JPH09267478A - Ink jet recording head, its manufacture and ink jet printer - Google Patents
Ink jet recording head, its manufacture and ink jet printerInfo
- Publication number
- JPH09267478A JPH09267478A JP7764996A JP7764996A JPH09267478A JP H09267478 A JPH09267478 A JP H09267478A JP 7764996 A JP7764996 A JP 7764996A JP 7764996 A JP7764996 A JP 7764996A JP H09267478 A JPH09267478 A JP H09267478A
- Authority
- JP
- Japan
- Prior art keywords
- water
- oil
- repellent
- ink jet
- recording head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、インクジェット記
録装置に用いられるインクジェット記録ヘッドの製造方
法及びその製造方法で得られたインクジェット記録ヘッ
ド並びにその記録ヘッドを有するインクジェットプリン
タに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an inkjet recording head used in an inkjet recording apparatus, an inkjet recording head obtained by the manufacturing method, and an inkjet printer having the recording head.
【０００２】[0002]
【従来の技術】インクジェット記録ヘッドは、水性また
は油性のインクを用いるので、ノズル表面の撥水性が不
十分であると、インクが付着し易くなる。そのため、吐
出するインクの直進性が損なわれ、印字乱れなどのトラ
ブルによって記録不能となることがある。2. Description of the Related Art Since an ink jet recording head uses water-based or oil-based ink, if the water repellency of the nozzle surface is insufficient, the ink tends to adhere. Therefore, the straightness of the ejected ink may be impaired, and recording may be impossible due to troubles such as print disturbance.
【０００３】インクジェット記録ヘッドの構成材料とし
て用いられているガラス・金属・樹脂などの材料はイン
クに濡れ易いので、インクが噴射するノズル表面には、
撥水撥油化処理を施している。この処理方法には、撥水
撥油材料を溶媒へ溶かした液へ基材を浸漬して塗布する
方法、スプレーで塗布する方法、特開昭６０−１８３１
６１号公報・特開昭５９−１７６０５９号公報のよう
な、真空蒸着やプラズマ重合によりノズル表面に撥水性
材料粒子を付着させ撥水撥油化するという方法等が提案
されていた。Materials such as glass, metal and resin used as constituent materials of ink jet recording heads are apt to be wet with ink, so that the nozzle surface from which ink is ejected has
Water and oil repellent treatment is applied. As this treatment method, a substrate is dipped in a liquid obtained by dissolving a water- and oil-repellent material in a solvent and applied, a method of applying by spraying, and JP-A-60-1831.
No. 61 / JP 59-176059 A method has been proposed in which water-repellent material particles are made to adhere to the nozzle surface by vacuum vapor deposition or plasma polymerization to make it water- and oil-repellent.
【０００４】しかしこれらの方法は、ノズル内部の流路
まで撥水撥油処理されるため、インクの通過性、及び気
泡が侵入した場合の排出性が悪化するという課題を有し
ていた。この課題を解決する方法として、特開平６−１
７１０８１号公報のようにノズル内部の撥水撥油膜をプ
ラズマによって除去または親水親油化する方法等が提案
された。However, these methods have a problem that the water-repellent and oil-repellent treatment is performed up to the flow path inside the nozzle, so that the ink passing property and the discharging property when bubbles enter are deteriorated. As a method for solving this problem, Japanese Patent Laid-Open No. 6-1
As disclosed in Japanese Patent No. 71081, there has been proposed a method of removing the water / oil repellent film inside the nozzle by plasma or making it hydrophilic and lipophilic.
【０００５】[0005]
【発明が解決しようとする課題】しかし上記のような従
来の技術では、撥水撥油膜が形成されたノズル表面を保
護していないため、プラズマ処理によって発生したラジ
カル等の活性ガスがノズル表面へ回り込み、その結果、
ノズル表面の撥水撥油膜がダメージを受け、耐薬品性や
耐磨耗性のような耐久性能が劣化してしまうという課題
がある。However, in the conventional technique as described above, since the nozzle surface on which the water / oil repellent film is formed is not protected, active gas such as radicals generated by the plasma treatment may reach the nozzle surface. Wrap around, as a result,
There is a problem that the water-repellent and oil-repellent film on the nozzle surface is damaged and the durability performance such as chemical resistance and abrasion resistance is deteriorated.
