JPH09251309A - Handling position/posture correction device for mobile robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide the handling position/posture correction device of a mobile robot capable of stably and precisely recognizing a mark for correction under any illumination conditions. SOLUTION: At the time of teaching, a CPU 5 gradually changes a threshold value and writes the intermediate value of the threshold value at the point of time when a graphic on the mark for the correction becomes recognizable and the threshold value at the point of time when it becomes unrecognizable in a correction data table 6 as an optimum threshold value corresponding to illuminance on the mark for the correction for each semiconductor manufacture device. At the time of a carrying operation, when the mobile robot arrives at the semiconductor manufacture device, the CPU 5 reads the optimum threshold value corresponding to the semiconductor manufacture device from the correction data table 6 and binarizes data inside a video RAM 4 by the optimum threshold value. Then, the CPU 5 corrects handling position and posture at present based on the binarized data.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mobile robot equipped with a handling section by recognizing a handling position / orientation correction mark (hereinafter referred to as "correction mark") using a camera. And a handling position / orientation correction device for correcting the attitude.

[0002]

2. Description of the Related Art A mobile robot for transporting a wafer cassette in a semiconductor clean room handles a wafer cassette coming out of a semiconductor manufacturing apparatus with a handling section mounted on the mobile robot and places it on a carrier of the mobile robot. I am carrying it to the manufacturing equipment. The stopping accuracy when the mobile robot stops traveling is 10 mm.
However, the mobile robot cannot guarantee the accuracy of about 1 mm required for handling the wafer cassette. Therefore, CC in the hand part
By installing a D camera and performing position correction based on a correction mark installed near the wafer cassette outlet on the semiconductor manufacturing apparatus, a handling accuracy of about 1 mm is realized. The details of the above technique will be described below.

FIG. 4 is an explanatory view showing an example of a transfer system in a semiconductor clean room. In this figure, the mobile robot 101 is a semiconductor manufacturing apparatus 102-1.
The wafer cassettes manufactured in Nos. 102 to 6 are handled by a handling unit mounted on the mobile robot 101, placed on the carrier of the mobile robot 101, and transported to the cassette stockers 103-1 and 103-2.

FIG. 5 is an explanatory diagram showing an example of the mobile robot 101. The mobile robot 101 includes a traveling unit 201 for traveling, an arm 202a, and a hand 2.
The handling unit 202 is composed of 02b, and the loading platform 203 for loading luggage. The CCD camera 1 is provided on the hand 202b.

Further, in the semiconductor clean room, n semiconductor manufacturing apparatuses (where n is a natural number, 6 in the example shown in FIG. 4) are provided, and each semiconductor manufacturing apparatus has an apparatus number m (where 1 is a number). ≦ m ≦ n) is attached. A correction mark is attached near the wafer cassette outlet of each semiconductor manufacturing apparatus.

FIG. 6 is an explanatory view showing an example of the correction mark. The correction mark is a film-like sheet,
As shown in FIG. 6, six black circular marks are printed on a white background.

FIG. 7 is a block diagram showing a configuration example of a conventional handling position / orientation correction device for a mobile robot. In this figure, the CCD camera 1 is provided on the hand 202b of the mobile robot 101 as described above. Then, the CCD camera 1 photographs the correction mark and outputs the image data.

The camera module 2 converts the image data output from the CCD camera 1 into a video signal and outputs it. Here, the video signal has a predetermined gradation (for example,
It is multi-valued data that changes from 0 to 255). The video input circuit 3 writes the video signal output from the camera module 2 in the video RAM4.

A CPU (Central Processing Unit) 5 controls each part of the apparatus and also controls the center of gravity (x,
y, z) and the posture (φ, θ, ψ) are calculated. Here, the attitude of the correction mark is the inclination of the plane including the correction mark (that is, the rotation angle around the x, y, and z axes).

The correction data table 6'is a readable / writable nonvolatile memory (specifically, E ² PRO).
M, flash ROM, battery-backed R
AM, etc.), and the barycentric position (x, y, z) and posture (φ, θ, ψ) of the correction mark calculated by the CPU.
It is stored in correspondence with the semiconductor manufacturing apparatus to which the correction mark is attached. FIG. 8 is an explanatory diagram showing an example of the correction data table 6 ′.

