JPH09277149A - Lens attaching tray and manufacture thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To precisely grind a lens by applying the constitution that at least an area for attaching the lens is formed out of an amorphous alloy having a supercooling liquid zone. SOLUTION: A lens 1 as a workpiece is bonded to the attaching surface 3a of a lens attaching tray 3 made of an amorphous alloy having a supercooling liquid zone, by use of a thermoplastic attaching agent 2. The lens attaching tray 3 has a mounting part 3b connected and disconnected to and from the rotary shaft of a grinding device, and a flange 3c forming a stopper on the edge of the rotary shaft. In this case, the amorphous alloy having a supercooling liquid zone means an amorphous alloy having a glass transition temperature Tg nearer a temperature level lower than crystallisation temperature Tx. Also, the supercooling liquid zone is defined as corresponding to a value between Tx and Tg, and the amorphous alloy has a wide supercooling liquid zone extending over a range approximately between several ten degrees and 100 deg.C.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lens attachment plate for attaching and fixing a lens material when polishing a lens with a grindstone of a polishing apparatus, and particularly to a lens used for high-precision lens processing such as a microscope lens. The pasting plate and the manufacturing method thereof.

[0002]

2. Description of the Related Art Conventionally, as this type of lens sticking plate, the one described below is known (prior art 1). FIG.
As shown in FIGS. 0 (a) and (b), the lens sticking plate is composed of a sticking portion 101, a mounting portion 102, and a flange 103. The mounting portion 102 is used by being mounted in a mounting hole provided at the center of the rotary shaft of the polishing apparatus. Sticking part 101
Is provided with a sticking surface 101a for sticking a lens, which is polished one by one according to the shape of the sticking surface of the lens to be polished, and has a surface roughness of about 1.5 μm and a shape accuracy of ± 10 μm. It is finished to a degree of accuracy.

Also, generalizing these lens-attached dishes,
An attempt to reduce the manufacturing cost of the pasting plate is disclosed in Japanese Patent Application Laid-Open No. 6-91507 (Prior Art 2). As shown in FIG. 11, the lens sticking plate is composed of a plate base 201 and a lens sticking part 202 bonded on the plate base 201, and the lens sticking part 202 is made of calcium sulfate and a water-soluble resin. The upper surface of the lens sticking portion 202 is formed so as to match the sticking surface of the lens 203 that is a workpiece, and the lens 203 is fixed to the lens sticking portion 202 with a hot-melt type sticking agent 204.

[0004]

However, the above-mentioned prior art has the following problems. That is, the conventional technique 1
Then, when the lens sticking plate shown in FIG. 10 is used, the variation in the thickness of the lens is caused by the sticking surface 101 of the lens sticking plate.
It is determined by the shape accuracy of a, and the processing accuracy of the lens thickness by polishing is limited to about ± 10 μm, and it was not possible to mass-produce more accurate lenses.

Further, in the prior art 2, when the lens sticking tray shown in FIG. 11 is used, the rigidity of the lens sticking portion 202, which is mainly made of a water-soluble resin, is low, which causes distortion and damage during polishing, It could not be applied to high precision lens processing. Further, this lens sticking part 202 lacks sufficient resistance to heat, and therefore the hot-melt type patch 204
Since it was not possible to withstand repeated heating during use, the lens had to be remolded each time it was attached, resulting in an increase in the number of steps.

The present invention has been made in view of the above-mentioned conventional problems, and the object of the invention according to claim 1 is high rigidity and high accuracy, and a lens sticking plate capable of polishing a lens with high accuracy. Is to provide. An object of the present invention according to claim 2, 3 or 4 is to provide a method for manufacturing a lens-attached dish capable of easily producing the lens-attached dish according to claim 1. In addition to the above-mentioned subject, the subject of the invention which concerns on Claim 4 is recycling an aged lens sticking plate.

[0007]

In order to solve the above-mentioned problems, the invention according to claim 1 is that in the lens sticking plate, at least the part where the lens is stuck is made of an amorphous alloy having a supercooled liquid region. Characterize. The invention according to claim 2 or 4 is a method of manufacturing a lens-attaching dish, wherein a material made of an amorphous alloy having a supercooled liquid region is heated to the supercooled liquid region, and at least a portion for attaching the lens is formed by a pair of molds. It is characterized in that it is pressed to form a desired shape. The invention according to claim 3 or 4 is a method for manufacturing a lens-attached dish, wherein a material made of an amorphous alloy having a supercooled liquid region is heated to a supercooled liquid region, and at least a portion where the lens is attached is a lens and a mold. It is characterized by being pressed into a desired shape. The invention according to claim 4 is characterized in that, in addition to the above-mentioned means, a material obtained by melting an amorphous alloy having a supercooled liquid region used in a lens sticking plate and recast by liquid quench casting is used.

