JPH09248739A - Monitoring device for operation condition - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce load applied onto a host computer by providing means monitoring as well as managing operation condition of a plurality of apparatuses based on the analyzed information after collecting and analyzing the information collected by each information collection means. SOLUTION: Operation condition of production device 26 is taken in a data take-in unit 24 of a data collection terminal 32 from a data collection terminal 30 installed in the device 26 from a measurement unit through a connection cable 25, and the information is transferred to a managing and monitoring device 21 via a data communication passage 22 from a control unit 23 of the terminal 30, and editing is made by the device 21, then the operation condition of the device 21 is monitored. The edition result of operation condition of the device 26 from the device 21 is transferred to a host computer 10 and according to the operation condition edited, the host computer 10 monitors, for example, the operation conditions of all production devices 26 in a production factory.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an operating condition monitoring device, and particularly effective when applied to an operating condition monitoring device for monitoring the operating condition of each manufacturing device of a manufacturing line device for manufacturing liquid crystal substrates. Technology.

[0002]

2. Description of the Related Art A conventional operation status monitoring device is, for example,
Like the liquid crystal display panel manufacturing line device shown in FIG.
Manufacturing apparatus A which is an apparatus for manufacturing a liquid crystal display panel
(12), manufacturing device B (13) and manufacturing device C (1
4), and the measuring devices 11 attached to the respective manufacturing devices A to C (12) to (14) and collecting information (data) on the operating status of the attached manufacturing devices, and the respective measuring devices 11 On the basis of the result of collecting and editing the operating statuses of the manufacturing apparatuses collected by the manufacturing apparatuses A to C (12) to (1
4) and the host computer 10 that manages and monitors 4).

At this time, from the manufacturing apparatus A (12), for example, information on contact data was output as a 16-bit digital signal as information on the operating status.

Further, from the manufacturing apparatus B (13), for example, the operating status information is an analog signal, and the manufacturing apparatus C (1
From 4), the operation status information was output as an 8-bit digital signal.

Therefore, in the conventional operating condition monitoring apparatus, the manufacturing apparatuses A to C, which are the manufacturing apparatuses of the manufacturing line apparatus, are used.
For each of (12) to (14), respective manufacturing apparatuses A to C
Manufacturing devices A to C (12) to (14) together with data input conforming to the signal of the operating status information of (12) to (14).
A communication means for transmitting the operating status collected from the host computer 10 was required.

[0006]

SUMMARY OF THE INVENTION As a result of studying the above prior art, the present inventor has found the following problems.

In the conventional operating status monitoring apparatus, the host computer 10 must collect and edit the operating status transmitted from the measuring devices 11 installed in the manufacturing devices A to C (12) to (14) of the manufacturing line device. Therefore, there is a problem that the load on the host computer 10 increases.

Further, in order to centrally manage the operating conditions of the manufacturing apparatuses installed in a wide area in the factory, it is necessary to install the measuring apparatus 11 for each manufacturing apparatus, that is,
It is necessary to install the same number of measuring devices 11 as the manufacturing devices to be monitored, and a LAN (Local) for connecting these measuring devices 11 and the host computer 10.
l Area Network) etc. are required,
There is a problem that the scale of the operation status monitoring device becomes large.

Since the measuring device 11 only unilaterally collects the operating status of the installed manufacturing device, for example,
When an abnormality occurs in the control device that controls the manufacturing equipment, the operator identifies the equipment in which the abnormality has occurred based on the monitoring result displayed on the display device, and temporarily stops the power supply of the equipment. After that, there was a problem that a recovery process of restarting the engine had to be performed.

Furthermore, since the operating status output from the operating status monitoring device is based on the information collected by the measuring device 11, for example, the host computer 10 and the measuring device 1
When the failure that occurred in the communication system for connecting to No. 1 is recovered, there is a problem that the operation of the communication system cannot be confirmed unless the manufacturing apparatus is operated and the result is edited and output by the host computer 10.

It is an object of the present invention to provide an operating condition monitoring apparatus capable of reducing the load on the host computer and reducing the scale of the apparatus.

Another object of the present invention is to provide a technique capable of returning an abnormal operation, which occurs in an apparatus for collecting the operating status of a manufacturing apparatus, to a normal operation without the operator himself performing the recovery processing. To provide.

Another object of the present invention is to provide a technique capable of preferentially processing the operating status of a manufacturing apparatus having a high priority.

Another object of the present invention is to provide a technique capable of automatically recovering an abnormal operation of a control unit of a manufacturing apparatus without an operator himself / herself processing it.

