JPH09243493A - Pressure sensor module - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pressure sensor module which can restrain a high pressure from being applied to a connector, in which the number of components is reduced and which can be made compact. SOLUTION: A flange part 3g is installed at the base part of a connector body 3a. A coupling ring-shaped recessed part 4b is formed in a ring-shaped support 4 formed of a material which is hard to deform under a high pressure than the connector body 3a. The ring-shaped support 4 is fitted to the outside of the connector body 3a, and the flange part 3g is coupled to the coupling ring-shaped recessed part 4b. The edge 4a, on one side, of the ring-shaped support 4 is brought into contact with an insulating substrate 5a, on the pressure not-sensing side, of a pressure sensing element 5 at the outer side from the base part of the connector body 3a. The cylindrical coupling part 7g1 of a housing 1 is curled and worked so as to wrap the outer edge of the edge 4c of the ring-shaped support 4, and a housing 7 is coupled to the ring-shaped support 4.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressure sensor module.

[0002]

2. Description of the Related Art As a pressure sensor module used in a gas pressure detecting device or the like, a pressure sensor module having a structure in which a pressure sensing element, a circuit board, a part of a connector, and the like are housed in a housing is known. The pressure sensing element is a sensor element composed of a capacitance type sensor element. In this pressure sensing element, at least one is provided with opposing electrodes on opposing surfaces of a pair of insulating substrates, such as a pair of ceramic plates, which are movable or flexible with respect to an applied pressure. It has a structure for detecting a change in pressure. The connector has a structure in which a metal terminal member is fixed to a connector body formed of a synthetic resin insulating material. In the pressure sensor module disclosed in JP-A-63-19527, a flange is integrally formed at the lower end of the connector body, and the flange is laminated on the pressure sensing element via a support ring. It is housed in a housing, and is subjected to curling (caulking) so that the flange of the connector body is wrapped around the end of the housing. However, since the insulating material forming the flange portion has a low pressure resistance, when the connector is mounted by curling so as to wrap the flange portion at the end of the housing, the connector is continuously attached to the flange portion through the pressure sensing element and the support ring. When a large force is applied, the connector may be disconnected or the connector may be damaged.
Therefore, in the pressure sensor module disclosed in Japanese Patent Application Laid-Open No. 2-190731, a metal supporting member (supporting base) is formed as a pressure sensing element in order to prevent a force from being applied to the synthetic resin connector body through the pressure sensing element. They are arranged between the connector and insulate them.

[0003]

However, when a metal support base is disposed between the pressure sensing element and the connector, the overall thickness or height is increased by the thickness of the support base, and the pressure sensor module is increased. Cannot be made compact. When the supporting base is a metal,
Static electricity charged to the outside of the module through the support base enters the circuit board through the support base and generates noise, or in the worst case, destroys the electronic element. If the processing accuracy of the supporting base, especially the processing accuracy of the contact surface with the pressure sensing element is poor, a point contact or a partial contact state is caused, and a local force is applied to the pressure sensing element, and the pressure sensing element may be broken. .

An object of the present invention is to provide a pressure sensor module capable of suppressing a large force from being applied to a connector and reducing the size in the height or thickness direction to achieve compactness. It is in.

Another object of the present invention is to provide a pressure sensor module capable of suppressing a large force from being applied to a connector and suppressing static electricity from entering a circuit board.

Still another object of the present invention is to prevent a large force from being applied to the connector, and also to prevent the pressure sensing element from being destroyed due to a local force applied to the pressure sensing element. To provide a pressure sensor module.

[0007]

SUMMARY OF THE INVENTION The present invention provides a pressure sensing element for disposing a counter electrode on each of the opposing surfaces of a pair of insulating substrates and detecting a change in pressure from a change in capacitance between the counter electrodes, and a pressure sensing element. A circuit board provided with a signal conversion circuit arranged on an insulating substrate on the non-pressure sensing side of the element and electrically connected to the pressure sensing element, and one end electrically connected to the signal conversion circuit and the other end mated. A connector having a terminal member to which the terminal of the side connector is connected and a connector body formed of an insulating material to which the terminal member is fixed, a pressure sensing element, a circuit board, and a storage chamber for storing the base portion of the connector body. A housing provided with a high pressure fluid supply path that communicates with the pressure sensing surface of the pressure sensing element and supplies a fluid to be measured to the pressure sensing surface, and a coupling portion that is coupled to the base of the connector body.
The connector body is made of a material that is more easily deformed by high pressure than the housing.The base of the connector body is provided with a board housing recess surrounding the circuit board, and the end face surrounding the board housing recess contacts the insulating base on the non-pressure sensing side. Moreover, the pressure sensor module in which one end of the terminal member is located in the substrate accommodating recess is targeted. According to the present invention, an annular support body formed of a material that is less likely to be deformed at a higher pressure than the connector body and one end surface of which is outside the base portion of the connector body and contacts the insulating base body on the non-pressure sensing side is provided on the base portion of the connector body. Fits on the outside. A first engaging structure is formed between the base of the connector body and the annular support body to prevent the connector body from coming out of the annular support body in the direction in which the connector body is separated from the non-pressure sensing side insulating base body. To do. Further, a supporting step portion for supporting one end surface of the annular support member is formed in the housing, and a second engaging structure for preventing the annular support member from separating from the supporting step portion is provided with a coupling portion of the housing and the annular support member. And both.

