JPH09239246A - Filtration device and cleaning method therefor - Google Patents

Filtration device and cleaning method therefor

Info

Publication number
JPH09239246A
JPH09239246A JP8080991A JP8099196A JPH09239246A JP H09239246 A JPH09239246 A JP H09239246A JP 8080991 A JP8080991 A JP 8080991A JP 8099196 A JP8099196 A JP 8099196A JP H09239246 A JPH09239246 A JP H09239246A
Authority
JP
Japan
Prior art keywords
fluid
membrane
path
backwashing
filtration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8080991A
Other languages
Japanese (ja)
Other versions
JP3440684B2 (en
Inventor
Tsuyoshi Fujihashi
強志 藤橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nok Corp
Original Assignee
Nok Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nok Corp filed Critical Nok Corp
Priority to JP08099196A priority Critical patent/JP3440684B2/en
Publication of JPH09239246A publication Critical patent/JPH09239246A/en
Application granted granted Critical
Publication of JP3440684B2 publication Critical patent/JP3440684B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Filtration Of Liquid (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

PROBLEM TO BE SOLVED: To effectively remove a contaminant sticking to the surface of a film, and also prevent the contaminant from re-sticking to the film and reduce the amount of a drained liquid by circulating a liquid in a circulatory path while maintaining a high pressure state on the permeation side of the film, with the help of a backward washing means during the backward washing process. SOLUTION: During the backward washing process, a flow path switching valve 7 is changed over to a backward washing side. Next, a high pressure air is allowed to flow into a backward washing 5 by changing over a switching valve 6 to cause a backward washing liquid accumulated in the backward washing tank 5 to flow back into a hollow fiber membrane module 1h from a drainage 4. In addition, the backward washing process is performed all at once, and a drain valve 14 is kept open until an inflow path 2 is emptied and the backward washing liquid is completely drained. After that, the drain valve 14 is closed, and the switching valve 6 is turned to the backward washing side, and further, the pressure on the permeation side of the film is kept at a high level by the high pressure air. Consequently, the circulating backward washing liquid cannot permeate through the film because the permeation side of the film is at a high pressure. Besides, no contaminant which is peeled off re-sticks to the film, and the contaminant sticking to the surface of the film is removed by the circulating liquid.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、例えば洗浄液の再
利用や排水処理を行うために用いられる膜利用型濾過手
段と、この膜利用型の濾過手段に膜透過液や圧縮空気等
の逆洗流体を逆流させて膜透過方向を逆転させて膜を洗
浄する逆洗手段を備えた濾過装置と、その洗浄方法に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a membrane-utilizing type filtration means used for, for example, reusing a cleaning liquid or treating waste water, and a backwashing of the membrane-permeating liquid or compressed air to the membrane-utilizing type filtration means. The present invention relates to a filtration device equipped with a backwash means for washing a membrane by causing a fluid to flow backward to reverse the membrane permeation direction, and a washing method thereof.

【0002】[0002]

【従来の技術】従来より、洗浄液の再利用や排水処理を
行うために用いられる濾過装置に、精密濾過膜や限外濾
過膜等の膜を利用した油水分離を行う膜利用型濾過手段
を採用しているものがある。
2. Description of the Related Art Membrane-based filtration means for separating oil / water using a membrane such as a microfiltration membrane or an ultrafiltration membrane has been conventionally used in a filtration device used for reusing a cleaning liquid or treating waste water. There are things that are doing.

【0003】これは、油滴の大きさよりもはるかに小さ
な微細孔を有する膜を透過させて油水の濾過を行い、油
と水を分離して油分の含まない洗浄液を得るものであ
る。
In this method, oil / water is filtered by passing through a membrane having fine pores much smaller than the size of an oil droplet, and oil and water are separated to obtain an oil-free cleaning liquid.

【0004】図4は膜利用型濾過手段を利用した従来の
濾過装置の一例である。この濾過装置100は、洗浄対
象となるワークW101に付着した汚れや油分を除去す
るもので、洗浄槽101の内部に水と洗剤を主成分とす
る洗浄液L101を入れ、その中にワークW101を浸
漬して、超音波や攪拌、揺動といった物理的作用によ
り、汚れや油分を除去するものである。ここでは102
を超音波発振器として例示した。
FIG. 4 shows an example of a conventional filtration device utilizing a membrane-utilizing filtration means. This filtering device 100 removes dirt and oil adhering to the work W101 to be cleaned. A cleaning liquid L101 mainly composed of water and a detergent is put in the cleaning tank 101, and the work W101 is immersed therein. Then, the dirt and oil are removed by a physical action such as ultrasonic waves, stirring, and shaking. Here 102
Was exemplified as an ultrasonic oscillator.

【0005】この洗浄槽101の中に次々と連続的にワ
ークW101を投入すると、洗浄槽101内の洗浄液L
101の油分濃度が上昇して、ワークに対する洗浄能力
が低下するので、濾過装置100には以下に説明する濾
過手段を備えている。
When the workpieces W101 are continuously and successively put into the cleaning tank 101, the cleaning liquid L
Since the oil concentration of 101 increases and the cleaning ability for the work decreases, the filtration device 100 is equipped with the filtration means described below.

【0006】これは排出経路103の下流に設けられた
2段の濾過手段であり、1段目は第1循環経路110に
よるものであり、ポンプ111と浮上油回収手段112
を備えている。
This is a two-stage filtering means provided downstream of the discharge path 103, the first stage is by the first circulation path 110, and the pump 111 and the floating oil recovery means 112.
It has.

【0007】また、2段目は第1循環経路110の下流
の第2循環経路120によるものであり、ポンプ121
と膜利用型濾過手段122を備えている。1段目の循環
経路110で比較的大きな油滴が分離された洗浄液L1
01が第2循環経路120の経路内に流入して濾過を行
う。濾過された油成分の除去された洗浄液は戻し経路1
31により洗浄槽101の中に戻される。
The second stage is due to the second circulation path 120 downstream of the first circulation path 110, and the pump 121
And a membrane-utilizing filtration means 122. Cleaning liquid L1 in which relatively large oil droplets have been separated in the first circulation path 110
01 flows into the path of the second circulation path 120 to perform filtration. The cleaning liquid from which the filtered oil component has been removed is returned through the return path 1
It is returned to the washing tank 101 by 31.

