JPH09243817A - Formation of resin pattern and production of color filter substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide high-accuracy resin patterns and a color filter substrate by a printing method and electrodeposition method without utilizing a photolithography technique. SOLUTION: A resin film 2 consisting of a photosensitive type resin or thermosetting resin is formed on a base 1. The resin film 2 heated to the temp. at which the solvent contained in the resin film 2 is removed is selectively pressed. The non-pressed parts of the resin film 2 are removed in a developing stage, by which resin patterns 5' are formed, thereafter, the resin patterns 5' remaining on the base 1 are cured to form the resin patterns 5. An equally good alternative is to selectively press the resin film 2 consisting of the photosensitive resin while heating the resin film 2 and to cure the pressed parts by irradiation with UV rays, then to form the resin patterns 5 by removing the non-pressed parts. The first, second, third colored resin patterns are formed by utilizing a method for forming the resin patterns described above.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a resin pattern and a method for manufacturing a color filter substrate, and more particularly, a method for forming a resin pattern used for manufacturing a color filter substrate used for a liquid crystal display panel and the like. The present invention relates to a method for manufacturing a color filter substrate using the forming method.

In recent years, liquid crystal display panels have rapidly spread in various fields by taking advantage of their thinness, light weight and low power consumption.
The market trend is toward color, larger screens, higher definition, and lower prices.

There is also an urgent need to improve the quality and the cost of the color filter substrate, which is one of the components of the color liquid crystal display panel.

[0004]

2. Description of the Related Art A product having a resin pattern formed on the surface of a support, such as a transparent substrate or film made of glass or various plastics, is used as a support, and the surface of the support is provided with many transparent colorings. As a method of forming a colored resin pattern of a plurality of colors on a color filter substrate having a pattern, a colorant dispersion method, a printing method, a dyeing method, and an electrodeposition method are generally known.

In the conventional method, the colorant dispersion method in which a colorant is dispersed by using a photolithography technique to form a pattern of a colored resin on the surface of a support is capable of forming a fine colored pattern with high accuracy. On the other hand,
Since the photolithography process requiring high accuracy is required to be repeated and the process is complicated, it is expensive and cost reduction is difficult.

In the conventional method, the printing method of forming a colored pattern on the surface of the support by using a printing technique such as using a plate has a simple manufacturing process and can be manufactured at a low cost. On the other hand, since the shape of the colored pattern is inaccurate and thickness unevenness is likely to occur, there is a problem that it is difficult to follow the recent improvement in performance.

In the conventional method, the dyeing method using the dyeing technique and the photolithography technique has high resolution and the accuracy of the coloring pattern is similar to the colorant dispersion method, and the color tone is superior to the colorant dispersion method. On the other hand, there are features, but it is necessary to repeat the formation of the pattern to be dyed, dyeing, and dye-proofing treatment for each color of dyeing, which complicates the manufacturing process and makes it difficult to reduce the cost.

In the conventional method, the electrodeposition method using the electrodeposition technology does not use the photolithography technology, so that the manufacturing process is simpler than the colorant dispersion method and the dyeing method, but it is difficult to control the electrodeposition solution. However, there is a problem that the characteristics of the coloring pattern are likely to vary.

As described above, each of the conventional techniques has its own problems, but a colorant dispersion method in which a colorant is dispersed in a photosensitive resin (generally an ultraviolet curable resin) or a thermosetting resin is used. Widely used in general.

[0010]

The colorant dispersion method, which is currently the mainstream, is superior to other methods in that a highly accurate pattern is formed. However, it is necessary to repeat the exposure process using the mask and the development process for each color of the resin.

Further, as the quality of the color filter is improved, it is necessary to further improve the pattern accuracy, and it is inevitable that the manufacturing apparatus has higher accuracy, the mask has higher quality, and the manufacturing yield is higher. The price is inevitably high.

Particularly, in a proximity exposure machine which secures the exposure accuracy, since it is necessary to narrow the gap between the mask and the substrate as much as possible, if foreign matter or the like adheres to the mask, the foreign matter or the like easily transfers to the substrate. The frequent washing process of the product significantly reduces productivity.

[0013]

According to the present invention, a method for forming a resin pattern, which does not require a photolithography technique and which is more accurate, stable and more reliable than conventional printing methods and electrodeposition methods, and the use thereof are provided. Another object of the present invention is to provide a color filter substrate.