Next, the operation of the handling position / orientation correction device for a mobile robot having the above-mentioned configuration will be described. (1) At the time of teaching The operator uses the operation device (not shown) (teaching pendant as an example) to move the mobile robot 101.
Is moved in front of the semiconductor manufacturing apparatus with the apparatus number m, the hand 202b of the handling unit 202 mounted on the mobile robot 101 is moved to the handling position and posture of the wafer cassette, and then the hand is attached to the handling position. When a command to store the position and orientation of the correction mark is input, the CCD camera 1 (see FIG. 7) provided in the hand 202b photographs the correction mark and outputs the image data. The camera module 2 is C
The image data output by the CD camera 1 is converted into a video signal and output.

The video input circuit 3 includes a camera module 2
Write the video signal output by the video RAM4. The CPU 5 binarizes the video signal stored in the video RAM 4 with a fixed threshold value and separates it into binarized data representing white or black. FIG. 9 is an explanatory diagram showing an example in which the video signal showing the image on the line AA ′ in FIG. 6 is binarized. Next, the CPU 5 determines, based on the binarized data, the barycentric position (x, y,
z) and the posture (φ, θ, ψ) are calculated. CPU-5
Writes the calculated barycentric position (x, y, z) and posture (φ, θ, ψ) of the correction mark in the column of the device number m of the correction data table 6 (see FIG. 8).

By repeating the above operation, the apparatus shown in FIG. 7 determines the barycentric position (x, y, z) and the posture (φ, θ, ψ) of the correction mark corresponding to each semiconductor manufacturing apparatus.
It writes in the column of each device number of the correction data table 6.

(2) During Transfer Operation During transfer operation, when the mobile robot 101 moves to the front of the semiconductor manufacturing apparatus in order to take out the wafer cassette from the semiconductor manufacturing apparatus with the apparatus number m, the CPU 5
Reads the barycentric position (x, y, z) and posture (φ, θ, ψ) of the correction mark corresponding to the device number m from the correction data table 6. When the hand 202b of the handling unit 202 mounted on the mobile robot 101 moves to the handling position and posture of the wafer cassette, the CCD camera 1 provided on the hand 202b
Before handling the wafer cassette, the correction mark is photographed and its image data is output. Below, FIG.
The handling position / orientation correction device shown in (1) performs the same operation as shown in “(1) Teaching”, and the current barycentric position (x ′, y ′, z ′) and attitude (φ ′ of the correction mark) ，
θ ', ψ') is calculated.

The CPU 5 compares the calculated barycentric position (x ', y', z ') of the correction mark with the read barycentric position (x, y, z) of the correction mark to determine the teaching position. The positional deviation of the current position with respect to is calculated. And CPU
5 is the hand 202 in the direction in which the positional deviation becomes zero.
Correct the position of b. Similarly, the CPU 5 compares the calculated correction mark attitude (φ ′, θ ′, ψ ′) with the read correction mark attitude (φ, θ, ψ), and compares it with the current teaching attitude. Calculate the posture deviation of the posture. And
The CPU 5 corrects the posture of the hand 202b in the direction in which the posture shift becomes zero. Then, when the positional deviation and the attitude deviation become zero, the handling unit 202 mounted on the mobile robot 101 performs the handling.

This is the end of the description of the operation of the handling position / orientation correction device for a mobile robot having the above configuration.
The details of the method of calculating the center of gravity position and orientation of the correction mark and the method of correcting the position and orientation of the hand 202b described above are described in the following publications. 1) Japanese Patent Application Laid-Open No. 6-259536 (application number Japanese Patent Application No. 3-312048) “3D correction method of imaging position and posture and 3D position correction method of robot” 2) Japanese Patent Application Laid-Open No. 4-349797 No. Japanese Patent Application No. 3-123359) "Geometric imaging specific calibration method for visual device"

[0017]

By the way, the illuminance on the correction marks attached to the semiconductor manufacturing apparatus is different for each semiconductor manufacturing apparatus, and when the illuminance is sufficient or the illuminance is insufficient, There are various. Further, when the correction mark is obliquely illuminated, the illuminance is not always uniform even on one correction mark.