The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

[0016]

SUMMARY OF THE INVENTION Among the inventions disclosed in the present application, the outline of a representative one will be briefly described.
It is as follows.

(1) An operating condition monitoring device for monitoring the operating condition of a manufacturing line device including a plurality of manufacturing devices including an inspection device, a measuring device, and a processing device, the operating condition monitoring device being installed for each of the manufacturing devices. Information collecting means for collecting information on the operating status of the apparatus, digital signal converting means built in the information collecting means for converting the operating status digital information of each manufacturing apparatus into a predetermined digital signal, and a predetermined number of information First monitoring means installed for each collecting means, collecting and analyzing the information collected by each information collecting means, and managing and monitoring the operating status of the plurality of devices based on the analyzed information; The second monitoring unit collects the information analyzed by the first monitoring unit and monitors the operation status of the manufacturing line device.

(2) Each of the information collecting means in (1) above has a monitoring information output means for outputting preset monitoring information to the first monitoring means at a predetermined time interval, and the first monitoring information is output. The monitoring means determines whether the information output by the information collecting means is the same as the preset monitoring information, and the monitoring information identifying means determines that the monitoring information identifying means is different from the preset monitoring information. In the case of performing, the information collecting means determined to be different is restarted.

(3) The information collecting means of (1) or (2) has means for storing a priority order preset in an installed device, and the first monitoring means has the priority order. It has a means for transmitting information from the first monitoring means to the second monitoring means in the order of the priority based on the information shown.

(4) The information collecting means according to any one of (1) to (3) above monitors an output cycle of a signal indicating a normal operation output from a manufacturing apparatus in which the information collecting means is installed. Cycle measuring means for determining whether the cycle measured by the cycle measuring means is a predetermined cycle or not, and when the judging means determines that the output cycle of the signal is not the predetermined cycle, It is assumed that an abnormality has occurred in the operation of the information collecting means, and the initialization means for executing the initialization of the information collecting means determined to have caused the abnormality.

According to the above-mentioned means (1), for example, in the case of constructing an operating condition monitoring device for monitoring the operating condition of the manufacturing factory of the liquid crystal display device, the first monitoring device is provided for each manufacturing line device. As a result, the first monitoring means collects and analyzes the information indicating the operating status of each manufacturing device for each manufacturing line device, and outputs the analysis result to the second monitoring device.

Therefore, the second monitoring means for monitoring the operating condition of the manufacturing factory of the liquid crystal display device only collects the information indicating the operating condition of each manufacturing line device, and all the manufacturing devices in the manufacturing factory can be monitored. You can monitor the operating status.

As described above, according to the operating status monitoring apparatus of the present invention, the operating status of each manufacturing apparatus is analyzed by the first monitoring means, so that the second monitoring means operates by the first monitoring means. Since each manufacturing device is monitored based on the analysis result,
The load on the second monitoring means can be significantly reduced.

Further, since the information collecting means includes the digital signal converting means and the analog-digital converting means, the same information collecting means can be used for manufacturing apparatuses having different output formats. A means for unifying the output format of the information output from is unnecessary.

Therefore, it is not necessary to separately provide means for connecting each information collecting means and the first monitoring means, so that the scale of the operation status monitoring device can be reduced.

According to the above-mentioned means (2), for example, when the information indicating the operating status of the manufacturing apparatus is transferred from each information collecting means to the first monitoring means, it is previously stored in each information collecting means together with this information. Transfer the set monitoring information, and
The monitoring means monitors whether the management information transferred together with each operation information matches the preset information, thereby monitoring whether each information collecting means is operating normally, and an abnormality has occurred. In this case, the first monitoring unit restarts the information collecting unit in which the abnormality has occurred, so that the worker can return to normal operation without restarting the information collecting unit in which the abnormality has occurred. .

According to the above-mentioned means (3), for example, a toxic gas or the like is used, and when abnormalities occur, information collection installed in the manufacturing apparatus which may pose a danger to the worker or the like is collected. By setting the priority of the means to be high, the operating status of the manufacturing apparatus having a high priority is processed with priority, so that the operating status can be monitored in real time.

According to the above-mentioned means (4), for example, the signal periodically output by the control device for controlling the manufacturing apparatus is constantly measured by the cycle measuring means, and the measurement result is the cycle when the manufacturing apparatus operates normally. The determination means determines whether the manufacturing apparatus is operating normally.

