JPH09250917A - 3d measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a measurement device comprising a measurement/ conversion means with which a 3D object shape is easily measured in a short time, or which can be used as a simple input device used when a 3D model is inputted into a computer. SOLUTION: A sample is placed and fixed at the center of a cylindrical body 1. From multiple nozzles 2 assigned an the inner periphery surface of the cylindrical body 1, water is jetted at one time. A flowmeter 6 detects the amount of water jetted from the nozzle 2 (in accordance with a distance from a sample). The detected value of each nozzle 2 is sequentially inputted into a personal computer 22 through an AD converter 21. In the personal computer 22, the flow amount value is, as a distance value, converted into a cylindrical coordinate system. 3D display is made with graphics on the display part of personal computer 22, so that dimension and shape of desired object are obtained. For the conversion from a flow amount value into a distance value, a conversion table prepared from the constant pressure, and flow amount measurement results obtained by a cylindrical calibration standard gauge in advance, is used.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a three-dimensional measuring device, and more specifically, to a field of converting the shape of a three-dimensional object into data, for example, a three-dimensional digitizer as an input means to a computer, or The present invention relates to the measuring device that can be used in a control system of a processing machine, a machine tool (water jet method), or the like.

[0002]

2. Description of the Related Art As a conventional three-dimensional measuring apparatus, a type in which a contact (probe) is moved relative to each measurement point on a measured object to detect the position (coordinate) of each measurement point as data, or In the non-contact type, there is a method of picking up an ultrasonic image or laser slit light. However,
The contact type has a problem in that it is necessary to correct the deflection of the structure of the mechanism and the backlash of the transmission mechanism. Further, non-contact measurement by ultrasonic waves has low accuracy and a short measurement distance, so that it cannot be measured with a large object and can be practically used only for presence / absence detection. Also,
The method using laser slit light can recognize a three-dimensional image in a non-contact manner, but shadows are generated depending on the direction of laser irradiation, and a true shape cannot be obtained. Further, there are problems that the accuracy and the visual field have a large distance dependency due to the triangulation, and that the measurement time is required due to the binarization processing by the CCD image sensor.

[0003]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems in the prior art, and is a measuring device or a three-dimensional model that can easily measure the shape of a three-dimensional object in a short time. It is an object of the present invention to provide a measuring device having a three-dimensional measuring / converting means that can be used as a simple input device used when inputting data to a computer.

[0004]

According to a first aspect of the present invention, there is provided a cylindrical body, a plurality of nozzles arranged at predetermined positions on the peripheral surface of the cylindrical body, a pressure fluid generating means, and a fluid pressure control means. , For each nozzle, the operation of the fluid in the nozzle that changes according to the distance between the pipeline for supplying the pressure fluid from the pressure fluid generation means to each of the nozzles via the fluid pressure control means and the object to be measured And a detecting means for detecting.

According to a second aspect of the present invention, an annular body, a plurality of nozzles arranged at predetermined positions on the circumference of the annular body, a displacement means for the annular body, and a pressure fluid generating means, A fluid pressure control means, a conduit for supplying the pressure fluid from the pressure fluid generation means to each of the nozzles via the fluid pressure control means, and a fluid in the nozzle that changes according to the distance to the object to be measured. It has a detection means for detecting an operation for each nozzle and a displacement detection means for detecting the displacement of the displacement means.

According to a third aspect of the present invention, a base having a linear portion, a plurality of nozzles arranged at predetermined positions on the linear portion of the base having the linear portion, and a turn for mounting and rotating an object to be measured. Distance between the table, the pressure fluid generation means, the fluid pressure control means, the conduits for supplying the pressure fluid from the pressure fluid generation means to each of the nozzles via the fluid pressure control means, and the object to be measured. And a rotation detection unit that detects the rotation of the turntable. The detection unit detects the operation of the fluid in the nozzle that changes according to the above.

According to a fourth aspect of the invention, in the third aspect of the invention, the detecting means is arranged so as to face the nozzle across the turntable.