The first method for forming a resin pattern according to the present invention comprises a film forming step of forming a resin film of a photosensitive resin or a thermosetting resin on the surface of a support, and a temperature for removing a solvent of the resin. A step of selectively pressing the resin film while heating and applying the pressing part to the support, a developing step of removing the non-pressing part of the resin film, and a step of applying the resin film to the support. This is to include a curing step of curing the pressing portion of the resin film.

The second method for forming a resin pattern according to the present invention comprises a film forming step of forming a resin film of a photosensitive resin on the surface of a support, and heating the resin film to a temperature at which the solvent of the resin is removed. While pressing selectively, the pressing part is pressed against the support, and the pressing exposure step of selectively irradiating the pressing part with light that the resin film is exposed to, and the non-pressing part of the resin film are removed. This is to include a developing step and a curing step of curing the pressing portion of the resin film adhered to the support.

According to the first method of manufacturing a color filter substrate of the present invention, a first colored resin film made of a first colored resin in which a first colored agent is dispersed in a photosensitive resin or a thermosetting resin is used. The first film forming step for forming on the surface of the support and the temperature for removing the solvent contained in the first colored resin film
A first attaching step of selectively pressing the colored resin film while heating and applying the pressed portion to the support; and a first removing the non-pressed portion of the first colored resin film. A developing step, a first curing step of curing the pressing portion of the first colored resin film adhered to the support, and a second curing step in which a second colorant is dispersed in a photosensitive resin or a thermosetting resin. The second film forming step of forming a second colored resin film made of the second colored resin on the surface of the support, and the second film forming step at a temperature at which the solvent contained in the second colored resin film is removed. A second attaching step of selectively pressing the colored resin film while heating and applying the pressed portion to the support, and a second development for removing the non-pressed portion of the second colored resin film. Process, a second curing process for curing the pressing portion of the second colored resin film adhered to the support, and a third coloring agent for the photosensitive resin or the heat. A third film forming step of forming a third colored resin film made of a third colored resin dispersed in a volatile resin on the surface of the support, and a solvent contained in the third colored resin film. Third pressing step of selectively pressing the third colored resin film while heating the third colored resin film to a temperature for removal, and applying the pressing portion to the support, and non-pressing of the third colored resin film That is, it includes a third developing step of removing a portion and a third curing step of curing the pressing portion of the third colored resin film adhered to the support.

In the second method for manufacturing a color filter substrate according to the present invention, the first colored resin film made of the first colored resin in which the first colored agent is dispersed in the photosensitive resin is formed on the surface of the support. The first film forming step of forming the first colored resin film, and selectively pressing the first colored resin film while heating the first colored resin film to a temperature at which the solvent contained in the first colored resin film is removed, A first press exposure step of selectively irradiating light that the first colored resin film sensitizes, and a first development in which a non-pressed portion of the first colored resin film is removed to form a first resin pattern. Process,
A first curing step of curing the first resin pattern,
A second film forming step of forming a second colored resin film made of a second colored resin in which a second colorant is dispersed in a photosensitive resin, on the surface of the support, and the second coloring While heating the second colored resin film to a temperature at which the solvent contained in the resin film is removed,
A second press exposure step of selectively pressing and selectively irradiating the pressed portion with light that the second colored resin film sensitizes, and removing a non-pressed portion of the second colored resin film. A second developing step of forming a second resin pattern, a second curing step of curing the second resin pattern, and a third coloring resin in which a third colorant is dispersed in a photosensitive resin. Forming a third colored resin film on the surface of the support, and heating the third colored resin film to a temperature at which the solvent contained in the third colored resin film is removed. However, a third pressing exposure step of selectively pressing and irradiating the pressing portion with light that the third colored resin film exposes, and a non-pressing portion of the third colored resin film And a third developing step of removing the third resin pattern to form a third resin pattern, and a third developing step of curing the third resin pattern. It is to include a curing step.

In the first resin pattern forming method, a predetermined portion of the resin film is pressed while being heated to an appropriate temperature, and the pressing portion is adhered to the support with an adhesive force that can withstand the development of the resin film. Like

Therefore, the photolithography technique is not required, and therefore, the resin pattern formation which is easier than the conventional colorant dispersion method and the dyeing method and which is more accurate and more reliable than the conventional printing method and the electrodeposition method can be performed. It will be possible.

In the second method of forming a resin pattern, a predetermined portion of the resin film is pressed while being heated to an appropriate temperature, and the predetermined portion of the resin film is exposed by light irradiation. Therefore, the same effect as that of the method for forming the first resin pattern can be obtained, the number of steps is smaller than that of the method for forming the first resin pattern, and the ultraviolet intensity at the time of exposure using the ultraviolet curable resin is: It can be significantly reduced compared to normal times.

