JPH0932718A - Actuator element - Google Patents
Actuator elementInfo
- Publication number
- JPH0932718A JPH0932718A JP7182457A JP18245795A JPH0932718A JP H0932718 A JPH0932718 A JP H0932718A JP 7182457 A JP7182457 A JP 7182457A JP 18245795 A JP18245795 A JP 18245795A JP H0932718 A JPH0932718 A JP H0932718A
- Authority
- JP
- Japan
- Prior art keywords
- exchange resin
- cation exchange
- actuator element
- resin layer
- cation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、イオン交換膜と、
この膜両面に接合した電極とからなり、含水状態のイオ
ン交換膜に電位差をかけることにより湾曲、屈曲変形す
るアクチュエータ素子に関する。TECHNICAL FIELD The present invention relates to an ion exchange membrane,
The present invention relates to an actuator element that is composed of electrodes bonded to both surfaces of the membrane and that is curved and bent by applying a potential difference to the ion exchange membrane in a water-containing state.
【０００２】[0002]
【従来の技術】イオン交換膜と、この膜両面に接合した
電極とからなり、含水状態のイオン交換膜に電位差をか
けて湾曲、屈曲変形を生ぜしめることを特徴とし、構造
が単純で小型化が容易であり、応答も速く、小電力で作
動し、かつ柔軟であるようなアクチュエータ素子が提案
されている（特公平７−４０７５）。この公報の実施例
に記載されているスルホン基を有する陽イオン交換膜ナ
フィオン（登録商標、デュポン社製）と、その膜両面に
化学めっき法で接合された白金である電極体よりなるア
クチュエータ素子は、イオン交換膜に電位差をかけると
瞬時に湾曲、屈曲変形し、その先端（自由端側）は陽極
方向に瞬時に移動するものである（精密制御用ニューア
クチュエータ便覧 日本工業技術振興協会固体アクチュ
エータ研究会編 フジ・テクノシステム 第１９節 ２
１５−２１９頁）（マイクロマシンの基礎技術の研究
その１ 平成６年３月 財団法人マイクロマシンセンタ
ー）。2. Description of the Related Art An ion exchange membrane and electrodes bonded to both sides of the membrane are characterized in that an ion exchange membrane in a water-containing state is subjected to a potential difference to cause bending and bending deformation. An actuator element that is easy to operate, has a quick response, operates with a small electric power, and is flexible has been proposed (Japanese Patent Publication No. 7-4075). An actuator element composed of a cation exchange membrane Nafion (registered trademark, manufactured by DuPont) having a sulfone group and an electrode body made of platinum bonded to both sides of the membrane by chemical plating is described in the examples of this publication. When an electric potential difference is applied to the ion-exchange membrane, the ion-exchange membrane is instantaneously bent or bent, and its tip (free end side) is instantly moved toward the anode (Handbook of New Actuator for Precision Control, Japan Society of Industrial Technology Promotion, Solid Actuator Research). Meeting Fuji Techno System Section 19 2
15-219) (Research on basic technology of micromachines)
Part 1 March 1994 Micromachine Center).
【０００３】これらのアクチュエータ素子に用いられる
陽イオン交換膜はいずれも、純水中においてはＨ＋イオ
ン、食塩水中においてはNa＋イオンである。そして、陽
イオン交換膜中の陽イオンがＨ＋イオン以外であるアク
チュエータ素子の純水中における変位について示されて
いる例はない。All of the cation exchange membranes used in these actuator elements are H + ions in pure water and Na + ions in saline. And, there is no example showing the displacement in pure water of the actuator element in which the cations in the cation exchange membrane are other than H + ions.
【０００４】[0004]
【発明が解決しようとする課題】従って本発明の目的
は、陽イオン交換膜の陽イオンをリチウムイオンにする
ことにより、湾曲、屈曲変形が大きいアクチュエータ素
子を提供することにある。SUMMARY OF THE INVENTION It is, therefore, an object of the present invention to provide an actuator element having large bending and bending deformation by converting lithium ions into cations of a cation exchange membrane.
【０００５】[0005]
【課題を解決するための手段】本発明者らが鋭意研究を
重ねた結果、本発明は以下によって達成される。As a result of intensive studies by the present inventors, the present invention is achieved by the following.
