JPH09287936A - Method for processing data of three-dimensional surface shape - Google Patents
Method for processing data of three-dimensional surface shapeInfo
- Publication number
- JPH09287936A JPH09287936A JP9838396A JP9838396A JPH09287936A JP H09287936 A JPH09287936 A JP H09287936A JP 9838396 A JP9838396 A JP 9838396A JP 9838396 A JP9838396 A JP 9838396A JP H09287936 A JPH09287936 A JP H09287936A
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- Prior art keywords
- dimensional surface
- data
- surface shape
- dimensional
- processing
- Prior art date
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、３次元表面形状・
粗さ計等により得られる３次元表面形状データの処理方
法に関するものである。TECHNICAL FIELD The present invention relates to a three-dimensional surface shape
The present invention relates to a method of processing three-dimensional surface shape data obtained by a roughness meter or the like.
【０００２】[0002]
【従来の技術】材料の表面粗さ、表面うねり等の表面形
状データは、工業分野において、機械加工部品や電子部
品等の機能や表面品質の評価に広く使用されているばか
りでなく、学術分野においては、互いに接触する材料表
面の摩擦や摩耗の特性を解析するために広く用いられて
いる。2. Description of the Related Art Surface shape data such as surface roughness and surface waviness of materials are widely used in industrial fields for evaluation of functions and surface quality of machined parts and electronic parts, as well as in academic fields. Is widely used for analyzing the characteristics of friction and wear of the material surfaces in contact with each other.
【０００３】表面形状の評価方法として、表面の微細な
凹凸の性質を示す諸パラメータすなわち表面粗さについ
ては、ＪＩＳ Ｂ ０６０１「表面粗さ−定義及び表
示」で規定されており、表面のおおまかな凹凸の性質を
示す諸パラメータすなわち表面うねりについては、ＪＩ
Ｓ Ｂ ０６１０「表面うねりの定義と表示」に規定さ
れている。表面形状は、表面形状データすなわち計測に
より得られるデータ、および計測データをフィルタ処理
して得られる表面粗さデータ、表面うねりデータの３種
類のデータを必要に応じて選択して用い、ＪＩＳに規定
された諸パラメータで評価することが一般的に行われて
いる。As a method of evaluating the surface shape, various parameters indicating the characteristics of fine irregularities on the surface, that is, surface roughness, are specified in JIS B 0601 "Surface roughness-definition and display", and the surface is roughly estimated. Regarding various parameters showing the property of unevenness, that is, surface waviness, see JI
S B 0610 "Definition and display of surface waviness". As the surface shape, three types of data, surface shape data, that is, data obtained by measurement, surface roughness data obtained by filtering measurement data, and surface waviness data, are selected and used as required, and are specified in JIS. It is generally performed to evaluate with various parameters.
【０００４】ＪＩＳの規定は、表面形状・粗さ計等によ
り得られる断面曲線すなわち２次元表面形状データに関
するものである。近年、表面形状をより的確かつ視覚的
に把握するために、表面を３次元で計測する３次元表面
形状・粗さ計が普及してきている。３次元表面形状・粗
さ計の計測方式は、触針式、光学式等種々の方式がある
が、いずれの方式においても３次元表面形状データは、
計測面の高さ方向の行列データとして記録される。すな
わち、計測面がｘ−ｙ平面にある場合は、３次元表面形
状データはｚ方向の高さ行列データ［ｚ（ｘ，ｙ）］で
表示される。The JIS regulation relates to cross-sectional curves obtained by a surface shape / roughness meter, that is, two-dimensional surface shape data. In recent years, in order to more accurately and visually grasp the surface shape, a three-dimensional surface shape / roughness meter that measures the surface in three dimensions has become popular. There are various methods such as a stylus method and an optical method for measuring the three-dimensional surface shape / roughness meter. In any method, the three-dimensional surface shape data is
It is recorded as matrix data in the height direction of the measurement surface. That is, when the measurement surface is on the xy plane, the three-dimensional surface shape data is displayed as height matrix data [z (x, y)] in the z direction.
