平面円盤１を載置するとき、該
円盤の外周を止めピン１１に軽く接触させることで、両
中心点２および１２を一致させることができる。Further, the stopper pin 11 is installed on the support base 4, and when the outer periphery of the reference flat disk 1 is brought into contact with the pin 11, the center point 12 of the three fulcrums 3 and the disk are set as described above. It is provided at a position where the center point 2 of 1 coincides with. Therefore, when the reference flat disk 1 is placed on the device of the present invention, the center points 2 and 12 can be aligned by lightly contacting the outer periphery of the disk with the stop pin 11.
【００１３】本発明装置において、被測定テーブルが基
準平面円盤の水平調整器を有している場合、あるいは常
に水平に保たれている場合は、基準平面円盤の傾斜を調
整する必要がなく、各支点３の高さ調整機構は不要であ
る。In the apparatus of the present invention, when the table to be measured has a level adjuster for the reference plane disk, or is always kept horizontal, it is not necessary to adjust the inclination of the reference plane disk and The height adjustment mechanism of the fulcrum 3 is unnecessary.
【００１４】本発明装置によれば、基準平面円盤の自重
による変形が最小に抑えられ、短時間で安定静止状態に
達することができる。そして、被測定テーブルに載置す
るにあたっては、高精度に製作された高価な基準平面円
盤に手を触れることなく、本発明装置を把持して移動す
ることができるので、温度変化による不安定状態を回避
できる。According to the apparatus of the present invention, the deformation of the reference plane disk due to its own weight is suppressed to the minimum, and the stable stationary state can be reached in a short time. When the device is placed on the table to be measured, the device of the present invention can be gripped and moved without touching an expensive reference flat disk that is manufactured with high precision. Can be avoided.
【００１５】[0015]
本発明例： （１）購入した直径２００mm、厚さ３０mm、表面の平面
度が０．０３μｍ以下のＢＫ７ガラス製基準平面円盤
を、恒温室に設けた平面度１μｍ以下の高精度定盤上に
４８時間静置して安定状態にした。 （２）上記基準平面円盤を、同上恒温室内にて、図１お
よび図２に示す本発明支持装置に載置した。このとき、
該円盤を手で持って移動したため小変形が生じ、平面度
が約１μｍとなり、この変形がなくなるまで、６時間静
置した。 （３）基準平面円盤に手を触れることなく、本発明支持
装置のハンドル１０を持って、同上恒温室内の被測定体
上に載置した。このとき、移動による基準平面円盤の変
形は生じないので、被測定体に載置後、直ちに測定可能
であった。被測定体に載置した後の基準平面円盤の変形
状態を等高線図で示すと、図４のように、正三角形の頂
点にある各支点の位置が最高点の規則的なパターンとな
り、中心点を通り上記正三角形の一辺に平行なｘ軸上の
高低差ｈ1 は極めて小さい。なお、最高点を通るｙ軸上
の高低差ｈ2 は、ｈ1 に比べて大きくはなるが、従来例
に比べて小さい。等高線の数字は相対的な高さを示すも
のである。したがって、ｘ方向を被測定体の運動方向に
一致させることで、極めて高精度の運動精度測定が可能
である。 （４）測定終了後も、基準平面円盤に手を触れることな
く、本発明支持装置のハンドル１０を持って、被測定体
から元の所定位置に移した。このときの移動による基準
平面円盤の変形も生じないので、直ちに別の被測定体に
載置して、同様に直ちに測定可能であった。また、同一
の被測定体についての、載置位置を変えた繰返し測定も
直ちに可能であった。Examples of the present invention: (1) A BK7 glass reference flat disk having a diameter of 200 mm, a thickness of 30 mm and a surface flatness of 0.03 μm or less is placed on a highly accurate surface plate of a flatness of 1 μm or less provided in a temperature-controlled room. It was allowed to stand for 48 hours to stabilize. (2) The reference flat disk was placed on the supporting apparatus of the present invention shown in FIGS. 1 and 2 in the same temperature-controlled room as above. At this time,
Since the disk was held and moved by hand, a small deformation occurred, and the flatness became about 1 μm. The disk was allowed to stand for 6 hours until the deformation disappeared. (3) Without touching the reference flat disk, the handle 10 of the supporting device of the present invention was held and placed on the object to be measured in the same temperature-controlled room as above. At this time, since the reference plane disk was not deformed due to the movement, it was possible to measure immediately after it was placed on the measured object. When the deformed state of the reference plane disk after being placed on the object to be measured is shown in a contour diagram, the positions of the fulcrums at the vertices of the equilateral triangle form a regular pattern of the highest points and the center point as shown in FIG. The height difference h 1 on the x axis parallel to one side of the equilateral triangle passing through is extremely small. The height difference h 2 on the y-axis passing through the highest point is larger than h 1 but smaller than the conventional example. The numbers on the contour lines show the relative heights. Therefore, by matching the x direction with the movement direction of the object to be measured, it is possible to measure the movement accuracy with extremely high precision. (4) After the measurement was completed, the handle 10 of the supporting device of the present invention was held by the handle 10 without touching the reference plane disk, and the object to be measured was moved to the original predetermined position. Since the reference plane disk is not deformed by the movement at this time, the reference flat disk can be immediately placed on another object to be measured and similarly measured immediately. Further, it was possible to immediately perform repeated measurement of the same measured object while changing the mounting position.