In the present invention, the connector is brought into contact with the pressure sensing element to maintain the structure in which the circuit board is surrounded by the board receiving recess of the connector. Then, an annular support body formed of a material that is less likely to be deformed at a higher pressure than the connector body is fitted to the connector body, and the annular support body and the housing are engaged with each other,
Secure the connector to the housing. With this configuration, when a high pressure is applied to the pressure sensing element, a large force is applied to the engaging portion between the annular support and the housing, but not so much force to the connector body. Therefore, disconnection of the connector and breakage of the connector due to high pressure can be prevented. Further, the thickness dimension or height dimension of the entire pressure sensor module can be reduced by the amount that the metal supporting base is not used between the pressure sensing element and the connector. Further, since the annular support is bonded to the pressure sensing element at a location spaced from the conductive part of the pressure sensing element and the circuit board, the problem of static electricity entering the circuit board through the support base as in the related art can be solved. . It should be noted that the pressure sensing element, rather than supporting the whole,
It has been found that supporting only the outer peripheral portion has less adverse effect on electrical characteristics due to variations in processing accuracy of the annular support and the pressure sensing element, and can sufficiently support applied pressure. And it turned out that processing accuracy of the pressure sensing element may be lower when supporting the outer peripheral portion than when supporting the central portion.

The pair of insulating bases of the pressure sensing element can be made of ceramic substrates. The pair of insulating bases may have a structure in which at least the insulating bases on the pressure sensing side have flexibility.

The connector body can be made of synthetic resin such as PBT (polybutylene terephthalate) or PPS (polyphenylene sulfide).
The housing can be made of a metal such as an aluminum alloy or an iron alloy. When the connector body is made of these materials, the annular support is made of aluminum alloy,
It may be formed of a metal such as an iron alloy.

Further, the first engaging structure for preventing the connector body from coming out of the annular support may be appropriately constructed. For example, a protrusion protruding outward is integrally provided on the outer periphery of the base of the connector body, and an engagement recess is formed in the opening on one end face side of the annular support so that the protrusion engages. The first engagement structure can be configured by engaging the protrusion and the engagement recess. The protrusion may be continuous in an annular shape, or may be a plurality of protrusions radially. As a specific example, an annular flange portion that projects outward is integrally provided on the outer peripheral portion of the end portion of the base portion of the connector body, and the flange portion engages with the opening portion on one end surface side of the annular support body. To form an engaging annular recess. In this way, the engagement can be prevented only by the fitting, so that the assembling can be facilitated. In addition, the connector body is composed of a base portion and a mating connector fitting portion into which the mating connector is fitted, and the outer dimensions of the mating connector fitting portion are formed to be smaller than the outer dimensions of the base portion. The end surface portion is integrally provided with an engaging portion that allows passage of the mating connector fitting portion but engages with a boundary portion formed between the base portion and the mating connector fitting portion. The first engagement structure may be configured by engagement with. With this configuration, since it is not necessary to form the flange portion, the outer dimensions of the end portion of the connector can be reduced. Therefore, the contact area between the annular support and the pressure sensing element can be increased, and the force applied to the connector can be reduced. In this case as well, the connector body can be fitted into the annular support member to prevent the disengagement from occurring by the first engagement structure, so that the assembly becomes easy.

Further, the second engagement structure for preventing the annular support member from separating from the support step portion may be appropriately constructed. For example, the following configuration is possible. First, the storage chamber of the housing is configured so as to have a sensing element housing portion in which the pressure sensing element is housed, and a support body housing portion which is provided continuously to the pressure sensing element housing and accommodates the annular support body. ,
A support step is formed between the sensing element housing and the support housing. Then, a connecting portion extended to a position extending beyond the other end surface of the annular support housed in the support housing portion is formed on the wall portion surrounding the support housing portion, and the connecting portion is formed on the other side of the annular support body. Curling to wrap the outer edge of the end face,
The second engagement structure can be configured by engaging the curling-processed coupling portion and the other end surface of the annular support. By doing so, the assembly can be completed only by caulking (curling), so that the pressure sensor module can be easily assembled.

