JPH09292204A - Rotation angle detector - Google Patents

Rotation angle detector

Info

Publication number
JPH09292204A
JPH09292204A JP13085996A JP13085996A JPH09292204A JP H09292204 A JPH09292204 A JP H09292204A JP 13085996 A JP13085996 A JP 13085996A JP 13085996 A JP13085996 A JP 13085996A JP H09292204 A JPH09292204 A JP H09292204A
Authority
JP
Japan
Prior art keywords
discharge
electrode
rotation angle
rotating body
planar electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13085996A
Other languages
Japanese (ja)
Inventor
Takayuki Nakamura
高幸 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP13085996A priority Critical patent/JPH09292204A/en
Publication of JPH09292204A publication Critical patent/JPH09292204A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a small-sized simply worked rotation angle detector by detecting discharge current flowing between a discharge electrode and a flat- plane-like electrode by means of a detecting circuit. SOLUTION: When higher voltage than that of an electric power source 8 for discharge is impressed between a needle-like dischatge electrode 3 and a flat-plane-like electrode 6, corona discharge is generated between the electrode 3 and the electrode 6, and discharge current is detected by a detecting circuit 7. When a rotor 1 is rotated and the electrode 3 together with a supporting member 2 are rotated, the distance between the electrode 6 and the electrode 3 is changed according to the rotation angle of the rotor 1, and the discharge current value is changed according to change of the distance. When relation of the discharge current value and the distance between the electrode 6 and the electrode 3 is known, because relation of the distance between the electrode 6 and the electrode 3 to the rotation angle of the rotor 1 is fixed, the rotation angle can be obtained from the discharge current value through a signal generating means generating a rotation angle signal.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、回転体の回転角を
コロナ放電を利用して検出する回転角度検出器に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotation angle detector for detecting the rotation angle of a rotating body by using corona discharge.

【0002】[0002]

【従来の技術】従来、回転体の回転角をコロナ放電を利
用して検出するものとして、例えば図4に示すように、
放電パルスをカウントして回転角を検出するようにした
ものが開示されている(例えば、特開昭54−2864
8号公報)。図において、10はモータ軸などの被測定
体となる回転体、20は回転体10に固定された絶縁円
板、30は絶縁円板20の外周付近の同心円上に等間隔
で同一幅に形成された複数のスリット、40はスリット
30を挟むように絶縁円板20の一方側に設けられた板
状導電体、50は板状導電体40とスリット30を挟ん
で対向して設けられた針状の放電電極、60は直流電源
からなる放電用電源、70は負荷抵抗、80は出力電圧
を増幅するための増幅回路である。このような構成によ
り、針状の放電電極50に放電用電源60より高電圧を
印加してコロナ放電させると、絶縁円板20に形成され
たスリット30を通り、板状導電体40に放電電流が検
出される。絶縁円板20は回転体1と一体に回転するか
ら回転速度の増加に応じて間隔が狭くなるパルス状の出
力特性が得られ、その出力特性から回転角または回転数
を検出する。
2. Description of the Related Art Conventionally, for detecting the rotation angle of a rotating body by using corona discharge, for example, as shown in FIG.
A device in which the discharge pulse is counted to detect the rotation angle is disclosed (for example, Japanese Patent Laid-Open No. 54-2864).
No. 8). In the figure, 10 is a rotating body to be measured, such as a motor shaft, 20 is an insulating disk fixed to the rotating body 10, and 30 are formed on concentric circles near the outer circumference of the insulating disk 20 at equal intervals and with the same width. A plurality of slits, 40 is a plate-like conductor provided on one side of the insulating disc 20 so as to sandwich the slit 30, and 50 is a needle provided opposite to the plate-like conductor 40 with the slit 30 in between. -Shaped discharge electrode, 60 is a discharge power source composed of a DC power source, 70 is a load resistance, and 80 is an amplifier circuit for amplifying the output voltage. With such a configuration, when a high voltage is applied to the needle-shaped discharge electrode 50 from the power source 60 for discharge to cause corona discharge, the discharge current flows through the slit 30 formed in the insulating disk 20 to the plate-shaped conductor 40. Is detected. Since the insulating disk 20 rotates integrally with the rotating body 1, a pulse-like output characteristic in which the interval becomes narrower as the rotation speed increases is obtained, and the rotation angle or the number of rotations is detected from the output characteristic.

