JPH09275633A - Charger - Google Patents

Abstract

PROBLEM TO BE SOLVED: To lessen a burden of an inverter device and increase a charging accuracy. SOLUTION: A charger consists of serial resonance-type inverters INV1, INV2, transformers TR1, TR2 which boast the outputs of the inverters, rectifiers RF21 , RF22 which rectify the outputs of the transformers, a spare charging capacitor Cy which is charged by the rectifier RF21 , and a magnetic switch SIo which discharges the capacitor Cy and charges a charging capacitor Co. The inverter INV1 is operated with the switch SIo being in an off state and the capacitor Cy is charged by the rectifier RF21 and then the inverter INV1 is stopped and the switch SIo is turned on and the capacitor Co is charged from resonance current to the level Vcy. When Vco becomes equal to Vcy, the inverter INV2 is operated and Vco is finely adjusted. Since the capacitor Cy can be charged by the inverter INV1 due to the presence of the capacitor Cy and the switch SIo even while the capacitor Co is being discharged, a burden of the inverter device INV1 can be lessened. And, Vco is finely adjusted by the inverter INV2, so a charging accuracy can be increased.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a charger for injecting energy into a capacitor required as a first stage of a magnetic compression pulse power source used as an excimer laser power source.

[0002]

2. Description of the Related Art In the semiconductor industry, the demand for memories such as DRAM is rapidly increasing, and it is necessary to increase the memory to one chip. As this memory manufacturing device, a scan type slapper using an excimer laser has been developed.

The scan type excimer laser slapper requires high-density energy in a short period of time, and a pulse power source using magnetic compression is used. The magnetic compression pulse power supply requires a charger that charges the first-stage capacitor to a voltage of several kV.

As a charger for charging the first stage capacitor of the power source for the excimer laser, there is a method in which an output current of a series resonance type inverter using an IGBT, FET or the like is passed through the transformer and a rectifier to the capacitor for charging.

An example of the configuration of a conventional charger is shown in FIG. In the figure, INV1 is a series resonance type inverter, a DC side is connected to a DC power source with a DC voltage Ed composed of a rectifier RF1 and a smoothing capacitor Cd, and an AC output side is a resonance capacitor Cr.
₁ , a resonance circuit composed of the resonance reactor Lr ₁ is connected. TR1 is a step-up transformer connected in series with the resonance circuit of this resonance inverter, and RF2 is a rectifier that rectifies the secondary voltage of the step-up transformer to charge the load charging capacitor Co.

In this charger, the inverter INV1 is controlled so that the charging of the charging capacitor is stopped while the charging capacitor Co of the magnetic compression pulse power supply is being discharged.

[0007]

The conventional charger has the following problems in charging the load charging capacitor to several kV in several hundreds of μs.

1) IG of the inverter due to short charging time
The burden on the element such as BT is large.

2) Since the resonance current becomes large in a resonance type inverter or the like, it is difficult to select a resonance capacitor and it becomes expensive.

3) High accuracy of charging voltage cannot be achieved.

4) The entire device becomes large.

The present invention has been made in view of the above problems in the prior art, and an object of the present invention is to provide a charger which can reduce the load on the inverter element and can improve the accuracy of the charging voltage. To provide.

[0013]

A charger of the present invention is a DC resonant inverter, a transformer for boosting the output of the inverter, a rectifier for rectifying the secondary voltage of the transformer, and a rectifier voltage for charging. A precharge capacitor,
A magnetic switch for discharging the charging voltage of the preliminary charging capacitor to the load charging capacitor is provided, and the preliminary charging capacitor can be charged while the load charging capacitor is discharging.