Further, a female screw portion is formed on the inner peripheral portion of the support accommodating portion, and a male screw portion screwed to the screw portion is formed on the outer peripheral portion of the annular support member. The second engagement structure can also be configured by screwing the male thread portion with the male thread portion. When the second engagement structure is formed by screwing in this way, a conical surface shape whose diameter dimension increases toward the pressure sensing side insulating base body is formed on the outer peripheral portion of the non-pressure sensing side insulating base body. It is preferable to form a taper portion and to form a taper portion on the inner peripheral portion of the annular support member so as to match the conical surface taper portion. This increases the joint area between the annular support and the insulating substrate on the non-pressure sensing side of the pressure sensing element, so that stress concentration is less likely to occur on the pressure sensing element and the pressure resistance is increased. . That is, the larger the contact area, the smaller the force applied per unit area when the force applied to the pressure sensing element is supported by the annular support, and the higher the pressure resistance. Further, the force applied from the pressure sensing element to the annular support acts in a direction orthogonal to the inclined surface of the taper portion, and this force is divided into a force toward the connector side and a force to spread the annular support. As a result, the force for shearing the screwed portion (the force toward the connector side) is reduced, and the pressure resistance of the screwed portion is increased.

Further, the connection between the terminal member of the connector and the connection portion of the circuit board can be made by various methods. For example,
The connecting portion of the circuit board is formed in a shape having a female terminal structure into which one end of the terminal member is fitted, and the female terminal structure and the terminal member are fitted to each other to connect the terminal member of the connector and the circuit board. You may connect with a connection part.

[0015]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a sectional view of a pressure sensor module according to an example of an embodiment of the present invention.
As shown in FIG. 1, the pressure sensor module has a structure in which a connector assembly 1 is fixed to a pressure sensor assembly 2. The connector assembly 1 has a structure in which an annular support 4 is engaged with a connector 3. The pressure sensor assembly 2 is composed of a pressure sensing element 5, a circuit board 6 and a housing 7.

The connector 3 has a structure in which a pair of terminal members 3b, 3b are insert-molded on a connector body 3a. The connector body 3a is composed of a tubular body 3c and a terminal member fixing portion 3d to which a pair of terminal members 3b, 3b are fixed, and is more easily deformed by high pressure than the material (aluminum alloy) of the housing 7 described later. It is integrally molded with a synthetic resin (insulating resin material) made of (polybutylene terephthalate). A board housing recess 3e that surrounds the circuit board 6 is formed in the base portion (portion on the housing 7 side) of the cylindrical body 3c. And the connector body 3a
Is an end face 3f that surrounds the substrate housing recess 3e.
Is in contact with the non-pressure sensitive side of the. In addition, an annular projection portion, that is, a flange portion 3g, that projects outward in the radial direction is integrally provided on the outer peripheral portion of the base portion of the cylindrical body 3c. One end of the pair of terminal members 3b, 3b is electrically connected to the circuit board 6, and the other end is connected to a terminal of a mating connector (not shown).

The annular support 4 is arranged so as to surround the outer periphery of the base of the connector body 3a so that one end surface 4a contacts the pressure sensing element 5 outside the base of the connector body 3a. The annular support 4 is formed of a metal material made of an aluminum alloy that is less likely to be deformed at a higher pressure than the material (PBT) of the connector main body 3a. An engaging recess (engaging annular recess) 4b with which the flange portion 3g of the connector 3 engages is formed in the opening of the annular support 4 on the side of the end surface 4a. The annular support body 4 is attached to the connector main body 3a by the engagement (first engagement structure) having a fitting structure of the engagement annular concave portion 4b and the flange portion 3g.

Pressure sensing element 5 of pressure sensor assembly 2
Is a known pressure sensing element. For example, as shown in the cross-sectional view of FIG. 2, a non-pressure sensing side insulating base body 5a made of a ceramic substrate and a pressure sensing side insulating base body 5b forming a flexible diaphragm have an annular glass layer 5c therebetween. It has a sealed structure. Opposite electrodes 5d and 5e are formed on the opposing surfaces of the non-pressure sensing insulating substrate 5a and the pressure sensing insulating substrate 5b, respectively. These opposing electrodes 5d and 5e are connected to the circuit pattern of the circuit board 6 by conductive connecting means (not shown). The pressure sensing element 5 detects a change in pressure from a change in capacitance between the counter electrodes 5d and 5e.

The circuit board 6 is arranged on the non-pressure sensing side insulating substrate 5a of the pressure sensing element 5, and the signal converting circuit 6b and the pair of connecting portions 6 are provided on the circuit substrate or insulating substrate 6a.
c, 6c. The connecting portion 6c is
It has a female terminal structure into which one end of the terminal member 3b of the connector 3 is fitted.