In the operation of the invention according to claim 1, at least the portion to which the lens is attached is made of an amorphous alloy having a supercooled liquid region, so that the amorphous alloy heated in the supercooled liquid region has a sharp decrease in viscosity. As a result, it is plastically deformed at a low pressure of about several MPa to provide a highly rigid and highly accurate lens attachment plate. In the operation of the invention according to claim 2 or 4, the material made of the amorphous alloy having the supercooled liquid region is heated to the supercooled liquid region, and at least the portion to which the lens is attached is pressed by the pair of molds to obtain a desired amount. By molding into a shape, it is possible to easily manufacture a lens-attaching plate that follows a highly accurate mold shape. In the operation of the invention according to claim 3 or 4, the material made of the amorphous alloy having the supercooled liquid region is heated to the supercooled liquid region, and at least the portion to which the lens is attached is pressed by the lens and the mold to obtain the desired value. By molding in the above shape, it is possible to extremely easily manufacture a lens sticking dish that follows the lens shape and the mold shape.
In the function of the invention according to claim 4, in addition to the above-described function, it is aged by using the raw material which is obtained by melting the amorphous alloy having the supercooled liquid region used for the lens sticking plate and recast by liquid quench casting. Recycle the plate with the lens attached as a material.

[0009]

1 to 3 show Embodiment 1 of the invention, FIG. 1 is a vertical cross-sectional view of a lens-attaching plate on which a lens is attached, and FIG. 2 is immediately before forming of a lens-attaching plate forming apparatus. FIG. 3 is a vertical cross-sectional view showing the state immediately after the molding of the lens adhering dish by the molding apparatus.

In FIG. 1, a lens 1 as a workpiece is
It is adhered to the application surface 3a of the lens application plate 3 made of an amorphous alloy having a supercooled liquid region by the thermoplastic adhesive agent 2. The lens attachment plate 3 has a mounting portion 3b that is attached to and detached from the rotary shaft of the polishing device, and a flange 3c that serves as a stopper on the end face of the rotary shaft. Here, the amorphous alloy having a supercooled liquid region is an amorphous alloy having a glass transition temperature (Tg) lower than the crystallization temperature (Tx), and is defined as a supercooled liquid region = Tx to Tg. It has a wide supercooled liquid area ranging from several tens to 100 degrees. Amorphous alloys having these supercooled liquid regions are characterized by a rapid decrease in viscosity in the supercooled liquid region, and can undergo large plastic deformation under a pressure of about several MPa.

In the first embodiment of the present invention, Zr ₅₅ Cu ₃₀ Al _{10 is used} as an amorphous alloy having a supercooled liquid region.
Ni ₅ (subscript indicates atomic%) was used. Zr
₅₅ Cu ₃₀ Al ₁₀ Ni ₅ has a tensile strength of 1.5 MPa, a hardness of Hv 510, and a linear expansion coefficient of 1 from room temperature to 350 ° C.
It is 0 × 10 ⁻⁶ , and has sufficient strength, hardness and a linear expansion coefficient as a glass plate (for example, SF10: linear expansion coefficient 8 to 9 × 10 ⁻⁶ ) for attaching a lens. Further Zr ₅₅ C
u ₃₀ Al ₁₀ Ni ₅ is about 70 ° C., which is 420 to 490 ° C.
Has a wide supercooled liquid area of 1
Viscosity as a liquid of about ¹⁰ Pa · s
Molding can be performed with a pressure of about Pa. Further, the patch 2 is a hot melt type which is generally called a tar.