【０００６】本発明は、含水状態のスルホン基を有する
陽イオン交換樹脂層と、該陽イオン交換樹脂層を介して
配置された複数の電極体とからなり、該電極体間に電位
差をかけることにより変形するアクチュエータ素子であ
って、該陽イオン交換樹脂層中の陽イオンがリチウムイ
オンであるアクチュエータ素子である。The present invention comprises a cation exchange resin layer having a sulfone group in a water-containing state and a plurality of electrode bodies arranged via the cation exchange resin layer, and applying a potential difference between the electrode bodies. Is an actuator element that is deformed by, and the cations in the cation exchange resin layer are lithium ions.
【０００７】また、水不透過性の材料で前記アクチュエ
ータ素子を覆うことにより、前記陽イオン交換樹脂層中
に他のイオンが侵入しないようにしたアクチュエータ素
子である。Further, the actuator element is formed by covering the actuator element with a water-impermeable material to prevent other ions from entering the cation exchange resin layer.
【０００８】陽イオン交換樹脂層としては、ポリスチレ
ンスルホン酸樹脂層やスルホン基を有するフッ素系陽イ
オン交換樹脂層等が挙げられるが、アクチュエータの変
形性能の点から、スルホン基を有するフッ素系陽イオン
交換樹脂層であることが好ましい。Examples of the cation exchange resin layer include a polystyrene sulfonic acid resin layer and a fluorinated cation exchange resin layer having a sulfone group. From the viewpoint of the deformability of the actuator, the fluorinated cation having a sulfone group is used. It is preferably an exchange resin layer.
【０００９】陽イオン交換樹脂層中の陽イオンがリチウ
ムイオンであるとは、スルホン基がスルホン酸リチウム
型であることであり、塩化リチウム水溶液、水酸化リチ
ウム水溶液等のリチウムイオンを含有する水溶液に浸漬
することで、容易に陽イオン交換樹脂層中の陽イオンは
リチウムイオンとなる。The fact that the cation in the cation exchange resin layer is a lithium ion means that the sulfone group is of a lithium sulfonate type, and it can be used in an aqueous solution containing lithium ions such as an aqueous solution of lithium chloride and an aqueous solution of lithium hydroxide. By immersing, the cations in the cation exchange resin layer easily become lithium ions.
【００１０】陽イオン交換樹脂層の含水状態とは、イオ
ン交換樹脂層が少しでも水を含んだ状態であることを意
味する。つまり水雰囲気下、例えば水中及び湿度の高い
大気中にあるアクチュエータ素子のイオン交換樹脂層は
含水状態であるといえる。また変形性能の点より水とし
ては、電解質を含まない、いわゆる純水（イオン交換
水）であることが好ましい。The water-containing state of the cation exchange resin layer means that the ion exchange resin layer contains a little water. That is, it can be said that the ion exchange resin layer of the actuator element in a water atmosphere, for example, in water or in a high-humidity atmosphere is in a water-containing state. From the viewpoint of deformability, the water is preferably so-called pure water (ion-exchanged water) containing no electrolyte.
【００１１】電極体としては、導電性かつ耐食性を有す
る物質を使用することができる。そのうえＸ線不透過性
を有する物質が好ましい。例えば、白金、ルテニウム、
イリジウム、又はパラジウム等の貴金属、ポリアニリ
ン、ポリチオフェン、又はポリピロール等の導電性高分
子及び黒鉛等が挙げられる。好ましくは貴金属であり、
特に好ましくは白金である。As the electrode body, a material having conductivity and corrosion resistance can be used. Moreover, substances that are radiopaque are preferred. For example, platinum, ruthenium,
Examples include noble metals such as iridium and palladium, conductive polymers such as polyaniline, polythiophene, and polypyrrole, and graphite. Preferably a noble metal,
Particularly preferred is platinum.
【００１２】電極体とイオン交換樹脂層との接合方法と
しては、化学めっき法（無電解めっき法）、電気めっき
法、イオン蒸着薄膜形成法、スパッタリング法、真空蒸
着法、イオン注入法、塗布法、圧着法及び溶接法等の高
分子材料表面へ接合可能な公知の方法が利用できる。好
ましくは、湿式条件下でめっきが可能であり、イオン交
換樹脂層との密着度が高い電極体が接合可能な化学めっ
き法（無電解めっき法）であり、特に好ましくは、化学
めっき法の中の吸着還元成長法（ソーダと塩素・１９８
６年８号 １５−２９頁）である。As a method of joining the electrode body and the ion exchange resin layer, a chemical plating method (electroless plating method), an electroplating method, an ion vapor deposition thin film forming method, a sputtering method, a vacuum vapor deposition method, an ion implantation method, a coating method. Known methods such as a pressure bonding method, a welding method, and the like, which can be bonded to the surface of a polymer material, can be used. Preferred is a chemical plating method (electroless plating method) capable of plating under wet conditions and capable of joining an electrode body having a high degree of adhesion with an ion exchange resin layer, and particularly preferred is a chemical plating method. Adsorption reduction growth method (soda and chlorine. 198
No. 6, pp. 15-29).