【０００６】本発明は以上のような課題を解決するもの
であり、ノズル表面の撥水撥油膜の耐久性劣化を防止
し、長期間にわたって高い印字品質を維持し得るインク
ジェット記録ヘッドの製造方法の提供を目的としてい
る。The present invention solves the above problems and provides a method for manufacturing an ink jet recording head capable of preventing deterioration of durability of a water / oil repellent film on a nozzle surface and maintaining high printing quality for a long period of time. It is intended to be provided.
【０００７】[0007]
【課題を解決するための手段】本発明のインクジェット
記録ヘッドの製造方法は、インクの噴射するノズル表面
が撥水撥油性で、インクの通過する流路が親水親油性で
あるインクジェット記録ヘッドの製造方法において、ノ
ズル表面に撥水撥油膜を形成し、撥水撥油膜の表面に撥
水撥油膜の親水親油化を防ぐため弾性体を貼付し、活性
ガス雰囲気へさらして流路を親水親油化することを特徴
とする。According to the method of manufacturing an ink jet recording head of the present invention, the surface of a nozzle for ejecting ink is water-repellent and oil-repellent, and the ink passage is hydrophilic and lipophilic. In the method, a water- and oil-repellent film is formed on the nozzle surface, and an elastic material is attached to the surface of the water- and oil-repellent film to prevent the water- and oil-repellent film from becoming hydrophilic and lipophilic. It is characterized by being oiled.
【０００８】また、弾性体がシリコーンゴムまたはフッ
素ゴムであることを特徴とする。Further, the elastic body is made of silicone rubber or fluororubber.
【０００９】本発明のインクジェット記録ヘッドの製造
方法は、ノズル表面へ弾性体を貼付することによって、
流路の親水親油化を目的とした活性ガス環境から、ノズ
ル表面の撥水撥油膜を保護するものである。The method of manufacturing an ink jet recording head according to the present invention comprises applying an elastic material to the surface of the nozzle,
The water and oil repellent film on the nozzle surface is protected from the active gas environment for the purpose of making the flow channel hydrophilic and lipophilic.
【００１０】また、弾性体は、ノズル表面の微小な凹凸
に追従可能なため、撥水撥油膜の保護材料として適して
いる。中でも吸着性が優れている、シリコーンゴムやフ
ッ素ゴムが望ましい。Further, since the elastic body can follow minute irregularities on the nozzle surface, it is suitable as a protective material for the water and oil repellent film. Of these, silicone rubber and fluororubber, which have excellent adsorptivity, are desirable.
【００１１】本発明のインクジェット記録ヘッドは、上
記製造方法で得られたことを特徴とする。The ink jet recording head of the present invention is characterized by being obtained by the above manufacturing method.
【００１２】本発明のインクジェットプリンタは、上記
インクジェット記録ヘッドを有することを特徴とする。An ink jet printer of the present invention is characterized by having the above ink jet recording head.
【００１３】[0013]
【発明の実施の形態】以下、実施例により本発明を詳細
に説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to examples.
【００１４】（実施例１）図１は、本実施例のインクジ
ェット記録ヘッドの斜視図である。このように本インク
ジェット記録ヘッドは、第一プレート８と第二プレート
９の積層により、インクの供給部１と、ＰＺＴなどの振
動によりインクを吐出する圧力室２と、インクが通る流
路３を形成し、流路３に対して垂直方向にノズル孔６を
形成したノズルプレート４を接合した構造である。そし
て、撥水撥油膜は、このノズルプレート４の表面へ形成
する。(Embodiment 1) FIG. 1 is a perspective view of an ink jet recording head of this embodiment. As described above, in the inkjet recording head, the first plate 8 and the second plate 9 are stacked to form the ink supply unit 1, the pressure chamber 2 that ejects ink by vibration of PZT, and the flow path 3 through which the ink passes. This is a structure in which the nozzle plate 4 formed and having the nozzle holes 6 formed in the direction perpendicular to the flow path 3 is joined. Then, the water and oil repellent film is formed on the surface of the nozzle plate 4.