The method of manufacturing the first color filter substrate utilizes the method of forming the first resin pattern to form resin patterns (pixels) of three colors on the support, and the first resin The same effect as that of the pattern forming method is brought to the color filter substrate.

The method of manufacturing the second color filter substrate is a structure in which resin patterns (pixels) of three colors are formed on the support by using the method of forming the second resin pattern. The same effect as that of the pattern forming method is brought to the color filter substrate.

[0023]

1 is an explanatory view of a resin pattern forming method according to a first embodiment of the present invention, and FIG. 2 is a second view of the present invention.
FIG. 6 is an explanatory diagram of a resin pattern forming method according to the example of FIG.

In FIG. 1A, a resin film 2 made of a photosensitive resin or a thermosetting resin is formed on the surface of a plate-like support 1 made of glass or the like. The resin film 2 is formed to have a uniform thickness by using a usual method, for example, a spin coater or a roll coater, and the thickness is slightly thicker than the required film thickness.
For example, when the resin film 2 having a thickness of 1.5 μm is required,
The film is formed to a thickness of about 1.8 μm.

In FIG. 1B, the member 3 having a flat lower surface
While heating the resin film 2 at a temperature lower than the curing temperature of the resin film 2 and suitable for removing the solvent contained in the resin film 2, for example, about 90 ° C. Part).

As a method of heating the resin film 2, for example, the support 1 is mounted on a hot plate 8 and heated. As a result, the resin film 2 is in a semi-cured (pre-baked) state by removing the solvent, and the pressing portion 4 of the resin film 2 by the member 3 is
For example, it is formed in a concave shape having a depth of about 0.3 μm.

When the resin film 2 is made of a thermosetting resin, the pressing force of the pressing portion 4 with respect to the support 1 becomes a developable state (the adhesion force is larger than that of the non-pressing portion) by the pressing, When the resin film 2 is made of a photosensitive resin, it is necessary to irradiate the pressing portion with light, for example, ultraviolet rays so that the pressing portion has a crosslinkable structure capable of developing.

However, the ultraviolet intensity required to make the pressing portion of the resin film 2 made of an ultraviolet curable resin a crosslinked structure is about 20 mJ / cm ^2, which is necessary for a normal ultraviolet curable resin film. It is about 1/10 to 1/5 of the ultraviolet intensity.

Therefore, when the resin film 2 is developed, that is, the resin film 2 is washed with an appropriate solvent, a resin pattern 5'is formed on the surface of the support 1 as shown in FIG. 1 (c). In addition, the resin film 2 is CR: 7001, CG: 7001 or CB: 7 manufactured by Fuji Hunt Electronics Technology Co., Ltd.
When the film is formed with 001, an inorganic alkali developing solution containing sodium hydrogen carbonate as a main component is used as the solvent.

Then, the resin pattern 5'is subjected to a curing treatment, that is, when it is heated at an appropriate temperature, for example, 200 ° C. for a predetermined time, the resin pattern 5'is completely cured, and FIG.
As shown in, the resin pattern 5 is completed on the surface of the support 1.

In FIG. 2A, a resin film 9 made of a photosensitive resin is formed on the surface of the plate-shaped support 1 made of glass or the like. The resin film 9 is formed to have a uniform thickness by using a usual method, for example, a spin coater or a roll coater, and the thickness thereof is slightly thicker than a required film thickness, for example, the resin film 2 having a thickness of 1.5 μm. When necessary, the film is formed to a thickness of about 1.8 μm.

In FIG. 2B, while the resin film 9 is heated to a temperature suitable for removing the solvent contained in the resin film 9, for example, about 90.degree. While pressing a predetermined portion on the resin film 9, the member 10 pressing portion is irradiated with light rays, for example, ultraviolet rays UV when the resin film 9 is made of an ultraviolet curable resin, through the member 10.

As a method for heating the resin film 9, for example, the support 1 is mounted on a hot plate 8 and heated so that the pressing portion of the resin film 9 has a cross-linked structure that can withstand the developing process.
Uses a suitable mask (not shown) so as not to irradiate the non-pressed portion.

As a result, the member 10 pressing portion of the resin film 9 which has a cross-linked structure by the irradiation of ultraviolet rays has a concave shape with a depth of about 0.3 μm, and the entire resin film 9 is heated by the hot plate 8 etc. Are removed to be in a semi-cured (pre-baked) state.

The ultraviolet rays U radiated to the pressing portion of the resin film 9
The intensity of V is, for example, about 20 mJ / cm ² , and this value is an ultraviolet intensity (1 that is necessary for forming the resin film 9 in a crosslinked structure that can withstand development under normal conditions, that is, without pressing by the member 10.
It is 1/10 to ⅕ of 100 to 200 mJ / cm ² .