【００１３】接合されている電極体は、陽イオン交換樹
脂層を介して対向する位置に配置され、少なくとも一組
以上であれば良い。The bonded electrode bodies may be arranged at positions facing each other through the cation exchange resin layer, and at least one set may be provided.
【００１４】アクチュエータ素子が再現性ある安定した
変形性能を発現させるために、アクチュエータ素子へ給
電するための電気供給部の好適な形態は、本発明者らが
提案しているもの（特願平７−７６７１６）が挙げられ
る。具体的には、電極体の少なくとも一部分と、電源か
らのリード線等の導電体が、レーザー溶接法、超音波溶
接法、高周波溶接法等により固定されていることが好ま
しい。あるいは導電性接着剤等の導電性材料を介して接
着固定、または、ろう接法により固定されていることが
好ましい。In order for the actuator element to exhibit reproducible and stable deformation performance, a suitable form of the electricity supply section for supplying power to the actuator element has been proposed by the present inventors (Japanese Patent Application No. 7-83242). -76716). Specifically, it is preferable that at least a part of the electrode body and a conductor such as a lead wire from a power source are fixed by a laser welding method, an ultrasonic welding method, a high frequency welding method, or the like. Alternatively, it is preferably fixed by adhesion or a brazing method through a conductive material such as a conductive adhesive.
【００１５】電源は、直流又は交流電源のいずれも使用
することが可能である。As the power source, either a DC power source or an AC power source can be used.
【００１６】陽イオン交換樹脂層中に他のイオンが侵入
しないようにするとは、陽イオン交換樹脂中のリチウム
イオンが外液中の他の陽イオンと交換されるのを防ぐと
いうことである。具体的な方法としては、水不透過性の
材料でアクチュエータ素子を被覆するという方法が挙げ
られる。Preventing other ions from entering the cation exchange resin layer means preventing the lithium ions in the cation exchange resin from being exchanged with other cations in the external liquid. As a specific method, there is a method of coating the actuator element with a water-impermeable material.
【００１７】被覆層はアクチュエータ素子の変形性能の
点より、柔軟で薄い方が好ましい。また、水不透過性の
材料としては、例えばポリエチレン、ポリプロピレン、
ポリ塩化ビニル、ポリエステル、ポリアミド、ポリエー
テルアミド、ポリウレタン、フッ素樹脂、シリコーンゴ
ム等が挙げられる。The covering layer is preferably flexible and thin from the viewpoint of the deformation performance of the actuator element. Further, as the water-impermeable material, for example, polyethylene, polypropylene,
Examples thereof include polyvinyl chloride, polyester, polyamide, polyetheramide, polyurethane, fluororesin and silicone rubber.
【００１８】[0018]
【発明の実施の形態】以下、本発明の実施の形態を説明
する。スルホン基を有するフッ素系陽イオン交換樹脂膜
１１の両面に、吸着還元成長法である化学めっき（無電
解めっき）法により白金電極体１２ａ、１２ｂを接合す
る。続いてリチウムイオンを含む水溶液に浸漬させ、陽
イオン交換樹脂中の陽イオンをリチウムイオンにした
後、純水で中性になるまで十分に洗浄する。以上より、
スルホン基を有する陽イオン交換樹脂層１１と、陽イオ
ン交換樹脂層を介して対向する位置に配置された電極体
１２ａ、１２ｂよりなり、陽イオン交換樹脂層中の陽イ
オンがリチウムイオンであるアクチュエータ素子１を作
製する。こうして湾曲、屈曲変形の大きいアクチュエー
タ素子を得ることができる。また、シリコーン等の材料
でアクチュエータ素子を被覆することにより、他の陽イ
オン（リチウムイオン以外）が存在する溶液中でもその
侵入を防ぎ、陽イオン交換樹脂層中のリチウムイオンを
保持し、湾曲、屈曲変形の性能を安定化することができ
る。Embodiments of the present invention will be described below. Platinum electrode bodies 12a and 12b are bonded to both surfaces of the fluorine-based cation exchange resin film 11 having a sulfone group by a chemical plating (electroless plating) method which is an adsorption reduction growth method. Subsequently, the resultant is immersed in an aqueous solution containing lithium ions to change the cations in the cation exchange resin into lithium ions, and then sufficiently washed with pure water until neutral. From the above,
An actuator comprising a cation exchange resin layer 11 having a sulfone group and electrode bodies 12a and 12b arranged at positions facing each other with the cation exchange resin layer interposed therebetween, and the cations in the cation exchange resin layer are lithium ions. The element 1 is manufactured. In this way, it is possible to obtain an actuator element having large bending and bending deformation. In addition, by coating the actuator element with a material such as silicone, it prevents its entry even in a solution containing other cations (other than lithium ions), retains lithium ions in the cation exchange resin layer, and bends and bends. The deformation performance can be stabilized.