At this time, when it is determined that the determination result is abnormal, the initialization means initializes or restarts the control device of the corresponding manufacturing apparatus, so that the control device of the control device caused by a momentary voltage abnormality or the like is detected. An operator can automatically recover from an abnormal operation without the operator having to handle it.

[0030]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the drawings together with embodiments (examples) of the invention.

In all the drawings for describing the embodiments of the present invention, those having the same functions are denoted by the same reference numerals, and their repeated description will be omitted.

FIG. 1 is a block diagram showing a schematic configuration of an operating status monitoring apparatus according to an embodiment of the present invention. 10 is a host computer (second monitoring means), 21 is a management monitoring apparatus (first monitoring). Means), 22 is a data communication path, 23 is a control unit, 24 is a data fetching unit, 25 is a connection cable,
26 is a manufacturing apparatus, 30 is a data collection terminal A, 31 is a data collection terminal B, and 32 is a data collection terminal C.

The host computer 10 uses, for example, a well-known large-scale computer (information processing apparatus), and a program executed by the host computer 10 indicates the operating status of the manufacturing apparatus 26 input from the management / monitoring apparatus 21. Monitor based on the data (information) shown.

As is well known, the host computer 10 also carries out many other processes.

The management / monitoring device 21 uses, for example, a well-known personal computer, and the operating conditions collected by the data collecting terminals A to C (30) to (32) are controlled by a program executed by the personal computer. The information shown is analyzed and output to the host computer 10.

Further, the management / monitoring device 21 and the data collecting terminals A to C (30) to (32) are connected by, for example, the communication of the polling / selecting system which will be described later, and collect the data indicating the operating status. There is.

The data communication path 22 is a well-known data communication path for connecting the management / monitoring device 21 and the data collecting terminals A to C (30) to (32), such as a coaxial cable, a twisted pair wire, an optical fiber and the like. The communication path is not limited to a wire communication path, and may be a wireless communication path using radio waves, infrared rays, or the like.

The data communication path 22 includes at least one management / monitoring device 21 and data collection terminals A to C (3
0) to (32) are connected.

The control unit 23 is a communication control unit composed of a well-known communication interface circuit for converting the data indicating the operation status of the manufacturing apparatus 26 collected by the data fetching unit 24 into Ethernet which is the communication protocol of the present embodiment. And an operation control unit for controlling the operation of the data collection terminals A to C (30) to (32).

The operation control unit can be realized by, for example, a program.

The data fetching unit 24 fetches analog data and digital data from the manufacturing apparatus 26 and, after performing a conversion of not shown, rearranges the fetched data in a preset data order. It is a data conversion unit that outputs the converted data to the control unit 23.

Therefore, the data fetching section 24 has, for example, an 8-bit A / D converter (not shown) as an analog-digital conversion means for converting an analog signal into a digital signal.

As a digital signal input, a digital signal input having an input voltage of 24 V (volt) and a bus width of 128 bits is provided.

Although the A / D converter of this embodiment is an 8-bit A / D converter, it is not limited to this A / D converter and analog data can be taken in as digital data. The resolution is not limited to 8 bits as long as possible, and may be determined from the input voltage and the fluctuation range of the voltage.

Regarding the digital signal input, 12
It is not limited to 8 bits and 24 V, and it is possible to satisfy the output conditions of the measuring units of all the manufacturing apparatuses 26.
It goes without saying that it is sufficient to have the number of channels and the input voltage.

Further, since the analog and digital channel parts can independently collect data, for example, when connecting a manufacturing apparatus having few data measuring parts 29, as shown in FIG. As in the case where the manufacturing device 26, the manufacturing device 27 is connected to 8 bits of the digital channel, and the manufacturing device 28 is connected to the next digital 8 bits, one data collection terminal 33 is provided.
It is also possible to monitor a plurality of manufacturing apparatuses 26 to 28 with.

The connection cable 25 includes a measuring unit (not shown) of the manufacturing apparatus 26 and each of the data collecting terminals A to C (30) to.
This is a well-known cable for connecting to the data capturing unit (32), and the data output from the measuring unit is input to each data capturing unit 24.

The manufacturing device 26 is, for example, a device required for manufacturing a liquid crystal panel, and includes a substrate transfer device,
A cleaning device, a sputtering device, an exposure device, and the like, and each manufacturing device 26 has a measuring unit (not shown) for measuring the operating condition of the device.

