JPH09317699A - Vacuum generator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simplify and compact the structure of a vacuum generator by arranging a spring which is energized in a manner that a vacuum valve is allowed to be moved to the other end side of a cylinder chamber when high pressure fluid is supplied to one end side of the cylinder chamber, and positioned on one end side of the cylinder chamber when the high pressure fluid is not supplied. SOLUTION: A pressure supply port 12 communicated with a high pressure fluid source is arranged on one end side of a main body 10. A first cylinder chamber 14 is formed in the main body 10, and communicated with the pressure supply port 12 through a second cylinder chamber 40 so that one end side 14a is communicated with the high pressure fluid source. A first spring 34 is so energized that a vacuum valve 22 is allowed to be moved to the other end side 14b of the first cylinder chamber 14 when high pressure fluid is supplied to one end side of the first cylinder chamber 14, and positioned on one end side 14a of the first cylinder 14 when the high pressure fluid is not supplied. Hereby, the structure of a vacuum generator can be simplified and compacted.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a vacuum generator.

[0002]

2. Description of the Related Art As a background art, there is a vacuum generator as shown in FIGS. The main body 110 is provided with a high pressure air supply port 112, a vacuum port 118, a vacuum generating solenoid valve 114, and a vacuum breaking solenoid valve 1.
16 is attached. Further, in the main body 110, the vacuum valve 120, the switching valve mechanism 122, the breaking air adjusting unit 12
4. The vacuum port side filter unit 126 is incorporated. The vacuum valve 118 has a fluid passage 128 extending in the axial direction, a nozzle portion 130 for narrowing the passage is formed on the upstream side of the passage 128, and the nozzle portion 130 is provided on the downstream side of the passage 124. Diffuser part 13 for expanding the flow path
2 is formed. An opening portion 134 that opens laterally is provided between the nozzle portion 130 and the diffuser portion 132,
By supplying the high-pressure fluid to the flow path 128 from one end side, a negative pressure can be generated in the vicinity of the opening 134. An opening is formed in the side wall of the cylinder chamber into which the vacuum valve 120 is inserted, and a filter is attached to the opening. The air that has passed through the flow path 128 of the vacuum valve 120 is discharged through the filter 136. The compressed air supply passage 138 communicating from the high pressure air supply port 112 to the vacuum valve 120 is provided so as to be opened and closed by the vacuum generation electromagnetic valve 114.

In the switching valve mechanism 122, a switching valve body 142 is axially slidably inserted into a cylinder chamber 140, and is urged toward one end of the cylinder chamber 140 by a spring 144. At one end of the cylinder chamber 140,
A communication passage 146 communicates with the high-pressure air supply port 122, and this communication passage 146 is also opened / closed by the vacuum generating electromagnetic valve 114, similarly to the compressed air supply passage 138. Further, the high-pressure air supply port 112 is connected to a vacuum break passage 148 that is opened and closed by a vacuum break solenoid valve 116. The vacuum break passage 148 includes a thin tube 150 inserted into the switching valve body 142 and a portion on the other end side of the cylinder chamber 140, and a vacuum port side filter is provided via an opening passage 150 provided in a side wall of the cylinder chamber 140. It communicates with the part 126. A needle 152 is inserted in an opening in the cylinder chamber 140 of the thin tube 150 so as to be able to move forward and backward, and the flow rate of air flowing through the vacuum break passage 148 can be adjusted.

When the communication passage 146 and the compressed air supply passage 138 are communicated with each other by the vacuum generating solenoid valve 112, compressed air is supplied to one end of the cylinder chamber 140 and the switching valve body 142 is connected to the other, as shown in FIG. Since it is moved to the end side, the vacuum break passage 148 is closed and the vacuum valve 12
Zero creates a vacuum. At this time, the vacuum breaking electromagnetic valve 116 also closes the vacuum breaking passage 148. Further, the communication passage 146 and the compressed air supply passage 138 are closed by the vacuum generating solenoid valve 112, and the vacuum break passage 1
When 48 communicates with the vacuum breaking solenoid valve 116,
As shown in FIG. 8, the generation of the vacuum by the vacuum valve 120 is stopped, and the breaking air is supplied to the vacuum port 118 through the vacuum port side filter section 126, and the vacuum of the vacuum port 118 is broken. At this time, the cylinder chamber 140 is closed on one end side by the switching valve body 142, so that the break air does not flow to the vacuum port 118 side.