【００１９】[0019]
【実施例】以下、本発明を実施例、比較例に基づき詳細
に説明する。また、本発明のアクチュエータ素子の湾
曲、屈曲に関する変位測定については以下の方法に従っ
た。EXAMPLES The present invention will be described in detail below based on examples and comparative examples. Further, the following method was used for displacement measurement relating to bending and bending of the actuator element of the present invention.
【００２０】（アクチュエータ素子の変位測定法）幅１
ｍｍ、長さ１５ｍｍの短冊形状のアクチュエータ素子の
片端３ｍｍを給電体である白金ブロックで挟み、３７℃
の純水中に釣り下げて保持し、ポテンシオスタット２０
００（東方技研社製）とファンクション・ジェネレータ
（任意関数発生装置）ＦＧ−０２（東方技研社製）を用
いて、周波数０．１Ｈｚの±１Ｖ方形波電圧を印加し
て、素子を湾曲、屈曲変形させる。素子の固定端から１
０ｍｍの位置の陽極方向への変位をレーザー反射式変位
計ＬＣ２１００（キーエンス社製）で測定し、印加電
圧、電流と変位をデジタルオシロスコープＤＬ２２４０
（横河電機社製）で同時にモニターする。(Method for measuring displacement of actuator element) Width 1
mm, 15 mm long strip-shaped actuator element sandwiching 3 mm on one end with a platinum block that is a power supply, 37 ° C
Hold it down in pure water with a potentiostat 20
00 (manufactured by Toho Giken Co., Ltd.) and a function generator (arbitrary function generator) FG-02 (manufactured by Toho Giken Co., Ltd.) are applied to apply a ± 1 V square wave voltage with a frequency of 0.1 Hz to bend or bend the element. Transform it. 1 from the fixed end of the element
The displacement of the 0 mm position in the direction of the anode was measured by a laser reflection displacement meter LC2100 (manufactured by Keyence Corporation), and the applied voltage, current and displacement were measured using a digital oscilloscope DL2240.
(Made by Yokogawa Electric Corporation) monitor at the same time.
【００２１】（実施例１）スルホン基を有するフッ素系
陽イオン交換樹脂膜ナフィオン１１７（登録商標、デュ
ポン社製）１１の両面に、吸着還元成長法である化学め
っき（無電解めっき）法により、３ｍｇ／ｃｍ２の白金
電極体１２ａ、１２ｂを接合した。電極体の一部分と、
電源１３からの直径０．１ｍｍの白金ワイヤである導電
体１４ａ、１４ｂとを、銀フィラーを含む導電性エポキ
シ接着剤（エイブルボンド９６７−１、日本エイブルス
ティック社製）である導電性材料を介して接着固定（電
気供給部１５ａ、１５ｂ）した。続いて１Ｎの塩化リチ
ウム水溶液に室温で１５時間浸漬させた後、純水で中性
になるまで十分に洗浄した。以上より、スルホン基を有
する陽イオン交換樹脂層１１と、陽イオン交換樹脂層を
介して対向する位置に配置された電極体１２ａ、１２ｂ
よりなり、陽イオン交換樹脂層中の陽イオンがリチウム
イオンであるアクチュエータ素子１を作製した。前記の
変位測定方法に従い、変位を測定したところ±１．９４
ｍｍであった。(Example 1) A fluorine-based cation-exchange resin membrane Nafion 117 (registered trademark, manufactured by DuPont) 11 having a sulfone group was formed on both surfaces by a chemical plating (electroless plating) method, which is an adsorption reduction growth method. 3 mg / cm 2 of platinum electrode bodies 12a and 12b were joined. A part of the electrode body,
The conductors 14a and 14b, which are platinum wires having a diameter of 0.1 mm, from the power source 13 are connected via a conductive material which is a conductive epoxy adhesive containing silver filler (Able Bond 967-1, manufactured by Japan Able Stick Co., Ltd.). And adhesively fixed (electric supply units 15a and 15b). Then, it was immersed in a 1N lithium chloride aqueous solution at room temperature for 15 hours, and then thoroughly washed with pure water until it became neutral. As described above, the cation-exchange resin layer 11 having a sulfone group and the electrode bodies 12a and 12b arranged at positions facing each other with the cation-exchange resin layer in between.
