JPH09280993A - Airtight tester - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make it possible to enhance the economy of a tester and to shorten the testing man-hour. SOLUTION: A component (DUT) 3 to be tested containing recess part 2a for containing and holding the DUT 3 and a packing containing recess 2b are formed at a bearer 2, and a ring-like silicone rubber packing 4 is mounted in the thickness engaged with the body of the DUT. A gas detecting chamber 7 is provided to communicate with the recess part 2a. During testing, the part 2a and the chamber 7 are evacuated by a vacuum pump 9. At this time, He gas 12 is injected from a gas generator 11 on the DUT, and the presence or absence of the He gas in the chamber 7 is sensed by a gas sensor 10. During testing, the part 2a is evacuated so that the DUT is pressed only by the atmospheric pressure to be brought into close contact with the packing 4 and held. Since the packing is made of silicone rubber and thick, it has high flexibility to be satisfactorily deformed, and even if the surface of the DUT is rough, the adhesive properties are excellent and high density can be obtained.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a body such as a hermetic terminal having a terminal penetratingly attached to a glass body or a ceramic connector having a contact penetratingly attached to a ceramic body and a terminal or a contact. The present invention relates to a device for testing the airtightness between devices and the airtightness between the outside and the hollow part of a hollow box-shaped part to which these hermetic terminals and ceramic connectors are attached, and more particularly to the economicalization of the device and reduction of the number of test steps.

[0002]

2. Description of the Related Art A conventional airtightness tester will be described with reference to FIG. Reference numeral 2 is a pedestal, and a DUT storage recess 2a for storing and holding the body of the device under test (DUT) 3 is formed on the upper surface. On the upper surface of the pedestal 2 around the recess 2a, the recess 2a
A ring-shaped packing 4 having a center hole of substantially the same shape as is mounted. The packing 4 is butyl rubber, chloroprene rubber,
One made of urethane rubber or fluororubber is used.
During the test, the roughness of the DUT surface changes due to differences and variations in the material and manufacturing method of the DUT body, so it is necessary to apply grease or the like to the packing surface to enhance the adhesion.

A pressing mechanism portion 5 for the DUT 3 is mounted on the receiving table 2.
Is attached. That is, the L-shaped base 5a is fixed on the pedestal 2, the pressing cover 5b for the DUT is fixed to the tip of the cover arm 5c, and the other end of the cover arm 5c is rotatably supported by the upright portion of the base 5a. It The cover arm 5c is connected to one end of the connecting piece 5d at the middle of the arm, and the other end of the connecting piece 5d is connected to the middle of the pressing lever 5e. When the presser lever 5e is manually tilted in the direction of arrow 6 in FIG. 4, the presser cover 5b presses the upper surface of the body of the DUT 3 downward, and the bottom surface of the body presses the packing 4, so that they are in close contact with each other. Airtightness between the storage recess 2a and the atmosphere is maintained.

A gas detection chamber 7 is provided below the pedestal 2. The gas detection chamber 7 is connected to the DUT storage recess 2 through the communication hole 8.
It is communicated with a and is evacuated by the vacuum pump 9 during the test. The gas detection chamber 7 is connected to the gas detector 10. On the other hand, a predetermined inert gas, for example, He gas 12 is injected from the gas generating unit 11 during the test onto the DUT 3. He
Since gas hardly exists in the air, if the DUT 3 has a poor airtightness, it leaks the DUT and enters the gas detection chamber 7, so that the content rate of He gas is significantly increased and is detected by the gas detector. Therefore, the defect can be easily detected.

[0005]

Recently, as part of cost reduction of parts requiring an airtight test, there has been a strong demand for economical airtight test equipment and reduction of test man-hours. The present invention was made to meet this need.