[0005]

However, in the above vacuum generator, the switching valve mechanism 1 including the switching valve body 142 is provided.
22 is required independently, and there is a problem that it is difficult to make compact as the structure becomes complicated.

Therefore, an object of the present invention is to provide a vacuum generator which can suitably generate a vacuum and which can be simplified and made compact in structure.

[0007]

The present inventor has the following structure to achieve the above object. That is, the present invention, the main body, in the main body, one end side is communicated with a high pressure fluid source,
A first cylinder chamber provided with the other end open, a vacuum port provided in the main body, and a negative pressure port portion opened in a middle part of a side wall of the first cylinder chamber so as to communicate with the vacuum port. And a portion that is provided so as to be slidable in the axial direction in the first cylinder chamber and has a fluid passage extending in the axial direction, and a portion located on one end side of the first cylinder chamber of the passage is the passage. A portion formed on the narrowing nozzle portion and located on the other end side of the first cylinder chamber on the downstream side of the flow passage from the nozzle portion is formed on the diffuser portion that enlarges the flow passage, and An opening portion that opens laterally is provided between the diffuser portions, and when the opening portion is moved to the other end side of the first cylinder chamber, the opening portion and the negative pressure port portion are communicated with each other and one end is connected to the flow path. The high pressure fluid is supplied from the When a high pressure fluid is supplied to one end side of the first cylinder chamber, a vacuum valve that shuts off the communication between the opening and the negative pressure port section when moving to one end side, and A first spring that allows the vacuum valve to move to the other end side of the first cylinder chamber and urges the vacuum valve to be positioned at one end side of the first cylinder chamber when high-pressure fluid is not supplied; It is equipped with.

Further, a main flow path that connects the first cylinder chamber and a high pressure fluid source to each other, and a high pressure fluid that is arranged in the middle of the main flow path and selectively supplies the high pressure fluid to the first cylinder chamber, A main valve that opens and closes the main channel, a vacuum breaking channel that connects the vacuum port to a high-pressure fluid source, and a vacuum breaking channel that is arranged in the middle of the vacuum channel and selects the supply of high-pressure fluid to the vacuum port. In order to break the vacuum in the vacuum port by supplying a high-pressure fluid to the vacuum port, a break valve that opens and closes the vacuum break flow path is provided, so that vacuum generation and vacuum break can be performed appropriately. be able to.

Further, the main valve is provided in a second cylinder chamber provided in the main body and is opened in a side wall of the second cylinder chamber, and connects the high-pressure fluid source and the second cylinder chamber. An input port portion and a communication port portion provided in an opening in a side wall of the second cylinder chamber and communicating the second cylinder chamber with the first cylinder chamber, and slidable in the axial direction in the second cylinder chamber. The input port portion and the communication port portion are communicated with each other when moved to one end side of the second cylinder chamber, and the input port portion and the communication port portion are communicated with each other when moved to the other end side. It is possible to supply the compressed air to the first cylinder chamber and the vacuum generating valve in a wide passage, because the main valve body is configured to shut off the communication.

A first control passage communicating with the other end of the second cylinder chamber and introducing high-pressure fluid into the other end of the second cylinder chamber to move the main valve body to the one end; By providing a second control flow path that communicates with one end side of the second cylinder chamber and introduces high-pressure fluid into one end side of the second cylinder chamber to move the main valve body to the other end side, a vacuum valve is provided. Vacuum generation can be maintained favorably.