【0008】浮上油回収手段112の原理は、図5に示
すように、滞留槽112a内に油滴L111a同士が接
触しやすいように洗浄液L110を溜めて、水成分L1
12と油滴L111aの比重差によって微小な油滴(例
えば数〜数十μm)を集合させて大きな油滴(例えば数
百μm)として上方に浮上させ、洗浄液L101中の水
成分L112と油成分L111を分離するものである。
滞留槽112aの中では、図5(a)、図5(b)、図
5(c)の順に油成分L111が分離されていく。
As shown in FIG. 5, the principle of the floating oil recovery means 112 is that the cleaning liquid L110 is stored in the retention tank 112a so that the oil droplets L111a are easily contacted with each other, and the water component L1.
Small oil droplets (for example, several to several tens of μm) are gathered by the specific gravity difference between the oil droplets L12 and the oil droplets L111a and floated upward as large oil droplets (for example, several hundred μm). L111 is separated.
In the retention tank 112a, the oil component L111 is separated in the order of FIG. 5 (a), FIG. 5 (b), and FIG. 5 (c).

【0009】さらに、図5には示さなかったが、滞留槽
内に極細繊維構造体のコアレッサーフィルターを備え、
このコアレッサーフィルターに洗浄液L101を透過さ
せることによって油滴L111aをさらに大きくして比
重差分離を促進させているものもある。
Further, although not shown in FIG. 5, a coalescer filter of an ultrafine fiber structure is provided in the retention tank,
In some cases, the washing liquid L101 is passed through this coalescer filter to further increase the oil droplet L111a to promote the separation of the specific gravity.

【0010】次に、膜利用型濾過手段122としては、
多数本の中空糸膜124を束ねたものを限外濾過膜とし
て用いた中空糸膜モジュール123を使用しており、第
2循環経路120中に設けられたポンプ121にて供給
された洗浄液を中空糸膜124の膜壁の内側表面に対し
て平行に流し、そのときの油水の一部が膜壁を通ること
で濾過するクロスフロータイプとなっている。このクロ
スフロータイプとは、膜利用型濾過手段122を長期間
運転するために、中空糸膜モジュール123を濾過対象
となる洗浄液の循環経路中(循環経路120)に設け、
常に膜に対して平行の流れをつくって膜表面の汚染やつ
まりを最小限に予防する方法である。
Next, as the membrane-utilizing type filtration means 122,
A hollow fiber membrane module 123 using a bundle of a large number of hollow fiber membranes 124 as an ultrafiltration membrane is used, and the cleaning liquid supplied by a pump 121 provided in the second circulation path 120 is hollow. It is a cross-flow type in which the thread film 124 flows parallel to the inner surface of the membrane wall and a part of oil water at that time is filtered by passing through the membrane wall. In the cross flow type, the hollow fiber membrane module 123 is provided in the circulation path (circulation path 120) of the cleaning liquid to be filtered in order to operate the membrane-utilizing type filtration means 122 for a long period of time.
It is a method to always create a flow parallel to the membrane to minimize contamination and clogging of the membrane surface.

【0011】また、中空糸膜モジュール123内の中空
糸膜124を透過しなかった洗浄液は第2循環経路12
0を循環することになり、油成分濃度が上昇するので、
二次側圧力調整弁113を通り、第1循環経路110に
戻って油成分が浮上油回収手段112により分離され
る。
The cleaning liquid that has not permeated the hollow fiber membranes 124 in the hollow fiber membrane module 123 is in the second circulation path 12.
0 will be circulated, and the oil component concentration will rise, so
The oil component passes through the secondary pressure control valve 113, returns to the first circulation path 110, and the oil component is separated by the floating oil recovery means 112.

【0012】濾過装置100は、従って、洗浄液中に乳
化分散されている油成分も、上記の第1及び第2循環経
路110,120を循環するに従い排出されるので、最
終的にはワークの持ち込んだ油持ち込み量と、浮上油回
収手段112からの油成分排出量が等しくなるように設
計されているものであり、同時に洗浄槽101、第1及
び第2循環経路110,120内の油成分濃度もそれぞ
れの所定値の範囲内で安定するものである。
[0012] In the filtration device 100, therefore, the oil component emulsified and dispersed in the cleaning liquid is also discharged as it circulates through the first and second circulation paths 110 and 120, so that the work is finally brought in. It is designed so that the amount of introduced oil and the amount of oil component discharged from the floating oil recovery means 112 become equal, and at the same time, the oil component concentration in the cleaning tank 101, the first and second circulation paths 110, 120. Also is stable within the range of each predetermined value.

【0013】尚、図4に含まれている構成要素で、説明
が不要なものはその説明を省略したが、125は排出
弁、126,127はそれぞれ、中空糸膜モジュール1
23の一次,二次側圧力計である。
The constituent elements included in FIG. 4 which are not explained are omitted, but 125 is a discharge valve, and 126 and 127 are hollow fiber membrane module 1 respectively.
23 primary and secondary pressure gauges.

【0014】[0014]

【発明が解決しようとする課題】但し、上記に説明した
濾過装置100は、クロスフロータイプの膜利用型濾過
手段122を採用しているとはいえ、長時間の濾過を続
けると、油成分や浮遊汚染物質等により中空糸膜モジュ
ール123の多数本の中空糸膜124の膜が目詰まりを
起こしてしまう。
However, although the filtration device 100 described above employs the cross-flow type membrane-utilizing filtration means 122, if filtration is continued for a long time, oil components and The membranes of the multiple hollow fiber membranes 124 of the hollow fiber membrane module 123 are clogged due to floating contaminants and the like.

【0015】これはクロスフロータイプの濾過方法にお
いては、膜表面の洗浄効果は平行に流れている濾過対象
洗浄液の流速と圧力のバランスにより決定されるもの
で、特に、内循環の中空糸膜を用いたものでは濾過時の
洗浄効果の向上を狙って濾過対象洗浄液の流速を速くし
ようとすると管内抵抗の上昇が大きく、必要とする濾過
圧力も増大してしまい、かえって膜表面に浮遊汚染物質
を付着させてしまう結果になる場合もあるからである。
This is because in the cross-flow type filtration method, the cleaning effect on the membrane surface is determined by the balance between the flow velocity and the pressure of the cleaning liquid to be filtered flowing in parallel. With the one used, when trying to increase the flow rate of the cleaning liquid to be filtered in order to improve the cleaning effect at the time of filtration, the internal resistance of the pipe increases significantly, and the required filtration pressure also increases. This is because it may result in adhesion.