Data collection terminals A to C (30) to (32)
Has a control unit 23 and a data fetching unit 24, respectively, and is provided with a communication address, and the management / monitoring device 21 causes the data collecting terminals A to C (30) to (3).
2) can be identified.

The data measuring unit 29 is installed in each manufacturing apparatus and outputs a signal indicating the operation of each manufacturing apparatus as an analog or digital signal.

Next, the operation of the operation status monitoring apparatus of this embodiment will be described with reference to FIG. 1. The operation status of the manufacturing apparatus 26 measured by the measuring unit is measured by the connecting cable 25. The data is collected by the data collecting terminals A to C (30) to (32) connected to the device 26.

Data collection terminals A to C (30) to (32)
The operation status data of the manufacturing apparatus 26 input to the data capturing section 24 is converted into digital information in a preset format by the data capturing section 24.

At this time, when the output of the measuring unit is an analog output, it is converted into a digital signal by an 8-bit A / D converter (not shown), and when it is a signal of digital output, a data array conversion unit (not shown). After conversion of the data array by, the data is output to the control unit 23.

In the control unit 23, the data from the data fetching unit 24 is converted by the procedure described later, and then transferred to the management / monitoring device 21 via the data communication path 22.

The management / monitoring device 21 calculates the operating condition of each manufacturing device 26 by analyzing the operating condition data transferred from each manufacturing device 26, and manufactures connected by the data communication path 22. It also calculates the overall operating status of the production line equipment comprised of equipment 26.

The operating status of each manufacturing apparatus 26 and the whole (manufacturing line apparatus) described above is displayed on a display means (not shown), for example, in a graphical display form such as a bar graph,
It is displayed in a character-based display form such as a list or in both display forms.

Further, the management / monitoring device 21 transfers the operation status analysis result to the host computer 10, so that the host computer 10 operates based on this analysis result for each manufacturing device 26 and each manufacturing line device. Monitor the situation.

Next, FIG. 3 is a diagram for explaining the data flow of the operating status monitoring apparatus of this embodiment, and FIG. 4 is a diagram for explaining the polling order of the operating status monitoring apparatus of this embodiment. Referring to FIG. 3 and FIG. 4, the data flow of the operating status monitoring apparatus of this embodiment will be described below.

First, the management / monitoring device 21, for example, as shown in FIG. 3, each of the data collecting terminals A to C (30) to.
For the control unit 23 of (32), the data collection terminal A (3
The polling (calling) operation is performed on the data information terminal 30 by sending a polling packet having a destination address indicating 0).

At this time, the above-mentioned polling packet is transmitted to all the data collecting terminals A to C (30) to (32) connected via the data communication path 22.

Therefore, the control unit 23 of each of the data information terminals 30 to 32, which has received the polling packet, refers to the destination address part of the polling packet to determine whether the received polling packet is the polling packet addressed to itself. Confirm.

As a result, the control unit 23 of the data collection terminal A (30), which has been found to be a polling packet addressed to itself, uses the data of the operating status captured by the data capturing unit 24 as a response packet, and the management and monitoring device 21.
Transfer to.

The data format of the response packet at this time is, as shown in FIG. 3, a preamble indicating the beginning of the data, a control section for describing a communication command, and an information section for inserting the data. , A postamble indicating the end of the data packet.

However, the information section can be omitted if necessary.

A well-known cyclic redundancy check code (CRC code) or the like for detecting or correcting a data error is used in the control section and the information section.

Next, the procedure of data transfer will be described with reference to FIG. 4. First, the management / monitoring device 21 sends a polling packet whose destination address is the data collection terminal A (30) to the data collection terminals A to C (30). )-(32) (step 301).

Of the data collection terminals A to C (30) to (32) that have received the polling packet, the data collection terminal A (30) corresponding to the destination address receives the data of the operating status captured by the data capture unit 24. The response packet is transferred to the management and monitoring device 21 (step 3).
02).

Upon receiving the response packet transferred from the data collection terminal A (30), the management / monitoring device 21 extracts the operating status from the response packet, edits it, and outputs it to a display means (not shown), and displays the edited result. Not stored (stored) in the storage means.

Next, the management / monitoring device 21 sends a polling packet whose destination address is the data collection terminal B (31) to the data collection terminals A to C (30) to (32) (step 303).

Of the data collection terminals A to C (30) to (32) that have received this polling packet, the data collection terminal B (31) corresponding to the destination address fetches the operation status data fetched by the data fetching section 24. Is transmitted to the management and monitoring device 21 as a response packet (step 304).