Further, when the breaking valve is formed so as to be slidable in the axial direction in the third cylinder chamber provided in the main body, and moves to one end side of the third cylinder chamber. And a sliding valve body which communicates with the vacuum breaking flow path and shuts off the vacuum breaking flow path when moved to the other end side, and communicates with the other end side of the third cylinder chamber and slides. A flow path for controlling break air for introducing a high-pressure fluid to the other end side of the third cylinder chamber to move the valve body to the one end side, and the other end of the third cylinder chamber via the break air control flow path. When the high pressure fluid is supplied to the side, the sliding valve element is allowed to move to one end side, and when the high pressure fluid is not supplied to the other end side of the third cylinder chamber, the sliding valve element is moved to the other end side. An urging member for urging the second cylinder chamber and the other end side of the third cylinder chamber. Since the flow path for controlling the breaking air and the second control flow path are communicated with each other so that a high-pressure fluid can be introduced into one end side at the same time, the vacuum generation can be stopped and the vacuum break can be performed at the same time. The destructive action of can be obtained sharply.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a sectional view showing a main part of an embodiment of a vacuum generator according to the present invention. Reference numeral 10 is a main body, and a compressed air supply port 12 that communicates with a high pressure fluid source is provided at one end side. Reference numeral 14 denotes a first cylinder chamber, which is formed inside the main body 10 and has one end side 14a.
Is communicated with the compressed air supply port 12 via a second cylinder chamber 40 described later so as to communicate with the high pressure fluid source.
Further, the other end side 14b of the first cylinder chamber 14 is open, and the open end of the other end side 14b is a muffling section 16. The muffling section 16 includes a plurality of muffling filters 16 a, 16 a.
b, 16c ... Are provided.

A vacuum port 18 is provided on the other end side of the main body 10. Reference numeral 20 denotes a negative pressure port portion, which is provided so as to communicate with the vacuum port 18 by being opened in a middle portion of the side wall of the first cylinder chamber 14. A passage space 19 is provided between the negative pressure port portion 20 and the vacuum port 18, and a cylindrical filter 21 is arranged so that air flowing from the vacuum port 18 side to the first cylinder chamber 14 side passes through. Has been done.

Reference numeral 22 denotes a vacuum valve which is slidably provided in the first cylinder chamber 14 in the axial direction and has a fluid passage 24 extending in the axial direction. A portion of the flow passage 24 located on one end side of the first cylinder chamber 14 is formed in the nozzle portion 26 that narrows the flow passage 24. A portion located on the other end side of the first cylinder chamber 14 on the downstream side of the flow path 24 with respect to the nozzle portion 26 expands the flow path 24.
Is formed. Further, an opening 30 that opens laterally is provided between the nozzle portion 26 and the diffuser portion 28. When the other end side 14b of the first cylinder chamber 14 is moved, the opening 30 and the negative pressure port 20 are communicated with each other, and the high pressure fluid is supplied to the flow path 24 from one end side, so that the vicinity of the opening 30 is provided. Generate a negative pressure. The principle of generating this negative pressure utilizes the viscosity of air, which is a well-known technique as an ejector effect.

Further, the vacuum valve 22 is provided at the one end side 14
When it moves to a, the communication between the opening 30 and the negative pressure port 20 is blocked. That is, as shown in FIG. 5, the'O'-ring 32 fitted to the outer periphery of the diffuser portion 28 is formed on the slope 15 formed on the inner periphery on the one end side of the negative pressure port portion 20 of the first cylinder chamber 14. It abuts and closes the communication between the opening 30 and the negative pressure port 20. A seal ring 27 is fitted on the outer periphery of the nozzle portion 26. Also, 29 is a seal ring, which is fitted on the outer periphery of the diffuser portion 28. These seal rings 2
7 and 29, the vacuum valve 22 can slide in the first cylinder chamber 14 in the axial direction in an airtight state. When high-pressure air is supplied to the one end side 14a of the first cylinder chamber 14, the seal ring 27 is preferably airtight, so that the vacuum valve 22 is preferably pressed by the pressure of the high-pressure air and the other end side 1a.
It is moved to the 4b side. In addition, the seal ring 29
Thus, air is preferably airtight so that air does not enter when the vacuum port 18 side has a negative pressure.

Reference numeral 34 denotes a first spring, which allows the vacuum valve 22 to move to the other end side 14b of the first cylinder chamber 14 when a high-pressure fluid is supplied to one end side of the first cylinder chamber 14. When the high-pressure fluid is not supplied, the vacuum valve 22 is urged to be positioned at the one end side 14a of the first cylinder chamber 14. That is, the first spring 34 is
Inner peripheral flange portion 14 formed in the first cylinder chamber 14
It is mounted between c and an outer peripheral flange portion 28a formed on the outer periphery of the diffuser portion 28. Of course, the mounting position of the first spring 34 is not limited to this embodiment as long as the direction of the urging force is the same.

