JPH09279965A - Electrostatic actuator device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow the compact storage of a mover by itself without requiring additional devices such as a winding roller device. SOLUTION: A film stator 1 with plural band driving electrodes arranged at preset pitches and a filmed stator 2 reciprocally driven on the stator 1 between the base and the end of the satator 1 in the direction perpendicular to the band driving electrodes are provided. At the base end of the stator 1, a spirally sectional mover storage space 4 for a mover 2 to move therein is formed by bending into a spirally sectional shape.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostatic actuator device, and more particularly to a static actuator which can accommodate a moving element in a compact size by itself without requiring an additional device such as a take-up roller device. The present invention relates to an electric actuator device.

[0002]

2. Description of the Related Art Conventionally, as an electrostatic actuator device, a film-shaped stator having a plurality of strip-shaped drive electrodes arranged at a predetermined pitch, and a base end portion of the stator in a direction orthogonal to the strip-shaped drive electrodes. There is known one provided with a film-shaped moving element which is reciprocally driven on the stator between the tip portion (see Japanese Patent Laid-Open No. 2-285978, etc.). This electrostatic actuator device can be used, for example, as a light transmission amount adjusting device of light transmitting glass by forming a stator as a transparent film attached to a light transmitting glass surface and a moving member as a light control film. .

[0003]

By the way, when the electrostatic actuator device is used as a device for adjusting the light transmission amount of the light-transmitting glass, the moving stroke of the moving element, which is a light control film, is large and the structure can be stored compactly. Is required. In this regard, it is conceivable to install a take-up roller device for the moving element, but the take-up roller device has a relatively large diameter. A window frame having a width that can accommodate the roller device is required.

The present invention has been made in view of the above circumstances, and an object thereof is to allow a moving element to be compactly stored by itself without requiring an additional device such as a winding roller device. It is to provide an electrostatic actuator device capable of

[0005]

As means for achieving the above object, an electrostatic actuator device according to the present invention comprises a film-shaped stator having a plurality of strip-shaped drive electrodes arranged at a predetermined pitch, and a strip-shaped drive. Mainly composed of a film-shaped mover that is reciprocally driven on the stator between the base end portion and the tip end portion of the stator in a direction orthogonal to the electrodes,
The base end portion of the stator is bent into a spiral cross-sectional shape, so that a stator housing space having a spiral cross-section into which the mover can enter is formed at the base end portion of the stator. And

In the present invention, the stator may be a transparent film attached to a transparent glass surface, and the mover may be a light control film.

[0007]

Embodiments of the present invention will be described below with reference to the accompanying drawings. 1 is a perspective view showing a schematic overall structure of an embodiment of an electrostatic actuator device according to the present invention as a cross section, FIG. 2 is a partial cross-sectional view showing a layered structure of a stator and a mover according to the embodiment, and FIG. FIG. 4 is a block diagram of the controller of the embodiment, and FIG. 4 is a partial cross-sectional view illustrating the operation of the embodiment.

The electrostatic actuator device of the present invention is shown in FIG.
As shown in, a film-shaped stator (1) having a plurality of strip-shaped drive electrodes arranged at a predetermined pitch, and a base end (lower end) of the stator (1) in a direction orthogonal to the strip-shaped drive electrodes. And a film-shaped mover (2) which is reciprocally driven on the stator (1) between the tip and the tip (upper end). The base end (lower end) of the stator (1) is bent by the core member (3) into a spiral cross-sectional shape, so that the mover (2) can enter the spiral cross-section mover. A storage space (4) is formed at the base end of the stator (1).

The stator (1) is attached to the inner surface of the outer glass (6a) (or the inner glass (6b)) of the translucent glass (6) formed by fixing two pieces of glass to the window frame (5). Has been done. The inside glass (6b) covers the stator (1) and the mover (2) to prevent dust from adhering due to static electricity and prevent electric shock due to high voltage. It is preferable that a suitable antistatic agent is applied to the inner surface of the inner glass (6b).