【0003】[0003]

【発明が解決しようとする課題】ところが、上記従来技
術では、絶縁円板に円周方向に等間隔に多数の微細幅を
もったスリットを設ける必要があるため、絶縁円板の径
が大きくなったり、スリットの加工はフォトリソグラフ
ィ技術を用いて行うなど加工コストが高くなったり、小
型化が難しいという問題があった。本発明は、小型で加
工が簡単な回転角度検出器を提供することを目的とする
ものである。
However, in the above prior art, since it is necessary to provide the insulating disk with slits having a large number of fine widths at equal intervals in the circumferential direction, the diameter of the insulating disk becomes large. In addition, there are problems that the processing cost is high, such as the slit processing is performed by using a photolithography technique, and that miniaturization is difficult. It is an object of the present invention to provide a rotation angle detector that is small and easy to process.

【0004】[0004]

【課題を解決するための手段】上記課題を解決するた
め、本発明は、回転体の回転角度に対応して変化する放
電量を検出する放電量検出手段と、前記放電量検出手段
の出力から前記回転体の回転角度信号を発生する信号発
生手段とを備えた回転角度検出器において、前記放電量
検出手段は、先端が鋭利で、かつ前記回転体と一体的に
回転し得る支持部材に支持された放電電極と、前記回転
軸に対して傾斜し、かつ前記放電電極と空隙を介して対
向する平面状電極と、前記放電電極と前記平面状電極に
放電電流を供給する放電用電源と、前記放電電極と前記
平面状電極との間に流れる放電電流を検出する検出回路
とを備えたものである。また、前記平面状電極は、前記
斜板の表面を前記回転体の軸心を通る直径で少なくとも
2分割された扇形状であるものである。また、前記放電
量検出手段は、前記回転体に対して所定角度傾斜させて
固定した斜板と、前記斜板の表面に設けたリング状の平
面状電極と、前記回転体の回りに円周方向に等間隔に配
置した3個以上の放電電極と、前記放電電極の先端を前
記平面状電極に対向し、かつ前記回転体の回転軸に対し
て垂直な平面上にくるように配置する支持部材と、前記
放電電極と前記平面状電極に放電電流を供給する放電用
電源と、前記各放電電極と前記平面状電極との間に流れ
る放電電流を検出する検出回路とを備えたものである。
In order to solve the above-mentioned problems, the present invention is based on a discharge amount detecting means for detecting a discharge amount varying according to a rotation angle of a rotating body, and an output of the discharge amount detecting means. In a rotation angle detector provided with a signal generating means for generating a rotation angle signal of the rotating body, the discharge amount detecting means is supported by a supporting member having a sharp tip and capable of rotating integrally with the rotating body. A discharge electrode, a flat electrode inclined with respect to the rotation axis and facing the discharge electrode through a gap, a discharge power supply for supplying a discharge current to the discharge electrode and the flat electrode, A detection circuit for detecting a discharge current flowing between the discharge electrode and the planar electrode is provided. Further, the planar electrode has a fan shape in which the surface of the swash plate is divided into at least two parts with a diameter passing through the axis of the rotating body. The discharge amount detecting means includes a swash plate that is inclined and fixed with respect to the rotator, a ring-shaped planar electrode provided on the surface of the swash plate, and a circumference around the rotator. And three or more discharge electrodes arranged at equal intervals in the direction, and a support arranged so that the tip of the discharge electrode faces the plane electrode and is on a plane perpendicular to the rotation axis of the rotating body. A member, a discharge power supply for supplying a discharge current to the discharge electrode and the planar electrode, and a detection circuit for detecting a discharge current flowing between the discharge electrode and the planar electrode. .