【0016】従って、所定の間隔(例えば10〜60
分)に一回、逆洗弁132を切り換えて高圧エアや膜透
過液を中空糸膜モジュール123の方向に給送すること
(逆洗という)が行われている。
Therefore, at a predetermined interval (for example, 10 to 60)
Once every minute), the backwash valve 132 is switched to feed the high-pressure air or the membrane permeate to the hollow fiber membrane module 123 (referred to as backwash).

【0017】ここで133は中空糸膜モジュール123
と逆洗弁132との間に配設された逆洗タンクであり、
中空糸膜モジュール123により濾過された膜透過液を
逆洗流体として利用するために一次的に蓄積するもの
で、逆洗時に高圧エアをこの逆洗タンク133に供給す
ることにより内部の膜透過液(逆洗流体)が中空糸膜1
24の膜の逆方向から透過させて目詰まりを解消させる
ものである。
Here, 133 is a hollow fiber membrane module 123.
And a backwash valve 132 between the backwash valve and
The membrane permeate filtered by the hollow fiber membrane module 123 is temporarily accumulated for use as a backwash fluid, and by supplying high-pressure air to the backwash tank 133 during backwash, the inner membrane permeate (Backwash fluid) is hollow fiber membrane 1
It is intended to eliminate clogging by allowing the film of 24 to pass from the opposite direction.

【0018】また逆洗時はモータ121とモータ111
は停止しているので、中空糸膜124の膜を逆方向に透
過し、油成分と汚染物質の混入した逆洗流体が第2循環
経路120及び第1循環経路110内から排出経路10
3を逆流して洗浄槽101に戻されることのないように
排出弁125より循環経路より経路外へと排出してい
る。
During backwashing, the motor 121 and the motor 111 are also used.
Is stopped, the backwash fluid that has permeated through the membrane of the hollow fiber membrane 124 in the opposite direction, and in which the oil component and the contaminants are mixed, is discharged from the second circulation path 120 and the first circulation path 110 to the discharge path 10
3 is discharged to the outside of the circulation path from the discharge valve 125 so that it does not flow back to the cleaning tank 101.

【0019】しかしながら、逆洗タンク133内部に蓄
積される逆洗流体の量には限度があり、1回の逆洗によ
り完全に汚染物質を膜表面から剥し取ることの不可能な
場合がある。また、逆洗によって膜表面から剥し取られ
装置内に残存した汚染物質は中空糸膜の膜表面に再付着
しやすい。
However, the amount of backwash fluid accumulated in the backwash tank 133 is limited, and it may not be possible to completely remove contaminants from the membrane surface by one backwash. Further, contaminants peeled off from the membrane surface by backwashing and remaining in the device are likely to be reattached to the membrane surface of the hollow fiber membrane.

【0020】従って、逆洗タンク133内部に蓄積され
た逆洗流体を膜の透過方向と逆方向に流すだけでは膜に
付着した汚染物質を完全に除去することは困難である。
Therefore, it is difficult to completely remove the contaminants attached to the membrane simply by flowing the backwash fluid accumulated in the backwash tank 133 in the direction opposite to the permeation direction of the membrane.

【0021】そして、この状態で濾過装置を再稼動させ
ると残留している汚染物質が循環経路内を再循環し始め
て膜表面の目詰まりを促進させてしまうという結果にな
っていた。
Then, when the filtration device is restarted in this state, the remaining pollutants start to recirculate in the circulation path and accelerate the clogging of the membrane surface.

【0022】従って従来の逆洗方法により、より完璧に
汚染物質を除去しようとすると逆洗の回数を増やした
り、逆洗時に流す逆洗流体の量を増加させたりしなけれ
ばならない。
Therefore, in order to more completely remove contaminants by the conventional backwashing method, it is necessary to increase the number of times of backwashing and increase the amount of backwashing fluid to be flown during backwashing.

【0023】このことは、逆洗のオペレーションコスト
を増大させ、装置の稼動率を低下させると共に、逆洗時
に発生する廃液量を増大させることになり、省資源化や
環境保護の観点からも改善を必要とする問題であった。
This increases the operation cost of backwashing, lowers the operating rate of the apparatus, and increases the amount of waste liquid generated during backwashing, which is an improvement from the viewpoint of resource saving and environmental protection. Was a problem that needed.

【0024】本発明は上記従来技術の問題を解決するた
めになされたもので、その目的とするところは、逆洗の
効率を向上させることにあり、効果的に膜表面に付着し
た汚染物質を除去し、また除去した汚染物質の膜への再
付着を防止し、さらに排液量を減少させることが可能な
濾過装置及び濾過装置の洗浄方法を提供する。
The present invention has been made to solve the above-mentioned problems of the prior art, and its purpose is to improve the efficiency of backwashing, and to effectively remove the contaminants adhering to the film surface. (EN) Provided are a filter device and a method for cleaning a filter device, which are capable of removing the contaminants, preventing the adhered contaminants from reattaching to the membrane, and further reducing the amount of discharged liquid.

【0025】[0025]

【課題を解決するための手段】上記目的を達成するため
に、本発明にあっては、循環経路と、この循環経路内に
備えられた膜利用型濾過手段と、該膜利用型濾過手段の
膜の透過方向を逆転させる逆洗手段とを備えた濾過装置
において、逆洗時に、前記逆洗手段により膜の透過側の
高圧状態を維持した状態で、前記循環経路内の流体を循
環させることを特徴とする。
In order to achieve the above object, in the present invention, a circulation path, a membrane-utilizing type filtration means provided in the circulation route, and a membrane-utilizing type filtration means are provided. In a filtration device equipped with a backwash means for reversing the permeation direction of the membrane, during backwashing, circulating the fluid in the circulation path while maintaining a high pressure state on the permeate side of the membrane by the backwash means. Is characterized by.

【0026】従って、逆洗手段を作動させると、膜の表
面に付着した汚染物質は、膜の透過側の高圧状態と、逆
洗時に循環する逆洗流体により、膜の表面から除去され
る。除去された汚染物質は逆洗流体の中に混在し循環経
路を循環するが、透過側が高圧状態に保たれ濾過ができ
ないので、汚染物質の膜の表面への再付着量が低減す
る。
Therefore, when the backwashing means is activated, the contaminants adhering to the surface of the membrane are removed from the surface of the membrane by the high pressure state on the permeate side of the membrane and the backwashing fluid circulating during the backwashing. The removed contaminants are mixed in the backwash fluid and circulate in the circulation path, but since the permeate side is kept in a high pressure state and filtration is not possible, the amount of contaminants redeposited on the surface of the membrane is reduced.