Next, the resin film 9 is developed, that is, the resin film 9 is washed (developed) with an appropriate solvent, and as shown in FIG. 2C, the resin pattern 5 to be adhered to the surface of the support 1 is completed. The ultraviolet intensity of 20 mJ / cm ² is obtained by applying Fuji Hunt Electronics Technology Co., Ltd. CR: 7001, CG: 7001 or CB: 700 to the resin film 9.
1 was used, and as the solvent (developing solution), an inorganic alkaline developing solution containing sodium hydrogen carbonate as a main component was used.

FIG. 3 is an explanatory view of a method of manufacturing a color filter substrate according to the first embodiment of the present invention, and FIG. 4 is a second view of the present invention.
5 is an explanatory view of a method of manufacturing a color filter substrate according to the embodiment of the present invention, and FIG. 5 is an explanatory view of a method of manufacturing a color filter substrate according to the third embodiment of the present invention.

In FIG. 3 (a), a first colored resin film, for example, a red colorant, is applied to the surface of a plate-shaped support (substrate) 1 made of glass or the like and having a black mask 7 formed thereon by an ultraviolet curable resin. (Or a colored resin film 11 dispersed in a photosensitive resin other than ultraviolet rays or a thermosetting resin) is formed.

The black mask 7 is formed to prevent leakage of light between pixels (between the colored resin patterns) and to prevent deterioration of contrast and color purity, and is generally formed of a metal chrome film.

The resin film 11 is formed by a usual method, for example, by using a spin coater or a roll coater to a uniform thickness, and the thickness is a little thicker than a required film thickness, for example, a thickness of 1.5 μm. When the resin film 11 is needed, 1.
It is about 8 μm.

In FIG. 3B, the pressing planographic plate 12 having the projections 13 formed on a plurality of predetermined portions on the lower surface is pressed against the resin film 11 with an appropriate pressing force. At that time, the resin film 11 is appropriately lower than its curing temperature and at a temperature suitable for removing the solvent contained in the resin film 11, for example, a red colorant is dispersed in the ultraviolet curable resin in the resin film 11. Resin (CR: 7 manufactured by Fuji Hunt Electronics Technology Co., Ltd.
001) is used, the heating temperature of the resin film 11 is 90
It is about ℃. The height of the protrusion 13 is such that the intermediate portion of the protrusion 13 is embedded in the resin film 11, for example, about several μm. And the resin film 11 was heated via the support 1.

As a result, the resin film 11 is in a semi-cured (pre-baked) state by removing the solvent, and the pressing portion 15 of the resin film 11 by the protrusion 13 is formed in a concave shape with a depth of about 0.3 μm, for example, and is heated. The adherence force of the pressing portion 15 made of a curable resin to the support 1 is stronger than the surrounding non-pressing portion so that it can be developed, and the pressing portion 15 made of a photosensitive resin is
For selection, light having an appropriate intensity, for example, ultraviolet light of about 20 mJ / cm ² is irradiated to form a developable crosslinked structure.

In FIG. 3B, a solid arrow F indicates a force for pushing the lithographic plate 12 toward the resin film 11, and a broken arrow H ₋₁ indicates a heat ray from the hot plate 14. The lower surface of the protrusion 13 is flat, and the protrusion 13 is
It is desirable to form a non-hydrophilic film, for example, a silicon resin film 16, which projects by about 0 μm and on which at least the surface of the protrusion 13 is not coated with the resin film 11.

Next, a developing treatment for washing the resin film 11 with a developing solution, that is, when the CR: 7001 resin is used for the resin film 11, washing with an inorganic alkali developing solution containing sodium hydrogen carbonate as a main component is performed. As shown in (c), the non-pressed portion of the resin film 11 is removed, and the pressing portion 15 pressed by the protrusion 13 and adhered to the surface of the support 1 is left on the surface of the support 1.

Therefore, when the remaining pressure portion 15 is cured, that is, heated to a temperature at which the resin film 11 is completely cured,
The pressing portion 15 is completely cured (post-baked), and the first
The colored resin pattern (red resin pattern) 18 of is completed.

Thereafter, a second colored resin pattern 19, for example, a resin pattern 19 in which a green colorant is dispersed, is formed through the same steps as the formation of the resin pattern 18, and further a third colored resin pattern 20, for example, is formed. The resin pattern 20 in which the blue colorant is dispersed is sequentially formed to complete the color filter substrate 21 shown in FIG.