【0005】[0005]

【発明の実施の形態】以下、本発明を図に示す実施例に
ついて説明する。図1は本発明の第1の実施例を示す斜
視図、図2はブロック図である。図において、1はモー
タ軸などの被測定体となる回転体、2は回転体1に固定
された円板状の絶縁体からなる支持部材、3は支持部材
2に固定された針状の放電電極で、回転体1の軸方向と
平行に下方に伸ばしてあり、先端は鋭利に尖っている。
4は回転体1に固定されたスリップリングで、放電電極
3に回転しながら電流を供給するようにしてある。5は
絶縁体からなる斜板で、回転体1の軸方向に対して傾斜
させてあり、したがって、支持部材2に対しても傾いて
対向させてフレームなどの固定部に固定してある。6は
斜板5の支持部材2に対向する面に設けた導電材料から
なる平面状電極で、斜板5の表面を回転体1の軸心を通
る直径で2分割された半円電極6a,6bからなってい
る。7(7a,7b)は放電電極3と平面状電極6との
間で放電する放電電流を検出する検出回路で、半円電極
6a,6bにそれぞれ接続し、図示しない公知の回転角
度信号を発生する信号発生手段を介して、それぞれ角度
信号a,bを出力するようにしてある。8は直流電源か
らなる放電用電源で、−側をスリップリング4を介して
放電電極3に、+側を検出回路7に接続してあるある。
なお、平面状電極6は金属板を斜板5に貼り付けたり、
メッキなどによる金属膜で形成してもよい。
BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described below with reference to embodiments shown in the drawings. 1 is a perspective view showing a first embodiment of the present invention, and FIG. 2 is a block diagram. In the figure, 1 is a rotating body to be measured such as a motor shaft, 2 is a support member made of a disk-shaped insulator fixed to the rotating body 1, and 3 is a needle-shaped discharge fixed to the support member 2. The electrodes are extended downward in parallel with the axial direction of the rotating body 1, and the tips are sharply pointed.
Reference numeral 4 denotes a slip ring fixed to the rotating body 1 so as to supply current while rotating to the discharge electrode 3. Reference numeral 5 denotes a swash plate made of an insulating material, which is inclined with respect to the axial direction of the rotating body 1, and therefore is also inclined and opposed to the support member 2 and fixed to a fixed portion such as a frame. Reference numeral 6 denotes a planar electrode made of a conductive material provided on a surface of the swash plate 5 facing the support member 2. The surface of the swash plate 5 is divided into two by a diameter passing through the axis of the rotating body 1 and is a semicircular electrode 6a. It consists of 6b. Reference numeral 7 (7a, 7b) is a detection circuit for detecting a discharge current discharged between the discharge electrode 3 and the planar electrode 6, which is connected to each of the semicircular electrodes 6a, 6b to generate a known rotation angle signal (not shown). The angle signals a and b are output via the signal generating means. Reference numeral 8 denotes a discharge power source composed of a DC power source, the negative side of which is connected to the discharge electrode 3 via the slip ring 4 and the positive side of which is connected to the detection circuit 7.
The flat electrode 6 may be a metal plate attached to the swash plate 5,
You may form with the metal film by plating etc.

【0006】このような構成により、針状の放電電極3
と平面状電極6との間に放電用電源8より5〜10kV
の高電圧を印加すると、放電電極3と平面状電極6との
間にコロナ放電が発生し、検出回路7(7a,7b)に
より放電電流が検出される。回転体1が回転し、支持部
材2と共に放電電極3が回転すると、斜板5に設けた平
面状電極6が放電電極3の回転面と平行な支持部材2に
対して傾いているため、図3に示すように、回転体1の
回転角に応じて平面状電極6と放電電極3との間の距離
が変化し、さらに、平面状電極6と放電電極3との間の
距離の変化に応じて放電電流値が変化する。放電電流値
と平面状電極6と放電電極3との間の距離の関係が既知
とすれば、平面状電極6と放電電極3との間の距離と回
転体1の回転角との関係は一定であるから、図示しない
公知の回転角度信号を発生する信号発生手段を介して、
放電電流値から回転角度を求めることができる。また、
平面状電極6は円周方向に2分割して半円電極6a,6
bを形成してあるから、それぞれ半円電極6a,6bの
放電電流の増加または減少傾向を検出回路6a,6bに
よって検出することによって回転方向を知ることができ
る。なお、平面状電極6は、2分割するものに限らず、
回転体1の軸心を通る直径で複数に分割された扇形状の
電極でもよい。
With such a configuration, the needle-shaped discharge electrode 3
5 to 10 kV from the discharge power source 8 between the flat electrode 6 and the flat electrode 6.
When a high voltage is applied, a corona discharge is generated between the discharge electrode 3 and the planar electrode 6, and the discharge current is detected by the detection circuit 7 (7a, 7b). When the rotating body 1 rotates and the discharge electrode 3 rotates together with the support member 2, the planar electrode 6 provided on the swash plate 5 is inclined with respect to the support member 2 parallel to the rotation surface of the discharge electrode 3, As shown in FIG. 3, the distance between the planar electrode 6 and the discharge electrode 3 changes according to the rotation angle of the rotating body 1, and further, the distance between the planar electrode 6 and the discharge electrode 3 changes. The discharge current value changes accordingly. If the relationship between the discharge current value and the distance between the planar electrode 6 and the discharge electrode 3 is known, the relationship between the distance between the planar electrode 6 and the discharge electrode 3 and the rotation angle of the rotating body 1 is constant. Therefore, through a signal generating means for generating a known rotation angle signal (not shown),
The rotation angle can be obtained from the discharge current value. Also,
The planar electrode 6 is divided into two in the circumferential direction and is divided into semicircular electrodes 6a, 6
Since b is formed, the direction of rotation can be known by detecting the increasing or decreasing tendency of the discharge current of the semicircular electrodes 6a, 6b by the detection circuits 6a, 6b. In addition, the planar electrode 6 is not limited to being divided into two,
It may be a fan-shaped electrode divided into a plurality of parts each having a diameter passing through the axis of the rotating body 1.