【０００５】３次元表面形状・粗さ計等により得られる
３次元表面形状データから、３次元表面粗さおよび３次
元表面うねりデータを正確に求める方法は知られておら
ず、従来法では、ｘ方向またはｙ方向にデータを１次元
フィルタ処理し、これをｙ方向またはｘ方向に並べ、３
次元表面粗さおよび３次元表面うねりとして表示する方
法がとられている。There is no known method for accurately obtaining the three-dimensional surface roughness and the three-dimensional surface waviness data from the three-dimensional surface shape data obtained by a three-dimensional surface shape / roughness meter or the like. One-dimensionally filter the data in the y-direction or the y-direction and arrange it in the y-direction or the x-direction.
A method of displaying as three-dimensional surface roughness and three-dimensional surface waviness is adopted.
【０００６】図４は、３次元表面形状データをワイヤフ
レーム表示した例を示す。グラフィックス表示の手法
は、ワイヤフレーム表示の他にカラーコンタ図表示等が
あり、グラフィックスソフトにより種々の表示が可能で
ある。いずれの場合も、ｘ−ｙ平面に計測面がある場
合、計測データとしては、ｚ方向の高さ行列データ［ｚ
（ｘ，ｙ）］が用いられている。本例で用いた計測デー
タは、ｚ＝±１μｍの範囲で、高さ行列データ［ｚ
（ｘ，ｙ）］をランダム生成したものであり、ｘ方向お
よびｙ方向に異方性はない。FIG. 4 shows an example in which three-dimensional surface shape data is displayed in wire frame. In addition to wire frame display, color contour diagram display and the like can be used as a graphic display method, and various displays can be made by graphics software. In any case, when the measurement surface is on the xy plane, the height matrix data in the z direction [z
(X, y)] is used. The measurement data used in this example is the height matrix data [z
(X, y)] is randomly generated, and there is no anisotropy in the x direction and the y direction.
【０００７】図５は、図４で用いた計測データを、ｘ方
向に低域フィルタ処理して得られる３次元表面うねりデ
ータのワイヤフレーム表示である。ｘ方向はなだらかな
凹凸になっているが、ｙ方向には細かな凹凸が残ってい
ることがわかる。本例で用いた低域フィルタは、ＪＩＳ
Ｂ ０６０１で規定されている位相補償型フィルタで
ある。FIG. 5 is a wireframe display of three-dimensional surface waviness data obtained by low-pass filtering the measurement data used in FIG. 4 in the x direction. It can be seen that there are gentle irregularities in the x direction, but fine irregularities remain in the y direction. The low-pass filter used in this example is JIS
It is a phase compensation type filter defined by B0601.
【０００８】図６は、図４で用いた計測データから、ｘ
方向に低域フィルタ処理して得られる３次元表面うねり
データを減算処理することにより得られる３次元表面粗
さデータのワイヤフレーム表示である。ｘ方向は細かな
凹凸になっているが、ｙ方向は大きな凹凸が残っている
ことがわかる。FIG. 6 shows x from the measurement data used in FIG.
3 is a wireframe display of 3D surface roughness data obtained by subtracting 3D surface waviness data obtained by low-pass filtering in the direction. It can be seen that there are fine irregularities in the x direction, but large irregularities remain in the y direction.
【０００９】[0009]
【発明が解決しようとする課題】しかしながら、従来法
による３次元表面うねりおよび３次元表面粗さデータ
は、図５および図６から明らかなように、擬似的な３次
元データであり、本来の３次元表面形状の特徴をあらわ
すデータではないことがわかる。However, as is apparent from FIGS. 5 and 6, the three-dimensional surface waviness and the three-dimensional surface roughness data obtained by the conventional method are pseudo three-dimensional data, and the original three-dimensional data are obtained. It can be seen that the data does not represent the characteristics of the three-dimensional surface shape.
【００１０】また、３次元表面うねりおよび３次元表面
粗さの諸パラメータは、ＪＩＳ Ｂ０６０１、ＪＩＳ
Ｂ ０６１０で規定されている２次元パラメータの定義
を３次元に拡張することにより得ることができるが、従
来法では、諸パラメータ算出の根拠となるデータが正確
でないため、諸パラメータの数値も本来の３次元表面形
状を正確に評価できるものではない。Various parameters of the three-dimensional surface waviness and the three-dimensional surface roughness are defined in JIS B0601 and JIS.
