JPH09311262A - Autofocusing mechanism for microscope - Google Patents
Autofocusing mechanism for microscopeInfo
- Publication number
- JPH09311262A JPH09311262A JP12572296A JP12572296A JPH09311262A JP H09311262 A JPH09311262 A JP H09311262A JP 12572296 A JP12572296 A JP 12572296A JP 12572296 A JP12572296 A JP 12572296A JP H09311262 A JPH09311262 A JP H09311262A
- Authority
- JP
- Japan
- Prior art keywords
- objective lens
- lens
- microscope
- groove
- lens holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、顕微鏡用オ−トフ
ォ−カス機構の改良に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a microscope autofocus mechanism.
【0002】[0002]
【従来の技術】従来のオートフォーカス機構を構成する
てこ式変位拡大機構を図3および図4に示す。図3
(A)、(B)はそれぞれ、てこ式変位拡大機構部の平
面図及び側面図である。図4は図3(B)の動作状態を
示す図である。2. Description of the Related Art A lever type displacement magnifying mechanism constituting a conventional autofocus mechanism is shown in FIGS. FIG.
(A) and (B) are the top views and side views of a lever type displacement magnifying mechanism part, respectively. FIG. 4 is a diagram showing the operation state of FIG.
【0003】図3において、圧電素子15、対物レンズ
14、レンズホルダ12、支持ブロック11は回転軸1
3によって、支持ブロック11および11’に回転可能
に固定されている。レンズホルダ12の長軸端に対物レ
ンズ14および14’が取りつけられ、レンズホルダ1
2の短軸端に圧電素子15が接続配置されている。また
圧縮ばね16はレンズホルダ12を介して圧電素子15
に予圧をかけている。In FIG. 3, the piezoelectric element 15, the objective lens 14, the lens holder 12, and the support block 11 are the rotary shaft 1.
It is rotatably fixed to the support blocks 11 and 11 ′ by 3. The objective lenses 14 and 14 'are attached to the long axis end of the lens holder 12, and the lens holder 1
The piezoelectric element 15 is connected and arranged at the short axis end of 2. Further, the compression spring 16 is connected to the piezoelectric element 15 via the lens holder 12.
Is being preloaded.
【0004】被測定物のフォ−カス調整のため、圧電素
子15が伸縮すると、てこの原理により、図4に示すよ
うに、レンズホルダが回転軸13を支点に角度θ回転す
る。図4では圧電素子が伸長した場合を示しており、縮
小すると逆方向に回転する。従って、対物レンズ14お
よび14’は上方に移動して被測定物との距離が変化
し、最適な位置に調整される。しかし回転軸13を支点
にした回転運動のため、対物レンズの中心軸が光軸に対
して角度θずれてしまう欠点があった。When the piezoelectric element 15 expands or contracts to adjust the focus of the object to be measured, the lens holder rotates by the angle θ about the rotating shaft 13 as a fulcrum by the lever principle, as shown in FIG. FIG. 4 shows the case where the piezoelectric element is expanded, and when it is contracted, it rotates in the opposite direction. Therefore, the objective lenses 14 and 14 'move upward, the distance to the object to be measured changes, and the objective lenses 14 and 14' are adjusted to the optimum positions. However, there is a drawback that the central axis of the objective lens deviates from the optical axis by an angle θ due to the rotational movement with the rotating shaft 13 as a fulcrum.
【0005】[0005]
【発明が解決しようとする課題】本発明の目的は、上記
欠点を除去し、簡単な構成で、小形かつ安価ながら、対
物レンズの移動中心と光軸が常に一致して動作するよう
な顕微鏡用オ−トフォ−カス機構を実現することにあ
る。SUMMARY OF THE INVENTION An object of the present invention is to eliminate the above-mentioned drawbacks and to provide a microscope having a simple structure, a small size, and a low cost, and the optical axis of the objective lens and the optical axis always match. It is to realize an autofocus mechanism.
【0006】[0006]
【課題を解決するための手段】本発明は上記目的を達成
するため、てこの原理を採用した変位拡大機構の欠点で
ある傾き角度の発生を取り除くため、レンズホルダの一
部に弾性変形し易いような溝を設けるとともに、レンズ
ホルダの対物レンズ側の端に板ばね等の弾性体と接合溝
を配置した構成としたものである。In order to achieve the above-mentioned object, the present invention eliminates the occurrence of a tilt angle which is a drawback of the displacement magnifying mechanism adopting the lever principle, so that the lens holder is easily elastically deformed. Such a groove is provided, and an elastic body such as a leaf spring and a joining groove are arranged at the end of the lens holder on the objective lens side.
【0007】その結果、レンズホルダが角度θ傾いても
弾性体によりレンズホルダの弾性変形用溝を支点に角度
θと反対方向に回転変形されるので、対物レンズは光軸
に対して平行に上下する。そのため視野ずれも発生せ
ず、高精度な顕微鏡用オ−トフォ−カス機構を実現する
ことができる。As a result, even if the lens holder is tilted by the angle θ, the elastic body is rotationally deformed in the direction opposite to the angle θ with the elastic deformation groove of the lens holder as a fulcrum, so that the objective lens moves up and down parallel to the optical axis. To do. Therefore, a visual field shift does not occur, and a highly accurate autofocus mechanism for a microscope can be realized.
