JPH09277104A - Cutting tool made of surface-coated cemented carbide having hard coating layer excellent in inter-layer adhesiveness - Google Patents

Cutting tool made of surface-coated cemented carbide having hard coating layer excellent in inter-layer adhesiveness

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Publication number
JPH09277104A
JPH09277104A JP9396896A JP9396896A JPH09277104A JP H09277104 A JPH09277104 A JP H09277104A JP 9396896 A JP9396896 A JP 9396896A JP 9396896 A JP9396896 A JP 9396896A JP H09277104 A JPH09277104 A JP H09277104A
Authority
JP
Japan
Prior art keywords
layer
cemented carbide
hard coating
cutting tool
coating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9396896A
Other languages
Japanese (ja)
Inventor
Toshiaki Ueda
稔晃 植田
Keiji Nakamura
惠滋 中村
Hisashi Yamada
尚志 山田
Takatoshi Ooshika
高歳 大鹿
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP9396896A priority Critical patent/JPH09277104A/en
Publication of JPH09277104A publication Critical patent/JPH09277104A/en
Pending legal-status Critical Current

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  • Chemical Vapour Deposition (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a cutting tool made of a surface-coated cemented carbide having a hard coating layer excellent in inter-layer adhesiveness. SOLUTION: This cutting tool made of a surface-coated cemented carbide chemically deposited and/or physically deposited with a hard coating layer containing an Al2 O3 compound layer mainly made of Al2 O3 on the surface of a WC group cemented carbide substrate at the average layer thickness of 3-20μm. The Al2 O3 compound layer contains Zr and/or Hf of 0.5-10wt.% and N of 0.001-0.1wt.%.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】この発明は、硬質被覆層を構
成する酸化アルミニウム(以下、Al23 で示す)を
主成分とするAl2 3 系化合物層がすぐれた層間密着
性を有し、したがって例えば鋼や鋳鉄などの高速切削に
用いた場合に、切刃に欠けやチッピング(微小欠け)の
発生なく、長期に亘ってすぐれた切削性能を発揮する表
面被覆超硬合金製切削工具(以下、被覆超硬工具とい
う)に関するものである。
TECHNICAL FIELD The present invention relates to an Al 2 O 3 -based compound layer containing aluminum oxide (hereinafter referred to as Al 2 O 3 ) as a main component which constitutes a hard coating layer and has excellent interlayer adhesion. Therefore, for example, when used for high-speed cutting of steel or cast iron, a cutting tool made of surface-coated cemented carbide that exhibits excellent cutting performance for a long period of time without chipping or chipping (fine chipping) in the cutting edge ( Hereinafter, it will be referred to as a coated cemented carbide tool).

【0002】[0002]