Upon receiving the response packet transferred from the data collection terminal B (31), the management / monitoring device 21 extracts the operating status from the response packet, edits it, and outputs it to the display means (not shown), and displays the edited result. Not stored (stored) in the storage means.

Next, the management / monitoring device 21 sends a polling packet whose destination address is the data collection terminal C (32) to the data collection terminals A to C (30) to (32) (step 305).

Of the data collecting terminals A to C (30) to (32) that received this polling packet, the data collecting terminal C (32) corresponding to the destination address fetches the operation status data fetched by the data fetching unit 24. Is transmitted to the management and monitoring device 21 as a response packet (step 306).

Upon receiving the response packet transferred from the data collection terminal C (32), the management / monitoring device 21 extracts the operating status from the response packet, edits it, and then outputs it to a display means (not shown) and displays the edited result. Not stored (stored) in the storage means.

Next, FIG. 5 shows a diagram for explaining the operation at the time of initialization of the data collection terminal of the operation status monitoring apparatus according to the embodiment of the present invention. Hereinafter, based on FIG. The operation at the time of initialization will be described.

In particular, FIG. 5A is a diagram for explaining the parameters of the initialization command (initialization command), and FIG. 5B shows the data format of the polling packet including the initialization parameter and the response packet. It is a figure for explaining.

In FIG. 5A, the mask setting 401 of the initialization command is set by the data collecting terminals A to C (30) to (32) attached to the respective manufacturing apparatuses.
When collecting more information, the information is collected by an interrupt signal from the manufacturing apparatus 26, which is information for setting a mask for the interrupt signal.

For example, in the manufacturing apparatus 26 to which the data collection terminal A (30) is connected, only the upper 4 bits of the interrupt signal of the manufacturing apparatus 26 are required, so the lower 4 bits are masked. By specifying the information to be set in the mask setting 401, data is acquired and transferred to the management and monitoring device 21 only when an upper 4-bit interrupt is generated, and other interrupts are ignored by this mask. To do.

The HDLC address 402 is an area for designating the destination of the initialization command.

The packet creation timer 403 is used by the manufacturing apparatus 2
This is an area for setting the time for acquiring the average of the captured data in the case of capturing the analog data in the operation status of 6, and acquires the analog data at the interval set by this packet creation timer 403. Accumulate data.

In this case, packets are created for the management / monitoring device 21 at a set time interval, but the analog data is a value (average value) obtained by dividing the data acquired at the interval set by the packet timer 403 by the number of acquisitions. Is calculated and used as data.

The digital data provides the function of taking the state of the packet as it is and converting it into a packet.

The regular creation timer 404 is a time interval when the data collection terminals A to C (30) to (32) go to the manufacturing apparatus 26 to see the operating status (go to fetch the operating status data). This is an area for specifying.

In FIG. 5B, the initialization parameter 410 of the polling packet is preset digital data, and each data collection terminal A to C (30).
~ (32) uses different data or the same data.

The data collection terminals A to C (30) to
The use of different data for each (32) has the effect of increasing the certainty of monitoring.

The initialization parameter 411 of the response packet is the data transmitted to the management / monitoring device 21 by the data collection terminals A to C (30) to (32) which have received the initialization parameter 410, and the received initialization parameter 410 is activated. Send along with the situation.

Next, the data collection terminals A to C (30) to
The recovery operation when an abnormality occurs in (32) will be described. For example, when the manufacturing apparatus 26, the management / monitoring apparatus 21 and the host computer 10 are powered on, first, the management / monitoring apparatus 21 is attached to each manufacturing apparatus 26. The initialization command shown in FIG. 5A is transmitted to the data collection terminals A to C (30) to (32).

The data collection terminals A to C (30) to (32) that have received the initialization command set the parameters set by the mask setting 401, the packet creation timer 403 and the regular creation timer 404 described above to the data collection terminals A to C. The data is stored in a data buffer (not shown) in C (30)-(32), and the data collection terminals A-C (30)-(32) are caused to execute the operation designated by the initialization command.

At this time, the data collection terminals A to C (30)
The collection of the operating status by (32) to (32) is based on the contents set in each of the data collection terminals A to C (30) to (32), for example, when the measurement is performed at regular intervals, the connected manufacturing apparatus 26. There is a case where it is performed when the signal from the manufacturing apparatus 26 changes when the signal from the manufacturing apparatus 26 is changed, or when the signal from the manufacturing apparatus 26 that is measured and connected at a fixed period is changed.