【0027】前記循環経路としての膜利用型濾過手段の
濾過対象流体の流入経路と流出経路とを接続する独立し
たバイパス経路と、このバイパス経路内の流体を循環さ
せるポンプと、前記バイパス経路内の流体を排出する排
出弁とを備え、逆洗時に、前記逆洗手段により膜の透過
側の高圧状態を維持し状態で前記バイパス経路により流
体を循環させ、その後前記排出弁より該流体を排出可能
とすることを特徴とすることも好適である。
An independent bypass path connecting the inflow path and the outflow path of the fluid to be filtered of the membrane-utilizing filtration means as the circulation path, a pump for circulating the fluid in the bypass path, and the bypass path in the bypass path. A drain valve for discharging the fluid is provided, and during backwashing, the high pressure state on the permeate side of the membrane is maintained by the backwashing means, the fluid is circulated through the bypass path, and then the fluid can be discharged from the drain valve. It is also preferable that:

【0028】これによると、除去された汚染物質は逆洗
流体の中に混在して独立したバイパス経路を循環して、
その他の経路へは流出しない。汚染物質が混在した逆洗
流体は排出弁より排出される。
According to this, the removed pollutants are mixed in the backwash fluid and circulate through the independent bypass path,
It does not flow to other routes. The backwash fluid containing contaminants is discharged from the discharge valve.

【0029】前記バイパス経路に、循環する流体中の汚
染物質を取り除くフィルター手段を備えたことも好適で
ある。
It is also preferable that the bypass path is provided with a filter means for removing contaminants in the circulating fluid.

【0030】これによると、逆洗流体が循環している状
態でその中に混在する汚染物質を除去することができる
ので、逆洗流体を排出することなく汚染物質を取り除く
ことができる。
According to this, since the contaminants mixed therein can be removed while the backwash fluid is circulating, the contaminants can be removed without discharging the backwash fluid.

【0031】また、濾過装置の洗浄方法では、循環経路
と、この循環経路内に備えられた膜利用型濾過手段と、
該膜利用型濾過手段の膜の透過方向を逆転させる逆洗手
段とを備え、逆洗時に、前記逆洗手段により膜の透過側
の高圧状態を維持した状態で、前記循環経路内の流体を
循環させる。
Further, in the method for cleaning the filtration device, the circulation path, the membrane-utilizing type filtration means provided in the circulation path,
Backwashing means for reversing the permeation direction of the membrane of the membrane-utilizing filtration means, and during backwashing, the fluid in the circulation path is kept in a state of maintaining a high pressure state on the permeate side of the membrane by the backwashing means. Circulate.

【0032】さらに、前記循環経路としての膜利用型濾
過手段の濾過対象流体の流入経路と流出経路とを接続す
る独立したバイパス経路と、このバイパス経路内の流体
を循環させるポンプと、前記バイパス経路内の流体を排
出する排出弁とを備え、逆洗時に、前記逆洗手段により
膜の透過側の高圧状態を維持し状態で前記バイパス経路
により流体を循環させ、その後前記排出弁より該流体を
排出することも好適である。
Further, an independent bypass path connecting the inflow path and the outflow path of the fluid to be filtered of the membrane-utilizing type filtration means as the circulation path, a pump for circulating the fluid in the bypass path, and the bypass path A discharge valve for discharging the fluid in the inside, and at the time of backwashing, the high pressure state on the permeate side of the membrane is maintained by the backwashing means and the fluid is circulated through the bypass path, and then the fluid is discharged from the discharge valve. It is also suitable to discharge.

【0033】さらに、前記濾過装置のバイパス経路に、
循環する流体中の汚染物質を取り除くフィルター手段を
備え、逆洗時にバイパス経路内を循環する流体中の汚染
物質を取り除くことも好適である。
Further, in the bypass path of the filtering device,
It is also preferable to provide a filter means for removing contaminants in the circulating fluid so as to remove contaminants in the fluid circulating in the bypass passage during backwashing.

【0034】[0034]

【発明の実施の形態】以下に本発明を図示の実施の形態
に基づいて説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on the illustrated embodiment.

【0035】(実施の形態1)図1は本発明を適用した
濾過装置の第1の実施の形態である。この濾過装置S1
は、本発明により膜利用型濾過手段1の逆洗時における
問題を解決することを特徴とするものであり、従来技術
の項で一例として説明した図4の濾過装置100から逆
洗に関係する構成部分を抜粋し、それに本発明特有の構
成を付加したものである。
(Embodiment 1) FIG. 1 shows a first embodiment of a filtration device to which the present invention is applied. This filtering device S1
The present invention is characterized by solving the problem at the time of backwashing the membrane-utilizing type filtration means 1 according to the present invention, and is related to backwashing from the filtering device 100 of FIG. 4 described as an example in the section of the prior art. The constituent parts are excerpted and the structure peculiar to the present invention is added thereto.

【0036】従って、図の左側の不図示の構成は、従来
技術に説明したものと同様の構成であっても良いし、ま
たこの構成に限定されるものではなく、本発明は様々な
構成の装置に適用可能なものである。
Therefore, the structure (not shown) on the left side of the drawing may be the same as that described in the prior art, and is not limited to this structure, and the present invention has various structures. It is applicable to the device.

【0037】図1において、1は膜利用型濾過手段であ
り、内部に中空糸膜1aを複数本束ねたものを濾過膜と
して用いた中空糸膜モジュール1bを使用している。
In FIG. 1, reference numeral 1 denotes a membrane-utilizing type filtration means, which uses a hollow fiber membrane module 1b in which a plurality of hollow fiber membranes 1a are bundled as a filtration membrane.

【0038】この膜利用型濾過手段1は濾過対象流体の
流入経路2と流出経路3を備えたクロスフロータイプの
ものであり、濾過動作中は常に濾過対象流体が中空糸膜
モジュール1bの内部を中空糸膜1aの方向と平行に流
れている。中空糸膜1aの膜を透過した膜透過液は、そ
の後の使用のために排出経路4を流れて矢印A1方向へ
と排出されていく。
The membrane-utilizing filtration means 1 is of a cross-flow type having an inflow path 2 and an outflow path 3 for the fluid to be filtered, and the fluid to be filtered always flows through the hollow fiber membrane module 1b during the filtering operation. It flows in parallel with the direction of the hollow fiber membrane 1a. The membrane-permeated liquid that has permeated the hollow fiber membrane 1a flows through the discharge path 4 and is discharged in the direction of arrow A1 for subsequent use.