【従来の技術】従来、炭化タングステン基超硬合金基体
(以下、超硬基体という)の表面に、Al2 3 層を含
む硬質被覆層、例えば、Tiの炭化物(以下、TiCで
示す)層、窒化物(以下、同じくTiNで示す)層、炭
窒化物(以下、TiCNで示す)層、酸化物(以下、T
iO2 で示す)層、炭酸化物(以下、TiCOで示す)
層、窒酸化物(以下、TiNOで示す)層、および炭窒
酸化物(以下、TiCNOで示し、かつこれらを総称し
てTi炭・窒・酸化物と云う)層のうちの1種または2
種以上と、Al23 層とからなる硬質被覆層を3〜2
0μmの平均層厚で化学蒸着および/または物理蒸着し
てなる被覆超硬工具が知られている。また、特に上記被
覆超硬工具の硬質被覆層を構成するAl23 層の形成
が、反応ガスとして、容量%で、三塩化アルミニウム
(以下、AlCl3 で示す):1〜20%、二酸化炭素
(以下、CO2 で示す):0.5〜30%、[必要に応
じて一酸化炭素(CO)または塩化水素(HCl):1
〜30%]、水素:残り、からなる組成を有する水素系
反応ガスを用い、反応温度:950〜1100℃、雰囲
気圧力:20〜200torr、の条件で形成されるこ
とも知られている。
2. Description of the Related Art Conventionally, on a surface of a tungsten carbide based cemented carbide substrate (hereinafter referred to as a cemented carbide substrate), a hard coating layer containing an Al 2 O 3 layer, for example, a Ti carbide (hereinafter referred to as TiC) layer. , Nitride (hereinafter also referred to as TiN) layer, carbonitride (hereinafter referred to as TiCN) layer, oxide (hereinafter referred to as T)
iO 2 ) layer, carbonate (hereinafter referred to as TiCO)
One or two of a layer, a nitric oxide (hereinafter, referred to as TiNO) layer, and a carbonitride oxide (hereinafter, referred to as TiCNO, and collectively referred to as Ti carbon / nitrogen / oxide) layer.
3 to 2 hard coating layer consisting of Al 2 O 3 layer and above
Coated carbide tools made by chemical vapor deposition and / or physical vapor deposition with an average layer thickness of 0 μm are known. Further, particularly, the formation of the Al 2 O 3 layer constituting the hard coating layer of the above-mentioned coated cemented carbide tool is carried out by reacting gas with a volume% of aluminum trichloride (hereinafter referred to as AlCl 3 ): 1 to 20%, dioxide carbon (hereinafter, indicated by CO 2): 0.5~30%, [CO optionally (CO) or hydrogen chloride (HCl): 1
.About.30%], hydrogen: remainder, and a hydrogen-based reaction gas having a composition of reaction temperature: 950 to 1100.degree. C. and atmospheric pressure: 20 to 200 torr.

【0003】[0003]

【発明が解決しようとする課題】一方、近年の切削装置
の高性能化および高出力化はめざましく、かつ省力化に
対する要求も強く、これに伴い、切削加工は高速化の傾
向にあるが、上記の従来被覆超硬工具においては、これ
を構成する硬質被覆層のうち、特にAl2 3 層は耐酸
化性と熱的安定性にすぐれ、さらに高硬度を有するが、
他の構成層である、例えばTi炭・窒・酸化物層との層
間密着性が不十分なために、例えば鋼や鋳鉄などの高速
切削に用いると、切刃に欠けやチッピングが発生し易
く、これが原因で比較的短時間で使用寿命に至るのが現
状である。
On the other hand, in recent years, high performance and high output of a cutting device have been remarkable, and there is a strong demand for labor saving. With this, cutting tends to be performed at a high speed. In the conventional coated cemented carbide tool, among the hard coating layers constituting the same, the Al 2 O 3 layer is particularly excellent in oxidation resistance and thermal stability, and has higher hardness,
When the material is used for high-speed cutting of steel or cast iron, the cutting edge is likely to be chipped or chipped due to insufficient interlayer adhesion with other constituent layers, such as Ti carbon, nitrogen, and oxide layers. Due to this, it is the current situation that the service life is reached in a relatively short time.

【0004】[0004]