【0008】図1(A)、(B)はそれぞれ本発明の変
位拡大機構の平面図及び側面図を示す。2はレンズホル
ダ、3は回転軸、4、4’は対物レンズ、6は弾性変形
用溝、七は接合溝、は弾性体である。1A and 1B are a plan view and a side view, respectively, of a displacement magnifying mechanism of the present invention. 2 is a lens holder, 3 is a rotation axis, 4'is an objective lens, 6 is a groove for elastic deformation, 7 is a joining groove, and is an elastic body.
【0009】[0009]
【発明の実施の形態】以下、図2に示す本発明の実施例
について説明する。回転軸3、圧電素子5、対物レンズ
4、レンズホルダ2、支持ブロック1、レンズホルダ2
は回転軸3によって、支持ブロック1および1’に回転
可能に固定されている。BEST MODE FOR CARRYING OUT THE INVENTION The embodiment of the present invention shown in FIG. 2 will be described below. Rotating shaft 3, piezoelectric element 5, objective lens 4, lens holder 2, support block 1, lens holder 2
Is rotatably fixed to the support blocks 1 and 1'by a rotary shaft 3.
【0010】レンズホルダ2の長軸端に対物レンズ4お
よび4’が取りつけられ、レンズホルダ2の短軸端に圧
電素子5が接続配置されている。レンズホルダ2の一部
すなわち回転軸3と対物レンズ間に弾性変形用溝6を設
け、更に対物レンズ側の端に板ばね等の弾性体8と接合
溝7を設けている。10は弾性体8の固定部である。ま
た、圧縮ばね9はレンズホルダ2を介して圧電素子5に
予圧をかけている。The objective lenses 4 and 4'are attached to the long axis end of the lens holder 2, and the piezoelectric element 5 is connected and arranged to the short axis end of the lens holder 2. An elastic deformation groove 6 is provided between a part of the lens holder 2, that is, the rotary shaft 3 and the objective lens, and an elastic body 8 such as a leaf spring and a joining groove 7 are further provided at the end on the objective lens side. Reference numeral 10 is a fixed portion of the elastic body 8. Further, the compression spring 9 applies a preload to the piezoelectric element 5 via the lens holder 2.
【0011】以下、この動作について説明する。圧電素
子5に外部(図示せず)から電圧が印加されると、その
電圧に応じて圧電素子5が長手方向に伸縮する。従って
圧電素子5に接続配置されているレンズホルダ2は回転
軸3を支点に角度θ回転する。ところがレンズホルダ2
に弾性変形用溝6と接合溝7および弾性体8を設けてあ
るため、弾性変形用溝6を支点にレンズホルダ2の一部
が角度θと反対方向に回転するため、対物レンズ4およ
び4’は水平に上下する。その結果、対物レンズ4およ
び4’の中心軸は光軸に対して平行に変位するので、視
野ずれも発生せず、高精度な顕微鏡用オ−トフォ−カス
機構を実現することができる。This operation will be described below. When a voltage is applied to the piezoelectric element 5 from the outside (not shown), the piezoelectric element 5 expands and contracts in the longitudinal direction according to the voltage. Therefore, the lens holder 2 connected to the piezoelectric element 5 rotates by the angle θ about the rotation shaft 3. However, the lens holder 2
Since the groove 6 for elastic deformation, the joining groove 7 and the elastic body 8 are provided in the lens holder 2, a part of the lens holder 2 rotates in the direction opposite to the angle θ with the groove 6 for elastic deformation as a fulcrum. 'Is up and down horizontally. As a result, since the central axes of the objective lenses 4 and 4'are displaced in parallel to the optical axis, no visual field shift occurs and a highly accurate autofocus mechanism for a microscope can be realized.
【0012】レンズホルダ2の回転角度θが変化しても
常に対物レンズ4および4’が水平に保持できるように
弾性変形用溝6の形状と弾性体8のばね定数を関係づけ
ることが重要である。また弾性体8の代わりに圧電素子
を用いて、対物レンズ4および4’を水平に保つ構成に
してもよい。なお、本実施例では、対物レンズを切替え
る移動機構については図および説明を省略した。It is important to relate the shape of the elastic deformation groove 6 and the spring constant of the elastic body 8 so that the objective lenses 4 and 4'can be held horizontally even if the rotation angle θ of the lens holder 2 changes. is there. A piezoelectric element may be used instead of the elastic body 8 to keep the objective lenses 4 and 4 ′ horizontal. In the present embodiment, the illustration and description of the moving mechanism for switching the objective lens is omitted.
【0013】[0013]
【発明の効果】本発明によれば、簡単な構成ながら、小
形かつ安価で、高精度な顕微鏡用オ−トフォ−カス機構
を実現することができる。According to the present invention, it is possible to realize a small-sized, inexpensive, highly accurate autofocus mechanism for a microscope with a simple structure.
【図1】本発明の構成を示す平面図(A)及び側面図
(B)である。FIG. 1 is a plan view (A) and a side view (B) showing a configuration of the present invention.