【0007】図4は第2の実施例を示す斜視図、図5は
ブロック図である。この場合、回転体1には所定角度傾
斜させて斜板5を固定し、その表面にはリング状の平面
状電極6を設けてある。放電電極3は、回転体1の回り
を3等分に分割した位置、すなわち120°ピッチで配
置された3本の放電電極3a,3b,3cからなり、回
転体1から独立した支持部材2に支持され、各放電電極
3a,3b,3cの先端は回転体1の軸方向に対して垂
直な面上にくるように配置されて、平面状電極6に空隙
を介して対向するようにしてある。また、各放電電極3
a,3b,3cはそれぞれ検出回路7a,7b,7cを
介して放電用電源8の一方側端子に接続され、平面状電
極6は放電用電源8の他方側端子に接続されている。こ
のような構成により、放電電極3a,3b,3cと平面
状電極6との間に高周波高電圧を印加すると、放電電極
3a,3b,3cと平面状電極6との間で放電が発生
し、各検出回路7a,7b,7cでそれぞれ放電電極3
a,3b,3cに流れる放電電流が検出される。回転体
1が回転すると、平面状電極6が斜板5の表面に設けら
れているので、放電電極3a,3b,3cと平面状電極
6との間の距離が変化し、その距離の変化に応じて放電
電流値も変化する。この放電電流値の変化の位相を比較
することにより、回転角度と回転方向を知ることができ
る。なお、上記実施例では放電電極を3個設けた例につ
いて説明したが、3個以上の複数個の放電電極を設けて
もよい。
FIG. 4 is a perspective view showing the second embodiment, and FIG. 5 is a block diagram. In this case, the swash plate 5 is fixed to the rotating body 1 by inclining it by a predetermined angle, and a ring-shaped planar electrode 6 is provided on the surface thereof. The discharge electrode 3 is composed of three discharge electrodes 3a, 3b, 3c arranged at a position divided into three equal parts around the rotating body 1, that is, at a pitch of 120 °. The discharge electrodes 3a, 3b, 3c are supported, and the tips of the discharge electrodes 3a, 3b, 3c are arranged so as to be on a plane perpendicular to the axial direction of the rotating body 1, and are opposed to the planar electrode 6 with a gap. . In addition, each discharge electrode 3
The a, 3b, and 3c are connected to one side terminal of the discharge power source 8 via the detection circuits 7a, 7b, and 7c, respectively, and the planar electrode 6 is connected to the other side terminal of the discharge power source 8. With such a configuration, when a high frequency high voltage is applied between the discharge electrodes 3a, 3b, 3c and the planar electrode 6, a discharge is generated between the discharge electrodes 3a, 3b, 3c and the planar electrode 6, Each of the detection circuits 7a, 7b, 7c has a discharge electrode 3
The discharge currents flowing in a, 3b and 3c are detected. When the rotator 1 rotates, the flat electrode 6 is provided on the surface of the swash plate 5, so that the distance between the discharge electrodes 3a, 3b, 3c and the flat electrode 6 changes, and the change in the distance changes. The discharge current value also changes accordingly. The rotation angle and the rotation direction can be known by comparing the phases of changes in the discharge current value. In the above embodiment, an example in which three discharge electrodes are provided has been described, but a plurality of discharge electrodes of three or more may be provided.