Reference numeral 36 denotes a main flow passage, which connects the first cylinder chamber 14 and the high pressure fluid source. Reference numeral 38 denotes a main valve, which is arranged in the middle of the main passage 36 and opens and closes the main passage 36 so as to selectively supply the high-pressure fluid to the first cylinder chamber 14. The main valve 38 includes a second cylinder chamber 40 provided in the main body 10 and a second cylinder chamber 40.
And an input port portion 42 which is provided to be opened to the side wall of the second cylinder chamber 40 and which communicates the high pressure fluid source with the second cylinder chamber 40 via the compressed air supply port 12, and which is provided to be opened to the side wall of the second cylinder chamber 40. Second cylinder chamber 40 and first cylinder chamber 14
And a communication port portion 44 that communicates with the. Further, the main valve 38 is formed so as to be slidable in the axial direction within the second cylinder chamber 40, and has an input port portion 42 and a communication port portion 44 when moved to one end side of the second cylinder chamber 40. A main valve body 46 is provided that connects the input port portion 42 and the communication port portion 44 when they move to the other end side. The main valve body 46 is formed in a spool shape,
A small diameter portion 46a is formed in the middle. This small diameter part 4
The 6a allows the input port portion 42 and the communication port portion 44 to communicate with each other when the second cylinder chamber 40 is moved to the one end side.

Reference numeral 48 denotes a first control flow passage, which communicates with the other end side of the second cylinder chamber 40. This first control channel 48
Is connected to an output passage 72 of the first pilot valve 70 described later. Reference numeral 49 denotes a second spring, which is elastically mounted between the inner surface on one end side of the second cylinder chamber 40 and the one end side portion of the main valve body 46, and is arranged from the first pilot valve 70 to the first pilot valve 70.
The other end side 40 of the second cylinder chamber 40 via the control flow path 48
When the high pressure fluid is supplied to b, the main valve body 46 is allowed to move to one end side, and when the high pressure fluid is not supplied to the other end side 40b of the second cylinder chamber 40, the main valve body 46 is moved to the other end side. It is urged to be located on the side 40b. Thereby, the compressed air can be preferably supplied to the first cylinder chamber 14 and the vacuum generating valve 22 in a wide passage. Also,
By the first pilot valve, it is possible to preferably perform the selective supply of the compressed air to the first cylinder chamber 14 and the vacuum generating valve 22.

Reference numeral 50 is a breaking valve, and the vacuum port 18
And the high-pressure fluid source are communicated with each other, and the vacuum-breaking flow channel 52 is opened and closed so as to selectively supply the high-pressure fluid to the vacuum port 18. When the breaking valve 50 opens and the high-pressure fluid is supplied to the vacuum port 18, the vacuum in the vacuum port 18 breaks. In the present embodiment, the third cylinder chamber 54 formed in the main body in a stepped shape.
And a sliding valve body 56 formed in a stepped shape so as to be slidable in the third cylinder chamber 54 in the axial direction. When the sliding valve body 56 moves to the one end side of the third cylinder chamber (see FIG. 5).
(State shown in FIG. 2) is made to communicate with the vacuum breaking flow path, and when moved to the other end side (state shown in FIG. 1), the vacuum breaking flow path is shut off. Reference numeral 58 is a flow path for controlling the breaking air, which opens to the inner upper bottom surface (the other end side of the third cylinder chamber 54) of the large-diameter portion of the third cylinder chamber 54, and the second
It is connected to the output passage of the pilot valve 74. Therefore, when the high-pressure fluid is introduced from the second pilot valve 74 to the other end side of the third cylinder chamber 54, the sliding valve body 56 is moved to the one end side. The structure of the second pilot valve is the first
It has the same structure as the pilot valve 70.