FIG. 10A is an explanatory diagram showing an example of the video signal when the illuminance on the correction mark is insufficient, and FIG. 10B shows that the illuminance on the correction mark is not uniform. It is explanatory drawing which shows an example of the said video signal in a certain case. As shown in FIG. 10A, when the illuminance on the correction mark is insufficient, the value of the video signal stored in the video RAM 4 is generally small, and the video signal shows all black. The data is binarized, and the figure (circle) on the correction mark cannot be recognized at all. Further, as shown in FIG. 10B, when the illuminance on the correction mark is non-uniform, the figure (circle) portion that should have the same density on the actual correction mark differs depending on the location. The data indicating the colors (that is, white and black) is binarized, and the shape and the number of the figures are erroneously recognized.

Therefore, in the above-described conventional handling position / orientation correction device for a mobile robot, when the correction mark cannot be recognized or when an error appears in the calculation result of the center of gravity and the attitude of the correction mark. There was a problem that there was.

As a method for solving the above-mentioned problem, CC is adjusted in accordance with the illuminance on the correction mark of each semiconductor manufacturing apparatus.
It is conceivable to add a device (automatic aperture adjuster) for automatically adjusting the aperture of the lens of the D camera to the CCD camera. However, in this method, since the automatic aperture adjuster must be attached to the CCD camera, the configuration of the entire apparatus becomes expensive, and the CCD camera becomes large and heavy by the amount of the automatic aperture adjuster. Larger CCD cameras have more restrictions on handling in tight spaces. In addition, the increase in weight of the CCD camera causes a decrease in speed and an increase in vibration when moving the hand. Further, due to the increased weight of the CCD camera, it is necessary to make the drive motor for driving the arm large.

The present invention has been made under such a background, and a correction mark can be provided under any illuminance and under any illumination condition without adding an additional device (such as an automatic aperture adjuster) to the camera. An object of the present invention is to provide a handling position / orientation correction device for a mobile robot that can be stably and accurately recognized.

[0022]

According to the first aspect of the present invention,
In a handling position / orientation correction device for a mobile robot having a handling unit, the movement is performed from a storage unit that stores a threshold value corresponding to each destination of the mobile robot, and each threshold value stored in the storage unit. Reading means for reading a threshold value corresponding to the current movement position of the robot, a camera for photographing a handling position / posture correction mark provided at the current handling position of the handling section, and data output by the camera, Binarizing means for binarizing the threshold value read by the reading means, and calculating means for calculating the current handling position and attitude of the handling section based on the data binarized by the binarizing means. , The handling position and posture taught in advance, and the current calculated by the calculating means. Based on a comparison between the handling position and orientation, characterized by comprising a correction means for correcting the handling position and orientation of the handling portion.

According to a second aspect of the present invention, in the handling position / orientation correction device for a mobile robot according to the first aspect, the contents stored in the storage means (that is, the threshold value corresponding to each destination of the mobile robot) is stored. It is characterized by comprising setting means for setting.

According to a third aspect of the present invention, in the handling position / orientation correcting device for a mobile robot according to the second aspect, the previously taught handling position and orientation are calculated based on a threshold value set by the setting means. It is characterized by being

According to a fourth aspect of the present invention, in the handling position / orientation correction device for a mobile robot according to the second or third aspect, the setting means is a changing means for gradually changing the threshold value. And second binarizing means for binarizing the data output by the camera with the threshold value changed by the changing means, and the second binarizing means.
In the image based on the data binarized by the binarizing means, the threshold value at the time when the handling position / orientation correction mark starts to be correctly recognized and the threshold value at the time when the mark is not correctly recognized. And a writing unit that writes the intermediate value calculated by the threshold value calculating unit to the storage unit as a threshold value corresponding to the current position of the mobile robot. And

According to a fifth aspect of the present invention, in the handling position / orientation correcting device for a mobile robot according to the second or third aspect, the setting means changes the threshold value gradually. And second binarizing means for binarizing the data output by the camera with the threshold value changed by the changing means, and the second binarizing means.
The display means for displaying an image based on the data binarized by the binarizing means and the image displayed by the display means,
First operation means operated at the time when the handling position / orientation correction mark starts to be correctly recognized, and when the handling position / orientation correction mark is not correctly recognized in the image displayed by the display means. A threshold value for calculating an intermediate value between a threshold value at a time when the second operation means is operated, a threshold value at a time when the first operation means is operated, and a threshold value at a time when the second operation means is operated. It is characterized by comprising a calculating means and a writing means for writing the intermediate value calculated by the threshold value calculating means into the storage means as a threshold value corresponding to the current position of the mobile robot.