Next, a molding device for the lens-attaching tray 3 will be described. As shown in FIG. 2, an upper body mold 6, a lower body mold 7 and a lower mold 8 made of cemented carbide are fitted in a sleeve 5 surrounded by a resistance heater 4. The inner surface 6a of the upper body mold 6 is configured to form the attachment portion 3b of the lens sticking tray, the inner surface 7a of the lower body mold 7 is configured to form the flange 3c, and the molding surface 8a of the lower mold 8 is configured to form the bonding surface 3a. .
In particular, the molding surface 8a of the lower mold 8 is formed to have the same radius of curvature as that of the attachment surface of the lens 1, and has a surface roughness R _{max of} 30 nm. The inner surface 6a of the upper body die 6 is loaded with an amorphous material 9 made of Zr ₅₅ Cu ₃₀ Al ₁₀ Ni ₅ that is rapidly cast by a copper mold, and the upper die 10 can press the back surface of the amorphous material 9. It is arranged. The lower surface 10a of the upper die 10 forms a chamfer and an end surface of the mounting portion 3b of the lens sticking plate 3.

The upper die 10 is pressed by a punch (not shown) to press-mold the amorphous material 9 heated in the supercooled liquid region. Inside the upper body die 6, the lower body die 7, the lower die 8 and the upper die 10 (hereinafter referred to as “die”), temperature sensors (not shown) for measuring the die temperature are respectively incorporated, The resistance heater 4 is controlled by a temperature controller (not shown) by the signal from the temperature sensor to maintain the mold temperature at the target temperature. Also, the entire molding device
10 ^-4 to prevent oxidation of the mold due to high temperature during molding
It is installed in a vacuum chamber (not shown) such as Toor, or in a chamber replaced with an inert gas such as nitrogen or argon.

Next, a method of manufacturing the lens sticking plate 3 will be described. First, add amorphous material 9 to the above molding equipment.
And the amorphous material 9 is heated in the supercooled liquid region by the resistance heater 4. In order to prevent crystallization of the amorphous material 9, it is desirable that the heating is performed in a supercooled liquid region having a crystallization start temperature of 490 ° C. or lower and a glass transition temperature of 420 ° C. or higher as short as possible. In the first embodiment of the present invention, the temperature is raised from room temperature to 450 ± 5 ° C. in about 300 seconds. After the temperature rises, the punch presses the upper mold 10 to mold the amorphous material 9 in the supercooled liquid state in the mold.

After molding, the heating and holding by the resistance heater 4 is stopped, and an inert gas such as nitrogen is blown onto the mold to cool it. When the mold temperature reaches a temperature (400 ° C.) lower by 20 ° C. than the glass transition temperature of the amorphous material 9, the pressing by the punch is released. The molding pressure by the punch was 20 MPa and the pressing time was 60 sec. In this way, as shown in FIG. 3, the lens sticking plate 3 was obtained. Although the molding pressure and molding time can be adjusted appropriately,
If the pressure is lower than MPa, the molding time is increased, and 1000 sec.
If the supercooled liquid area is maintained as described above, the amorphous material 9 may crystallize, and molding or remolding may become impossible.

In the lens-attached plate 3 thus formed,
The surface roughness of the sticking surface 3a was R _{max of} 0.3 μm, and the shape accuracy was finished within 5 μm with respect to the shape of the lower mold 8. In addition, as a result of cutting the molded lens-adhering dish 3 and polishing the cross-section, and then performing etching with hydrofluoric acid and observing the structure, about 20% of crystalline material was observed, but the effect on the molding accuracy was Not confirmed.

A method of using the lens sticking plate 3 for lens polishing will be described. Attachment surface 3a of the lens attachment plate 3
Then, the lens 1 is attached via the patch 2. At this time, the lens 1 is fixed to the lens sticking dish 3 by sticking the lens 1 on the sticking surface 3a in a state where the patch 2 is heated to 80 to 100 ° C. and fluidized, and cooled to room temperature. After fixing, the lens sticking plate 3 is mounted on the lens polishing apparatus, and the lens 1 is subjected to desired polishing processing. After processing, the lens 1 can be peeled off from the attachment surface 3a and used for lens polishing processing as many times as necessary.

In the lens sticking plate by the polishing process of the prior art 1, the surface roughness of the sticking surface was about R _{max of} 1.5 μm, and the sticking agent film thickness was non-uniform. Became uneven, which had a great adverse effect on the lens processing accuracy. However, in the lens sticking dish 3 according to the first embodiment of the present invention, the surface roughness of the sticking surface 3a is R _max 0.3 μm.
At m, it is about 1/5 of the conventional value, the lens holding force is made uniform, and the lens processing accuracy is improved. Table 1 is a result of comparing variations in the thickness of the lens polished by the lens sticking dish 3 and the lens sticking dish of the conventional technique 1. From Table 1, it is apparent that the processing accuracy is improved as compared with the case where the lens sticking plate of Prior Art 1 is used.