【図2】本発明の実施例の側面図である。FIG. 2 is a side view of an embodiment of the present invention.
【図3】従来の構成を示す平面図(A)及び側面図
(B)である。FIG. 3 is a plan view (A) and a side view (B) showing a conventional configuration.
【図4】従来例の側面図である。FIG. 4 is a side view of a conventional example.
1、1’、11、11’ 支持ブロック 2、12 レンズホルダ 3、13 回転軸 4、4’、14、14’ 対物レンズ 5、15 圧電素子 6 弾性変形用溝 7 接合溝 8 弾性体 9、16 圧縮ばね 10 固定部 1, 1 ', 11, 11' Support block 2, 12 Lens holder 3, 13 Rotation axis 4, 4 ', 14, 14' Objective lens 5, 15 Piezoelectric element 6 Elastic deformation groove 7 Bonding groove 8 Elastic body 9, 16 Compression spring 10 Fixed part
Claims (1)
構を備える顕微鏡用オートフォーカス機構において、対
物レンズを上記てこ式変位拡大機構の支点から遠い一端
に、電気機械変換素子を支点に近い一端に配置するとと
もに、対物レンズ保持部材の支点側に弾性変形用溝を設
け、対物レンズ保持部材の支点と反対側に弾性体を接続
することにより、対物レンズを光軸と平行に移動させる
ようにしたことを特徴とする顕微鏡用オ−トフォ−カス
機構。1. An autofocus mechanism for a microscope including a lever type displacement magnifying mechanism for holding an objective lens, wherein an objective lens is provided at one end far from a fulcrum of the lever type displacement magnifying mechanism and an electromechanical conversion element is provided at one end near the fulcrum. The objective lens holding member is moved parallel to the optical axis by providing an elastic deformation groove on the fulcrum side of the objective lens holding member and connecting an elastic body to the opposite side of the fulcrum of the objective lens holding member. An autofocus mechanism for a microscope, which is characterized in that
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12572296A JPH09311262A (en) | 1996-05-21 | 1996-05-21 | Autofocusing mechanism for microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12572296A JPH09311262A (en) | 1996-05-21 | 1996-05-21 | Autofocusing mechanism for microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH09311262A true JPH09311262A (en) | 1997-12-02 |
Family
ID=14917154
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12572296A Pending JPH09311262A (en) | 1996-05-21 | 1996-05-21 | Autofocusing mechanism for microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH09311262A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0973053A2 (en) * | 1998-06-19 | 2000-01-19 | Sick AG | Apparatus for adjusting the focal position of an optoelectronic device |
US7733586B2 (en) | 2008-05-16 | 2010-06-08 | Ffei Limited | Lens positioning assembly |
-
1996
- 1996-05-21 JP JP12572296A patent/JPH09311262A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0973053A2 (en) * | 1998-06-19 | 2000-01-19 | Sick AG | Apparatus for adjusting the focal position of an optoelectronic device |
EP0973053A3 (en) * | 1998-06-19 | 2003-07-02 | Sick AG | Apparatus for adjusting the focal position of an optoelectronic device |
US7733586B2 (en) | 2008-05-16 | 2010-06-08 | Ffei Limited | Lens positioning assembly |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN110537130B (en) | Shape memory alloy actuator assembly | |
US7212358B2 (en) | Digital camera system with piezoelectric actuators | |
US6397008B2 (en) | Driving system with elastically supporting units | |
US20090185067A1 (en) | Compact automatic focusing camera | |
US6654557B2 (en) | Lens driving apparatus having tapered positioning dowel | |
JP4406549B2 (en) | Light modulation element, light modulation array element, and exposure apparatus using the same | |
US6710949B2 (en) | Tilting device for lens | |
JP2002107593A (en) | Optical member mount and optical structural body using the same | |
JPH05128561A (en) | Tracking actuator of optical disk drive | |
JPWO2005102909A1 (en) | Actuator | |
US8345146B2 (en) | Automatic focus imaging system using out-of-plane translation of an MEMS reflective surface | |
JPH11231234A (en) | Reflection mirror | |
JP2008533515A (en) | Precision control of rotational and translational motion of micromirrors controlled in a distributed manner | |
WO2010109825A1 (en) | Actuator, drive device, lens unit, image-capturing device | |
JP2000338430A (en) | Mirror tilting mechanism | |
JPH09311262A (en) | Autofocusing mechanism for microscope | |
JPH10301013A (en) | Lens driving mechanism | |
JP2009258299A (en) | Lens actuator using tilting type displacement enlarging mechanism | |
JP4104920B2 (en) | Tilt mirror with precision support for optical devices | |
US20230066567A1 (en) | Tunable prism with integrated tunable lens and reduced crosstalk | |
US6564017B2 (en) | Mechanism for adjusting an angle of a mirror incorporated in an optical device, and a parallax correcting mechanism of a camera | |
JP2005106889A (en) | Optical device and exposure apparatus having same | |
JP2761989B2 (en) | Driving device for optical element | |
JP2761300B2 (en) | Tracking actuator for optical disk drive | |
JP2002350917A (en) | Image blur correction lens |