【００１５】図２は、図１のノズルプレート４へ撥水撥
油膜を塗布する本実施例における工程別のノズルプレー
ト断面図である。この図に沿って本実施例を説明する。FIG. 2 is a cross sectional view of the nozzle plate according to each step in this embodiment for applying the water / oil repellent film to the nozzle plate 4 of FIG. The present embodiment will be described with reference to FIG.
【００１６】まず、図２（ａ）のようにノズル孔６を加
工したステンレス製ノズルプレート４に次の組成の撥水
撥油材料をスプレー法によって塗布し、図２（ｂ）のよ
うに撥水撥油膜１２を形成した。First, a water-repellent / oil-repellent material having the following composition is applied by a spray method to a stainless steel nozzle plate 4 having nozzle holes 6 processed as shown in FIG. 2 (a), and as shown in FIG. 2 (b). The water / oil repellent film 12 was formed.
【００１７】＜撥水撥油材料組成＞ 信越化学社製「ＫＰ８０１Ｍ」 １０部 ３Ｍ社製 「フロリナート ＦＣ−７５」 ９０部 続いて、図２（ｃ）のように、市販のシリコーンゴム１
３をノズルプレート表面１５の撥水撥油膜１２へ貼付し
た。次に、ノズルプレートの裏側１４を上にして、次の
条件によって酸素プラズマ環境にさらし、ノズル孔６及
びノズルプレートの裏側１４を親水親油化した。<Water- and oil-repellent material composition>"KP801M" manufactured by Shin-Etsu Chemical Co., Ltd. 10 parts "Fluorinert FC-75" manufactured by 3M Co., Ltd. 90 parts Subsequently, as shown in FIG.
3 was attached to the water / oil repellent film 12 on the surface 15 of the nozzle plate. Next, with the back side 14 of the nozzle plate facing upward, the nozzle hole 6 and the back side 14 of the nozzle plate were rendered hydrophilic and lipophilic by exposing them to an oxygen plasma environment under the following conditions.
【００１８】＜酸素プラズマ発生条件＞ （１）装置 平行平板電極型ＲＩＥ装置 （２）真空度 ０．２トール （３）出力 ０．２１Ｗ／ｃｍ2 （４）処理時間 ５分 その後、ノズルプレート表面１５からシリコーンゴム１
３を剥がした（図２（ｄ））。<Oxygen plasma generation conditions> (1) Device Parallel plate electrode type RIE device (2) Vacuum degree 0.2 torr (3) Output 0.21 W / cm 2 (4) Treatment time 5 minutes After that, the nozzle plate surface 15 to silicone rubber 1
3 was peeled off (FIG. 2 (d)).
【００１９】最後に、ノズルプレート４と流路３を接合
し、インクジェット記録ヘッドを完成させ、インクの飛
行特性を評価した。Finally, the nozzle plate 4 and the flow path 3 were joined to complete an ink jet recording head, and the flight characteristics of the ink were evaluated.
【００２０】ノズル面の撥水撥油膜がシリコーンゴムで
保護されていたので、撥水撥油性が良好で、飛行曲がり
も発生しなかった。また気泡が侵入した場合でも、迅速
に排出され、良好な印字特性を示した。Since the water / oil repellent film on the nozzle surface was protected by the silicone rubber, the water / oil repellency was good and no flight bending occurred. Even when air bubbles entered, they were quickly discharged and showed good printing characteristics.