It can be obtained by expanding the definition of the two-dimensional parameter defined in B 0610 into three dimensions, but in the conventional method, since the data that is the basis for calculating the various parameters is not accurate, the numerical values of the various parameters are also the original values. It cannot accurately evaluate the three-dimensional surface shape.
【００１１】そこで、本発明は、従来の３次元表面形状
データの処理方法では困難であった、３次元表面うねり
および３次元表面粗さの正確なデータを得ることのでき
る３次元表面形状データの処理方法を提供することを目
的とするものである。Therefore, according to the present invention, it is difficult to obtain the accurate data of the three-dimensional surface waviness and the three-dimensional surface roughness, which is difficult with the conventional method of processing the three-dimensional surface shape data. It is intended to provide a processing method.
【００１２】[0012]
【課題を解決するための手段】本発明者らは、上記課題
を解決するために、３次元表面形状データを処理する方
法を種々検討した結果、２次元低域フィルタを用いて３
次元表面形状データを処理することにより、正確な３次
元表面うねりおよび３次元表面粗さデータを求められる
ことを見出した。In order to solve the above-mentioned problems, the present inventors have studied various methods for processing three-dimensional surface shape data, and as a result,
It was found that accurate 3D surface waviness and 3D surface roughness data can be obtained by processing the 3D surface shape data.
【００１３】本発明の要旨は、（１）３次元表面形状・
粗さ計等により得られる３次元表面形状データから、３
次元表面うねりデータを求める３次元表面形状データの
処理において、３次元表面形状の高さ行列データに、２
次元低域フィルタ処理を行い、３次元表面うねりの高さ
行列データを得ることを特徴とする３次元表面形状デー
タの処理方法、（２）３次元表面形状・粗さ計等により
得られる３次元表面形状データから、３次元表面粗さお
よび３次元表面うねりデータを求める３次元表面形状デ
ータの処理において、３次元表面形状の高さ行列データ
から、該行列データの２次元低域フィルタ処理により得
られる３次元表面うねりの高さ行列データを減算するこ
とにより、３次元表面粗さの高さ行列データを得ること
を特徴とする３次元表面形状データの処理方法、（３）
低域フィルタが位相補償型フィルタであることを特徴と
する、前記（１）または（２）に記載の３次元表面形状
データの処理方法である。The gist of the present invention is (1) three-dimensional surface shape
3 from the three-dimensional surface shape data obtained by a roughness meter etc.
In the processing of the three-dimensional surface shape data for obtaining the three-dimensional surface waviness data, the height matrix data of the three-dimensional surface shape is set to 2
3D surface shape data processing method characterized by obtaining 3D surface waviness height matrix data by performing 3D low-pass filter processing, (2) 3D obtained by 3D surface shape / roughness meter, etc. Obtaining 3-dimensional surface roughness and 3-dimensional surface waviness data from surface shape data. Obtaining 3-dimensional surface shape data from the height matrix data of the 3-dimensional surface shape by 2-dimensional low-pass filtering of the matrix data. Processing method of three-dimensional surface shape data, characterized in that height matrix data of three-dimensional surface roughness is obtained by subtracting height matrix data of three-dimensional surface waviness,
The method of processing three-dimensional surface shape data according to (1) or (2) above, wherein the low-pass filter is a phase compensation filter.