Then, the actuator element 1 in which the cations in the cation exchange resin layer are lithium ions was produced. When the displacement was measured according to the above displacement measuring method, it was ± 1.94.
mm.
【００２２】（実施例２）実施例１で作製したアクチュ
エータ素子１を、水不透過性の接着性シリコーンＴＳＥ
３８２−Ｃ（東芝シリコーン社製）の薄膜１６で被覆
し、アクチュエータ素子２を作製した。但し、陽イオン
交換樹脂層は、純水で含水状態に保持した。飽和食塩水
中において、前記の変位測定方法に従い、変位を測定し
たところ±１．７８ｍｍであった。(Embodiment 2) The actuator element 1 manufactured in Embodiment 1 is prepared by using the water-impermeable adhesive silicone TSE.
The actuator element 2 was manufactured by coating with a thin film 16 of 382-C (manufactured by Toshiba Silicone Co., Ltd.). However, the cation exchange resin layer was kept in a water-containing state with pure water. When the displacement was measured in saturated saline in accordance with the displacement measuring method described above, it was ± 1.78 mm.
【００２３】陽イオン交換樹脂層中の陽イオンを定量す
るため、アクチュエータ素子を純水中で洗浄し、６０℃
で１５時間真空乾燥し、白金るつぼを用いて灰化した。
次いで、るつぼに６Ｎ塩酸を加え、灰分を溶解させ、放
冷後、塩酸で定溶した。これを、ＩＣＰ発光分光分析装
置ＳＰＳ１２００ＶＲ（セイコー電子工業社製）を用い
てアクチュエータ素子の陽イオン交換樹脂層中のＬｉを
定量したところ、陽イオン交換樹脂層中の陽イオンがリ
チウムイオンのまま変化していないことを確認した。In order to quantify the cations in the cation exchange resin layer, the actuator element is washed in pure water and then at 60 ° C.
Vacuum dried for 15 hours and ashed with a platinum crucible.
Next, 6N hydrochloric acid was added to the crucible to dissolve the ash content, and after allowing to cool, the solution was dissolved with hydrochloric acid. When the amount of Li in the cation exchange resin layer of the actuator element was quantified using an ICP emission spectroscopy analyzer SPS1200VR (manufactured by Seiko Denshi Kogyo Co., Ltd.), the cations in the cation exchange resin layer remained lithium ions. I confirmed that I did not.
【００２４】（比較例１）実施例１と同様に陽イオン交
換樹脂膜１１の両面に白金電極体１２ａ、１２ｂを接合
した。次いで、１Ｎの塩酸中に浸漬して、陽イオン交換
樹脂層中の陽イオンを水素イオンにした。前記の変位測
定方法に従い、変位を測定したところ±０．３４ｍｍで
あった。(Comparative Example 1) In the same manner as in Example 1, platinum electrode bodies 12a and 12b were bonded to both surfaces of the cation exchange resin membrane 11. Then, it was immersed in 1N hydrochloric acid to convert the cations in the cation exchange resin layer into hydrogen ions. When the displacement was measured according to the above displacement measuring method, it was ± 0.34 mm.
【００２５】（比較例２）実施例１と同様に陽イオン交
換樹脂膜１１の両面に白金電極体１２ａ、１２ｂを接合
した。次いで、１Ｎの塩化ナトリウム水溶液に浸漬し
て、陽イオン交換樹脂層中の陽イオンをナトリウムイオ
ンにした。前記の変位測定方法に従い、変位を測定した
ところ±１．２ｍｍであった。(Comparative Example 2) As in Example 1, platinum electrode bodies 12a and 12b were bonded to both surfaces of the cation exchange resin membrane 11. Then, it was immersed in a 1N sodium chloride aqueous solution to convert the cations in the cation exchange resin layer into sodium ions. When the displacement was measured according to the above displacement measuring method, it was ± 1.2 mm.