【0039】5は排出経路4の途中に設けられ、逆洗時
に膜を逆流する逆洗流体として利用される膜透過液を一
時的に蓄える逆洗タンクである。
Reference numeral 5 denotes a backwash tank provided in the middle of the discharge path 4 for temporarily storing a membrane permeate used as a backwash fluid for backwashing the membrane during backwash.

【0040】6は通常の濾過時と逆洗を行う時に切り換
わる切換弁であり、逆洗時のみ矢印A4の方向に圧縮気
体としての高圧空気を逆洗タンク5へと流入させて逆洗
タンク5内部に蓄えられた膜透過液(逆洗流体)を逆流
させ、またさらに必要であれば、高圧空気自体も中空糸
膜モジュール1bの透過側へと流入して透過側を高圧状
態とすることができるものである。
Reference numeral 6 denotes a switching valve that switches between normal filtration and backwashing. Only during backwashing, high pressure air as a compressed gas is made to flow into the backwashing tank 5 in the direction of arrow A4. 5 Reverse flow of the membrane permeation liquid (backwashing fluid) stored inside, and if necessary, high pressure air itself also flows into the permeate side of the hollow fiber membrane module 1b to bring the permeate side into a high pressure state. Is something that can be done.

【0041】これらの排出経路4、逆洗タンク5及び切
換弁6等により逆洗手段が構成されている。
The discharge path 4, the backwash tank 5, the switching valve 6 and the like constitute a backwash means.

【0042】7は流出経路3に設けられた経路切換弁で
あり、通常の濾過時には経路8へと流体を流し、逆洗時
に、循環経路として利用される経路9へと流体を流すよ
うに切り換わる。
Reference numeral 7 denotes a path switching valve provided in the outflow path 3, which is opened so that the fluid flows to the path 8 during normal filtration and to the path 9 used as a circulation path during backwashing. Replace

【0043】10は通常時に膜利用型濾過手段1に濾過
対象流体をクロスフローさせるための循環経路であり、
流体は経路11とポンプ12及び流入経路2を通過して
膜利用型濾過手段1に再度濾過対象流体が循環して流入
する。
Reference numeral 10 is a circulation path for allowing the fluid to be filtered to cross-flow through the membrane-utilizing filtration means 1 at a normal time
The fluid passes through the path 11, the pump 12, and the inflow path 2, and the fluid to be filtered circulates again into the membrane-utilizing type filtration means 1.

【0044】また、13は、経路8を流れてきた流体の
一部を矢印A3方向の不図示の循環経路へと分岐させる
ための圧力調整弁である。
Reference numeral 13 is a pressure regulating valve for branching a part of the fluid flowing through the path 8 to a circulation path (not shown) in the direction of arrow A3.

【0045】一方、逆洗時に経路9へ流入した流体も経
路11の下流側とポンプ12及び流入経路2を通過して
膜利用型濾過手段1に再度循環して流入する。また、1
4は逆洗時の汚染物質の混在した流体を排出するための
排出弁である。また、この逆洗時の循環経路を独立した
バイパス経路K1と呼ぶ。
On the other hand, the fluid that has flowed into the path 9 during the backwash also passes through the downstream side of the path 11, the pump 12 and the inflow path 2 and is circulated again into the membrane-utilizing filtration means 1. Also, 1
Reference numeral 4 is a discharge valve for discharging a fluid containing contaminants during backwashing. Further, the circulation path during the backwash is called an independent bypass path K1.

【0046】上記の構成の濾過装置S1における作用を
通常の濾過時の場合から以下に説明していく。通常の濾
過時においては、濾過対象流体は矢印A2から経路11
に流入し、ポンプ12で搬送され流入経路2を経て膜利
用型濾過手段1にクロスフローの様式で流入し、膜を透
過した膜透過液は排出経路4から排出され、膜を透過し
なかった流体は流出経路3により経路切換弁7、経路8
及び循環経路10を流れ再び経路11へと戻るように流
れ、この経路を何度も循環しながら膜利用型濾過手段1
で濾過される。この時流体の一部が矢印A3の方向へと
分岐して流れていくことは上記した通りである。
The operation of the filtration device S1 having the above-described structure will be described below from the case of normal filtration. During normal filtration, the fluid to be filtered is from the arrow A2 to the path 11
The membrane permeated liquid, which was transported by the pump 12 and passed through the inflow route 2 into the membrane-utilizing type filtration means 1 in a cross-flow manner, was permeated through the membrane and discharged through the discharge route 4, and did not permeate through the membrane. The fluid flows through the outflow path 3, the path switching valve 7, the path 8
And the circulation route 10 to return to the route 11 again, and the membrane-utilizing filtration means 1 is circulated through this route many times.
And filtered. At this time, a part of the fluid branches in the direction of the arrow A3 and flows, as described above.

【0047】次に、本発明の構成による濾過装置の洗浄
方法として、上記構成の逆洗手段を利用した逆洗方法を
説明する。まず、逆洗時には経路切換弁7を逆洗側に切
り換える。ポンプ12はこの状態で一端停止させること
が好ましいが、停止させないで稼動を継続させてもよ
い。
Next, a backwashing method using the backwashing means having the above construction will be described as a method for washing the filtering device according to the construction of the present invention. First, during backwashing, the path switching valve 7 is switched to the backwashing side. The pump 12 is preferably stopped once in this state, but it may be continued without being stopped.

【0048】次に切換弁6を逆洗側に切り換えて矢印A
4に示す高圧空気を逆洗タンク5へと流入させて逆洗タ
ンク5に蓄積されていた逆洗流体を排出経路4から中空
糸膜モジュール1bへと逆流させる。
Next, the switching valve 6 is switched to the backwash side and the arrow A
The high-pressure air shown in FIG. 4 is caused to flow into the backwash tank 5 and the backwash fluid accumulated in the backwash tank 5 is backflowed from the discharge path 4 to the hollow fiber membrane module 1b.