The above-mentioned stator (1), as shown in FIG.
The transparent insulating film (1b) whose back surface is attached to the inner surface of the outer glass (6a) through the adhesive layer (1a) is used as a base material. On the surface of the transparent insulating film (1b),
For example, a plurality of band-shaped transparent electrodes (1c) extending in the left-right direction in parallel with each other at an appropriate pitch interval set in the range of 0.1 to 2 mm are patterned as a three-phase electrode.
The surface of the transparent insulating film (1b) on which the band-shaped transparent electrode (1c) is formed has a transparent insulating protective layer (1d).
Coated with Also, a transparent insulating protective layer (1d)
On top, a large number of beads (1e) having a diameter of 5 to 50 μm.
A transparent bead layer (1f) in which is dispersed in a binder resin is applied, and the bead layer (1f) makes the surface of the stator (1) a sliding surface.

Examples of the transparent insulating film (1b) constituting the stator (1) include polycarbonate, polyethylene terephthalate, polybutylene terephthalate,
Transparent plastic films such as polyethersulfone, polyacrylate, and polyimide can be used.

The strip-shaped transparent electrode (1c) is, for example,
A transparent conductive material (eg, indium oxide-tin oxide (IT) formed on the surface of the transparent insulating film (2b) by a lithography technique using a photoresist material.
O), a thin film of antimony oxide-tin oxide (ATO), etc. is formed by a method of patterning. The strip-shaped transparent electrode (1c) can also be formed by a gravure printing method or a screen printing method using a binder resin in which transparent conductive particles are dispersed. Further, the transparent insulating protective layer (1d) is formed of a coating film or a vapor deposition film of a transparent insulating paste or transparent insulating ceramics.

The mover (2) has a strip-shaped transparent electrode (1c) and a strip-shaped transparent electrode (2) similar to the strip-shaped transparent electrode (1c) on the surface of a transparent insulating film (2a) similar to the transparent insulating film (1b).
b) is patterned as a three-phase electrode, the surface of which is the same as the transparent insulating protective layer (1d).
Coated with Then, on the entire surface of the moving element (2), for example, a dark-colored print layer (2
A light control film is constituted by performing d). Instead of the dark color print, an infrared or ultraviolet reflection / absorption film may be formed on the entire surface of the moving element (2).

Although not shown, it is preferable to provide a lubricant layer on the surface of the moving element (2), which is the back surface of the moving element (2), facing the stator (1). In this case, the thickness of the lubricant layer is usually 1
To 40 nm, preferably 2 to 10 nm. The lubricant to be used may be a solid or liquid lubricant at normal temperature.

As shown in FIG. 3, each strip-shaped transparent electrode (1c) of the stator (1) is sequentially connected to the three-phase electrodes of the drive circuit (7a) of the controller (7) and moved. Each strip-shaped transparent electrode (2b) of the child (2) is sequentially connected to the other three-phase electrodes of the drive circuit (7a).

The controller (7) outputs an input operation processing circuit (7b) which outputs a detection signal of an optical sensor (8) installed indoors or outdoors or a control signal according to a command signal of a remote control operation switch (9). ) Is provided. Then, the drive circuit (7a) is configured to output a predetermined electrode voltage to the two sets of three-phase electrodes according to the control signal of the input arithmetic processing circuit (7b). Note that the optical sensor (8) may be an infrared sensor for detecting infrared rays or an ultraviolet sensor for detecting ultraviolet rays.

The lower end of the stator (1) extending into the pocket (5a) of the window frame (5) is connected to the core member (3) supported by the pocket (5a), so that It is bent into a spiral cross section and is held in the pocket (5a). As a result, a mover housing space (4) having a spiral cross section into which the mover (2) can enter is formed at the lower end of the stator (1).

Next, an example of use of the electrostatic actuator device of the present invention constructed as above will be described. First, as shown in FIG. 1, when the mover (2) overlaps the lower half area of the stator (1), a dark color print layer ( The lower half region of the transparent glass (6) is shielded by 2d), and the transparent region is limited to the upper half region of the transparent glass (6).

Here, the remote control switch (9) is operated to instruct the light-shielding glass (6) to be entirely shielded from light, or the light-transmitting glass (6) is detected by a detection signal from the optical sensor (8).
When the entire surface shading is instructed, the input arithmetic processing circuit (7b) of the controller (7) outputs a control signal to the drive circuit (7a). Then, based on this control signal, the drive circuit (7a) applies 3 to each strip-shaped transparent electrode (2b) of the moving element (2).
By applying a predetermined electrode charge of the phase and sequentially changing the three-phase electrode charge applied to each band-shaped transparent electrode (1c) of the stator (1), the mover (2) becomes the stator (1). ) Is driven upwards.