【課題を解決するための手段】そこで、本発明者等は、
上述のような観点から、被覆超硬工具の硬質被覆層を構
成するAl23 層に着目し、これの他の構成層に対す
る層間密着性を向上すべく研究を行った結果、化学蒸着
法および/または物理蒸着法にて、反応ガスとして、上
記の従来水素系反応ガスに代わって、容量%で、基本的
に、AlCl3 :1〜10%、水素(以下、H2 で示
す):6〜15%、窒素酸化物(以下、NOで示す):
16〜30%、四塩化ジルコニウム(以下、ZrCl4
で示す)および/または四塩化ハフニウム(以下、Hf
Cl4 で示す):0.1〜0.6%、例えばArやHe
などの不活性ガス:残り、からなる組成を有する不活性
ガス系反応ガスを用い、反応温度および雰囲気圧力は以
下の条件、すなわち、反応温度:850〜1100℃、
雰囲気圧力:20〜200torr、の条件で層形成を
行うと、形成された層中にZrおよび/またはHfと、
Nが含有するようになり、このZrおよび/またはHf
と、Nの含有割合を、主に上記不活性ガス系反応ガスの
組成および反応雰囲気を調整することにより、重量%
で、Zrおよび/またはHf:0.5〜10%、N:
0.001〜0.1%となるようにすると、この結果の
Al2 3 を主成分とし、かつZrおよび/またはHf
と、Nを含有するAl2 3 系化合物層は、硬質被覆層
を構成する他の層、例えば上記Ti炭・窒・酸化物層に
対してすぐれた密着性を示し、さらにAl2 3 を主成
分とするので、Al2 3 の具備する特性、すなわち、
すぐれた耐酸化性と熱的安定性、および高硬度を有し、
したがって、このAl2 3 系化合物層を含む硬質被覆
層を形成した被覆超硬工具は、例えば鋼や鋳鉄などの高
速切削に用いた場合にも切刃に欠けやチッピングの発生
なく、長期に亘ってすぐれた切削性能を発揮するという
研究結果を得たのである。
Means for Solving the Problems Accordingly, the present inventors have
From the above viewpoint, the hard coating layer of the coated cemented carbide tool is constructed.
Al formedTwo OThree Focus on layers and compare them to other constituent layers
As a result of conducting research to improve interlayer adhesion,
Method and / or physical vapor deposition method
Instead of the conventional hydrogen-based reaction gas described above, the
AlClThree 1 to 10%, hydrogen (hereinafter, HTwo Indicated by
): 6 to 15%, nitrogen oxides (hereinafter referred to as NO):
16-30%, zirconium tetrachloride (hereinafter ZrClFour
And / or hafnium tetrachloride (hereinafter referred to as Hf)
ClFour:): 0.1 to 0.6%, for example, Ar or He
Inert gas having a composition consisting of:
The reaction temperature and atmospheric pressure are
Under the following conditions, that is, reaction temperature: 850 to 1100 ° C,
Layer formation under conditions of atmospheric pressure: 20 to 200 torr
When done, Zr and / or Hf in the formed layer,
N is contained, and Zr and / or Hf
And the content ratio of N mainly in the above-mentioned inert gas type reaction gas
Weight% by adjusting composition and reaction atmosphere
And Zr and / or Hf: 0.5 to 10%, N:
If it becomes 0.001-0.1%,
AlTwoOThreeAnd Zr and / or Hf
And Al containing NTwoOThreeThe system compound layer is a hard coating layer
To other layers that make up, such as the Ti carbon / nitride / oxide layer
Shows excellent adhesion to Al andTwoO ThreeThe main
Minutes, so AlTwoOThreeHas the following characteristics:
It has excellent oxidation resistance, thermal stability, and high hardness,
Therefore, this AlTwoOThreeHard coating including a compound layer
Layered coated carbide tools can be used for high-grade materials such as steel and cast iron.
When used for fast cutting, chipping and chipping occur on the cutting edge.
It has excellent cutting performance over a long period of time.
I got the research results.

【0005】この発明は、上記の研究結果に基づいてな
されたものであって、超硬基体の表面に、Al2 3
主成分とするAl2 3 系化合物層を含む硬質被覆層、
例えば、上記Ti炭・窒・酸化物層のうちの1種以上
と、前記Al23 系化合物層とからなる硬質被覆層を
3〜20μmの平均層厚で化学蒸着および/または物理
蒸着してなる被覆超硬工具にして、前記Al2 3 系化
合物層が、重量%で、Zrおよび/またはHf:0.5
〜10%、N:0.001〜0.1%、を含有すること
により、硬質被覆層の他の構成層に対する密着性を向上
させ、もって例えば鋼や鋳鉄などの高速切削ですぐれた
耐チッピング性を発揮するようにした被覆超硬工具に特
徴を有するものである。
The present invention was made based on the above research results, and a hard coating layer containing an Al 2 O 3 based compound layer containing Al 2 O 3 as a main component on the surface of a superhard substrate,
For example, a hard coating layer composed of one or more of the Ti carbon / nitride / oxide layers and the Al 2 O 3 based compound layer is chemically and / or physically vapor-deposited with an average layer thickness of 3 to 20 μm. In the coated cemented carbide tool, the Al 2 O 3 -based compound layer is contained in a weight percentage of Zr and / or Hf: 0.5.
10%, N: 0.001 to 0.1%, improves the adhesion of the hard coating layer to other constituent layers, and thus has excellent chipping resistance in high-speed cutting of, for example, steel or cast iron. It is characterized by a coated cemented carbide tool that exerts its properties.