The housing 7 has a structure in which a housing body 7a and a high-pressure fluid supply cylinder 7b are integrally molded, and the housing 7 is made of a metal made of an aluminum alloy. The housing body 7a has a bottom wall portion 7
It has a substantially cylindrical shape having a1 and a peripheral wall portion 7a2, and a storage chamber 7c is formed inside. Storage room 7c
Is a pressure sensing element housing portion 7d in which the pressure sensing element 5 is housed.
And a support body storage portion 7e which is provided continuously with the pressure sensing element storage portion 7d and stores the annular support body 4, the circuit board 6 and the base portion of the connector body 3a. Since the support housing 7e is formed to have a larger diameter than the pressure sensing element housing 7d, the pressure sensing element housing 7d and the support housing 7 are formed.
A support step 7f that supports the outer edge of one end surface 4a of the annular support 4 is formed between the support step 7f and e. In this embodiment, an O-ring 8a is provided between the pressure sensing side insulating base 5b of the pressure sensing element 5 and the bottom surface (bottom wall 7a1) of the pressure sensing element housing 7d, and concentric with the outside of the O-ring 8a. And a backup ring 8b that is arranged in a uniform manner. The backup ring 8b is made of Teflon (trademark). An annular groove for accommodating the O-ring 8a and the backup ring 8b is formed on the bottom wall 7a1 of the housing body 7a. Due to the presence of the O-ring 8a and the backup ring 8b, a chamber for applying pressure to the pressure sensing side insulating base 5b is formed. Peripheral wall portion 7a of the housing body 7a surrounding the support housing portion 7e
The wall portion 7g forming a part of 2 is extended to a position extending beyond the end surface 4c of the annular support 4 housed in the support body housing portion 7e, and the joint portion 7g is extended by this extended portion.
1 is formed. The joint portion 7g1 is curled so as to wrap the outer edge of the end face 4c of the annular support 4, and the engagement between the curled joint portion 7g1 and the end face 4c of the annular support 4 (second engagement) The structure) attaches the connector assembly 1 to the pressure sensor assembly 2. The high-pressure fluid supply cylinder 7b has a cylindrical shape with a diameter smaller than that of the housing body 7a, and a screw portion 7h is formed on the outer peripheral portion. A high-pressure fluid supply passage 7i is formed inside the high-pressure fluid supply cylinder 7b. The high-pressure fluid supply path 7i is formed so as to communicate with the storage chamber 7c, and supplies a fluid to be measured consisting of a high-pressure fluid that applies pressure to the pressure-sensing-side insulating base 5b of the pressure sensing element 5.

In the present invention, the annular support 4 is made of a material that is less likely to be deformed at a higher pressure than the connector body 3a, and is engaged with the connector body 3a by the first engagement structure to prevent the annular support 4 from coming off. Since the housing 3 and the housing 7 are engaged with each other by the second engagement structure to attach the connector 3 to the housing 7, high pressure is applied to the pressure sensing element 5 by the high pressure fluid passing through the high pressure fluid supply passage 7i. Then, the pressure is transmitted to the annular support 4, and the end face 4c of the annular support 4 and the connecting portion 7g1 of the housing 7 finally receive the force. Similarly, the force transmitted to the connector body 3a is also applied to the end face 4c and the connecting portion 7.
Since it is received by g1, no great force is applied to the engaging portion between the annular support 4 and the connector body 3a. Therefore, as in the conventional case, the connector 3 may come off,
It is possible to prevent the connector 3 from being damaged by high pressure. In this example, the thickness dimension or height dimension of the entire pressure sensor module can be reduced by the amount that the metal supporting base is not arranged between the connector 3 and the pressure sensing element 5. Moreover, since the circuit board 6 is surrounded by the base of the connector body 3a, static electricity does not enter the circuit board 6 through the annular support 4. Further, since the annular support 4 contacts the outer edge portion of the pressure sensing element 5 and does not contact the central portion of the pressure sensing element 5, even if the pressure sensing element 5 has a warp, the pressure sensing element 5 is locally concentrated. Power is not applied to. Therefore, it is possible to prevent the pressure sensing element 5 from being damaged even if the processing precision of the pressure sensing element 5, especially the non-pressure sensing side insulating substrate 5a is somewhat poor.

In this example, the pressure sensor module was assembled as follows. First, as shown in the exploded cross-sectional view of FIG. 3, the connector 3 is inserted into the engaging annular recess 4 b of the annular support 4.
The annular support 4 is fitted into the connector body 3a so as to engage the flange portion 3g of the connector assembly 1 to make the connector assembly 1.
Next, the connector assembly 1 is housed in the housing 7 of the pressure sensor assembly 2 in the direction shown by the arrow A in FIG.
As a result, one end surface 4a of the annular support 4 and the end surface 3f of the base portion of the connector body 3a are brought into contact with the non-pressure sensing side insulating base body 5a of the pressure sensing element 5 and the pair of connection portions 6c, 6c of the circuit board 6 are provided. And a pair of terminal members 3 of the connector 3
b and 3b are fitted together. Next, the connecting portion 7g of the housing 7
1 is swaged or curled in the direction shown by arrow B so as to wrap the outer edge of the other end surface 4c of the annular support 4, and the connector assembly 1 is attached to the pressure sensor assembly 2
Fix to and complete the assembly.