According to a fifth aspect of the present invention, a cylindrical body, a plurality of point light sources arranged at predetermined positions on the peripheral surface of the cylindrical body, and light that changes according to the distance between the point light source and the object to be measured. And a light receiving means for receiving the state change of each of the point light sources.

According to a sixth aspect of the present invention, an annular body, a plurality of point light sources arranged at predetermined positions on the circumference of the annular body, a displacement means for the annular body, the point light source and measurement. Each of the point light sources includes a light receiving unit that receives a change in the state of light that changes according to the distance to the target object, and a displacement detection unit that detects the displacement of the displacement unit.

According to a seventh aspect of the present invention, a substrate having a linear portion, a plurality of point light sources arranged at predetermined positions on the linear portion of the substrate having the linear portion, and an object to be measured are placed and rotated. A turntable, a light receiving unit that receives a change in the state of light that changes according to the distance between the point light source and the object to be measured for each point light source, and a rotation detection unit that detects the rotation of the turntable. Is.

According to an eighth aspect of the present invention, in the fifth aspect, the point light source is arranged on a half of a cylindrical peripheral surface of the cylindrical body, and the light receiving means is arranged on the diameter of the cylindrical body. It is arranged so as to face each other.

According to a ninth aspect of the invention, in the invention of the sixth aspect, the point light source is arranged on a half of the circumference of the annular body, and the light receiving means is arranged on the diameter of the annular body. It is arranged so as to face the point light source.

According to a tenth aspect of the invention, in the seventh aspect of the invention, the light receiving means is arranged to face the point light source with the turntable interposed therebetween.

An eleventh aspect of the present invention is the invention according to any one of the fifth to seventh aspects, wherein a coaxial optical fiber is used as an element constituting the point light source and the light receiving means.

The twelfth aspect of the present invention includes the first to eleventh aspects.
In any one of the above aspects, a calibration standard device having a standard three-dimensional shape is provided, and the detection means is calibrated.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION

(Embodiment of Claim 1) FIG. 1 is a view showing an embodiment of an apparatus in which a nozzle is arranged in a cylindrical body of the present invention. In FIG. 1, 1 is a cylindrical body, 2 is a nozzle arranged at a predetermined position on the circumferential surface of the cylindrical body 1, 3 is a pipe line connected to the nozzle 2 and through which fluid flows, 4 is a pressure generator, and 5 is pressure control. The device 6 is a pressure detecting means for detecting a change in fluid pressure. The operation of the apparatus is detected by the detecting means 6 as a value indicating the amount of movement of the fluid ejected from the nozzle 2 with respect to the surface of the object to be measured with reference to the peripheral surface of the cylindrical body 1. The detection means 6 can obtain an output according to the distance to the measurement object in the case of detecting the back pressure in the nozzle or the flow rate, but whether or not the detection object is detected by ON / OFF. It may be a detection format. The value indicating the amount of movement of the fluid of each nozzle 2 is detected according to the distance between each nozzle and the object to be measured, while the arrangement of the nozzles on the cylindrical body is set in advance as described above. Therefore, the position of each measurement point can be obtained with a single coordinate system, and the three-dimensional measurement of the measured object becomes possible.

In order to enable the detection operation as described above,
The pressure of the fluid from the pressure generator 4 is adjusted by the pressure controller 5 and the fluid is supplied to each nozzle. Further, as the conversion means for embodying the means of the type described above as the detection means 6, the force or pressure generated by the operation of the fluid is electrically detected by using a piezoelectric element such as a piezo element or a strain gauge. It becomes possible. Further, the arrangement of the nozzles on the peripheral surface of the cylindrical body 1 may be such that the nozzles are arranged in half of the cylindrical surface and the detecting means is arranged diametrically opposite to the nozzles. If the nozzle is arranged in half of the cylinder and the presence detecting means is arranged on the diameter of the cylinder facing the nozzle as the detecting means: -Measuring time is short-Adjustment and calibration are easy , ・ Inexpensive ・ High reliability due to no moving parts. Air can be used as the working fluid, and by using air, it is possible to perform high-accuracy measurement like an air micrometer if the device is not contaminated or if the ejection distance is short. Also, water can be used as the working fluid,
The use of water facilitates cleaning. further,
Oil can be used as the working fluid, and the use of oil enables conversion with good linearity.