【００２１】また、ノズル表面には微小な凹凸が存在し
ていたが、撥水撥油性能は劣化しなかった。Further, although there were fine irregularities on the nozzle surface, the water / oil repellency was not deteriorated.
【００２２】また、酸素プラズマのかわりに、２５０ｎ
ｍの波長を少なくとも含む紫外線を照射した場合でも、
同様の効果があらわれ、良好であった。Further, instead of oxygen plasma, 250n
Even when irradiated with ultraviolet rays containing at least the wavelength of m,
The same effect appeared and was good.
【００２３】なお、本実施例のプラズマの発生条件は一
例にすぎず、また、プラズマとなるガスは、窒素・アル
ゴン・フレオン等でも良い。The plasma generation conditions in this embodiment are merely examples, and the gas used as plasma may be nitrogen, argon, freon or the like.
【００２４】（実施例２）図３は、本実施例のインクジ
ェット記録ヘッドの斜視図である。このように本インク
ジェット記録ヘッドは、第一プレート２６と第二プレー
ト３０の積層により、インクの供給部２１と、ＰＺＴな
どの振動によりインクを吐出する圧力室２２と、インク
が通る流路２３、およびその垂直面にノズル孔２４を形
成したノズル表面２５からなる構造である。そして、撥
水撥油膜は、このノズル表面２５へ形成する。図４は、
ノズル表面２５へ撥水撥油膜を塗布する本実施例におけ
る工程別のインクジェット記録ヘッドの断面図である。
この図に沿って本実施例を説明する。(Embodiment 2) FIG. 3 is a perspective view of an ink jet recording head of this embodiment. As described above, in the inkjet recording head, by stacking the first plate 26 and the second plate 30, the ink supply portion 21, the pressure chamber 22 that ejects ink by vibration of PZT, the flow path 23 through which the ink passes, And a nozzle surface 25 having a nozzle hole 24 formed on the vertical surface thereof. Then, the water and oil repellent film is formed on the nozzle surface 25. FIG.
FIG. 6 is a cross-sectional view of the inkjet recording head for each step of the present embodiment for applying a water- and oil-repellent film to the nozzle surface 25.
The present embodiment will be described with reference to FIG.
【００２５】まず、図４（ａ）のようなガラス製のノズ
ル表面２５へ、東京製品開発研究所製「パラックコー
ト」を真空蒸着法によって撥水撥油膜３２を形成した。First, a water-repellent and oil-repellent film 32 was formed on the glass nozzle surface 25 as shown in FIG. 4 (a) by vacuum deposition of "PARAC COAT" manufactured by Tokyo Product Development Laboratory.
【００２６】続いて、図４（ｂ）のように撥水撥油膜３
２を形成したノズル表面２５へ、フッ素ゴムシート３３
を貼付した。この状態で実施例１と同様の酸素プラズマ
環境にさらし、流路２３及び圧力室２２を親水親油化し
た。Subsequently, as shown in FIG. 4B, the water / oil repellent film 3 is formed.
2 to the nozzle surface 25 on which the fluororubber sheet 33 is formed.
Was pasted. In this state, the channel 23 and the pressure chamber 22 were exposed to the same oxygen plasma environment as in Example 1 to make it hydrophilic and lipophilic.
【００２７】次に、フッ素ゴム３３を剥がした（図４
（ｃ））。Next, the fluororubber 33 was peeled off (see FIG. 4).
(C)).
【００２８】最後に、インクジェット記録ヘッドを完成
させ、インクの飛行特性を評価した。ノズル面の撥水撥
油膜がフッ素ゴムによって保護されていたので、撥水撥
油性が良好で、飛行曲がりも発生しなかった。また気泡
が侵入した場合でも、迅速に排出され、良好な印字特性
を示した。Finally, the ink jet recording head was completed and the flight characteristics of the ink were evaluated. Since the water- and oil-repellent film on the nozzle surface was protected by the fluororubber, the water- and oil-repellency was good, and flight bending did not occur. Even when air bubbles entered, they were quickly discharged and showed good printing characteristics.