【００１６】従来例： （１）上記本発明例と同じ基準平面円盤を上記本発明例
と同じ恒温室内にて、同様に安定状態にした。 （２）上記基準平面円盤を、手で持って、同上恒温室内
の被測定体上に直接載置した。このとき、該円盤を手で
持って移動したことによる小変形を、元の状態に復帰さ
せるため、本発明例（２）と同様６時間静置した。しか
し、被測定体上のゴミやうねりあるいは凹凸の影響によ
り、静置後の基準平面円盤の変形状態は、図５に示すよ
うに、不規則なパターンでかつ高低差ｈ3 が大であっ
た。 （３）測定終了後は、基準平面円盤を手で持って被測定
体から元の所定位置に移した。このときも、該円盤を手
で持って移動したことによる小変形を元の状態に復帰さ
せるため、同様に６時間の静置を要した。そして、さら
に別の被測定体に上記基準平面円盤を同様にして載置し
た後も、安定化に６時間の静置を要した。静置後の基準
平面円盤の変形状態も、図６に示すように不規則なパタ
ーンでかつ高低差ｈ4 が大であった。Conventional Example: (1) The same reference plane disk as the above-mentioned example of the present invention was similarly made stable in the same temperature-controlled room as the above-mentioned example of the present invention. (2) The reference plane disk was held by hand and placed directly on the object to be measured in the temperature-controlled room. At this time, in order to recover the small deformation caused by moving the disc by hand, the disc was allowed to stand for 6 hours as in Example (2) of the present invention. However, due to the influence of dust, swell, or unevenness on the measured object, the deformed state of the reference flat disk after standing was an irregular pattern and a large height difference h 3 as shown in FIG. . (3) After the measurement, the reference flat disk was held by hand and moved from the measured object to the original predetermined position. At this time as well, in order to return the small deformation caused by moving the disk by hand to the original state, it was required to stand for 6 hours in the same manner. Even after the reference flat disk was similarly placed on another object to be measured, it took 6 hours to stabilize. The deformed state of the reference flat disk after standing was also an irregular pattern and a large height difference h 4 as shown in FIG.
【００１７】[0017]
【発明の効果】本発明の基準平面円盤の支持装置は、基
準平面円盤の半径の６８％±５％を半径とする円周上
に、等間隔に設けられた３点の支点を有しているので、
工作機械のテーブルや平面度測定器のテーブル等の運動
精度を測定するとき、基準平面円盤の自重による変形を
小さくすることができるとともに、手で持って移動する
ことがないので安定静止状態が得られる時間を短縮する
ことができる。そして、運動精度の測定に際しては、再
現性のよい、信頼性の高い測定が可能である。支点の高
さ調整機構を有する場合は、傾斜したテーブルの測定も
容易である。したがって、短時間での高精度測定が達成
される。The supporting device for the reference flat disk according to the present invention has three fulcrums provided at equal intervals on the circumference having a radius of 68% ± 5% of the radius of the reference flat disk. Because
When measuring the motion accuracy of a machine tool table or flatness measuring table, the deformation of the reference flat disk due to its own weight can be reduced, and a stable stationary state can be obtained because it is not held and moved by hand. The time spent can be shortened. Then, when measuring the motion accuracy, it is possible to perform measurement with good reproducibility and high reliability. When the fulcrum height adjusting mechanism is provided, it is easy to measure an inclined table. Therefore, highly accurate measurement can be achieved in a short time.