FIG. 4 is a view showing another embodiment of the apparatus in which the nozzle is arranged in the cylindrical body of the present invention. As shown in FIG. 4, the device configuration includes a cylindrical body 1, a plurality of nozzles 2 arranged at predetermined positions on the peripheral surface of the cylindrical body 1,
Pipe line 3 connected to each nozzle 2 and pressure fluid generator 4
A pressure control device 5, a switching valve 20, a flow meter 6 for measuring a fluid ejected from a nozzle, an AD converter 21,
It is composed of a personal computer 22 and uses water as a fluid. In this embodiment, there is an advantage that there is no mechanical moving part and data can be taken in in a short time. The operation of the device is performed as follows. 1. An object to be measured is placed and fixed near the center of the cylindrical body 1. 2. Water is jetted simultaneously from a plurality of nozzles 2 arranged on the peripheral surface of the cylindrical body. 3. The flow rate of water jetted by the flow meter 6 between the nozzle 2 and the switching valve 20 is measured (the flow rate changes according to the distance between the target object and the nozzle). 4. The flow rate value for each nozzle is sequentially AD-converted by the AD converter 21 and input to the personal computer 22. 5. In the personal computer 22, the flow rate value is converted into a distance value (cylinder center to object surface). 6. Plot the distance values in a cylindrical coordinate system. 7. It is possible to obtain the desired size and shape of the object by displaying three-dimensionally using a graphic on the personal computer display. 8. In order to convert the flow rate value to the distance value (nozzle to object), a cylindrical calibration object is used to inject at a constant pressure and a constant flow rate, and the flow rate value at that time is associated with the radius of the calibration object to create a conversion table. This is used (see FIG. 5).

(Embodiment 2) FIG. 2 is a view showing an embodiment of an apparatus in which a nozzle is arranged in an annular body of the present invention. In FIG. 2, elements having the same reference numerals as those shown in FIG. 1 have basically the same functions, and the description will be omitted.
The description is omitted by referring to the above description. The feature of the present invention is that, in FIG. 2, the nozzle 2 is arranged at a predetermined position on the circumference of the annular body 11, and the lifting mechanism 12 for displacing the annular body 11 and means for detecting the displacement are provided. In point. The operation of the apparatus is to detect the displacement position of the elevating mechanism 12 and to detect the operation of the nozzle 2 at each position to obtain a three-dimensional amount. The detecting means 6
As an embodiment of the above, the same means and method can be applied to the arrangement of the electrical detection means and the nozzle shown in the embodiment of claim 1. Also, as the working fluid, the same fluid as in the embodiment of claim 1 can be applied.

(Embodiment of Claim 3) FIG. 3 is a view showing an embodiment of the apparatus of the present invention in which a nozzle is arranged on a vertical line portion. In FIG. 3, elements denoted by the same reference numerals as those in FIG. 1 have basically the same functions, and the description will be omitted by referring to the above description. Also, as the working fluid, the same fluid as in the embodiment of claim 1 can be applied. The feature of the present invention is that in FIG.
The nozzle 2 is arranged at a predetermined position on the linear portion of the linear base 13 having the linear portion, and the turntable 14 on which the object to be measured is placed and the means for detecting the rotation of the turntable 14 are provided. The operation of the device is the turntable 14
The rotation position of the nozzle is detected, and the operation of the nozzle at each position is detected to obtain a three-dimensional amount.