When the resin patterns 18 to 20 are formed by using the CR: 7001 resin, the CG: 7001 resin and the CB: 7001 resin (all are trade names of Fuji Hunt Electronics Technology Co., Ltd.),
The intensity of the ultraviolet rays irradiated to make the resin have a cross-linking structure that can withstand development is 100 to 200 mj / cm ² , and the heating condition thereafter is about 200 ° C. for about 10 minutes (when using a hot plate). .

When a thermosetting resin is used for the resin patterns 18 to 20, it is heated to about 200 ° C. to completely cure (post-baking) them, but the heating time is 10 minutes when using a hot plate. About 1 to 2 hours when using an oven.

In FIG. 4 (a), a first colored resin film, for example, a red colorant, is applied to the surface of a plate-shaped support (substrate) 1 made of glass or the like and having a black mask 7 formed thereon, using an ultraviolet curable resin. (Or a colored resin film 11 dispersed in a photosensitive resin or a thermosetting resin other than ultraviolet rays) having a thickness of 1.8 μm.
A film is formed to a thickness of about m in the same manner as that of the first embodiment.

In FIG. 4B, the pressing lithographic plate 12 having the projections 13 formed on a plurality of predetermined portions on the lower surface is pressed against the resin film 11 with an appropriate pressing force F. At that time, the resin film 11 is appropriately lower than its curing temperature and at a temperature suitable for removing the solvent contained in the resin film 11, for example, a red colorant is dispersed in the ultraviolet curable resin in the resin film 11. Resin (CR made by Fuji Hunt Electronics Technology Co., Ltd .:
When 7001) is used, the resin film 11 is heated to about 90 ° C. in both upper and lower directions.

In this embodiment, as a method for heating the resin film 11, the support 1 is mounted on the hot plate 14 so that the resin film 11 is heated from below via the support 1, and the pressing plate 12 is used. The resin film 11 is also heated from above, that is, by incorporating a heater in the pressing planographic plate 12.

As a result, the resin film 11 is in a semi-cured (pre-baked) state because the solvent is removed, and the pressing portion 15 of the resin film 11 by the protrusion 13 is formed in a concave shape with a depth of about 0.3 μm, for example, and is heated. The adherence of the pressing portion 15 made of a curable resin and stronger than the non-pressing portion to the support 1 is stronger than that in the embodiment described with reference to FIG.

However, when the resin film 11 is made of a photosensitive resin, a mask is used for the pressing portion 15 to irradiate light having an appropriate intensity for selection, for example, ultraviolet rays of about 20 mJ / cm ² ,
Only the pressing portion 15 has a crosslinkable structure capable of developing.

As a result, the resin film 11 is in a semi-cured (pre-baked) state because the solvent is removed, and the pressing portion 15 of the resin film 11 by the protrusion 13 is formed in a concave shape with a depth of about 0.3 μm, for example. , Ready for development.

In FIG. 4B, a broken line arrow H _-1 is a heat line from the hot plate 14, a broken line arrow H _-2 is a heat line for heating the resin film 11 via the pressing planographic plate 12, and the projection 1
Silicon resin film 1 in which resin film 11 does not adhere to the surface of 3
6 is formed.

Therefore, the developing treatment for washing the resin film 11 with a developing solution, that is, when the CR: 7001 resin is used for the resin film 11, if the washing is carried out with an inorganic alkaline developing solution containing sodium hydrogen carbonate as a main component, The pressing portion 15 is left on the surface of No. 1, and when the pressing portion 15 is hardened by the same method as described in the first embodiment, as shown in FIG. The first colored resin pattern (red resin pattern) 18 is completed on the surface of No. 1.

Then, a second colored resin pattern 19, for example, a resin pattern 19 in which a green colorant is dispersed, is formed through the same steps as the formation of the resin pattern 18, and further a third colored resin pattern 20, for example, is formed. The resin pattern 20 in which the blue colorant is dispersed is sequentially formed, and the color filter substrate 21 shown in FIG. 4D is completed.

In FIG. 5A, a first colored resin film, for example, a red colorant is used as a photosensitive resin on the surface of the plate-shaped support (substrate) 1 made of glass or the like and on which the black mask 7 is formed. A colored resin film 31 dispersed in a kind of ultraviolet curable resin is formed.

The resin film 31 is formed by a usual method, for example, by using a spin coater or a roll coater to a uniform thickness, and the thickness is a little thicker than the required film thickness, for example, 1.5 μm. When the resin film 31 of the depth is required, 1.
It is about 8 μm.