【0049】逆洗タンク5に蓄積されていた逆洗流体を
逆流させると、一時的に経路3,9,2に存在する流体
が過剰になるので、適宜排出弁14を開け、流入した逆
洗流体の過剰分を排出する。また、この時汚染物質の混
在した逆洗流体が経路11を流れて経路10等へと逆流
することを完全に防止するために、経路11に逆止弁を
設けても良い。
When the backwashing fluid stored in the backwashing tank 5 is backflowed, the fluid existing in the paths 3, 9 and 2 temporarily becomes excessive. Drain excess fluid. Further, at this time, a check valve may be provided in the path 11 in order to completely prevent the backwashing fluid containing the contaminants from flowing through the path 11 and backflowing to the path 10 or the like.

【0050】ここで、逆洗時の切換弁6及び排出弁14
の操作方法は、いくつかの方法を採用することができ
る。
Here, the switching valve 6 and the discharge valve 14 at the time of backwashing
As the operation method of, several methods can be adopted.

【0051】(a)逆洗タンク5内の逆洗流体が完全に
なくなるまで一気に逆洗を行い、また排出弁14も流入
経路2と膜利用型濾過手段1内の流体(逆洗流体)が完
全に排出されるまで開けておく。ここで排出弁14を閉
じるが、切換弁6は逆洗側にしておき、高圧空気により
膜の透過側の圧力を高圧状態に維持しておく。
(A) Backwashing is performed all at once until the backwashing fluid in the backwashing tank 5 is completely exhausted, and the discharge valve 14 also has a fluid (backwashing fluid) in the inflow path 2 and the membrane-utilizing type filtration means 1. Keep it open until it is completely discharged. Here, the discharge valve 14 is closed, but the switching valve 6 is left on the backwash side, and the pressure on the permeate side of the membrane is kept high by the high pressure air.

【0052】(b)逆洗タンク5内の逆洗流体の一部を
残して逆洗を行い、そこで排出弁14を閉じる。経路1
1に不図示の逆止弁がある場合には切換弁6を逆洗側に
しておくことにより、膜の透過側の圧力を高圧状態に維
持しておく。
(B) Backwashing is performed while leaving a part of the backwashing fluid in the backwashing tank 5, and the discharge valve 14 is closed there. Route 1
If there is a check valve (not shown) in 1, the switching valve 6 is set to the backwash side to maintain the pressure on the permeate side of the membrane in a high pressure state.

【0053】この様に上記(a),(b)等の操作方法
を採用することができるが、本発明ではさらにこの状態
からポンプ12を作動させて、逆洗流体を循環経路K1
中で循環させて膜利用型濾過手段1内を流れさせる。但
し上記(a)の弁操作を行った場合には経路内に流体が
存在しないので、矢印A2より濾過対象流体を供給させ
て逆洗流体として循環させる。
As described above, the operating methods (a), (b) and the like can be adopted, but in the present invention, the pump 12 is further operated from this state, and the backwash fluid is circulated through the circulation path K1.
It is circulated in the membrane-utilizing type filtration means 1 to flow. However, when the valve operation of (a) above is performed, there is no fluid in the path, so the fluid to be filtered is supplied from the arrow A2 and circulated as the backwash fluid.

【0054】すると、膜の透過側が高圧状態であるた
め、循環する逆洗流体は膜を通過することができずに濾
過は行われないが、先の逆洗で剥離された汚染物質で排
出されずに残留したもの、及び循環により新たに剥離し
た汚染物質が、循環する逆洗流体中に混在して存在する
ようになる。また、膜の透過側(中空糸膜においては外
径側)の圧力が高いので膜表面への汚染物質の再付着も
発生せず、循環する流体の流れにより表面の汚染物質も
除去される。
Then, since the permeate side of the membrane is in a high pressure state, the circulating backwash fluid cannot pass through the membrane and is not filtered, but is discharged by the pollutants separated by the previous backwash. The residual substances and the contaminants newly separated by the circulation are mixedly present in the circulating backwash fluid. Further, since the pressure on the permeate side of the membrane (outer diameter side in the hollow fiber membrane) is high, reattachment of contaminants to the membrane surface does not occur, and the contaminants on the surface are removed by the circulating fluid flow.

【0055】循環経路K1における逆洗流体の循環が終
了したら、汚染物質が含まれる逆洗流体を排出弁14か
ら完全に排出させれば良い。
When the circulation of the backwashing fluid in the circulation route K1 is completed, the backwashing fluid containing contaminants may be completely discharged from the discharge valve 14.

【0056】(実施の形態2)図2に本発明を適用した
第2の実施の形態を示す。第2の実施の形態の濾過装置
S2は上記第1実施の形態で説明した濾過装置S1と、
基本構成は同じであるが、経路9に流体中に浮遊してい
る汚染物質を取り除くフィルター手段20を備えたもの
である。
(Second Embodiment) FIG. 2 shows a second embodiment to which the present invention is applied. The filtering device S2 of the second embodiment is the same as the filtering device S1 described in the first embodiment.
The basic structure is the same, but the path 9 is provided with a filter means 20 for removing contaminants suspended in the fluid.

【0057】図2において、第1の実施の形態と同じ構
成部分には同じ符号を付して第1の実施の形態と同様な
ものとして扱い、その詳細な説明を省略する。
In FIG. 2, the same components as those in the first embodiment are designated by the same reference numerals and treated as the same as those in the first embodiment, and detailed description thereof will be omitted.

【0058】この実施の形態においては、逆洗時に逆洗
流体が循環経路K2を循環する際に逆洗流体の中に含ま
れる汚染物質がフィルター手段20により取り除かれる
ので、排出弁14を開けることなく逆洗を行い、かつ汚
染物質を除去することが可能となるものである。
In this embodiment, since the contaminants contained in the backwash fluid are removed by the filter means 20 when the backwash fluid circulates in the circulation path K2 during the backwash, the discharge valve 14 should be opened. Without this, it is possible to carry out backwashing and remove contaminants.

【0059】従って、逆洗流体が循環している状態でそ
の中に混在する汚染物質を除去することができるので、
逆洗流体を排出することなく汚染物質を取り除くことが
でき、逆洗による廃液量を低減することができる。
Therefore, the contaminants mixed in the backwashing fluid can be removed while the backwashing fluid is circulating.
Contaminants can be removed without discharging the backwashing fluid, and the amount of waste liquid due to backwashing can be reduced.