FIG. 4 is a sectional view showing another embodiment of the pressure sensor module of the present invention. This embodiment differs from the example shown in FIGS. 1 to 3 in that a second engagement structure (engagement structure between the annular support 14 and the housing 17) is formed by screwing.
The other points are almost the same as the previous example. Therefore, the same parts as those in the example of FIGS. 1 to 3 are denoted by the same reference numerals as those in FIGS. In this embodiment, a female screw portion 17j is formed on the inner peripheral portion of the support accommodating portion 17e (peripheral wall portion 17a2) of the housing 17, and a male screw portion 1 is formed on the outer peripheral portion of the annular support 14.
4e is formed, and the female screw portion 17j and the male screw portion 14e are screwed together to form a second engagement structure, and the connector assembly 11 is attached to the pressure sensor assembly 12. An engagement annular recess 14b that engages the flange 13g of the connector 13 is formed on the inner peripheral portion of the annular support 14, and a tapered portion 14d is formed continuously with the recess 14b. The tapered portion 14d has a conical surface shape in which the head is cut so that the diameter dimension increases toward the end surface 14a. Further, on the outer peripheral portion of the non-pressure sensing side insulating base 15a of the pressure sensing element 15, there is formed a conical taper portion 15h whose diameter dimension increases toward the pressure sensing side insulating base 15b. Annular support 1
4d and the taper portion 15 of the pressure sensing element 15
When h is aligned and brought into contact with each other, the contact area between the annular support 14 and the pressure sensing element 15 increases, so that the stress generated in the pressure sensing element 15 can be relaxed. That is, the larger the contact area, the smaller the force applied per unit area when the force applied to the pressure sensing element 15 is supported by the annular support 14, and the higher the pressure resistance. Further, the force applied from the pressure sensing element 15 to the annular support 14 acts in the direction orthogonal to the inclined surface of the tapered portion,
This force is divided into a force toward the connector 13 side and a force to spread the annular support 14. As a result, the force for shearing the threaded portion (the force toward the connector 13 side) is reduced, and the pressure resistance of the threaded portion is increased.

FIG. 5 is a sectional view showing still another embodiment of the pressure sensor module of the present invention. This embodiment differs from the example shown in FIGS. 1 to 3 in the first engagement structure (the engagement structure between the connector body 23a and the annular support 24).
Other configurations are almost the same as the previous example.
Therefore, the same parts as those in the example of FIGS. 1 to 3 are denoted by the same reference numerals as those in FIGS. In the present embodiment, the outer dimension of a portion (mate connector fitting portion) 23h of the connector body 23a into which the mating connector is fitted is formed smaller than the outer dimension of the base portion 23i, and the other end surface portion of the annular support 24 is formed. Is integrally provided with an engaging portion 24d that allows passage of the mating connector fitting portion 23h but engages with a boundary portion 23j formed between the base portion 23i and the mating connector fitting portion 23h. In the present embodiment, the first
The ring-shaped support 2
The connector main body 23 a was fitted into the connector 4 and the annular support 24 was attached to the connector 23. In this embodiment, since it is not necessary to form the flange portion, the outer dimension of the end portion of the connector 23 can be reduced. Therefore, the contact area between the annular support 24 and the pressure sensing element 25 can be increased, and the force applied to the connector 23 can be reduced.

The constituent features of some of the inventions described in this specification will be described below.

(1) One is provided with a pair of insulating bases 5a, 5b, one of which is flexible with respect to the measured pressure, and the counter electrodes 5d, 5e are arranged on the facing surfaces of the pair of insulating bases, respectively. A pressure sensing element 5 for detecting a change in pressure from a change in capacitance between the opposing electrodes, and the pressure sensing element disposed on the non-pressure sensing side insulating substrate 5a having no flexibility of the pressure sensing element 5. 5, a circuit board 6 provided with a signal conversion circuit 6b electrically connected to the terminal 5, and one end of the signal conversion circuit 6
a connector 3 having a terminal member 3b electrically connected to b and a terminal of a mating connector connected to the other end, and a connector body 3a formed of an insulating material to which the terminal member 3b is fixed; Element 5, the circuit board 6
And a storage chamber 7 for storing the base of the connector body 3a
c, the high pressure fluid supply path 7i for communicating the fluid to be measured to the flexible pressure sensing surface of the pressure sensing element 5 in communication with the storage chamber 7c, and the base of the connector body 3a. A housing 7 having a coupling portion 7g1 for connecting the circuit board 6 to the connector body 3a. The connector body 3a is formed of a material that is more easily deformed by high pressure than the housing 7, and the base of the connector body 3a surrounds the circuit board 6. A storage recess 3e is formed, an end surface 3f surrounding the substrate storage recess 3e is in contact with the non-pressure sensing side insulating substrate 5a, and the one end of the terminal member 3b is located in the substrate storage recess 3e. In the pressure sensor module, the connector body 3a is made of a material that is less likely to be deformed at a higher pressure than the connector body 3a, and one end surface of the connector body 3a
An annular support 4 which is in contact with the insulating base 5a on the non-pressure sensing side outside the base of the connector main body 3a is fitted on the outside of the base of the connector main body 3a. The annular support 4 is a first engagement structure that prevents the connector main body 3a from coming out of the annular support 4 in a direction in which the connector main body 3a moves away from the non-pressure sensing side insulating base 5a. The housing 7 is formed with a support step 7f for supporting the one end face of the annular support 4, and the housing 7 is formed between the connecting portion 7g1 of the housing 7 and the annular support 4. The pressure sensor module is characterized in that second annular engaging structures 7g and 4c for preventing the annular support 4 from separating from the support step 7f are formed between the two. .