【００２６】（比較例３）実施例１と同様に陽イオン交
換樹脂膜１１の両面に白金電極体１２ａ、１２ｂを接合
した。次いで、１Ｎの塩化カリウム水溶液に浸漬して、
陽イオン交換樹脂層中の陽イオンをカリウムイオンにし
た。前記の変位測定方法に従い、変位を測定したところ
±０．８６ｍｍであった。(Comparative Example 3) As in Example 1, platinum electrode bodies 12a and 12b were bonded to both surfaces of the cation exchange resin membrane 11. Then, soak in a 1N potassium chloride aqueous solution,
The cations in the cation exchange resin layer were changed to potassium ions. When the displacement was measured according to the above displacement measuring method, it was ± 0.86 mm.
【００２７】（比較例５）実施例１と同様に陽イオン交
換樹脂膜１１の両面に白金電極体１２ａ、１２ｂを接合
した。次いで、１Ｎの塩化セシウム水溶液に浸漬して、
陽イオン交換樹脂層中の陽イオンをセシウムイオンにし
た。前記の変位測定方法に従い、変位を測定したところ
±０．９０ｍｍであった。(Comparative Example 5) As in Example 1, platinum electrode bodies 12a and 12b were bonded to both surfaces of the cation exchange resin membrane 11. Then, by immersing in 1N cesium chloride aqueous solution,
The cations in the cation exchange resin layer were changed to cesium ions. When the displacement was measured according to the above displacement measuring method, it was ± 0.90 mm.
【００２８】（比較例７）実施例１と同様に陽イオン交
換樹脂膜１１の両面に白金電極体１２ａ、１２ｂを接合
した。次いで、２８％のアンモニア水に浸漬して、陽イ
オン交換樹脂層中の陽イオンをアンモニウムイオンにし
た。前記の変位測定方法に従い、変位を測定したところ
±０．９１ｍｍであった。(Comparative Example 7) In the same manner as in Example 1, platinum electrode bodies 12a and 12b were bonded to both surfaces of the cation exchange resin membrane 11. Then, it was immersed in 28% ammonia water to convert the cations in the cation exchange resin layer into ammonium ions. When the displacement was measured according to the above displacement measuring method, it was ± 0.91 mm.
【００２９】（比較例４）実施例１と同様に陽イオン交
換樹脂膜１１の両面に白金電極体１２ａ、１２ｂを接合
した。次いで、１Ｎの塩化カルシウム水溶液に浸漬し
て、陽イオン交換樹脂層中の陽イオンをカルシウムイオ
ンにした。前記の変位測定方法に従い、変位を測定した
ところ±１．０９ｍｍであった。(Comparative Example 4) As in Example 1, platinum electrode bodies 12a and 12b were bonded to both surfaces of the cation exchange resin membrane 11. Then, it was immersed in a 1N aqueous solution of calcium chloride to convert the cations in the cation exchange resin layer into calcium ions. When the displacement was measured according to the above displacement measuring method, it was ± 1.09 mm.
【００３０】（比較例６）実施例１と同様に陽イオン交
換樹脂膜１１の両面に白金電極体１２ａ、１２ｂを接合
した。次いで、１Ｎの塩化バリウム水溶液に浸漬して、
陽イオン交換樹脂層中の陽イオンをバリウムイオンにし
た。前記の変位測定方法に従い、変位を測定したところ
±０．７３ｍｍであった。(Comparative Example 6) In the same manner as in Example 1, platinum electrode bodies 12a and 12b were bonded to both surfaces of the cation exchange resin membrane 11. Then, immerse in a 1N barium chloride aqueous solution,
The cations in the cation exchange resin layer were barium ions. When the displacement was measured according to the above displacement measuring method, it was ± 0.73 mm.
【００３１】[0031]
【発明の効果】以上説明したように、陽イオン交換膜の
陽イオンをリチウムイオンにすることにより、湾曲、屈
曲変形の最も大きいアクチュエータ素子を得ることがで
きる。As described above, by using lithium ions as the cations of the cation exchange membrane, it is possible to obtain an actuator element having the largest bending and bending deformation.