[0027]

BEST MODE FOR CARRYING OUT THE INVENTION

§1. First Embodiment Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram showing a configuration example of a handling position / orientation correction device for a mobile robot according to a first embodiment of the present invention. In this figure, parts corresponding to the respective parts in FIG. 7 are denoted by the same reference numerals, and description thereof will be omitted. The handling position of the mobile robot shown in this figure
The attitude correction apparatus differs from that shown in FIG. 7 in that a correction data table 6 is provided instead of the correction data table 6 ′.

FIG. 2 is an explanatory diagram showing an example of the correction data table 6. As shown in this figure, the correction data table 6 includes, in addition to the barycentric position (x, y, z) and posture (φ, θ, ψ) of the correction mark, for each semiconductor manufacturing apparatus,
An optimum threshold value (hereinafter, referred to as “optimum threshold value”) corresponding to the illuminance on the correction mark attached to the semiconductor manufacturing apparatus is stored.

Next, the operation of the handling position / orientation correction device of the mobile robot having the above-mentioned configuration will be described. (1) At the time of teaching The operator uses the operation device (not shown) (teaching pendant as an example) to move the mobile robot 101.
Is moved in front of the semiconductor manufacturing apparatus with the apparatus number m, the hand 202b of the handling unit 202 mounted on the mobile robot 101 is moved to the handling position and posture of the wafer cassette, and then the hand is attached to the handling position. When a command to store the position and orientation of the correction mark is input, the apparatus determines the barycentric position (x,
(y, z) and the posture (φ, θ, ψ) are calculated and stored, and the optimum threshold value is determined and stored by the operation described below.

That is, first, the CPU 5 sets the threshold value for binarization from the upper limit value (255 as an example) to the lower limit value (0 as an example) of the threshold value.
Gradually change toward. And the CPU-5
A predetermined figure (a circle in the correction mark example shown in FIG. 6), a predetermined number (six in the correction mark example shown in FIG. 6), is recognized as a first threshold value, and the threshold value at the time when the correct recognition is started. Stored in the internal register of No. 5. After that, the CPU 5 further changes the threshold value, and the threshold value at the time when the predetermined figure is not correctly recognized by the predetermined number is stored in another internal register of the CPU 5 as the second threshold value. Remember.
Finally, the CPU 5 finds an intermediate value between the first threshold value and the second threshold value, and writes the intermediate value as the optimum threshold value in the column of the device number m of the correction data table 6.

In the above operation example, the threshold value is changed from the upper limit value to the lower limit value, however, conversely, the threshold value may be changed from the lower limit value to the upper limit value.

When the determination and storage of the optimum threshold value are completed by the above-described operation, the present apparatus then performs the same operation as in the prior art to perform the barycentric position (x,
y, z) and the posture (φ, θ, ψ) are calculated, and the barycentric position (x, y, z) and the posture (φ, θ, ψ) are written in the column of the device number m of the correction data table 6. However, in the conventional handling position / orientation correction device, the video RA
While a fixed threshold value was used when binarizing the video signal stored in M.4, the handling position / orientation correction apparatus according to the present embodiment uses a video RAM.
Use the previously calculated optimal threshold value when binarizing the video signal stored in 4.

(2) At the time of carrying work The operation of the handling position / orientation correcting apparatus according to the first embodiment at the time of carrying work is basically the same as the operation of the conventional handling position / orientation correcting apparatus at the time of carrying work. .
However, the following points are different. In the first embodiment, when the mobile robot 101 moves to the front of the semiconductor manufacturing apparatus with the apparatus number m, the CPU 5
The position of the center of gravity of the correction mark corresponding to the device number m (x,
In addition to y, z) and posture (φ, θ, ψ), the optimum threshold value corresponding to the device number m is read from the correction data table 6. In the first embodiment, when the video signal stored in the video RAM 4 is binarized, the CPU 5 performs the binarization by using the optimum threshold value read from the correction data table 6 in the above. . This is the end of the description of the operation of the mobile robot handling position / orientation correction device having the above-described configuration.

§2. Second Embodiment Next, a second embodiment of the present invention will be described. FIG.
FIG. 9 is a block diagram showing a configuration example of a handling position / orientation correction device for a mobile robot according to a second embodiment of the present invention. In this figure, parts corresponding to the respective parts in FIG. 1 are denoted by the same reference numerals, and description thereof will be omitted. The handling position / orientation correction device of the mobile robot shown in this figure differs from that of FIG. 1 in that an image display device 7 and a control panel 8 are added.