(2) A protruding portion 3g protruding outward is provided on the outer peripheral portion of the end portion of the base portion of the connector body 3a.
Is integrally provided, and an engaging recess 4b into which the protrusion 3g is engaged is formed in an opening portion of the annular support 4 on the side of the one end surface 4a, and the protrusion 3g and the engagement are formed. The pressure sensor module according to (1) above, wherein the first engagement structure is configured by engagement with the recess 4b.

[0028]

According to the present invention, the connector is brought into contact with the pressure sensing element to maintain the structure in which the circuit board is surrounded by the connector, and the annular support formed of a material that is less likely to be deformed at a higher pressure than the connector main body is used. Since the connector is fixed to the housing by engaging the main body and the annular support and the housing, when the high pressure is applied to the pressure sensing element, the engagement portion between the annular support and the housing is large. Although the force is applied, the connector body is not so strongly applied. Therefore, disconnection of the connector and breakage of the connector due to high pressure can be prevented. Further, the thickness dimension or height dimension of the entire pressure sensor module can be reduced by the amount that the metal supporting base is not arranged between the pressure sensing element and the connector. Further, since the metal supporting base is not present under the circuit board, static electricity does not enter the circuit board through the supporting base unlike the conventional case. Further, since the annular support does not come into contact with the pressure sensing element as a whole, even if there is a warp in the pressure sensing element, no local force is applied and damage to the pressure sensing element can be prevented. .

[Brief description of drawings]

FIG. 1 is a sectional view of a pressure sensor module according to an example of an embodiment of the present invention.

FIG. 2 is a cross-sectional view of a pressure sensing element used in the pressure sensor module according to the exemplary embodiment of the present invention.

FIG. 3 is an exploded cross-sectional view of a pressure sensor module according to an example of an embodiment of the present invention.

FIG. 4 is a sectional view showing another embodiment of the pressure sensor module of the present invention.

FIG. 5 is a cross-sectional view showing still another embodiment of the pressure sensor module of the present invention.

[Explanation of Codes] 3 Connector 3a Connector Main Body 3b Terminal Member 3e Substrate Storage Recess 3f End Face 3g Projection (Flange) 4 Annular Support 4a End Face 4b Engagement Recess (Engaging Recess) 5 Pressure Sensing Element 5a Non-Pressure Sensing Side insulating substrate 5b Pressure sensing side insulating substrate 5d, 5e Counter electrode 6 Circuit board 6a Insulating substrate 6b Signal conversion circuit 6c Connection portion 7 Housing 7c Storage chamber 7d Sensing element storage portion 7e Support storage portion 7f Support step portion 7g1 Coupling part 7i High pressure fluid supply path

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Hideki Tanigami 3158 Shimookubo, Osawano-cho, Kamishinagawa-gun, Toyama Prefecture Hokuriku Electric Industry Co., Ltd.

Claims (10)