【0060】(実施の形態3)図3に本発明を適用した
第3の実施の形態を示す。第3の実施の形態の濾過装置
S3は上記第2の実施の形態で説明した濾過装置S2
と、基本構成は同じであるが流出経路3に設けられた経
路切換弁7のかわりに、経路8に経路遮断弁7bを設け
たものである。
(Third Embodiment) FIG. 3 shows a third embodiment to which the present invention is applied. The filtering device S3 of the third embodiment is the filtering device S2 described in the second embodiment.
Although the basic configuration is the same, a path shutoff valve 7b is provided in the path 8 instead of the path switching valve 7 provided in the outflow path 3.

【0061】濾過装置S3では、通常の濾過時は経路遮
断弁7bが開いているが、逆洗時には経路8を遮断す
る。その他の構成は第2の実施の形態と同様である。
In the filtering device S3, the path shutoff valve 7b is opened during normal filtration, but shuts off the path 8 during backwashing. Other configurations are the same as those in the second embodiment.

【0062】しかし、濾過装置S3では、通常濾過時に
も循環する流体の一部がフィルター手段20を通過する
ため、第2の実施の形態の濾過装置S2よりさらに膜利
用型濾過手段1の目づまり抑制効果が期待できる。
However, in the filtering device S3, a part of the circulating fluid also passes through the filter means 20 even during normal filtration, and therefore the clogging of the membrane-utilizing type filtering means 1 is further reduced as compared with the filtering device S2 of the second embodiment. A suppression effect can be expected.

【0063】[0063]

【発明の効果】以上のように説明された本発明による
と、濾過装置の逆洗時において、逆洗流体の使用量が少
なくても、膜の表面に付着した汚染物質が逆洗流体の循
環により取り除かれるので逆洗効率が向上する。また、
除去された汚染物質は逆洗流体の中に混在して循環経路
を循環するので、汚染物質の膜の表面への再付着量が低
減する。
As described above, according to the present invention, when backwashing the filtration device, the contaminants adhering to the surface of the membrane are circulated in the backwash fluid even when the backwash fluid is used in a small amount. The backwashing efficiency is improved because it is removed by. Also,
The removed contaminants are mixed in the backwash fluid and circulate in the circulation path, so that the amount of contaminants redeposited on the surface of the film is reduced.

【0064】独立したバイパス経路を備えることで、除
去された汚染物質を他の経路へ流出させずに逆洗を行え
る。また、汚染物質が混在した逆洗流体は排出弁より排
出される。
By providing an independent bypass path, backwashing can be performed without the removed contaminants flowing out to other paths. In addition, the backwash fluid containing contaminants is discharged from the discharge valve.

【0065】バイパス経路にフィルター手段を備えたも
のは、逆洗流体が循環している状態でその中に混在する
汚染物質を除去することができるので、逆洗流体を排出
することなく汚染物質を取り除くことができ、逆洗によ
る廃液量を低減することができる。
In the case where the bypass means is provided with the filter means, the contaminants mixed therein can be removed while the backwash fluid is circulating, so that the contaminants can be removed without discharging the backwash fluid. It can be removed and the amount of waste liquid due to backwashing can be reduced.

【図面の簡単な説明】[Brief description of drawings]

【図1】図1は本発明の第1の実施の形態に係る濾過装
置の図。
FIG. 1 is a diagram of a filtration device according to a first embodiment of the present invention.

【図2】図2は本発明の第2の実施の形態に係る濾過装
置の図。
FIG. 2 is a diagram of a filtration device according to a second embodiment of the present invention.

【図3】図3は本発明の第3の実施の形態に係る濾過装
置の図。
FIG. 3 is a diagram of a filtration device according to a third embodiment of the present invention.

【図4】図4は従来の濾過装置の図。FIG. 4 is a diagram of a conventional filtration device.

【図5】図5は浮上油回収手段の説明図。FIG. 5 is an explanatory diagram of floating oil recovery means.

【符号の説明】[Explanation of symbols]

1 膜利用型濾過手段 1a 中空糸膜 1b 中空糸膜モジュール 2 流入経路 3 流出経路 4 排出経路 5 逆洗タンク 6 切換弁 7 経路切換弁 8,9,11 経路 10 循環経路 12 ポンプ 13 圧力調整弁 14 排出弁 20 フィルター手段 A1 矢印 K1 バイパス経路 S1 濾過装置 1 Membrane Utilizing Filtration Means 1a Hollow Fiber Membrane 1b Hollow Fiber Membrane Module 2 Inflow Path 3 Outflow Path 4 Discharge Path 5 Backwash Tank 6 Switching Valve 7 Path Switching Valve 8, 9, 11 Path 10 Circulation Path 12 Pump 13 Pressure Control Valve 14 Discharge valve 20 Filter means A1 Arrow K1 Bypass path S1 Filtration device