【００１４】[0014]
【発明の実施の形態】以下、本発明の実施の形態を実施
例にもとづいて説明する。図１は、本発明によるフロー
チャートを示す。本例は、計測面がｘ−ｙ平面にあり、
高さ方向の行列データが３次元表面形状データ［ｚ
（ｘ，ｙ）］として記録されている場合を示す。３次元
表面形状データ［ｚ（ｘ，ｙ）］に２次元低域フィルタ
処理を行うことにより、３次元表面うねりデータ［ｚｗ
（ｘ，ｙ）］を得る。２次元フィルタ処理は、ｘ方向デ
ータにまずフィルタ処理を行い、次に得られたデータに
ｙ方向のフィルタ処理を行う処理である。まずｙ方向、
次にｘ方向にフィルタ処理を行っても結果は同じとな
る。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below based on examples. FIG. 1 shows a flow chart according to the present invention. In this example, the measurement plane is in the xy plane,
The matrix data in the height direction is three-dimensional surface shape data [z
(X, y)] is recorded. By performing the two-dimensional low-pass filter processing on the three-dimensional surface shape data [z (x, y)], the three-dimensional surface waviness data [zw
(X, y)] is obtained. The two-dimensional filtering process is a process of first filtering the x-direction data and then filtering the obtained data in the y-direction. First in the y direction,
The same result will be obtained if filter processing is performed in the x direction next.
【００１５】３次元表面形状データ［ｚ（ｘ，ｙ）］か
ら３次元表面うねりデータ［ｚｗ（ｘ，ｙ）］を減算処
理することにより、３次元表面粗さデータ［ｚｒ（ｘ，
ｙ）］を得る。By subtracting the three-dimensional surface waviness data [zw (x, y)] from the three-dimensional surface shape data [z (x, y)], the three-dimensional surface roughness data [zr (x,
y)] is obtained.
【００１６】本実施例で用いた低域フィルタは、ＪＩＳ
Ｂ ０６０１で規定されている位相補償型フィルタで
ある。位相補償型低域フィルタを用いたのは、フィルタ
としての機能が優れていることと、ＪＩＳで規定されて
いる２次元の諸パラメータとの互換性を保つためであ
る。The low-pass filter used in this embodiment is JIS
It is a phase compensation type filter defined by B0601. The reason why the phase compensation type low pass filter is used is that the function as a filter is excellent and the compatibility with the two-dimensional parameters defined by JIS is maintained.
【００１７】図２に、図４のグラフィックス表示に用い
た計測データを、本発明によるデータ処理方法により求
めた３次元表面うねりデータのワイヤフレーム表示を示
す。従来法による図５と比較すれば明らかなように、ｘ
方向およびｙ方向いずれもなだらかな凹凸のみが抽出さ
れており、３次元表面うねりデータを正確に表示できて
いることがわかる。FIG. 2 shows a wire frame display of the three-dimensional surface waviness data obtained by the data processing method according to the present invention from the measurement data used for the graphic display of FIG. As is clear from comparison with FIG. 5 by the conventional method, x
Only the smooth unevenness is extracted in both the direction and the y direction, and it can be seen that the three-dimensional surface waviness data can be accurately displayed.
【００１８】図３に、図４のグラフィックス表示に用い
た計測データを、本発明による方法でデータ処理し求め
た３次元表面粗さデータのワイヤフレーム表示を示す。
従来法による図６と比較すれば明らかなように、ｘ方向
およびｙ方向いずれも細かな凹凸のみが抽出されてお
り、３次元表面粗さデータを正確に表示できていること
がわかる。FIG. 3 shows a wire frame display of the three-dimensional surface roughness data obtained by processing the measurement data used for the graphic display of FIG. 4 by the method according to the present invention.
As is clear from comparison with FIG. 6 according to the conventional method, only fine irregularities are extracted in both the x direction and the y direction, and it can be seen that the three-dimensional surface roughness data can be displayed accurately.
【００１９】[0019]
【発明の効果】本発明による３次元形状データの処理方
法によれば、従来法では困難であった３次元表面うねり
および３次元表面粗さの正確なデータを得ることがで
き、機械加工部品や電子部品等の機能や表面品質の評価
が正確に行えるばかりでなく、互いに接触する材料表面
の摩擦や摩耗の特性をより正確に解析することができる
ようになり、工業分野および学術分野における効果は大
きい。According to the three-dimensional shape data processing method of the present invention, it is possible to obtain accurate data of three-dimensional surface waviness and three-dimensional surface roughness, which were difficult to obtain by the conventional method. Not only can the functions and surface quality of electronic parts be accurately evaluated, but the friction and wear characteristics of the material surfaces that come into contact with each other can be analyzed more accurately. large.