(Embodiment 4) In the apparatus shown in FIG. 3, the detecting means 6 is provided integrally with the nozzle 2 of the linear base body 13. In the present invention, the turntable 14 is sandwiched. It is provided so as to face the nozzle 2. The change in the jet flow from the nozzle 2 is detected by the detection means 6 by being blocked by the object to be measured, and a typical example thereof is a form in which the presence or absence of the jet flow is detected by ON / OFF. . According to the present invention, it is possible to easily adjust the device and calibrate the detecting means.

(Embodiment of claims 5 to 7) This embodiment is constructed by using a point light source as the fluid equivalent to the fluid ejected from the nozzle 2 forming the measuring means in the apparatus shown in FIGS. it can. The light receiving means may be either a method of receiving light that has acted on the object to be measured, or a method of directly receiving light without making it act, which is capable of receiving a change in the state of light that changes depending on the distance from the object to be measured. If it is good. For each unit element itself composed of a point light source and a light receiving means, a known means for performing such an operation can be applied.

(Embodiment of Claims 8 and 9) This embodiment corresponds to the apparatus shown in FIGS. 1 and 2, respectively.
It can be configured by using a point light source as the one corresponding to the fluid ejected from the nozzle 2 forming the measuring means, and further, the point light source is provided on one half of the cylindrical peripheral surface of the cylindrical body (claim 8).
It is arranged in a half of the circumference of the annular body (claim 9) and is arranged so as to face the point light source in terms of diameter. In this case, the light receiving means directly receives the light of the point light source to turn it on / off depending on whether or not the light is blocked by the object to be measured.
The FF output is obtained. According to this embodiment, adjustment of the device and calibration of the detection means can be easily performed.

(Embodiment of Claim 10) In this embodiment, in the apparatus shown in the embodiment of Claim 4 described above, a point light source is used as the fluid equivalent to the fluid ejected from the nozzle forming the measuring means. Can be configured. There are of course the differences between fluid and light, but the basic idea is the same as in the above-described embodiment.

(Embodiment of claim 11) This embodiment is constructed by using a coaxial optical fiber as an element constituting a point light source and a light receiving means in the apparatus shown in the embodiment of claims 5 to 7 described above. it can. The detection of the light receiving means can be performed in either an ON / OFF format or a distance proportional format. However, the light emitted from a part of the coaxial fiber is reflected and is incident on the fiber of the other part, and a single fiber is used. The point light source and the light receiving means are constituted by the coaxial fiber of. According to this measuring means using the coaxial fiber, the condition as the measuring means which is an element of the present invention is satisfied with a simple structure, and the adjustment is facilitated.

(Embodiment of Claim 12) Claims 1 to 11
As a calibration standard used when calibrating the apparatus of the invention, a standard cylinder (cylinder) 23 as shown in FIG. 5B may be used. As shown in FIG. 5A, the standard cylinder 2 is substantially concentric with the cylindrical body 1 of the three-dimensional measuring apparatus of the present invention.
When 3, is set, the cylindrical surface of the standard cylinder 23 sets a polar coordinate system, and it becomes possible to calibrate each detecting means at once with reference to this coordinate system. Further, by creating a measurement value-distance conversion table as a result of calibration and inputting the data into a personal computer, the three-dimensional graphic display of the above-mentioned measurement values can be performed.

[0027]

【The invention's effect】

Effect of claim 1: Since the measuring means by jetting the fluid is arranged on the cylindrical body, three-dimensional data can be obtained at one time, measurement time is short, cylindrical coordinates can be used, Fluid does not scatter after injection, ・ Resistant to disturbance, ・ High reliability due to no moving parts.

Advantageous effect of claim 2: Since it is composed of an annular body and an elevating mechanism for the annular body, it is possible to obtain two-dimensional data at a time. The measurement accuracy in the height direction is the feed pitch of the elevating mechanism. It can be easily changed by: ・ Cylindrical coordinates can be used ・ Placement of the target object is easy.