[Claims] 1. A pressure sensing element for disposing a counter electrode on each of the opposing surfaces of a pair of insulating substrates to detect a change in pressure from a change in capacitance between the counter electrodes, and a non-pressure sensing side of the pressure sensing element. A circuit board provided with a signal conversion circuit arranged on the insulating base body and electrically connected to the pressure sensing element; and one end electrically connected to the signal conversion circuit and the other end having a terminal of a mating connector. A connector having a terminal member to which is connected and a connector body formed of an insulating material to which the terminal member is fixed; a storage chamber for storing the pressure sensing element, the circuit board, and a base portion of the connector body; A high pressure fluid supply path communicating with the chamber for supplying a fluid to be measured to the pressure sensing surface of the pressure sensing element, and a housing having a coupling portion coupled to the base portion of the connector body. The connector body is formed of a material that is more easily deformed by a high pressure than the housing, a board housing recess that surrounds the circuit board is formed in the base portion of the connector body, and an end surface that surrounds the board housing recess is formed. A pressure sensor module, which is in contact with an insulating base on the non-pressure sensing side and has the one end of the terminal member located in the substrate accommodating recess, the pressure sensor module being formed of a material that is less likely to be deformed at a higher pressure than the connector body. An annular support, one end surface of which is in contact with the non-pressure sensing side insulating base outside the base of the connector main body, is fitted outside the base of the connector main body, and the base of the connector main body. And the annular support, the connector body is removed from the annular support in a direction in which the connector body moves away from the non-pressure sensing side insulating substrate. The housing is formed with a first engagement structure that prevents the first engagement structure from coming out, and a supporting step portion that supports the one end surface of the annular support body is formed in the housing. Portion and the annular support body are configured to form a second engagement structure between the annular support body and the annular support body to prevent the annular support body from separating from the support step portion. . 2. A projecting portion projecting outward is integrally provided on an outer peripheral portion of an end portion of the base portion of the connector body, and the projecting portion is formed in an opening portion on the one end face side of the annular support body. The pressure sensor module according to claim 1, wherein an engagement recess is formed so that the parts engage with each other, and the first engagement structure is configured by engagement between the protrusion and the engagement recess. 3. The connector main body comprises the base portion and a mating connector fitting portion into which the mating connector is fitted, and the mating connector fitting portion is formed so that an outer dimension thereof is smaller than an outer dimension of the base portion. An engaging portion that allows passage of the mating connector fitting portion, but engages with a boundary portion formed between the base portion and the mating connector fitting portion, on the other end surface portion of the annular support. The pressure sensor module according to claim 1, wherein the first engagement structure is formed by engaging the boundary portion and the engagement portion. 4. The sensing chamber of the housing is provided with a sensing element housing portion for housing the pressure sensing element, and a support body continuously provided to the pressure sensing element housing portion for housing the annular support body. A storage part, the support step part is formed between the sensing element storage part and the support storage part, and a wall part surrounding the support storage part is stored in the support storage part. The coupling portion is configured to extend to a position extending beyond the other end surface of the annular support, and the coupling portion is curled so as to wrap the outer peripheral portion of the other end surface of the annular support, and the curling is performed. The pressure sensor module according to claim 1 or 2, wherein the second engagement structure is configured by engagement of the coupling portion and the other end surface of the annular support. 5. The housing chamber of the housing houses a sensing element housing part for housing the pressure sensing element, and a part of the annular support housed continuously from the pressure sensing element housing part. A support accommodating portion, the support step is formed between the sensing element accommodating portion and the support accommodating portion, and a female screw portion is formed on an inner peripheral portion of the support accommodating portion. The connecting portion, and a male screw portion screwed into the female screw portion is formed on an outer peripheral portion of the part of the annular support, and the female screw portion and the male screw portion are The pressure sensor module according to claim 1, wherein the second engagement structure is configured by screwing. 6. A conical taper portion whose diameter dimension increases toward the pressure sensing side insulating base is formed on the outer peripheral portion of the non-pressure sensing side insulating base, The pressure sensor module according to claim 5, wherein the inner peripheral portion has a taper portion that matches the conical taper portion. 7. The connecting portion electrically connected to the terminal member of the circuit board has a female terminal structure into which the one end of the terminal member is fitted. Pressure sensor module. 8. A pressure sensing element for disposing a counter electrode on each of the facing surfaces of a pair of ceramic bases arranged so as to face each other and detecting a change in pressure from a change in capacitance between the counter electrodes, and the pressure sensing device. A circuit board having a signal conversion circuit arranged on the ceramic substrate on the non-pressure sensing side of the element and electrically connected to the pressure sensing element; one end electrically connected to the signal conversion circuit and the other end A connector having a terminal member to which a terminal of a mating connector is connected and a connector body formed of an insulating resin material to which the terminal member is fixed, the pressure sensing element, the circuit board, and the base portion of the connector body are housed. A storage chamber, a high-pressure fluid supply path that communicates with the storage chamber and supplies a fluid to be measured that exerts a pressure on a pressure sensing surface of the pressure sensing element, and the base of the connector body. A housing made of metal having a coupling portion coupled to a portion, a board housing recess for surrounding the circuit board is formed in the base of the connector body, and an end surface surrounding the board housing recess is A pressure sensor module which is in contact with a ceramic base on the non-pressure sensing side and has the one end of the terminal member located in the substrate accommodating recess, wherein one end face is outside the base portion of the connector body. An annular support body, which is in contact with the ceramic base on the non-pressure sensing side, is fitted to the outside of the base portion of the connector body, and an annular flange projecting outward is provided on the outer peripheral portion of the end portion of the base portion of the connector body. Part is provided integrally,