【0008】[0008]

【発明の効果】以上述べたように、本発明によれば、放
電電極の先端を含む平面に対して傾いた平面状電極を設
けるだけで、回転体の回転角に応じて放電電流値が変化
するようにしてあるので、支持部材に微細なスリットを
等間隔で加工するような多くの手間を必要とすることが
なく、放電電流の変化から回転角度と回転方向を求める
ことができ、小型で加工が極めて簡単な回転角度検出器
を提供できる効果がある。
As described above, according to the present invention, the discharge current value changes depending on the rotation angle of the rotating body simply by providing the planar electrode inclined with respect to the plane including the tip of the discharge electrode. Therefore, it is possible to obtain the rotation angle and the rotation direction from the change in the discharge current without requiring a lot of trouble such as machining fine slits in the support member at equal intervals, and the size is small. This has the effect of providing a rotation angle detector that is extremely easy to process.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の第1の実施例の構成を示す斜視図で
ある。
FIG. 1 is a perspective view showing a configuration of a first exemplary embodiment of the present invention.

【図2】 本発明の第1の実施例の構成を示すブロック
図である。
FIG. 2 is a block diagram illustrating a configuration of a first exemplary embodiment of the present invention.

【図3】 本発明の実施例の放電電流と回転角度との関
係を示すブロック図である。
FIG. 3 is a block diagram showing a relationship between a discharge current and a rotation angle according to an embodiment of the present invention.

【図4】 本発明の第2の実施例の構成を示す斜視図で
ある。
FIG. 4 is a perspective view showing a configuration of a second exemplary embodiment of the present invention.

【図5】 本発明の第2の実施例の構成を示すブロック
図である。
FIG. 5 is a block diagram showing a configuration of a second exemplary embodiment of the present invention.

【図6】 従来例の構成を示すブロック図である。FIG. 6 is a block diagram showing a configuration of a conventional example.

【符号の説明】[Explanation of symbols]

1:回転体、2:支持部材、3、3a,3b,3c:放
電電極、4:スリップリング、5:斜板、6:平面状電
極、6a,6b:半円電極、7,7a,7b,7c:検
出回路、8:放電用電源
1: Rotating body, 2: Support member, 3, 3a, 3b, 3c: Discharge electrode, 4: Slip ring, 5: Swash plate, 6: Planar electrode, 6a, 6b: Semicircular electrode, 7, 7a, 7b , 7c: Detection circuit, 8: Power supply for discharge