In FIG. 5B, a pressing plate 32 made of a translucent material, such as glass, having projections 13 formed on a plurality of predetermined portions on the lower surface is pressed against the resin film 31 with an appropriate pressing force F, The pressing portion 35 is formed on the film 31.

A light-shielding film 36 is formed on the lower surface of the pressing lithographic plate 32 except for the projection 13 forming portion, and the resin film 31 has a temperature suitable for removing the solvent contained in the resin film 31, for example, the resin film 31. A red colorant is added to the UV curable resin (CR: 7 manufactured by Fuji Hunt Electronics Technology Co., Ltd.
001) is used, the support 1 is mounted on, for example, the hot plate 14 so that the temperature of the resin film 31 is about 90 ° C., and the resin film 31 is heated via the support 1.
The pressing portion 35 is irradiated with ultraviolet rays UV that pass through the pressing planographic plate 32 and make the pressing portion 35 have a crosslinked structure.

The intensity of the ultraviolet rays UV is about ⅕ of the ordinary intensity, that is, the ultraviolet ray intensity required for forming the resin film 31 to which the pressing force F is not applied has a crosslinked structure is 100 to 20.
Whereas it is 0 mJ / cm ^2, the strength of the ultraviolet UV in this embodiment is as suffices 20 mJ / cm ^2.

As a result, the pressing portion 35 has, for example, a depth of 3 μm.
The depression portion 35 is hardened into a concave shape, and the adherence of the pressing portion 35 to the support 1 is stronger than that of the surrounding non-pressing portion.
It is desirable that the surface of the projection 13 of the pressure plate 32 is coated with a non-hydrophilic film, for example, a silicon resin film 16 that prevents the resin film 31 from being deposited, as in the case of the pressure plate 12 described above.

Next, a developing treatment for washing the resin film 31 with a developing solution, that is, when CR: 7001 is used for the resin film 31, washing with an inorganic alkaline developing solution containing sodium hydrogen carbonate as a main component is performed. As shown in c), the red resin pattern 18 is formed on the surface of the support 11 because the pressing portion 35 is hardened and left unremoved.

Similar to the resin pattern 18, a second resin pattern 19, for example, a resin pattern 19 in which a green colorant is dispersed is formed, and a third resin pattern 20, for example, a resin pattern in which a blue colorant is dispersed, is formed. 20 are sequentially formed to complete the color filter substrate 21 shown in FIG.

In FIG. 5 (b), the solid line arrow F is the force for pushing the pressing plate 32 into the resin film 31, and the broken line arrow H _-1.
Is a heat ray from the hot plate 14, and a dashed-dotted line UV is an ultraviolet ray which is transmitted through the pressing planographic plate 32 and is applied to the pressing portion 35.

FIG. 6 is an illustration of a resin film pressing cylinder plate used in the fourth embodiment of the present invention, and FIG. 7 is an illustration of a resin film pressing cylinder plate used in the fifth embodiment of the present invention. Is. In the embodiment described with reference to FIGS. 3, 4 and 5, the pressing planographic plate 12 or 32 provided with a plurality of protrusions 13 is used. The pressing planographic plate 12 or 32 has an advantage that a plurality of predetermined portions can be simultaneously pressed against the resin film, but in the fourth or fifth embodiment of the present invention, a pressing cylinder is used instead of the pressing planographic plate 12 or 32. Use the edition.

In FIG. 6, a pressing cylinder plate 41 used in place of the pressing planographic plate 12 has a cylindrical shape in which projections 42 are formed at a plurality of predetermined positions on a rotatable cylindrical surface and the shaft center is supported horizontally. It is used by mounting it on a pressing device (not shown) so that its surface can move up and down.

The tip surfaces of the plurality of projections 42 corresponding to the projections 13 of the pressing planographic plate 12 are a part of a cylindrical surface having an appropriately large diameter with respect to the axis of the cylindrical plate mother body 44, and the surfaces of the projections 42 are non-hydrophilic. Coated with a flexible film (not shown).

To press the protrusion 42 against the resin film 11, FIG.
As shown in (b), the hot plate 14 on which the support 1 is mounted and fixed is moved in a predetermined direction (left direction in the figure) at a predetermined speed, and the cylindrical plate 41 is rotated leftward at a predetermined speed.

As a result, the predetermined portion of the resin film 11 is pressed against the protrusion 42 in sequence from the left side of the drawing, and the pressed portion is the support 1
When heated to a predetermined temperature on the hot plate 14, it becomes attached to the support 1.