【0006】なお、この発明の被覆超硬工具の硬質被覆
層を構成するAl2 3 系化合物層におけるZrおよび
/またはHfと、Nは、上記の通り、これらの成分が共
存して他の構成層、例えばTi炭・窒・酸化物層に対す
る密着性を向上させる作用効果を発揮するものであり、
したがってこれらの成分のうち、Zrおよび/またはH
fの含有量が0.5%未満でも、またNの含有量が0.
001%未満でも所望のすぐれた層間密着性を確保する
ことができず、一方これら成分のうちのZrおよび/ま
たはHfの含有量が10%を越えても、またNの含有量
が0.1%を越えても、Al2 3 系化合物層のもつ特
性が損なわれるようになることから、その含有量を、Z
rおよび/またはHf:0.5〜10%、N:0.00
1〜0.1%と定めた。また、硬質被覆層の平均層厚を
3〜20μmとしたのは、その層厚が3μm未満では所
望のすぐれた耐摩耗性を確保することができず、一方そ
の層厚が20μmを越えると、耐チッピング性が低下す
るようになるという理由によるものである。
[0006] As described above, Zr and / or Hf and N in the Al 2 O 3 compound layer constituting the hard coating layer of the coated cemented carbide tool of the present invention coexist with other components as described above. It has the effect of improving the adhesion to the constituent layers, for example, Ti carbon, nitrogen, and oxide layers,
Therefore, among these components, Zr and / or H
Even if the content of f is less than 0.5%, the content of N is 0.
If it is less than 001%, the desired excellent interlayer adhesion cannot be ensured. On the other hand, if the content of Zr and / or Hf in these components exceeds 10%, the content of N is 0.1% or less. %, The characteristics of the Al 2 O 3 -based compound layer will be impaired.
r and / or Hf: 0.5 to 10%, N: 0.00
It was set at 1 to 0.1%. Further, the average layer thickness of the hard coating layer is set to 3 to 20 μm, because the desired excellent wear resistance cannot be secured when the layer thickness is less than 3 μm, and when the layer thickness exceeds 20 μm, This is because the chipping resistance is lowered.

【0007】[0007]