[0019]

[Table 1]

The lens-adhering plate 3 is changed in design so that
When processing a lens having a different shape and radius of curvature, the lower die 8 can be replaced and reshaped. In the re-molding, the molding accuracy and the molding ability are deteriorated when the ratio of the crystalline material generated in the amorphous phase is increased due to factors such as the variation in the temperature distribution of the mold and the deformation rate.
In the case of Zr ₅₅ Cu ₃₀ Al ₁₀ Ni ₅ of, the limit that can be formed with a shape accuracy of 5 μm or less is that the amorphous phase is 40%.
It was until the following.

When a large shape change (volume change) is required, the lens-adhering dish 3 is washed, then once melted, and then rapidly cooled by a copper mold to be made amorphous again to adjust the volume of the material. After that, it can be reshaped. Amorphization by recasting becomes difficult each time due to mixing of impurities, etc., but in the first embodiment of the present invention, it was possible up to three times.

According to the first embodiment of the present invention, a highly accurate lens sticking plate can be manufactured without variation in a supercooled liquid region of an amorphous alloy by a simple method of molding with a die. Moreover, the amorphous alloy Zr ₅₅
Cu ₃₀ Al ₁₀ Ni ₅ is stainless steel 420J2 at room temperature.
Since the strength and hardness are almost twice as high as those of the above, it is possible to reduce the deformation of the lens-attaching plate during processing and improve the lens processing accuracy. Furthermore, the shape of the sticking surface can be changed easily by simply replacing the mold and re-molding.
With a mold, it is possible to easily manufacture the required number of lens-attached dishes when needed and quickly respond to design changes. As a result, the storage space for the plate with lens attached can be minimized. Also, the lens pasting dish that cannot be reshaped due to crystallization due to remolding or drastic change in shape can be made amorphous again by remelting and quench casting with a copper mold. It is possible to contribute to resource saving as well as non-defective molding processing.

[0023]

Embodiment 2 of the Invention FIGS. 4 to 7 show Embodiment 2 of the invention, FIG. 4 is a vertical cross-sectional view of a lens-attaching plate on which a lens is attached, and FIG. FIG. 6 is a vertical cross-sectional view showing the state immediately after the molding of the lens adhering plate molding apparatus, and FIG. 7 is a vertical cross-sectional view of the molding apparatus using the modified example of the amorphous material.

In FIG. 4, the lens sticking plate 21 is composed of a plate base 21A which is attached to and detached from the rotary shaft of the polishing apparatus, and an attaching part 21B which attaches the lens 1. Dish base 2
1A can be attached to the magnetic chuck of the polishing machine,
Made of SUS420J2, which is a magnetic material, and has a mounting part 21
It has Aa, a flange 21Ab, and a central hole 21Ac. The attaching portion 21B is formed on the dish base 21A, and the amorphous alloy is made of Zr as in the first embodiment of the invention.
₅₅ Cu ₃₀ Al ₁₀ Ni ₅ is used. Further, the lens 1 is adhered to the sticking surface 21Ba of the sticking portion 21B by the thermoplastic patch 2 as in the first embodiment of the invention.

Next, a molding device for the lens adhering dish 21 will be described. As shown in FIG. 5, the molding apparatus according to the second embodiment of the present invention has the same basic structure as that of the first embodiment of the present invention, so only different members will be described and the same members will be denoted by the same reference numerals. The description is omitted. Inner step surface 26a of the upper body mold 26
Is formed so that the dish base 21A can be fitted therein. Further, the center hole 26b is formed in the center hole 2 of the dish base 21A so that the amorphous material 29 and the upper mold 22 can be fitted therein.
It is formed with the same inner diameter as 1Ac. The outer diameters of the amorphous material 29 and the upper mold 22 are formed to be slightly smaller than the inner diameters of the center hole 26b of the upper body mold 26 and the center hole 21Ac of the dish base 21A. A dish base 21A is fitted on the upper portion of the inner surface 7a of the lower body mold 7. Other configurations are the same as those of the first embodiment.