【図１】本発明による表面形状データの処理方法のフロ
ーチャートである。FIG. 1 is a flowchart of a method for processing surface shape data according to the present invention.
【図２】本発明による３次元表面うねりデータのグラフ
ィックス表示の実施例である。FIG. 2 is an example of a graphic display of three-dimensional surface waviness data according to the present invention.
【図３】本発明による３次元表面粗さデータのグラフィ
ックス表示の実施例である。FIG. 3 is an example of a graphic display of three-dimensional surface roughness data according to the present invention.
【図４】データ処理前の３次元表面形状データのグラフ
ィックス表示の一例である。FIG. 4 is an example of a graphic display of three-dimensional surface shape data before data processing.
【図５】従来法による３次元表面うねりデータのグラフ
ィックス表示の一例である。FIG. 5 is an example of a graphic display of three-dimensional surface waviness data by a conventional method.
【図６】従来法による３次元表面粗さデータのグラフィ
ックス表示の一例である。FIG. 6 is an example of a graphic display of three-dimensional surface roughness data by a conventional method.
Claims (3)
る３次元表面形状データから、３次元表面うねりデータ
を求める３次元表面形状データの処理方法において、３
次元表面形状の高さ行列データに、２次元低域フィルタ
処理を行い、３次元表面うねりの高さ行列データを得る
ことを特徴とする３次元表面形状データの処理方法。1. A method of processing three-dimensional surface shape data for obtaining three-dimensional surface waviness data from three-dimensional surface shape data obtained by a three-dimensional surface shape / roughness meter or the like.
A method of processing three-dimensional surface shape data, characterized in that height matrix data of a three-dimensional surface shape is subjected to two-dimensional low-pass filter processing to obtain height matrix data of three-dimensional surface waviness.
る３次元表面形状データから、３次元表面粗さおよび３
次元表面うねりデータを求める３次元表面形状データの
処理方法において、３次元表面形状の高さ行列データか
ら、該行列データの２次元低域フィルタ処理により得ら
れる３次元表面うねりの高さ行列データを減算すること
により、３次元表面粗さの高さ行列データを得ることを
特徴とする３次元表面形状データの処理方法。2. From the three-dimensional surface shape data obtained by a three-dimensional surface shape / roughness meter, etc., the three-dimensional surface roughness and 3
In a method of processing three-dimensional surface shape data for obtaining three-dimensional surface waviness data, height matrix data of three-dimensional surface shape is obtained from height matrix data of the three-dimensional surface shape by three-dimensional low-pass filtering of the matrix data. A method of processing three-dimensional surface shape data, characterized in that height matrix data of three-dimensional surface roughness is obtained by subtraction.
ることを特徴とする、請求項１または請求項２記載の３
次元表面形状データの処理方法。3. The low-pass filter according to claim 1, wherein the low-pass filter is a phase compensation filter.
Dimensional surface shape data processing method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9838396A JPH09287936A (en) | 1996-04-19 | 1996-04-19 | Method for processing data of three-dimensional surface shape |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9838396A JPH09287936A (en) | 1996-04-19 | 1996-04-19 | Method for processing data of three-dimensional surface shape |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09287936A true JPH09287936A (en) | 1997-11-04 |
Family
ID=14218353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9838396A Withdrawn JPH09287936A (en) | 1996-04-19 | 1996-04-19 | Method for processing data of three-dimensional surface shape |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09287936A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013096175A (en) * | 2011-11-02 | 2013-05-20 | Taisei Corp | Evaluation device for concrete placing joint surface |
| JP2021025220A (en) * | 2019-07-31 | 2021-02-22 | 株式会社大林組 | Roughness evaluation device for construction joint surface and roughness evaluation system for construction joint surface |
-
1996
- 1996-04-19 JP JP9838396A patent/JPH09287936A/en not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013096175A (en) * | 2011-11-02 | 2013-05-20 | Taisei Corp | Evaluation device for concrete placing joint surface |
| JP2021025220A (en) * | 2019-07-31 | 2021-02-22 | 株式会社大林組 | Roughness evaluation device for construction joint surface and roughness evaluation system for construction joint surface |
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