【発明の実施の形態】つぎに、この発明の被覆超硬工具
を実施例により具体的に説明する。原料粉末として、平
均粒径:2.8μmを有する中粒WC粉末、同4.9μ
mの粗粒WC粉末、同1.5μmの(Ti,W)C(重
量比で、以下同じ、TiC/WC=30/70)粉末、
同1.2μmの(Ti,W)CN(TiC/TiN/W
C=24/20/56)粉末、同1.2μmの(Ta,
Nb)C(TaC/NbC=90/10)粉末、および
同1.1μmのCo粉末を用意し、これら原料粉末を表
1に示される配合組成に配合し、ボールミルで72時間
湿式混合し、乾燥した後、ISO・CNMG12040
8(超硬基体A〜D用)および同SEEN42AFTN
1(超硬基体E用)に定める形状の圧粉体にプレス成形
し、この圧粉体を同じく表1に示される条件で真空焼結
することにより超硬基体A〜Eをそれぞれ製造した。さ
らに、上記超硬基体Bに対して、100torrのCH
4 ガス雰囲気中、温度:1400℃に1時間保持後、徐
冷の滲炭処理を施し、処理後、超硬基体表面に付着する
カーボンとCoを酸およびバレル研磨で除去することに
より、表面から11μmの位置で最大Co含有量:1
5.9重量%、深さ:42μmのCo富化帯域を基体表
面部に形成した。また、上記超硬基体AおよびDには、
焼結したままで、表面部に表面から17μmの位置で最
大Co含有量:9.1重量%、深さ:23μmのCo富
化帯域が形成されており、残りの超硬基体CおよびEに
は、前記Co富化帯域の形成がなく、全体的に均質な組
織をもつものであった。なお、表1には、上記超硬基体
A〜Eの内部硬さ(ロックウエル硬さAスケール)をそ
れぞれ示した。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the coated carbide tool of the present invention will be specifically described with reference to examples. Medium-sized WC powder having an average particle diameter of 2.8 μm, 4.9 μm as the raw material powder
m of coarse WC powder, 1.5 μm of (Ti, W) C (the same in weight ratio, hereinafter, TiC / WC = 30/70) powder,
1.2 μm (Ti, W) CN (TiC / TiN / W
C = 24/20/56) powder, 1.2 μm (Ta,
Nb) C (TaC / NbC = 90/10) powder and Co powder of 1.1 μm were prepared, and these raw material powders were compounded in the composition shown in Table 1, wet-mixed for 72 hours in a ball mill, and dried. After that, ISO / CNMG12040
8 (for carbide substrates A to D) and SEEN42AFTN
Press molded into a green compact having the shape defined in No. 1 (for the super hard substrate E), and the green compact was vacuum-sintered under the conditions shown in Table 1 to produce super hard substrates A to E, respectively. Further, with respect to the carbide substrate B, 100 torr CH
After maintaining at a temperature of 1400 ° C. for 1 hour in a 4 gas atmosphere, a gradual cooling carburizing treatment is performed, and after the treatment, carbon and Co adhering to the surface of the cemented carbide substrate are removed by acid and barrel polishing. Maximum Co content at 11 μm position: 1
A Co-rich zone of 5.9 wt% and depth: 42 μm was formed on the surface of the substrate. Further, the above-mentioned cemented carbide substrates A and D include
As-sintered, a Co-rich zone having a maximum Co content of 9.1 wt% and a depth of 23 μm was formed on the surface at a position of 17 μm from the surface, and the remaining superhard substrates C and E were formed. Had no overall formation of the Co-enriched zone and had a homogeneous structure throughout. Table 1 shows the internal hardness (Rockwell hardness A scale) of each of the carbide substrates A to E.

【0008】ついで、これらの超硬基体A〜Eの表面
に、ホーニングを施した状態で、通常の化学蒸着装置を
用い、表2(表中のl−TiCNは特開平6−8010
号公報に記載される縦長成長結晶組織をもつものであ
り、また同p−TiCNは通常の粒状結晶組織をもつも
のである)および表3[表中のAl2 3 (a)〜
(i)はAl2 3 系化合物層を示し、Al2
3 (j)はAl2 3 層を示す。これは表4、5におい
ても同じ]に示される条件にて、表4、5に示される組
成および目標層厚(切刃の逃げ面摩耗幅での層厚)の硬
質被覆層を形成することにより本発明被覆超硬工具1〜
13および従来被覆超硬工具1〜10をそれぞれ製造し
た。
Then, the surfaces of these super-hard substrates A to E are honed, and a conventional chemical vapor deposition apparatus is used. Table 1 (1-TiCN in the table corresponds to JP-A-6-8010
Which has a vertically elongated crystal structure, and the p-TiCN has a normal granular crystal structure) and Table 3 [Al 2 O 3 (a)-
(I) represents the Al 2 O 3 compound layer, Al 2 O
3 (j) shows an Al 2 O 3 layer. The same applies to Tables 4 and 5] under the conditions shown in Tables 4 and 5 to form a hard coating layer having the composition and target layer thickness (layer thickness at the flank wear width of the cutting edge) shown in Tables 4 and 5. According to the present invention coated carbide tool 1
13 and conventional coated carbide tools 1 to 10 were manufactured.