The image display device 7 has 2
It is a device for displaying a current captured image of the CCD camera 1 based on the binarized data (specifically, a CRT monitor, a liquid crystal display device, etc.). The control panel 8 has an up switch and a down switch for changing the threshold value, and a set switch for determining the optimum threshold value. The control panel 8
The mobile robot 101 may be shared with an operating device (not shown, as an example, a teaching pendant).

Next, the operation of the handling position / orientation correction device for a mobile robot having the above configuration will be described. (1) Teaching The operation of the handling position / orientation correction apparatus according to the second embodiment during teaching is basically the same as the operation of the handling position / orientation correction apparatus according to the first embodiment during teaching. However, the first embodiment and the second embodiment differ in the operation of determining and storing the optimum threshold value.

That is, first, when the operator operates the down switch provided on the control panel 8, the CPU 5 sets the threshold value for binarization,
The threshold value is gradually changed from the upper limit value to the lower limit value. The CPU 5 binarizes the video signal based on the image currently captured by the CCD camera 1 by using the above-mentioned threshold value that changes every moment, and the binarized image (hereinafter, "binarized image"). Image display device 7
To be displayed. While looking at the binarized image displayed on the image display device 7, the operator operates the set switch provided on the control panel 8 when the graphic printed on the correction mark starts to be clearly recognized. To do. When the operator operates the set switch, C
The PU-5 stores the threshold value at that point in the internal register of the CPU-5 as the first threshold value.

After that, the CPU 5 further changes the threshold value and displays the binarized image based on the threshold value on the image display device 7. The operator operates the set switch provided on the control panel 8 again when the graphic printed on the correction mark is no longer clearly recognized. When the operator operates the set switch, the CPU 5 uses the threshold value at that time as the second threshold value,
・ Store in the other 5 internal registers.

Finally, the CPU 5 finds an intermediate value between the first threshold value and the second threshold value, and writes the intermediate value as the optimum threshold value in the column of the device number m of the correction data table 6.

In the second embodiment, the threshold value may be changed from the lower limit value to the upper limit value, as in the first embodiment. In this case, the operator uses the up switch provided on the control panel 8 instead of the down switch provided on the control panel 8.

(2) During Transfer Operation The operation of the handling position / orientation correction apparatus according to the second embodiment during transfer operation is the same as the operation of the handling position / orientation correction apparatus according to the first embodiment during transfer operation. Therefore, the description thereof is omitted. This is the end of the description of the operation of the mobile robot handling position / orientation correction device having the above-described configuration.

Next, the correspondence between the claimed invention and this embodiment will be described. Storage means ... Correction data table 6 Read-out means ... CPU-5 camera ... CCD camera 1 Binarization means, calculation means, correction means ... CPU.5 changing means ... CPU.5 (first embodiment) CPU 5, control panel 8 (second embodiment) second binarizing means, threshold value calculating means, writing means ... CPU, 5 display means ... image display device 7 first operating means, second Operating method: Control panel 8

Although the embodiment of the present invention has been described in detail above with reference to the drawings, the specific configuration is not limited to this embodiment, and the design change and the like without departing from the gist of the present invention. Even this is included in this invention. For example,
In the first and second embodiments described above, the figures and the numbers of the figures on the correction mark are those shown in FIG. 6, but the figures and the numbers of the figures on the correction mark are not limited to this. The present invention is not limited to any particular one, as long as the center of gravity position and orientation of the correction mark can be calculated.

In the above-described first and second embodiments, as shown in FIG. 1 or 3, the camera system is composed of a CCD camera 1, a camera module 2 and a video input circuit 3. However, the configuration of the camera system is not limited to this, and may be any configuration as long as the video signal is finally written in the video RAM.

In the above-described first and second embodiments, the operation of taking out the wafer cassette from the semiconductor manufacturing apparatus has been described as an example of the handling work, but the handling work to which the present invention is applicable is shown in FIG. Not limited to the transfer work in the semiconductor clean room shown,
For example, any work such as a transfer work in a general factory may be used.