Reference numeral 60 denotes a third spring, which is a sliding valve body 5.
6 is normally urged upward in the drawing of FIG. 1 so as to close the vacuum breaking flow path 52, and the high pressure fluid flows from the second pilot valve 74 to the upper side of the large diameter portion of the third cylinder chamber 54 ( When supplied to the other end side of the three-cylinder chamber 54), the sliding valve body 56 is allowed to move downward so as to open the vacuum breaking flow path 52. That is, the third spring 6
0 is elastically mounted between the lower surface of the sliding valve body 56 and the bottom surface of the third cylinder chamber 54 and acts as a biasing member. Sliding valve body 56
The'O'-ring 56a fitted in the airtightness ensures airtightness, and the vacuum break flow path 52 can be reliably closed. When the breaking valve 50 opens, the high-pressure breaking air forms the vacuum breaking flow passage 52, and the compressed air supply port 12 and the input port section 4 are formed.
2, the second cylinder chamber 40, the needle insertion hole 64, the breaking valve 50 and the thin tube 62, and the vacuum port 18
To break the vacuum. Since the thin tube 62 has a small inner volume, the inflowing air can be quickly introduced into the vacuum port 18, and the vacuum break can be suitably performed. The second cylinder chamber 40 and the needle insertion hole portion 64 are communicated with each other by a through hole 68.

Reference numeral 66 denotes a needle, which is inserted into the needle insertion hole portion 64 and is arranged so that its tip faces the small diameter hole from the large diameter hole. It is provided so that this needle 66 can be moved in the axial direction by a screw-in type,
The opening area of the vacuum breaking flow channel 52 can be finely adjusted. As a result, the flow rate of the breaking air supplied to the vacuum port 18 can be adjusted, and the vacuum breaking speed can be adjusted appropriately. In the above embodiments, the'O'-ring fitted to the sliding portion and the gaskets provided for hermetically sealing the members forming the main body 10 are obvious in the drawings, and the description thereof will be omitted. .

Next, the first pilot valve 70 and the second pilot valve 70
The structure and mounting state of the pilot valve 74 will be described with reference to FIGS. 2 and 3. First pilot valve 7
0 and the second pilot valve 74 can use the same structure, so only one (the first pilot valve 7
The configuration of 0) will be described in detail. Reference numeral 76 is an input passage.
The input passage 76 communicates with a communication passage 69 formed in the main body 10 of the embodiment shown in FIG. The communication passage 69 is open so as to connect the above-mentioned vacuum breaking flow passage 52 and the input passage 76. Reference numeral 78 is a solenoid, and the input passage 76
It is provided as a drive source for activating an on-off valve 80 that opens and closes the input passage 76 provided in the middle part. 82
Is a plunger and 84 is a coil. Coil 84
The plunger 82 operates so as to be drawn into the solenoid 78 when the power is supplied to the solenoid 78. The opening / closing valve 80 is fixed to the tip of the plunger 82 by a fixing member 86. The on-off valve 80 fixed to the tip of the plunger 82 is normally urged to close the input passage 76 by the urging force of a spring 88 elastically mounted between the outer shell of the solenoid 78 and the fixing member 86. There is. Specifically, the opening 76a provided in the middle of the input passage 76 is covered with the opening / closing valve 80.

Reference numeral 90 denotes an exhaust passage, which is provided so as to communicate with the output passage 72 by opening the exhaust valve 92 and is open to the atmosphere. The exhaust valve 92 is the open / close valve 8
The opening 90a of the exhaust passage is arranged so as to be opened and closed at a position facing 0. The exhaust valve 92 is held by a mounting frame member 94, and the mounting frame member 92 is brought into contact with and separated from the exhaust passage opening 90a to open and close the exhaust passage opening 90a. The mounting frame body 94 is provided with a space holding portion 94 a that extends until it comes into contact with the opening / closing valve 80. Further, the exhaust valve 92 is normally urged in the direction of closing the opening 90a of the exhaust passage by the urging force of the spring 96 elastically mounted between the exhaust valve 92 and the push button member 95 which is prevented from projecting outward. Has been done. The biasing force of the spring 96 is
It is set to be smaller than the biasing force of the spring 88.
The push button member 95 is provided so as to be movable inward against the biasing force of the spring 97. By pushing this push button member 95 inward,
The exhaust valve 92 is moved to close the opening 90a of the exhaust passage, and the opening / closing valve 80 is moved to open the opening 76a of the input passage 76.
And the compressed air can be output from the output passage 72.

