JPH09301702A - Ozone generator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ozone generator which prevents the deterioration of a sensor by contamination of a piping and with which the exact measurement value of a dew point meter is obtainable. SOLUTION: This ozone generator has a refrigeration type air drier 1 for cooling raw material air, an adsorption column 2 for dehumidifying and drying, an after filter 3 for removing the impurities in the raw material air, a main piping 13, an ozone breaker 4 and an ozone generator 5. In such a case, the dew point meter 8 and a piping 14 for instrumentation having three-way valves 17 arranged on both sides of this dew point meter 8 are disposed between the outlet side of the after filter 3 and the inlet side of the ozone breaker 4. A bypass pipeline 15 is disposed between these three-way valves 17. Then, the inflow of the atm. air is prevented by returning the dry air after the measurement of the dew point to the main piping 13 and, therefore, the deterioration of the dew point meter sensor by the contamination of the air is prevented and the exact measurement value of the dew point meter 8 is obtd.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to an ozone generator.

[0002]

2. Description of the Related Art A conventional ozone generator will be described with reference to the system diagram of FIG. As shown in the figure, the raw material air is cooled by a refrigerating air dryer 1, dehumidified and dried in an adsorption tower 2, impurities in the raw material air are removed by an after filter 3, and a main pipe 13 and an ozone breaker 4 are removed. After that, it flows into the ozone generator 5 and is ozoned. The ozone breaker 4 decomposes and adsorbs ozone that flows backward.

By the way, in order to measure the dew point of the raw material air on the outlet side of the after filter 3, an instrumentation pipe 14 branched from the main pipe 13 is provided on the outlet side of the after filter 3,
Dry air is introduced into the dew point meter 8 via the ball valve 6 and the solenoid valve 7. The dry air measured by the dew point meter 8 is discharged into the atmosphere through the dehumidifying tower 9, the electromagnetic valve 10, the ball valve 11 and the flow meter 12.

[0004]

However, in the above-mentioned conventional ozone generator, since there is a pipe line (instrumentation pipe) for releasing the dry air after measuring the dew point to the atmosphere,
It is possible that the atmosphere may enter through this conduit when no measurements are being taken. At that time, the display of the dew point meter may be temporarily unstable. When the measured value of the dew point meter is used as an interlock, if the measured value of the dew point meter becomes unstable, it may cause a malfunction. In addition, when the dirt in the pipeline is removed, dirty air passes through the sensor section, which becomes a factor that accelerates the deterioration of the sensor. For this reason,
Conventionally, measures such as providing a dehumidifier downstream of the sensor or temporarily removing the sensor have been taken, but all of these methods have a drawback that the operation and maintenance of the device are complicated.

The present invention has been made in view of the above circumstances, and an object thereof is to provide an ozone generator capable of preventing deterioration of a sensor due to contamination of a conduit and obtaining an accurate measured value of a dew point meter. is there.

[0006]

In order to achieve the above object, claim 1 of the present invention provides a refrigeration type air dryer for cooling raw material air, an adsorption tower for dehumidifying and drying, and an after-filter for removing impurities in the raw material air. In an ozone generator including a filter, a main pipe, an ozone breaker, and an ozone generator, a dew point meter and both sides of this dew point meter are provided on the outlet side of the after filter and the inlet side of the ozone breaker of the main pipe. The instrumentation pipe having the three-way valve arranged in the above is provided, and the bypass pipe line is provided between the both three-way valves.

According to a second aspect of the present invention, in the ozone generator according to the first aspect, an orifice is provided in the main pipe between the outlet side of the after filter and the inlet side of the ozone breaker. .

According to a third aspect of the present invention, in the ozone generator according to the first aspect, a valve is provided in the main pipe between the outlet side of the after filter and the inlet side of the ozone breaker. .

According to a fourth aspect of the present invention, in the ozone generator according to the first aspect, a compressor is provided in the instrumentation pipe between the bypass pipe and the inlet side of the ozone breaker. .

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows a first embodiment of the present invention.
4 and FIG. 4 which has already been described.
The same parts as those in the conventional example will be described with the same reference numerals.

As shown in the figure, the raw material air is cooled by a refrigerating air dryer 1 and then dehumidified and dried by an adsorption tower 2,
Furthermore, impurities in the raw material air are removed by the after filter 3, and the main pipe 13, the orifice 18, and the ozone breaker 4 are removed.
After that, it flows into the ozone generator 5 and is ozoned. The ozone breaker 4 decomposes and adsorbs ozone that flows backward.