【0009】この結果得られた上記の各種被覆超硬工具
について、これを構成する硬質被覆層のうちのAl2
3 系化合物層およびAl2 3 層の層間密着性を評価す
る目的で、本発明被覆超硬工具1〜4および従来被覆被
覆超硬工具1,2については、被削材:JIS・FCD
450の丸棒、切削速度:300m/min.、切込
み:2mm、送り:0.4mm/rev.、切削時間:
15分、の条件でダクタイル鋳鉄の乾式連続切削試験を
行い、切刃の逃げ面摩耗幅を測定した。
Regarding the above-mentioned various coated carbide tools obtained as a result, Al 2 O in the hard coating layers constituting the
For the purpose of evaluating the interlayer adhesion between the 3 type compound layer and the Al 2 O 3 layer, for the coated carbide tools 1 to 4 of the present invention and the conventional coated carbide tools 1 and 2, the work material is JIS / FCD.
450 round bar, cutting speed: 300 m / min. , Depth of cut: 2 mm, feed: 0.4 mm / rev. , Cutting time:
A dry continuous cutting test of ductile cast iron was performed under the condition of 15 minutes, and the flank wear width of the cutting edge was measured.

【0010】また、同じく本発明被覆超硬工具5、6お
よび従来被覆超硬工具3、4については、被削材:JI
S・SNCM439の丸棒、切削速度:300m/mi
n.、切込み:2mm.、送り:0.4mm/re
v.、切削時間:15分、の条件で合金鋼の乾式連続切
削試験を行い、切刃の逃げ面摩耗幅を測定した。
Similarly, for the coated carbide tools 5 and 6 of the present invention and the conventional coated carbide tools 3 and 4, the work material is JI.
S ・ SNCM439 round bar, cutting speed: 300m / mi
n. , Cut: 2 mm. , Feed: 0.4 mm / re
v. , Cutting time: 15 minutes, the dry continuous cutting test of the alloy steel was performed, and the flank wear width of the cutting edge was measured.

【0011】同じく本発明被覆超硬工具7、8および従
来被覆超硬工具5、6については、被削材:JIS・S
45Cの丸棒、切削速度:300m/min.、切込
み:2mm.、送り:0.4mm/rev.、切削時
間:15分、の条件で炭素鋼の乾式連続切削試験を行
い、切刃の逃げ面摩耗幅を測定した。
Similarly, for the coated carbide tools 7 and 8 of the present invention and the conventional coated carbide tools 5 and 6, the work material is JIS S.
45C round bar, cutting speed: 300 m / min. , Cut: 2 mm. , Feed: 0.4 mm / rev. , Cutting time: 15 minutes, a dry continuous cutting test of carbon steel was performed, and the flank wear width of the cutting edge was measured.

【0012】同じく本発明被覆超硬工具9〜11および
従来被覆超硬工具7,8については、被削材:JIS・
FC300の丸棒、切削速度:350m/min.、切
込み:2mm.、送り:0.4mm/rev.、切削時
間:15分、の条件で鋳鉄の乾式連続切削試験を行い、
切刃の逃げ面摩耗幅を測定した。
Similarly, for the coated carbide tools 9 to 11 of the present invention and the conventional coated carbide tools 7 and 8, the work material is JIS:
FC300 round bar, cutting speed: 350 m / min. , Cut: 2 mm. , Feed: 0.4 mm / rev. , Cutting time: 15 minutes, a dry continuous cutting test of cast iron is performed,
The flank wear width of the cutting blade was measured.