In the following, by the developing process of the resin film 11 in the first embodiment using FIG. 3 and the first embodiment using FIG. 4 and the curing process of the resin pattern remaining on the support 1 by the development, The resin pattern 18 of No. 1 is formed (see FIGS. 3 and 4), and like the resin pattern 18,
The second resin pattern 19 and the third resin pattern 20 are formed, and the color filter substrate 21 shown in FIG. 3D or 4D is completed.

In FIG. 7, a pressing cylinder plate 45 made of a light-transmitting material to be used in place of the pressing planographic plate 32 has projections 42 formed at a plurality of predetermined positions on a rotatable cylindrical surface and has an axial center. It is used by mounting it on a pressing device (not shown) so that the cylindrical surface can move up and down while being supported horizontally.

The tip surfaces of the plurality of projections 42 corresponding to the projections 13 of the pressing planographic plate 32 are a part of a cylindrical surface having an appropriately large diameter with respect to the axial center of the cylindrical plate matrix 44, and the surfaces of the projections 42 are ultraviolet rays. Coated with a non-hydrophilic membrane (not shown) that does not prevent permeation of
A light shielding film 43 is formed on the surface where the protrusions 42 are not formed.

In order to press the protrusion 42 against the resin film 31 made of an ultraviolet curable resin, as shown in FIG. 7B, the hot plate 14 on which the support 1 is mounted and fixed is moved at a predetermined speed in a predetermined direction ( While moving to the left in the figure), the cylindrical plate 45 containing the ultraviolet light source (or the optical system from the ultraviolet light source) 46 and the cylindrical mask 47 is rotated leftward at a predetermined speed.

A window 48 for irradiating ultraviolet rays is opened at the bottom of the cylindrical mask 47. Then, a predetermined portion of the resin film 31 is sequentially pressed by the protrusion 42 from the left side of the drawing, and the pressing portion is
The support 1 is heated to a predetermined temperature by the hot plate 14 and irradiated with ultraviolet rays to form a crosslinked structure.

Hereinafter, the first resin pattern 1 is formed by the developing process of the resin film 31 in the third embodiment shown in FIG.
8 is formed (see FIG. 5), and like the resin pattern 18, the second resin pattern 19 and the third resin pattern 2 are formed.
0 is formed, and the color filter substrate 21 shown in FIG.

[0078]

As described above, the method for forming a resin pattern and the method for manufacturing a color filter substrate according to the present invention do not require a photolithography technique.
Easier to form or manufacture than conventional colorant dispersion and dyeing methods.

Further, when the resin pattern forming method and the color filter substrate manufacturing method according to the present invention are compared with the conventional printing method and electrodeposition method, stringing does not occur during ink transfer in the printing method. It has excellent pattern accuracy and reliability, and does not require complicated management of the electrodeposition liquid in the electrodeposition method.

Therefore, the resin pattern forming method and the color filter substrate manufacturing method according to the present invention ensure accuracy and reliability in the conventional colorant dispersion method and dyeing method, and the conventional colorant dispersion method and dyeing method. It enables us to provide products that are cheaper than the law.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of a resin pattern forming method according to a first embodiment of the present invention.

FIG. 2 is an explanatory view of a resin pattern forming method according to a second embodiment of the present invention.

FIG. 3 is an explanatory diagram of a method for manufacturing a color filter substrate according to the first embodiment of the present invention.

FIG. 4 is an explanatory diagram of a method for manufacturing a color filter substrate according to a second embodiment of the present invention.

FIG. 5 is an explanatory diagram of a method of manufacturing a color filter substrate according to a third embodiment of the present invention.

FIG. 6 is an explanatory view of a resin film pressing cylinder plate used in a fourth embodiment of the present invention.

FIG. 7 is an explanatory view of a resin film pressing cylinder plate used in a fifth embodiment of the present invention.

[Explanation of symbols]

1 Support 2,9,11,31 Resin Film 3 Resin Film Pressing Member 4,15 Resin Film Pressing Part 5,18,19,20 Resin Pattern 5 ′ Resin Pattern Before Curing 8,14 Hot Plate 12,32 Pressing Flat plate 21 Color filter substrate 41, 45 Pressing cylinder plate F Pressing force H _-1 , H _-2 Heat ray UV UV

Claims (9)