[0046]

As described above, according to the present invention, the correction mark can be recognized stably and accurately under any illuminance and under any illumination condition. Further, since no additional device is added to the camera, cost reduction, size reduction, and weight measurement can be performed, and the load and occupied volume of the handling unit can be reduced.

[Brief description of drawings]

FIG. 1 is a block diagram showing a configuration example of a handling position / orientation correction device for a mobile robot according to a first embodiment of the present invention.

FIG. 2 is an explanatory diagram showing an example of a correction data table according to the same embodiment.

FIG. 3 is a block diagram showing a configuration example of a handling position / orientation correction device for a mobile robot according to a second embodiment of the present invention.

FIG. 4 is an explanatory diagram showing an example of a transfer system in a semiconductor clean room.

FIG. 5 is an explanatory diagram showing an example of a mobile robot.

FIG. 6 is an explanatory diagram showing an example of a correction mark.

FIG. 7 is a block diagram showing a configuration example of a conventional handling position / orientation correction device for a mobile robot.

FIG. 8 is an explanatory diagram showing an example of a conventional correction data table.

9 is an explanatory diagram showing an example of a video signal showing an image on the line AA ′ in FIG.

FIG. 10A is an explanatory diagram showing an example of the video signal in the case where the illuminance on the correction mark is insufficient, and FIG. 10B is a diagram showing the case where the illuminance on the correction mark is nonuniform. It is explanatory drawing which shows an example of the said video signal.

[Explanation of symbols]

1 ... CCD camera, 2 ... camera module, 3 ...
… Video input circuit, 4 …… Video RAM, 5 …… C
PU, 6 ... Correction data table, 7 ... Image display device, 8 ... Control panel

Claims (5)

[Claims] 1. A handling position / orientation correction device for a mobile robot having a handling section, wherein: storage means for storing threshold values corresponding to respective destinations of the mobile robot; and threshold values stored in the storage means. From the inside
Reading means for reading a threshold value corresponding to the current movement position of the mobile robot, a camera for photographing a handling position / orientation correction mark provided at the current handling position of the handling section, and data output by the camera A binarizing means for binarizing the above with the threshold value read by the reading means, and a calculation for calculating the current handling position and posture of the handling section based on the data binarized by the binarizing means. And a correction unit that corrects the handling position and orientation of the handling unit based on a comparison between a previously taught handling position and orientation and the current handling position and orientation calculated by the calculation unit. A handling position / orientation correction device for mobile robots. 2. The handling position / orientation correction device for a mobile robot according to claim 1, further comprising setting means for setting the stored contents of the storage means (that is, the threshold value corresponding to each destination of the mobile robot). A handling position / orientation correction device for a mobile robot, characterized by: 3. The handling position / orientation correcting device for a mobile robot according to claim 2, wherein the pre-taught handling position and orientation are calculated based on a threshold value set by the setting means. A handling position / orientation correction device for mobile robots. 4. The handling position / orientation correction device for a mobile robot according to claim 2, wherein the setting unit changes the threshold value gradually, and the camera outputs the change value. Second binarizing means for binarizing the generated data with the threshold value changed by the changing means, and an image based on the data binarized by the second binarizing means. A threshold value calculation means for calculating an intermediate value between the threshold value at the time when the posture correction mark starts to be correctly recognized and the threshold value at the time when the mark is not correctly recognized, and an intermediate value calculated by the threshold value calculation means. And a writing unit that writes the value in the storage unit as a threshold value corresponding to the current position of the mobile robot. Handling position and posture correction device of a mobile robot is characterized. 5. The handling position / orientation correction device for a mobile robot according to claim 2, wherein the setting unit changes the threshold value gradually, and the camera outputs the change value. Second binarizing means for binarizing the converted data with the threshold value changed by the changing means, and display means for displaying an image based on the data binarized by the second binarizing means. In the image displayed by the display unit, a first operation unit that is operated when the handling position / orientation correction mark starts to be correctly recognized, and in the image displayed by the display unit, the handling position / orientation Second operation means that is operated when the correction mark is no longer correctly recognized, and a threshold value when the first operation means is operated, The threshold value calculation means for calculating an intermediate value with respect to the threshold value at the time when the second operation means is operated, and the intermediate value calculated by the threshold value calculation means for the threshold value corresponding to the current position of the mobile robot. A handling position / orientation correction device for a mobile robot, comprising: writing means for writing in the storage means.