A method of manufacturing the lens attachment plate 21 will be described. First, the dish base 21A and the amorphous material 29 are loaded into the above molding apparatus, and the resistance heater 4 heats the amorphous material 29 to a supercooled liquid region. The following heating, molding conditions and molding process are the same as in Embodiment 1 of the invention, as shown in FIG. 6, as shown in FIG.
A lens-attached dish 21 consisting of and was obtained.

The lens-attached plate 2 molded in this way
No. 1 has a linear expansion coefficient of 5 × 10 ⁻⁶ and Zr ₅₅ Cu ₃₀ Al ₁₀ N.
Although it can be easily released from a cemented carbide die having a linear expansion coefficient smaller than that of i ₅ , S having a linear expansion coefficient of 16 × 10 ⁻⁶
The plate base 21A made of US420J2 and the attachment portion 21B are completely integrated in a shrink-fitted state. In addition, the ratio of the crystallinity of the sticking portion 21B after molding is 5% or less, and the shape accuracy of the sticking surface 21Ba is 5 μm with respect to the shape of the molding surface 8a of the lower mold 8, as in the first embodiment of the invention. Within, the surface roughness was R _max 0.3 μm.

A method of using the lens sticking plate 21 for lens polishing will be described. The lens 1 is attached to the attachment surface 21Ba of the lens attachment plate 21 via the adhesive agent 2. At this time, the lens 1 is fixed to the lens sticking plate 21 by sticking the lens 1 on the sticking surface 21Ba in a state where the patch 2 is heated to 80 to 100 ° C. and fluidized and cooled to room temperature. After fixing, the lens sticking plate 21 is mounted on the lens polishing apparatus, and the lens 1 is subjected to desired polishing processing. At this time, Zr ₅₅ Cu ₃₀ Al ₁₀ Ni ₅ forming the pasting portion 21B is a non-magnetic material, but the dish base 21A is formed of a magnetic material, so a magnetic chuck can be used for the polishing apparatus. After processing, peel off the lens 1 from the attachment surface 21Ba,
It can be used for lens polishing as many times as necessary.

The accuracy of the lens after the lens polishing was similar to that of the first embodiment of the invention. In addition, the lens attachment plate 21
The reshaping and reusing of the sticking portion 21B are the same as those in the first embodiment of the invention, and thus the description thereof will be omitted.

According to the second embodiment of the present invention, in addition to the effect of the first embodiment of the invention, a large shape change (volume change)
Even if it becomes necessary, the center hole of the dish base absorbs the volume change when re-molding, so except in extreme cases,
It does not need to be recast and can be reused more universally. Furthermore, since a dish base made of a magnetic material such as SUS420J2 can be integrally molded, Zr ₅₅ Cu ₃₀ Al
_{Even if} a non-magnetic amorphous alloy such as ₁₀ Ni ₅ is used,
A magnetic chuck mechanism can be adopted in the polishing apparatus, which facilitates application to an existing production system.

In the second embodiment of the present invention, a cylindrical amorphous material is used, but instead of this, as shown in FIG. 7, an amorphous material 29A having a shape close to the pasting portion 21B which is a molded product is used. Therefore, the molding time and the molding pressure can be reduced, and damage to the mold can be reduced. Further, since the crystallization of the amorphous phase due to the molding can be suppressed, the number of times of polishing and the remolding can be performed more.

[0032]

Embodiment 3 of the Invention FIGS. 8 to 9 show Embodiment 3 of the invention, FIG. 8 is a longitudinal sectional view showing a state immediately before molding of a molding apparatus for a lens-attaching plate, and FIG. It is a longitudinal cross-sectional view showing a state immediately after molding of the molding device. The lens sticking plate of the third embodiment of the present invention is the same as the lens sticking plate 3 shown in FIG. 1 of the first embodiment of the invention, but the lens sticking plate 33 is used for distinction. The third embodiment of the present invention is different from the first embodiment of the invention in that it is made of an amorphous material and a lens is used together with the lower mold. Others are the same as those of the first embodiment of the invention, and therefore, the same members are designated by the same reference numerals and the description thereof will be omitted.