【0013】また、本発明被覆超硬工具12、13およ
び従来被覆超硬工具9、10については、被削材:幅1
00mm×長さ500mmの寸法をもったJIS・SC
M440の角材、使用条件:直径125mmのカッター
に単刃取り付け、回転数:510r.p.m.、切削速
度:200m/min.、切込み:2mm.、送り:
0.15mm/刃、切削時間:3パス(1パスの切削時
間:7.1分)、の条件で合金鋼の乾式フライス切削
(断続切削)試験を行い、切刃の逃げ面摩耗幅を測定し
た。これらの測定結果を表6に示した。
For the coated cemented carbide tools 12 and 13 of the present invention and the conventional coated cemented carbide tools 9 and 10, the work material: width 1
JIS / SC with dimensions of 00 mm x 500 mm length
Square bar of M440, usage condition: single blade attached to a cutter with a diameter of 125 mm, rotation speed: 510 r. p. m. , Cutting speed: 200 m / min. , Cut: 2 mm. , Feed:
Dry milling (intermittent cutting) test of alloy steel is performed under the conditions of 0.15 mm / blade, cutting time: 3 passes (1 pass cutting time: 7.1 minutes), and the flank wear width of the cutting edge is measured. did. Table 6 shows the measurement results.

【0014】[0014]

【表1】 [Table 1]

【0015】[0015]

【表2】 [Table 2]

【0016】[0016]

【表3】 [Table 3]

【0017】[0017]

【表4】 [Table 4]

【0018】[0018]

【表5】 [Table 5]

【0019】[0019]

【表6】 [Table 6]

【0020】[0020]