[Claims] 1. A film forming step of forming a resin film of a photosensitive resin or a thermosetting resin on the surface of a support, and selectively pressing while heating the resin film to a temperature at which the solvent of the resin is removed. A depositing step of depositing the pressing portion on the support, a developing step of removing the non-pressing portion of the resin film, and a curing step of curing the pressing portion of the resin film deposited on the support. A method for forming a resin pattern, comprising: 2. A film forming step of forming a resin film of a photosensitive resin on the surface of a support, and a step of selectively pressing the resin film while heating the resin film to a temperature at which the solvent of the resin is removed, and a pressing portion thereof. A pressure exposure step of selectively irradiating the resin film with light to which the resin film is exposed, a development step of removing the non-pressed portion of the resin film, and a curing step of curing the pressed portion of the resin film adhered to the support. A method of forming a resin pattern, comprising the steps of: 3. The method for forming a resin pattern according to claim 2, wherein the photosensitive resin is an ultraviolet curable resin, and the light is ultraviolet light. 4. A first film forming method for forming a first colored resin film made of a first colored resin in which a first colored agent is dispersed in a photosensitive resin or a thermosetting resin on a surface of a support. And a step of selectively pressing the first colored resin film while heating the first colored resin film to a temperature at which the solvent contained in the first colored resin film is removed, and applying the pressing portion to the support. Adhering step, first developing step of removing the non-pressed portion of the first colored resin film, and first curing of hardening the pressed portion of the first colored resin film attached to the support. Second step of forming a second colored resin film made of a second colored resin in which a second colored agent is dispersed in a photosensitive resin or a thermosetting resin on the surface of the support. And the temperature at which the solvent contained in the second colored resin film is removed.
A second attaching step of selectively pressing the colored resin film while heating and applying the pressed portion to the support; and a second removing step of removing the non-pressed portion of the second colored resin film. A developing step, a second curing step of curing the pressing portion of the second colored resin film adhered to the support, and a third step of dispersing a third colorant in a photosensitive resin or a thermosetting resin. A third film forming step of forming a third colored resin film made of the third colored resin on the surface of the support, and the third film forming step at a temperature at which the solvent contained in the third colored resin film is removed.
Third heating step of selectively pressing the colored resin film while heating, and applying the pressed portion to the support, and a third step of removing the non-pressed portion of the third colored resin film. A method of manufacturing a color filter substrate, comprising: a developing step; and a third curing step of curing a pressing portion of the third colored resin film adhered to the support. 5. A first film forming step of forming on a surface of a support a first colored resin film made of a first colored resin in which a first colorant is dispersed in a photosensitive resin, The first colored resin film is heated to a temperature at which the solvent contained in the first colored resin film is removed.
And a first pressing and exposing step of selectively pressing the colored resin film while heating the colored resin film, and selectively irradiating the pressing portion with light that the first colored resin film sensitizes. A first developing step of removing a non-pressed portion of the resin film to form a first resin pattern, a first curing step of curing the first resin pattern, and a second colorant to a photosensitive resin. A second film forming step of forming a second colored resin film made of the dispersed second colored resin on the surface of the support, and a temperature for removing the solvent contained in the second colored resin film. The second
And a second pressing and exposing step of selectively pressing the colored resin film while heating the colored resin film, and selectively irradiating the pressing portion with light that the second colored resin film sensitizes. A second developing step of removing the non-pressed portion of the resin film to form a second resin pattern, a second curing step of curing the second resin pattern, and a third colorant as a photosensitive resin. A third film forming step of forming a third colored resin film composed of the dispersed third colored resin on the surface of the support, and a temperature for removing the solvent contained in the third colored resin film. The third
And a third press exposure step of selectively pressing the colored resin film while heating the colored resin film, and selectively irradiating the pressing portion with light that the third colored resin film exposes. A color filter substrate, comprising: a third developing step of removing a non-pressed portion of the resin film to form a third resin pattern; and a third curing step of curing the third resin pattern. Manufacturing method. 6. Use of a pressure lithographic plate in which a plurality of predetermined portions of a flat plate are formed with a plurality of protrusions having flat tips when selectively pressing the first, second and third colored resin films. The method for manufacturing a color filter substrate according to claim 4 or 5, wherein: 7. When selectively pressing the first, second, and third colored resin films, protrusions protrude from a plurality of predetermined portions of a cylindrical surface, and the tip surfaces of the protrusions are concentric with the cylindrical surface. A method of manufacturing a color filter substrate according to claim 4 or 5, wherein a pressing cylinder plate which is a part of a large-diameter cylindrical surface is used. 8. The method for manufacturing a color filter substrate according to claim 4, wherein the photosensitive resin is an ultraviolet curable resin, and the light is ultraviolet light. 9. The pressing planographic plate or pressing cylinder plate is heated to the solvent removal temperature to press a predetermined portion of the first, second, and third colored resin films. 8. The method for manufacturing a color filter substrate according to item 8.