Effect of claim 3: A substrate having a linear portion,
Since it is composed of a plurality of nozzles arranged along the straight line portion of the base body having the straight line portion and a turntable on which the measurement target object is placed and rotated, the apparatus can be downsized, and the target object is placed. Easy to place, ・ There is little variation between nozzles, and calibration is easy.

Effect of claim 4: A substrate having a linear portion,
It is composed of a plurality of nozzles arranged along the straight line portion of the base body having the straight line portion and a turntable on which the object to be measured is placed and rotated, and the detection means faces the nozzle across the turntable. Therefore, in addition to the effect of claim 3,
Adjustment of the device and calibration of data are facilitated.

The effect of claim 5: Since it is composed of a cylindrical body, a plurality of point light sources arranged on the peripheral surface of the cylindrical body, and light receiving means of a portion corresponding to the point light source, Highly accurate measurement is possible without applying measuring force.-Do not stain the target object.-Measurement time is short.-No setup is required.

The effect of claim 6: An annular body, a plurality of point light sources arranged on the circumference of the annular body, an elevating mechanism for the annular body, and light receiving means of a portion corresponding to the point light source. Since it is composed of and, it is possible to measure with high accuracy without applying a measuring force to the target object, to keep the target object clean, to shorten the measurement time, and to eliminate the need for setup.

Effect of claim 7: A substrate having a linear portion,
Since it is composed of a plurality of point light sources arranged along the straight line portion of the base body having the straight line portion, a turntable on which an object to be measured is placed and rotated, and a light receiving means of a portion corresponding to the point light source. , ・ Highly accurate measurement is possible without applying measuring force to the target object ・ No stain on the target object ・ No setup is required.

The effect of claim 8: A cylindrical body, a plurality of point light sources arranged on the peripheral surface of the cylindrical body, and a light receiving means at a portion corresponding to the point light source. Since it is arranged in half and the light receiving means is arranged on the diameter of the cylinder so as to face the point light source, in addition to the effect of claim 5, coarse accuracy can be obtained, but measurement can be performed in a shorter time. .

The effect of claim 9: A ring-shaped body, a plurality of point light sources arranged on the circumference of the ring-shaped body, a lifting mechanism for the ring-shaped body, and light receiving means of a portion corresponding to the point light source. And the point light source is arranged in half of the ring, and the light receiving means is arranged on the diameter of the ring so as to face the point light source.
In addition to the effect of the sixth aspect, the measurement can be performed in a shorter time although the accuracy is coarse.

The effect of claim 10: a base having a linear portion, a plurality of point light sources arranged along the linear portion of the base having the linear portion, a turntable on which a measurement object is placed and rotated. It is composed of a light receiving means at a portion corresponding to the point light source and the light receiving means arranged on a base having a straight line portion, and the light receiving means faces the point light source across the turntable. In addition to the effect of item 7, the measurement can be performed in a shorter time, although the accuracy is coarse.

Effect of claim 11: Since the coaxial optical fiber is used as the point light source and the light receiving means, the structure is simplified, and the optical axis is easily adjusted.

Effect of claim 12: In addition to the effects of claims 1 to 11, since the detecting means can be calibrated by a standard device for calibration, in addition to the following: -Each sensor (nozzle, light receiving element, etc.) need not be individually calibrated. Yes, the detection means can be calibrated at one time, the measurement value-distance conversion table can be held, the distance and shape data can be obtained at high speed by the measurement value-distance conversion table.

[Brief description of drawings]

FIG. 1 is a diagram showing an embodiment of an apparatus in which a nozzle is arranged in a cylindrical body of the present invention.

FIG. 2 is a diagram showing an embodiment of an apparatus in which nozzles are arranged in a ring-shaped body of the present invention.

FIG. 3 is a view showing an embodiment of an apparatus of the present invention in which a nozzle is arranged on a base having a linear portion.

FIG. 4 is a view showing another embodiment of the device in which the nozzle is arranged in the cylindrical body of the present invention.