An engagement annular recess is formed in the opening on the one end face side of the annular support body so that the flange portion engages, and the storage chamber of the housing is configured to detect the pressure sensing element. An element housing portion and a support housing portion that is provided continuously to the pressure sensing element housing portion and accommodates the annular support body, and is provided between the sensing element housing portion and the support body housing portion. A support step portion is formed to contact the outer edge portion of the one end surface of the annular support body to support the annular support body, and a wall portion surrounding the support body storage portion of the housing is stored in the support body storage portion. The coupling portion is formed by extending to a position extending beyond the other end surface of the annular support body, and the coupling portion is curled so as to wrap the outer edge portion of the other end surface of the annular support body. It is characterized by Sensor module. 9. A pressure sensing element for detecting a change in pressure from a change in capacitance between the opposite electrodes by disposing opposite electrodes on opposite surfaces of a pair of ceramic bases arranged so as to face each other. A circuit board having a signal conversion circuit arranged on the ceramic substrate on the non-pressure sensing side of the element and electrically connected to the pressure sensing element; one end electrically connected to the signal conversion circuit and the other end A connector having a terminal member to which a terminal of a mating connector is connected and a connector body formed of an insulating resin material to which the terminal member is fixed, the pressure sensing element, the circuit board, and the base portion of the connector body are housed. A storage chamber, a high-pressure fluid supply path that communicates with the storage chamber and supplies a fluid to be measured that exerts a pressure on a pressure sensing surface of the pressure sensing element, and the base of the connector body. A housing made of metal having a coupling portion coupled to a portion, a board housing recess for surrounding the circuit board is formed in the base of the connector body, and an end surface surrounding the board housing recess is A pressure sensor module which is in contact with a ceramic base on the non-pressure sensing side and has the one end of the terminal member located in the substrate accommodating recess, wherein one end face is outside the base portion of the connector body. An annular support body that contacts the ceramic base on the non-pressure sensing side is fitted to the outside of the base portion of the connector body, and the connector body is composed of the base portion and a mating connector fitting portion to which the mating connector is fitted. The outer dimensions of the mating connector fitting portion are smaller than the outer dimensions of the base portion, and the other end face portion of the annular support is provided with the mating connector fitting portion. The pressure sensing element is accommodated in the accommodation chamber of the housing, which is integrally provided with an engagement portion that engages with a boundary portion formed between the base portion and the mating connector fitting portion. A sensing element housing portion, and a support housing portion that is provided continuously with the pressure sensing element housing portion and houses the annular support, the sensing element housing portion and the support body housing portion. A support step portion that supports the annular support member by contacting with an outer edge portion of the one end surface of the annular support member is formed between, and a wall portion that surrounds the support accommodating portion of the housing stores the support member. Curled so that the connecting portion is extended to a position extending beyond the other end surface of the annular support housed in the portion, and the connecting portion wraps the outer peripheral portion of the other end surface of the annular support. Pressure characterized by being Sensor module. 10. A pressure sensing element for disposing a counter electrode on each of the facing surfaces of a pair of ceramic bases arranged so as to face each other and detecting a change in pressure from a change in capacitance between the counter electrodes, and the pressure sensing device. A circuit board having a signal conversion circuit arranged on the ceramic substrate on the non-pressure sensing side of the element and electrically connected to the pressure sensing element; one end electrically connected to the signal conversion circuit and the other end A connector having a terminal member to which a terminal of a mating connector is connected and a connector body formed of an insulating resin material to which the terminal member is fixed, the pressure sensing element, the circuit board, and the base portion of the connector body are housed. The housing chamber, the high-pressure fluid supply path that communicates with the housing chamber and supplies the fluid to be measured for exerting a pressure on the pressure sensing surface of the pressure sensing element, and the connector body. A metal housing having a coupling portion coupled to a base portion, wherein the base portion of the connector body is provided with a board housing recess that surrounds the circuit board, and an end face that surrounds the board housing recess is A pressure sensor module which is in contact with a ceramic base on the non-pressure sensing side and has the one end of the terminal member located in the substrate accommodating recess, wherein one end face is outside the base portion of the connector body. An annular support body, which is in contact with the ceramic base on the non-pressure sensing side, is fitted to the outside of the base portion of the connector body, and an annular flange projecting outward is provided on the outer peripheral portion of the end portion of the base portion of the connector body. Part is provided integrally,
An engagement annular recess is formed in the opening on the one end face side of the annular support body so that the flange portion engages, and the storage chamber of the housing is configured to detect the pressure sensing element. An element housing portion and a support housing portion that is provided continuously to the pressure sensing element housing portion and accommodates the annular support body, and is provided between the sensing element housing portion and the support body housing portion. A support step is formed to contact the outer edge of the one end surface of the annular support to support the annular support, and a female screw thread is formed on the inner periphery of the support housing to form the connection. And a male screw portion screwed to the female screw portion is formed on the outer peripheral portion of the part of the annular support body.