[0006]

[Means for Solving the Problems]

(1) In the airtightness test apparatus according to claim 1, a pedestal having a DUT storage recess for accommodating and holding a component under test (hereinafter referred to as DUT) formed on the upper surface, and an upper surface of the pedestal and the DUT storage recess. A ring-shaped packing accommodating recess formed by cutting out a corner formed by the peripheral surface, a ring-shaped silicone rubber packing that is mounted in the packing accommodating recess and engages with the body of the DUT, and a DUT accommodating recess , A vacuum pump for evacuating the DUT storage recess and the gas detection chamber, and a DUT mounted in the DUT storage recess.
A gas generator that injects a predetermined inert gas and a gas detector that detects the inert gas in the gas detection chamber are provided on the top. Then, during the test, the inside of the DUT accommodating recess is evacuated, and as a result, the DUT is pressed only by the atmospheric pressure and is held in close contact with the packing.

(2) According to the invention of claim 2, in the above-mentioned (1), a corner portion formed by the upper surface and the inner peripheral surface of the packing is notched and engages with a flange portion projected from the body of the DUT. A recess is formed. (3) In the airtightness test apparatus according to claim 3, a pedestal on which a hollow box-shaped component whose one surface is released is placed with its open end face down, and a silicone rubber packing laid on the pedestal. A gas detection chamber communicating with the hollow portion of the box-shaped component placed on the pedestal through a through hole formed in the pedestal and the packing; and a vacuum pump for evacuating the hollow portion of the box-shaped component and the gas detection chamber. A gas generator that injects a predetermined inert gas is provided on the outer surface of the box-shaped component mounted on the packing of the pedestal, and a gas detector that detects the inert gas in the gas detection chamber. And during the test, the hollow part of the box-shaped part was evacuated,
As a result, the component is pressed only by the atmospheric pressure and is held in close contact with the packing.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIGS. In these figures, the same reference numerals are given to the parts corresponding to those in FIG. 4, and the duplicated description will be omitted. Now, since the gas detection chamber 7 communicated with the DUT storage recess 2a is evacuated by the vacuum pump 9, if D
If the airtightness between the UT 3 and the packing 4 is sufficiently obtained, and the packing is deformed by the atmospheric pressure so that the DUT can be held by the atmospheric pressure and the packing, it is not necessary to particularly provide the holding mechanism section 5. Conventionally, the pressing mechanism section 5 is also used, because the packing 4 is insufficient in airtightness only by decompression, and the packing is relatively hard so that it is only slightly deformed, and the DUT is held only by the atmospheric pressure and the packing. Because it is difficult.

Therefore, in the present invention, as a result of various studies on packing materials, a thermosetting (age-hardenable) liquid silicone rubber degassed and molded into a thick wall has excellent flexibility. As shown in Fig. 2, it adheres well to a DUT with a rough surface and achieves high airtightness, and when the DUT is pressed by the atmospheric pressure during depressurization, the silicon rubber deforms well (depresses) and becomes large. It was found that the holding mechanism can be omitted because the DUT can be sufficiently held in cooperation with the atmospheric pressure. Further, since the silicone rubber packing is also excellent in mold releasability, there is an advantage that the DUT can be easily removed at the end of the test and the workability is improved.

According to the first aspect of the invention, the upper surface of the pedestal 2 and the DU
A ring-shaped packing storage recess 2b is formed by cutting off a corner formed by the inner peripheral surface of the T storage recess 2a, and the packing 4 is attached to the ring-shaped packing storage recess 2b. There is no risk of misalignment. In the example of FIG. 1, a corner formed by the upper surface and the inner peripheral surface of the packing 4 is cut out,
A recess 4a that engages with the flange 3a protruding from the body of the DUT 3 is formed, and when the DUT is pressed by the atmospheric pressure during depressurization, the packing 4 is easily deformed and adheres well to the DUT 3, and the recess 4a Three-dimensional (three-dimensional) by action
And a high airtightness is obtained (claim 2).