【発明の効果】表6に示される結果から、いずれも不活
性ガス系反応ガスを用いて、積極的にZrおよび/また
はHfと、Nを含有させたAl2 3 系化合物層を含む
硬質被覆層を形成してなる本発明被覆超硬工具1〜13
は、前記Al2 3 系化合物層が他の構成層であるTi
炭・窒・酸化物層に対してすぐれた層間密着性を有する
ことから、切刃に欠けやチッピングの発生がなく、かつ
前記Al2 3 系化合物層がAl2 3 と同等のすぐれ
た耐酸化性と熱的安定性、および高硬度を有することと
相まって、鋼および鋳鉄の高速切削ですぐれた耐摩耗性
を発揮するのに対して、水素系反応ガスを用いて形成さ
れたAl2 3 層が硬質被覆層を構成する従来被覆超硬
工具1〜10においては、Al2 3 層のTi炭・窒・
酸化物層に対する層間密着性が不十分なため、切刃に欠
けやチッピングが発生し、比較的短時間で使用寿命に至
ることが明らかである。上述のように、この発明の被覆
超硬工具は、これの硬質被覆層を構成するAl 2 3
化合物層が他の構成層である、例えばTi炭・窒・酸化
物層などに対してすぐれた密着性を有するので、特にす
ぐれた層間密着性が要求される、例えば鋼や鋳鉄などの
高速切削に用いた場合にも、切刃に欠けやチッピングの
発生なく、すぐれた切削性能を長期に亘って発揮し、切
削加工の高速化および高性能化に十分に対応でき、かつ
省力化にも大いに寄与するものである。
From the results shown in Table 6, the results are inactive.
Zr and / or positively by using a reactive gas based reaction gas
Is Hf and Al containing NTwoOThreeIncluding system compound layer
The coated carbide tools 1 to 13 of the present invention formed by forming a hard coating layer
Is the AlTwoOThreeTi whose compound layer is another constituent layer
Has excellent interlayer adhesion to carbon / nitride / oxide layers
Therefore, there is no chipping or chipping on the cutting edge, and
The AlTwoOThreeAl-based compound layerTwoOThreeAs good as
It has excellent oxidation resistance, thermal stability, and high hardness.
Combined with excellent wear resistance in high speed cutting of steel and cast iron
In contrast, it is formed using a hydrogen-based reaction gas.
AlTwoOThreeConventional coated carbide whose layer constitutes a hard coating layer
In tools 1-10, AlTwoOThreeLayer of Ti charcoal / nitrogen /
Due to insufficient interlayer adhesion to the oxide layer, the cutting edge is
Injuries and chipping occur, leading to a relatively short service life.
It is clear that As mentioned above, the coating of this invention
The cemented carbide tool is made of Al that constitutes the hard coating layer of this. TwoOThreesystem
The compound layer is another constituent layer, such as Ti charcoal / nitrogen / oxidation
Since it has excellent adhesion to material layers, etc.
Delicate interlayer adhesion is required, such as steel and cast iron
Even when used for high-speed cutting, the cutting edge is not chipped or chipped.
It produces excellent cutting performance for a long time without
Sufficiently supports high-speed machining and high performance, and
It also greatly contributes to labor saving.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 大鹿 高歳 埼玉県大宮市北袋町1−297 三菱マテリ アル株式会社総合研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Takatoshi Oshia 1-297 Kitabukuro-cho, Omiya-shi, Saitama Mitsubishi Material Co., Ltd.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 炭化タングステン基超硬合金基体の表面
に、酸化アルミニウムを主成分とする酸化アルミニウム
系化合物層を含む硬質被覆層を3〜20μmの平均層厚
で化学蒸着および/または物理蒸着してなる表面被覆超
硬合金製切削工具にして、前記酸化アルミニウム系化合
物層が、重量%で、 Zrおよび/またはHf:0.5〜10%、 N:0.001〜0.1%、 を含有することを特徴とする硬質被覆層がすぐれた層間
密着性を有する表面被覆超硬合金製切削工具。
1. A hard coating layer containing an aluminum oxide-based compound layer containing aluminum oxide as a main component is chemically and / or physically deposited on the surface of a tungsten carbide-based cemented carbide substrate with an average layer thickness of 3 to 20 μm. A surface-coated cemented carbide cutting tool comprising the following: the aluminum oxide-based compound layer, in% by weight, Zr and / or Hf: 0.5 to 10%, N: 0.001 to 0.1%, A surface-coated cemented carbide cutting tool having an excellent interlaminar adhesion with a hard coating layer characterized by containing.
【請求項2】 炭化タングステン基超硬合金基体の表面
に、Tiの炭化物層、窒化物層、炭窒化物層、酸化物
層、炭酸化物層、窒酸化物層、および炭窒酸化物層のう
ちの1種または2種以上と、酸化アルミニウムを主成分
とする酸化アルミニウム系化合物層とからなる硬質被覆
層を3〜20μmの平均層厚で化学蒸着および/または
物理蒸着してなる表面被覆超硬合金製切削工具にして、
前記酸化アルミニウム系化合物層が、重量%で、 Zrおよび/またはHf:0.5〜10%、 N:0.001〜0.1%、 を含有することを特徴とする硬質被覆層がすぐれた層間
密着性を有する表面被覆超硬合金製切削工具。
2. A Ti carbide layer, a nitride layer, a carbonitride layer, an oxide layer, a carbonate layer, a oxynitride layer, and a oxycarbonitride layer are formed on the surface of a tungsten carbide based cemented carbide substrate. A surface-coated super layer obtained by chemical vapor deposition and / or physical vapor deposition of a hard coating layer consisting of one or more of these and an aluminum oxide-based compound layer containing aluminum oxide as a main component with an average layer thickness of 3 to 20 μm. A hard alloy cutting tool,
An excellent hard coating layer characterized in that the aluminum oxide compound layer contains, by weight%, Zr and / or Hf: 0.5 to 10%, N: 0.001 to 0.1%. A surface-coated cemented carbide cutting tool with interlayer adhesion.
JP9396896A 1996-04-16 1996-04-16 Cutting tool made of surface-coated cemented carbide having hard coating layer excellent in inter-layer adhesiveness Pending JPH09277104A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9396896A JPH09277104A (en) 1996-04-16 1996-04-16 Cutting tool made of surface-coated cemented carbide having hard coating layer excellent in inter-layer adhesiveness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9396896A JPH09277104A (en) 1996-04-16 1996-04-16 Cutting tool made of surface-coated cemented carbide having hard coating layer excellent in inter-layer adhesiveness

Publications (1)

Publication Number Publication Date
JPH09277104A true JPH09277104A (en) 1997-10-28

Family

ID=14097209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9396896A Pending JPH09277104A (en) 1996-04-16 1996-04-16 Cutting tool made of surface-coated cemented carbide having hard coating layer excellent in inter-layer adhesiveness

Country Status (1)

Country Link
JP (1) JPH09277104A (en)

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