【００２９】（比較例）実施例１と同様のインクジェッ
トヘッド構造において、ノズルプレート表面に弾性体を
貼付せず、実施例１と同様の条件によって、インクジェ
ット記録ヘッドを製造した。(Comparative Example) In the same ink jet head structure as in Example 1, an ink jet recording head was manufactured under the same conditions as in Example 1 without attaching an elastic body to the surface of the nozzle plate.
【００３０】実施例１、実施例２、比較例のインクジェ
ット記録ヘッドについて、耐薬品性及びゴムこすりによ
る耐摩耗性を評価した。表１は、○を良好、×をノズル
面の撥水撥油膜の親水親油化または剥離または摩滅とし
て耐薬品性及び耐摩耗性を評価した結果である。The ink jet recording heads of Examples 1, 2 and Comparative Example were evaluated for chemical resistance and abrasion resistance due to rubber rubbing. Table 1 shows the results of evaluation of chemical resistance and abrasion resistance, with ◯ being good and X being hydrophilic / lipophilic or peeling or abrasion of the water / oil repellent film on the nozzle surface.
【００３１】[0031]
【表１】 [Table 1]
【００３２】このように実施例１、実施例２のインクジ
ェット記録ヘッドは、耐薬品性・耐摩耗性が良好であっ
た。しかも本ヘッドは、長期間にわたって、高印字品質
を維持した。As described above, the ink jet recording heads of Examples 1 and 2 had good chemical resistance and abrasion resistance. Moreover, this head maintained high printing quality for a long period of time.
【００３３】しかし比較例のインクジェット記録ヘッド
は、耐薬品性、耐摩耗性が劣っていた。However, the ink jet recording head of the comparative example was inferior in chemical resistance and abrasion resistance.
【００３４】なお、本実施例は、本発明の一部について
記したものであり、撥水撥油材料は他のフッ素系やシリ
コーン系の撥水撥油剤を用いても、また撥水撥油剤の希
釈度が異なった場合でも、同様の効果を示した。また、
ノズル材料は、ガラス・ステンレスに限らず、シリコン
・ポリサルフォン・ポリカーボネート等でもよく、貼付
するゴムは、本実施例で示した以外に、ブチルゴム・ク
ロロプレーンゴム等でもよい。This embodiment describes only a part of the present invention. As the water / oil repellent material, another fluorine-based or silicone-based water / oil repellent agent may be used, or the water / oil repellent agent may be used. The same effect was exhibited even when the dilution degree of each was different. Also,
The nozzle material is not limited to glass / stainless steel, but may be silicon / polysulfone / polycarbonate or the like, and the rubber to be attached may be butyl rubber / chloroprene rubber or the like, other than those shown in the present embodiment.
【００３５】弾性体の貼付方法は、ノズル表面を十分に
保護するため、ノズル面を弾性体の間に圧力をかけても
よい。In the sticking method of the elastic body, in order to sufficiently protect the nozzle surface, pressure may be applied between the nozzle surface and the elastic body.
【００３６】[0036]
【発明の効果】以上記したように本発明は、撥水撥油膜
を塗布したノズル面へ、弾性体を貼付し、活性ガス環境
にさらすことによって、ノズル表面の撥水撥油膜がダメ
ージを受けず、ノズル孔内部及び流路の撥水撥油膜を除
去または親水親油化することができた。しかも長期間に
わたって高印字品質が維持できる効果を有した。As described above, according to the present invention, the water-repellent and oil-repellent film on the nozzle surface is damaged by sticking the elastic body on the nozzle surface coated with the water- and oil-repellent film and exposing it to the active gas environment. Instead, the water- and oil-repellent film inside the nozzle hole and in the channel could be removed or made hydrophilic. Moreover, it has the effect of maintaining high printing quality for a long period of time.