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 循環経路と、この循環経路内に備えられ
た膜利用型濾過手段と、該膜利用型濾過手段の膜の透過
方向を逆転させる逆洗手段とを備えた濾過装置におい
て、 逆洗時に、前記逆洗手段により膜の透過側の高圧状態を
維持した状態で、前記循環経路内の流体を循環させるこ
とを特徴とする濾過装置。
1. A filtration apparatus comprising: a circulation path; a membrane-utilizing filtration means provided in the circulation passage; and a backwashing means for reversing the permeation direction of the membrane of the membrane-utilizing filtration means. A filtration device, wherein the fluid in the circulation path is circulated while maintaining a high pressure state on the permeate side of the membrane by the backwashing means at the time of washing.
【請求項2】 前記循環経路としての膜利用型濾過手段
の濾過対象流体の流入経路と流出経路とを接続する独立
したバイパス経路と、 このバイパス経路内の流体を循環させるポンプと、 前記バイパス経路内の流体を排出する排出弁とを備え、 逆洗時に、前記逆洗手段により膜の透過側の高圧状態を
維持し状態で前記バイパス経路により流体を循環させ、
その後前記排出弁より該流体を排出可能とすることを特
徴とする請求項1に記載の濾過装置。
2. An independent bypass path connecting an inflow path and an outflow path of a fluid to be filtered of a membrane-utilizing filtration means as the circulation path, a pump for circulating the fluid in the bypass path, and the bypass path. And a discharge valve for discharging the fluid in the inside, and at the time of backwashing, the high pressure state on the permeate side of the membrane is maintained by the backwashing means, and the fluid is circulated through the bypass path,
The filter device according to claim 1, wherein the fluid can be discharged from the discharge valve thereafter.
【請求項3】 前記バイパス経路に、循環する流体中の
汚染物質を取り除くフィルター手段を備えたことを特徴
とする請求項2に記載の濾過装置。
3. The filter device according to claim 2, wherein the bypass path is provided with a filter means for removing contaminants in the circulating fluid.
【請求項4】 循環経路と、この循環経路内に備えられ
た膜利用型濾過手段と、該膜利用型濾過手段の膜の透過
方向を逆転させる逆洗手段とを備えた濾過装置の洗浄方
法であって、 逆洗時に、前記逆洗手段により膜の透過側の高圧状態を
維持した状態で、前記循環経路内の流体を循環させるこ
とを特徴とする濾過装置の洗浄方法。
4. A method of cleaning a filtration device comprising: a circulation path; a membrane-utilizing filtration means provided in the circulation passage; and a backwashing means for reversing the permeation direction of the membrane of the membrane-utilizing filtration means. A method for cleaning a filtration device, characterized in that the fluid in the circulation path is circulated while maintaining a high pressure state on the permeate side of the membrane by the backwashing means during the backwashing.
【請求項5】 前記循環経路としての膜利用型濾過手段
の濾過対象流体の流入経路と流出経路とを接続する独立
したバイパス経路と、このバイパス経路内の流体を循環
させるポンプと、前記バイパス経路内の流体を排出する
排出弁とを備えた濾過装置の洗浄方法であって、 逆洗時に、前記逆洗手段により膜の透過側の高圧状態を
維持し状態で前記バイパス経路により流体を循環させ、
その後前記排出弁より該流体を排出することを特徴とす
る濾過装置の洗浄方法。
5. An independent bypass path that connects an inflow path and an outflow path of a fluid to be filtered of a membrane-utilizing type filtration means as the circulation path, a pump that circulates the fluid in the bypass path, and the bypass path. A method of cleaning a filtration device comprising a discharge valve for discharging the fluid inside, wherein the fluid is circulated through the bypass route while maintaining a high pressure state on the permeate side of the membrane during the backwashing. ,
Thereafter, the fluid is discharged from the discharge valve, and a method for cleaning a filtering device.
【請求項6】 前記濾過装置のバイパス経路に、循環す
る流体中の汚染物質を取り除くフィルター手段を備え、 逆洗時にバイパス経路内を循環する流体中の汚染物質を
取り除くことを特徴とする請求項5に記載の濾過装置の
洗浄方法。
6. A bypass means of the filtering device is provided with a filter means for removing contaminants in the circulating fluid, and contaminants in the fluid circulating in the bypass passage are removed during backwashing. The method for cleaning a filtration device according to item 5.
JP08099196A 1996-03-08 1996-03-08 Filtration device and method for cleaning filtration device Expired - Fee Related JP3440684B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP08099196A JP3440684B2 (en) 1996-03-08 1996-03-08 Filtration device and method for cleaning filtration device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08099196A JP3440684B2 (en) 1996-03-08 1996-03-08 Filtration device and method for cleaning filtration device

Publications (2)

Publication Number Publication Date
JPH09239246A true JPH09239246A (en) 1997-09-16
JP3440684B2 JP3440684B2 (en) 2003-08-25

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ID=13733977

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Country Link
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Cited By (6)

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Publication number Priority date Publication date Assignee Title
JP2009074548A (en) * 2007-09-18 2009-04-09 Man Diesel Se Cleaning of lubricant and device and method for lubricant circuit
KR100958171B1 (en) * 2009-09-30 2010-05-14 주식회사 시노펙스케미코아 Water purifying apparatus using a hollow yarn membrane module
USRE42669E1 (en) 1995-08-11 2011-09-06 Zenon Technology Partnership Vertical cylindrical skein of hollow fiber membranes and method of maintaining clean fiber surfaces
WO2012057155A1 (en) * 2010-10-26 2012-05-03 三菱瓦斯化学株式会社 Crossflow type filtering operation method using ceramic filter
WO2012057156A1 (en) * 2010-10-26 2012-05-03 三菱瓦斯化学株式会社 Crossflow type filtering operation method using ceramic filter
KR20130009768A (en) * 2010-02-17 2013-01-23 플루이드 이큅먼트 디벨롭먼트 컴패니, 엘엘씨 Control scheme for a reverse osmosis system using a hydraulic energy management integration system

Cited By (12)

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Publication number Priority date Publication date Assignee Title
USRE42669E1 (en) 1995-08-11 2011-09-06 Zenon Technology Partnership Vertical cylindrical skein of hollow fiber membranes and method of maintaining clean fiber surfaces
JP2009074548A (en) * 2007-09-18 2009-04-09 Man Diesel Se Cleaning of lubricant and device and method for lubricant circuit
KR100958171B1 (en) * 2009-09-30 2010-05-14 주식회사 시노펙스케미코아 Water purifying apparatus using a hollow yarn membrane module
KR20130009768A (en) * 2010-02-17 2013-01-23 플루이드 이큅먼트 디벨롭먼트 컴패니, 엘엘씨 Control scheme for a reverse osmosis system using a hydraulic energy management integration system
WO2012057155A1 (en) * 2010-10-26 2012-05-03 三菱瓦斯化学株式会社 Crossflow type filtering operation method using ceramic filter
WO2012057156A1 (en) * 2010-10-26 2012-05-03 三菱瓦斯化学株式会社 Crossflow type filtering operation method using ceramic filter
CN103298776A (en) * 2010-10-26 2013-09-11 三菱瓦斯化学株式会社 Crossflow type filtering operation method using ceramic filter
JPWO2012057155A1 (en) * 2010-10-26 2014-05-12 三菱瓦斯化学株式会社 Filtration operation method by cross flow method using ceramic filter
US9150487B2 (en) 2010-10-26 2015-10-06 Mitsubishi Gas Chemical Company, Inc. Crossflow type filtering operation method using ceramic filter
JP5853955B2 (en) * 2010-10-26 2016-02-09 三菱瓦斯化学株式会社 Filtration operation method by cross flow method using ceramic filter
US9266810B2 (en) 2010-10-26 2016-02-23 Mitsubishi Gas Chemical Company, Inc. Crossflow type filtering operation method using ceramic filter
JP5915534B2 (en) * 2010-10-26 2016-05-11 三菱瓦斯化学株式会社 Filtration operation method by cross flow method using ceramic filter

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