When the above-mentioned initialization is completed, the management / monitoring device 21 sends the polling packet shown in FIG. 5B to each of the data collection terminals A to C (30) to in the order shown in FIG.
(32).

On the other hand, the data collecting devices 30 to 32 which have received the polling packet are initialized by the initialization parameter 4
Along with 10, the operating status of the attached manufacturing apparatus 26 is transmitted to the management / monitoring apparatus 21.

At this time, the management / monitoring device 21 which has received the response packet from the data collection terminals A to C (30) to (32) which has transmitted the polling packet sets the transmitted initialization parameter 410 and the received initialization parameter 411. In comparison, if the data is the same, the data collection terminals A to C that transmitted the data
(30) to (32) are assumed to be operating normally,
The operating status of the information section 203 is edited.

On the other hand, when the transmitted initialization parameter 410 is different from the received initialization parameter 411, the management / monitoring device 21 causes the data collection terminals A to C (30) to (32) which transmitted the data to normally operate. Data collection terminals A to C that have not been operating and have returned (transmitted) different initialization parameters 411.
By transmitting an initialization command to (30) to (32), the data collection terminals A to C (3
0) to (32) are initialized, that is, reset, and normal operation is restored.

As described above, the operation of the data collection terminals A to C (30) to (32) is monitored by the management / monitoring device 21, and when it is determined to be abnormal, the data that has become abnormal by the management / monitoring device 21. Collection terminals A to C (30) to (3
By performing the initialization (resetting) of 2), the worker does not perform the restoration (recovery) process of the data collection terminals A to C (30) to (32), and the abnormal data collection terminal A to There is an effect that C (30) to (32) can be restored (recovered).

Next, FIG. 6 is a diagram for explaining the monitoring operation of the manufacturing apparatus by the operation status monitoring apparatus according to the embodiment of the present invention, and the monitoring operation of the manufacturing apparatus will be described below with reference to FIG. .

In FIG. 6, the signal from the manufacturing apparatus 26 to the data acquisition unit 24 within the arrow surrounded by a circle 501 is a signal indicating that the manufacturing apparatus 26 is operating normally, and will be referred to as a heartbeat hereinafter. It is written as a signal.

Next, the recovery operation when an abnormality occurs in the manufacturing apparatus 26 will be described based on this figure. The data collection terminals A to C (30) to (32) are monitoring timers (not shown). The period of the heartbeat signal of the attached manufacturing device 26 is monitored.

At this time, the above-mentioned monitoring timer indicates, for example, when the cycle of the heartbeat signal is shorter than a preset cycle, when the cycle of the heartbeat signal is longer than the preset cycle, and when the heartbeat signal stops. If it happens, set it so that an internal interrupt process is generated.

That is, when the heartbeat signal satisfies the above-mentioned interrupt condition, the data collection terminals A to C
In (30) to (32), it is considered that an abnormality has occurred in the manufacturing apparatus 26, an equipment abnormality packet is generated by internal interrupt processing, and this equipment abnormality packet is managed and monitored 21
Send to

On the other hand, the management / monitoring device 21 which has received the equipment abnormality packet displays, on the display means (not shown), that an abnormality has occurred in the manufacturing apparatus 26 based on the information of the received packet, and the host computer also displays this information. 10
By transferring the data to the manufacturing apparatus 26, it is possible to detect an abnormality that has occurred in the manufacturing apparatus 26 at an early stage.

At this time, the host computer 10 or the management / monitoring device 21 sends a command for automatic recovery or device initialization to the manufacturing device 26 in which the abnormality has occurred, and the host computer 10 or the management / monitoring device 21 automatically sends the command. By automatically returning the manufacturing device 26 in which an abnormality has occurred to the manufacturing device 26
There is an effect that can be restored (recovery).

Next, FIG. 7 shows a diagram for explaining the operation when the operating status information edited by the management / monitoring apparatus is transmitted to the host computer. Hereinafter, based on FIG. 7, the management / monitoring apparatus 21 will be described. The operation of will be described.

In FIG. 7, FIG. 7 (a) is a diagram for explaining the data format of the information part of the response packet, and FIG. 7 (b) is the host of the operating status information edited by the management / monitoring device. It is a figure for demonstrating the transmission order to a computer.

In FIG. 7A, 601 is a data 1 storage area, 602 is a data 2 storage area, 603 is a data 3 storage area, 604 is a data 4 storage area, and 605.
Indicates a storage area for data 5.