In order to measure the dew point of the raw material air on the outlet side of the after filter 3, an instrumentation pipe 14 branching from the main pipe 13 is provided on the outlet side of the after filter 3, and the three-way valve 1
Dry air is introduced into the dew point meter 8 through the solenoid valve 6 and the solenoid valve 7. The dry air measured by the dew point meter 8 is the solenoid valve 10,
It is returned to the main pipe 13 on the inlet side of the ozone breaker 4 via the ball valve 11, the flow meter 12 and the three-way valve 17. A bypass line 15 is provided between the three-way valve 16 and the three-way valve 17. Further, the orifice 18 is provided in the main pipe 13 between the dry air sampling port and the return port, and the instrumentation pipe 1
Due to the pressure difference before and after 4, the flow rate sufficient to ensure the sensitivity of the dew point meter 8 is distributed to the instrumentation pipe 14. Further, when the equipment is aged, the three-way valves 16 and 17 in front of and behind the dew point meter 8 are switched so that dry air does not flow to the sensor.

As described above, according to this embodiment, a pressure difference is generated before and after the instrumentation pipe 14, and it is possible to distribute to the instrumentation pipe 14 a flow rate that ensures sufficient sensitivity of the dew point meter 8. . Further, since the raw material air is a system closed with respect to the atmosphere, it is possible to prevent the atmosphere from flowing into the instrumentation pipe 14, and thus it is possible to prevent deterioration of the sensor due to air contamination. Furthermore, while the equipment is aging, the three-way valve 16
It is possible to prevent the dirt in the main pipe 13 from flowing into the dew point meter 8 by switching the parts 17 and 17 to the bypass line 15 side. As a result, the solenoid valves 7, 10 caused by air pollution
It is possible to prevent the deterioration of the measuring sensor of the dew point meter 8.

FIG. 2 is a system diagram of a second embodiment (corresponding to claim 3) of the present invention. The same parts as those of the embodiment of FIG. As shown in the figure, after the raw material air is cooled by the refrigerating air dryer 1, it is dehumidified and dried in the adsorption tower 2, and further the impurities in the raw material air are removed by the after filter 3, and the main pipe 13, the valve 19 and the ozone breaker are removed. After passing through 4, it flows into the ozone generator 5 and is ozoned. The ozone breaker 4 decomposes and adsorbs ozone that flows backward.

In order to measure the dew point of the raw material air on the outlet side of the after filter 3, an instrumentation pipe 14 branched from the main pipe 13 is provided on the outlet side of the after filter 3, and the three-way valve 1
Dry air is introduced into the dew point meter 8 through the solenoid valve 6 and the solenoid valve 7. The dry air measured by the dew point meter 8 is the solenoid valve 10,
It is returned to the main pipe 13 on the inlet side of the ozone breaker 4 via the ball valve 11, the flow meter 12 and the three-way valve 17. The bypass pipe line 15 is provided between the three-way valve 16 and the three-way valve 17. Further, the valve 19 is provided in the main pipe 13 between the dry air sampling port and the return port, and a flow amount sufficient to ensure the sensitivity of the dew point meter 8 is measured by the pressure difference generated before and after the instrumentation pipe 14. It is distributed to the wearing pipe 14.
Further, when the equipment is aged, the three-way valves 16 and 17 in front of and behind the dew point meter 8 are switched so that dry air does not flow to the sensor.

As described above, according to this embodiment, the flow rate sufficient to ensure the sensitivity of the dew point meter in the instrumentation piping system is
Can be distributed to instrumentation piping. Also, since the instrumentation pipe 14 is a system closed to the atmosphere, the instrumentation pipe 1
It is possible to prevent the inflow of the atmosphere to the No. 4. Furthermore, by switching the three-way valves 16 and 17 to the bypass pipe line 15 side during aging of the equipment, it is possible to prevent dirt in the main pipe 13 from flowing into the dew point meter 8. This makes it possible to prevent the solenoid valves 7, 10 and the measurement sensor of the dew point meter 8 from being deteriorated due to air pollution.