【００３７】また、シリコーンゴム・フッ素ゴムを弾性
体として使用したので、ノズル面の撥水撥油性能が充分
に保護できた。Since silicone rubber / fluorine rubber is used as the elastic body, the water and oil repellency of the nozzle surface can be sufficiently protected.
【００３８】このように本発明は、高印字品質を維持で
きる実用的なインクジェット記録ヘッド及びインクジェ
ットプリンタをもたらすものである。As described above, the present invention provides a practical ink jet recording head and ink jet printer which can maintain high printing quality.
【図１】本発明の実施例１におけるインクジェット記録
ヘッドの斜視図。FIG. 1 is a perspective view of an ink jet recording head according to a first embodiment of the invention.
【図２】本発明の実施例１における工程別のノズルプレ
ートの断面図。FIG. 2 is a cross-sectional view of the nozzle plate for each step according to the first embodiment of the present invention.
【図３】本発明の実施例２におけるインクジェット記録
ヘッドの斜視図。FIG. 3 is a perspective view of an ink jet recording head according to a second embodiment of the invention.
【図４】本発明の実施例２における工程別のインクジェ
ット記録ヘッドの断面図。FIG. 4 is a cross-sectional view of an inkjet recording head for each step in Embodiment 2 of the present invention.
１ インクの供給部 ２ 圧力室 ３ 流路 ４ ノズルプレート ６ ノズル孔 ８ 第一プレート ９ 第二プレート １２ 撥水撥油膜 １３ シリコーンゴム １４ ノズルプレートの裏側 １５ ノズルプレート表面 ２１ インクの供給部 ２２ 圧力室 ２３ 流路 ２４ ノズル孔 ２５ ノズル表面 ２６ 第一プレート ３０ 第二プレート ３２ 撥水撥油膜 ３３ フッ素ゴム DESCRIPTION OF SYMBOLS 1 Ink supply part 2 Pressure chamber 3 Flow path 4 Nozzle plate 6 Nozzle hole 8 First plate 9 Second plate 12 Water and oil repellent film 13 Silicone rubber 14 Back side of nozzle plate 15 Nozzle plate surface 21 Ink supply part 22 Pressure chamber 23 flow path 24 nozzle hole 25 nozzle surface 26 first plate 30 second plate 32 water and oil repellent film 33 fluororubber
Claims (4)
性で、インクの通過する流路が親水親油性であるインク
ジェット記録ヘッドの製造方法において、前記ノズル表
面に撥水撥油膜を形成し、該撥水撥油膜の表面に撥水撥
油膜の親水親油化を防ぐため弾性体を貼付し、活性ガス
雰囲気へさらして流路を親水親油化することを特徴とす
るインクジェット記録ヘッドの製造方法。1. A method of manufacturing an ink jet recording head, wherein a nozzle surface from which ink is ejected is water-repellent and oil-repellent, and a flow path through which ink is hydrophilic and lipophilic, wherein a water- and oil-repellent film is formed on the nozzle surface. Manufacturing of an inkjet recording head, characterized in that an elastic body is attached to the surface of the water / oil repellent film to prevent the water / oil repellent film from becoming hydrophilic and lipophilic, and the channel is exposed to an active gas atmosphere to make the channel hydrophilic and lipophilic. Method.
素ゴムであることを特徴とする請求項１記載のインクジ
ェット記録ヘッドの製造方法。2. The method of manufacturing an ink jet recording head according to claim 1, wherein the elastic body is silicone rubber or fluororubber.
たことを特徴とするインクジェット記録ヘッド。3. An ink jet recording head obtained by the manufacturing method according to claim 1.