A molding device for the lens attachment plate 33 will be described. In FIG. 8, the amorphous material 31 is Zr.
₆₅ Al _7.5 Cu _27.5 (subscript indicates atomic%) was used. Zr ₆₅ Al _7.5 Cu _27.5 is normal temperature to 350 ℃
Has a tensile strength of 1.2 GPa, a hardness of Hv470, and a linear expansion coefficient of 9 × 10 ⁻⁶ , and has sufficient strength, hardness, and an appropriate linear expansion coefficient as a lens sticking dish. further,
About 1 of Zr ₆₅ Al _7.5 Cu _{27 .5} is three hundred and seventy to four hundred seventy ° C.
It has a wide supercooled liquid region of 00 ° C, and in this supercooled liquid region, it shows viscosity as a liquid of about 10 ¹⁰ Pa · s,
Molding is possible with a pressure of about 0 MPa.

As shown in FIG. 8, the molding surface 32 of the lower mold 32.
The a is formed in a conical surface so as to come into line contact with the non-sticking surface 1b of the lens 1. The lens 1 placed on the molding surface 32a has the affixing surface 1a facing upward and the amorphous material 3
Supports 1. Other structures are similar to those of the first embodiment of the invention.

Next, a method of manufacturing the lens attachment plate 33 will be described. First, the amorphous material 31 is loaded into the above molding apparatus, and the amorphous material 31 is set by the resistance heater 4.
To the supercooled liquid zone. To prevent the amorphous material 31 from crystallizing, the heating temperature is 470 ° C.
In the supercooled liquid region having a glass transition temperature of 370 ° C. or higher,
It is desirable to heat for as short a time as possible. In the third embodiment of the present invention, from room temperature to 400 ± 5 ° C., about 200
The temperature was raised in sec. After raising the temperature, punch 10
Is pressed to mold the amorphous material 31 in the supercooled liquid state in the mold.

After molding, pressure is applied for a certain period of time, heating by the resistance heater 4 is stopped, and an inert gas such as nitrogen is blown onto the mold to cool it. When the die temperature reaches a temperature 20 ° C. lower than the glass transition temperature of the amorphous material 31 (350 ° C.), the pressing by the punch is released. The molding pressure by the punch was 20 MPa and the pressing time was 50 sec. In this way, the lens attachment plate 33 was obtained as shown in FIG. The molding pressure and the molding time can be appropriately adjusted, but if the pressure is 5 MPa or less, the molding time is increased, and holding the supercooled liquid region for 1000 sec or more may cause the amorphous material 31 to crystallize, which may make molding or remolding impossible. is there.

The lens attachment plate 33 thus formed is
The shape accuracy was finished to about 6 μm with respect to the shape of the lens 1 without sticking to the lens 1. The shape transfer accuracy is lower than that of the first or second embodiment of the invention because the lens 1 has a lower rigidity at high temperature than that of the cemented carbide. Since the shape accuracy of the mold is usually 5 μm or less, the shape error from the lens actually attached is 8 μm. In addition, after cutting the molded lens-adhering dish 3 and polishing the cross-section, etching with hydrofluoric acid was performed and the structure was observed to be about 5%.
Was observed, but it did not affect the molding accuracy.

The lens sticking plate 33 can be used in the same manner as in the first embodiment of the invention. Further, the lens sticking plate 33 can be reshaped by exchanging the lens 1 when processing lenses having different shapes and radii of curvature due to design changes or the like. In the re-molding, the molding accuracy and the molding ability are deteriorated when the ratio of the crystalline material generated in the amorphous phase is increased due to the factors such as the variation in the temperature distribution of the mold and the deformation rate. However, the Zr of the third embodiment of the present invention is ₆₅ A
In the case of l _7.5 Cu _27.5 , as in the first and second embodiments of the invention, the limit of shape accuracy of 5 μm or less was that the amorphous phase was 40% or less.

According to the third embodiment of the present invention, in addition to the effect of the first embodiment of the present invention, the lens itself to be processed can be used as a mold even if the lower mold is not specially manufactured according to the curvature radius of the lens. Therefore, it is possible to more easily manufacture the lens-attached dish, so that it is possible to easily and promptly respond to a design change. Further, since the processing error of the mold is not included in the molding, it is possible to obtain a highly accurate lens sticking dish that is closer to the lens shape, and the distortion of the lens during polishing can be minimized.