At this time, each strip-shaped transparent electrode (1c) of the stator (1) for driving the moving element (2) upward has a predetermined pitch interval and is orthogonal to the moving direction of the moving element (2). Since it extends, the mover (2) is driven upward with good straightness. Then, in a state in which the moving element (2) is driven upward to a position where the moving element (2) overlaps the entire surface of the stator (1), the transparent glass ( The entire surface of 6) is shielded from light.

On the other hand, the remote control switch (9) is operated to instruct the entire transparent glass (6) to transmit light, or the detection signal of the optical sensor (8) is used to transmit the transparent glass (6).
When the entire surface light transmission is instructed, the input arithmetic processing circuit (7b) of the controller (7) outputs a control signal to the drive circuit (7a). Then, based on this control signal, the drive circuit (7a) sequentially changes the three-phase electrode voltage applied to each strip-shaped transparent electrode (1c) of the stator (1), so that the mover (2) becomes the stator. According to (1), it is driven downward with good straightness.

As shown in FIG. 4, the mover (2) driven downward along the stator (1) is a mover accommodating space having a spiral cross section formed at the lower end of the stator (1). It enters (4) by itself and is stored in the pocket (5a) of the window frame (5). At that time, since the sliding surface formed of the bead layer (1f) is formed on the surface of the stator (1) which the moving element (2) faces, the moving element (2) follows the stator (1). And move smoothly. The mover (2) has a pocket (9a).
When it is completely housed inside, the entire surface of the transparent glass (6) becomes a transparent region where the moving element (2) does not exist.

In the electrostatic actuator device of the present invention, the mover (2) can be housed by itself in the mover housing space (4) having a spiral cross section formed at the lower end of the stator (1). No additional device such as a take-up roller device is required. Therefore, in addition to being used as a light transmission amount adjusting device of the light transmitting glass (6), it can be applied as a small driving device such as a sheet conveying mechanism in a word processor or a facsimile, or as a driving device for other minute mechanical systems.

[0024]

As described above, in the present invention,
The film-shaped moving element, which is reciprocally driven on the film-shaped stator between the base end portion and the tip end portion, is formed at the base end portion of the stator in the return path toward the base end portion side of the stator. It moves into the moving element storage space of spiral section by itself. Therefore,
According to the present invention, the mover can be compactly stored by itself without the need for an additional device such as a take-up roller device.

[Brief description of drawings]

FIG. 1 is a perspective view showing a schematic overall structure of an embodiment of an electrostatic actuator device according to the present invention in section.

FIG. 2 is a partial cross-sectional view showing a layer structure of a stator and a mover in one embodiment.

FIG. 3 is a block configuration diagram of a controller according to an embodiment.

FIG. 4 is a cross-sectional view of the vicinity of the base end portion of the stator for explaining the operation of the embodiment.

[Explanation of symbols]

 1: Stator 1a: Adhesive layer 1b: Transparent insulating film 1c: Strip transparent electrode 1d: Transparent insulating protective layer 1e: Beads 1f: Bead layer 2: Moving element 2a: Transparent insulating film 2b: Strip transparent electrode 2c: Transparent insulating Protective layer 2d: printed layer 3: core member 4: moving element storage space 5: window frame 5a: pocket 6: translucent glass 6a: outer glass 6b: inner glass 7: controller 7a: drive circuit 7b: input arithmetic processing circuit 8 : Optical sensor 9: Remote control operation switch

Claims (2)

[Claims] 1. A film-shaped stator having a plurality of belt-shaped drive electrodes arranged at a predetermined pitch, and the fixing between a base end portion and a tip end portion of the stator in a direction orthogonal to the belt-shaped drive electrodes. It is composed mainly of a film-shaped moving element that is reciprocally driven on the child, and the base end portion of the stator is bent into a spiral cross-sectional shape so that the moving element can move in the spiral cross-section. An electrostatic actuator device, wherein a child storage space is formed at a base end portion of the stator. 2. The electrostatic actuator device according to claim 1, wherein the stator is made of a transparent film attached to a transparent glass surface, and the mover is made of a light control film.