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 回転体の回転角度に対応して変化する放
電量を検出する放電量検出手段と、前記放電量検出手段
の出力から前記回転体の回転角度信号を発生する信号発
生手段とを備えた回転角度検出器において、前記放電量
検出手段は、先端が鋭利で、かつ前記回転体と一体的に
回転し得る支持部材に支持された放電電極と、前記回転
軸に対して傾斜し、かつ前記放電電極と空隙を介して対
向する平面状電極と、前記放電電極と前記平面状電極に
放電電流を供給する放電用電源と、前記放電電極と前記
平面状電極との間に流れる放電電流を検出する検出回路
とを備えたことを特徴とする回転角度検出器。
1. A discharge amount detecting means for detecting a discharge amount that changes corresponding to a rotation angle of a rotating body, and a signal generating means for generating a rotation angle signal of the rotating body from an output of the discharge amount detecting means. In the rotation angle detector provided, the discharge amount detecting means has a sharp tip, and a discharge electrode supported by a supporting member that can rotate integrally with the rotating body, and is inclined with respect to the rotating shaft, And a planar electrode facing the discharge electrode via a gap, a discharge power supply for supplying a discharge current to the discharge electrode and the planar electrode, and a discharge current flowing between the discharge electrode and the planar electrode. And a detection circuit for detecting the rotation angle.
【請求項2】 前記平面状電極は、前記斜板の表面を前
記回転体の軸心を通る直径で少なくとも2分割された扇
形状である請求項1記載の回転角度検出器。
2. The rotation angle detector according to claim 1, wherein the planar electrode has a fan shape in which the surface of the swash plate is divided into at least two parts by a diameter passing through the axis of the rotating body.
【請求項3】 回転体の回転角度に対応して変化する放
電量を検出する放電量検出手段と、前記放電量検出手段
の出力から前記回転体の回転角度信号を発生する信号発
生手段とを備えた回転角度検出器において、前記放電量
検出手段は、前記回転体に対して所定角度傾斜させて固
定した斜板と、前記斜板の表面に設けたリング状の平面
状電極と、前記回転体の回りに円周方向に等間隔に配置
した3個以上の放電電極と、前記放電電極の先端を前記
平面状電極に対向し、かつ前記回転体の回転軸に対して
垂直な平面上にくるように配置する支持部材と、前記放
電電極と前記平面状電極に放電電流を供給する放電用電
源と、前記各放電電極と前記平面状電極との間に流れる
放電電流を検出する検出回路とを備えたことを特徴とす
る回転角度検出器。
3. A discharge amount detecting means for detecting a discharge amount that changes corresponding to a rotation angle of the rotating body, and a signal generating means for generating a rotation angle signal of the rotating body from an output of the discharge amount detecting means. In the rotation angle detector provided, the discharge amount detecting means includes a swash plate fixed at a predetermined angle with respect to the rotating body, a ring-shaped planar electrode provided on a surface of the swash plate, and the rotation. Three or more discharge electrodes arranged at equal intervals in the circumferential direction around the body, and a tip of the discharge electrodes on a plane facing the planar electrode and perpendicular to the rotation axis of the rotating body. A supporting member arranged so as to form a discharge, a discharge power supply for supplying a discharge current to the discharge electrode and the planar electrode, and a detection circuit for detecting a discharge current flowing between each discharge electrode and the planar electrode. A rotation angle detector comprising:
JP13085996A 1996-04-26 1996-04-26 Rotation angle detector Pending JPH09292204A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13085996A JPH09292204A (en) 1996-04-26 1996-04-26 Rotation angle detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13085996A JPH09292204A (en) 1996-04-26 1996-04-26 Rotation angle detector

Publications (1)

Publication Number Publication Date
JPH09292204A true JPH09292204A (en) 1997-11-11

Family

ID=15044374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13085996A Pending JPH09292204A (en) 1996-04-26 1996-04-26 Rotation angle detector

Country Status (1)

Country Link
JP (1) JPH09292204A (en)

Similar Documents

Publication Publication Date Title
US4746862A (en) Apparatus for detecting both rotational speed and reference rotational angle of a rotary member
US6300758B1 (en) Magnetoresistive sensor with reduced output signal jitter
EP0048983A2 (en) Rotation detecting means for a rotating body
GB1565537A (en) Electric motor
JPS5829379A (en) Electrostatic generator
US4656377A (en) Tachogenerator having a magnetoresistance stator coil
US6417587B1 (en) Motor
US4902923A (en) Motor having frequency generator
EP0407020B1 (en) Electrostatic angle resolver
JPH09292204A (en) Rotation angle detector
JPH09219546A (en) Magnetoresistive element device
JPH1137710A (en) Angle-of-rotation detector
JPH09326159A (en) Index signal forming circuit
JPH10217069A (en) Approach-contact detecting method between work and tool and device thereof
JPS63202979A (en) Magnetic sensor for encoder
JPH10197544A (en) Revolving speed sensing device
JPH09257512A (en) Turning angle detecting unit
JP3282537B2 (en) Motor drive
JP4465513B2 (en) Position detection device
JP2009198371A (en) Proximity sensor
JPH09197030A (en) Output characteristic measuring apparatus for magnetic sensor and method for regulating output characteristics of sensor
JPH11271092A (en) Electrostatic capacitance type encoder
JP2004245766A (en) Device for detecting rotation angle
JP2001249029A (en) Rotation detection sensor
JPH06261522A (en) Rotation detector