In the third embodiment of the present invention, an example of manufacturing a lens sticking plate made of only an amorphous alloy is shown. However, a lens sticking plate having a plate base and a sticking part as in the second embodiment of the invention is used. Also, it is possible to apply the third embodiment of the present invention to the forming of the attachment portion and form the lens directly using the lens.

In the embodiments of each invention of the present invention, the lens adhering plate to which the biconvex lens is adhered is explained as an example, but the adhering plates such as the biconcave lens and the meniscus lens are made of an amorphous alloy having a supercooled liquid region. It goes without saying that it can be molded. In the embodiments of each invention, Zr
Although the amorphous alloy having the supercooled liquid region of the system is used, the amorphous alloy may be exchanged and used between the embodiments of the inventions, and the amorphous alloy having another supercooled liquid region, for example, La. ₅₅ Al ₂₅ Ni ₂₀ (Tg
= 200 ° C., Tx = 275 ° C.) and the like can also be used.

[0042]

According to the first aspect of the present invention, the amorphous alloy heated in the supercooled liquid region is plastically deformed at a low pressure of about several MPa due to a rapid decrease in viscosity, and has high rigidity and high accuracy. Since it becomes a plate with a lens attached, the lens can be polished with high precision. According to the second or fourth aspect of the invention, since the lens-attaching plate having a highly accurate mold shape can be easily manufactured, it is possible to stabilize the highly accurate processing of the lens. According to the invention of claim 3 or 4,
Since it is possible to extremely easily manufacture the lens-attaching plate that conforms to the shape of the lens and the shape of the mold, it is possible to stabilize the high-precision processing of the lens and quickly respond to design changes. According to the invention of claim 4, in addition to the above effect, since an aged lens-adhering plate is reproduced as a material, it is possible to contribute to resource saving.

[Brief description of drawings]

FIG. 1 is a vertical cross-sectional view of a lens-attaching tray on which a lens according to a first embodiment of the invention is attached.

FIG. 2 is a vertical cross-sectional view showing a state immediately before molding of the lens-applied dish forming apparatus according to the first embodiment of the present invention.

FIG. 3 is a vertical cross-sectional view showing a state immediately after molding of the molding device for a plate with lens attached according to the first embodiment of the present invention.

FIG. 4 is a vertical cross-sectional view of a lens-attaching dish to which a lens of Embodiment 2 of the invention is attached.

FIG. 5 is a vertical cross-sectional view showing a state immediately before molding of the lens-applying plate molding device according to the second embodiment of the invention.

FIG. 6 is a vertical cross-sectional view showing a state immediately after molding of the lens-applying plate molding device according to the second embodiment of the invention.

FIG. 7 is a vertical cross-sectional view of a molding apparatus using a modification of the amorphous material according to the second embodiment of the invention.

FIG. 8 is a vertical cross-sectional view showing a state immediately before molding of the lens-applying plate molding apparatus according to the third embodiment of the present invention.

FIG. 9 is a vertical cross-sectional view showing a state immediately after molding of the lens-applying plate molding device according to the third embodiment of the invention.

FIG. 10 is a configuration diagram of a plate with a lens attached according to the related art 1.

FIG. 11 is a vertical cross-sectional view of a lens-attaching dish to which a lens of Prior Art 2 is attached.

[Explanation of symbols]

 1 lens 2 patch 3 lens sticking plate 3a sticking surface 3b mounting part 3c flange

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Seiichi Hata 2-43-2, Hatagaya, Shibuya-ku, Tokyo Inside Olympus Optical Co., Ltd. (72) Inventor Akihisa Inoue 35, Kawauchi Motokura, Sendai-shi, Miyagi Prefecture Kawauchi Housing 11-806

Claims (4)

[Claims] 1. A lens sticking plate, wherein at least a part where a lens is stuck is made of an amorphous alloy having a supercooled liquid region. 2. A raw material made of an amorphous alloy having a supercooled liquid region is heated to the supercooled liquid region, and at least a portion to which a lens is attached is pressed by a pair of molds to form a desired shape. How to make a plate with lens attached. 3. A raw material made of an amorphous alloy having a supercooled liquid region is heated to a supercooled liquid region, and at least a portion to which the lens is attached is pressed by the lens and a mold to form a desired shape. How to make a plate with a lens attached. 4. The production of a lens-attached dish according to claim 2, wherein the amorphous alloy having a supercooled liquid region used for the lens-attached dish is melted and recast by liquid quench casting is used. Method.