FIG. 5 is a diagram for explaining a standard device for calibration of the three-dimensional measuring apparatus of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Cylindrical body, 2 ... Nozzle, 3 ... Pipe line, 4 ... Pressure generator, 5 ... Pressure control device, 6 ... Pressure detection means, 11 ... Annular body, 12 ... Elevating mechanism, 13 ... Straight base | substrate, 14 ... Turntable.

Claims (12)

[Claims] 1. A cylindrical body, a plurality of nozzles arranged at predetermined positions on the peripheral surface of the cylindrical body, a pressure fluid generating means, a fluid pressure control means, and a pressure fluid from the pressure fluid generating means. It has a pipeline for supplying each of the nozzles via the fluid pressure control means, and a detection means for detecting the operation of the fluid in the nozzle that changes according to the distance to the object to be measured for each nozzle. 3D measuring device. 2. An annular body, a plurality of nozzles arranged at predetermined positions on the circumference of the annular body, a displacement means for the annular body, a pressure fluid generation means, and a fluid pressure control means. , For each nozzle, the operation of the fluid in the nozzle that changes according to the distance between the pipeline for supplying the pressure fluid from the pressure fluid generation means to each of the nozzles via the fluid pressure control means and the object to be measured A three-dimensional measuring apparatus comprising: a detecting unit that detects the displacement of the displacement unit; and a displacement detecting unit that detects the displacement of the displacement unit. 3. A base body having a straight line portion, a plurality of nozzles arranged at predetermined positions on the straight line portion of the base body having the straight line portion, a turntable on which an object to be measured is placed and rotated, and a pressure fluid. It changes according to the distance between the generation means, the fluid pressure control means, the pipeline for supplying the pressure fluid from the pressure fluid generation means to each of the nozzles via the fluid pressure control means, and the object to be measured. A three-dimensional measuring apparatus comprising: a detection unit that detects the movement of the fluid in each nozzle, and a rotation detection unit that detects the rotation of the turntable. 4. The three-dimensional measuring apparatus according to claim 3, wherein the detecting means is arranged so as to face the nozzle with the turntable interposed therebetween. 5. A cylindrical body, a plurality of point light sources arranged at predetermined positions on the peripheral surface of the cylindrical body, and a change in the state of light that changes according to the distance between the point light source and the object to be measured. A three-dimensional measuring apparatus comprising: a light receiving unit that receives light for each point light source. 6. An annular body, a plurality of point light sources arranged at predetermined positions on the circumference of the annular body, a displacement means for the annular body, and a distance between the point light source and the object to be measured. A light receiving means for receiving a change in the state of light that changes according to each point light source,
A three-dimensional measuring device, comprising: a displacement detecting means for detecting the displacement of the displacement means. 7. A base having a linear portion, a plurality of point light sources arranged at predetermined positions on the linear portion of the base having the linear portion, a turntable on which a measurement target object is placed and rotated, It is characterized by having a light receiving means for receiving a change in the state of light that changes according to the distance between the point light source and the object to be measured for each point light source, and a rotation detection means for detecting the rotation of the turntable. Three-dimensional measuring device. 8. The point light source is arranged on a half of a cylindrical peripheral surface of the cylindrical body, and the light receiving means is arranged so as to face the point light source on a diameter of the cylindrical body. The three-dimensional measuring device according to claim 5, which is characterized in that. 9. The point light source is arranged on half of the circumference of the annular body, and the light receiving means is arranged to face the point light source on the diameter of the annular body. The three-dimensional measuring device according to claim 6, wherein 10. The three-dimensional measuring apparatus according to claim 7, wherein the light receiving means is arranged to face the point light source with the turntable interposed therebetween. 11. The three-dimensional measuring apparatus according to claim 5, wherein a coaxial optical fiber is used as an element forming the point light source and the light receiving means. 12. The three-dimensional measuring apparatus according to claim 1, further comprising a calibration standard device having a reference three-dimensional shape, wherein the detecting means is calibrated.