Next, for example, the data collection terminal A (3
The operation when each data of the operation status collected in 0) is edited by the management and monitoring device and then transmitted to the host computer will be described. The operation of the manufacturing device 26 collected by the data collection terminal A (30) The situation is first described (stored) in the information section 203 of the response packet transmitted from the data collection terminal A (30) to the management / monitoring apparatus 21, and then transmitted to the management / monitoring apparatus 21.

At this time, as shown in FIG. 7A, the collected operation status data are stored in a buffer (not shown) of the data fetching section 24, that is, the collected operation status data are Management monitoring device 21 arranged in order of acquisition
And the information indicating the preset priority is stored in the storage area of each data.

In the management / monitoring device 21, the information indicating the priority stored in the storage areas 601 to 605 together with each data is read out together with the operation status data, edited, and stored in the storage means (not shown), and the host computer Send to 10.

At this time, the management / monitoring device 21 changes the transmission order of the data of the operating status based on the priority of the storage area of each data and transmits the data, so that the previously transmitted information can be transmitted faster than other information. Since it can be processed by the host computer, there is an effect that processing of high priority information can be prioritized.

Especially, data 1 to 5 (601 to 605)
However, as described above, when the plurality of manufacturing apparatuses 26 to 28 are connected to one data collection terminal 30, the monitoring of each manufacturing apparatus is performed according to the importance of monitoring. There is an advantage that priority can be controlled.

As described above, according to the operation status monitoring apparatus of the first embodiment of the present invention, the data of the operation status of each manufacturing apparatus 26 attached to each manufacturing apparatus 26 from the measuring section via the connecting cable 25. Collection terminals A to C (30) to (3
2) The data is fetched by the data fetching unit 24, and this information is transferred from the control unit 23 of the data collecting terminals A to C (30) to (32) to the management monitoring device 21 via the data communication path 22, and the management monitoring device 21 The operating status of each manufacturing apparatus 26 is monitored and the editing result of the operating status in the management and monitoring apparatus 21 is transferred to the host computer 10, and based on the edited operating status, the host computer 10 may, for example, a factory. By monitoring the operating statuses of all the manufacturing apparatuses 26 in the host computer 10, there is no need to execute the processing for editing the operating status information of each manufacturing apparatus 26, which is conventionally performed by the host computer 10.
This has the effect of reducing the processing load on the.

In addition, each data collection terminal A to C (30) to
When the operating status of the manufacturing apparatus 26 is transmitted from (32) to the management / monitoring apparatus 21, each data collection terminal A to C (30) to (32) is caused to transmit a preset initialization parameter 410 together with this information, and management is performed. The initialization parameter 411 transmitted from the monitoring device 21 together with each operation information is the preset initialization parameter 4
By monitoring whether each of the data collection terminals A to C (30) to (32) is operating normally by monitoring whether or not the management monitoring device 21 is abnormal. By restarting the data collection terminal in which the error occurs, the worker can restore normal operation without restarting the data collection terminal in which the abnormality has occurred.

Data collection terminals A to C (30) to
The data transmitted from (32) to the management / monitoring device 21 is prioritized, and based on this priority, the management / monitoring device 2
By transmitting the edited operating status from 1 to the host computer 10, the data with a high priority is processed with priority, so that the important data set with a high priority can be processed with priority.

When a heartbeat signal periodically output by a control unit (not shown) that controls the manufacturing apparatus 26 is measured by a cycle measuring means (not shown), and the measurement result is not the cycle during normal operation of the manufacturing apparatus 26, Assuming that an abnormality has occurred in the manufacturing apparatus 26, by initializing, that is, restarting the manufacturing apparatus 26, the worker himself / herself handles an operation abnormality of the control apparatus 26 caused by a momentary voltage abnormality or the like. No, it can return automatically.

In the operation status monitoring apparatus of this embodiment, the manufacturing apparatuses A to
Although the operation and effect have been described in the case of three C (30) to (32), the number of manufacturing apparatuses is not limited to three, and the same effect can be obtained even when one or more manufacturing apparatuses are used. It goes without saying that it will be done.

Further, in the operation status monitoring apparatus of the present embodiment, the operation and effect have been described in the case of one production line device, but the number of production line devices is not limited to one. A larger effect can be obtained when using a plurality of units.

As described above, the invention made by the present inventor is
Although specifically described based on the embodiments of the present invention, the present invention is not limited to the embodiments of the present invention, and it is needless to say that various modifications can be made without departing from the gist of the present invention. .

[0117]

The effects obtained by typical ones of the inventions disclosed in the present application will be briefly described as follows.