【図１】本発明装置の例を示す平面図である。FIG. 1 is a plan view showing an example of a device of the present invention.
【図２】本発明装置で基準平面円盤を支持した状態の例
を示し、図１のＡ−Ａ矢視断面図である。FIG. 2 is a sectional view taken along the line AA of FIG. 1, showing an example of a state in which a reference flat disk is supported by the device of the present invention.
【図３】本発明装置の例を示し、図２の一部拡大図であ
る。FIG. 3 is a partially enlarged view of FIG. 2 showing an example of the device of the present invention.
【図４】本発明装置で支持した基準平面円盤の、自重に
よる変形パターンの例を示す図である。FIG. 4 is a diagram showing an example of a deformation pattern of a reference plane disk supported by the device of the present invention due to its own weight.
【図５】基準平面円盤を被測定面に直接載置した場合
の、自重による変形パターンの例を示す図である。FIG. 5 is a diagram showing an example of a deformation pattern due to its own weight when the reference plane disk is directly placed on the surface to be measured.
【図６】基準平面円盤を被測定面に直接載置した場合
の、自重による変形パターンの別の例を示す図である。FIG. 6 is a diagram showing another example of the deformation pattern due to its own weight when the reference plane disk is directly placed on the surface to be measured.
１…基準平面円盤 ２…中心点 ３…支点 ４…支持台 ５…ボール ６…昇降ねじ ７…基台 ８…昇降ガイド ９…枠体 １０…ハンドル １１…止めピン １２…中心点 １３…テーブル 1 ... Reference plane disk 2 ... Center point 3 ... Support point 4 ... Support stand 5 ... Ball 6 ... Lifting screw 7 ... Base 8 ... Lifting guide 9 ... Frame body 10 ... Handle 11 ... Stop pin 12 ... Center point 13 ... Table
───────────────────────────────────────────────────── フロントページの続き (72)発明者 林 孝 神奈川県川崎市幸区下平間239番地 黒田 精工株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Takashi Hayashi Kuroda Seiko Co., Ltd. 239 Shimohirama, Saiwai-ku, Kawasaki City, Kanagawa Prefecture
Claims (2)
径とする円周上に、等間隔に設けられた３点の支点を有
することを特徴とする基準平面円盤の支持装置。1. A support device for a reference plane disk, comprising three fulcrums provided at equal intervals on a circumference having a radius of 68% ± 5% of the radius of the reference plane disk.
調整機構を有していることを特徴とする請求項１記載の
基準平面円盤の支持装置。2. The support device for a reference plane disk according to claim 1, wherein at least two of the three fulcrums have a height adjusting mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15138796A JPH09329404A (en) | 1996-06-12 | 1996-06-12 | Supporting device for reference plane disc |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15138796A JPH09329404A (en) | 1996-06-12 | 1996-06-12 | Supporting device for reference plane disc |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09329404A true JPH09329404A (en) | 1997-12-22 |
Family
ID=15517477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15138796A Pending JPH09329404A (en) | 1996-06-12 | 1996-06-12 | Supporting device for reference plane disc |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09329404A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1629738A1 (en) | 2004-08-26 | 2006-03-01 | Solveig Kesby | Disposable sweat and odour absorbing insoles or inserts for shoes |
-
1996
- 1996-06-12 JP JP15138796A patent/JPH09329404A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1629738A1 (en) | 2004-08-26 | 2006-03-01 | Solveig Kesby | Disposable sweat and odour absorbing insoles or inserts for shoes |
| WO2006021934A1 (en) | 2004-08-26 | 2006-03-02 | Solveig Kesby | Disposable sweat and odour absorbing insoles or inserts for shoes |
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