Further, a second series resonance type inverter,
A second transformer that boosts the output of the inverter and a second rectifier that rectifies the secondary voltage of the transformer and outputs the rectified secondary voltage to the load charging capacitor are provided, and after the completion of charging from the preliminary charging capacitor to the load charging capacitor, It is advisable to finely adjust the load charging capacitor voltage with the inverter of 2.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows the structure of a charger. In the figure, RF1 and Cd are rectifiers and smoothing capacitors that obtain a DC power supply (voltage) Ed from three-phase AC, INV1 and INV2 are first and second series resonant inverters (hereinafter simply referred to as INV1) connected to the DC power supply Ed. , INV2), Cr ₁ and Lr ₁ and Cr ₂ and Lr ₂ are IN, respectively.
A resonance capacitor and a resonance inductance that form a resonance circuit of V1 and INV2, TR1 and TR2 are first and second step-up transformers connected to the output side of INV1 and INV2, and RF2 ₁ and RF2 ₂ are step-up transformers TR1 and TR2. First and second rectifiers connected to the secondary side, C
y is a pre-charging capacitor charged by the output voltage of the rectifier RF2 ₁ , SIo is a magnetic switch, Co is a load charging capacitor, and is connected to the pre-charging capacitor Cy via the magnetic switch SIo and directly connected to the rectifier RF2 _2. ing.

Next, the operation of this charger will be described with reference to the chart of FIG.

First, during the period of mode 1, the magnetic switch S
Io is turned off and INV1 is operated to charge the pre-charging capacitor Cy. The INV1 is stopped during the period of the mode 2, the magnetic switch SIo is turned on in the mode 3, and the charging capacitor Co and the precharging capacitor Cy are switched by the resonance current of the precharging capacitor Cy and the magnetic switch SIo.
The battery is instantly charged to the charging voltage Vcy of.

The magnetic switch SIo is turned off during the mode 4 period.
At F, INV2 is operated to finely adjust the voltage Vco of the charging capacitor Co. This enables highly accurate charging. In mode 5, the magnetic compression of the laser magnetic compression power supply circuit (not shown) is performed from the charging capacitor Co, and the process returns to mode 1 to charge the preliminary charging capacitor Cy. In this way, modes 1 to 4 are repeated.

[0019]

Since the present invention is configured as described above, the following effects can be obtained.

(1) In the conventional charger, the charger was in an idle state while the load charging capacitor was being discharged as the laser power source, but the precharging capacitor and the magnetic switch were provided so that the load charging capacitor was discharged during the discharging period. Since the pre-charging capacitor can be pre-charged, the charging time by the first series resonance type inverter can be extended.

(2) The load on the inverter element such as IGBT can be reduced.

(3) Since the margin can be set for the fine adjustment period of the load charging capacitor voltage, the fine adjustment of the charging voltage by the second series resonance type inverter can be facilitated and the accuracy can be improved.

(4) The device can be miniaturized.

[Brief description of drawings]

FIG. 1 is a block diagram showing a configuration of a charger.

FIG. 2 is a time chart explaining the operation of the charger.

FIG. 3 is a block diagram showing a configuration of a conventional charger.

[Explanation of symbols]

INV1, INV2 ... series resonant inverter Cr _1, Cr ₂ ... resonance capacitor Lr _1, Lr ₂ ... resonant inductance Co ... load charging capacitor Cy ... precharging capacitor Cd ... smoothing capacitor SiO ... magnetic switch RF1, RF2, RF2 _1, RF2 ₂ ... Rectifier TR1, TR2 ... Step-up transformer

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification number Office reference number FI technical display location H02M 9/04 H01S 3/223 E

Claims (2)

[Claims] 1. A series resonance inverter, a transformer for boosting the output of the inverter, a rectifier for rectifying the secondary voltage of the transformer, a pre-charging capacitor charged by the rectified voltage, and a charging for the pre-charging capacitor. A charger having a magnetic switch for discharging a voltage to a load charging capacitor, wherein the pre-charging capacitor can be charged while the load charging capacitor is discharging. 2. The second series resonance type inverter, the second transformer for boosting the output of the inverter, and the second transformer for rectifying the secondary voltage of the transformer and outputting the secondary voltage to the load charging capacitor. A rectifier is provided, and the load charging capacitor voltage is finely adjusted by the second inverter after the completion of charging from the preliminary charging capacitor to the load charging capacitor.