ドを有することを特徴とするインクジェットプリンタ。4. An ink jet printer comprising the ink jet recording head according to claim 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7764996A JPH09267478A (en) | 1996-03-29 | 1996-03-29 | Ink jet recording head, its manufacture and ink jet printer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7764996A JPH09267478A (en) | 1996-03-29 | 1996-03-29 | Ink jet recording head, its manufacture and ink jet printer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09267478A true JPH09267478A (en) | 1997-10-14 |
Family
ID=13639750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7764996A Withdrawn JPH09267478A (en) | 1996-03-29 | 1996-03-29 | Ink jet recording head, its manufacture and ink jet printer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09267478A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6966630B2 (en) | 2001-07-06 | 2005-11-22 | Ricoh Printing Systems, Ltd. | Inkjet head |
| JP2006175604A (en) * | 2004-12-20 | 2006-07-06 | Seiko Epson Corp | Film formation method, liquid feeding head and liquid feeder |
| JP2008213422A (en) * | 2007-03-07 | 2008-09-18 | Fujifilm Corp | Nozzle plate manufacturing method and liquid discharge head manufacturing method |
| US7513602B2 (en) | 2004-12-17 | 2009-04-07 | Seiko Epson Corporation | Coating method, liquid supplying head and liquid supplying apparatus |
| US7562964B2 (en) | 2005-06-08 | 2009-07-21 | Fujifilm Corporation | Method of manufacturing nozzle plate, nozzle plate, liquid ejection head and image forming apparatus |
| EP2129526A1 (en) * | 2007-03-12 | 2009-12-09 | Silverbrook Research Pty. Ltd | Metal film protection during printhead fabrication with minimum number of mems processing steps |
| JP2010215718A (en) * | 2009-03-13 | 2010-09-30 | Fujifilm Corp | Method for producing resin molded article, inkjet head and electronic equipment |
| US8012363B2 (en) | 2007-11-29 | 2011-09-06 | Silverbrook Research Pty Ltd | Metal film protection during printhead fabrication with minimum number of MEMS processing steps |
-
1996
- 1996-03-29 JP JP7764996A patent/JPH09267478A/en not_active Withdrawn
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6966630B2 (en) | 2001-07-06 | 2005-11-22 | Ricoh Printing Systems, Ltd. | Inkjet head |
| US7513602B2 (en) | 2004-12-17 | 2009-04-07 | Seiko Epson Corporation | Coating method, liquid supplying head and liquid supplying apparatus |
| JP2006175604A (en) * | 2004-12-20 | 2006-07-06 | Seiko Epson Corp | Film formation method, liquid feeding head and liquid feeder |
| JP4595527B2 (en) * | 2004-12-20 | 2010-12-08 | セイコーエプソン株式会社 | Film forming method, liquid supply head, and liquid supply apparatus |
| US7562964B2 (en) | 2005-06-08 | 2009-07-21 | Fujifilm Corporation | Method of manufacturing nozzle plate, nozzle plate, liquid ejection head and image forming apparatus |
| JP2008213422A (en) * | 2007-03-07 | 2008-09-18 | Fujifilm Corp | Nozzle plate manufacturing method and liquid discharge head manufacturing method |
| US8038891B2 (en) | 2007-03-07 | 2011-10-18 | Fujifilm Corporation | Method of manufacturing nozzle plate and method of manufacturing liquid ejection head |
| EP2129526A1 (en) * | 2007-03-12 | 2009-12-09 | Silverbrook Research Pty. Ltd | Metal film protection during printhead fabrication with minimum number of mems processing steps |
| EP2129526A4 (en) * | 2007-03-12 | 2010-04-28 | Silverbrook Res Pty Ltd | Metal film protection during printhead fabrication with minimum number of mems processing steps |
| US8012363B2 (en) | 2007-11-29 | 2011-09-06 | Silverbrook Research Pty Ltd | Metal film protection during printhead fabrication with minimum number of MEMS processing steps |
| US8491803B2 (en) | 2007-11-29 | 2013-07-23 | Zamtec Ltd | Method of hydrophobizing and patterning frontside surface of integrated circuit |
| JP2010215718A (en) * | 2009-03-13 | 2010-09-30 | Fujifilm Corp | Method for producing resin molded article, inkjet head and electronic equipment |
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