FIG. 3 is a system diagram of a third embodiment (corresponding to claim 4) of the present invention. The same parts as those of the embodiment of FIG. As shown in the figure, the raw material air is cooled by a refrigerating air dryer 1, dehumidified and dried in an adsorption tower 2, impurities in the raw material air are removed by an after filter 3, and then passed through a main pipe 13 and an ozone breaker 4. It flows into the ozone generator 5 and is ozoned. The ozone breaker 4 decomposes and adsorbs ozone that flows backward.

In order to measure the dew point on the outlet side of the after filter 3, an instrumentation pipe 14 branching from the main pipe 13 is provided on the outlet side of the after filter 3, and a dew point meter 8 is passed through a three-way valve 16 and a solenoid valve 7. It is designed to guide dry air to. The dry air measured by the dew point meter 8 passes through the solenoid valve 10, the ball valve 11, the flow meter 12, the three-way valve 17 and the compressor 20, and the main pipe 1 on the inlet side of the ozone breaker 4
Returned to 3. The bypass pipe line 15 is provided between the three-way valve 16 and the three-way valve 17.

As described above, the three-way valve 17 and the main pipe 1
Since a compressor 20 is provided between the dew point meter 3 and the compressor 3, the compressor 20 is started at the time of dew point measurement to forcibly flow a flow rate enough to ensure the sensitivity of the dew point meter 8 into the instrumentation pipe 14. It becomes possible. Also,
During aging of the equipment, the three-way valves 16 and 17 provided before and after the dew point meter 8 are switched to prevent dry air from flowing through the sensor.

As described above, according to this embodiment, since the instrumentation pipe 14 is a system closed to the atmosphere, it is possible to prevent the inflow of the atmosphere into the instrumentation pipe 14. Also,
By switching the three-way valves 16 and 17 to the bypass pipe 15 side during the aging of the device, it is possible to prevent dirt in the main pipe 13 from flowing into the dew point meter 8. This makes it possible to prevent the solenoid valves 7, 10 and the measurement sensor of the dew point meter 8 from being deteriorated due to air pollution. Further, the compressor 20 can distribute a flow rate to the instrumentation pipe 14 to ensure a sufficient sensitivity of the dew point meter 8.

[0021]

As described above, according to the first aspect of the present invention.
According to claim 4, it is possible to forcibly flow a flow rate enough to secure the sensitivity of the dew point meter into the instrumentation pipe, and the instrumentation pipe is a system closed to the atmosphere. Therefore, it is possible to prevent the air from flowing into the instrumentation pipe, prevent deterioration of the sensor due to air pollution, and obtain an accurate measured value of the dew point meter.

[Brief description of drawings]

FIG. 1 is a system diagram of an embodiment of the present invention.

FIG. 2 is a system diagram of another embodiment of the present invention.

FIG. 3 is a system diagram of still another embodiment of the present invention.

FIG. 4 is a system diagram of a conventional ozone generator.

[Explanation of Codes] 1 ... Refrigerating air dryer, 2 ... Adsorption tower, 3 ... After filter, 4 ... Ozone breaker, 5 ... Ozone generator, 6, 1
DESCRIPTION OF SYMBOLS 1 ... Ball valve, 7, 10 ... Solenoid valve, 8 ... Dew point meter, 9 ... Dehumidification tower, 12 ... Flow meter, 13 ... Main piping, 14 ... Instrumentation piping, 15 ... Bypass pipeline, 16, 17 ... 3 directions Valve, 18
... orifice, 19 ... valve, 20 ... compressor.

Claims (4)

[Claims] 1. A refrigeration type air dryer for cooling raw material air, an adsorption tower for dehumidifying and drying, an after filter for removing impurities in the raw material air, a main pipe, an ozone breaker,
In an ozone generator equipped with an ozone generator, instrumentation pipe having a dew point meter and a three-way valve arranged on both sides of the dew point meter on the outlet side of the after filter and the inlet side of the ozone breaker of the main pipe. And both the above 3
An ozone generator characterized in that a bypass pipe is provided between the directional valves. 2. The ozone generator according to claim 1, wherein an orifice is provided in the main pipe between the outlet side of the after filter and the inlet side of the ozone breaker. 3. The ozone generator according to claim 1, wherein a valve is provided in the main pipe between the outlet side of the after filter and the inlet side of the ozone breaker. 4. The ozone generator according to claim 1, wherein a compressor is provided in the instrumentation pipe between the bypass pipe and the inlet side of the ozone breaker.