Therefore, when the solenoid 78 is not operated, as shown in FIG. 5, the urging force of the spring 88 overcomes the urging force of the spring 96 to close the opening 76a and the opening 90a of the exhaust passage is spaced apart. Since the exhaust valve 92 is supported by the holding portion 94a, it is in an open state. When the solenoid 78 is actuated, the urging force of the spring 80 is overcome by the actuating force of the plunger 82 to move the opening / closing valve 80 to open the opening 76a, and the opening 90a of the exhaust passage is opened by the spring 96. The exhaust valve 92 moved by the urging force is in a closed state, and compressed air can be output from the output passage 72.

As shown in FIG. 3, the pilot valve, which is an electromagnetic valve having the above structure, is a first pilot valve 7
0 and the second pilot valve 74 are fixed to the vacuum generator shown in FIG. The operation of the vacuum generator having the above configuration will be described below with reference to FIGS. 1 and 3 to 5. First, Fig. 1 shows the state in which a vacuum is generated.
It will be described based on. When the first pilot valve 70 is operated (ON), the first control flow path 48 moves to the second control channel 48.
High pressure air is supplied to the other end 40b of the cylinder chamber 40,
The main valve body 46 is moved to the one end side 40a of the second cylinder chamber 40. As a result, the high pressure fluid is transferred to the first cylinder chamber 1
4 into the one end side 14a, and the vacuum valve 22
By moving to the other end side 14b of the cylinder chamber 14,
The opening 30 communicates with the negative pressure port 20. Then, when air flows through the flow path 24 of the vacuum valve 22, a vacuum is generated in the vicinity of the opening 30, and a vacuum is generated in the vacuum port 18 via the negative pressure port 20 communicating with the opening 30. . At this time, the breaking valve 50 is in a closed state.

Next, when the first pilot valve 70 is turned off while the vacuum is being generated, the main valve body 46 is urged by the second spring 49, and the second cylinder chamber 40 is urged.
To the other end side 40b. As a result, the supply of high-pressure air to the first cylinder chamber 14 is cut off, the vacuum is not generated by the vacuum valve 22, and the vacuum valve 22 is urged by the first spring 34 so that the first cylinder chamber 1
4 is moved to the one end side 14a, the “O” -ring 32 contacts the slope 15 and closes the passage so that the opening 30 and the negative pressure port 20 do not communicate with each other. Since the communication between the opening 30 and the negative pressure port 20 is cut off in this way, the negative pressure port 18 side becomes a closed space, and the vacuum state of the negative pressure port 18 can be maintained. FIG. 4A is a circuit diagram of this embodiment, but the vacuum valve 22 has two functions of a vacuum generating function 22a and a switching valve 22b.

Next, the state of breaking the vacuum will be described with reference to FIG. First, the first pilot valve 70 is turned off
In this state, the second pilot valve 74 is turned on. The high-pressure air flows through the flow path 58 for controlling the break air to the third
It is supplied to the cylinder chamber 54, the sliding valve body 56 moves, and the breaking valve 50 opens. Accordingly, the vacuum breaking flow channel 52
Are communicated with each other and high-pressure air is supplied from the compressed air supply port 12 to the vacuum port 18 to break the vacuum. At this time, since the passage is closed so that the opening portion 30 and the negative pressure port portion 20 do not communicate with each other, the break air is removed from the first cylinder chamber 14.
There is no leakage to the side. Therefore, vacuum breaking is efficiently and suitably performed. FIG. 4B shows the above operation by a time chart, which shows that the vacuum of the vacuum port 18 can be maintained until the vacuum is broken. As described above, the vacuum valve 22 serves as a vacuum generation source for generating a vacuum, and also functions as a kind of check valve by being movable in the first cylinder chamber 14. For this reason,
The vacuum generator is capable of performing suitable operation without separately providing a special switching valve mechanism as in the background art.