(1) The operating status monitoring apparatus of the present invention can reduce the load on the host computer and reduce the scale of the apparatus.

(2) It is possible for an operator to restore the normal operation to the operation abnormality that has occurred in the apparatus for collecting the operating status of the manufacturing apparatus, without the operator performing the recovery process.

(3) The operating status of a manufacturing apparatus having a high priority can be processed with priority.

(4) It is possible to automatically recover the operation abnormality of the control unit of the manufacturing apparatus without the worker himself / herself treating it.

[Brief description of drawings]

FIG. 1 is a block diagram showing a schematic configuration of an operation status monitoring device according to an embodiment of the present invention.

FIG. 2 is a block diagram showing a connection example when a plurality of manufacturing apparatuses are connected to one data collection terminal.

FIG. 3 is a diagram for explaining a data flow of the operating status monitoring apparatus according to the present embodiment.

FIG. 4 is a diagram for explaining a polling order of the operating status monitoring apparatus according to the present embodiment.

FIG. 5 is a diagram for explaining an operation at the time of initialization of the data collection terminal of the operation status monitoring device according to the embodiment of the present invention.

FIG. 6 is a diagram for explaining the monitoring operation of the manufacturing apparatus by the operation status monitoring apparatus according to the embodiment of the present invention.

FIG. 7 is a diagram for explaining the operation when the operating status information edited by the management and monitoring device is transmitted to the host computer.

FIG. 8 is a block diagram showing a schematic configuration of a conventional operation status monitoring device.

[Explanation of symbols]

10 ... Host computer, 11 ... Measuring device, 12 ... Manufacturing device A, 13 ... Manufacturing device B, 14 ... Manufacturing device C, 21
... management monitoring device, 22 ... data communication path, 23 ... control unit,
24 ... Data capturing section, 25 ... Connection cable, 26,
27, 28 ... Manufacturing apparatus, 29 ... Data measuring unit, 30 ... Data collecting terminal A, 31 ... Data collecting terminal B, 32 ... Data collecting terminal C, 33 ... Data collecting terminal.

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification number Internal reference number FI Technical display location H01L 21/66 0360-3H G05B 15/02 Z // H01L 21/02 G06F 15/21 R (72 ) Inventor Takayuki Inoue 3681 Hayano, Mobara-shi, Chiba Hitachi Device Engineering Co., Ltd. (72) Inventor Harumichi Yoshino 3300 Hayano, Mobara-shi, Chiba Hitachi, Ltd. Electronic Device Division

Claims (4)

[Claims] 1. An operating condition monitoring device for monitoring the operating condition of a manufacturing line device comprising a plurality of manufacturing devices including an inspection device, a measuring device and a processing device, the operating condition monitoring device being installed for each of the manufacturing devices. Information collecting means for collecting information on the operating status of the device, and digital signal converting means for converting the operating status digital information of each manufacturing apparatus built in the information collecting means into a predetermined digital signal,
A first unit is installed for each predetermined number of information collecting means, collects and analyzes the information collected by each information collecting means, and manages and monitors the operating status of the plurality of devices based on the analyzed information. An operating condition monitoring device comprising: a monitoring device; and a second monitoring device that collects information analyzed by the first monitoring device and monitors the operating condition of the manufacturing line device. 2. Each of the information collecting means has monitoring information output means for outputting preset monitoring information to the first monitoring means at predetermined time intervals, and the first monitoring means collects the information. Monitoring information identifying means for identifying whether or not the information output by the means is the same as the preset monitoring information, and when it is determined that the monitoring information identifying means is different from the preset monitoring information, The operation status monitoring device according to claim 1, further comprising: a unit that restarts the information collection unit that is determined to be different. 3. The information collecting means includes means for storing a priority order preset in a device to be installed,
The monitoring means of the above has means for performing transmission order of information from the first monitoring means to the second monitoring means in the order of the priority based on the information indicating the priority. The operation status monitoring device according to Item 1 or 2. 4. The information collecting means is a cycle measuring means for monitoring an output cycle of a signal indicating a normal operation outputted from a manufacturing apparatus in which the information collecting means is installed, and a cycle measured by the cycle measuring means is predetermined. If it is determined that the output cycle of the signal is not a predetermined cycle, it is determined that an abnormality has occurred in the operation of the information collecting means, and the abnormality is The operation status monitoring device according to claim 1, further comprising: an initialization unit that executes initialization of the information collection unit that is determined to have occurred.