FIG. 3 shows the third embodiment of the present invention, in which the DUT 3 is a hollow box-shaped component whose one surface is open, and is placed on the pedestal 2 with its open end face down. A thick silicon rubber packing 4 is laid on the pedestal 2. Through holes 2c are formed in the pedestal 2 and through holes 4b are formed in the packing 4 so as to overlap each other. These are shown in FIG.
The gas detection chamber 7 has the same function as the communication hole 8 of
It is communicated with the hollow portion 3b of the DUT 3 through c and 4b.

By evacuating the hollow portion 3b and the gas detection chamber 7 to vacuum, the DUT 3 is pressed by the packing 4 at atmospheric pressure, whereby the packing 4 is pressed by the lower end portion of the body of the DUT and is recessed, and the lower end portion is well At the same time, it holds the body in close cooperation with atmospheric pressure. In this case, even if the dimensions of the open end face of the DUT are various, there is an advantage that only one packing 4 is required.

[0013]

EFFECTS OF THE INVENTION In the present invention, the packing 4 is improved to have a thick wall made of silicon rubber, so that the packing 4 is deformed well by the atmospheric pressure at the time of decompression to improve the adhesion with the DUT and cooperate with the atmospheric pressure. Since the DUT can be sufficiently held by the above, the conventional pressing mechanism portion 5 can be omitted. Therefore, the economy of the device can be improved accordingly.

According to the present invention, it is not necessary to manually press and release the DUT using the conventional pressing mechanism section 5. Further, the work of applying grease to the packing, which has been conventionally performed to improve the adhesion, and the ultrasonic cleaning work for removing the grease attached to the DUT after the test are unnecessary. Therefore, the number of test steps can be significantly reduced.

[Brief description of drawings]

FIG. 1 is a principle sectional view showing an embodiment of the invention of claim 1.

FIG. 2 is a cross-sectional view of a main part for explaining a close contact state between a packing 4 and a DUT 3 shown in FIG.

FIG. 3 is a principle sectional view showing an embodiment of the invention of claim 3;

FIG. 4 is a principle sectional view of a conventional airtightness tester.

Claims (3)

[Claims] 1. A pedestal having a DUT accommodating recess for accommodating and holding a component under test (hereinafter referred to as DUT) formed on an upper surface thereof, and a corner formed by the upper surface of the pedestal and an inner peripheral surface of the DUT accommodating recess. A ring-shaped packing accommodating recess formed by cutting out, a thick-walled ring-shaped silicon rubber packing that is mounted in the packing accommodating recess and engages with the body of the DUT, and communicates with the DUT accommodating recess A gas detection chamber that is provided as a vacuum pump, a vacuum pump that evacuates the DUT storage recess and the gas detection chamber, and a gas generation unit that injects a predetermined inert gas onto the DUT mounted in the DUT storage recess, A gas detector for detecting the inert gas in the gas detection chamber, and during the test, the inside of the DUT storage recess is evacuated, resulting in D
An airtightness test apparatus, wherein the UT is pressed only by atmospheric pressure and is held in close contact with the packing. 2. The corner according to claim 1, wherein a corner portion formed by the upper surface and the inner peripheral surface of the packing is cut out to form a concave portion which engages with a flange portion protruding from the body of the DUT. Characteristic air tightness tester. 3. A pedestal on which a hollow box-shaped component whose one surface is released is placed with its open end face down, a thick silicon rubber packing laid on the pedestal, and the pedestal and the A gas detection chamber that communicates with a hollow portion of the box-shaped component placed on the pedestal through a through hole formed in the packing; and a vacuum pump that evacuates the hollow portion of the box-shaped component and the gas detection chamber. A gas generator for injecting a predetermined inert gas onto the outer surface of the box-shaped component mounted on the packing of the pedestal, and a gas detector for detecting the inert gas in the gas detection chamber. During the test, the hollow part of the box-shaped component is evacuated, resulting in
An airtightness test apparatus, wherein the component is pressed only by atmospheric pressure and is held in close contact with the packing.