Next, another embodiment will be described with reference to FIG.
This will be described with reference to FIG. This embodiment differs from the embodiment shown in FIG. 1 in that the high pressure fluid is communicated with one end side 40a of the second cylinder chamber 40 to move the main valve body 46 to the other end side 40a. The second control flow path 100 (see FIG. 6A) introduced to one end side is provided, and the second spring 49 is not provided. Further, in the present embodiment, the second control flow path 100 allows the high-pressure fluid to be simultaneously introduced into the other end side of the third cylinder chamber 54 and the one end side of the second cylinder chamber 40, and the break air control flow path 58. It is in communication with. According to this configuration, as shown in the time chart (FIG. 6 (b)) showing the operation of the present embodiment, the main valve body 46 is moved to the second cylinder chamber 40 by operating the first pilot 70 in a pulsed manner. Since the state of moving to the one end side 40a is maintained, the vacuum generation state is maintained. First pilot 70
Since the operation of can be performed in a very short time, its power consumption can be reduced. To break the vacuum, the second pilot valve 74 may be operated. When pressure air is supplied from the second pilot valve 74 to the other end side of the third cylinder chamber 54, the breaking valve 50 opens, the breaking air flows into the vacuum port 18, and the second pilot valve 74
When pressurized air is supplied to the one end side 40a of the second cylinder chamber 40 from the main valve body 46 moves to the other end side 40b of the second cylinder chamber 40, the vacuum generation by the vacuum valve 22 can be stopped. That is, the second pilot valve 74
By this operation, the vacuum generation of the vacuum valve 22 can be stopped and the vacuum breaking by opening the breaking valve 50 can be performed at the same time, so that the breaking action of the vacuum can be sharply obtained.

In the above embodiment, the solenoid valve as shown in FIG. 2 is used as the pilot valve, but needless to say, it is not limited to this as long as it has an opening / closing valve function. In the above embodiment, the vacuum valve 22 is controlled by the first pilot valve 70 via the main valve 38.
The generation of the vacuum by the control is controlled, but it is also possible to directly control by the pilot valve (electromagnetic valve). Similarly, in the above embodiments, the vacuum break is controlled by the second pilot valve 74 via the break valve 50, but it is also possible to directly control by the solenoid valve. However, when the flow path is directly opened by the solenoid valve, the structure is simple, but on the other hand, there is a demerit that a large solenoid valve is required to open the flow path largely and power consumption increases. As described above, the present invention has been described variously with reference to preferred embodiments. However, the present invention is not limited to the embodiments, and it is needless to say that many modifications can be made without departing from the spirit of the invention. That is.

[0030]

According to the vacuum generator of the present invention,
A vacuum valve is provided slidably in the axial direction within the first cylinder chamber. Therefore, the vacuum valve can have a function as a switching valve body or a check valve body as well as a function of generating a vacuum. Therefore, according to the vacuum generator of the present invention, it is possible to perform a suitable operation as a vacuum generator, and without requiring a special switching valve mechanism as in the background art, the structure is simplified and made compact. It has a remarkable effect that it can be done.

[Brief description of drawings]

FIG. 1 is a sectional view showing an embodiment of a vacuum generator according to the present invention.

FIG. 2 is a cross-sectional view illustrating an embodiment of a pilot valve used in the vacuum generator of the present invention.

FIG. 3 is a front view showing an example of the overall configuration of a vacuum generator according to the present invention.

FIG. 4 is a circuit diagram and a time chart showing an embodiment of a vacuum generator according to the present invention.

5 is a cross-sectional view showing an operating state of vacuum breaking of the embodiment of FIG.

FIG. 6 is a circuit diagram and a time chart showing another embodiment of the vacuum generator according to the present invention.

FIG. 7 is a cross-sectional view illustrating background art.

FIG. 8 is a cross-sectional view showing an operating state of vacuum breaking of the vacuum generator of FIG.