【図１】本発明に係わるアクチュエータ素子１の斜視
図。FIG. 1 is a perspective view of an actuator element 1 according to the present invention.
【図２】図１のＡ−Ａ断面図。FIG. 2 is a sectional view taken along line AA of FIG.
【図３】図１のＢ−Ｂ断面図。3 is a sectional view taken along line BB of FIG.
【図４】本発明に係わるアクチュエータ素子２の斜視
図。FIG. 4 is a perspective view of an actuator element 2 according to the present invention.
【図５】図４のＣ−Ｃ断面図。5 is a sectional view taken along line CC of FIG.
【図６】図４のＤ−Ｄ断面図。FIG. 6 is a sectional view taken along line DD of FIG. 4;
１ アクチュエータ素子 ２ アクチュエータ素子 １１ 陽イオン交換樹脂層 １２ａ、１２ｂ 電極体 １３ 電源 １４ａ、１４ｂ 導電体 １５ａ、１５ｂ 電気供給部 １６ 薄膜 DESCRIPTION OF SYMBOLS 1 Actuator element 2 Actuator element 11 Cation exchange resin layer 12a, 12b Electrode body 13 Power supply 14a, 14b Conductor 15a, 15b Electric supply part 16 Thin film
Claims (3)
交換樹脂層と、該陽イオン交換樹脂層を介して配置され
た複数の電極体とからなり、該電極体間に電位差をかけ
ることにより変形するアクチュエータ素子であって、該
陽イオン交換樹脂層中の陽イオンがリチウムイオンであ
ることを特徴とするアクチュエータ素子。1. A cation-exchange resin layer having a hydrous sulfone group, and a plurality of electrode bodies arranged with the cation-exchange resin layer interposed therebetween, and deformed by applying a potential difference between the electrode bodies. An actuator element, wherein the cations in the cation exchange resin layer are lithium ions.
が侵入しないようにしたことを特徴とする請求項１に記
載のアクチュエータ素子。2. The actuator element according to claim 1, wherein other ions are prevented from entering the cation exchange resin layer.
素子を覆ったことを特徴とする請求項１に記載のアクチ
ュエータ素子。3. The actuator element according to claim 1, wherein the actuator element is covered with a water-impermeable material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7182457A JPH0932718A (en) | 1995-07-19 | 1995-07-19 | Actuator element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7182457A JPH0932718A (en) | 1995-07-19 | 1995-07-19 | Actuator element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0932718A true JPH0932718A (en) | 1997-02-04 |
Family
ID=16118611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7182457A Pending JPH0932718A (en) | 1995-07-19 | 1995-07-19 | Actuator element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0932718A (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0924846A2 (en) * | 1997-12-15 | 1999-06-23 | Agency Of Industrial Science And Technology, Ministry Of International Trade And Industry | Process for producing an actuator element and microdevice |
| WO2004098040A1 (en) * | 2003-04-25 | 2004-11-11 | Eamex Corporation | Curve driver and microdevice |
| JP2004350495A (en) * | 2003-04-25 | 2004-12-09 | Eamex Co | Bending driving device and micro device |
| WO2004112233A1 (en) * | 2003-06-17 | 2004-12-23 | Eamex Corporation | Polymer actuator |
| WO2005008875A1 (en) * | 2003-07-23 | 2005-01-27 | Eamex Corporation | Method for manufacturing actuator device |
| JP2005033991A (en) * | 2003-06-17 | 2005-02-03 | Eamex Co | Polymer actuator element |
| JP2005057994A (en) * | 2003-07-23 | 2005-03-03 | Eamex Co | Method for manufacturing actuator element, and actuator element |
| US6881307B2 (en) | 2001-10-26 | 2005-04-19 | Minolta Co., Ltd. | Image creating apparatus and image recording apparatus |
| WO2005053145A1 (en) * | 2003-11-28 | 2005-06-09 | Eamex Corporation | Driving element |
| WO2008007526A1 (en) * | 2006-07-14 | 2008-01-17 | Eamex Corporation | Wiring connection structure in polymer actuator or polymer sensor |
| WO2013021903A1 (en) * | 2011-08-11 | 2013-02-14 | ソニー株式会社 | Driving unit, lens module and image pick-up device |
| CN104122642A (en) * | 2013-04-26 | 2014-10-29 | 索尼公司 | Polymer device, method of manufacturing the same, camera module, and imaging unit |
-
1995
- 1995-07-19 JP JP7182457A patent/JPH0932718A/en active Pending
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0924846A3 (en) * | 1997-12-15 | 1999-11-17 | Agency Of Industrial Science And Technology, Ministry Of International Trade And Industry | Process for producing an actuator element and microdevice |