[Explanation of symbols]

 10 Main Body 12 Compressed Air Supply Port 14 First Cylinder Chamber 16 Silence Part 18 Vacuum Port 20 Negative Pressure Port Part 22 Vacuum Valve 24 Flow Path 26 Nozzle Part 28 Diffuser Part 30 Opening 32'O'-Ring 34 First Spring 36 Main Flow Channel 38 Main valve 40 Second cylinder chamber 42 Input port section 44 Communication port section 46 Main valve body 48 First control flow path 49 Second spring 50 Break valve 60 Third spring 70 First pilot valve 74 Second pilot valve 100 Number 2 control channels

Claims (5)

[Claims] 1. A main body, a first cylinder chamber provided in the main body with one end communicating with a high-pressure fluid source and the other end opened, a vacuum port provided in the main body, and the vacuum port. A negative pressure port portion opened in a middle portion of the side wall of the first cylinder chamber to communicate with the first cylinder chamber, and slidable in the axial direction in the first cylinder chamber,
A portion having a fluid passage extending in the axial direction and located at one end side of the first cylinder chamber of the passage is formed in a nozzle portion that narrows the passage, and a portion downstream of the nozzle portion from the passage portion. Become the first
A portion located on the other end side of the cylinder chamber is formed in a diffuser portion that enlarges a flow path, and an opening portion that opens laterally is provided between the nozzle portion and the diffuser portion, and the first cylinder chamber When moving to the other end side of, the negative pressure is generated in the vicinity of the opening by supplying high pressure fluid from the one end side to the flow path while communicating the opening and the negative pressure port section, A vacuum valve that blocks communication between the opening and the negative pressure port portion when moved to one end side, and a vacuum valve when the high pressure fluid is supplied to one end side of the first cylinder chamber. A first spring that allows the vacuum valve to move to the other end of the first cylinder chamber and biases the vacuum valve to the one end of the first cylinder chamber when high-pressure fluid is not supplied. Vacuum generator characterized by. 2. A main flow path communicating between the first cylinder chamber and a high-pressure fluid source, and a main flow path disposed in the middle of the main flow path to selectively supply the high-pressure fluid to the first cylinder chamber. A main valve that opens and closes the main flow path, a vacuum break flow path that communicates the vacuum port with a high-pressure fluid source, and a vacuum break flow path that is located in the middle of the vacuum break flow path and selects the supply of high-pressure fluid to the vacuum port. 2. The vacuum generator according to claim 1, further comprising: a breaking valve that opens and closes a vacuum breaking flow path so as to break the vacuum in the vacuum port by supplying a high-pressure fluid to the vacuum port. . 3. The main valve is provided in a second cylinder chamber provided in the main body, and is provided at an opening in a side wall of the second cylinder chamber, and connects the high pressure fluid source and the second cylinder chamber. An input port portion, a communication port portion provided in an opening in a side wall of the second cylinder chamber, which communicates the second cylinder chamber with the first cylinder chamber, and slidable in the axial direction in the second cylinder chamber. Formed in
When moving to the one end side of the second cylinder chamber, the input port section and the communication port section are communicated, and when moving to the other end side, the communication between the input port section and the communication port section is cut off. The vacuum generator according to claim 2, wherein the vacuum generator comprises a main valve body. 4. The second cylinder chamber communicates with the other end side of the second cylinder chamber,
A first control flow path for introducing a high-pressure fluid into the other end side of the second cylinder chamber to move the main valve body to the one end side, and communicate with the one end side of the second cylinder chamber, and connect the main valve body to the other end side. 4. The vacuum generator according to claim 3, further comprising a second control flow path for introducing a high-pressure fluid into one end side of the second cylinder chamber to move the high pressure fluid. 5. The breaking valve is formed in a third cylinder chamber provided in the main body, and is slidable in the axial direction in the third cylinder chamber,
A sliding valve body that communicates the vacuum breaking flow passage when moved to one end side of the third cylinder chamber and shuts off the vacuum breaking flow passage when moving to the other end side; and the third cylinder A flow path for breaking air control, which communicates with the other end side of the chamber and introduces a high-pressure fluid into the other end side of the third cylinder chamber to move the sliding valve body to the one end side; When the high pressure fluid is supplied to the other end side of the third cylinder chamber through the passage, the sliding valve body is allowed to move to one end side, and the high pressure fluid is supplied to the other end side of the third cylinder chamber. And a biasing member that biases the sliding valve body so as to be positioned at the other end side when not being operated, and high-pressure fluid can be simultaneously introduced into the other end side of the third cylinder chamber and one end side of the second cylinder chamber. The flow path for controlling the break air and the second control flow path are communicated with each other. Of the vacuum generator.