| EP0924846A2 (en) * | 1997-12-15 | 1999-06-23 | Agency Of Industrial Science And Technology, Ministry Of International Trade And Industry | Process for producing an actuator element and microdevice |
| US6881307B2 (en) | 2001-10-26 | 2005-04-19 | Minolta Co., Ltd. | Image creating apparatus and image recording apparatus |
| WO2004098040A1 (en) * | 2003-04-25 | 2004-11-11 | Eamex Corporation | Curve driver and microdevice |
| JP2004350495A (en) * | 2003-04-25 | 2004-12-09 | Eamex Co | Bending driving device and micro device |
| JP4593160B2 (en) * | 2003-04-25 | 2010-12-08 | イーメックス株式会社 | Bending drive device and micro device |
| WO2004112233A1 (en) * | 2003-06-17 | 2004-12-23 | Eamex Corporation | Polymer actuator |
| JP2005033991A (en) * | 2003-06-17 | 2005-02-03 | Eamex Co | Polymer actuator element |
| JP2005057994A (en) * | 2003-07-23 | 2005-03-03 | Eamex Co | Method for manufacturing actuator element, and actuator element |
| WO2005008875A1 (en) * | 2003-07-23 | 2005-01-27 | Eamex Corporation | Method for manufacturing actuator device |
| WO2005053145A1 (en) * | 2003-11-28 | 2005-06-09 | Eamex Corporation | Driving element |
| WO2008007526A1 (en) * | 2006-07-14 | 2008-01-17 | Eamex Corporation | Wiring connection structure in polymer actuator or polymer sensor |
| WO2013021903A1 (en) * | 2011-08-11 | 2013-02-14 | ソニー株式会社 | Driving unit, lens module and image pick-up device |
| JP2013037315A (en) * | 2011-08-11 | 2013-02-21 | Sony Corp | Driving unit, lens module and image pick-up device |
| US9590169B2 (en) | 2011-08-11 | 2017-03-07 | Dexterials Corporation | Drive device, lens module, and image pickup unit |
| CN104122642A (en) * | 2013-04-26 | 2014-10-29 | 索尼公司 | Polymer device, method of manufacturing the same, camera module, and imaging unit |
| JP2014215530A (en) * | 2013-04-26 | 2014-11-17 | ソニー株式会社 | Polymer device, method of manufacturing the same, camera module, and imaging unit |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Oguro et al. | Polymer electrolyte actuator with gold electrodes | |
| JP4802680B2 (en) | Actuator | |
| US5268082A (en) | Actuator element | |
| JP2768869B2 (en) | Actuator element | |
| JP5098245B2 (en) | Actuator and manufacturing method thereof | |
| JPH0932718A (en) | Actuator element | |
| US7169822B2 (en) | Polymeric actuator | |
| JP2007244103A (en) | Composite material | |
| JP4821487B2 (en) | Actuator device and driving method thereof | |
| US20040025639A1 (en) | Novel electrically active ionic polymer metal composites and novel methods of manufacturing them | |
| JPH0810336A (en) | Medical tube | |
| Onishi et al. | Bending response of polymer electrolyte actuator | |
| JP3646166B2 (en) | Method for manufacturing actuator element | |
| JPH11235064A (en) | Manufacture of macromolecular actuator | |
| Tamagawa et al. | Influence of metal plating treatment on the electric response of Nafion | |
| JPH0979129A (en) | Actuator element | |
| CN108007950B (en) | Method for dynamically repairing metal electrode in IPMC driving process | |
| JP2894378B2 (en) | Electrochemical element and method of manufacturing the same | |
| Wang et al. | Effects of Cu 2+ counter ions on the actuation performance of flexible ionic polymer metal composite actuators | |
| JP2005033991A (en) | Polymer actuator element | |
| JP2006081374A (en) | Air drive polymer actuator element | |
| Noh et al. | Development of large-surface Nafion-metal composite actuator and its electrochemical characterization | |
| JPH08275564A (en) | Actuator element | |
| Onishi et al. | Biomimetic microactuators based on polymer electrolyte/gold composite driven by low voltage | |
| Bennett et al. | Manufacture of Ionic Polymer Actuators Using Non-Precious Metal Electrodes |